Target material sheath and sputtering machine

Abstract

The utility model belongs to the technical field of target material processing, and discloses a target material sheath and a sputtering machine. The target material sheath comprises a top plate, a bottom plate, a first side wall, at least one partition plate and a second side wall, and the top plate, the bottom plate and the first side wall are connected in a sealed mode and can define a hollow cavity with an opening in one side; the at least one partition plate is arranged in the cavity and connected with the first side wall, the cavity is divided into a plurality of small cavities by the partition plates, and a plurality of sets of to-be-welded target materials are placed in the small cavities; the second side wall can be connected with the top plate, the bottom plate and the first side wall and can seal the open cavity, and at least one exhaust pipe communicated with the cavity is arranged on the second side wall. According to the device, an operator is allowed to assemble and weld target material sheaths of multiple sets of target materials in the same welding period at the same time instead of one by one, so that the total assembling and welding time is greatly shortened, the welding efficiency is effectively improved, meanwhile, the consumption of target material sheathing materials is reduced, and the welding cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of target material processing, in particular to a target material package and a sputtering machine. Background Art

[0002] As an important component of semiconductor materials for precision devices, target materials often use diffusion welding to ensure connection strength and reliability. Diffusion welding is a solid-state welding technology that connects two or more material surfaces together under high temperature and high pressure conditions. This process uses the diffusion phenomenon of materials at high temperatures to allow atoms to migrate through the contact interface to form a strong bond. A set of target material structures consists of a backing plate and a target material. During the diffusion welding process, the target material to be welded needs to be placed in a target material package for protection to prevent the target material from being contaminated and oxidized; at the same time, the target material package can evenly transfer the pressure applied during the welding process to ensure that the materials at the welding point are fully contacted and diffused.

[0003] At present, the design of target package is usually to equip a set of target structure to be welded with a target package. Although this design can effectively protect the target, it increases the consumption of target package materials, resulting in an increase in cost; at the same time, each target package needs to be individually evacuated before welding, and the exhaust port needs to be pressurized and closed, which makes the preparation work before welding cumbersome and complicated, thereby reducing welding efficiency. Utility Model Content

[0004] The utility model aims to provide a target material package and a sputtering machine which can improve the target material welding efficiency and further reduce the welding cost.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] Target material package, including:

[0007] roof;

[0008] Bottom plate; the bottom plate and the top plate are arranged relatively up and down;

[0009] A first side wall, wherein the top edge of the first side wall is sealed to the top plate; the bottom edge of the first side wall is sealed to the bottom plate, and the top plate, the bottom plate and the first side wall together form a hollow cavity with one side open;

[0010] at least one partition, the partition being disposed in the cavity and connected to the first side wall;

[0011] The second side wall is arranged on one side of the cavity opening, and the second side wall can be connected to the top plate, the bottom plate and the first side wall to seal the cavity; at least one exhaust pipe connected to the cavity is arranged on the second side wall.

[0012] Furthermore, a plurality of partitions are provided, and the plurality of partitions are spaced apart along a height direction from the top plate to the bottom plate to divide the cavity into a plurality of small cavities.

[0013] Furthermore, a plurality of exhaust pipes are provided, and each exhaust pipe is provided corresponding to each small cavity.

[0014] Furthermore, the partition is fixedly connected to the first side wall.

[0015] Furthermore, the partition is detachably connected to the first side wall.

[0016] Furthermore, a slot is provided on the inner side of the first side wall, and the partition is inserted into the slot.

[0017] Furthermore, a protrusion is provided on the inner side of the first side wall, and the partition is overlapped on the protrusion.

[0018] Furthermore, the first side wall, the top plate and the bottom plate are welded.

[0019] Furthermore, the second side wall, the top plate, the bottom plate and the first side wall are welded.

[0020] A sputtering machine comprises a vacuum pump and any one of the target material packages described above, wherein the vacuum pump is connected to the exhaust pipe to evacuate the gas inside the target material package to ensure that the inside of the target material package reaches a preset vacuum degree.

[0021] Beneficial effects of the utility model:

[0022] A target material package and a sputtering machine include a top plate, a bottom plate, a first side wall, at least one partition plate and a second side wall, wherein the top plate, the bottom plate and the first side wall are sealed and connected to form a hollow cavity with one side open; at least one partition plate is arranged in the cavity and connected to the first side wall; the second side wall can be connected to the top plate, the bottom plate and the first side wall to seal the above-mentioned open cavity, and at least one exhaust pipe connected to the cavity is arranged on the second side wall. By using the partition plate to divide the target material package cavity, multiple groups of target materials can be assembled and welded for the target material package at the same time in the same welding cycle without affecting the welding quality of the target materials, instead of one by one, thereby greatly reducing the total time of assembly and welding, effectively improving the welding efficiency, and also reducing the consumption of the target material package by assembling the targets one by one, thereby reducing the welding cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the structure of the target material package of the utility model;

[0024] Figure 2This is a diagram of the use state of the target material sheath welding of the utility model.

[0025] In the figure:

[0026] 1. Top plate; 2. Bottom plate; 3. First side wall; 4. Partition plate; 5. Second side wall; 6. Exhaust pipe. DETAILED DESCRIPTION

[0027] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0028] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0030] In the description of this embodiment, the terms "upper", "lower", "left", "right", etc., and the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of description and simplified operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0031] Please refer to Figure 1-Figure 2As shown, the present application provides a target material package, which can improve the target material welding efficiency and further reduce the welding cost. The target material package includes: a top plate 1, a bottom plate 2, a first side wall 3, at least one partition plate 4 and a second side wall 5, wherein the top edge of the first side wall 3 is sealed and connected to the top plate 1, and the bottom edge of the first side wall 3 is sealed and connected to the bottom plate 2. The top plate 1, the bottom plate 2 and the first side wall 3 are enclosed to form a hollow cavity with one side open, at least one partition plate 4 is arranged inside the cavity, the partition plate 4 is connected to the first side wall 3, and the second side wall 5 is arranged on the opening side of the cavity. The second side wall 5 can be connected to the top plate 1, the bottom plate 2 and the first side wall 3, and the second side wall 5 can seal the above-mentioned open cavity, and at least one exhaust pipe 6 connected to the cavity is arranged on the second side wall 5. Before welding preparation, the hollow cavity space enclosed by the top plate 1, the bottom plate 2, and the first side wall 3 and opened on one side is divided into multiple small cavities by at least one partition 4. The operator can put multiple groups of target materials into the small cavities respectively, and then use the second side wall 5 to seal the open cavity to form a sealed cavity. Then, use at least one exhaust pipe 6 connected to the cavity set on the second side wall 5 to extract the air in the target material package, so that the exhaust pipe 6 is closed after the inside of the target material package reaches a preset vacuum degree. By using the partition 4 to divide the target material package cavity, it is possible to assemble and weld multiple groups of target materials at the same time in the same welding cycle without affecting the welding quality of the target materials, instead of one by one, thereby greatly reducing the total time of assembly and welding, effectively improving the welding efficiency, and also reducing the consumption of the target material package by assembling the targets one by one, thereby reducing the welding cost.

[0032] like Figure 1As shown, in order to allow the target material package to accommodate more target materials, in some embodiments, multiple partitions 4 can be provided, and multiple partitions 4 are spaced along the height direction of the top plate 1 to the bottom plate 2 to divide the height area of ​​the cavity to form multiple small cavities, which can more effectively utilize the internal space of the cavity. Optionally, multiple partitions 4 are evenly distributed along the height direction of the top plate 1 to the bottom plate 2, so that the small cavities for holding the target materials to be welded can be more uniform, and the cavity space can be reasonably utilized. As many target materials to be welded as possible can be placed in the limited cavity space to improve welding efficiency. Furthermore, the partition 4 is detachably connected to the first side wall 3, so that the position of the partition 4 can be adjusted according to the thickness of different target materials, and each group of target materials to be welded can be ensured to be welded at the best position, which improves the overall flexibility and adaptability of the target material package and can adapt to targets of different specifications and sizes. Furthermore, a plurality of slots can be provided on the inner side of the first side wall 3, the slots are evenly distributed along the height direction from the top plate 1 to the bottom plate 2, and the partition 4 is inserted into the slots; the slots can make the installation and removal of the partition 4 more convenient, and the partition 4 is inserted into the slots, and the slots can provide reliable support and fixation, ensuring that the partition 4 will not be easily loosened or shifted during the welding process, thereby enhancing the stability of the overall structure. Alternatively, a plurality of protrusions can be provided on the inner side of the first side wall 3, the protrusions are evenly distributed along the height direction from the top plate 1 to the bottom plate 2, and the partition 4 is overlapped on the protrusions. The protrusion structure can be integrally formed during the manufacturing process, and the manufacturing method is simple. Similarly, the protrusion structure can also provide stable support for the partition 4. In other embodiments, the partition 4 is fixedly connected to the first side wall 3, and the fixed connection can improve the load-bearing capacity of the partition 4, so that each plate can more evenly distribute the load, reduce stress concentration, and is suitable for situations where a heavier target needs to be carried. It should be noted that the shape of the partition 4 can be a shape matching the cavity or a long strip, as long as it can be connected to the first side wall 3 and can play a dividing role, and no further restrictions are made here.

[0033] In some embodiments, the first side wall 3, the top plate 1 and the bottom plate 2 are connected to each other by welding to form a hollow cavity with one side open. The operator uses argon arc welding to weld them. The tungsten electrode generates an arc under the protection of the inert gas argon to melt the connection between the first side wall 3, the top plate 1 and the bottom plate 2 to form a firm welded joint; argon as a protective gas can prevent oxidation and contamination of the welding area, ensure the quality and strength of the weld, and provide a strong guarantee for the subsequent formation of a closed high-pressure cavity. Figure 2 As shown, further, after the target material is placed in the cavity, the second side wall 5 and the top plate 1, the bottom plate 2 and the first side wall 3 can be connected to each other by welding. By using the above welding method, the connection between the second side wall 5 and the first side wall 3, and the top plate 1 and the bottom plate 2 is welded to seal the cavity to form a closed cavity, thereby ensuring that the cavity has high bearing capacity and sealing performance in a high-pressure environment.

[0034] In some embodiments, multiple exhaust pipes 6 are provided, and each exhaust pipe 6 is provided corresponding to each small cavity; each small cavity corresponds to an exhaust pipe 6, which can quickly and effectively exhaust the air inside the cavity, speed up the exhaust efficiency, and enable the closed cavity to quickly reach a preset vacuum degree.

[0035] The present application also provides a sputtering machine, including a vacuum pump and a target material package in any of the above embodiments, wherein the vacuum pump is connected to an exhaust pipe 6 to exhaust the gas inside the target material package so that the inside of the target material package reaches a preset vacuum degree. The device divides the target material package cavity by using a partition 4, so that multiple groups of target materials can be assembled and welded with target material packages at the same time in the same welding cycle without affecting the welding quality of the target materials, instead of one by one, thereby greatly reducing the total welding time, effectively improving the welding efficiency, and also reducing the consumption of the target material package by assembling the targets one by one, thereby reducing the welding cost.

[0036] The following describes in detail the operation process of the target package and the sputtering machine provided in this embodiment:

[0037] First, the preparation work before welding is carried out, and multiple groups of target materials are placed in a hollow target material package cavity formed by the top plate 1, the bottom plate 2 and the first side wall 3 and open on one side. The multiple groups of target materials are separated by a partition 4 arranged in the cavity; after the target materials are placed, the open cavity is sealed by the second side wall 5 to form a closed cavity; then, the air inside the sealed target material package is extracted by using the exhaust pipe 6 arranged on the second side wall 5 to make the inside reach a preset vacuum degree, and then the exhaust pipe 6 is closed;

[0038] Secondly, the target material is welded by placing the sealed target package at a preset vacuum degree in a welding furnace to weld the target material;

[0039] Finally, after welding is completed, the second side wall 5 is removed to take out the multiple groups of target materials that have been welded.

[0040] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A target material package, characterized in that: include: Top plate (1); A bottom plate (2); the bottom plate (2) and the top plate (1) are arranged opposite to each other in an upper and lower direction; A first side wall (3), wherein the top edge of the first side wall (3) is sealed to the top plate (1); the bottom edge of the first side wall (3) is sealed to the bottom plate (2), and the top plate (1), the bottom plate (2) and the first side wall (3) together form a hollow cavity with one side open; at least one partition (4), the partition (4) being arranged in the cavity and connected to the first side wall (3); A second side wall (5), the second side wall (5) is arranged on one side of the cavity opening, the second side wall (5) can be connected to the top plate (1), the bottom plate (2) and the first side wall (3) so as to seal the cavity; at least one exhaust pipe (6) connected to the cavity is arranged on the second side wall (5).

2. The target material package according to claim 1, characterized in that: A plurality of partitions (4) are provided, and the plurality of partitions (4) are arranged at intervals along the height direction from the top plate (1) to the bottom plate (2) so as to divide the cavity into a plurality of small cavities.

3. The target material sheath according to claim 2, characterized in that: A plurality of exhaust pipes (6) are provided, and each exhaust pipe (6) is provided corresponding to each small cavity.

4. The target material package according to claim 1, characterized in that: The partition plate (4) is fixedly connected to the first side wall (3).

5. The target material package according to claim 1, characterized in that: The partition plate (4) is detachably connected to the first side wall (3).

6. The target material package according to claim 5, characterized in that: A slot is provided on the inner side of the first side wall (3), and the partition plate (4) is inserted into the slot.

7. The target material sheath according to claim 5, characterized in that: A protrusion is arranged on the inner side of the first side wall (3), and the partition plate (4) is overlapped on the protrusion.

8. The target material package according to claim 1, characterized in that: The first side wall (3), the top plate (1) and the bottom plate (2) are welded.

9. The target material package according to claim 1, characterized in that: The second side wall (5), the top plate (1), the bottom plate (2) and the first side wall (3) are welded.

10. A sputtering machine comprising a vacuum pump and a target package according to any one of claims 1 to 9, characterized in that: The vacuum pump is connected to the exhaust pipe (6) and is used to evacuate the gas inside the target material package to ensure that the inside of the target material package reaches a preset vacuum degree.

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