Quartz tube inside and outside polishing equipment

Abstract

The utility model provides quartz tube inside and outside polishing equipment. The quartz tube inside and outside polishing equipment comprises a rack, an outer side polishing mechanism, a bearing mechanism, a three-axis moving mechanism, a cantilever and an inner side polishing mechanism. The outer side polishing mechanism comprises a mechanical arm and a first welding gun, and the first welding gun is movably arranged on the mechanical arm. A first moving module is arranged on the rack, and the bearing mechanism is movably arranged on the first moving module; the bearing mechanism comprises a bottom plate, a bearing seat, a rotating shaft and a roller. The three-axis moving mechanism is arranged on the rack and located at one end of the first moving module. The cantilever is arranged on the three-axis moving mechanism, and the length direction of the cantilever is parallel to the first direction. The inner side polishing mechanism is arranged at one end of the cantilever; the inner side polishing mechanism comprises a swing arm and a second welding gun, the swing arm is connected with the cantilever, and the second welding gun is arranged on the swing arm. Integrated and automatic design is adopted, all the mechanisms are cooperatively controlled in a high-precision mode, synchronous and automatic polishing of the inner surface and the outer surface of the quartz tube is achieved, and the polishing efficiency and quality are remarkably improved.

Description

A quartz tube internal and external polishing device Technical Field

[0001] This utility model relates to the technical field of quartz product processing equipment, and in particular to a quartz tube internal and external polishing equipment. Background Technology

[0002] Quartz tubes are widely used in semiconductor manufacturing, photovoltaics, optical fibers, special lighting, chemical engineering, and laboratory equipment due to their excellent high-temperature resistance, chemical stability, light transmittance, and electrical insulation. In these applications, the surface finish of the quartz tube's inner and outer surfaces is extremely important. Surface defects (such as scratches, pits, and deposits) can affect its optical performance, thermal stability, corrosion resistance, and performance in ultra-clean environments. Therefore, precision polishing of the inner and outer surfaces of quartz tubes is a crucial step in their manufacturing and post-processing.

[0003] Currently, quartz tube polishing primarily employs flame polishing technology, utilizing the high temperatures generated by oxyhydrogen or oxy-fuel flames to melt and flow the quartz surface, achieving smoothing and defect repair. However, traditional manual or semi-automatic polishing methods typically require polishing the outer surface first, followed by changing tooling or manual operation for inner surface polishing. This process separation leads to low efficiency and long production cycles. For slender quartz tubes, manual or simple equipment struggles to stably and precisely deliver the polishing flame deep into the tube and achieve uniform movement and rotational polishing, resulting in inconsistent and unreliable inner wall polishing quality. Furthermore, parameters such as polishing path, flame angle, distance, and residence time are difficult to control precisely, easily leading to uneven polishing, localized overheating, stress, or new deformations, affecting product yield and performance stability. With the increasing demands for quality and precision in high-end manufacturing and rising labor costs, there is an urgent need for equipment capable of simultaneously, efficiently, precisely, and automatically polishing the inner and outer surfaces of quartz tubes. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a quartz tube internal and external polishing device that achieves synchronous, automated, high-precision, and high-stability polishing of the internal and external surfaces of quartz tubes.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This utility model provides a quartz tube internal and external polishing device, which includes a frame, an outer polishing mechanism, a support mechanism, a three-axis moving mechanism, a cantilever, and an inner polishing mechanism.

[0007] The outer polishing mechanism is located on the side of the frame. The outer polishing mechanism includes a robotic arm and a first welding torch, which is movably mounted on the robotic arm.

[0008] The frame is provided with a first movable module along the first direction, and the supporting mechanism is movably disposed on the first movable module; the supporting mechanism includes a base plate, bearing seats, rotating shafts and rollers, the bearing seats are in two rows, the rotating shafts are in two columns, the two rotating shafts are rotatably disposed on the corresponding bearing seats, the central axis of each rotating shaft is parallel to the first direction, and multiple rollers are disposed on each rotating shaft.

[0009] The three-axis moving mechanism is mounted on the frame and located at one end of the first moving module.

[0010] The cantilever is movably mounted on the three-axis moving mechanism, and the length direction of the cantilever is parallel to the first direction.

[0011] The inner polishing mechanism is located at one end of the cantilever; the inner polishing mechanism includes a swing arm and a second welding gun, the swing arm is connected to the cantilever, and the second welding gun is located on the swing arm.

[0012] Preferably, the supporting mechanism further includes a drive assembly, which includes a drive motor, a synchronous belt, two synchronous pulleys and two connecting pulleys. The two connecting pulleys are coaxially connected to two rotating shafts, and the two synchronous pulleys correspond to the two connecting pulleys. The drive motor drives one of the synchronous pulleys. The synchronous belt is sleeved on the two synchronous pulleys and the two connecting pulleys.

[0013] Preferably, the drive assembly further includes two idler wheels located between two synchronizing wheels, with the synchronizing wheels bypassing the two idler wheels.

[0014] Preferably, a reference plate is provided at one end of the base plate near the three-axis moving mechanism.

[0015] Preferably, the quartz tube internal and external polishing equipment further includes a positioning mechanism, which is mounted on the frame and located at the end of the first moving module away from the three-axis moving mechanism; the positioning mechanism includes a second moving module and a positioning plate, the second moving module is arranged along a first direction, the positioning plate is movably mounted on the second moving module, and the positioning plate is provided with a positioning groove.

[0016] Preferably, the three-axis moving mechanism includes a third moving module, a column, a fourth moving module, a mounting plate, and a fifth moving module. The third moving module is disposed on the frame along a second direction, and the column is movably disposed on the third moving module. The fourth moving module is disposed on the column along a third direction, and the mounting plate is movably disposed on the fourth moving module. The fifth moving module is disposed on the mounting plate along a first direction, and the cantilever is movably disposed on the fifth moving module.

[0017] Preferably, the cantilever is connected to the swing arm via an adapter assembly; the adapter assembly includes an adapter plate, a swing motor, a transmission shaft, a first bevel gear, a swing arm shaft, and a second bevel gear. The adapter plate is fixed to the cantilever, the swing motor is disposed inside the cantilever, the transmission shaft and the first bevel gear are coaxially arranged in a first direction, and the swing motor drives the transmission shaft; the swing arm shaft is fixed to the cantilever in a third direction, and both ends of the swing arm shaft are rotatably connected to the adapter plate via bushings; the second bevel gear is coaxially disposed on the swing arm shaft, and the second bevel gear meshes with the first bevel gear.

[0018] Preferably, the oscillating motor is connected to the drive shaft via a diaphragm coupling.

[0019] Preferably, a water-cooling plate is provided at one end of the cantilever near the inner polishing mechanism; a water receiving tray is provided below the end of the cantilever near the inner polishing mechanism.

[0020] Preferably, the roller is made of graphite.

[0021] Compared with the prior art, the beneficial effects of this utility model are as follows: In the quartz tube internal and external polishing equipment of this utility model, the supporting mechanism effectively positions and supports the quartz tube, and the robotic arm drives the first welding torch to uniformly polish the outer surface of the quartz tube. At the same time, the three-axis moving mechanism drives the cantilever and the inner polishing mechanism to extend into the quartz tube, so that the second welding torch uniformly polishes the inner surface of the quartz tube. This equipment adopts an integrated and automated design, and the various mechanisms are controlled in a high-precision coordinated manner, realizing the synchronous automated polishing of the inner and outer surfaces of the quartz tube, which significantly improves the polishing efficiency and quality. Attached Figure Description

[0022] Figure 1 is a schematic diagram of the structure of a quartz tube internal and external polishing device according to the present invention.

[0023] Figure 2 is a schematic diagram of the outer polishing mechanism.

[0024] Figure 3 is a schematic diagram of the supporting mechanism.

[0025] Figure 4 is a schematic diagram of the drive component.

[0026] Figure 5 is a schematic diagram of the positioning mechanism.

[0027] Figure 6 is a schematic diagram of the three-axis moving mechanism, cantilever, and inner polishing mechanism.

[0028] Figure 7 is a schematic diagram of the three-axis moving mechanism.

[0029] Figure 8 is a schematic diagram of the inner polishing mechanism.

[0030] Figure 9 is a schematic diagram of the adapter assembly.

[0031] In the diagram, 10-frame, 11-first moving module, 20-outer polishing mechanism, 21-robotic arm, 22-first welding torch, 30-supporting mechanism, 31-base plate, 32-bearing seat, 33-rotating shaft, 34-roller, 35-drive assembly, 351-drive motor, 352-synchronous belt, 353-synchronous pulley, 354-connecting pulley, 355-idler pulley, 36-reference plate, 40-positioning mechanism, 41-second moving module, 42-positioning plate, 43-positioning groove, 50-... - Three-axis moving mechanism, 51- Third moving module, 52- Column, 53- Fourth moving module, 54- Mounting plate, 55- Fifth moving module, 60- Inner polishing mechanism, 61- Swing arm, 62- Second welding gun, 70- Cantilever, 71- Adapter assembly, 711- Adapter plate, 712- Swing motor, 713- Drive shaft, 714- First bevel gear, 715- Swing arm shaft, 716- Second bevel gear, 717- Diaphragm coupling, 72- Water cooling plate, 73- Water receiving tray. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the described embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. It is understood that, without conflict, some technical means of the various embodiments described herein can be substituted for or combined with each other.

[0033] In the description of this utility model, the terms "first," "second," etc., are used only to distinguish the described objects and have no sequential or technical meaning. Therefore, objects specified with "first," "second," etc., may explicitly or implicitly include one or more of those objects. Furthermore, the words "one" or "a" do not indicate a quantity limitation, but rather indicate the presence of at least one, while "multiple" indicates at least two.

[0034] In the description of this utility model, references to "one embodiment" or "some embodiments" mean that one or more embodiments of the utility model include the specific features, structures, or characteristics described in connection with that embodiment. Therefore, the phrases "one embodiment," "some embodiments," "other embodiments," "and other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized.

[0035] This utility model provides a quartz tube internal and external polishing device. Referring to Figure 1, the quartz tube internal and external polishing device includes a frame 10, an outer polishing mechanism 20, a support mechanism 30, a three-axis moving mechanism 50, a cantilever 70, and an inner polishing mechanism 60. It should be understood that the first direction X corresponds to the length direction of the frame 10, the second direction Y corresponds to the width direction of the frame 10, and the third direction Z corresponds to the vertical direction.

[0036] Specifically, a first movable module 11 is provided on the frame 10 along the first direction X, and a support mechanism 30 is movably mounted on the first movable module 11. Referring to Figure 3, the support mechanism 30 includes a base plate 31, bearing seats 32, rotating shafts 33, and rollers 34. There are two rows of bearing seats 32 and two rotating shafts 33. The two rotating shafts 33 are rotatably mounted on their respective bearing seats 32. The central axis of each rotating shaft 33 is parallel to the first direction X, and multiple rollers 34 are provided on each rotating shaft 33. The support assembly 30 can be used to support the quartz tube and allow the quartz tube to rotate. The first movable module 11 can drive the support assembly 30 and the quartz tube to move along the first direction X to achieve precise positioning and uniform polishing of the quartz tube.

[0037] The outer polishing mechanism 20 is located on the side of the frame 10. Referring to Figure 2, the outer polishing mechanism 20 includes a robotic arm 21 and a first welding torch 22, which is movably mounted on the robotic arm 21. The robotic arm 21 can be a multi-degree-of-freedom robotic arm as used in the prior art, which can drive the first welding torch 22 to polish the outer surface of the quartz tube.

[0038] Referring to Figures 1, 6 to 8, the three-axis moving mechanism 50 is mounted on the frame 10 and located at one end of the first moving module 11. A cantilever 70 is movably mounted on the three-axis moving mechanism 50, and the length direction of the cantilever 70 is parallel to the first direction X. An inner polishing mechanism 60 is located at one end of the cantilever 70. The inner polishing mechanism 60 includes a swing arm 61 and a second welding torch 62. The swing arm 61 is connected to the cantilever 70, and the second welding torch 62 is mounted on the swing arm 61. The three-axis moving mechanism 50 can drive the cantilever 70 to move along the first direction X, the second direction Y, and the third direction Z. The function of the cantilever 70 is to extend the inner polishing mechanism 60 into the interior of the quartz tube and to serve as a load-bearing and motion transmission component for the inner polishing mechanism 60. The second welding torch 62 can uniformly polish the inner surface of the quartz tube.

[0039] In the application, the quartz tube is placed on the support assembly 30, and multiple rollers 34 support the quartz tube and allow it to rotate. During the polishing process, the robotic arm 21 drives the first welding torch 22 to uniformly polish the outer surface of the quartz tube. At the same time, the three-axis moving mechanism 50 drives the cantilever 70 and the inner polishing mechanism 60 to extend into the quartz tube, so that the second welding torch 62 uniformly polishes the inner surface of the quartz tube. This equipment adopts an integrated and automated design, and the various mechanisms are controlled in a high-precision coordinated manner, realizing the synchronous automated polishing of the inner and outer surfaces of the quartz tube, which significantly improves the polishing efficiency and quality.

[0040] Referring to Figure 4, in some preferred embodiments, the supporting mechanism 30 further includes a drive assembly 35. The drive assembly 35 includes a drive motor 351, a synchronous belt 352, two synchronous pulleys 353, and two connecting pulleys 354. The two connecting pulleys 354 are coaxially connected to two rotating shafts 33, and the two synchronous pulleys 353 correspond to the two connecting pulleys 354. The drive motor 351 drives one of the synchronous pulleys 353. The synchronous belt 352 is fitted onto the two synchronous pulleys 353 and the two connecting pulleys 354.

[0041] During the internal and external polishing operations, the quartz tube is placed on the support assembly 30. The drive motor 351 can drive the corresponding synchronous wheel 353 to rotate. Then, the synchronous belt 352 drives another synchronous wheel 353, two connecting wheels 354 and two rotating shafts 33 to rotate. In turn, the two rows of rollers 34 drive the quartz tube to rotate at a constant speed around its axis, ensuring the uniformity and continuity of the polishing process.

[0042] Furthermore, the drive assembly 35 also includes two idler pulleys 355, which are located between two synchronous pulleys 353, and the synchronous belt 352 passes around the two idler pulleys 355. The function of the idler pulleys 355 is to tension the synchronous belt 352, prevent slippage, optimize the transmission path, improve transmission efficiency and reliability, and ensure the stability of the quartz tube's rotational motion.

[0043] Preferably, a reference plate 36 is provided at one end of the base plate 31 near the three-axis moving mechanism 50. The reference plate 36 can provide a reference for the axial positioning of the quartz tube, which facilitates precise control of the initial position of the quartz tube on the support mechanism 30 and improves processing accuracy and consistency.

[0044] Referring to Figures 1 and 5, the quartz tube internal and external polishing equipment also includes a positioning mechanism 40. The positioning mechanism 40 is mounted on the frame 10 and located at the end of the first moving module 11 away from the three-axis moving mechanism 50. Specifically, the positioning mechanism 40 includes a second moving module 41 and a positioning plate 42. The second moving module 41 is arranged along the first direction X, and the positioning plate 42 is movably mounted on the second moving module 41. The positioning plate 42 is provided with a positioning groove 43. In application, the quartz tube is first placed on the support assembly 30, and one end of the quartz tube is positioned using the reference plate 36. Then, the first moving module 11 drives the quartz tube to move towards the positioning assembly 40, and the tail tube at the other end of the quartz tube enters the positioning groove 43, thus positioning the other end of the quartz tube. This allows for precise control of the initial position of the quartz tube, ensuring that the quartz tube maintains a stable and accurate axial position during processing.

[0045] Referring to Figure 7, the three-axis moving mechanism 50 includes a third moving module 51, a column 52, a fourth moving module 53, a mounting plate 54, and a fifth moving module 55. The third moving module 51 is mounted on the frame 10 along a second direction, and the column 52 is movably mounted on the third moving module 51. The fourth moving module 53 is mounted on the column 52 along a third direction, and the mounting plate 54 is movably mounted on the fourth moving module 53. The fifth moving module 55 is mounted on the mounting plate 54 along a first direction, and the cantilever 70 is movably mounted on the fifth moving module 55. The three-axis moving module 50 is a high-precision motion platform with three degrees of freedom, enabling the cantilever 70 and its end-mounted inner polishing mechanism 60 to be precisely positioned and moved at any location in space, meeting the requirements for polishing the complex inner cavity of quartz tubes.

[0046] Referring to Figures 8 and 9, the cantilever 70 is connected to the swing arm 61 via a transition assembly 71. Specifically, the transition assembly 71 includes a transition plate 711, a swing motor 712, a transmission shaft 713, a first bevel gear 714, a swing arm shaft 715, and a second bevel gear 716. The transition plate 711 is fixed to the cantilever 70, the swing motor 712 is disposed inside the cantilever 70, the transmission shaft 713 and the first bevel gear 714 are coaxially arranged along a first direction, and the swing motor 712 drives the transmission shaft 713; the swing arm shaft 715 is fixed to the cantilever 70 along a third direction, and both ends of the swing arm shaft 715 are rotatably connected to the transition plate 711 through bushings; the second bevel gear 716 is coaxially disposed on the swing arm shaft 715, and the second bevel gear 716 meshes with the first bevel gear 714.

[0047] The rotational motion of the swing motor 712 is precisely transmitted to the transmission shaft 713 and the first bevel gear 714. The meshing structure of the two bevel gears can convert the horizontal rotation of the first bevel gear 714 into the vertical rotation of the second bevel gear 716, and then into the swing motion of the swing arm 61 around the axis of the cantilever 70 (i.e., rotation around the third direction Z axis), thereby driving the second welding torch 62 to adjust the working angle and achieve precise polishing of different areas of the inner wall of the quartz tube.

[0048] Preferably, the oscillating motor 712 is connected to the transmission shaft 713 via a diaphragm coupling 717, which can compensate for minor coaxiality errors between the motor shaft and the transmission shaft 713, reduce vibration and impact while transmitting torque, protect the motor and transmission components, and improve transmission accuracy and system life.

[0049] Referring to Figure 8, in some preferred embodiments, a water-cooling plate 72 is provided at one end of the cantilever 70 near the inner polishing mechanism 60. A water-receiving tray 73 is provided below the end of the cantilever 70 near the inner polishing mechanism 60. The water-cooling plate 72 can cool the end of the cantilever 70 and the inner polishing mechanism 60, preventing deformation or damage to components caused by the high temperature generated by the second welding torch 62 during prolonged operation. The water-receiving tray 73 can collect cooling water or wastewater generated during processing, keeping the working environment clean and preventing water stains from affecting equipment or the ground.

[0050] In some preferred embodiments, the roller 34 is made of graphite. Utilizing graphite's self-lubricating properties, high-temperature resistance, chemical stability, and low coefficient of friction, the risk of wear and scratches on the quartz tube during rotation is reduced, while material adhesion at high temperatures is avoided, ensuring the surface quality and smooth rotation of the quartz tube.

[0051] The operation process of the above-mentioned quartz tube internal and external polishing equipment is as follows: The quartz tube is placed on the support assembly 30, and one end of the quartz tube is positioned using the reference plate 36. Then, the first moving module 11 drives the quartz tube to move towards the positioning assembly 40, and the tail tube at the other end of the quartz tube enters the positioning groove 43, thus positioning the other end of the quartz tube. Afterwards, the first moving module 11 drives the quartz tube to move along the first direction X to the polishing station. During the polishing process, the drive assembly 35 drives the quartz tube to rotate, and the robotic arm 21 drives the first welding torch 22 to uniformly polish the outer surface of the quartz tube. Simultaneously, the three-axis moving mechanism 50 drives the cantilever 70 and the inner polishing mechanism 60 to extend into the interior of the quartz tube, allowing the second welding torch 62 to uniformly polish the inner surface of the quartz tube.

[0052] In this utility model of quartz tube internal and external polishing equipment, a support mechanism is used to effectively position and support the quartz tube. A robotic arm drives the first welding torch to uniformly polish the outer surface of the quartz tube. At the same time, a three-axis moving mechanism drives the cantilever and the inner polishing mechanism to extend into the quartz tube, so that the second welding torch can uniformly polish the inner surface of the quartz tube. This equipment adopts an integrated and automated design, and the various mechanisms are controlled in a high-precision coordinated manner, realizing synchronous automated polishing of the inner and outer surfaces of the quartz tube, which significantly improves polishing efficiency and quality.

[0053] This utility model has been described by the above-described embodiments; however, these embodiments are merely examples for implementing this utility model. It must be noted that the disclosed embodiments do not limit the scope of this utility model. Conversely, any modifications and refinements made without departing from the spirit and scope of this utility model are within the scope of patent protection of this utility model.

Claims

1. A quartz tube internal and external polishing device, characterized in that: The quartz tube internal and external polishing equipment includes a frame, an outer polishing mechanism, a support mechanism, a three-axis moving mechanism, a cantilever, and an inner polishing mechanism. The outer polishing mechanism is located on the side of the frame and includes a robotic arm and a first welding torch, the first welding torch being movably mounted on the robotic arm. A first moving module is provided on the frame along a first direction, and the support mechanism is movably mounted on the first moving module. The support mechanism includes a base plate, bearing seats, rotating shafts, and rollers. The bearing seats have two rows, and the rotating shafts have two shafts. Two rotating shafts are rotatably mounted on corresponding bearing seats, with the central axis of each shaft parallel to the first direction, and multiple rollers mounted on each shaft; the three-axis moving mechanism is mounted on the frame and located at one end of the first moving module; the cantilever is movably mounted on the three-axis moving mechanism, and the length direction of the cantilever is parallel to the first direction; the inner polishing mechanism is located at one end of the cantilever; the inner polishing mechanism includes a swing arm and a second welding torch, the swing arm is connected to the cantilever, and the second welding torch is mounted on the swing arm.

2. The quartz tube internal and external polishing equipment as described in claim 1, characterized in that: The supporting mechanism also includes a drive assembly, which includes a drive motor, a synchronous belt, two synchronous pulleys and two connecting pulleys. The two connecting pulleys are coaxially connected to two rotating shafts, and the two synchronous pulleys correspond to the two connecting pulleys. The drive motor drives one of the synchronous pulleys. The synchronous belt is sleeved on the two synchronous pulleys and the two connecting pulleys.

3. The quartz tube internal and external polishing equipment as described in claim 2, characterized in that: The drive assembly also includes two idler wheels located between two synchronous wheels, with the synchronous wheels bypassing the two idler wheels.

4. The quartz tube internal and external polishing equipment as described in claim 1, characterized in that: A reference plate is provided at one end of the base plate near the three-axis moving mechanism.

5. The quartz tube internal and external polishing equipment as described in claim 1, characterized in that: The quartz tube internal and external polishing equipment also includes a positioning mechanism, which is mounted on the frame and located at the end of the first moving module away from the three-axis moving mechanism. The positioning mechanism includes a second moving module and a positioning plate. The second moving module is arranged along a first direction, and the positioning plate is movably mounted on the second moving module. The positioning plate is provided with a positioning groove.

6. The quartz tube internal and external polishing equipment as described in claim 1, characterized in that: The three-axis moving mechanism includes a third moving module, a column, a fourth moving module, a mounting plate, and a fifth moving module. The third moving module is mounted on the frame along a second direction, and the column is movably mounted on the third moving module. The fourth moving module is mounted on the column along a third direction, and the mounting plate is movably mounted on the fourth moving module. The fifth moving module is mounted on the mounting plate along a first direction, and the cantilever is movably mounted on the fifth moving module.

7. The quartz tube internal and external polishing equipment as described in claim 1, characterized in that: The cantilever is connected to the swing arm via a transition assembly; the transition assembly includes a transition plate, a swing motor, a transmission shaft, a first bevel gear, a swing arm shaft, and a second bevel gear. The transition plate is fixed to the cantilever, the swing motor is located inside the cantilever, the transmission shaft and the first bevel gear are coaxially arranged in a first direction, and the swing motor drives the transmission shaft; the swing arm shaft is fixed to the cantilever in a third direction, and both ends of the swing arm shaft are rotatably connected to the transition plate via bushings; the second bevel gear is coaxially arranged on the swing arm shaft, and the second bevel gear meshes with the first bevel gear.

8. The quartz tube internal and external polishing equipment as described in claim 7, characterized in that: The oscillating motor is connected to the drive shaft via a diaphragm coupling.

9. The quartz tube internal and external polishing equipment as described in claim 1, characterized in that: A water-cooling plate is provided at one end of the cantilever near the inner polishing mechanism; a water receiving tray is provided below the end of the cantilever near the inner polishing mechanism.

10. The quartz tube internal and external polishing equipment as described in claim 1, characterized in that: The roller is made of graphite.

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