Sucking disc for vacuum sealing of crucible

Abstract

The utility model relates to the technical field of monocrystalline silicon production, and discloses a suction cup for vacuum sealing of a crucible, which comprises a suction cup body provided with a vacuumizing component and a vacuum releasing component. The vacuum relief assembly comprises a vacuum relief connecting pipe which is inserted and fixed to the suction cup body in a sleeved mode, the vacuum relief connecting pipe is connected with one end of a vacuum relief ball valve through a first flange connector, the other end of the vacuum relief ball valve is connected with the air outlet end of an air filter through a quick-assembly male connector, and the air inlet end of the air filter is connected with a miniature silencer. The miniature silencer and the air filter are arranged at the inlet end of the vacuum relief assembly, noise generated by vacuum relief can be effectively reduced, moisture in air entering the vacuum relief assembly can be filtered, and therefore the product quality is effectively protected.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon production, in particular to a suction cup used for crucible vacuum sealing. Background Art

[0002] The existing suction cup is as shown in the instruction manual. Figure 6 As shown, it includes a suction cup body, a vacuum discharge pipe and a vacuum pump pipe are connected to the suction cup body, and the vacuum discharge pipe is connected to one end of the vacuum discharge ball valve through a first flange joint. When the vacuum is discharged, the vacuum discharge ball valve is opened, and the outside air can enter the suction cup body through the vacuum discharge ball valve, the first flange joint, and the vacuum discharge pipe. When the vacuum is discharged, the noise is loud, and the moisture in the air also directly enters the suction cup, which will affect the product quality. Utility Model Content

[0003] The purpose of the utility model is to provide a suction cup for vacuum sealing of crucible, which can effectively reduce the noise generated by vacuum leakage by arranging a micro-muffler and an air filter at the entrance end of the vacuum leakage component, improve the working environment, and filter the moisture in the incoming air, so as to effectively protect the product quality.

[0004] The above technical objectives of the utility model are achieved through the following technical solutions:

[0005] A suction cup for vacuum sealing of a crucible, comprising a suction cup body, on which a vacuum pumping component and a vacuum release component are arranged;

[0006] The vacuum relief assembly includes a vacuum relief pipe that is inserted and fixed on the suction cup body. The vacuum relief pipe is connected to one end of the vacuum relief ball valve through a first flange joint. The other end of the vacuum relief ball valve is connected to the outlet end of the air filter through a quick-release external thread joint. The air inlet end of the air filter is connected to a miniature muffler.

[0007] Through the above technical solution, when in use, the suction cup is placed on the single crystal furnace, and the crucible is placed in the single crystal furnace. When the vacuum needs to be released, the vacuum release ball valve is opened, and the outside air enters the air filter through the micro-muffler, and then enters the suction cup body through the quick-install external thread connector, the vacuum release ball valve, the first flange connector and the vacuum release pipe in sequence, so as to balance the air pressure in the single crystal furnace, thereby facilitating the suction cup to be separated from the single crystal furnace;

[0008] The air entering the air filter can be silenced by a micro-muffler, thereby effectively avoiding the generation of noise; the incoming air can be dried by an air filter, thereby ensuring the dryness of the air entering the single crystal furnace.

[0009] The utility model is further configured as follows: the vacuum pumping assembly includes a vacuum pumping pipe which is inserted into and fixed on the suction cup body; the vacuum pumping pipe is connected to one end of the vacuum pumping ball valve through a second flange joint; and the other end of the vacuum pumping ball valve is connected to a quick-install pagoda joint.

[0010] Through the above technical scheme, the quick-release pagoda joint is connected to the vacuum pump through the external connecting pipe, and then the vacuum ball valve is opened to connect the inner cavity of the suction cup body to the vacuum pipe, the second flange joint, the vacuum ball valve, the quick-release pagoda joint, and the external connecting pipe. The vacuum pump works to evacuate the inside of the suction cup body.

[0011] The utility model is further configured such that: the first flange joint and the vacuum relief ball valve, the quick-install external thread joint and the vacuum relief ball valve, the second flange joint and the vacuum extraction ball valve, and the quick-install pagoda joint and the vacuum extraction ball valve are fixedly connected by clamps.

[0012] The clamp can be easily connected and disassembled, which is convenient for subsequent maintenance and repair work.

[0013] The utility model is further configured as follows: a sealing gasket is fixed at the lower end of the suction cup body, and the sealing gasket can increase the sealing performance between the suction cup body and the single crystal furnace.

[0014] The utility model is further configured as follows: a clamping ring with an L-shaped cross section is formed at the lower end of the suction cup body;

[0015] A clamping groove is formed on the inner side wall of the sealing gasket, and the clamping ring is inserted into the clamping groove;

[0016] The outer edge of the sealing gasket is formed with a convex ring, which is clamped between the arc-shaped pressure strip and the suction cup body; the arc-shaped pressure strip is sleeved with a screw, and the screw (52) is screwed onto the suction cup body (10).

[0017] The sealing gasket is clamped in the clamping ring through the clamping groove to increase the connection stability between the suction cup body and the sealing gasket; the sealing gasket can be further tightened by screws and arc-shaped pressure strips.

[0018] The outstanding effects of the utility model are:

[0019] Compared with the prior art, by arranging a miniature silencer and an air filter at the entrance end of the vacuum discharge component, the noise generated by the vacuum discharge can be effectively reduced and the moisture in the incoming air can be filtered, thereby effectively protecting the product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the utility model;

[0021] Figure 2 for Figure 1 A partial enlarged view of A;

[0022] Figure 3 for Figure 1 A partial enlarged view of B;

[0023] Figure 4 Another side view of the utility model;

[0024] Figure 5 It is a partial cross-sectional view of the utility model;

[0025] Figure 6 It is a structural schematic diagram of an existing suction cup.

[0026] Reference numerals: 10, suction cup body; 101, clamping ring;

[0027] 20. Vacuuming assembly; 201. Vacuuming pipe; 202. Second flange joint; 203. Vacuuming ball valve; 204. Quick-install pagoda joint;

[0028] 30. Vacuum relief assembly; 301. Vacuum relief pipe; 302. First flange joint; 303. Vacuum relief ball valve; 304. Quick-release external thread joint; 305. Air filter; 306. Miniature muffler;

[0029] 40. Clamp;

[0030] 50. Sealing gasket; 51. Arc-shaped pressure strip; 52. Screw;

[0031] 501, snap-fit ​​groove; 502, convex ring. DETAILED DESCRIPTION

[0032] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0033] The following references Figures 1 to 5 The utility model is described as follows:

[0034] A suction cup for vacuum sealing a crucible, comprising a suction cup body 10, wherein a vacuum pumping component 20 and a vacuum release component 30 are provided on the suction cup body 10;

[0035] The vacuum relief assembly 30 includes a vacuum relief pipe 301 which is inserted and fixed on the suction cup body 10. The vacuum relief pipe 301 is connected to one end of a vacuum relief ball valve 303 via a first flange joint 302. The other end of the vacuum relief ball valve 303 is connected to the outlet end of an air filter 305 via a quick-release external thread joint 304. The air inlet end of the air filter 305 is connected to a miniature muffler 306.

[0036] When in use, the suction cup is placed on the single crystal furnace, and the crucible is placed in the single crystal furnace. When the vacuum needs to be released, the vacuum release ball valve is opened, and the outside air enters the air filter through the micro-muffler, and then enters the suction cup body through the quick-release external thread connector, the vacuum release ball valve, the first flange connector and the vacuum release pipe in sequence, thereby balancing the air pressure in the single crystal furnace, making it easier for the suction cup to leave the single crystal furnace;

[0037] The air entering the air filter can be silenced by a micro-muffler, thereby effectively avoiding the generation of noise; the incoming air can be dried by an air filter, thereby ensuring the dryness of the air entering the single crystal furnace.

[0038] The vacuum assembly 20 includes a vacuum pipe 201 which is inserted and fixed on the suction cup body 10 . The vacuum pipe 201 is connected to one end of a vacuum ball valve 203 through a second flange joint 202 . The other end of the vacuum ball valve 203 is connected to a quick-release pagoda joint 204 .

[0039] The quick-release pagoda joint is connected to the vacuum pump through the external connecting pipe, and then the vacuum ball valve is opened to connect the inner cavity of the suction cup body to the vacuum pump through the vacuum connecting pipe, the second flange joint, the vacuum ball valve, the quick-release pagoda joint, and the external connecting pipe. The vacuum pump works to evacuate the inside of the suction cup body.

[0040] The first flange joint 302 and the vacuum relief ball valve 303 , the quick-release external thread joint 304 and the vacuum relief ball valve 303 , the second flange joint 202 and the vacuum extraction ball valve 203 , and the quick-release pagoda joint 204 and the vacuum extraction ball valve 203 are fixedly connected by clamps 40 .

[0041] The clamp can be easily connected and disassembled, which is convenient for subsequent maintenance and repair work.

[0042] A sealing gasket 50 is fixed to the lower end of the suction cup body 10. The sealing gasket can increase the sealing performance between the suction cup body and the single crystal furnace.

[0043] The lower end of the suction cup body 10 is formed with a clamping ring 101 with an "L"-shaped cross section;

[0044] A clamping groove 501 is formed on the inner side wall of the sealing gasket 50, and the clamping ring 101 is inserted into the clamping groove 501;

[0045] The outer edge of the sealing gasket 50 is formed with a convex ring 502 , which is clamped between the arc-shaped pressure strip 51 and the suction cup body 10 ; the arc-shaped pressure strip 51 is sleeved with a screw 52 , which is threadedly connected to the suction cup body 10 .

[0046] The sealing gasket is clamped in the clamping ring through the clamping groove to increase the connection stability between the suction cup body and the sealing gasket; the sealing gasket can be further tightened by screws and arc-shaped pressure strips.

[0047] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications of the above assumptions should also be regarded as the protection scope of the present invention.

Claims

1. A suction cup for vacuum sealing a crucible, comprising a suction cup body (10), characterized in that: The suction cup body (10) is provided with a vacuum extraction component (20) and a vacuum release component (30); The vacuum relief assembly (30) comprises a vacuum relief pipe (301) which is inserted into and fixed on the suction cup body (10); the vacuum relief pipe (301) is connected to one end of a vacuum relief ball valve (303) via a first flange joint (302); the other end of the vacuum relief ball valve (303) is connected to an air outlet end of an air filter (305) via a quick-install external thread joint (304); and the air inlet end of the air filter (305) is connected to a miniature muffler (306).

2. A suction cup for vacuum sealing of crucible according to claim 1, characterized in that: The vacuum pumping assembly (20) comprises a vacuum pumping pipe (201) which is inserted into and fixed on the suction cup body (10); the vacuum pumping pipe (201) is connected to one end of a vacuum pumping ball valve (203) via a second flange joint (202); and the other end of the vacuum pumping ball valve (203) is connected to a quick-install pagoda joint (204).

3. A suction cup for vacuum sealing of crucible according to claim 2, characterized in that: The first flange joint (302) and the vacuum relief ball valve (303), the quick-install external thread joint (304) and the vacuum relief ball valve (303), the second flange joint (202) and the vacuum extraction ball valve (203), and the quick-install pagoda joint (204) and the vacuum extraction ball valve (203) are each fixedly connected via a clamp (40).

4. A suction cup for vacuum sealing of crucible according to claim 1, characterized in that: A sealing gasket (50) is fixed to the lower end of the suction cup body (10).

5. A suction cup for vacuum sealing of crucible according to claim 4, characterized in that: The lower end of the suction cup body (10) is formed with a clamping ring (101) having an L-shaped cross section; A clamping groove (501) is formed on the inner side wall of the sealing gasket (50), and the clamping ring (101) is inserted into the clamping groove (501); The outer edge of the sealing gasket (50) is formed with a convex ring (502), and the convex ring (502) is clamped between the arc-shaped pressure strip (51) and the suction cup body (10); the arc-shaped pressure strip (51) is sleeved with a screw (52), and the screw (52) is screwed onto the suction cup body (10).

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