Lower ring type embedded guide cylinder for producing single crystal by Czochralski method

Abstract

The utility model discloses a lower ring type embedded guide cylinder for producing single crystals by a czochralski method, which particularly relates to the technical field of single crystal production and comprises an upper guide cylinder, a detachable guide mechanism is arranged at the bottom of the upper guide cylinder and comprises a lower guide cylinder ring, and the lower guide cylinder ring is arranged at the bottom of the upper guide cylinder. The outer side of the lower guide cylinder ring is fixedly sleeved with a connecting annular plate, and the two sides of the connecting annular plate are fixedly connected with elastic annular clamping strips. The detachable flow guide mechanism is arranged, flow guide can be more effectively carried out through the lower ring type design, particularly, the lower flow guide cylinder ring can better cope with silicon splashing and other conditions, the control and capture effect on crystal growth is improved, when damaged, the lower flow guide cylinder ring can be conveniently and independently replaced, and the lower flow guide cylinder ring is convenient to replace. The maintenance cost is reduced, the resource waste condition is reduced, and the problems that after local damage, the overall replacement cost is high, and crystal growth bract falling is caused by inaccurate outer guide lower edge silicon sputtering reflective crystal growth capture are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal production, and more specifically to a lower ring-type embedded guide tube for producing single crystals by a Czochralski method. Background Art

[0002] The straight-pull single crystal guide tube is a key component used in aircraft engines. It is usually made of nickel-based high-temperature alloy. The guide tube is located inside the combustion chamber of the jet engine and is used to guide the flow of gas and play a bearing and protection role in high temperature and high pressure environments. The single crystal structure means that the grains of the material grow completely in one direction. This structure can provide excellent high temperature performance and creep resistance.

[0003] After searching, the Chinese patent with application number CN202320207792.4 discloses a dust removal guide tube for Czochralski single crystals. The guide tube for the Czochralski single crystal furnace is a straight inner guide tube. The bottom of the inner guide tube is connected to the inner guide support ring and both are located directly above the crucible. If the inside of the furnace is not thoroughly cleaned, the volatiles present in the crystal pulling process will be blown directly into the crucible along the inner wall of the inner guide tube along with the flow of argon gas, resulting in the problem that the crystal rod may break at any time. The dust removal guide tube of the Czochralski single crystal can effectively prevent the volatiles from being blown into the crucible by the argon gas, reduce the probability of short crystal formation during the crystal pulling process, and improve the crystallization rate and quality of the crystal rod. The dust removal guide tube of the Czochralski single crystal can store the volatiles in the capture structure, and they will be cleaned uniformly when disassembled, and the cleaning operation is convenient and quick.

[0004] During the use of the guide tube, the cost of replacing the entire guide tube is high due to the high cost of returning the integral outer guide after partial damage. At the same time, the crystal growth may fall off due to the inaccurate capture of the reflective crystal growth of silicon sputtering at the lower edge of the outer guide, which affects the single crystal production efficiency and quality. Therefore, a lower ring embedded guide tube for producing single crystals by the direct pulling method is proposed. Utility Model Content

[0005] In order to overcome the problems and defects in the prior art, the utility model provides a lower ring-type embedded guide tube for producing single crystals by the Czochralski method to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a lower ring-type embedded guide tube for producing single crystals by Czochralski method, comprising an upper guide tube, wherein a disassembly guide mechanism is provided at the bottom of the upper guide tube;

[0007] The disassembly guide mechanism includes a lower guide tube ring, which is arranged at the bottom of the upper guide tube, a connecting annular plate is fixedly sleeved on the outer side of the lower guide tube ring, and elastic annular clips are fixedly connected on both sides of the connecting annular plate, an annular connecting clip groove is provided on the inner wall surface of the upper guide tube, and annular fixing clip grooves are provided on both sides of the inner wall of the annular connecting clip groove, an annular fixing groove is provided on the outer side of the lower guide tube ring near the top surface of the elastic annular clip, a sealing gasket is provided inside the annular fixing groove, and an adhesive layer is provided between the inner wall of the annular fixing groove and the sealing gasket.

[0008] Preferably, the connecting annular plate is movably connected to the annular connecting slot, the elastic annular clip is movably connected to the annular fixed slot, and the elastic annular clip is made of spring steel.

[0009] Preferably, the number of the connecting annular plates is set to two, the number of the elastic annular clips is set to multiple, and the cross-sectional shape of the multiple elastic annular clips is set to be semi-elliptical.

[0010] Preferably, the sealing gasket is adhered to the inner wall of the annular fixing groove through an adhesive layer, and the adhesive layer is made of epoxy resin adhesive.

[0011] Preferably, a mounting ring is fixedly connected to the top of the upper guide tube, a plurality of threaded holes are provided on the top surface of the mounting ring, and fixing bolts are threadedly connected inside the plurality of threaded holes.

[0012] Preferably, the interior of the upper guide tube includes a guide tube inner layer, a guide tube heat insulation layer and a guide tube outer shell layer from the inside to the outside, and the thickness of the guide tube inner layer and the guide tube heat insulation layer are both smaller than the thickness of the guide tube outer shell layer.

[0013] Preferably, the inner layer of the guide tube is made of high-purity quartz material, the heat insulation layer of the guide tube is made of cured felt material, and the outer shell layer of the guide tube is made of isostatic graphite material.

[0014] Technical effects and advantages of the utility model:

[0015] 1. By setting up a disassembly guide mechanism, the lower ring design can guide more effectively, especially the lower guide tube ring can better deal with the situation of silicon splashing, improve the control and capture effect of crystal growth, and when the lower guide tube ring is damaged, it can be easily replaced separately, reducing maintenance costs and reducing resource waste. At the same time, the sealing gasket and the bonding layer ensure the sealing of the guide tube, effectively preventing melt leakage, ensuring the safety of the production environment and the stability of crystal growth, and solving the problems of high overall replacement cost after local damage and inaccurate capture of the reflective crystal growth caused by silicon splashing at the lower edge of the outer guide tube, resulting in crystal growth falling off.

[0016] 2. Install the guide tube at a suitable position through the threaded holes and fixing bolts on the mounting ring. The guide tube is divided into a guide tube inner layer, a guide tube heat insulation layer and a guide tube outer shell layer. The inner layer is in direct contact with the melt to guide the flow. The heat insulation layer reduces heat loss and heat influence on the outside. The outer shell plays a protective and supporting role. Through the coordination of the upper guide tube, the lower guide tube ring and the connecting annular plate and other structures, plus the fixing effect of the elastic annular clip strip, the annular connecting slot, etc., the overall structure of the guide tube is stable and can maintain a good state during the production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0018] Figure 2 It is a schematic diagram of the structure of the utility model when viewed from above.

[0019] Figure 3 It is a cross-sectional structural schematic diagram of the utility model.

[0020] Figure 4 It is a schematic diagram of the cross-sectional structure of the lower guide tube ring of the utility model.

[0021] Figure 5 For the utility model Figure 3 Enlarged structural diagram at A in the middle.

[0022] Figure 6 It is a schematic diagram of the internal structure of the upper guide tube of the utility model.

[0023] The accompanying drawings are marked as follows: 1. upper guide tube; 2. lower guide tube ring; 3. connecting annular plate; 4. elastic annular clip; 5. annular connecting slot; 6. annular fixing slot; 7. annular fixing slot; 8. sealing gasket; 9. adhesive layer; 10. mounting ring; 11. threaded hole; 12. fixing bolt; 13. guide tube inner layer; 14. guide tube heat insulation layer; 15. guide tube outer shell layer. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] As attached Figure 1-6 The lower ring-type embedded guide tube for producing single crystals by the Czochralski method shown in the figure comprises an upper guide tube 1, and a disassembly guide mechanism is arranged at the bottom of the upper guide tube 1;

[0026] The disassembly guide mechanism includes a lower guide tube ring 2, which is arranged at the bottom of the upper guide tube 1, and a connecting annular plate 3 is fixedly sleeved on the outer side of the lower guide tube ring 2, and elastic annular clamping strips 4 are fixedly connected on both sides of the connecting annular plate 3. An annular connecting clamping groove 5 is provided on the inner wall surface of the upper guide tube 1, and annular fixing clamping grooves 6 are provided on both sides of the inner wall of the annular connecting clamping groove 5. An annular fixing groove 7 is provided on the outer side of the lower guide tube ring 2 near the top surface of the elastic annular clamping strip 4, a sealing gasket 8 is provided inside the annular fixing groove 7, and an adhesive layer 9 is provided between the inner wall of the annular fixing groove 7 and the sealing gasket 8.

[0027] As attached Figure 3-6 As shown, the connecting annular plate 3 and the annular connecting groove 5 are movably clamped, the elastic annular clamping strip 4 and the annular fixed clamping groove 6 are movably clamped, the elastic annular clamping strip 4 is made of spring steel, the number of connecting annular plates 3 is set to two, the number of elastic annular clamping strips 4 is set to multiple, and the cross-sectional shape of the multiple elastic annular clamping strips 4 is set to semi-elliptical, which is convenient for the rapid disassembly and installation of the lower guide tube ring 2.

[0028] As attached Figure 3-5 As shown, the sealing gasket 8 is adhered to the inner wall of the annular fixing groove 7 by the adhesive layer 9. The adhesive layer 9 is made of epoxy resin adhesive, which improves the fixing effect of the sealing gasket 8 and the lower guide tube ring 2 and ensures the sealing between the upper guide tube 1 and the lower guide tube ring 2.

[0029] As attached Figure 1-3 As shown, a mounting ring 10 is fixedly connected to the top of the upper guide tube 1. A plurality of threaded holes 11 are provided on the top surface of the mounting ring 10. Fixing bolts 12 are threadedly connected inside the plurality of threaded holes 11, so as to facilitate installation of the upper guide tube 1 to a suitable position.

[0030] As attached Figure 6 As shown, the interior of the upper guide tube 1 includes a guide tube inner layer 13, a guide tube heat insulation layer 14 and a guide tube outer shell layer 15 from the inside to the outside. The thickness of the guide tube inner layer 13 and the guide tube heat insulation layer 14 are both less than the thickness of the guide tube outer shell layer 15. The guide tube inner layer 13 is made of high-purity quartz material, the guide tube heat insulation layer 14 is made of cured felt material, and the guide tube outer shell layer 15 is made of isostatic graphite material, which improves the overall use effect and heat insulation protection effect of the guide tube 1.

[0031] Working principle of the utility model: During the use of a lower ring-type embedded guide tube for producing single crystals by the direct pulling method provided by the utility model, the upper guide tube 1 and the lower guide tube ring 2 are connected by being inserted into the annular connecting groove 5 through the connecting annular plate 3, and the elastic annular clamping strip 4 cooperates with the annular fixed groove 6 to play the role of preliminary fixing and connection, thereby ensuring the stability of the connection between the upper and lower parts, and the sealing gasket 8 is connected to the guide tube through the adhesive layer 9, thereby ensuring the sealing performance of the guide tube and preventing melt leakage and the like. During operation, the guide tube with a lower ring design, especially the lower guide tube ring 2, can more accurately protect against silicon splashing and the like, thereby improving the capture effect of crystal growth. When local damage occurs, the lower guide tube ring 2 is pushed upward to cause the elastic annular clamping strip 4 to produce elastic deformation, thereby causing the elastic annular clamping strip 4 to be moved out of the annular fixed groove 6, and at the same time, the connecting annular plate 3 is moved out of the annular connecting groove 5, thereby completing the disassembly of the lower guide tube ring 2, and the damaged part can be conveniently replaced, such as replacing the lower guide tube ring 2, thereby reducing the overall return and replacement cost.

[0032] Finally: The above embodiments are only illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the relevant technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A lower ring-type embedded guide tube for producing single crystals by Czochralski method, comprising an upper guide tube (1), characterized in that: A disassembly guide mechanism is provided at the bottom of the upper guide tube (1); The disassembly guide mechanism comprises a lower guide tube ring (2), the lower guide tube ring (2) being arranged at the bottom of the upper guide tube (1), a connecting annular plate (3) being fixedly sleeved on the outer side of the lower guide tube ring (2), both sides of the connecting annular plate (3) being fixedly connected with elastic annular clamping strips (4), an annular connecting clamping groove (5) being provided on the inner wall surface of the upper guide tube (1), annular fixing clamping grooves (6) being provided on both sides of the inner wall surface of the annular connecting clamping groove (5), an annular fixing groove (7) being provided on the outer side of the lower guide tube ring (2) near the top surface of the elastic annular clamping strip (4), a sealing gasket (8) being provided inside the annular fixing groove (7), and an adhesive layer (9) being provided between the inner wall of the annular fixing groove (7) and the sealing gasket (8).

2. The lower ring type embedded guide tube for producing single crystals by the Czochralski method according to claim 1 is characterized in that: The connecting annular plate (3) is movably connected to the annular connecting slot (5), and the elastic annular clip strip (4) is movably connected to the annular fixed slot (6), and the elastic annular clip strip (4) is made of spring steel.

3. The lower ring type embedded guide tube for producing single crystals by Czochralski method according to claim 1 is characterized in that: The number of the connecting annular plates (3) is set to two, the number of the elastic annular clips (4) is set to multiple, and the cross-sectional shape of the multiple elastic annular clips (4) is set to be semi-elliptical.

4. The lower ring type embedded guide tube for producing single crystals by Czochralski method according to claim 1 is characterized in that: The sealing gasket (8) is adhered to the inner wall of the annular fixing groove (7) via an adhesive layer (9), and the adhesive layer (9) is made of epoxy resin adhesive.

5. The lower ring type embedded guide tube for producing single crystal by Czochralski method according to claim 1, characterized in that: A mounting ring (10) is fixedly connected to the top of the upper guide tube (1), a plurality of threaded holes (11) are provided on the top surface of the mounting ring (10), and fixing bolts (12) are threadedly connected inside the plurality of threaded holes (11).

6. The lower ring type embedded guide tube for producing single crystals by Czochralski method according to claim 1, characterized in that: The interior of the upper guide tube (1) comprises, from the inside to the outside, a guide tube inner layer (13), a guide tube heat insulation layer (14) and a guide tube outer shell layer (15), and the thickness of the guide tube inner layer (13) and the guide tube heat insulation layer (14) are both smaller than the thickness of the guide tube outer shell layer (15).

7. The lower ring type embedded guide tube for producing single crystals by Czochralski method according to claim 6 is characterized in that: The guide tube inner layer (13) is made of high-purity quartz material, the guide tube heat insulation layer (14) is made of cured felt material, and the guide tube outer shell layer (15) is made of isostatic graphite material.

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