Tool jig

Abstract

The utility model discloses a tool jig, and belongs to the technical field of fine adjustment machines. Comprising a hollowed-out layer, and a plurality of hollowed-out through holes are formed in the hollowed-out layer; the electrode layer is arranged above the hollow layer; the positioning layer is arranged above the electrode layer; and the guide layer is arranged above the positioning layer. The tool has the advantages of being convenient to use and accurate in alignment, reducing the error probability of manual combination of the tool, and meeting the requirements of current crystal resonator production.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of fine adjustment machine, especially to a tooling fixture. BACKGROUND

[0002] In the production and manufacture of crystal resonator products, fine adjustment machine plays a key role in frequency fine adjustment. Fine adjustment machine is divided into two kinds of evaporation and ion beam etching according to fine adjustment mode, and the current industry generally adopts ion etching mode. The traditional fine adjustment jig set is composed of a pressing plate, a tray (TRAY) and an electrode plate (MASK), and the three are stacked when in use, and the hole position on the electrode plate corresponds to the groove of the tray. The frequency fine adjustment of the crystal resonator is to etch the silver or gold plated layer of the chip in a vacuum environment by using ion etching technology, to adjust the frequency by changing the thickness of the metal plated film, and to form a closed loop control to achieve the target frequency by means of a measurement system, a measurement computer, a host computer and a PLC (Programmable Logic Controller) to control the motor and the baffle action. The ion gun is the main part of fine adjustment, and its working principle covers the generation of ion beam by ion source, the acceleration of ion by accelerator to improve kinetic energy, the focusing of ion beam by focusing system, the control of ion beam direction by directional system, and the etching of metal film by ion beam to realize frequency fine adjustment.

[0003] With the development of SMD (Surface Mount Device) crystal resonator products to 1612 (1.6mm x 1.2mm), 1210 (1.2mm x 1.0mm), 1008 (1.0mm x 0.8mm) and other ultra-small specifications, the accuracy requirement of the hole position on the electrode plate and the product alignment on the tray is increasingly strict (alignment accuracy deviation < 30um). But the traditional combination positioning method of electrode plate and tray has serious defects. Due to the insufficient positioning accuracy of the upper and lower layers, the workpiece is easy to shift during etching fine adjustment, which leads to poor etching uniformity and directly affects the performance stability of the product. Moreover, the combination error of the upper and lower layers is difficult to eliminate, and cannot meet the current demand situation of crystal resonator production. SUMMARY

[0004] The utility model aims at providing a tooling fixture to solve the above technical problems.

[0005] A tooling fixture, comprising,

[0006] A hollow layer is provided with a plurality of hollow through holes;

[0007] An electrode layer is arranged above the hollow layer;

[0008] A positioning layer is arranged above the electrode layer;

[0009] A guide layer is arranged above the positioning layer.

[0010] Preferably, a plurality of first electrode hole positions are arranged on the electrode layer, and the first electrode hole positions correspond to the hollow through holes one by one.

[0011] Preferably, a plurality of first positioning holes are arranged on the positioning layer, and the first positioning holes correspond to the hollow through holes one by one.

[0012] Preferably, a plurality of crystal hole grooves are arranged on the guide layer, and the crystal hole grooves correspond to the hollow through holes one by one.

[0013] The offset amount of the first electrode hole position and the crystal hole groove is less than 20 um.

[0014] Preferably, the hollow layer comprises,

[0015] A first hollow reinforcing layer, a plurality of first hollow holes are arranged on the first hollow reinforcing layer;

[0016] A second hollow reinforcing layer is arranged above the first hollow reinforcing layer, and a plurality of second hollow holes are arranged on the second hollow reinforcing layer;

[0017] A first hollow supporting layer is arranged above the second hollow reinforcing layer, and a plurality of third hollow holes are arranged on the first hollow supporting layer;

[0018] The first hollow hole, the second hollow hole and the third hollow hole correspond to form the hollow through hole.

[0019] Preferably, the electrode layer, the positioning layer and the guide layer are integrated by hot pressing welding, and the integrated structure forms the crystal hole groove.

[0020] Preferably, the hollow through holes are arranged in a matrix form.

[0021] Preferably, the two ends of the guide layer are provided with second positioning holes.

[0022] Preferably, the hollow layer, the electrode layer, the positioning layer and the guide layer are all stainless steel plates.

[0023] Preferably, the two ends of the crystal hole groove are provided with clamping holes.

[0024] The utility model discloses the beneficial effect is: convenient to use, accurate alignment, reduces the failure probability of artificial combination fixture, satisfies the demand of current crystal resonator production. BRIEF DESCRIPTION OF DRAWINGS

[0025] Fig. 1 It is the side view of the tooling fixture of the utility model;

[0026] Fig. 2is a top view of the tooling jig of the utility model;

[0027] Fig. 3 is a partial enlarged view of the crystal cavity groove of the utility model;

[0028] Fig. 4 is a top view of the crystal resonator semi-finished product to be finely adjusted.

[0029] In the drawings: 1, hollow layer;11, first hollow reinforcing layer;12, second hollow reinforcing layer;13, first hollow supporting layer;2, electrode layer;3, positioning layer;4, guide layer;5, first electrode hole site;6, crystal cavity groove;61, clamping hole;7, second positioning hole;8, crystal resonator semi-finished product;9, metal plating layer. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the utility model will be apparently and completely described in conjunction with the drawings of the embodiments of the utility model, and apparently, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without making creative efforts belong to the protection scope of the utility model.

[0031] It should be noted that the embodiments in the utility model and the features in the embodiments can be combined with each other without conflict.

[0032] The utility model will be further described in conjunction with the drawings and specific embodiments, but not as the limitation of the utility model.

[0033] A tooling jig, such as Figs. 1 to 4 As shown in the figure, comprising,

[0034] Hollow layer 1, the hollow layer 1 is equipped with multiple hollow through holes;

[0035] Electrode layer 2, is located above the hollow layer 1;

[0036] Positioning layer 3, is located above the electrode layer 2;

[0037] Guide layer 4, is located above the positioning layer 3.

[0038] Specifically, the utility model provides a kind of tooling jig, convenient to use, accurate alignment, reduce the failure probability of artificial combination jig, satisfy the demand of current crystal resonator production.

[0039] In a more preferred embodiment, electrode layer 2 is equipped with multiple first electrode hole sites 5, and the first electrode hole site 5 is one-to-one corresponding with the hollow through hole.

[0040] Specifically, the first electrode hole 5 corresponds one-to-one with the hollow through hole, so that the ion beam emitted from the ion gun can pass through the hollow through hole according to the designed path when passing through the electrode layer 2, and directly act on the crystal resonator semi-finished product 8 placed in the corresponding position. The precise correspondence avoids scattering or deflection of the ion beam, ensuring that each semi-finished product can be processed under the same etching conditions, thereby improving the uniformity of etching and reducing product quality differences.

[0041] In a preferred embodiment, the positioning layer 3 is provided with a plurality of first positioning holes, and the first positioning holes correspond one-to-one with the hollow through holes.

[0042] Specifically, the first positioning hole corresponds one-to-one with the hollowed-out through hole. During the assembly process of the tooling fixture, the positioning hole can cooperate with the positioning pin or other positioning device to make the relative position between the positioning layer 3 and the hollowed-out layer 1 and other layers more accurate. When placing the crystal resonator semi-finished product 8, these positioning holes can also be used to quickly and accurately place the semi-finished product into the designated position, reducing offset and misalignment caused by inaccurate positioning, and improving production efficiency and product qualification rate.

[0043] In a preferred embodiment, the guide layer 4 is provided with a plurality of crystal cavity grooves 6, and the crystal cavity grooves 6 correspond one-to-one with the hollow through holes;

[0044] The offset between the first electrode hole 5 and the crystal cavity groove 6 is less than 20 μm.

[0045] Specifically, the crystal cavity grooves 6 correspond one-to-one with the perforated holes, providing a dedicated placement position for the semi-finished crystal resonator 8. The groove design restricts the movement of the semi-finished product, keeping it stable during ion etching. When the semi-finished product is placed in the groove, its metal coating layer 9 precisely corresponds to the perforated hole, ensuring that the ion beam can accurately act on the target area of ​​the semi-finished product, reducing problems such as uneven etching and inaccurate frequency fine-tuning caused by the positional deviation of the semi-finished product.

[0046] More specifically, the offset between the first electrode aperture 5 and the crystal cavity groove 6 is less than 20µm, ensuring that the ion beam, after exiting the electrode aperture, can reach the crystal resonator semi-finished product 8 placed in the crystal cavity groove 6 as accurately as possible. This extremely small offset prevents the ion beam from acting on non-target areas of the semi-finished product, reduces etching errors, and ensures that each semi-finished product can be etched under the same conditions, thereby improving product consistency and yield, and meeting the requirements of high-precision production.

[0047] In a preferred embodiment, the perforated layer 1 includes,

[0048] The first hollow reinforcing layer 11 has a plurality of first hollow holes 111.

[0049] The second hollow reinforcing layer 12 is disposed above the first hollow reinforcing layer 11, and the second hollow reinforcing layer 12 is provided with a plurality of second hollow holes 121;

[0050] The first hollow support layer 13 is disposed above the second hollow reinforcement layer 12, and the first hollow support layer 13 is provided with a plurality of third hollow holes 131;

[0051] The first hollow hole 111, the second hollow hole 121, and the third hollow hole 131 correspond one-to-one to form a hollow through hole.

[0052] Specifically, the first, second, and third perforated holes on the first perforated reinforcing layer 11, the second perforated reinforcing layer 12, and the first perforated support layer 13 correspond one-to-one to form perforated through holes. These perforated holes reduce the amount of material used, thereby reducing weight, without affecting the overall structural strength of the tooling fixture. At the same time, the perforated structure facilitates air circulation. When the fine-tuning machine generates heat during operation, air can convect through the perforated holes, carrying away heat, reducing the temperature of the tooling fixture, and improving its service life and performance stability.

[0053] In a preferred embodiment, the electrode layer 2, the positioning layer 3, and the guide layer 4 are thermo-pressed and welded into an integrated structure, and a crystal cavity groove 6 is formed on the integrated structure.

[0054] Specifically, the pre-cut plates are integrated into a single design through hot pressing, which is convenient to use, precise in alignment, and meets the current needs of crystal resonator production.

[0055] In a preferred embodiment, the perforated holes are arranged in a matrix.

[0056] Specifically, the perforated holes are arranged in a matrix. This regular arrangement facilitates mold design and processing during the design and manufacture of tooling fixtures, improving production efficiency and machining accuracy. For workers placing the semi-finished crystal resonator 8, the matrix arrangement of the perforated holes makes identification and positioning easier, enabling quick and accurate placement of the semi-finished product in its corresponding position, reducing operation time and increasing production efficiency. The regular matrix arrangement also helps ensure more precise correspondence between layers, further improving the overall positioning accuracy of the tooling fixture.

[0057] In a preferred embodiment, the guide layer 4 is provided with second positioning holes 7 at both ends.

[0058] Specifically, the second positioning holes 7 at both ends of the guide layer 4 can cooperate with positioning pins or positioning structures of other equipment or tooling to play an auxiliary positioning role when the tooling fixture is placed into the fine-tuning machine or other operating equipment.

[0059] The two positioning holes can restrict the movement of the tooling fixture in the horizontal and vertical directions, keeping it in an accurate position in the equipment. This avoids the etching and fine-tuning effect of the crystal resonator semi-finished product 8 due to the positional deviation of the tooling fixture, thereby improving product quality and the stability of the production process.

[0060] In a preferred embodiment, the hollow layer 1, electrode layer 2, positioning layer 3, and guide layer 4 are all stainless steel plates.

[0061] Specifically, stainless steel contains alloying elements such as chromium and nickel, and a dense oxide film can form on its surface. This oxide film prevents tooling fixtures from rusting and corroding in humid or corrosive environments. Its high strength ensures that tooling fixtures are not easily deformed under certain pressure and external forces, maintaining the stability and precision of each layer of the structure.

[0062] Stainless steel plates have good stability; their physical and chemical properties change little under different temperature and humidity conditions, ensuring that tooling fixtures can work reliably in various production environments.

[0063] Each layer has a coding sequence, which is easy to use and reduces the combination bias problem that often occurred before.

[0064] In a preferred embodiment, the two ends of the crystal cavity groove 6 are provided with clamping holes 61.

[0065] Specifically, the gripping holes 61 at both ends of the crystal cavity groove 6 provide dedicated positions for gripping the semi-finished crystal resonator 8. Whether operated manually or using a robotic arm, the gripping holes 61 provide a better point of leverage, making the gripping process more stable and accurate. This reduces potential damage caused by directly gripping the surface of the semi-finished product, improving the reliability of the production process and the yield rate of the product.

[0066] When using this utility model fixture, first, invert the integrated fine-tuning fixture onto the tray containing the semi-finished crystal resonator 8 to be fine-tuned, ensuring accurate alignment and tight fit between the integrated fine-tuning fixture and the tray. Then, pinch them together and flip them simultaneously, turning the tray containing the semi-finished crystal resonator 8 onto the integrated fine-tuning fixture. Finally, cover it with the pressure plate and place it into the fine-tuning machine to perform ion etching frequency fine-tuning.

[0067] An ion gun is a device that uses electric and magnetic fields to accelerate, focus, and orient ions. The working principle of an ion gun mainly includes four parts: an ion source, an accelerator, a focusing system, and an orienting system.

[0068] First, the ion source is the starting part of the ion gun, responsible for generating the ion beam. The ion source typically generates ions through discharge or ionization, and then accelerates the ions to a certain speed through an electric or thermal field.

[0069] Secondly, the accelerator is a very important part of the ion gun, which can accelerate ions to very high speeds. Accelerators typically use electric or magnetic fields to accelerate ions, increasing their kinetic energy and thus improving their penetration ability and the etching and thinning effect on the material surface.

[0070] Secondly, focusing systems are used to focus the ion beam within a specific range so that it can better act on the target surface. Focusing systems typically use magnetic or electric fields to focus the ion beam, reducing its diameter and thus increasing its energy density and depth of action.

[0071] Finally, the orientation system is used to control the direction of the ion beam, enabling it to precisely act on the target surface. Orientation systems typically use electric or magnetic fields to direct the ion beam, allowing it to process or modify the target surface along a predetermined trajectory.

[0072] When the vacuum reaches the set value, the discharge power supply powers the ion gun body. In the vacuum, the filament is energized, releasing thermionic electrons. These thermionic electrons, under the influence of the magnet, move in a spiral shape towards the positive electrode. At this time, argon gas molecules are introduced into the ion gun. The argon gas molecules collide with the thermionic electrons to generate argon ions, and then the baffle opens. The ion gun body, equipped with a voltage of 300–1200V, provides high energy to the argon ions. Simultaneously, the power supply is accelerated, and the electrons are accelerated by the electric field, thus increasing their kinetic energy. This draws the argon ions out to both sides of the electrode layer. The drawn-out argon ions etch the metal film, thereby achieving frequency fine-tuning.

[0073] By using thermocompression bonding technology to integrate the electrode plate and tray into one unit, the offset of the semi-finished quartz crystal resonator to be fine-tuned during the ion etching process for frequency fine-tuning is less than 0.02mm, meeting the requirements. Because the thermocompression bonding process enhances the overall strength compared to the original separate design, it is less prone to warping and deformation, thus extending its service life. The integrated fine-tuning fixture is convenient to use, provides precise positioning, and boasts superior performance. It reduces the probability of errors often caused by manual fixture assembly, while also improving the accuracy and efficiency of the etching process.

[0074] The above description is only a preferred embodiment of the present utility model and does not limit the implementation method and protection scope of the present utility model. Those skilled in the art should realize that all solutions obtained by equivalent substitutions and obvious changes made based on the description and illustrations of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A tooling fixture, characterized in that, include, A perforated layer, wherein the perforated layer is provided with a plurality of perforated through holes; An electrode layer is disposed above the hollowed-out layer; A positioning layer is disposed above the electrode layer; A guide layer is disposed above the positioning layer.

2. The tooling fixture according to claim 1, characterized in that, The electrode layer is provided with a plurality of first electrode holes, and each first electrode hole corresponds to one of the hollow through holes.

3. The tooling fixture according to claim 1, characterized in that, The positioning layer is provided with a plurality of first positioning holes, and the first positioning holes correspond one-to-one with the hollow through holes.

4. The tooling fixture according to claim 2, characterized in that, The guide layer is provided with a plurality of crystal cavity grooves, and the crystal cavity grooves correspond one-to-one with the hollow through holes; The offset between the first electrode hole and the crystal cavity groove is less than 20 μm.

5. The tooling fixture according to claim 1, characterized in that, The perforated layer includes, A first hollowed-out reinforcing layer, wherein a plurality of first hollowed-out holes are provided on the first hollowed-out reinforcing layer; The second hollowed-out reinforcing layer is disposed above the first hollowed-out reinforcing layer, and the second hollowed-out reinforcing layer is provided with a plurality of second hollowed-out holes; A first hollow support layer is disposed above the second hollow reinforcement layer, and a plurality of third hollow holes are provided on the first hollow support layer; The first hollow hole, the second hollow hole, and the third hollow hole correspond one-to-one to form the hollow through hole.

6. The tooling fixture according to claim 4, characterized in that, The electrode layer, the positioning layer, and the guiding layer are integrated into a single structure by hot pressing and welding, and the crystal cavity groove is formed on the integrated structure.

7. The tooling fixture according to claim 1, characterized in that, The perforated holes are arranged in a matrix.

8. The tooling fixture according to claim 1, characterized in that, The guide layer has second positioning holes at both ends.

9. The tooling fixture according to claim 1, characterized in that, The hollow layer, the electrode layer, the positioning layer, and the guide layer are all made of stainless steel.

10. The tooling fixture according to claim 4, characterized in that, The two ends of the crystal cavity groove are provided with clamping holes.

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