Silicon wafer counting mechanism for feeding system compatible with flower baskets of different sizes and feeding system of silicon wafer counting mechanism

Abstract

The utility model discloses a silicon wafer counting mechanism for a feeding system compatible with flower baskets of different sizes and the feeding system thereof. Comprising a plurality of flower baskets which are arranged in parallel at intervals along the X direction of a feeding platform and have the same size or different sizes, a counting sensor which can count the number of silicon wafers in the target flower basket and is connected with the target flower basket, and a multidirectional movement driving mechanism which is in driving connection with the counting sensor, according to the utility model, the silicon wafer counting mechanism is driven to count the fed silicon wafers, the silicon wafer state in each follow-up silicon wafer processing process can be reflected in time by comparing the number of the fed silicon wafers, such as the state of silicon wafer fragments, and meanwhile, the movable feeding of silicon wafer flower baskets with different numbers can be better compatible.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing, specifically relating to a silicon wafer counting mechanism and its feeding system for a basket-compatible feeding system of different sizes. Background Technology

[0002] A silicon wafer is a silicon chip used in the fabrication of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. Silicon wafers are the carrier used in the production of integrated circuits, and generally refer to monocrystalline silicon wafers. Monocrystalline silicon wafers are made by drawing and refining ordinary silicon sand, followed by a series of processes including dissolution, purification, and distillation to produce monocrystalline silicon rods. After polishing and slicing, the monocrystalline silicon rods become silicon wafers. During the silicon wafer production process, cleaning and drying are usually required. In cleaning and drying silicon wafers, the wafers are first placed in a basket, then immersed in a cleaning solution according to the process ratio for cleaning. After cleaning, the wafers are spun dry and then baked in an oven to dry.

[0003] However, existing technologies use silicon wafers in various sizes, such as 5 inches, 6 inches, 8 inches, and 12 inches. Silicon wafers of different sizes are cleaned in corresponding wafer baskets and then placed in a spin-drying machine. Currently, the spin-drying machine always contains the same size and number of wafer baskets, automatically achieving balance during the drying process. Therefore, the feeding system always feeds the same size wafer basket. This process is incompatible with different sizes of silicon wafers and baskets, significantly limiting its effectiveness and reducing the overall production efficiency of producing silicon wafers of different sizes simultaneously. Utility Model Content

[0004] This invention addresses the technical problem that existing basket feeding systems are incompatible with silicon wafers of other sizes and quantities, and aims to provide a silicon wafer counting mechanism for a basket-compatible feeding system of different sizes.

[0005] The silicon wafer counting mechanism for the different-sized flower basket compatible feeding system of this utility model includes:

[0006] Several flower baskets of the same or different sizes are arranged at parallel intervals along the X-axis of the feeding platform;

[0007] A counting sensor is connected to the target basket in a manner that counts the number of silicon wafers inside the basket.

[0008] A multi-directional moving drive mechanism, connected to the counting sensor, can move the counting sensor along multiple different directions to the target basket to calculate the number of silicon wafers in the target basket.

[0009] Preferably,

[0010] The multi-directional movement drive mechanism includes:

[0011] The counting sensor is directly or indirectly mounted on the X-axis drive member so that the counting sensor is driven by the X-axis drive member to move along the X-axis to the Z-axis of the target flower basket.

[0012] The counting sensor is directly or indirectly connected to the Z-axis drive, so that the counting sensor is driven by the Z-axis drive to move along the Z-axis to the target flower basket.

[0013] Preferably, the Z-axis drive member is disposed on the X-axis drive member.

[0014] Preferably, the Z-axis drive includes:

[0015] Z-axis plate, wherein the counting sensor is directly or indirectly mounted on the Z-axis plate;

[0016] The Z-axis drive cylinder has a Z-axis plate mounted on its piston, so that the Z-axis drive cylinder can drive the Z-axis plate and the counting sensor to move along the Z-axis.

[0017] Preferably, the X-axis drive is a rodless cylinder that moves in the X-axis direction, and the Z-axis drive cylinder of the Z-axis drive is fixedly connected to the X-axis moving support plate of the rodless cylinder, thereby driving the Z-axis drive and the counting sensor to move along the X-axis to the Z-axis of the target flower basket.

[0018] Preferably, the multi-directional movement drive mechanism further includes:

[0019] The Y-axis drive is fixed to the Z-axis plate of the Z-axis drive, and the counting sensor is directly fixed to the Y-axis drive, so as to drive the counting sensor to move back and forth in the Y-axis between the Z-axis projection position of the target flower basket and the initial position.

[0020] Preferably, the Y-axis drive is a cylinder slide that can slide upward in the Y direction, the counting sensor is fixed to the top of the cylinder slide, and the bottom of the cylinder slide is fixed to the Z-axis plate.

[0021] Preferably, the Z-axis drive member further includes two support rods, which are supported and installed below the Z-axis plate and spaced apart on both sides of the piston of the Z-axis drive cylinder.

[0022] Preferably, the counting sensor has a plurality of counting induction plates arranged in parallel at intervals.

[0023] Another objective of this utility model is to provide a compatible feeding system for flower baskets of different sizes, the compatible feeding system for flower baskets of different sizes includes:

[0024] A feeding platform, having a first end that can feed flower baskets of different sizes and a second end that can feed flower baskets of different sizes;

[0025] A silicon wafer counting mechanism capable of counting silicon wafers fed into a basket at the first end is provided at the first end of the feeding platform;

[0026] A silicon wafer weighing mechanism capable of weighing the basket fed at the second end is provided at the second end of the feeding platform.

[0027] Preferably, the different-size flower basket compatible feeding system further includes a flower basket lifting and traversing mechanism that can traverse flower baskets of different sizes from the first end to the second end.

[0028] Preferably,

[0029] The first end of the feeding platform has several first lifting frame cavities for supporting flower baskets of different sizes;

[0030] The second end of the feeding platform has several second lifting frame cavities for supporting flower baskets of different sizes;

[0031] The feeding platform also has several basket transfer troughs that connect the corresponding first lifting frame cavity and the second lifting frame cavity;

[0032] The flower basket lifting and lateral movement mechanism's flower basket support frame passes through the corresponding first support frame cavity, the flower basket transfer groove, and the second support frame cavity, laterally moving flower baskets of different sizes from the first end to the second end.

[0033] Preferably, the feeding platform also has several lifting frame storage cavities in the middle, and the lifting frame storage cavities are located in the middle of the corresponding flower basket transfer trough.

[0034] Preferably, the silicon wafer counting mechanism includes:

[0035] A counting sensor is connected to the target basket in a manner that counts the number of silicon wafers inside the basket.

[0036] A multi-directional moving drive mechanism, located near the first end of the feeding platform, is connected to the counting sensor and can move the counting sensor along multiple different directions to the target basket at the first end to calculate the number of silicon wafers in the target basket.

[0037] Preferably, the multi-directional movement drive mechanism includes:

[0038] The Y-axis drive is located below the first end of the feeding platform. The counting sensor is directly fixed on the Y-axis drive to drive the counting sensor to move back and forth in the Y direction between the Z-axis starting position and the avoidance position of the target flower basket.

[0039] The Z-axis drive unit is located below the first end of the feeding platform and directly below the Y-axis drive unit, so that the counting sensor and the Y-axis drive unit can be driven by the Z-axis drive unit to move along the Z-axis to the target flower basket.

[0040] The X-axis drive unit is located below the first end of the feeding platform and is fixedly connected to the Z-axis drive unit, so that the X-axis drive unit drives the counting sensor, the Z-axis drive unit and the Y-axis drive unit to move along the X-axis to the Z-axis of the target flower basket.

[0041] Preferably,

[0042] The Y-axis drive is a cylinder slide that can slide upward in the Y direction, and the counting sensor is fixed to the top of the cylinder slide.

[0043] The X-axis drive is a rodless cylinder that moves in the X-axis and has a support plate that can move in the X-axis, thereby driving the Z-axis drive and the counting sensor to move along the X-axis to the Z-axis of the target flower basket.

[0044] The Z-axis drive component includes:

[0045] Z-axis plate, the cylinder slide that slides upward in the Y direction is mounted on the Z-axis plate;

[0046] The Z-axis drive cylinder has a Z-axis plate mounted on its piston, so that the Z-axis drive cylinder can drive the Z-axis plate and the counting sensor to move along the Z-axis. The Z-axis drive cylinder is also fixedly connected to a support plate that can move in the X-axis.

[0047] Preferably, the silicon wafer weighing mechanism includes:

[0048] M pallet cavities are provided at the second end of the feeding platform;

[0049] M flower basket trays capable of supporting flower baskets, each flower basket tray having a second lifting frame cavity in its middle portion, and the flower basket tray being disposed within the corresponding tray cavity;

[0050] M sets of weighing sensor assemblies, one end of each set of weighing sensor assemblies is fixed under the feeding platform near the corresponding pallet cavity, and the other end is fixed under the corresponding flower basket pallet. Each set of weighing sensor assemblies can weigh the flower baskets on the corresponding flower basket pallet. Preferably, each set of weighing sensor assemblies consists of two weighing sensors, and the two weighing sensors are symmetrically arranged under the flower basket pallet.

[0051] Preferably,

[0052] The starting position is in the same Z-axis as the counting position when the counting sensor is connected to the silicon wafer in the current flower basket for counting.

[0053] The avoidance position is the position where the counting sensor is located at the first end of the feeding platform and does not interfere with the basket lifting and traversing mechanism when receiving several baskets at the first end of the feeding platform.

[0054] Preferably, the flower basket lifting and traversing mechanism includes:

[0055] The flower basket support frame;

[0056] A lifting cylinder is located below the feeding platform, and the flower basket support is mounted on the piston rod of the lifting cylinder;

[0057] A horizontal guide rail is fixedly installed below one side of the feeding platform and is parallel to the flower basket transfer trough. The lifting cylinder is slidably mounted on the horizontal guide rail through the cylinder mounting seat.

[0058] A servo motor is driven and connected to the cylinder mounting base to drive the flower basket lifting frame and the lifting cylinder to move along the flower basket shifting groove under the guidance and limit of the horizontal guide rail.

[0059] The positive and progressive effects of this utility model are as follows:

[0060] 1) This utility model's compatible feeding system for different-sized wafer baskets incorporates a silicon wafer counting mechanism and a silicon wafer weighing mechanism. The counting mechanism counts the fed silicon wafers and, by comparing the number of fed wafers, can promptly reflect the wafer status in subsequent processing stages, such as the presence of wafer fragments. The weighing mechanism weighs the wafer baskets and the counted wafers. This allows for better allocation of wafer baskets in subsequent processes, such as spin-drying, based on the weighing data, enabling the system to accommodate wafer baskets of different sizes for various operations, including spin-drying, within the same program. Attached Figure Description

[0061] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0062] Figure 2 for Figure 1 Another perspective illustration;

[0063] Figure 3A This is a schematic diagram of the upper surface structure of the feeding platform of this utility model;

[0064] Figure 3BThis is a schematic diagram of the lower surface structure of the feeding platform of this utility model;

[0065] Figure 4A This is a schematic diagram of the silicon wafer counting mechanism of this utility model;

[0066] Figure 4B This is another schematic diagram of the silicon wafer counting mechanism of this utility model;

[0067] Figure 5A This is a schematic diagram of the flower basket lifting and lateral movement mechanism of this utility model;

[0068] Figure 5B for Figure 5A Another perspective illustration;

[0069] Figure 6 This is a schematic diagram of the counting and weighing method of the compatible feeding system for flower baskets of different sizes according to this utility model;

[0070] Figure 7 for Figure 6 A detailed flowchart of the method is shown. Detailed Implementation

[0071] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0072] It should be noted that in the description of this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features, nor should they be construed as limiting the specific protection scope of this utility model.

[0073] like Figure 1 and Figure 2As shown, the different-size basket-compatible feeding system of this utility model includes a feeding platform 10, a silicon wafer counting mechanism 20, a silicon wafer weighing mechanism 30, and a basket lifting and traversing mechanism 40, as well as several baskets 50 of different or the same size placed parallel and spaced on the feeding platform 10. The feeding platform 10 also has a first end 11 and a second end 12 for carrying the baskets 50 of different sizes. The silicon wafer counting mechanism 20 is installed at the first end 11 of the feeding platform 10 to count the silicon wafers in the baskets 50 of different or the same size carried on the first end 11; the silicon wafer weighing mechanism 30 is installed at the second end 12 of the feeding platform 10 to weigh the baskets 50 of different or the same size and the silicon wafers carried on the second end 12; and the basket lifting and traversing mechanism 40 can move back and forth between the first end 11 and the second end 12 of the feeding platform 10 to traverse the baskets 50 of different or the same size carried on the first end 11 to the second end 12. That is, in this example, continuing as... Figure 1 and Figure 2 As shown, the silicon wafer counting mechanism 20 first counts the silicon wafers in the target baskets 50 fed onto the first end 11 of the feeding platform. After all baskets 50 have been counted, the basket lifting and traversing mechanism 40 lifts these baskets 50 and moves them traversably from the first end 11 to the second end 12. Finally, the silicon wafer weighing mechanism 30 installed at the second end weighs these baskets 50 respectively. The baskets 50 of different sizes mentioned above are selected from one or more of 5-inch baskets, 6-inch baskets, 8-inch baskets, and 12-inch baskets.

[0074] like Figure 3A As shown, the first end 11 of the feeding platform 10 has a plurality of first lifting frame cavities 111, and each first lifting frame cavity 111 has a support limiting block 311 at its four corners to support the four corners of the flower basket 50, so as to limit the flower baskets 50 of different or the same size at the corresponding positions. The silicon wafer counting mechanism 20 is located below the first end 11 of the feeding platform 10, and includes a counting sensor 21 and a multi-directional moving drive mechanism for driving the counting sensor 21 to move and be connected to the counting of silicon wafers in the flower basket 50. The counting sensor 21 has a plurality of parallel and spaced counting sensing plates so as to be connected to the counting of the silicon wafers in the flower basket 50 one by one. The multi-directional movement actuator includes a Y-axis actuator 22, an X-axis actuator 23, and a Z-axis actuator 24. The X-axis actuator 23 drives the counting sensor 21 to move upwards along the X-axis to the Z-axis of the target basket 50. The Y-axis actuator 22 drives the counting sensor 21 to move onto the Z-axis projection of the target basket 50 and align it with the silicon wafers within the target basket 50. The Z-axis actuator 24 drives the counting sensor 21 to move upwards along the Z-axis to the position where it establishes a counting connection with the silicon wafers within the target basket 50 to calculate the number of silicon wafers within the target basket 50. In this example, as... Figure 4A and Figure 4B As shown, the Y-axis drive unit 22, X-axis drive unit 23, and Z-axis drive unit 24 are all installed below the first end 11 of the feeding platform 10, and the counting sensor 21 is directly fixed to the Y-axis drive unit 22. The Y-axis drive unit 22 is a cylinder slide that can slide in the Y direction. The counting sensor 21 is fixed to the top of the cylinder slide to drive the counting sensor 21 to move back and forth between the starting position and the avoidance position in the Z direction of the target basket, that is, in the Y direction. The starting position of the counting sensor 21 is the Z-axis projection position under the target basket, that is, the position aligned with the silicon wafer in the target basket in the Z direction. The avoidance position is the position on the same Y-axis as the starting position and does not interfere with the basket lifting and traversing mechanism 40's back and forth movement of the basket. In addition, as shown in the figure... Figure 4A and Figure 4B As shown, the X-axis drive member 23 is a rodless cylinder that moves in the X direction and has a support plate 231 that can move in the X direction; the Z-axis drive member 24 has a Z-axis plate 241, a Z-axis drive cylinder 242, and two support rods 243. The Y-axis drive member 22 is fixedly mounted on the Z-axis plate 241, and the Z-axis plate 241 is relatively fixedly mounted on the piston of the Z-axis drive cylinder 242 and the two support rods 243 that are respectively spaced apart on both sides of the piston. At the same time, one side of the Z-axis drive cylinder 242 is also fixedly mounted on the support plate 231 of the X-axis drive member 23. The support plate 231 can be moved by the rodless cylinder in the X direction, which can further drive the Z-direction drive member 24, the Y-direction cylinder slide, and the counting sensor 21 to move along the X direction to the Z direction below the target flower basket 50; then the Y-direction cylinder slide drives the counting sensor 21 to move along the Y direction to the starting position aligned with the silicon wafer in the target flower basket 50; finally, the Z-direction drive member 24 drives the counting sensor 21 to move along the Z direction to establish a counting connection with the silicon wafer. Of course, it is also possible to drive along the Y direction first, then along the X direction, and finally along the Z direction, as long as the counting sensor can eventually establish a counting connection with the silicon wafer in the target flower basket. In this example, relative to the target flower basket, it is preferable that the X direction is a relatively lateral left-right movement, the Y direction is a relatively forward-backward movement, and the Z direction is a relatively up-down movement.

[0075] Continue as Figure 3A and Figure 3BAs shown, the feeding platform 10 also has M basket transfer troughs 13, M pallet cavities 14, and a lifting frame storage cavity 15. The lifting frame storage cavity 15 is located in the middle of the basket transfer trough 13, and the pallet cavity 14 is located at the second end 12 of the feeding platform 10. The M pallet cavities 14 form a large plate cavity. In this example, M = 2. In addition, the first end 11 of the feeding platform 10 also has a first lifting frame cavity 111, and the second end 12 also has a second lifting frame cavity 121, which is also located within the pallet cavity 14. The two ends of each basket transfer trough 13 are respectively connected to the corresponding first lifting frame cavity 111 and second lifting frame cavity 121. That is, the flower basket lifting and traversing mechanism 40, with its flower basket support frame 41, moves flower baskets 50 of different or the same size from the first end 11 of the feeding platform 10 to the second end 12 of the feeding platform 10 along the corresponding first support frame cavity 111, flower basket transfer groove 13, and second support frame cavity 121. Figure 5A and Figure 5B As shown, the flower basket lifting and traversing mechanism 40 includes a flower basket support frame 41, a lifting cylinder 42, a horizontal guide rail 43, and a servo motor 44. The lifting cylinder 42 is installed below the feeding platform 10, and the horizontal guide rail 43 is also fixedly installed below one side of the feeding platform 10. The flower basket support frame 41 is also installed on the piston rod of the lifting cylinder 42, and the lifting cylinder 42 is slidably mounted on the horizontal guide rail 43 through a cylinder mounting seat 421. At the same time, the cylinder mounting seat 421 is driven and connected to the servo motor 44. That is, driven by the servo motor 44, the cylinder mounting base 421 can move horizontally along the horizontal guide rail 43, which in turn drives the lifting cylinder 42 and the flower basket lifting frame 41 mounted on the piston rod of the lifting cylinder 42 to move horizontally along the horizontal guide rail 43. Furthermore, the flower basket lifting frame 41 is also driven by the lifting cylinder 42, and the piston rod of the lifting cylinder 42 drives it to perform lifting and lowering movements to achieve the lifting and lowering of the flower basket 50.

[0076] In summary, the flower basket lifting frame 41 can be driven by the lifting cylinder 42 to move vertically through the first lifting frame cavity 111 and the second lifting frame cavity 121, so as to lift several flower baskets on the first lifting frame cavity 111 located at the first end 11 of the feeding platform away from the feeding platform 10. At the same time, the flower basket lifting frame 41 can also be driven by the servo motor 44 to move several flower baskets lifted on the first lifting frame cavity 111 laterally to the second lifting frame cavity 121, and finally drive the flower basket lifting frame 41 to descend again to place the flower baskets in the second lifting frame cavity 121, so that the silicon wafer weighing mechanism 30 can weigh the moved flower baskets 50.

[0077] Continue as Figures 3A-3BAs shown, the silicon wafer weighing mechanism 30 is located at the second end 13 of the feeding platform 10. It has M sets of weighing sensor assemblies and M basket trays 31, the same number as the corresponding tray cavities 14. The basket trays 31 are installed in the corresponding tray cavities 14 to support the transferred baskets 50. A horizontal gap is formed between the basket trays 31 and the feeding platform 10 so that the basket trays 31 can bear the weight of the baskets 50 placed on them relatively independently of the feeding platform 10. In this example, M = 2. The second lifting frame cavity 121 is also located in the middle of the corresponding basket tray 31 so that when the basket lifting frame 41 of the basket lifting and traversing mechanism 40 lifts the basket and moves it to the second lifting frame cavity 121, the basket 50 is also above the basket tray 31. A set of weighing sensor assemblies is installed below each basket tray 31, and each set of weighing sensor assemblies has two weighing sensors 32. The two weighing sensors 32 are symmetrically arranged diagonally under the corresponding flower basket trays 31, with one end of each sensor 32 fixed to the corresponding flower basket tray 31 and the other end fixed to the feeding platform 10 near the corresponding tray cavity 14, so as to sense and weigh the flower baskets 50 moved onto the flower basket trays 31. In addition, continuing as... Figure 3A As shown, each flower basket tray 31 also has a support limiting block 311 at the four corners to support the four corners of the flower basket 50, so as to better limit the moved flower basket 50 on the corresponding flower basket tray 31.

[0078] Continue as Figure 6 and Figure 7 As shown, another objective of this utility model is to provide a counting and weighing method for a compatible feeding system for flower baskets of different sizes, comprising the following steps:

[0079] Preparatory step S1A: The Y-axis drive of the silicon wafer counting mechanism drives the counting sensor to move along the Y-axis from the first avoidance position at the first end of the feeding platform to the starting position of the first basket;

[0080] Step S1: The silicon wafer counting mechanism identifies and counts the silicon wafers in several baskets at the first end of the feeding platform. Specifically, the counting sensor of the silicon wafer counting mechanism moves from the starting position of the previous basket to the counting position of the current basket, then counts the silicon wafers in the current basket, and finally returns to the starting position of the current basket.

[0081] Furthermore, step S1 is further divided into the following sub-steps:

[0082] In step S11, the X-direction drive of the silicon wafer counting mechanism drives the counting sensor to move from the starting position of the previous flower basket along the X direction or in the opposite direction of the X direction to the starting position of the current flower basket.

[0083] In step S12, the Z-axis drive of the silicon wafer counting mechanism drives the counting sensor to move from the starting position of the current flower basket along the Z-axis to the counting position of the current flower basket.

[0084] In step S13, the counting sensor counts the silicon wafers of the current flower basket;

[0085] In step S14, the Z-axis drive of the silicon wafer counting mechanism drives the counting sensor to move in the opposite direction along the Z-axis from the current counting position of the flower basket to the starting position of the current flower basket.

[0086] Repeat steps S11 to S14 until all baskets at the first end of the feeding platform have been counted.

[0087] Reset step S1B: The Y-axis drive of the silicon wafer counting mechanism drives the counting sensor to move in the reverse direction along the Y direction from the starting position of the last basket to the second avoidance position; or the reset step S1B further includes: the X-axis drive of the silicon wafer counting mechanism continues to drive the counting sensor to move in the X direction or in the reverse direction along the X direction to the first avoidance position.

[0088] The current counting position of the flower basket is the position where the counting sensor is docked with the silicon wafer inside the flower basket for counting.

[0089] The starting position of the current flower basket and the counting position of the current flower basket are in the same Z direction;

[0090] The first avoidance position and the second avoidance position are positions where the counting sensor is located at the first end of the feeding platform and does not interfere with the flower basket lifting and traversing mechanism when receiving several flower baskets at the first end of the feeding platform.

[0091] In step S2, the flower basket lifting and traversing mechanism lifts and moves several flower baskets from the first end of the feeding platform to the second end of the feeding platform.

[0092] Step S2 further includes the following sub-steps:

[0093] In step S21, the flower basket lifting and traversing mechanism moves from the second end of the feeding platform to the first end and is located directly below the flower basket at the first end;

[0094] In step S22, the lifting cylinder of the flower basket lifting and lateral movement mechanism drives the flower basket lifting frame to rise and lift the first end of the flower basket.

[0095] In step S23, the flower basket lifting and traversing mechanism lifts the flower basket and moves it from the first end of the feeding platform to the flower basket tray at the second end of the feeding platform along the flower basket transfer trough.

[0096] In step S3, the silicon wafer weighing mechanism weighs several baskets at the second end of the feeding platform.

[0097] Specifically, step S3 includes the lifting cylinder of the flower basket lifting and traversing mechanism driving the flower basket support frame to descend. After the flower basket is completely separated from the second end of the feeding platform, the silicon wafer weighing mechanism weighs the flower basket.

[0098] The present invention has been described in detail above with reference to the accompanying drawings and embodiments. Those skilled in the art can make various modifications to the present invention based on the above description. Therefore, certain details in the embodiments should not be construed as limiting the present invention, and the scope of protection of the present invention shall be defined by the appended claims.

Claims

1. A silicon wafer counting mechanism for a basket-compatible feeding system of different sizes, characterized in that... The silicon wafer counting mechanism includes: Several flower baskets of the same or different sizes are arranged at parallel intervals along the X-axis of the feeding platform; A counting sensor is connected to the target basket in a manner that counts the number of silicon wafers inside the basket. A multi-directional moving drive mechanism, connected to the counting sensor, can move the counting sensor along multiple different directions to the target basket to calculate the number of silicon wafers in the target basket.

2. The silicon wafer counting mechanism for a basket-type feeding system of different sizes as described in claim 1, characterized in that, The multi-directional movement drive mechanism includes: The counting sensor is directly or indirectly mounted on the X-axis drive member so that the counting sensor is driven by the X-axis drive member to move along the X-axis to the Z-axis of the target flower basket. The counting sensor is directly or indirectly connected to the Z-axis drive, so that the counting sensor is driven by the Z-axis drive to move along the Z-axis to the target flower basket.

3. The silicon wafer counting mechanism for a basket-type feeding system of different sizes as described in claim 2, characterized in that, The Z-axis drive member is mounted on the X-axis drive member.

4. The silicon wafer counting mechanism for a basket-type compatible feeding system of different sizes as described in claim 2, characterized in that... The Z-axis drive component includes: Z-axis plate, wherein the counting sensor is directly or indirectly mounted on the Z-axis plate; The Z-axis drive cylinder has a Z-axis plate mounted on its piston, so that the Z-axis drive cylinder can drive the Z-axis plate and the counting sensor to move along the Z-axis.

5. The silicon wafer counting mechanism for a basket-type feeding system of different sizes as described in claim 2, characterized in that... The X-axis drive is a rodless cylinder that moves in the X-axis direction. The Z-axis drive cylinder is fixedly connected to the X-axis moving support plate of the rodless cylinder, thereby driving the Z-axis drive and the counting sensor to move along the X-axis to the Z-axis of the target flower basket.

6. The silicon wafer counting mechanism for a basket-type feeding system of different sizes as described in claim 2, characterized in that... The multi-directional movement drive mechanism further includes: The Y-axis drive is fixed to the Z-axis plate of the Z-axis drive, and the counting sensor is directly fixed to the Y-axis drive, so as to drive the counting sensor to move back and forth in the Y-axis between the Z-axis projection position of the target flower basket and the initial position.

7. The silicon wafer counting mechanism for a basket-type compatible feeding system of different sizes as described in claim 6, characterized in that... The Y-axis drive is a cylinder slide that can slide upward in the Y direction. The counting sensor is fixed to the top of the cylinder slide, and the bottom of the cylinder slide is fixed to the Z-axis plate.

8. The silicon wafer counting mechanism for a basket-type feeding system of different sizes as described in claim 3, characterized in that... The Z-axis drive component also includes two support rods, which are supported and installed below the Z-axis plate and spaced apart on both sides of the piston of the Z-axis drive cylinder.

9. The silicon wafer counting mechanism for a basket-type feeding system of different sizes as described in claim 1, characterized in that... The counting sensor has several counting induction plates arranged in parallel at intervals.

10. A feeding system compatible with flower baskets of different sizes, characterized in that... The silicon wafer counting mechanism includes the different-sized basket-compatible feeding system as described in any one of claims 1 to 9.

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