Quick-release type spraying assembly and photoresist spraying equipment

Abstract

The utility model provides a quick-release type spraying assembly and photoresist spraying equipment. The quick-release type spraying assembly comprises a stand and a nozzle, the stand is provided with a communicating cavity, and the nozzle extends into the communicating cavity to be communicated with the photoresist pipeline; the side wall of the stand is provided with a rotating handle and a clamping groove, the side wall of the nozzle is provided with a convex side wing, when the nozzle extends into the communicating cavity, the side wing extends into the clamping groove, and the rotating handle drives the stand to rotate around the shaft, so that the side wing is connected with the clamping groove in a clamping manner; and the clamping groove is obliquely arranged, so that when the side wings are clamped with the clamping groove, the nozzle abuts against the light resistance pipeline. According to the configuration, the rotating handle, the side wings and the clamping grooves are additionally arranged, the rotating handle is driven during installation, the side wings and the clamping grooves are clamped, the contact time of an operator and the nozzle is shortened, and the probability that the nozzle is polluted is reduced; meanwhile, the clamping grooves are obliquely arranged, so that the sealing performance of the nozzles is guaranteed, the nozzles installed and replaced every time can be kept at the same height, and the consistency of the film thickness of the wafer is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor manufacturing especially, a kind of quick-release type spraying assembly and photoresist spraying equipment. BACKGROUND

[0002] The existing photoresist nozzle is usually screwed with photoresist pipeline, and the photoresist nozzle needs to be tightened during installation, and relies on the sealing ring extruded by thread to achieve the sealing and connection of nozzle and photoresist pipeline.

[0003] But there are the following problems in the threaded connection of nozzle and photoresist pipeline:

[0004] 1、The operator will touch the surface of photoresist nozzle during replacement, which is easy to form a pollution source, and fall on the wafer surface during subsequent photoresist spraying process, causing defects;

[0005] 2、The spraying height of photoresist nozzle is different due to different screwing forces when the operator screws the photoresist nozzle, which causes the film thickness deviation between wafers and affects the product consistency.

[0006] Therefore, how to avoid the pollution of nozzle during installation and how to ensure the consistency of the spraying height of nozzle have become technical problems to be solved by the technical personnel in the field. INVENTION CONTENTS

[0007] The utility model aims at providing a quick-release type spraying assembly and photoresist spraying equipment to reduce the touch of operator to nozzle during installation, and ensure the consistency of the spraying height of installed nozzle.

[0008] In order to achieve the above purpose, the utility model provides a quick-release type spraying assembly, which comprises a rack and a nozzle.

[0009] The rack has a communication cavity, and the nozzle extends into the communication cavity to communicate with photoresist pipeline.

[0010] The side wall of the rack is provided with a rotating handle and a clamping groove, and the side wall of the nozzle is provided with an outward convex wing, the wing extends into the clamping groove when the nozzle extends into the communication cavity, and the rotating handle drives the rack to rotate around the shaft to make the wing and the clamping groove clamped and connected.

[0011] Among them, the clamping groove is inclined to make the nozzle abut against the photoresist pipeline when the wing and the clamping groove are clamped.

[0012] Optionally, the card slot has a flat section and an inclined section, one end of the flat section is connected with one end of the inclined section, the side wing extends into the card slot from the flat section and can move to a clamping position along the inclined section.

[0013] Optionally, the clamping position is located at one end of the inclined section away from the flat section.

[0014] Optionally, the inclined section is inclined towards the direction close to the photoresist pipeline.

[0015] Optionally, a sealing ring is arranged at the connection position of the nozzle and the photoresist pipeline, the sealing ring cooperates with the nozzle and the photoresist pipeline to form a seal when the side wing is clamped with the card slot.

[0016] Optionally, a plurality of side wings are arranged on the side wall of the nozzle, and the protruding directions of the plurality of side wings are arranged at an angle.

[0017] Optionally, a plurality of card slots matched with the side wing are arranged on the side wall of the frame, and the plurality of card slots are arranged at intervals around the edge of the frame.

[0018] Optionally, the protruding distance of the side wing is greater than the wall thickness of the frame, so that the side wing extends out of the card slot.

[0019] Optionally, the extension direction of the rotating handle is arranged at an angle with the plane where the frame is located.

[0020] In order to achieve the above purpose, the utility model also provides a photoresist spraying equipment, which comprises a carrier and a quick-release spraying assembly as described above.

[0021] The carrier is used for carrying a wafer, and the nozzle is used for spraying photoresist on the surface of the wafer after being installed with the frame.

[0022] Compared with the nozzle in the prior art, the quick-release spraying assembly and the photoresist spraying equipment provided by the application have the following advantages:

[0023] The quick-release spraying assembly provided by the application adds a rotating handle, a side wing and a card slot, after the nozzle extends into the communication cavity, the side wing extends into the card slot, the frame is driven to rotate around the shaft by driving the rotating handle, the side wing is clamped with the card slot, compared with the existing threaded connection which needs to tighten the nozzle, the frame is driven to rotate by the rotating handle, the contact time of the operator with the nozzle is reduced, and the probability of the nozzle being contaminated is reduced. Meanwhile, the card slot is inclined, so that when the side wing is clamped with the card slot, the nozzle can abut against the photoresist pipeline, on the one hand, the sealing performance of the connection part of the photoresist pipeline and the nozzle is ensured, and on the other hand, the nozzle can be kept at the same height every time the nozzle is installed and replaced, and the consistency of the wafer film thickness is improved.

[0024] The light blocking spraying device provided by the application reduces the contact time of the operator with the nozzle and the probability of the nozzle being contaminated by using the quick-release spraying assembly and driving the stand to rotate by using the rotary handle; meanwhile, the clamping groove is obliquely arranged, so that the sealing performance is ensured, the consistency of the installation height of the nozzle is ensured, and the consistency of the wafer film thickness is improved. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 The structure diagram of the quick-release spraying assembly provided by the embodiment of the application is shown in the figure.

[0026] Figure 2 The cross-sectional view of the quick-release spraying assembly provided by the embodiment of the application is shown in the figure.

[0027] Figure 3 The side view of the quick-release spraying assembly provided by the embodiment of the application is shown in the figure.

[0028] Figure 4 The top view of the quick-release spraying assembly provided by the embodiment of the application is shown in the figure.

[0029] Figure 5 The schematic diagram of the nozzle extending into the stand provided by the embodiment of the application is shown in the figure.

[0030] Figure 6 The side view of the nozzle extending into the stand provided by the embodiment of the application is shown in the figure.

[0031] Figure 7 The schematic diagram of the side wing clamping with the clamping groove provided by the embodiment of the application is shown in the figure.

[0032] Among them, the explanation of each figure mark is as follows:

[0033] 1-nozzle; 10-extended section; 11-spraying section; 12-side wing;

[0034] 2-photoresist pipeline;

[0035] 3-stand; 30-rotary handle; 31-communication cavity; 32-clamping groove; 320-straight section; 321-oblique section;

[0036] 4-sealing ring. DETAILED DESCRIPTION

[0037] In order to make the purpose, advantages and characteristics of the utility model more clear, the utility model will be explained in further detail below in combination with the drawings and specific embodiments.

[0038] As used in this specification, the singular forms "a," "an" and "the" include plural referents unless the context clearly dictates otherwise. The term "or" is generally employed in its sense including "and / or" unless the context clearly dictates otherwise. The term "and / or" means "and" or "or," i.e., "and / or" will be interpreted in the alternative (and a disjunctive sense). Similarly, the terms "and," "or" and "and / or" are used in their normal, generic sense, unless the content clearly dictates otherwise. The term "plurality" will be interpreted as including "two or more" unless the context clearly dictates otherwise. The terms "first," "second," "third," etc. are used only to describe different instances and do not imply a relative importance or an actual number of the indicated technical features. Thus, features defined with "first," "second," "third," etc. can explicitly or implicitly include one or at least two of the features. The terms "one end" and "the other end" and "proximal" and "distal" generally refer to two parts corresponding to each other, which not only includes the end point, and the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, it can be fixedly connected, or detachably connected, or integrated; it can be directly connected, or indirectly connected through an intermediate medium, or the internal communication or interaction of two elements. In addition, as used in this specification, a component disposed in another component generally only indicates a connection, coupling, cooperation or transmission relationship between the two components, and the two components can be directly or indirectly connected, coupled, cooperated or transmitted through an intermediate component, and cannot be understood as indicating or implying the spatial positional relationship between the two components, i.e. one component can be in any direction inside, outside, above, below or one side of another component, unless the content is otherwise clearly indicated. The terms "up", "down", "top", "bottom" are generally arranged in the direction of gravity; the terms "vertical direction" generally refer to the direction along the gravity, which is generally perpendicular to the ground, and the terms "horizontal direction" generally refer to the direction parallel to the ground; for ordinary skilled in the art, the specific meaning of the above terms in this specification can be understood according to the specific situation.

[0039] The utility model discloses a quick release type spraying assembly and photoresist spraying equipment, which can reduce the touch of the operator to the nozzle during installation and ensure the consistency of the spraying height of the installed nozzle.

[0040] Please refer to Figures 1 to 4The present invention provides a quick-detachable spray assembly, comprising: a stand 3 and a nozzle 1; the stand 3 has a connecting cavity 31, the nozzle 1 extends into the connecting cavity 31 to communicate with the photoresist pipe 2; a rotating handle 30 and a card slot 32 are provided on the side wall of the stand 3, and a protruding side wing 12 is provided on the side wall of the nozzle 1. When the nozzle 1 extends into the connecting cavity 31, the side wing 12 extends into the card slot 32, and the rotating handle 30 drives the stand 3 to rotate around the axis so that the side wing 12 is engaged with the card slot 32; wherein the card slot 32 is tilted so that when the side wing 12 is engaged with the card slot 32, the nozzle 1 abuts against the photoresist pipe 2. It should be noted that in the prior art, the connection method between the nozzle 1 and the stand 3 is mostly threaded connection. When the operator replaces or maintains the nozzle 1, he usually needs to hold the nozzle 1 and apply a rotating force to the nozzle 1 to tighten the nozzle 1. Since operators need to contact the sidewalls of the nozzle 1 for a long time, it is easy for them to form a contamination source on the sidewalls of the nozzle 1. During the subsequent production and processing, the contaminants will drip onto the wafer surface, causing defects and affecting the product yield. At the same time, due to the difference in strength of the operators, the height of the nozzle 1 after screwing often varies, which results in inconsistent film thickness after the nozzle 1 sprays the photoresist. When using the quick-release spray assembly provided in this embodiment, when replacing or maintaining the nozzle 1, the operator only needs to insert the nozzle 1 into the connecting cavity 31 and the side wing 12 into the slot 32. Then, by rotating the handle 30, the frame 3 is driven to rotate about its axis, thereby engaging the side wing 12 with the slot 32. During this process, the operator's contact time with the nozzle 1 is shortened, and there is no need to apply force to the nozzle 1, which reduces the probability of a contamination source forming on the side wall of the nozzle 1; at the same time, since the card slot 32 is tilted, the card slot 32 is fixed in position each time, which can ensure that the nozzle 1 and the photoresist pipeline 2 are tightly abutted to prevent leakage, and can also ensure the high consistency of the nozzle 1 to avoid uneven film thickness.

[0041] In an optional embodiment, Figure 1 For example, the stand 3 is disc-shaped, with a cylindrical connecting cavity 31 at the center. The nozzle 1 has an insertion section 10 and a spraying section 11. The insertion section 10 is connected to the spraying section 11, and the size of the insertion section 10 is adapted to the size of the connecting cavity 31. The side wing 12 is a cylindrical component, which is arranged at the connection position between the insertion section 10 and the spraying section 11. During the installation of the nozzle 1, the insertion section 10 and the side wing 12 extend into the interior of the stand 3, and the spraying section 11 is exposed from the stand 3. In some other embodiments, the stand 3 can be configured as a rectangular parallelepiped, a polygonal prism, or other irregular shapes; the side wing 12 can also be a prism, a rectangular parallelepiped, or other irregular shapes. Figure 1In the shown example, the rotating handle 30 is arranged parallel to the plane of the shelf 3. In other embodiments, the extending direction of the rotating handle 30 can be arranged at an angle to the plane of the shelf 3, for example, the angle between the extending direction of the rotating handle 30 and the plane of the shelf 3 is 30°-60°, so as to facilitate the operator to apply force. Meanwhile, please refer to Figures 6 to 7 In the present embodiment, the inclined arrangement of the clamping groove 32 means that the lower edge of the clamping groove 32 is arranged obliquely, while the upper edge is arranged parallel to the plane of the shelf 3, i.e., when the rotating handle 30 drives the shelf 3 to rotate, the lower edge of the clamping groove 32 drives the nozzle 1 to gradually move towards the photoresist pipeline 2, so that the nozzle 1 gradually abuts against the photoresist pipeline 2; in another embodiment, the clamping groove 32 can also be arranged completely obliquely, i.e., the upper edge and the lower edge of the clamping groove 32 are arranged obliquely, so that the side wing 12 moves in the fixed track formed by the clamping groove 32 without jumping up and down during the movement. In addition, in order to ensure the force balance of the nozzle 1 after installation, two side wings 12 are usually arranged symmetrically on the side wall of the nozzle 1, and correspondingly, two clamping grooves 32 are arranged. Those skilled in the art can reasonably configure the shelf 3, the nozzle 1 and the clamping groove 32 according to the actual situation, which is not limited in the present embodiment.

[0042] As an optional embodiment, please refer to Figure 3 and Figures 6 to 7 The clamping groove 32 has a straight section 320 and an inclined section 321, one end of the straight section 320 is connected to one end of the inclined section 321, the side wing 12 extends into the clamping groove 32 from the straight section 320 and can move to the clamping position along the inclined section 321. Further, the clamping position is located at the end of the inclined section 321 away from the straight section 320. Further, the inclined section 321 is inclined towards the photoresist pipeline 2. It should be noted that, in Figure 3In the shown example, the extending direction of the flat section 320 is perpendicular to the plane where the stand 3 is located, and the extending direction of the inclined section 321 is at an angle to the plane where the stand 3 is located. In this embodiment, only the lower edge of the inclined section 321 is slightly inclined towards the direction close to the photoresist pipe 2. In this configuration, when the protruding section 10 of the nozzle 1 protrudes into the communication cavity 31, the nozzle 1 is in contact with the photoresist pipe 2, at this time, the side wing 12 is in abutment with the upper edge of the flat section 320. At this time, by rotating the handle 30 to drive the stand 3 to rotate, the lower edge of the inclined section 321 drives the nozzle 1 to move towards the direction close to the photoresist pipe 2, so that the nozzle 1 is in abutment with the photoresist pipe 2, further realizing the communication between the nozzle 1 and the photoresist pipe 2. At the same time, the engagement position of this embodiment is located at the end of the inclined section 321 away from the flat section 320. The selection of the engagement position depends on the abutment degree of the nozzle 1 and the photoresist pipe 2. As long as it can ensure that the photoresist does not leak at the connection between the nozzle 1 and the photoresist pipe 2, this position can be set as the engagement position. In other embodiments, the engagement position can be any position of the inclined section 321. The engagement of the side wing 12 and the inclined section 321 at any position can be realized by providing a groove on the side wing 12 and a protrusion on the lower edge of the inclined section 321.

[0043] Please refer to Figure 5 , the connection position of the nozzle 1 and the photoresist pipe 2 is provided with a sealing ring 4, the sealing ring 4 cooperates with the nozzle 1 and the photoresist pipe 2, and forms a seal when the side wing 12 is engaged with the clamping groove 32. It should be noted that the sealing ring 4 is sleeved on the connection position of the protruding section 10 of the nozzle 1 and the photoresist pipe 2. After the side wing 12 moves to the engagement position of the clamping groove 32, the nozzle 1 is in abutment with the photoresist pipe 2, the sealing ring 4 is sleeved on the periphery of the connection position, and together they form a seal, which ensures that the photoresist does not leak at the connection position, and further improves the sealing performance of the nozzle 1.

[0044] Please refer to Figures 1 to 2 and Figure 5 , the side wall of the nozzle 1 is provided with a plurality of side wings 12, and the protruding directions of the plurality of side wings 12 are arranged at an angle. Further, the side wall of the stand 3 is provided with a plurality of clamping grooves 32 matched with the side wings 12, and the plurality of clamping grooves 32 are arranged at intervals around the edge of the stand 3. In this embodiment, the side wall of the nozzle 1 is provided with two symmetrical side wings 12, and correspondingly, the side wall of the stand 3 is provided with two matching clamping grooves 32, so that after the nozzle 1 is installed, the symmetrical arrangement of the two side wings 12 and the clamping grooves 32 can provide symmetrical supporting force for the nozzle 1 to maintain balance. In other embodiments, the side wall of the nozzle 1 can also be provided with more than two even side wings 12, and correspondingly, the side wall of the stand 3 should also be provided with matching clamping grooves 32, as long as they can provide mutually balanced supporting force.

[0045] As a preferred embodiment, to ensure sufficient contact area between the side wings 12 and the slots 32 and to provide sufficient support force, the protrusion distance of the side wings 12 is greater than the wall thickness of the platform 3, so that the side wings 12 extend out of the slots 32, thereby ensuring that the side wings 12 can fully contact the lower edge of the slots 32. In another embodiment, the protrusion distance of the side wings 12 can also be equal to the wall thickness of the platform 3.

[0046] In another embodiment, the present invention further provides a photoresist spraying device, comprising: a carrier and the quick-release spraying assembly described above; the carrier is used to carry a wafer, and the nozzle 1, after being mounted on the stand 3, is used to spray photoresist onto the surface of the wafer. In this configuration, by using the quick-release spraying assembly described above and rotating the stand 3 using the rotary handle 30, the operator's contact time with the nozzle 1 is reduced, and the probability of the nozzle 1 being contaminated is reduced; at the same time, the slot 32 is tilted to ensure sealing performance while also ensuring consistency in the installation height of the nozzle 1, thereby improving the consistency of the wafer film thickness.

[0047] In summary, the quick-detachable spray assembly and photoresist spraying equipment provided in the embodiments of the present invention, the quick-detachable spray assembly includes: a stand and a nozzle; the stand has a connecting cavity, the nozzle extends into the connecting cavity to connect with the photoresist pipeline; a rotating handle and a card slot are provided on the side wall of the stand, and a protruding side wing is provided on the side wall of the nozzle. When the nozzle extends into the connecting cavity, the side wing extends into the card slot, and the rotating handle drives the stand to rotate around the axis so that the side wing is engaged with the card slot; wherein, the card slot is arranged at an angle so that when the side wing is engaged with the card slot, the nozzle abuts against the photoresist pipeline.

[0048] With this configuration, by adding a rotating handle, wings, and slots, the nozzle extends into the connecting cavity, and the wings extend into the slots. By driving the rotating handle, the gantry rotates about its axis, engaging the wings with the slots. Compared to existing threaded connections that require tightening the nozzle, rotating the gantry by rotating the handle reduces the operator's contact time with the nozzle and reduces the probability of nozzle contamination. Furthermore, the slots are tilted so that when the wings engage the slots, the nozzle rests against the photoresist line. This not only ensures the sealing performance of the connection between the photoresist line and the nozzle, but also ensures that each nozzle installation and replacement is maintained at the same height, improving the consistency of wafer film thickness.

[0049] The above description is only a description of the preferred embodiment of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A quick-release spray assembly, characterized in that: Including: stand and nozzle; The platform has a communication cavity, and the nozzle extends into the communication cavity to communicate with the photoresist pipeline; A rotating handle and a slot are provided on the side wall of the stand, and a protruding side wing is provided on the side wall of the nozzle. When the nozzle is inserted into the communicating cavity, the side wing is inserted into the slot, and the rotating handle drives the stand to rotate around the axis so that the side wing is engaged with the slot; The slot is tilted so that when the side wing is engaged with the slot, the nozzle abuts against the light-blocking pipe.

2. The quick-release spray assembly according to claim 1, wherein: The slot has a straight section and an inclined section, one end of the straight section is connected to one end of the inclined section, the side wing extends from the straight section into the slot and can move along the inclined section to a locking position.

3. The quick-release spray assembly according to claim 2, wherein: The engaging position is located at an end of the inclined section away from the straight section.

4. The quick-release spray assembly according to claim 2, wherein: The inclined section is inclined toward a direction close to the light-resistance pipe.

5. The quick-release spray assembly according to claim 1, wherein: A sealing ring is provided at the connection position between the nozzle and the light-blocking pipeline. The sealing ring cooperates with the nozzle and the light-blocking pipeline to form a seal when the side wing is engaged with the card slot.

6. The quick-release spray assembly according to claim 1, wherein: A plurality of side wings are provided on the side wall of the nozzle, and the protruding directions of the plurality of side wings are arranged at angles to each other.

7. The quick-release spray assembly according to claim 6, wherein: A plurality of the card slots adapted to the side wings are provided on the side wall of the platform, and the plurality of the card slots are arranged at intervals around the edge of the platform.

8. The quick-release spray assembly according to claim 1, wherein: The protruding distance of the side wings is greater than the wall thickness of the stand, so that the side wings extend out of the slot.

9. The quick-release spray assembly according to claim 1, wherein: The extending direction of the rotating handle is arranged at an angle to the plane where the stand is located.

10. A photoresist spraying device, characterized in that: include: A carrier and a quick-release spray assembly according to any one of claims 1 to 9; The carrier is used to carry the wafer, and the nozzle is used to spray photoresist onto the surface of the wafer after being installed with the platform.

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