Abnormal sheet basket discharging mechanism and equipment provided with discharging mechanism

Abstract

The utility model provides an abnormal sheet basket discharging mechanism which comprises a sheet basket provided with an end plate; the manipulator is provided with a clamping jaw used for clamping the piece basket end plate; the bearing part is provided with a conveying belt matched with the end plate and a tray located below the conveying belt; and the bearing part can automatically move the wafer basket to a target position when the wafer basket is placed on the conveying belt by the manipulator, and can collect all fragments falling from the wafer basket into the tray. According to the abnormal wafer basket discharging mechanism, the wafer baskets judged to be abnormal can be accurately and rapidly clamped and moved to a conveying line, the wafer baskets can be stably and safely moved to a destination, broken silicon wafers left in the wafer baskets can also be received, and the abnormal wafer basket discharging mechanism is simple in structure, easy to control, safe and reliable. The utility model further provides equipment provided with the discharging mechanism.

Description

Technical Field

[0001] The present application belongs to the technical field of silicon wafer processing, and in particular, relates to an abnormal wafer basket discharge mechanism and a device provided with the discharge mechanism. Background Art

[0002] In the existing cleaning system, card problems often occur when inserting wafers. When the number of card hits on the same wafer basket reaches the preset number, it can no longer be used and is directly judged as an abnormal wafer basket. However, on the production line, due to limited equipment space and unreasonable equipment structure design, abnormal wafer baskets cannot be diverted and taken out in time, and manual assistance is required to remove the abnormal wafer baskets from the discharge port. Not only is it easy to miss inspections, but it also makes it impossible to remove the wafer baskets from the production line in time, seriously affecting production efficiency. In addition, after taking out the abnormal wafer basket, broken silicon wafers are likely to remain in the wafer basket. When manually taking and placing the abnormal wafer basket, broken silicon wafers will be scattered all over the floor and cannot be recycled, resulting in serious waste. Summary of the invention

[0003] The present application provides an abnormal film basket discharge mechanism and equipment provided with the discharge mechanism, which solves the technical problem that the prior art cannot promptly remove the abnormal film basket, resulting in low production efficiency.

[0004] In order to solve at least one of the above technical problems, the technical solution adopted in this application is:

[0005] An abnormal tablet basket discharge mechanism, comprising:

[0006] a tablet basket provided with end plates;

[0007] A manipulator equipped with a clamping jaw for clamping the end plate of the tablet basket;

[0008] A bearing portion, which is provided with a conveyor belt matched with the end plate and a tray located below the conveyor belt;

[0009] The carrying part can automatically move the film basket to a target position when the robot places the film basket on the conveyor belt, and can collect all fragments dropped from the film basket into the tray.

[0010] Furthermore, the end plate is constructed as a U-shaped structure, on which a through hole is constructed, and the through hole is staggered with the identification area for placing the parameter information of the film basket.

[0011] Furthermore, the through hole is a long strip structure, which is symmetrically arranged along the height direction of the end plate and is located above the identification area;

[0012] Preferably, the sheet basket is further provided with a plurality of rod grooves for inserting sheets, and the through holes are arranged on the inner sides of the rod grooves.

[0013] Furthermore, a bayonet pin cooperating with the through hole is provided on the inner side surface of the clamping jaw, and the bayonet pin is embedded in the through hole to fix the end plate;

[0014] Preferably, the bayonet comprises a body and bosses disposed on two sides of the body, and the bosses disposed on the two sides have different shapes, wherein one side is an elliptical cylinder and the other side is a rectangular cylinder.

[0015] Furthermore, the clamping jaw is constructed as a structure that is narrow at the top and wide at the bottom, and a slot hole matching its shape is provided in the middle; the bayonet is arranged at the lower section of the clamping jaw.

[0016] Furthermore, the robot also includes a fixed plate and a cylinder and a solenoid valve for driving the clamp to move along the length direction of the fixed plate. The cylinder and the solenoid valve are both arranged on the top of the fixed plate, and the clamp is arranged at the end of the fixed plate and vertically downward.

[0017] Furthermore, the bearing portion includes a frame for fixing the conveyor belt and a bracket for supporting the frame, and the tray is arranged on the bracket;

[0018] Preferably, the conveyor belt is arranged on both sides of the frame, and the conveyor belt is a structure constructed of flexible plastic parts, and its width is greater than the thickness of the end plate.

[0019] Furthermore, it also includes a motor and a roller for driving the conveyor belt, the motor is arranged on the bracket and located at one end of the frame; the roller connects the two conveyor belts, and a roller wheel connected to and cooperating with the motor is arranged in the middle of the roller.

[0020] Furthermore, a plurality of monitoring components with a corresponding radiation configuration are arranged on the frame, and the monitoring components are arranged along the length direction of the frame.

[0021] A device is provided with the discharge mechanism as described above.

[0022] The abnormal wafer basket discharge mechanism designed by the present application can not only accurately and quickly clamp the abnormal wafer basket and move it to the transmission line, but also smoothly and safely move the wafer basket to the destination, and can also receive the broken silicon wafers remaining in the wafer basket. The structure is simple and easy to control, safe and reliable. The present application also proposes a device provided with the discharge mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a three-dimensional diagram of an abnormal film basket discharge mechanism according to an embodiment of the present application;

[0024] Figure 2This is a three-dimensional diagram of the cooperation between the manipulator and the tablet basket according to one embodiment of the present application;

[0025] Figure 3 It is a side view of the cooperation between the manipulator and the tablet basket according to one embodiment of the present application;

[0026] Figure 4 is a structural diagram of a sheet basket end plate according to an embodiment of the present application;

[0027] Figure 5 is a three-dimensional diagram of a bayonet according to an embodiment of the present application;

[0028] Figure 6 It is a three-dimensional diagram of the cooperation between the bearing part and the sheet basket of one embodiment of the present application;

[0029] Figure 7 It is a side view of the cooperation between the bearing part and the sheet basket according to an embodiment of the present application.

[0030] In the figure:

[0031] 10. Sheet basket 11. End plate 12. Through hole

[0032] 13. Identification area 20, manipulator 21, fixed plate

[0033] 22. Gripper 23. Cylinder 24. Solenoid valve

[0034] 25. Bayonet 251. Body 252. Boss 1

[0035] 253, boss 2 30, bearing portion 31, frame

[0036] 32. Conveyor belt 33. Bracket 34. Pallet

[0037] 35. Motor 36. Roller 37. Monitoring unit

[0038] 40, feeding port 50, reflux line DETAILED DESCRIPTION

[0039] The present application is described in detail below with reference to the accompanying drawings and specific embodiments.

[0040] This embodiment proposes an abnormal film basket discharge mechanism, such as Figure 1As shown, it includes an empty abnormal sheet basket 10, a manipulator 20 for clamping the sheet basket 10, and a carrier 30 for transmission and transfer. The sheet basket 10 is found to have multiple cards during the cleaning process and is marked as abnormal. These abnormal information is transmitted by the system and recorded on the identification area 13 on the end plate 20 placed at the end of the sheet basket 10. When the sheet basket 10 moves to the cleaning discharge port 40, the manipulator 20 disposed at the discharge port 40 and located between the discharge port 40 and the carrier 30 clamps the sheet basket 10 through its clamping claws 22 and moves it to the conveyor belt 32 for placing the sheet basket 10 at the carrier 30. When the robot 20 places the film basket 10 marked as abnormal on the conveyor belt 32, that is, when the carrying part 30 finds that an abnormal film basket 10 is placed through the monitoring part 37, the carrying part 30 can automatically drive the conveyor belt 32 to move, so as to move the abnormal film basket 10 to the target position, and at the same time, all fragments that fall from the film basket 10 can be collected into the tray 34.

[0041] like Figure 2-3 As shown, the six-axis robot 20 clamps the end plates 11 at both ends of the film basket 10 through the clamping claws 22 on both sides thereof, so that the film basket 10 is suspended horizontally and the film basket 10 is transferred from the unloading port 40 to the supporting portion 30 .

[0042] Specifically, Figure 4 As shown, the two ends of the film basket 10 are provided with end plates 11 arranged vertically, which are connected by a plurality of horizontally arranged rod grooves, so that the silicon wafer is inserted into the card slot on the rod groove. The end plate 11 is constructed as a U-shaped structure, on which two groups of through holes 12 are constructed and an identification area 13 for placing the parameter information of the film basket is provided. The through holes 12 are respectively arranged on both sides of the end plate 11, and are staggered with the identification area 13. The identification area 13 is located in the middle section between the two sides of the end plate 11, and is mainly used to place chips or paste QR codes. On the outer wall surface of the end plate 11, the through hole 12 is arranged on the inner side of the rod groove to facilitate its cooperation with the clamp 22. Among them, the through hole 12 is a long strip structure, which is used to cooperate with the card pin 25 on the inner side of the clamp 22. It is symmetrically arranged along the height direction of the end plate 11 and is located above the identification area 13. The setting of the through hole 12 can not only increase the stability of it being clamped by the clamp 22, but also reduce the overall weight of the film basket 10 and improve the flexibility of transportation.

[0043] The manipulator 20 includes a fixed plate 21, and claws 22 for clamping the end plates 11 of the film basket 10 are provided at both ends of the fixed plate 21. A cylinder 23 and a solenoid valve 24 for driving the claws 22 to move along the length direction of the fixed plate 21 are also provided at the top of the fixed plate 21. The manipulator 20 is provided with two cylinders 23 and one solenoid valve 24, that is, each claw 22 is equipped with a cylinder 23, and the two cylinders 23 are controlled by the same solenoid valve 24; when the solenoid valve 24 is turned on, the two cylinders 23 drive the two claws 22 to move synchronously toward or away from each other to clamp or put down the film basket 10.

[0044] The clamping jaw 22 is arranged at the end of the fixing plate 21 and is arranged vertically downward; the clamping jaw 22 is constructed to be narrow at the top and wide at the bottom, and its connecting section is an inclined structure, which can not only improve the strength of the clamping jaw 22 body, but also increase the contact area between the clamping jaw 22 and the end plate 11, thereby improving the stability of the clamping. A slot hole matching its shape is provided in the middle of the clamping jaw 22 to reduce the overall weight of the clamping jaw 22.

[0045] like Figure 5 As shown, a bayonet 25 that cooperates with the through hole 12 is provided on the inner side surface of the clamping jaw 22, and the bayonet 25 is configured in the lower section of the clamping jaw 22. The bayonet 25 is embedded in the through hole 12 to clamp the end plate 11. The bayonet 25 includes a body 251 and a boss 1 252 and a boss 2 253 disposed on both sides of the body 251. The boss 1 252 and the boss 2 253 are coaxially arranged and have different shapes. The boss 1 252 is an elliptical cylinder, which is embedded in the clamping jaw 22, and the bayonet 25 is directly connected to the clamping jaw 22 through the boss 1 252. The boss 2 253 is a rectangular cylinder, which is connected to the through hole 12 and is used to clamp the end plate 11. This structure can further improve the stability and safety of the clamping of the clamping jaw 22, and there will be no risk of slipping or loosening.

[0046] like Figure 6-7 As shown, the bearing part 30 is configured with a frame 31, a conveyor belt 32 matched with the end plate 11, and a tray 34 located below the conveyor belt 32. A bracket 33 for supporting the frame 31 and suspending the conveyor belt 32 is provided below the frame 31, and the tray 34 is fixed on the bracket 33. The conveyor belt 32 is fixed on the frame 31, and the tray 34 and the conveyor belt 32 are both arranged along the length direction of the frame 31.

[0047] Preferably, the conveyor belt 32 is arranged on both sides of the frame 31, and the conveyor belt 32 is a structure of flexible plastic parts, such as a chain made of POM material, which can prevent the sheet basket 10 from being worn during the conveying process, and the width of the conveyor belt 32 is greater than the thickness of the end plate 11, so as to improve the stability of the placement of the sheet basket 10 and improve the safety of conveying the sheet basket 10. The length direction of the sheet basket 10 is placed along the width direction of the conveyor belt 32. In this embodiment, at least four groups of sheet baskets 10 can be placed side by side. Of course, the number of placements can be adjusted based on actual conditions, which is not specifically limited here and is within the protection scope of this case.

[0048] Furthermore, it also includes a motor 35 and a roller 36 for driving the conveyor belt 32 to transmit. The roller 36 is configured at the end of the frame 31 near the feeding port 40, and connects the two conveyor belts 32 so that the conveyor belts 32 move synchronously. The motor 35 is configured on the bracket 33 and is located at one end of the frame 31 and above the tray 34. The output end of the motor 35 is connected to the roller on the roller 36 through a belt, and the roller is set in the middle of the roller 36.

[0049] Furthermore, in order to further monitor the position of the film basket 10 placed on the conveyor belt 32, a plurality of monitoring components 37 with a corresponding configuration are arranged on both sides of the frame 31, and the monitoring components 37 are arranged along the length direction of the frame 31. The monitoring component 37 is a corresponding sensor, that is, a monitor composed of a transmitter and a receiver. When the film basket 10 is placed on the conveyor belt 32, the transmission light path of the corresponding monitoring component 37 is blocked, indicating that the film basket 10 appears, and the corresponding information will be immediately transmitted to the system, and the system will notify the motor 35 to start through a signal, so that it drives the conveyor belt 32 to drive, so as to drive the film basket 10 to move toward the target position, so that the abnormal film basket 10 leaves the cleaning interval.

[0050] The tray 34 is mainly used to collect broken silicon wafers. Broken silicon wafers will remain on the wafer basket 10. When moving on the conveyor belt 32, these broken silicon wafers will fall onto the tray 34 through the open space between the conveyor belts 32 due to the vibration of the transmission. The tray 34 can collect all the broken silicon wafers for later recycling. The length of the tray 34 can be set based on actual conditions and is not specifically limited here.

[0051] A device is provided with the discharge mechanism as described above.

[0052] The abnormal wafer basket discharge mechanism designed by the present application can not only accurately and quickly clamp the abnormal wafer basket and move it to the transmission line, but also smoothly and safely move the wafer basket to the destination, and can also receive the broken silicon wafers remaining in the wafer basket. The structure is simple and easy to control, safe and reliable. The present application also proposes a device provided with the discharge mechanism.

[0053] The above detailed description of the embodiments of the present application is only a preferred embodiment of the present application and cannot be considered to limit the scope of implementation of the present application. All equivalent changes and improvements made within the scope of the present application should still fall within the scope of the patent coverage of the present application.

Claims

1. An abnormal tablet basket discharge mechanism, characterized in that: include: a tablet basket provided with end plates; A manipulator equipped with a clamping jaw for clamping the end plate of the tablet basket; A bearing portion, which is provided with a conveyor belt matched with the end plate and a tray located below the conveyor belt; The carrying part can automatically move the film basket to a target position when the robot places the film basket on the conveyor belt, and can collect all fragments dropped from the film basket into the tray.

2. The abnormal film basket discharge mechanism according to claim 1, characterized in that: The end plate is constructed as a U-shaped structure, on which a through hole is constructed. The through hole is staggered with the identification area for placing the parameter information of the film basket.

3. The abnormal tablet basket discharge mechanism according to claim 2, characterized in that: The through holes are long strip structures, are symmetrically arranged along the height direction of the end plate, and are located above the identification area.

4. The abnormal sheet basket discharge mechanism according to claim 3, characterized in that: The sheet basket is also provided with a plurality of rod grooves for inserting sheets, and the through holes are arranged on the inner sides of the rod grooves.

5. An abnormal tablet basket discharge mechanism according to any one of claims 2 to 4, characterized in that: A bayonet pin matched with the through hole is provided on the inner side surface of the clamping jaw, and the bayonet pin is embedded in the through hole to fix the end plate.

6. The abnormal tablet basket discharge mechanism according to claim 5, characterized in that: The bayonet comprises a body and bosses disposed on two sides of the body, and the bosses disposed on the two sides have different shapes, wherein one side is an elliptical cylinder and the other side is a rectangular cylinder.

7. The abnormal tablet basket discharge mechanism according to claim 6, characterized in that: The clamping jaw is constructed as a structure that is narrow at the top and wide at the bottom, and a slot hole matching its shape is provided in the middle thereof; the bayonet is arranged at the lower section of the clamping jaw.

8. The abnormal film basket discharge mechanism according to claim 1, characterized in that: The manipulator also includes a fixed plate and a cylinder and a solenoid valve for driving the clamp to move along the length direction of the fixed plate. The cylinder and the solenoid valve are both arranged on the top of the fixed plate, and the clamp is arranged at the end of the fixed plate and vertically downward.

9. An abnormal tablet basket discharge mechanism according to any one of claims 1-4, 6-8, characterized in that: The bearing part comprises a frame for fixing the conveyor belt and a bracket for supporting the frame, and the tray is arranged on the bracket.

10. The abnormal film basket discharge mechanism according to claim 9, characterized in that: The conveyor belt is arranged on both sides of the frame, and the conveyor belt is a structure constructed of flexible plastic parts, and its width is greater than the thickness of the end plate.

11. The abnormal film basket discharge mechanism according to claim 10, characterized in that: It also includes a motor and a roller for driving the conveyor belt, wherein the motor is mounted on the bracket and located at one end of the frame; the roller connects the two conveyor belts, and a roller wheel connected to and cooperating with the motor is arranged in the middle of the roller.

12. An abnormal tablet basket discharge mechanism according to claim 10 or 11, characterized in that: A plurality of monitoring components with a corresponding radiation configuration are arranged on the frame, and the monitoring components are arranged along the length direction of the frame.

13. A device, characterized in that The device is provided with a discharge mechanism as described in any one of claims 1 to 12.

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