Door opening gripper and collaborative robot

Abstract

The utility model discloses a door opening gripper and a collaborative robot, and relates to the technical field of semiconductor machining, the door opening gripper comprises a driver and two grippers, and the driver is connected with the two grippers to drive the two grippers to be close to or away from each other; a groove is formed in at least one side face, outside the clamping face, of the end, away from the driver, of each paw. According to the door opening gripper, the groove is formed in one side outside the clamping surface of the gripper, so that the door opening gripper not only has the function of a common gripper, but also can meet the opening and closing requirements of an equipment door body with a door opening structure capable of being clamped with the groove, and the common gripper and a special jig do not need to be frequently replaced; and time waste caused by tool switching in the material transferring process is remarkably reduced, so that the overall operation efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and in particular to a door opening gripper and collaborative robot. Background Technology

[0002] The semiconductor device manufacturing process involves multiple complex steps, including photolithography, etching, thin film deposition, polishing, cleaning, packaging, and testing. These steps require material transfer between different specialized equipment. The equipment design varies across different work areas, resulting in different structures and operating methods for opening and closing doors. Currently, opening and closing these doors typically relies on manual operation by workers. This method is not only inefficient but also fails to meet the high automation requirements of modern semiconductor manufacturing. Some solutions attempt to design dedicated door opening and closing fixtures. However, using these fixtures requires removing the standard gripper before replacing it with the dedicated fixture. This necessitates frequent switching between the standard gripper and the dedicated fixture, increasing operating time, operating costs, and maintenance complexity.

[0003] Therefore, there is an urgent need to provide a new solution that not only has the functions of a regular gripper, but also meets several door opening and closing control requirements, thereby improving overall production efficiency and reducing operating costs. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a door opening gripper and collaborative robot that not only has the functions of a regular gripper, but also meets several door opening and closing control requirements, thereby improving overall production efficiency and reducing operating costs.

[0005] To achieve the above technical objectives, this application provides a door opening gripper, including a driver and two grippers, wherein the driver is connected to the two grippers to drive the two grippers to move closer or further apart;

[0006] Each of the grippers has a groove on at least one side of its surface outside the clamping surface at the end furthest from the driver.

[0007] Furthermore, the groove is provided on an adjacent side of the gripper that is away from the driver.

[0008] Furthermore, the groove is provided on two adjacent sides of the gripper that are adjacent to the clamping surface at the end of the gripper away from the driver.

[0009] Furthermore, the grooves on the two adjacent sides are symmetrically arranged so that one end of the claw has an I-shaped end.

[0010] Furthermore, the groove is provided on the opposite side of the gripper, which is opposite to the clamping surface, at the end of the gripper away from the driver.

[0011] Furthermore, the groove on the opposing side is located on the side of the groove on the adjacent side that is closer to the driver.

[0012] Furthermore, the clamping surface is provided with an arc-shaped concave surface;

[0013] The arc-shaped concave surface between the two grippers forms a clamping cavity.

[0014] Furthermore, it also includes quick plate changing;

[0015] The quick-change disk is mounted on the drive.

[0016] This application also discloses a collaborative robot, including a multi-axis robotic arm and the aforementioned door-opening gripper;

[0017] The end of the multi-axis robotic arm is connected to the door-opening gripper.

[0018] Furthermore, it also includes a workbench;

[0019] The multi-axis robotic arm is mounted on the worktable;

[0020] The workbench is equipped with a gripper bracket;

[0021] The gripper bracket is provided with several placement stations, and at least one of the placement stations is used to place the door opening gripper.

[0022] The multi-axis robotic arm is detachably connected to the door opening gripper.

[0023] As can be seen from the above technical solutions, the door opening gripper designed in this application has the following beneficial effects:

[0024] 1. This door-opening gripper features a groove on one side of the gripper's clamping surface, enabling it to function not only as a regular gripper but also to accommodate the opening and closing needs of equipment doors with opening structures that can engage with the groove. This eliminates the need for frequent replacements of regular grippers and specialized fixtures, significantly reducing time wasted on tool switching during material handling and thus improving overall operational efficiency.

[0025] 2. Because this door opening gripper integrates the functions of a standard gripper and a specialized fixture, it avoids the need to purchase additional specialized fixtures and also reduces maintenance and management costs associated with tool switching. Furthermore, the multi-functional integrated design simplifies spare parts inventory and maintenance processes, further reducing operating costs. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram showing the state of the door of a developing and coating equipment opened by a door-opening gripper provided in this application;

[0028] Figure 2 for Figure 1 Enlarged view of position A;

[0029] Figure 3 This is a schematic diagram illustrating the combination of a door opening gripper and a semi-concealed door handle provided in this application;

[0030] Figure 4 This is a first perspective view of a door opening grip provided in this application;

[0031] Figure 5 This is a second perspective view of a door opening gripper provided in this application;

[0032] In the diagram: 1. Driver; 2. Gripper; 20. Groove; 21. Clamping surface; 22. Adjacent side; 23. Opposite side; 24. Arc-shaped concave surface; 3. Quick-change plate; 4. Equipment door; 41. Semi-concealed door handle; 42. Grip groove. Detailed Implementation

[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the embodiments of this application.

[0034] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0035] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0036] This application discloses a door-opening gripper and a collaborative robot.

[0037] Please see Figures 1 to 2 One embodiment of a door opening gripper provided in this application includes:

[0038] The device consists of a driver 1 and two grippers 2. The driver 1 connects to the two grippers 2 to move them closer together or further apart. The driver 1 is a cylinder-driven clamping device with two drive blocks that can move closer or further apart. The two grippers 2 are connected to the two drive blocks respectively. The two drive blocks can be arranged on the same straight line or on different straight lines (which allows for a wider range of strokes compared to aligning them on the same straight line). The structure of the driver 1 and grippers 2 is an existing structure and will not be described in detail.

[0039] Each gripper 2 has a groove 20 on at least one side of its end away from the driver 1, outside the clamping surface 21. The groove 20 can be adapted to the door of a developing and coating equipment 4, which has a door handle. The handle is a semi-concealed door handle 41 with a gripping groove 42 (in which a human hand can traditionally reach to the gripping groove 42 to pull open the equipment door 4). Now the groove 20 can be engaged with the edge of the gripping groove 42, and the equipment door 4 can be opened by moving the door opening gripper.

[0040] The door opening grip designed in this application has the following beneficial effects:

[0041] 1. This door-opening gripper features a groove 20 on one side outside the gripping surface 21 of the claw 2, enabling it to not only function as a regular gripper but also accommodate the opening and closing needs of equipment doors 4 with opening structures that can engage with the groove 20. This eliminates the need for frequent replacements of regular grippers and specialized fixtures, significantly reducing time wasted due to tool switching during material handling and thus improving overall operational efficiency.

[0042] 2. Because this door opening gripper integrates the functions of a standard gripper and a specialized fixture, it avoids the need to purchase additional specialized fixtures and also reduces maintenance and management costs associated with tool switching. Furthermore, the multi-functional integrated design simplifies spare parts inventory and maintenance processes, further reducing operating costs.

[0043] The above is an embodiment of a door opening gripper provided in this application. The following is an embodiment of a door opening gripper provided in this application. Please refer to the following for details. Figures 1 to 5 .

[0044] Based on the solution of Embodiment 1 above:

[0045] Furthermore, such as Figure 3 as well as Figure 5 As shown, the first arrangement of the groove 20 can be:

[0046] A groove 20 is provided on an adjacent side 22 of the gripper 2, which is located at the end away from the driver 1 and adjacent to the clamping surface 21.

[0047] Furthermore, such as Figure 3 as well as Figure 5 As shown, the second arrangement of the groove 20 can be:

[0048] The gripper 2 has two adjacent sides 22 adjacent to the clamping surface 21 at the end away from the driver 1, each with a groove 20. When both adjacent sides 22 have grooves 20, if the double-opening equipment door 4 is being operated, it can be opened directly using the grooves 20 on each side, without having to flip the door opening gripper.

[0049] Furthermore, the grooves 20 on the two adjacent sides 22 are symmetrically arranged so that one end of the gripper 2 forms an I-shaped end. The symmetrical design can effectively simplify the production process and reduce manufacturing difficulty and cost. At the same time, the symmetrical structure has a more uniform stress distribution, which can improve the stability and reliability of the overall structure, reduce stress concentration problems caused by asymmetry, and thus extend the product's service life.

[0050] Furthermore, such as Figures 3 to 5 As shown, a third arrangement of the groove 20 can be:

[0051] A groove 20 is provided on the opposite side 23 of the gripper 2, which is opposite to the clamping surface 21, at the end away from the driver 1. When the groove 20 is provided on the opposite side 23, it can be used not only to open the door 4 of the developing and coating equipment, but also to grip some structures with double handles (such as a trolley protective cover, which has two handles spaced apart. Traditionally, the operator holds the two handles with both hands to open or close the operation. Now, by respectively engaging the groove 20 of the opposite side 23 with the handles, the opening or closing operation can be achieved. First, the gripper 2 is inserted between the two handles, so that the groove 20 corresponds to the handle. Then, the gripper 2 is unfolded so that the groove 20 is engaged with the handle, thus connecting with the trolley protective cover.

[0052] The third arrangement can be combined with the first or second arrangement.

[0053] Furthermore, such as Figure 3 as well as Figure 5 As shown, the groove 20 on the opposite side 23 is located on the side of the groove 20 on the adjacent side 22 that is closer to the driver 1. Compared with the integrated design that is connected to the groove 20 on the adjacent side 22, the gripper 2 has better structural strength.

[0054] Furthermore, such as Figure 3 as well as Figure 5 As shown, the clamping surface 21 is provided with an arc-shaped concave surface 24, and the arc-shaped concave surface 24 between the two grippers 2 forms a clamping cavity. The arc-shaped concave surface 24 can accommodate the gripping needs of devices with non-concealed door handles (such as the existing laser-written device door 4). For non-concealed door handles, such as U-shaped handles, the clamping cavity formed by the arc-shaped concave surface 24 can better clamp such door handles to realize the opening and closing operation of the device door 4.

[0055] Furthermore, such as Figure 1 as well as Figure 2 As shown, it also includes a quick-change disc 3, which is installed on the drive 1. The quick-change disc 3 allows for faster replacement and installation of the door opening gripper in different working scenarios, enhancing the versatility and compatibility of the door opening gripper. For working environments that require frequent tool changes, the quick-change disc 3 can greatly improve work efficiency and reduce downtime for tool changes.

[0056] This application also discloses a collaborative robot, including a multi-axis robotic arm (not shown) and a door-opening gripper; the end effector of the multi-axis robotic arm is connected to the door-opening gripper.

[0057] The multi-axis robotic arm can flexibly manipulate the door-opening gripper to different positions, enabling the opening and closing of the equipment door 4 at various locations. With multiple degrees of freedom, the multi-axis robotic arm can perform complex movements in three-dimensional space, allowing the door-opening gripper to adapt to various work scenarios with different layouts. Through programmed control, the multi-axis robotic arm can precisely move the door-opening gripper to the target equipment door 4 and select the appropriate opening method based on the type and state of the door.

[0058] For example, for the door 4 of the developing and coating equipment, the multi-axis robotic arm can accurately engage the groove 20 of the door opening gripper with the edge of the gripping groove 42; for the door 4 of the laser direct writing equipment with a non-concealed door handle, the multi-axis robotic arm can accurately grip the door handle with the clamping cavity formed by the arc-shaped concave surface 24 of the door opening gripper. This collaborative robot design makes the opening and closing operation of the equipment door 4 more automated and intelligent, reduces human intervention, and improves the accuracy and efficiency of the work.

[0059] Furthermore, the collaborative robot also includes a workbench (not shown in the figure), on which a multi-axis robotic arm is mounted. The workbench is equipped with a gripper bracket with several placement stations, at least one of which is used to place a door-opening gripper. The multi-axis robotic arm and the door-opening gripper are detachably connected, meaning that different grippers (door-opening grippers, basket grippers, etc.) can be easily replaced for different tasks to meet diverse work needs. When a door-opening gripper is needed, the multi-axis robotic arm can pick it up from the gripper bracket and operate it; after completing the task, the multi-axis robotic arm can return the door-opening gripper to its placement station for future use. This design further enhances the flexibility and applicability of the collaborative robot, enabling it to efficiently complete various tasks in different work scenarios.

[0060] The above provides a detailed description of a door-opening gripper and collaborative robot provided in this application. For those skilled in the art, based on the ideas of the embodiments of this application, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A door opening gripper, comprising a driver (1) and two grippers (2), the driver (1) being connected to the two grippers (2) to drive the two grippers (2) to move closer to or further away from each other; Its features are, Each of the grippers (2) has a groove (20) on at least one side surface outside the clamping surface (21) at one end away from the driver (1).

2. The door opening gripper according to claim 1, characterized in that, The groove (20) is provided on an adjacent side (22) of the gripper (2) located away from the driver (1) and adjacent to the clamping surface (21).

3. The door opening gripper according to claim 1, characterized in that, The gripper (2) has grooves (20) on two adjacent sides (22) adjacent to the clamping surface (21) at one end away from the driver (1).

4. The door opening gripper according to claim 3, characterized in that, The grooves (20) on the two adjacent sides (22) are symmetrically arranged so that one end of the claw (2) is formed with an I-shaped end.

5. The door opening gripper according to claim 2, characterized in that, The gripper (2) has a groove (20) on its opposite side (23) opposite to the clamping surface (21) at one end away from the driver (1).

6. The door opening gripper according to claim 5, characterized in that, The groove (20) on the opposite side (23) is located on the side of the groove (20) on the adjacent side (22) that is close to the driver (1).

7. The door opening gripper according to claim 1, characterized in that, The clamping surface (21) is provided with an arc-shaped concave surface (24); The arcuate concave surface (24) between the two grippers (2) forms a clamping cavity.

8. The door opening gripper according to claim 1, characterized in that, It also includes quick-change discs (3); The quick-change disk (3) is installed on the drive (1).

9. A collaborative robot, characterized in that, Including a multi-axis robotic arm and a door-opening gripper as described in any one of claims 1 to 8; The end of the multi-axis robotic arm is connected to the door-opening gripper.

10. The collaborative robot according to claim 9, characterized in that, It also includes a workbench; The multi-axis robotic arm is mounted on the worktable; The workbench is equipped with a gripper bracket; The gripper bracket is provided with several placement stations, and at least one of the placement stations is used to place the door opening gripper. The multi-axis robotic arm is detachably connected to the door opening gripper.

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