Heating tank and hot melting material removing equipment
By designing a heating method for air circulation in the heating tank, the problems of direct emission of high temperature gas and high energy consumption for cold air in the prior art are solved, and more efficient heat utilization and energy consumption reduction are achieved.
Patent Information
- Application Number
- CN202421211765.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-29
- Publication Date
- 2025-03-18
- Estimated Expiration
- 2034-05-29
AI Technical Summary
In the prior art, the high-temperature gas in the tank body is directly discharged to the outside world, and then reheated when the cold air is sucked in, resulting in a higher heat required when the cold air is heated, which increases energy consumption.
A heating tank is designed, including a tank body, an air blower and a first heating element. Air flows out through the air outlet duct, heats through the first heating piece, and returns to the tank body, forming an internal circulation, reducing heat energy loss and improving heat utilization.
The internal circulation of air reduces heat energy loss, improves heat utilization, reduces energy consumption, and improves working efficiency.
Smart Images
Figure CN222637241U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of industrial manufacturing, in particular to a heating tank and hot-melt material removal equipment. Background Art
[0002] In the substrate processing technology in the fields of semiconductors, photovoltaics, etc., it is necessary to first use a hot-melt material to make a mask layer on the substrate surface, and then remove the hot-melt material attached to the substrate surface after the substrate processing is completed.
[0003] When a combination of physical and chemical methods is used to remove hot-melt materials, flowing high-temperature gas is first input into the tank to melt most of the hot-melt materials on the surface of the product and separate them from the product under the blowing of hot air. The hot-melt materials are then cleaned with various organic solvents such as alkalis, alcohols, ethers and their mixtures to complete the removal of the hot-melt materials.
[0004] In the prior art, the high-temperature gas in the tank body is directly discharged to the outside, and then reheated by sucking in cold air, thereby forming a gas circulation. However, the heat required for heating the cold air is relatively high, thereby increasing energy consumption. Utility Model Content
[0005] Therefore, the technical problem to be solved by the utility model is to overcome the defect in the prior art that the high-temperature gas in the tank body is directly discharged to the outside and then reheated by absorbing cold air, and the heat required for heating the cold air is high, thereby increasing energy consumption, thereby providing a heating tank and hot melt material removal equipment.
[0006] In order to solve the above technical problems, the utility model provides a heating tank, comprising: a tank body, wherein a carrier is provided in the tank body, and the carrier is used to place a product with a hot-melt material attached to the surface;
[0007] A blowing member, wherein the blowing member has an air outlet and an air inlet, the air outlet is connected to an air outlet pipe, the air outlet end of the air outlet pipe is connected to the tank body, the air inlet is connected to an air inlet pipe, the air inlet end of the air inlet pipe is connected to the tank body;
[0008] A first heating element is installed in the tank and arranged at the air outlet end of the air outlet pipe, and the first heating element is used to heat the air blown out of the air outlet pipe.
[0009] Optionally, the blowing member is a hot air blower.
[0010] Optionally, the air outlet pipe includes a first main pipe and a plurality of first sub-pipes connected to the first main pipe, and the plurality of first sub-pipes are connected at different positions of the trough body.
[0011] Optionally, the air inlet pipe includes a second main pipe and a plurality of second sub-pipes connected to the second main pipe, and the plurality of second sub-pipes are connected at different positions of the tank body.
[0012] Optionally, the tank body includes an outer box body and an inner box body, the first heating element is arranged between the outer box body and the inner box body, and a ventilation hole is provided on a side wall of the inner box body.
[0013] Optionally, the air outlet end of the air outlet pipe is connected to the cavity between the outer box body and the inner box body, and the ventilation holes are arranged in a uniform array, and the diameter of the ventilation holes gradually decreases from the top of the trough body toward the bottom of the trough body.
[0014] Optionally, it further includes: a collecting box, which is connected to the trough body through a drainage pipe, a second heating element is provided on the outer side of the drainage pipe, and the bottom wall of the trough body is tilted downward toward the drainage pipe.
[0015] Optionally, the liquid discharge pipe is a round tube, and the second heating element is a heating belt wound around the round tube.
[0016] Optionally, it further includes: a windshield box, which is a closed box, and the collection box is arranged in the windshield box.
[0017] A device for removing hot-melt materials comprises: a cleaning tank, a driving member and a heating tank as described in any one of the above schemes, wherein a cleaning system is provided in the cleaning tank, and the cleaning system is used to clean the hot-melt material remaining on the surface of the product after melting in the heating tank, and the driving end of the driving member is suitable for connecting with the product in the tank body in the heating tank, and the driving member is used to move the product in the tank body into the cleaning tank.
[0018] The technical solution of the utility model has the following advantages:
[0019] 1. In the heating tank provided by the utility model, air flows out from the air outlet pipe, and after being heated by the first heating element, the hot-melt material on the surface of the product can be melted and separated from the product. The heated air flows back into the air outlet pipe through the air inlet pipe and the blowing element. The air circulation mode in the tank body is internal circulation, which can reduce heat energy loss and improve heat utilization rate, thereby reducing energy consumption.
[0020] 2. The heating tank provided by the utility model has a hot air blower which drives the air flow and can also perform secondary heating on the heated air. The temperature of the air entering the tank is higher, and the required heating time is shorter, which can improve work efficiency.
[0021] 3. The heating tank and the collection box provided by the utility model can collect the melted hot-melt material to avoid the accumulation of the hot-melt material in the tank body. The second heating element can keep the hot-melt material in a melted state at all times to prevent the hot-melt material from hardening in the drainage pipe, thereby ensuring that the drainage pipe will not be blocked.
[0022] 4. The hot-melt material removal equipment provided by the utility model can remove the hot-melt material on the surface of the product through the heating tank and the cleaning tank, and the air circulation mode in the heating tank is internal circulation, which effectively reduces energy consumption and thus improves economic benefits. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0024] Figure 1 A front view of a heating tank provided in a first embodiment of the utility model;
[0025] Figure 2 for Figure 1 Schematic diagram after the middle and outer boxes are hidden;
[0026] Figure 3 for Figure 2 The top schematic diagram of
[0027] Figure 4 for Figure 2 Bottom schematic diagram of ;
[0028] Figure 5 for Figure 2 A front view of
[0029] Figure 6 for Figure 5 Magnified view of area A.
[0030] Description of reference numerals:
[0031] 1. Trough body; 2. Carrier; 3. Air outlet; 4. Air inlet; 5. Air outlet duct; 6. Air inlet duct; 7. Hot air blower; 8. First main duct; 9. First auxiliary duct; 10. Second main duct; 11. Second auxiliary duct; 12. Outer box; 13. Inner box; 14. Infrared heating lamp; 15. Ventilation hole; 16. Collection box; 17. Drainage duct; 18. Heating belt; 19. Wind shield box. DETAILED DESCRIPTION
[0032] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0033] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.
[0034] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0035] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
[0036] like Figures 1 to 3 As shown, a specific implementation of the heating tank provided in this embodiment includes: a tank body 1, a blowing member and a first heating member. A carrier 2 is provided in the tank body 1, and the carrier 2 is used to place products with hot-melt materials attached to the surface. The blowing member has an air outlet 3 and an air inlet 4. The air outlet 3 is connected to an air outlet pipe 5, and the air outlet end of the air outlet pipe 5 is connected to the tank body 1. The air inlet 4 is connected to an air inlet pipe 6, and the air inlet end of the air inlet pipe 6 is connected to the tank body 1. The first heating member is installed in the tank body 1 and arranged at the air outlet end of the air outlet pipe 5. The first heating member is used to heat the air blown out of the air outlet pipe 5. In this embodiment, sealing plates are rotatably provided on both sides of the tank body 1. The tank body 1 is placed in a sealed state or an open state by rotating the sealing plates. The sealed state is used to melt the hot-melt material on the surface of the product, and the open state is used to take out and place the product. The product can specifically be a silicon wafer.
[0037] In the heating tank provided in this embodiment, air flows out from the air outlet pipe 5, and after being heated by the first heating element, the hot-melt material on the surface of the product can be melted and separated from the product. The heated air flows back into the air outlet pipe 5 through the air inlet pipe 6 and the blowing element. The air circulation mode in the tank body 1 is internal circulation, which can reduce heat energy loss and improve heat utilization rate, thereby reducing energy consumption.
[0038] like Figure 1 As shown, in the heating tank provided in this embodiment, the blowing member is a hot air blower 7, which drives the air flow and can also perform secondary heating on the heated air. The temperature of the air entering the tank body 1 is higher, and the required heating time is shorter, which can improve the work efficiency. In addition, as an alternative embodiment, the blowing member can be an ordinary ventilator, blower, etc.
[0039] like Figure 1 As shown, in the heating tank provided in this embodiment, the air outlet duct 5 includes a first main duct 8 and a plurality of first sub-ducts 9 connected to the first main duct 8, the plurality of first sub-ducts 9 are connected at different positions of the tank body 1, the first main duct 8 is connected to the hot air blower 7, the first main duct 8 and the first sub-ducts 9 are connected through a diverter, the number of the first sub-ducts 9 is four, and they are distributed in a rectangular shape, the plurality of first sub-ducts 9 can allow air to enter the tank body 1 from multiple positions, the air pressure in the tank body 1 is relatively balanced, so that the hot air can evenly act on the product surface at different positions in the tank body 1.
[0040] like Figure 1 As shown, in the heating tank provided by this embodiment, the air inlet pipe 6 includes a second main pipe 10 and a plurality of second sub-pipes 11 connected to the second main pipe 10, the plurality of second sub-pipes 11 are connected at different positions of the tank body 1, the second main pipe 10 is connected to the hot air blower 7, the second main pipe 10 and the second sub-pipes 11 are connected through a diverter, the number of second sub-pipes 11 is two, the diameter thereof is larger than the first sub-pipe 9, the two second sub-pipes 11 are symmetrically distributed, and the plurality of second sub-pipes 11 can enable hot air to enter the hot air blower 7 from multiple positions, thereby reducing the flow distance of the hot air in the tank body 1, thereby increasing the flow speed of the hot air and achieving a better use effect.
[0041] like Figure 1 , Figure 5 , Figure 6As shown, in the heating tank provided in this embodiment, the tank body 1 includes an outer box body 12 and an inner box body 13, the outer box body 12 is covered on the outer side of the inner box body 13, and there is a cavity between the two, the first heating element can be an infrared heating lamp tube 14, and the side wall of the inner box body 13 has a ventilation hole 15, the infrared heating lamp tube 14 plays a heating role, and the ventilation hole 15 can make hot air flow into the inner box body 13, thereby heating the hot melt material on the surface of the product. In addition, as an alternative embodiment, the first heating element can also be an electromagnetic heater or a resistance wire heater.
[0042] like Figures 4 to 6 As shown, in the heating tank provided by the present embodiment, the air outlet end of the air outlet pipe 5 is connected to the cavity between the outer box body 12 and the inner box body 13, and the ventilation holes 15 are arranged in a uniform array. The diameter of the ventilation holes 15 gradually decreases from the top of the tank body 1 toward the bottom of the tank body 1. In the present embodiment, the air outlet pipe 5 is connected to the bottom wall between the outer box body 12 and the inner box body 13, and the air inlet pipe 6 is connected to the bottom wall of the inner box body 13. The hot air in the inner box body 13 flows from the ventilation holes 15 to the air inlet pipe 6. Since the diameter of the upper ventilation holes 15 is larger, the hot air passing through is larger. After the upper hot air enters the inner box body 13 and flows toward the air inlet pipe 6, the coverage area is relatively large, and more hot air acts on the surface of the product, which is more conducive to the heating of the hot-melt material on the surface of the product, and avoids the hot air being discharged before heating the hot-melt material on the surface of the product, thereby reducing waste and saving energy consumption. In addition, as an alternative implementation, the air outlet end of the air outlet pipe 5 can also be connected to the side of the tank body 1, and the diameter of the ventilation hole 15 gradually decreases from the top of the tank body 1 toward the bottom of the tank body 1.
[0043] like Figure 3 , Figure 5 As shown, the heating tank provided in this embodiment also includes: a collecting box 16, which is connected to the tank body 1 through a drainage pipe 17. A second heating element is provided on the outer side of the drainage pipe 17. The bottom wall of the tank body 1 is tilted downward in the direction of the drainage pipe 17. The collecting box 16 can collect the melted hot-melt material to avoid the accumulation of the hot-melt material in the tank body 1. The second heating element can keep the hot-melt material in a melted state at all times to prevent the hot-melt material from hardening in the drainage pipe 17, thereby ensuring that the drainage pipe 17 will not be blocked. The bottom wall of the tank body 1 is tilted, which can speed up the flow rate of the hot-melt material, thereby improving the collection efficiency.
[0044] like Figure 5As shown, in the heating tank provided in this embodiment, the liquid discharge pipe 17 is a round pipe, and the second heating element is a heating belt 18 wound on the round pipe. The heating belt 18 is installed in a winding manner, which is very convenient to install, and the round pipe will not cause damage to the heating belt 18. In addition, as an alternative embodiment, the liquid discharge pipe 17 can also be a square pipe, and the second heating element can be a resistance wire installed on the outside of the square pipe.
[0045] like Figure 3 As shown, the heating tank provided in this embodiment also includes: a wind shield box 19, which is a closed box, and the collecting box 16 is arranged in the wind shield box 19. The wind shield box 19 can prevent external cold air from entering the tank body 1 along the drainage pipe 17, thereby avoiding the air flow from affecting the hot air circulation in the tank.
[0046] The working principle of the heating tank provided in this embodiment is as follows:
[0047] First, place the product on the carrier 2, then rotate the sealing plates on both sides of the trough body 1 to make the trough body 1 in a sealed state, start the hot air blower 7 and the infrared heating lamp 14, the hot air blower 7 drives the air circulation, the air is blown out through the air outlet pipe 5, passes through the infrared heating lamp 14 and enters the trough body 1, and then is absorbed by the air inlet pipe 6 to form an internal circulation.
[0048] In addition, if Figures 1 to 6 As shown, the present embodiment further provides a hot-melt material removal device, comprising: a cleaning tank, a driving member and the above-mentioned heating tank, wherein a cleaning system is provided in the cleaning tank, wherein the cleaning system is used to clean the hot-melt material remaining on the surface of the product after being melted in the heating tank, wherein the driving end of the driving member is suitable for connecting with the product in the tank body 1 in the heating tank, wherein the driving member is used to move the product in the tank body 1 to the cleaning tank, wherein the cleaning system comprises a circulation pipeline, a bubbling tube or a superimposed ultrasonic system, a fluid replenishment system, a pump, a filter, a drainage pipe and other components, wherein the hot-melt material remaining on the surface of the product is cleaned off under the action of the circulating liquid and bubbling, etc. In the present embodiment, the hot-melt material removal device can also add loading and unloading platforms, water washing, slow pulling, drying tanks and other mechanisms according to product needs, and the driving member can be a manipulator.
[0049] The hot-melt material removal equipment provided in this embodiment can remove the hot-melt material on the surface of the product through the heating tank and the cleaning tank, and the air circulation mode in the heating tank is internal circulation, which effectively reduces energy consumption and thus improves economic benefits.
[0050] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the present utility model.
Claims
1. A heating tank, characterized in that: include: A tank body (1), wherein a carrier (2) is arranged in the tank body (1), and the carrier (2) is used to place a product with a hot-melt material attached to the surface; An air blowing member, the air blowing member comprising an air outlet (3) and an air inlet (4), the air outlet (3) being connected to an air outlet pipe (5), the air outlet end of the air outlet pipe (5) being in communication with the tank body (1), the air inlet (4) being connected to an air inlet pipe (6), the air inlet end of the air inlet pipe (6) being in communication with the tank body (1); A first heating element is installed in the trough body (1) and arranged at the air outlet end of the air outlet pipe (5), and the first heating element is used to heat the air blown out of the air outlet pipe (5).
2. The heating tank according to claim 1, characterized in that: The blowing component is a hot air blower (7).
3. The heating tank according to claim 1, characterized in that: The air outlet pipe (5) comprises a first main pipe (8) and a plurality of first auxiliary pipes (9) connected to the first main pipe (8), and the plurality of first auxiliary pipes (9) are connected to different positions of the tank body (1).
4. The heating tank according to claim 3, characterized in that: The air inlet pipe (6) comprises a second main pipe (10) and a plurality of second auxiliary pipes (11) connected to the second main pipe (10), and the plurality of second auxiliary pipes (11) are connected to different positions of the tank body (1).
5. The heating tank according to claim 1, characterized in that: The tank body (1) comprises an outer box body (12) and an inner box body (13); the first heating element is arranged between the outer box body (12) and the inner box body (13); and a ventilation hole (15) is provided on a side wall of the inner box body (13).
6. The heating tank according to claim 5, characterized in that: The air outlet end of the air outlet pipe (5) is connected to the cavity between the outer box body (12) and the inner box body (13), and the ventilation holes (15) are arranged in a uniform array, and the diameter of the ventilation holes (15) gradually decreases from the top of the trough body (1) toward the bottom of the trough body (1).
7. The heating tank according to any one of claims 1 to 6, characterized in that: Also includes: The collecting box (16) is connected to the tank body (1) through a drainage pipe (17), a second heating element is provided on the outer side of the drainage pipe (17), and the bottom wall of the tank body (1) is tilted downward in the direction of the drainage pipe (17).
8. The heating tank according to claim 7, characterized in that: The liquid discharge pipe (17) is a round tube, and the second heating element is a heating belt (18) wound around the round tube.
9. The heating tank according to claim 7, characterized in that: Also includes: A windshield box (19), wherein the windshield box (19) is a closed box body, and the collection box (16) is arranged inside the windshield box (19).
10. A device for removing hot melt material, characterized in that: include: A cleaning tank, a driving member and a heating tank as described in any one of claims 1 to 9, wherein a cleaning system is provided in the cleaning tank, and the cleaning system is used to clean the hot melt material remaining on the surface of the product after melting in the heating tank, and the driving end of the driving member is suitable for connecting with the product in the tank body (1) in the heating tank, and the driving member is used to move the product in the tank body (1) into the cleaning tank.