A pickling system for silicon carbide fines
By combining a buffer tank and an acid pickling tank, and utilizing gravity feeding and flow meter control, the problems of low acid addition efficiency and safety hazards in the existing silicon carbide micro powder acid pickling process are solved, and a high-efficiency and low-energy-consumption acid pickling system is realized.
Patent Information
- Application Number
- CN202423133146.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-18
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-12-18
AI Technical Summary
In the existing pickling process for silicon carbide micro powder, the method of adding acid to the pickling solution is inefficient and poses safety hazards.
The design adopts a combination of buffer tank and pickling tank, utilizing gravity feeding and buffer tank transition to reduce the number of pickling solution delivery pumps. The amount and time of pickling solution addition are controlled by valves and flow meters between the buffer tank and pickling tank, and the reaction temperature is controlled by steam pipeline.
It improves pickling efficiency, reduces equipment costs and energy consumption, reduces safety hazards, and achieves a highly efficient and low-energy pickling process.
Smart Images
Figure CN223603000U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the field of silicon carbide micro powder pickling, specifically relates to a silicon carbate micro powder pickling system. BACKGROUND
[0002] Silicon carbide is made of high-quality quartz sand and petroleum coke in an electric resistance furnace by high-temperature smelting, and the micro powder made of broken silicon carbide is a very widely used raw material, which can be used for device manufacturing in technical fields such as semiconductors and special ceramics. In the production process of silicon carbide micro powder, impurities carried in the raw material will be crushed together, and this part of impurities will affect the service life of the production device using silicon carbide micro powder as the raw material, so it is necessary to pickling and purify the silicon carbide micro powder after production.
[0003] Silicon carbide pickling is usually under the condition of heating, and the silicon carbide particles are treated with pickling liquid, which can conveniently remove the impurities in the silicon carbide. However, the current acid pickling method is manually bucketed or pumped into the pickling tank, which is low in efficiency and has safety hazards. UTILITY MODEL CONTENTS
[0004] The technical problem to be solved by the utility model is to provide a silicon carbide micro powder pickling system with high efficiency and low energy consumption.
[0005] The utility model provides a silicon carbide micro powder pickling system, which comprises n1 pickling tanks, each pickling tank is provided with n2 buffer tanks correspondingly, n1 is greater than or equal to 1, and n2 is greater than or equal to 1.
[0006] Each buffer tank is connected with an acid pickling liquid conveying pump through a main pipeline, and the acid pickling liquid conveying pump is connected with an acid pickling liquid storage tank.
[0007] The buffer tank is arranged above the pickling tank, the bottom of the buffer tank is communicated with the pickling tank, and the acid pickling liquid in the buffer tank is added to the pickling tank by gravity.
[0008] Further, a valve is arranged at the connecting end of the buffer tank and the pickling tank.
[0009] Further, flow meters are arranged between the buffer tank and the main pipeline and between the buffer tank and the pickling tank.
[0010] Further, the capacity of the buffer tank is consistent with the maximum acid adding amount of the pickling tank.
[0011] Further, a steam pipeline is further connected to the pickling tank.
[0012] Further, a steam flow meter, a steam valve and a temperature sensor are arranged on the steam pipeline.
[0013] Furthermore, the buffer tank is equipped with an inlet and an exhaust pipe at the top and an outlet at the bottom, and high and low liquid level sensors are installed inside the buffer tank.
[0014] Furthermore, n2 equals 2, where one type of buffer tank and pickling solution storage tank is used to hold hydrochloric acid; and the other type of buffer tank and pickling solution storage tank is used to hold hydrofluoric acid.
[0015] Furthermore, the buffer tank containing hydrofluoric acid is filled with hydrofluoric acid into the pickling tank on a regular basis.
[0016] Furthermore, a ball valve is installed between the buffer tank containing hydrofluoric acid and the pickling tank.
[0017] The beneficial effects of this invention are that the pickling system for silicon carbide micro powder provided by this invention delivers a pickling solution to n1 buffer tanks through each pickling solution delivery pump. The use of buffer tanks for transition ensures that there is no need for large-capacity acid storage in the pickling room, reducing safety hazards. At the same time, the buffer tanks use gravity to transport the pickling solution to the pickling tanks. Therefore, only one pickling solution delivery pump is needed to feed the pickling solution to n1 pickling tanks, which can greatly reduce the number of pickling solution delivery pumps. Only one pickling solution delivery pump is needed for each type of pickling solution, which can greatly reduce transportation costs and equipment costs, while also reducing energy consumption. Attached Figure Description
[0018] Appendix Figure 1 This is the front view of the present invention;
[0019] Appendix Figure 2 This is a top view of the present invention;
[0020] Appendix Figure 3 This is a front view of the buffer container in this utility model;
[0021] Appendix Figure 4 This is a top view of the buffer container in this utility model.
[0022] In the diagram, 1-pickling tank; 2-buffer tank; 21-inlet; 22-outlet; 23-high and low liquid level sensors; 24-exhaust pipe; 3-main pipeline; 4-pickling solution transfer pump; 5-valve; 6-flow meter; 7-steam pipeline; 71-steam flow meter; 8-ball valve; 9-check valve; 10-main exhaust pipe; 11-feeding pipe. Detailed Implementation
[0023] The technical solutions in the embodiments of the present application will be clearly and completely described with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of the present application.
[0024] It should be noted that all directional indications, such as up, down, left, right, front, back, etc., in the embodiments of the present application are only used to explain the relative position relationship, movement condition, etc. between components in a certain posture (as shown in the drawings), and if the certain posture changes, the directional indications also change accordingly.
[0025] In addition, the description of "first", "second" and the like in the present application is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise specifically limited.
[0026] In the present application, unless otherwise specifically defined and limited, the terms "connection", "fixing" and the like should be understood broadly, for example, "fixing" can be fixed connection, or detachable connection, or integral; can be mechanical connection, or electrical connection, or physical connection or wireless communication connection; can be directly connected, or indirectly connected through intermediate medium, or the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically limited. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0027] In addition, the technical solutions of each embodiment of the present application can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can realize it, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the scope of protection required by the present application.
[0028] As shown in FIG. 1, the present application provides a kind of electronic device, including: display unit 1, and the display unit 1 is connected with the first sensor 2 and the second sensor 3. Figure 1 -attached Figure 4The utility model provides a pickling system of silicon carbide micro powder, including n1 pickling tank 1, each pickling tank 1 is correspondingly provided with n2 buffer tank 2, n1 is equal to or greater than 1, n2 is equal to or greater than 1, that is, each kind of buffer tank 2 is provided with n1, each pickling tank 1 is correspondingly provided with n2 buffer tank 2, preferably, n1 is greater than 1, and then the quantity of one -off pickling can be improved, and pickling efficiency is improved, and the number of n2 is according to the kind of pickling liquid required to add, and one kind of pickling liquid corresponds to one buffer tank 2, that is, the total number of buffer tank 2 is equal to n1 times n2, for example, when setting 6 in pickling tank 1, and pickling liquid needs hydrochloric acid and hydrofluoric acid two, n1 is equal to 6, n2 is equal to 2, and the total number of buffer tank 2 is 12,
[0029] Each kind of buffer tank 2 is connected with one pickling liquid delivery pump 4 through a main pipeline 3, and the inlet 21 of the buffer tank 2 can be directly arranged on the main pipeline 3, preferably, the inlet 21 of the buffer tank 2 is communicated with the main pipeline 3 through a branch pipeline, which is convenient for pipeline arrangement, preferably, the pickling liquid delivery pump 4 adopts a diaphragm pump, preferably, a check valve 9 is arranged between the main pipeline 3 and the pickling liquid delivery pump 4, and the pickling liquid delivery pump 4 is connected with a pickling liquid storage tank, each pickling liquid storage tank stores one kind of pickling liquid, for example, wherein n2 is equal to 2, one kind of pickling liquid storage tank and the buffer tank 2 are used for storing hydrochloric acid, and the other kind of pickling liquid storage tank and the buffer tank 2 are used for storing hydrofluoric acid;
[0030] The buffer tank 2 is arranged above the pickling tank 1, the bottom of the buffer tank 2 is communicated with the pickling tank 1, and specifically, the outlet 22 of the buffer tank 2 can be directly connected with the pickling tank 1, preferably, the outlet 22 of the buffer tank 2 is connected with the pickling tank 1 through a feeding pipe 11, which is convenient for pipeline arrangement, and the pickling liquid in the buffer tank 2 is fed into the pickling tank 1 by gravity, that is, the pickling liquid delivery pump does not need to be separately arranged in the buffer tank 2, and the pickling liquid is fed by gravity through the height difference between the buffer tank 2 and the pickling tank 1.
[0031] The pickling system of silicon carbide micro powder provided by the utility model can deliver one kind of pickling liquid into n1 buffer tanks 2 through each pickling liquid delivery pump 4, transition is carried out by using the buffer tank 2, can guarantee that large-capacity acid storage is not needed in the pickling room, reduces the security risk, at the same time, the buffer tank 2 uses gravity to deliver the pickling liquid into the pickling tank 1, therefore, the pickling liquid feeding of n1 pickling tanks 1 only needs one pickling liquid delivery pump 4, can greatly reduce the number of pickling liquid delivery pumps, one kind of pickling liquid only needs one pickling liquid delivery pump 4, can greatly reduce the delivery cost and equipment cost, and energy consumption is reduced at the same time.
[0032] In one of the embodiments, the valve 5 is arranged at the connecting end of the buffer tank 2 and the pickling tank 1, and the valve 5 is preferably an electromagnetic valve. In this embodiment, the valve 5 can be used to control the connection between the buffer tank 2 and the pickling tank 1, and thus the pickling liquid delivery pump 4 can be controlled to add the buffer tank 2 to the set capacity, and then the valve 5 between the buffer tank 2 and the pickling tank 1 is controlled to add the pickling liquid in the buffer tank 2 to the pickling tank 1 by gravity for one or more times, so as to control the amount and filling time of the pickling liquid.
[0033] When the valve 5 is not arranged between the buffer tank 2 and the pickling tank 1, the buffer tank 2 can be used as a buffer to control the difference between the pipe diameter of the main pipeline 3 and the diameter of the outlet 22 of the buffer tank 2, that is, the pipe diameter of the main pipeline 3 to the buffer tank 2 is large, and the pipe diameter of the outlet 22 of the buffer tank 2 is small, so as to realize the transition of pickling liquid filling.
[0034] Preferably, the valve 5 is also arranged between the buffer tank 2 and the main pipeline 3, and thus the connection between each buffer tank 2 and the main pipeline 3 can be controlled, and thus the filling amount of the n1 buffer tanks 2 can be controlled individually.
[0035] In one of the embodiments, the flow meter 6 is arranged between the buffer tank 2 and the main pipeline 3 and between the buffer tank 2 and the pickling tank 1. By arranging the flow meter 6, the amount of pickling liquid filled into the buffer tank 2 from the main pipeline 3 and the amount of pickling liquid filled into the pickling tank 1 from the buffer tank 2 can be monitored, and thus the filling monitoring of the pickling liquid amount can be realized, and the pickling effect can be ensured.
[0036] In one of the embodiments, the capacity of the buffer tank 2 is consistent with the maximum pickling amount of the pickling tank 1, that is, the filling amount of the pickling liquid in the pickling tank 1 is consistent with the capacity of the buffer tank 2, and thus the control of the pickling liquid filling amount can be further simplified. When the pickling tank 1 needs to be filled with the pickling liquid, the valve 5 between the pickling tank 1 and the buffer tank 2 is opened, and the pickling liquid in the buffer tank 2 is emptied for one or more times, and thus the flow meter 6 is only used for auxiliary monitoring and does not need to be used as a control basis.
[0037] In one of the embodiments, the pickling tank 1 is further connected with a steam pipeline 7, and the steam pipeline 7 can add steam to the pickling tank 1, so that the pickling tank 1 can reach the optimal reaction temperature, and the reaction temperature is preferably controlled at about 70-80°C.
[0038] In one of the embodiments, the steam pipeline 7 is provided with a steam flow meter 71, a steam valve and a temperature sensor, the steam flow meter 71, the steam valve and the temperature sensor can control the reaction temperature, when the temperature sensor detects that the temperature is too high, the temperature can be reduced by reducing the opening degree of the steam valve, and vice versa, the temperature can be increased by increasing the opening degree of the steam valve, and the steam flow meter 71 can monitor the steam flow, which is convenient for monitoring the temperature adjustment. When the steam valve can only control the opening and closing, and cannot control the opening degree, the steam valve and the temperature sensor can control the reaction temperature, when the temperature sensor detects that the temperature is too high, the temperature can be reduced by closing the steam valve, and vice versa, the temperature can be increased by opening the steam valve, and the steam flow meter 71 is only used to monitor the steam flow.
[0039] In one of the embodiments, reference is made to the accompanying drawings Figure 2 The upper end of the buffer tank 2 is provided with an inlet 21 and an exhaust pipe 24, and the lower end is provided with an outlet 22, and the inside of the buffer tank 2 is provided with a high-low liquid level sensor 23, wherein the inlet 21 is used to connect the main pipeline 3, and the outlet 22 is used to connect the pickling tank 1, preferably, the valves provided between the main pipeline 3 and the buffer tank 2 and the valves provided between the buffer tank 2 and the pickling tank 1 are corrosion-resistant electromagnetic valves provided on the inlet 21 and the outlet 22, respectively, the exhaust pipe 24 is used to exhaust gas, preferably, a corrosion-resistant breather valve is provided on the exhaust pipe 24, and the exhaust pipes 24 of a plurality of buffer tanks 2 are connected to a main exhaust pipe 10. The high-low liquid level sensor 23 is used to monitor the high-low liquid level of the buffer tank 2, and further monitor whether the buffer tank 2 is full or empty.
[0040] In one of the embodiments, n2 is equal to 2, one kind of buffer tank 2 and pickling liquid storage tank are used to contain hydrochloric acid; another kind of buffer tank 2 and pickling liquid storage tank are used to contain hydrofluoric acid. The combination of hydrochloric acid and hydrofluoric acid can treat silicon carbide particles, which can remove metal iron, iron oxide, magnesium, aluminum and other impurities in silicon carbide, and can conveniently remove impurities in silicon carbide.
[0041] In one of the embodiments, the buffer tank 2 containing hydrofluoric acid is filled with hydrofluoric acid into the pickling tank 1 according to the frequency, which can be achieved by intermittently opening the valve 5 between the buffer tank 2 containing hydrofluoric acid and the pickling tank 1. The hydrofluoric acid is added according to the frequency, which can avoid violent reaction.
[0042] In one of the embodiments, a ball valve 8 is provided between the buffer tank 2 containing hydrofluoric acid and the pickling tank 1, the ball valve 8 can be used to control the opening degree of the valve, in this embodiment, the ball valve 8 is used to adjust the single filling flow of hydrofluoric acid, and the valve 5 is only used to control the connection and disconnection between the buffer tank 2 containing hydrofluoric acid and the pickling tank 1, which is convenient for controlling the filling frequency of hydrofluoric acid.
[0043] Reference is made to the accompanying drawingsFigure 1 -attached Figure 2 In one specific embodiment, the acid pickling system of the present silicon carbide powder is arranged with 6 acid pickling tanks 1, each of which is provided with 1 hydrochloric acid buffer tank 2 and 1 hydrofluoric acid buffer tank 2, a total of 12 buffer tanks 2, 2 acid pickling liquid delivery pumps 4, and 2 acid pickling liquid storage tanks. In this way, the acid pickling work can be performed on six acid pickling tanks 1 at a time, and the 2 acid pickling liquid delivery pumps 4 can be used to fill the 6 acid pickling tanks 1 with hydrochloric acid and hydrofluoric acid.
[0044] In addition, the acid pickling system of the present silicon carbide powder is provided with a PLC controller to control the 2 acid pickling liquid delivery pumps 4, flow meters 6, and valves 5. In this way, the acid pickling tanks 1 and buffer tanks 2 do not need to be provided with liquid level meters, the amount of hydrochloric acid and hydrofluoric acid added is controlled by the flow meters 6 and time relays, and the PH value does not need to be detected, as the PH value is always acidic, and a pressure gauge is also not needed, as the pressure in the buffer tanks 2 is always at atmospheric pressure.
[0045] The acid pickling liquid storage tank uses the data of the branch outlet flow meters 6 of the main pipeline 3 to determine whether the acid in the acid pickling liquid storage tank has been used up. The main pipeline 3 and branch pipelines of the hydrochloric acid and hydrofluoric acid are provided with pressure transmitters, and the upper computer collects the pipeline pressure values in real time. When the pipeline pressure exceeds the set value, the acid pickling liquid delivery pump 4 automatically circulates and releases pressure, and the pressure data, the operation frequency of the acid pickling liquid delivery pump 4, and the valve 5 are mutually safety interlocked to prevent damage to the pipeline.
[0046] The above is only one embodiment of the present application, and does not limit the present application in any way. Any person skilled in the art can make many possible changes, modifications, or modifications to the technical solution of the present application without departing from the scope of the technical solution of the present application, and equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change, and modification of the above embodiments made in accordance with the technical essence of the present application shall fall within the scope of protection of the technical solution of the present application.
Claims
1. A pickling system for silicon carbide micropowder, characterized by comprising: The acid pickling tank (1) comprises n1 acid pickling tanks (1), and each of the acid pickling tanks (1) is provided with n2 buffer tanks (2) correspondingly, wherein n1 is greater than or equal to 1, and n2 is greater than or equal to 1; Each of the buffer tanks (2) is connected with an acid pickling liquid conveying pump (4) through a main pipeline (3), and the acid pickling liquid conveying pump (4) is connected with an acid pickling liquid storage tank; The buffer tank (2) is arranged above the acid pickling tank (1), the bottom of the buffer tank (2) is communicated with the acid pickling tank (1), and the acid pickling liquid in the buffer tank (2) is fed into the acid pickling tank (1) by gravity.
2. The acid washing system of silicon carbide fine powder according to claim 1, wherein The connecting end of the buffer tank (2) and the acid pickling tank (1) is provided with a valve (5).
3. The acid washing system of silicon carbide fine powder according to claim 1, wherein Flow meters (6) are arranged between the buffer tank (2) and the main pipeline (3) and between the buffer tank (2) and the acid pickling tank (1).
4. The acid washing system of silicon carbide fine powder according to claim 1, wherein The capacity of the buffer tank (2) is consistent with the maximum acid pickling amount of the acid pickling tank (1).
5. The acid washing system of silicon carbide fine powder according to claim 1, wherein The acid pickling tank (1) is further connected with a steam pipeline (7).
6. The acid washing system of silicon carbide fine powder according to claim 5, wherein The steam pipeline (7) is provided with a steam flow meter (71), a steam valve and a temperature sensor.
7. The acid washing system of silicon carbide fine powder according to claim 1, wherein The upper end of the buffer tank (2) is provided with an inlet (21) and an exhaust pipe (24), and the lower end of the buffer tank (2) is provided with an outlet (22), and the buffer tank (2) is internally provided with a high-low liquid level sensor (23).
8. The acid washing system of silicon carbide micropowder according to any one of claims 1 to 7, wherein The n2 is equal to 2, one of the buffer tanks (2) and the acid pickling liquid storage tank is used for containing hydrochloric acid, and the other of the buffer tanks (2) and the acid pickling liquid storage tank is used for containing hydrofluoric acid.
9. The acid washing system of silicon carbide fine powder according to claim 8, wherein The buffer tank (2) containing the hydrofluoric acid is filled with the hydrofluoric acid into the acid pickling tank (1) according to frequency.
10. The acid washing system of silicon carbide fine powder according to claim 9, wherein The buffer tank (2) containing the hydrofluoric acid is provided with a ball valve (8) between the buffer tank (2) and the acid pickling tank (1).