High-vacuum diffusion pump for molecular distillation equipment

Abstract

The utility model discloses a high vacuum diffusion pump used for molecular distillation equipment, which relates to the technical field of high vacuum systems, and comprises a diffusion pump device, the diffusion pump device comprises a pump body, an exhaust pipe, a fan and an air inlet pipe, the high vacuum diffusion pump effectively increases air flow speed through multi-time compression in the diffusion pump in a staged manner, and the air flow speed is increased. The diffusion pump not only solves the problem that a current rotary vane vacuum pump cannot meet the high vacuum requirement, but also can meet the condition that a molecular pump cannot be used in an environment with material steam, can continuously and stably provide an ultra-low vacuum environment for specific equipment, and can achieve the ultra-low vacuum degree by additionally arranging an oil return prevention device. When part of oil vapor molecules move towards the air inlet, the centrifugal disc and the cooling plate can enable the oil vapor molecules to drop on the filter, the filter is made of multilayer filter materials with special apertures and adsorption performance, oil drops are prevented from polluting distilled materials, the oil return prevention device prevents oil drops from returning in real time, and stable operation of the system is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of high vacuum system technology, and in particular to a high vacuum diffusion pump used in molecular distillation equipment. Background Technology

[0002] Molecular distillation equipment is a highly efficient technology used to separate components of liquid mixtures. It is based on the difference in boiling points of different components at different temperatures, and achieves molecular-level separation by controlling temperature and pressure. Molecular distillation equipment is widely used in chemical, pharmaceutical, food, and petroleum industries.

[0003] For example, Chinese patent CN204783873U discloses a high vacuum diffusion pump device, including a warm water trap, a straight-cavity pump housing, a pump core, an exhaust water trap, an internal heating wire, a measuring probe, an oil level observation window, an oil baffle cap, and a return oil pipe. The straight-cavity pump housing is cylindrical. A warm water trap is provided at the upper end of the straight-cavity pump housing. An oil baffle cap is provided at the center of the warm water trap. The pump core is provided at the lower end of the oil baffle cap. An internal heating wire is provided at the lower end of the pump core. A return oil pipe is provided at the lower end of the pump core. An exhaust water trap and an oil level observation window are respectively provided on both sides of the lower end of the straight-cavity pump housing. A temperature measuring probe is provided at the center of the lower end of the internal heating wire.

[0004] For molecular distillation equipment, molecular distillation is a separation technology carried out under high vacuum, requiring extremely high vacuum levels to ensure separation efficiency. However, current diffusion pumps on the market also have some problems when used in molecular distillation equipment. Existing two-stage oil rotary vane pumps can only reach an ultimate vacuum of 10⁻¹ Pa, which cannot meet the vacuum environment requirements of molecular distillation equipment systems. Molecular pumps need to achieve a low vacuum level, but there should be no material generated in the system. However, for molecular distillation equipment, the system needs to maintain material separation, so molecular pumps cannot meet the environmental requirements. In addition, during long-term operation, existing diffusion pumps will experience oil backflow, which will not only contaminate the distilled material but may also affect the pump's performance and lifespan. To address the above problems, a high-vacuum diffusion pump for use in molecular distillation equipment is proposed. Utility Model Content

[0005] The purpose of this invention is to solve the problems existing in the prior art and to propose a high-vacuum diffusion pump for use in molecular distillation equipment.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a high-vacuum diffusion pump for use in molecular distillation equipment, comprising a diffusion pump device, the diffusion pump device including a pump body, an exhaust pipe, a fan, and an inlet pipe, an oil pan fixedly connected to the bottom of the pump body, and a heater fixedly connected to the bottom end of the oil pan, a conduit fixedly connected inside the pump body, a plurality of secondary nozzles arranged in a ring array on the outer wall of the conduit, a plurality of primary nozzles arranged in a ring array on the top end of the conduit, and a plurality of tertiary nozzles arranged in a ring array on the bottom end of the conduit, the top end of the pump body being fixedly installed with the bottom of the inlet pipe, an anti-backflow device fixedly installed on the outer side of the inlet pipe, the anti-backflow device including a controller and a housing, the inner side of the housing being fixedly connected with the outer wall of the inlet pipe, a centrifuge disc rotatably connected inside the housing, a cooling plate fixedly connected to the inner wall of the top end of the housing, and a filter plate fixedly connected to the inner wall of the bottom end of the housing.

[0007] Preferably, a tapered tube is fixedly connected to the inner wall of the air intake pipe, and a plurality of air intake holes are opened through the top of the tapered tube.

[0008] Preferably, the outer wall of the housing is fixedly installed to one end of the controller, and a cooling pipe is fixedly installed on the outer wall of the pump body.

[0009] Preferably, an insulation cylinder is fixedly connected to the outside of the heater, and an oil level indicator is fixedly connected to one end of the oil pot.

[0010] Preferably, one end of the fan is fixedly connected to the outside of the pump body, and the other end of the fan is fixedly connected to a power switch.

[0011] Preferably, the top of one end of the fan is fixedly connected to the bottom of the controller, and one end of the exhaust pipe is fixedly connected to the bottom of the pump body.

[0012] Preferably, a cooling cap is fixedly connected to the top of the conduit, and the air inlet is a tapered hole that is wider at the top and narrower at the bottom.

[0013] Preferably, the top end of the air intake pipe is provided with an air intake port, and the top end of the exhaust pipe is provided with an exhaust port, wherein the diameter of the air intake port is larger than that of the exhaust port.

[0014] Preferably, the cooling plate is located above the centrifuge disc, and the filter is located below the centrifuge disc.

[0015] Preferably, the inner wall of the cooling plate is fixedly connected to the outer wall of the tapered tube.

[0016] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0017] 1. In this utility model, the diffusion pump device adopts a multi-stage nozzle design. The nozzle has a special tapered-expanding structure, which enables the working fluid to form a more stable and high-speed vapor jet when passing through the nozzle. These vapor jets interact with the pumped gas, continuously compressing the gas molecules downward. Through multiple staged compressions inside the diffusion pump, the airflow velocity is effectively increased, thereby achieving an ultra-low vacuum degree. This diffusion pump not only solves the high vacuum requirements that current rotary vane vacuum pumps cannot achieve, but also meets the situation where molecular pumps cannot be used in environments with material vapor. It can continuously and stably provide an ultra-low vacuum environment for specific equipment and can be widely used in high-tech fields such as the electronics industry, chemical industry, vacuum metallurgy, vacuum heat treatment, vacuum coating equipment, atomic energy industry, and space simulation equipment.

[0018] 2. In this utility model, by adding an anti-backflow device, when some oil vapor molecules move towards the air inlet, the controller can control the centrifugal disc inside the shell to rotate at high speed. When the oil vapor molecules pass through the high-speed rotating centrifugal disc, the oil droplets are thrown outward under the action of centrifugal force and drip down onto the filter plate. A small portion of the oil vapor molecules that continue to rise will condense into liquid after encountering the cooling plate and drip onto the filter plate. The filter plate is a multi-layer filter material with special pore size and adsorption performance. The filter material is a filter element made of glass fiber, ceramic fiber or polymer material, which further intercepts the oil droplets and prevents the oil droplets from contaminating the distilled material. The anti-backflow device prevents oil droplets from returning in real time and ensures stable operation of the system. Attached Figure Description

[0019] Figure 1 This utility model provides a three-dimensional structural schematic diagram of a high-vacuum diffusion pump used in molecular distillation equipment;

[0020] Figure 2 This utility model provides a schematic diagram of the rear structure of a high-vacuum diffusion pump used in molecular distillation equipment;

[0021] Figure 3 This utility model provides a bottom view of the structure of a high vacuum diffusion pump used in molecular distillation equipment;

[0022] Figure 4 A front sectional view of a high vacuum diffusion pump used in molecular distillation equipment is provided for this utility model.

[0023] Figure 5 This invention proposes a high-vacuum diffusion pump for use in molecular distillation equipment. Figure 4 A magnified view of the details at point A in the middle.

[0024] Legend: 1. Diffusion pump device; 2. Anti-backflow device; 11. Insulation cylinder; 12. Pump body; 13. Exhaust pipe; 14. Fan; 15. Power switch; 16. Cooling pipe; 17. Air inlet pipe; 18. Oil level indicator; 19. Heater; 110. Oil pan; 111. Guide tube; 112. Cooling cap; 113. Primary nozzle; 114. Secondary nozzle; 115. Tertiary nozzle; 116. Conical tube; 117. Air inlet hole; 118. Air inlet; 119. Exhaust port; 21. Controller; 22. Outer casing; 23. Centrifugal disc; 24. Cooling plate; 25. Filter plate. Detailed Implementation

[0025] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0026] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0027] Example 1: As Figure 1 - Figure 5 As shown, this utility model provides a high-vacuum diffusion pump for use in molecular distillation equipment, including a diffusion pump device 1. The diffusion pump device 1 includes a pump body 12, an exhaust pipe 13, a fan 14, and an inlet pipe 17. An oil pan 110 is fixedly connected to the bottom of the pump body 12, and a heater 19 is fixedly connected to the bottom end of the oil pan 110. A conduit 111 is fixedly connected inside the pump body 12. Multiple secondary nozzles 114 are arranged in a ring array on the outer wall of the conduit 111, multiple primary nozzles 113 are arranged in a ring array at the top end of the conduit 111, and multiple tertiary nozzles 114 are arranged in a ring array at the bottom end of the conduit 111. 15. The top of the pump body 12 is fixedly installed with the bottom of the air inlet pipe 17. An anti-backflow device 2 is fixedly installed on the outside of the air inlet pipe 17. The anti-backflow device 2 includes a controller 21 and a housing 22. The inner side of the housing 22 is fixedly connected to the outer wall of the air inlet pipe 17. A centrifugal disc 23 is rotatably connected inside the housing 22. A cooling plate 24 is fixedly connected to the inner wall of the top of the housing 22, and a filter 25 is fixedly connected to the inner wall of the bottom of the housing 22. The cooling plate 24 is located above the centrifugal disc 23, and the filter 25 is located below the centrifugal disc 23. The inner wall of the cooling plate 24 is fixedly connected to the outer wall of the conical tube 116.

[0028] The specific settings and functions of this embodiment are described below: The diffusion pump device 1 adopts a multi-stage nozzle design, and the nozzles are all made of a new type of ceramic composite material. This material has the characteristics of high temperature resistance, wear resistance and good chemical stability. The nozzle shape has a special tapered-expanding structure, which enables the working fluid to form a more stable and high-speed steam jet when passing through the nozzle. These steam jets interact with the gas being pumped, continuously compressing the gas molecules downwards. Through multiple staged compressions inside the diffusion pump, the airflow velocity is effectively increased, thereby achieving an ultra-low vacuum degree. The steam jet ejected from the first-stage nozzle 113 can effectively push the gas molecules downwards, while the position and angle of the third-stage nozzle 115 can better capture and compress the gas molecules that have not yet been pumped out, forming a multi-stage relay pumping effect. This diffusion pump not only solves the high vacuum requirements that current rotary vane vacuum pumps cannot achieve, but also meets the situation where molecular pumps cannot be used in environments with material vapor.

[0029] Example 2: Figure 1 - Figure 4 As shown, a tapered pipe 116 is fixedly connected to the inner wall of the air intake pipe 17, and several air intake holes 117 are opened through the top of the tapered pipe 116. The outer wall of the outer casing 22 is fixedly installed to one end of the controller 21. A cooling pipe 16 is fixedly installed to the outer wall of the pump body 12. A heat insulation cylinder 11 is fixedly connected to the outer side of the heater 19. An oil level indicator 18 is fixedly connected to one end of the oil pan 110. One end of the fan 14 is fixedly connected to the outer side of the pump body 12, and a power switch 15 is fixedly connected to the other end of the fan 14. The top of one end of the fan 14 is fixedly connected to the bottom of the controller 21. One end of the exhaust pipe 13 is fixedly connected to the bottom of the pump body 12. A cooling cap 112 is fixedly connected to the top of the conduit 111. The air intake hole 117 is a tapered hole that is wider at the top and narrower at the bottom. An air inlet 118 is provided at the top of the air intake pipe 17, and an exhaust outlet 119 is provided at the top of the exhaust pipe 13. The diameter of the air inlet 118 is larger than that of the exhaust outlet 119.

[0030] The overall effect of this embodiment is that the cooling pipe 16 works continuously during operation. The cooling pipe 16 uses a high-efficiency heat dissipation material, which can quickly remove the heat generated during the operation of the diffusion pump, ensuring the internal temperature of the pump body 12 is stable, which is beneficial to improving the vacuum degree. When the molecular distillation equipment starts to pump gas, the gas enters from the gas inlet 118 of the gas inlet pipe 17 and is evenly distributed after passing through several gas inlet holes 117 in the conical pipe 116 (the several gas inlet holes 117 have specific angles and apertures, which can make the gas entering the pump body 12 evenly distributed, avoiding local airflow that is too fast or too slow, thereby optimizing the pumping process).

[0031] The operating method and working principle of this device are as follows: This diffusion pump consists of a diffusion pump device 1 and an anti-backflow oil device 2. When in use, after starting the diffusion pump, the working fluid in the oil pan 110 is rapidly vaporized under the action of the heater 19. It forms a high-speed steam jet through the conduit 111 (a guide tube made of high-purity heat-resistant metal with a specially smoothed surface to effectively reduce the probability of gas molecules colliding with the cylinder wall and improve the pumping efficiency) and multi-stage nozzles (first-stage nozzle 113, second-stage nozzle 114, and third-stage nozzle 115). When the molecular distillation equipment starts pumping, the gas enters from the inlet pipe. The gas enters through the inlet 118 of the pump body 12 and is evenly distributed through several inlet holes 117 in the conical tube 116 (the several inlet holes 117 have specific angles and diameters, which can make the gas entering the pump body 12 evenly distributed, avoid local airflow being too fast or too slow, and thus optimize the pumping process). It interacts with the steam jet, and the gas molecules are continuously compressed and pushed downward by the steam jet. Through the relay action of the multi-stage nozzles, it is finally discharged from the pump body 12 through the exhaust pipe 13. The working steam reaches the water-cooled pump wall, condenses into liquid, and flows back to the oil pot 110 along the pump wall to be reheated.

[0032] The diffusion pump device 1 adopts a multi-stage nozzle design. Through multiple staged compressions inside the diffusion pump, the airflow velocity is effectively increased, thereby achieving an ultra-low vacuum degree. This diffusion pump not only solves the high vacuum requirements that current rotary vane vacuum pumps cannot achieve, but also meets the conditions where molecular pumps cannot be used in environments with material vapor. It can continuously and stably provide an ultra-low vacuum environment for specific equipment and can be widely used in high-tech fields such as the electronics industry, chemical industry, vacuum metallurgy, vacuum heat treatment, vacuum coating equipment, atomic energy industry, and space simulation equipment.

[0033] By adding the anti-backflow device 2, when some oil vapor molecules move towards the air inlet 118, the controller 21 can control the centrifugal disc 23 inside the outer casing 22 to rotate at high speed. When the oil vapor molecules pass through the high-speed rotating centrifugal disc 23, the oil droplets are thrown outward under the action of centrifugal force and drip down onto the filter plate 25. A small portion of the oil vapor molecules that continue to rise will condense into liquid after encountering the cooling plate 24 and drip onto the filter plate 25. The filter plate 25 is a multi-layer filter material with special pore size and adsorption performance (the filter material is a filter element made of glass fiber, ceramic fiber or polymer material), which further intercepts the oil droplets and prevents the oil droplets from contaminating the distilled material. The anti-backflow device 2 prevents the oil droplets from returning in real time and ensures the stable operation of the system.

[0034] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the present utility model.

Claims

1. A high-vacuum diffusion pump for use in molecular distillation equipment, comprising a diffusion pump assembly (1), said diffusion pump assembly (1) comprising a pump body (12), an exhaust pipe (13), a blower (14), and an inlet pipe (17), characterized in that: The bottom of the pump body (12) is fixedly connected to an oil pan (110), and the bottom end of the oil pan (110) is fixedly connected to a heater (19). A conduit (111) is fixedly connected inside the pump body (12). Multiple secondary nozzles (114) are arranged in a ring array on the outer wall of the conduit (111). Multiple primary nozzles (113) are arranged in a ring array at the top end of the conduit (111). Multiple tertiary nozzles (115) are arranged in a ring array at the bottom end of the conduit (12). The top of the device is fixedly installed at the bottom of the air intake pipe (17). An anti-backflow device (2) is fixedly installed on the outside of the air intake pipe (17). The anti-backflow device (2) includes a controller (21) and a housing (22). The inner side of the housing (22) is fixedly connected to the outer wall of the air intake pipe (17). A centrifugal disc (23) is rotatably connected inside the housing (22). A cooling plate (24) is fixedly connected to the inner wall of the top of the housing (22), and a filter (25) is fixedly connected to the inner wall of the bottom of the housing (22).

2. The high-vacuum diffusion pump for use in molecular distillation equipment according to claim 1, characterized in that: The inner wall of the air intake pipe (17) is fixedly connected to a tapered pipe (116), and the top of the tapered pipe (116) is provided with several air intake holes (117).

3. The high-vacuum diffusion pump for use in molecular distillation equipment according to claim 1, characterized in that: The outer wall of the housing (22) is fixedly installed on one end of the controller (21), and a cooling pipe (16) is fixedly installed on the outer wall of the pump body (12).

4. The high-vacuum diffusion pump for use in molecular distillation equipment according to claim 1, characterized in that: An insulation cylinder (11) is fixedly connected to the outside of the heater (19), and an oil level indicator (18) is fixedly connected to one end of the oil pot (110).

5. The high-vacuum diffusion pump for use in molecular distillation equipment according to claim 1, characterized in that: One end of the fan (14) is fixedly connected to the outside of the pump body (12), and the other end of the fan (14) is fixedly connected to a power switch (15).

6. The high-vacuum diffusion pump for use in molecular distillation equipment according to claim 1, characterized in that: The top of one end of the fan (14) is fixedly connected to the bottom of the controller (21), and one end of the exhaust pipe (13) is fixedly connected to the bottom of the pump body (12).

7. The high-vacuum diffusion pump for use in molecular distillation equipment according to claim 2, characterized in that: A cooling cap (112) is fixedly connected to the top of the conduit (111), and the air inlet (117) is a tapered hole that is wider at the top and narrower at the bottom.

8. The high-vacuum diffusion pump for use in molecular distillation equipment according to claim 1, characterized in that: The top end of the air intake pipe (17) is provided with an air inlet (118), and the top end of the exhaust pipe (13) is provided with an exhaust outlet (119). The diameter of the air inlet (118) is larger than that of the exhaust outlet (119).

9. The high-vacuum diffusion pump for use in molecular distillation equipment according to claim 1, characterized in that: The cooling plate (24) is located above the centrifugal disc (23), and the filter (25) is located below the centrifugal disc (23).

10. The high-vacuum diffusion pump for use in molecular distillation equipment according to claim 1, characterized in that: The inner wall of the cooling plate (24) is fixedly connected to the outer wall of the tapered tube (116).

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