Manipulator and single crystal furnace

Abstract

The utility model provides a manipulator and a single crystal furnace, and relates to the technical field of monocrystalline silicon processing. The mechanical arm is used for grabbing a pipe body and comprises an operating rod, a guide assembly, a clamping jaw, a mounting base and a connecting rod, the guide assembly comprises a sleeve, and the operating rod is movably arranged in the sleeve in a penetrating mode; the clamping jaw comprises a plurality of jaw bodies, the plurality of jaw bodies are movably connected to the end part of the guide assembly, the first end of the operating rod is configured to extend out of the first end of the sleeve, and the plurality of jaw bodies surround the periphery of the first end of the operating rod; the mounting base is connected to the first end of the operating rod, the two ends of each connecting rod are hinged to the mounting base and the claw body respectively, and the second end of the operating rod is configured to extend out of the second end of the sleeve; the first end of the operating rod drives the claw bodies to be folded or separated through the mounting base connected with the operating rod and the connecting rod hinged to the mounting base. According to the manipulator and the single crystal furnace provided by the utility model, a sleeve is dismounted through the manipulator, and the safety is high.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon processing, in particular to a manipulator and a single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon and forms single crystal silicon rods using the Czochralski method. When producing single crystal silicon rods, inert gas needs to be continuously introduced into the single crystal furnace to prevent the silicon rods from being oxidized. In addition, in order to ensure that the air inlet channel is not attached and corroded by impurities during long-term operation, a sleeve is generally installed in the air inlet channel. The sleeve can protect the channel in the furnace and needs to be cleaned or replaced regularly.

[0003] In the prior art, since there are certain requirements for the temperature inside the furnace, even if the furnace needs to be opened to remove the casing, the temperature inside the furnace will generally remain at a high level (generally not lower than about 300°C). Therefore, when removing the casing, the staff generally use heat-insulating gloves to manually remove the casing.

[0004] However, there are high safety risks when manually removing the casing using heat-insulating gloves. Utility Model Content

[0005] In order to solve at least one of the problems mentioned in the background technology, the utility model provides a manipulator and a single crystal furnace, and the casing is removed by the manipulator, which has high safety.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] In a first aspect, the utility model provides a manipulator for grasping a pipe body, comprising an operating rod, a guide assembly, a clamping claw, a mounting seat and a connecting rod, wherein the guide assembly comprises a sleeve, and the operating rod is movably inserted into the sleeve;

[0008] The clamping claw includes a plurality of claw bodies, the plurality of claw bodies are movably connected to the end of the guide assembly, the first end of the operating rod is configured to extend from the first end of the sleeve, and the plurality of claw bodies surround the periphery of the first end of the operating rod;

[0009] The mounting seat is connected to the first end of the operating rod, the connecting rod has a plurality of connecting rods, the two ends of the connecting rod are respectively hinged to the mounting seat and the claw body, and the second end of the operating rod is configured to extend from the second end of the sleeve;

[0010] When the operating rod moves in the sleeve, the first end of the operating rod drives the multiple claws to close or separate through the mounting seat connected thereto and the connecting rod hinged to the mounting seat, so as to clamp the target tube body from the outside, or support the inner wall of the target tube body from the inside.

[0011] As an optional implementation, the mounting seat is provided with a threaded hole, the first end of the operating rod is provided with an external thread matching the threaded hole, and the external thread is screwed to the threaded hole.

[0012] As an optional embodiment, the outer side of the claw body has a friction portion, and the friction portion is configured to abut against the inner wall of the target tube body when the clamping claw supports the target tube body from the inside.

[0013] As an optional embodiment, the inner side of the claw body has an arc-shaped groove, and the arc-shaped groove is configured to match the outer wall contour of the target tube body.

[0014] As an optional embodiment, the guide assembly further includes an end cover, which is disposed at the first end of the sleeve, and has a through hole, through which the operating rod is inserted.

[0015] As an optional embodiment, the guide assembly also includes a guide support, which is arranged at the second end of the sleeve. The guide support includes a guide ring and a plurality of support rods. The first end of the support rod is connected to the guide ring, the second end of the support rod is connected to the inner wall of the sleeve, and the second end of the operating rod is passed through the guide ring.

[0016] As an optional embodiment, the guide assembly further includes a plurality of connecting seats, and the number of the connecting seats is consistent with the number of the claw bodies, the plurality of connecting seats are all connected to the end cover, and each claw body is hinged to the corresponding connecting seat.

[0017] As an optional implementation, there are four connecting seats, and the four connecting seats are evenly connected to the end cover.

[0018] As an optional implementation, it further includes a pull ring connected to the second end of the operating rod.

[0019] In a second aspect, the utility model further provides a single crystal furnace, comprising any one of the manipulators in the first aspect, the manipulator being used for removing a target tube body in the single crystal furnace.

[0020] The robot arm provided by the utility model is used for grasping a tube body, and comprises an operating rod, a guide assembly, a clamping claw, a mounting seat and a connecting rod, wherein the guide assembly comprises a sleeve, and the operating rod is movably inserted into the sleeve; the clamping claw comprises a plurality of claw bodies, and the plurality of claw bodies are movably connected to the end of the guide assembly, the first end of the operating rod is configured to extend from the first end of the sleeve, and the plurality of claw bodies surround the periphery of the first end of the operating rod; the mounting seat is connected to the first end of the operating rod, the connecting rod has a plurality of connecting rods, the two ends of the connecting rod are respectively hinged to the mounting seat and the claw bodies, and the second end of the operating rod is configured to extend from the second end of the sleeve; when the operating rod moves in the sleeve, the first end of the operating rod drives the plurality of claw bodies to close or separate through the mounting seat connected thereto and the connecting rod hinged to the mounting seat, so as to clamp the target tube body from the outside, or support the inner wall of the target tube body from the inside. When the manipulator provided by the utility model removes the sleeve in the air inlet channel of the single crystal furnace, the staff can hold the outer wall of the sleeve with one hand and hold the second end of the operating rod with the other hand, and can first pull the second end of the operating rod outward to make the first end of the operating rod and the mounting seat approach toward the sleeve, so that the clamping claws can be extended into the sleeve after shrinking and closing, and then the second end of the operating rod is pushed to open the clamping claws in the sleeve, so that the outer sides of each claw body are pressed against the inner wall of the sleeve, and the sleeve is pulled outward in a state where the claw body is pressed against the inner wall of the sleeve, so that the sleeve is taken out from the furnace channel by the friction force between the claw body and the inner wall of the sleeve, thereby completing the removal of the sleeve. When the manipulator provided by the utility model removes the sleeve, the staff does not need to come into close contact with the high-temperature sleeve and furnace wall, which greatly improves the safety of the operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0022] Figure 1 A schematic diagram of the first overall structure of the manipulator provided by the embodiment of the utility model;

[0023] Figure 2 for Figure 1 The enlarged view of point A in the middle;

[0024] Figure 3 A second overall structural diagram of the manipulator provided by an embodiment of the utility model;

[0025] Figure 4 for Figure 3 The enlarged view of point B in the middle;

[0026] Figure 5for Figure 3 Bottom view of

[0027] Figure 6 for Figure 3 A top view of

[0028] Figure 7 A schematic structural diagram of an end cover in a manipulator provided in an embodiment of the utility model.

[0029] Description of reference numerals:

[0030] 100-manipulator;

[0031] 110 - operating lever;

[0032] 111-external thread;

[0033] 120-guide assembly;

[0034] 121-sleeve;

[0035] 122-end cover;

[0036] 1221-through hole;

[0037] 123-guide support;

[0038] 1231-guide ring;

[0039] 1232-support rod;

[0040] 124-connection seat;

[0041] 130-claw body;

[0042] 131- friction part;

[0043] 132-arc groove;

[0044] 140-mounting seat;

[0045] 141-threaded hole;

[0046] 150-connecting rod;

[0047] 160-Pull ring. DETAILED DESCRIPTION

[0048] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0049] In the application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the utility model and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0050] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in this utility model can be understood according to specific circumstances.

[0051] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0052] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0053] When producing single crystal silicon rods, in order to ensure that the air inlet channel is not attached and corroded by impurities under long-term operation, a sleeve is generally installed in the air inlet channel. The sleeve is generally used as a consumable. When the sleeve is attached and corroded by impurities to a certain extent, the sleeve can be taken out, cleaned and reused, or replaced with a new sleeve. At present, the staff generally use heat-insulating gloves to manually remove the sleeve. However, due to the high temperature of the sleeve, the staff can easily be burned even if they use heat-insulating gloves to remove the sleeve, which poses a high safety hazard.

[0054] In view of this, the utility model provides a manipulator 100, including an operating rod 110, a guide assembly 120, a clamp, a mounting seat 140 and a connecting rod 150, wherein the guide assembly 120 includes a sleeve 121, and the operating rod 110 is movably inserted into the sleeve 121; the clamp includes a plurality of claw bodies 130, and the plurality of claw bodies 130 are movably connected to the end of the guide assembly 120, the first end of the operating rod 110 extends from the first end of the sleeve 121, and the plurality of claw bodies 130 surround the periphery of the first end of the operating rod 110; the mounting seat 140 is connected to the first end of the operating rod 110, and the connecting rod 150 has a plurality of ends, and the two ends of the connecting rod 150 are respectively hinged to the mounting seat 140 and the claw body 130, and the second end of the operating rod 110 extends from the second end of the sleeve 121. When removing the sleeve, the staff can hold the outer wall of the sleeve 121 with one hand and the second end of the operating rod 110 with the other hand. The staff can first pull the second end of the operating rod 110 outward to make the first end of the operating rod 110 and the mounting seat 140 approach the sleeve, so that the clamping claws can be stretched into the sleeve after shrinking and closing. Then, by pushing the second end of the operating rod 110, the clamping claws are opened in the sleeve, so that the outer sides of each claw body 130 are pressed against the inner wall of the sleeve, and the sleeve is pulled outward in the state that the claw body 130 is pressed against the inner wall of the sleeve, so that the sleeve is taken out from the furnace channel by the friction between the claw body 130 and the inner wall of the sleeve. The staff does not need to come into close contact with the high-temperature sleeve and furnace wall, and can avoid being scalded by the sleeve or furnace wall, which greatly improves the safety of the operation.

[0055] Figure 1 A schematic diagram of the first overall structure of the manipulator provided by the embodiment of the utility model; Figure 2 for Figure 1 The enlarged view of point A in the middle; Figure 3 A second overall structural diagram of the manipulator provided by an embodiment of the utility model; Figure 4 for Figure 3 The enlarged view of point B in the middle; Figure 5 for Figure 3 Bottom view of

[0056] Figure 6 for Figure 3 A top view of Figure 7 A schematic structural diagram of an end cover in a manipulator provided in an embodiment of the utility model.

[0057] You can refer to Figures 1 to 7The present invention provides a manipulator 100 for grasping a pipe body, including an operating rod 110, a guide assembly 120, a clamping claw, a mounting seat 140 and a connecting rod 150. The guide assembly 120 includes a sleeve 121, and the operating rod 110 is movably inserted into the sleeve 121; the clamping claw includes a plurality of claw bodies 130, and the plurality of claw bodies 130 are movably connected to the end of the guide assembly 120. The first end of the operating rod 110 is configured to extend from the first end of the sleeve 121, and the plurality of claw bodies 130 surround the periphery of the first end of the operating rod 110; the connecting rod 150 is provided with a plurality of claw bodies 130, and the plurality of claw bodies 130 are provided with a plurality of claw bodies 130. The mounting seat 140 is connected to the first end of the operating rod 110, and the connecting rod 150 has multiple ends. The two ends of the connecting rod 150 are respectively hinged to the mounting seat 140 and the claw body 130, and the second end of the operating rod 110 is configured to extend from the second end of the sleeve 121; when the operating rod 110 moves in the sleeve 121, the first end of the operating rod 110 drives the multiple claw bodies 130 to close or separate through the mounting seat 140 connected thereto and the connecting rod 150 hinged to the mounting seat 140, so as to clamp the target tube body from the outside, or support the inner wall of the target tube body from the inside.

[0058] It can be understood that the manipulator 100 provided in the embodiment of the utility model can not only clamp the tube body from the outside of the tube body, but also extend into the inside of the tube body to grab the tube body by supporting on the inner wall of the tube body. The sleeve (belonging to the tube body) in the single crystal furnace is sleeved on the inner wall of the air inlet channel. Therefore, when removing the sleeve, the claws of the manipulator 100 need to enter the sleeve. When the sleeve is taken out of the single crystal furnace, the claws can be used to clamp the outer wall of the sleeve to grab the sleeve.

[0059] Among them, the length of the operating rod 110 is greater than the length of the sleeve 121, and the two ends of the operating rod 110 extend from the two ends of the sleeve 121. The cross-section of the operating rod 110 can be circular. The operating rod 110 and the sleeve 121 can be made of high-temperature resistant insulation materials to prevent excessive heat from the sleeve from being transferred to the operating rod 110 and the sleeve 121 when the sleeve 121 is removed, causing the temperature of the operating rod 110 and the sleeve 121 to be too high.

[0060] When the manipulator 100 provided in the embodiment of the utility model is removing the sleeve in the air inlet channel of the single crystal furnace, the staff can hold the outer wall of the sleeve 121 with one hand and the second end of the operating rod 110 with the other hand. The staff can first pull the second end of the operating rod 110 outward so that the first end of the operating rod 110 and the mounting seat 140 are close to the sleeve, so that the clamping claws can be extended into the sleeve after shrinking and closing, and then the second end of the operating rod 110 is pushed to open the clamping claws in the sleeve, so that the outer sides of each claw body 130 are pressed against the inner wall of the sleeve, and the sleeve is pulled outward in the state that the claw body 130 is pressed against the inner wall of the sleeve, so that the sleeve is taken out from the furnace channel through the friction between the claw body 130 and the inner wall of the sleeve, thereby completing the removal of the sleeve. When removing the sleeve by the manipulator 100 provided by the utility model, the staff does not need to come into close contact with the high-temperature sleeve and furnace wall, which greatly improves the safety of the operation.

[0061] In the above embodiment, the mounting seat 140 may have a threaded hole 141, and the first end of the operating rod 110 may have an external thread 111 that matches the threaded hole 141, and the external thread 111 is screwed into the threaded hole 141. It can be understood that by rotating the operating rod 110, the length of the external thread 111 at the second end of the operating rod 110 screwed into the threaded hole 141 can be changed, thereby changing the maximum opening range and the minimum contraction range of the clamping jaws, so that the clamping jaws can adapt to pipes of more sizes.

[0062] In the above embodiment, the outer side of the claw body 130 may have a friction portion 131, and the friction portion 131 is configured to abut against the inner wall of the target tube body when the clamp supports the target tube body from the inside. The structure of the friction portion 131 may have various forms, for example, some stripes may be processed on the outer side of the claw body 130 to increase the friction force through these stripes, or some objects with high roughness may be connected to the outer side of the claw body 130 to increase the friction force, such as some high temperature resistant fabrics.

[0063] like Figure 1 and Figure 3 As shown, in the above embodiment, the inner side of the claw body 130 may have an arc-shaped groove 132, and the arc-shaped groove 132 is configured to match the outer wall profile of the target tube body. It can be understood that when the clamping jaws grasp the tube body from the outside, the arc-shaped groove 132 on the inner side of the claw body 130 can fit the outer wall of the tube body, thereby preventing the tube body from falling off from the clamping jaws, thereby improving the reliability of the clamping jaws.

[0064] In the above embodiment, the guide assembly 120 may further include an end cap 122, which is disposed at the first end of the sleeve 121, and has a through hole 1221, through which the operating rod 110 is passed. The end cap 122, on the one hand, guides the moving direction of the operating rod 110, limits the position of the operating rod 110, and prevents the operating rod 110 from shaking left and right when moving along the length direction of the sleeve 121. On the other hand, the end cap 122 may also shield the sleeve 121, and prevent the high-temperature deposits attached to the inner wall of the sleeve from entering the sleeve 121 from the first end of the sleeve 121 and falling from the second end of the sleeve 121 when the clamp removes the sleeve in the single crystal furnace inlet channel, thereby scalding the operator. The end cap 122 may be covered on the first end of the sleeve 121 in a detachable connection manner, and may be specifically connected by a snap connection or a threaded connection, so as to facilitate the removal of the end cap 122 when repairing the manipulator 100.

[0065] In the above embodiment, the guide assembly 120 may further include a guide support 123, which is disposed at the second end of the sleeve 121. The guide support 123 includes a guide ring 1231 and a plurality of support rods 1232. The first end of the support rod 1232 is connected to the guide ring 1231, and the second end of the support rod 1232 is connected to the inner wall of the sleeve 121. The second end of the operating rod 110 is passed through the guide ring 1231. The second end of the operating rod 110 can be guided by the guide ring 1231 to limit the moving direction of the operating rod 110. The structural mode of the combination of the guide ring 1231 and the support rod 1232 can save materials and reduce the deadweight of the manipulator 100. The support rod 1232 can increase the overall structural strength of the sleeve 121 by supporting the inner wall of the sleeve 121.

[0066] like Figure 1 and Figure 2 As shown, in the above embodiment, the guide assembly 120 may further include a plurality of connection seats 124, and the number of the connection seats 124 is consistent with the number of the claw bodies 130. The plurality of connection seats 124 are all connected to the end cover 122, and each claw body 130 is hinged to the corresponding connection seat 124. The connection seat 124 may be connected to the end cover 122 by bolts, and the plurality of connection seats 124 are arranged around the threaded hole 141 on the end cover 122. When the second end of the operating rod 110 is pulled outward, each claw body 130 rotates inward with the hinge point on the connection seat 124 as the center, so that the clamping jaws are contracted and closed as a whole.

[0067] In the above embodiment, the number of the connecting seats 124 is not specifically limited, and there may be three, four or other specific numbers. Correspondingly, the number of the claw bodies 130 corresponds one to one with the connecting seats 124. As shown in the figure, in one embodiment, there may be four connecting seats 124, and the four connecting seats 124 are evenly connected to the end cover 122, and each connecting seat 124 is hinged with a claw body 130.

[0068] The above embodiment may further include a pull ring 160 , which is connected to the second end of the operating rod 110 . The pull ring 160 may be used as a position for an operator to hold the operating rod 110 , so as to facilitate control of the operating rod 110 .

[0069] In the above embodiment, an anti-slip texture may be provided on the outer wall of the sleeve 121 to improve the stability when holding the sleeve 121 .

[0070] In addition, an embodiment of the utility model also provides a single crystal furnace, including any one of the manipulators 100 in the above embodiments, the manipulator 100 is used to remove the target tube body in the single crystal furnace, the manipulator 100 includes an operating rod 110, a guide assembly 120, a clamp, a mounting seat 140 and a connecting rod 150, the guide assembly 120 includes a sleeve 121, and the operating rod 110 is movably inserted into the sleeve 121; the clamp includes a plurality of claw bodies 130, and the plurality of claw bodies 130 are movably connected to the end of the guide assembly 120, the first end of the operating rod 110 is configured to extend from the first end of the sleeve 121, and the plurality of claw bodies 130 surround the periphery of the first end of the operating rod 110; the mounting seat 140 is connected to the first end of the operating rod 110, the connecting rod 150 has a plurality of ends, and the connecting rod 150 is respectively hinged to the mounting seat 140 and the claw body 130, and the second end of the operating rod 110 is configured to extend from the second end of the sleeve 121. When the robot 100 in the single crystal furnace provided by the embodiment of the utility model removes the sleeve in the air inlet channel, there is no need to wait for the temperature in the furnace to drop too much before the removal operation can be carried out, and the removal process is convenient, saving energy consumption and improving the overall operation efficiency of the single crystal furnace.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

Claims

1. A robot, characterized in that: Used to grasp the pipe body, comprising an operating rod, a guide assembly, a clamping claw, a mounting seat and a connecting rod, wherein the guide assembly comprises a sleeve, and the operating rod is movably inserted into the sleeve; The clamp includes a plurality of claw bodies, the plurality of claw bodies are movably connected to the end of the guide assembly, the first end of the operating rod is configured to extend from the first end of the sleeve, and the plurality of claw bodies surround the periphery of the first end of the operating rod; The mounting seat is connected to the first end of the operating rod, the connecting rod has a plurality of ends, the two ends of the connecting rod are respectively hinged to the mounting seat and the claw body, and the second end of the operating rod is configured to extend from the second end of the sleeve; When the operating rod moves in the sleeve, the first end of the operating rod drives the plurality of claws to close or separate through the mounting seat connected thereto and the connecting rod hinged to the mounting seat, so as to clamp the target tube body from the outside, or support the inner wall of the target tube body from the inside.

2. The robot according to claim 1, characterized in that: The mounting seat is provided with a threaded hole, the first end of the operating rod is provided with an external thread matched with the threaded hole, and the external thread is screwed to the threaded hole.

3. The robot according to claim 2, characterized in that: The outer side of the claw body has a friction portion, and the friction portion is configured to abut against the inner wall of the target tube body when the clamping claw supports the target tube body from the inside.

4. The robot according to claim 3, characterized in that: The inner side of the claw body has an arc-shaped groove, and the arc-shaped groove is configured to match the outer wall contour of the target tube body.

5. The robot according to claim 4, characterized in that: The guide assembly further comprises an end cover, which is arranged at the first end of the sleeve. The end cover has a through hole, and the operating rod is passed through the through hole.

6. The robot according to claim 5, characterized in that: The guide assembly also includes a guide support, which is arranged at the second end of the sleeve. The guide support includes a guide ring and a plurality of support rods. The first end of the support rod is connected to the guide ring, the second end of the support rod is connected to the inner wall of the sleeve, and the second end of the operating rod is passed through the guide ring.

7. The robot according to claim 5 or 6, characterized in that: The guide assembly also includes a plurality of connection seats, and the number of the connection seats is consistent with the number of the claw bodies. The plurality of connection seats are all connected to the end cover, and each claw body is hinged to the corresponding connection seat.

8. The robot according to claim 7, characterized in that: There are four connecting seats, and the four connecting seats are evenly connected to the end cover.

9. The manipulator according to any one of claims 1 to 6, characterized in that: Also included is a pull ring connected to the second end of the operating rod.

10. A single crystal furnace, characterized in that: It comprises the robot arm described in any one of claims 1 to 9, and the robot arm is used to remove the target tube body in the single crystal furnace.

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