A semiconductor process furnace

Abstract

This utility model discloses a semiconductor process furnace, including a cylindrical furnace body. Multiple electrode holders for connecting heaters are provided at the first end of the furnace body, and a spiral cooling channel is provided at the first end of the furnace body, with the electrode holders arranged along the spiral cooling channel. The top cover of this utility model adopts a spiral cooling channel, which, combined with the electrode holder positions, results in a compact layout and uniform cooling. The flange area at the second end is provided with an arc-shaped channel and a meandering channel, resulting in a long flow path, reasonable flow velocity control, and sufficient heat exchange. Multiple arc-shaped cooling channels on the sidewalls of the furnace body are connected through axial series and circumferentially staggered guide ports, forcing the coolant to flow along a set path and preventing local short circuits. This effectively solves the problems of uneven temperature and hot spot accumulation in long-temperature process equipment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing process equipment technology, and in particular to a semiconductor process furnace. Background Technology

[0002] With the widespread application of third-generation semiconductor materials (such as silicon carbide (SiC) and gallium nitride (GaN), the related manufacturing processes and equipment have also placed higher demands on high-temperature processing performance. In particular, the activation annealing of SiC materials after ion implantation usually needs to be carried out in an ultra-high temperature environment above 2000℃, which poses a severe challenge to both the heating system and the thermal control system.

[0003] To achieve high-temperature processing, the equipment typically employs resistance heating or induction heaters, connected to heating elements inside the furnace via multiple electrode holders, and externally insulated with materials such as carbon felt to reduce heat loss. However, even with insulation measures, a significant amount of heat is still transferred to the furnace body via radiation and conduction, especially in the electrode areas directly connected to the heaters, which, while bearing the current, also become key areas of heat concentration.

[0004] Therefore, optimizing the heat dissipation structure at the furnace end without affecting electrode wiring and heating efficiency, and achieving efficient cooling around the electrode holder, is a key technical problem that urgently needs to be solved in this field. Utility Model Content

[0005] This invention aims to solve the problems of uneven cooling coverage, overheating of electrode areas, and complex structural layout in existing high-temperature semiconductor process equipment, and provides a semiconductor process furnace.

[0006] The technical solution adopted in this utility model is to design a semiconductor process furnace, including a cylindrical furnace body, a plurality of electrode holders for connecting heaters are provided on the first end of the furnace body, and a spiral heat dissipation channel is provided on the first end of the furnace body, with the electrode holders arranged along the spiral heat dissipation channel.

[0007] In some embodiments, the first end of the spiral of the spiral cooling channel is provided with a water inlet, which is connected to a water inlet connector through a water inlet channel provided on the first end.

[0008] In some embodiments, the tail end of the spiral of the spiral cooling channel is connected to a water outlet connector.

[0009] In some embodiments, the first end includes a furnace top cover, and the spiral heat dissipation channel is disposed on the top cover, the depth of the spiral heat dissipation channel gradually decreasing from the first end to the last end.

[0010] In some embodiments, the top cover includes a top cover base and a cover plate, the spiral heat dissipation channel is formed in a spiral groove on the top cover base, and the cover plate seals over the spiral groove.

[0011] In some embodiments, the top cover base is provided with a water inlet channel that connects the water inlet and the water inlet connector.

[0012] In some embodiments, several annular heat dissipation channels are arranged along the axis of the furnace body on the side wall between the two ends of the furnace body. Adjacent annular heat dissipation channels are connected by guide ports. Adjacent guide ports are staggered in the circumferential direction. The bottom of the furnace body is provided with an inlet that connects to the annular heat dissipation channels, and the upper part of the furnace body is provided with an outlet that connects to the annular heat dissipation channels.

[0013] In some embodiments, the furnace body sidewall is provided with several mounting bases and cooling water pipes for installing furnace temperature control or temperature measuring elements. The mounting bases have interlayer water channels, and the cooling water pipes are connected to the interlayer water channels on the mounting bases. The two ends of the cooling water pipes are respectively connected to a water supply port and a water inlet.

[0014] In some embodiments, an end flange is provided on the second end of the furnace body opposite to the first end. An arc-shaped water channel is provided in the middle of the end flange. A meandering heat dissipation water channel is concentrically wound between the arc-shaped water channel and the edge of the end flange. One end of the arc-shaped water channel is connected to the water inlet connector, and the other end is connected to the water outlet connector of the meandering heat dissipation water channel. The inner end of the meandering heat dissipation water channel is connected to the water inlet connector in the radial direction, and the outer end of the meandering heat dissipation water channel is connected to the water outlet connector.

[0015] In some embodiments, both the arc-shaped waterway and the meandering heat dissipation waterway are grooves formed on the end flange. The groove of the meandering heat dissipation waterway is covered by a sealing plate. The arc-shaped waterway is arranged on an annular waterway wall, and the waterway wall is higher than the sealing plate. The inlet connector and the outlet connector are connected side by side on the waterway wall between the two ends of the arc-shaped waterway. The inlet connector and the outlet connector communicate with the inlet port of the arc-shaped waterway and the outlet port of the meandering heat dissipation waterway through through holes formed on the waterway wall.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] This invention features a rationally designed cooling water channel system at the first and second ends of the furnace body, as well as on the side walls, forming a multi-stage cooling system that is independent yet interconnected. This system can handle the strong heat flow generated during the processing of semiconductor materials such as SiC at ultra-high temperatures (>2000℃), effectively preventing overheating and localized heat accumulation. The top cover at the first end employs a spiral cooling water channel, which, combined with the electrode seat location, creates a compact layout and ensures uniform cooling. The flange area at the second end features arc-shaped and meandering water channels, with long flow paths and reasonable flow velocity control for thorough heat exchange. All water channel designs adhere to the principles of continuous flow, extended paths, and reasonable directions, maximizing heat exchange efficiency. All cooling water channels utilize a structure where grooves are directly cut into the furnace body or flange surface and then sealed with end plates, suitable for CNC machining and modular production. Multiple arc-shaped cooling water channels on the side walls of the furnace body are connected axially in series and circumferentially staggered guide ports, forcing the coolant to flow along a set path and preventing localized short circuits. This effectively solves the problems of uneven temperature and hot spot accumulation in long-temperature process equipment. A jacketed water cooling structure is installed inside the temperature sensing element mounting base, and water is supplied in series through cooling water pipes; this prevents the sensor from becoming inaccurate or burning out at high temperatures, extends its service life, and improves the reliability and accuracy of temperature control in the process. Attached Figure Description

[0018] The present invention will now be described in detail with reference to specific embodiments and accompanying drawings. To illustrate the details and facilitate understanding of its principles, the drawings are not necessarily to scale, and similar reference numerals may describe similar components in different views. The accompanying drawings generally illustrate the embodiments discussed herein by way of example and not limitation. Wherein:

[0019] Figure 1 This is a three-dimensional schematic diagram of the process furnace.

[0020] Figure 2 This is an exploded view of the process furnace.

[0021] Figure 3 This is an exploded view of the furnace top cover.

[0022] Figure 4 This is a schematic diagram of the spiral groove on the top cover of the furnace body.

[0023] Figure 5 yes Figure 4 A schematic diagram of the AA section.

[0024] Figure 6 This is a perspective view of the furnace top cover.

[0025] Figure 7 This is a schematic diagram of the process furnace in an upright position.

[0026] Figure 8 It is a schematic diagram showing the annular heat dissipation water channel inside the side wall of the furnace.

[0027] Figure 9 This is a schematic diagram of the mounting bracket.

[0028] Figure 10 This is a cross-sectional view of the mounting base.

[0029] Figure 11 This is a schematic diagram of the end flange.

[0030] Figure 12 This is an exploded view of the end flange.

[0031] In the diagram, 1. Electrode holder; 2. Spiral cooling water channel; 3. Water inlet; 4. First water inlet connector; 5. First water outlet connector; 6. Furnace top cover; 61. Top cover base; 611. Water inlet channel; 62. Cover plate; 7. First seal; 8. Annular cooling water channel; 81. Flow guide; 82. Water inlet; 83. Water outlet; 9. Cooling water pipe; 91. Water supply port; 10. End flange; 101. Arc-shaped water channel; 1011. 1012. Water inlet port; 1021. Water outlet of the arc-shaped water channel; 1022. Water outlet port; 103. Detour heat dissipation water channel; 104. Radial return groove; 105. Water channel wall; 106. Connecting groove; 11. Second water inlet connector; 12. Second water outlet connector; 13. Sealing plate; 14. First through hole; 15. Second through hole; 16. Second seal; 161. Interlayer water channel; 17. Mounting base; 18. Furnace body; 19. Second sealing plate. Detailed Implementation

[0032] The following are specific embodiments of this utility model, and the technical solution of this utility model will be further described with reference to the accompanying drawings. However, this utility model is not limited to these embodiments, and the following embodiments do not limit the utility model involved in the claims. In addition, all combinations of features described in the embodiments are not necessarily necessary for the solution of the utility model.

[0033] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0034] Example

[0035] like Figures 1 to 6 As shown, a semiconductor process furnace includes a cylindrical furnace body 18. A plurality of electrode holders 1 for connecting heaters are disposed at the first end of the furnace body 18. A spiral heat dissipation channel 2 is provided at the first end of the furnace body 18, and the electrode holders 1 are arranged along the spiral heat dissipation channel 2. In this embodiment, the first end of the furnace body 18 is a furnace body top cover 6, and the second end opposite to the first end is an end flange 10.

[0036] Specifically, a spiral-shaped water-cooling channel is provided at the first end of the furnace body 18, allowing cooling water to flow along a spiral path in this area. Compared to straight or reversible channels, the spiral path has a larger contact area and a longer heat exchange path, which is beneficial to improving heat exchange efficiency. The spiral path slowly advances along the axial or tangential direction of the furnace body 18, effectively covering the entire high-temperature end face and achieving more comprehensive cooling coverage. The electrode holder 1 is used to connect the heater and is a key location for electrical power input. During operation, it will accumulate a large amount of heat due to contact resistance, thermal conductivity, and other reasons. Arranging the electrode holders 1 along the spiral water channel means that each electrode holder 1 is close to the cooling water flow area, enabling point-to-point heat exchange. Since the spiral structure itself has the distribution advantage of "continuous near-water flow," that is, the water channel is geometrically close to each component distributed on it, it can ensure that the local temperature rise of each electrode holder 1 is uniformly controlled. The cylindrical furnace body 18, combined with the spiral flow channel and the electrode arrangement along the path, can physically achieve axisymmetric or spiral symmetrical heat distribution; this helps to reduce local deformation and expansion deviation caused by uneven thermal stress in the furnace body 18, and enhances the overall stability of the structure.

[0037] Electrode holder 1 is directly adjacent to the water channel, effectively carrying away localized heat buildup during the conduction process and reducing the risk of overheating. The stable temperature around electrode holder 1 helps improve the lifespan of the electrical connection structure and avoids contact component loosening, oxidation, or breakdown due to high temperatures. It effectively suppresses high heat buildup at the ends, maintaining the symmetry and controllability of the temperature field distribution inside the furnace cavity, making it suitable for SiC processes with extremely high temperature distribution requirements.

[0038] The spiral cooling channel 2 has an inlet 3 at the beginning of its spiral. The inlet 3 is connected to the first inlet connector 4 via an inlet channel 611 located at the first end. This design places the inlet 3 at the starting point of the spiral cooling channel 2 (i.e., the beginning of the spiral), allowing the coolant to flow along the entire spiral channel path from that point. The spiral channel naturally has a long flow path and continuous heat exchange surface. The coolant flows sequentially through all spiral sections from the starting point, which facilitates heat removal layer by layer, resulting in a stable and uniform cooling process. The inlet 3 is connected to the externally located first inlet connector 4 via the inlet channel 611, forming a passage for water supply from the external cooling system to the spiral channel inside the furnace body 18. The inlet channel 611 can be drilled, milled, or has a built-in cooling hole, depending on the end structure of the furnace body 18. It is typically arranged radially or axially to ensure smooth delivery of coolant to the beginning of the channel. This structure allows the coolant to continuously propagate along a spiral path from the center or one end to the other, maximizing coverage of the area where electrode holder 1 is located and forming a spiral heat exchange zone. As the coolant flows along the path, it absorbs heat, and the temperature at the outlet gradually rises, forming an ordered heat exchange process controlled by a thermal gradient, thus avoiding cooling failure caused by local dead zones or turbulence.

[0039] The spiral end of the spiral cooling channel 2 is connected to the first water outlet connector 5. An outlet 83 is located at the end of the spiral cooling channel 2 (i.e., the tail end of the spiral), and is connected to the first water outlet connector 5 located at the first end of the furnace body 18 via a channel, forming a complete closed flow path for the coolant. The coolant enters from the inlet 3 at the beginning of the spiral, spirals upwards or rotates along the channel, and finally exits from the tail end, completing one complete heat exchange cycle. A clearly defined outlet helps stabilize the flow resistance within the system, creating a stable pressure difference with the inlet flow rate, ensuring continuous flow of the coolant within the spiral channel and preventing stagnation. By designing a reasonable outlet channel diameter and discharge direction, problems such as liquid retention, bubble accumulation, and localized temperature anomalies can also be reduced. The first water outlet connector 5 can be connected to the return water pipe of an external cooling system, constructing a water inlet-spiral channel-outlet circulation path. It can be used in conjunction with industrial water cooling devices, such as constant temperature circulating water tanks or chillers. Depending on the relative position of the connectors, different installation methods such as axial, radial, or side outlets can be achieved to adapt to the equipment's spatial layout.

[0040] The first end includes a furnace body 18 top cover 6, on which the spiral heat dissipation channel 2 is disposed. The depth of the spiral heat dissipation channel 2 gradually decreases from the first end to the last end. By placing the spiral heat dissipation channel 2 on the top cover at the first end of the furnace body 18, making it part of the top cover structure, it serves the dual function of both covering and sealing the furnace body 18 and achieving heat dissipation. This design, by directly machining or casting the spiral flow channel groove on the top cover, improves structural compactness and facilitates unified overall thermal control design. The channel depth gradually decreases from the first end to the last end, meaning the cross-section of the flow channel gradually decreases from the inlet to the outlet. Based on the fluid continuity equation (mass conservation) and the heat exchange control principle, this design allows control of the cooling water flow rate in different sections: the front section of the channel is deep with a relatively slow flow rate, facilitating sufficient heat exchange in high-heat areas; the rear section is shallow with a narrower channel, creating a certain back pressure, increasing the flow rate, which is beneficial for the rapid removal of heat at the end and preventing heat accumulation at the tail. Overall, it achieves a "slow at the front, fast at the back" cooling flow rate gradient control, optimizing cooling efficiency along the flow path. If the top cover water channel is set in a slightly inclined direction (especially the tail end is lower than the head end), gravity can be used to assist the water flow to discharge, reducing the risk of water retention at the tail end; at the same time, it is conducive to the smooth flow out of condensate or impurity deposits, extending the system's operating life.

[0041] The top cover includes a top cover base 61 and a cover plate 62. The spiral cooling channel 2 is formed in a spiral groove on the top cover base 61, and the cover plate 62 seals and covers the spiral groove. The spiral cooling channel 2 is designed as a slotted structure, that is, a spiral groove with a specific shape is machined into the surface of the top cover base 61, and its cross-section can be rectangular, semi-circular, or trapezoidal. This structure is easy to realize by CNC milling, mill-turning, or casting, and is simple to manufacture and has high machining accuracy. By covering the opening surface of the spiral groove of the top cover base 61 with a flat cover plate 62 and fixing it by bolts, welding, flaring, pressing, or sealing, a closed channel is formed. After the cover plate 62 closes the spiral groove, it forms a complete cooling channel with good sealing performance and mechanical stability. The top cover is a split structure consisting of a base and a cover plate 62, which facilitates the inspection, cleaning, and maintenance of the cooling channel. If there is internal blockage or corrosion, maintenance can be carried out simply by removing the cover plate 62, which is far superior to the non-disassembly of a one-piece cast channel structure.

[0042] The top cover base 61 is provided with a water inlet channel 611 that connects the water inlet 3 and the first water inlet connector 4.

[0043] A water inlet channel 611 is directly machined into the top cover base 61. The two ends of this channel are connected to the first end (i.e., water inlet 3) of the spiral cooling water channel 2 and the first water inlet connector 4 located on the outer surface of the top cover, respectively. This forms a complete water supply path from the external cooling system, through the first water inlet connector 4, the water inlet channel 611, and the first end of the water channel. Compared to external piping or welded branch pipes, the channel is built into the top cover base 61, making it more compact and reducing the number of parts. This design can be achieved through mechanical drilling, milling and sealing, or sandwich casting. The channel cross-section can be circular, rectangular, or irregularly shaped according to pressure and flow requirements. The position, length, and orientation of the water inlet channel 611 can be flexibly designed according to the equipment layout, accommodating water inlet connections in different directions (such as radial / axial / lateral).

[0044] The water inlet channel 611 is a groove formed on the inner side of the top cover. The first sealing strip 7 covering the groove is welded onto the groove to form the water inlet channel 611.

[0045] like Figures 7 to 10 As shown, several annular heat dissipation channels 8 are arranged along the axis of the furnace body 18 on the side wall between the two ends. Adjacent annular heat dissipation channels 8 are connected by guide ports 81. Adjacent guide ports 81 are staggered in the circumferential direction. The bottom of the furnace body 18 is provided with a water inlet 82 that connects to the annular heat dissipation channels 8, and the upper part of the furnace body 18 is provided with a water outlet 83 that connects to the annular heat dissipation channels 8.

[0046] Multiple annular heat dissipation channels 8 are arranged sequentially along the axial direction on the side wall area of ​​the furnace body 18 (i.e., the circumferential side of the cylinder). Each annular heat dissipation channel 8 covers a certain angle on the circumference, forming local coverage. The multiple annular heat dissipation channels 8 together form a cooling chain along the height of the furnace body 18, which can cover the heat-generating areas at different elevations layer by layer. The channels are connected by guide ports 81, which are pre-set fluid channels that allow coolant to flow from the next level channel to the previous level channel. This structure is equivalent to connecting multiple annular cooling sections in series into a spiral or stepped continuous water path, which is beneficial for controlling the flow rate and direction. Adjacent guide ports 81 are staggered in the circumferential direction, that is, each guide port 81 is arranged alternately along the circumference. This design can avoid the coolant forming a "straight path" in the vertical direction, which would cause the intermediate cooling section to be skipped. The staggered arrangement forces the coolant to cover the entire inner side of the furnace wall along a spiral path, thereby increasing the flow channel length and heat exchange area. The inlet 82 is located at the bottom of the furnace body 18 and the outlet 83 is located at the top, forming a cooling path from bottom to top. The coolant enters from the bottom and flows upward through the layers of annular heat dissipation channels 8, carrying away the heat conducted from the high-temperature heating zone inside the furnace to the furnace wall. The upward flow path follows the natural convection and the upward trend of heat, improving cooling efficiency.

[0047] The furnace body 18 has several mounting bases 17 and cooling water pipes 9 on its side wall for installing internal temperature control or temperature measuring elements. Each mounting base 17 has a double-layered water channel 161, and the cooling water pipes 9 connect to the double-layered water channel 161 on the mounting base 17. Both ends of the cooling water pipes 9 are connected to a water supply port 91 and a water inlet 82, respectively. The water supply port 91 is used to connect to an external water supply pipeline, and the water inlet 82 is used to connect to the water inlet 82 of the annular heat dissipation channel 8.

[0048] Multiple mounting bases 17 are pre-set on the side wall of the furnace body 18 for fixing and installing temperature control elements (such as thermocouples, infrared sensors, thermistors, etc.). The mounting bases 17 are directly connected to the metal or graphite wall of the furnace body 18. Under high temperature environment, long-term operation will cause the sensor to heat up and become distorted or damaged.

[0049] Each mounting base 17 integrates a sandwich water channel 161 to form an independent water-cooling structure. The water channel can be designed to be ring-shaped around the temperature control element to achieve localized cooling of the element's positioning area.

[0050] The interlayer water channel 161 of each mounting base 17 is connected to the external water supply system through the cooling water pipe 9; one end of the cooling water pipe 9 is connected to the water supply port 91 (connected to the main water supply pipe of the cooling system), and the other end is connected to the water inlet 82; the cooling water pipes 9 of all mounting bases 17 are connected in series to a main cooling water pipe 9, thus forming a unified and continuous cooling water path.

[0051] like Figures 11 to 12As shown, an end flange 10 is provided on the second end of the furnace body 18 opposite to the first end. An arc-shaped water channel 101 is provided in the middle of the end flange 10. A meandering heat dissipation water channel 102 is concentrically wound between the arc-shaped water channel 101 and the edge of the end flange 10. One end of the arc-shaped water channel 101 is connected to the second water inlet connector 11, and the other end is connected to the second water outlet connector 12 of the meandering heat dissipation water channel 102. In the radial direction, the inner end of the meandering heat dissipation water channel 102 is connected to the second water inlet connector 11, and the outer end of the meandering heat dissipation water channel 102 is connected to the second water outlet connector 12.

[0052] A structurally stable and well-sealed end flange 10 is provided at the second end of the furnace body 18 (usually the bottom or the discharge end). This flange not only seals and secures the furnace body 18 but also integrates a cooling function. An arc-shaped water channel 101 (which can be a partial arc, annular segment, or other structure) is provided in the central area of ​​the flange to cover the central part of the flange closest to the high-temperature zone. This arc-shaped water channel 101 preferentially absorbs or intercepts radiative heat conduction from inside the furnace cavity, providing primary cooling in the central area. Between the arc-shaped water channel 101 and the outer edge of the flange, a concentric, meandering heat dissipation water channel 102 is arranged, forming an S-shaped flow path. This structure allows the coolant to flow from the center of the flange to the edge along the S-shaped path, increasing the path length and residence time of the water flow and enhancing heat exchange capacity. One end of the arc-shaped water channel 101 is connected to the second water inlet connector 11, through which coolant is introduced from the external cooling system; the other end of the arc-shaped water channel 101 is connected to the inner port of the meandering heat dissipation water channel 102, through which coolant transitions from the center into the meandering heat dissipation water channel 102; the meandering heat dissipation water channel 102 flows radially from the inside to the outside in circles, and finally discharges from its outermost port through the second water outlet connector 12, thus realizing a complete cooling circuit.

[0053] Both the arc-shaped water channel 101 and the meandering heat dissipation water channel 102 are grooves formed on the end flange 10. The groove of the meandering heat dissipation water channel 102 is covered by a first sealing plate 13, and the groove of the arc-shaped water channel 101 is covered by a second sealing plate 13. The arc-shaped water channel 101 is arranged on an annular water channel wall 104, which is higher than the sealing plate 13. The second water inlet connector 11 and the second water outlet connector 12 are connected side by side on the water channel wall 104 between the two ends of the arc-shaped water channel 101. The second water inlet connector 11 and the second water outlet connector 12 communicate with the water inlet port 1011 of the arc-shaped water channel 101 and the water outlet port 1021 of the meandering heat dissipation water channel 102 through through holes formed on the water channel wall 104.

[0054] Both the arc-shaped water channel 101 and the meandering heat dissipation water channel 102 are groove structures directly machined on the end flange 10 body. The depth and width of the grooves match the flow channel design parameters. This design facilitates CNC milling, wire cutting, or casting, resulting in high machining accuracy, good cleanliness, and a large thermal contact area. The meandering heat dissipation water channel 102 is a slotted structure, with a flat sealing plate 13 covering its surface to achieve sealing, forming a closed water channel. The sealing plate 13 can be assembled by screw fixing, welding, or sealant bonding to ensure reliable structural sealing under high temperature and water pressure. The arc-shaped water channel 101 is embedded in a ring-shaped protrusion structure (water channel wall 104) around the end flange 10. This water channel wall 104 is higher than the plane of the sealing plate 13 of the meandering heat dissipation water channel 102. The water channel wall 104 not only serves as a positioning and separation function but also facilitates the installation of through holes for the second water inlet / outlet connector 12.

[0055] The through holes include two, namely a first through hole 14 and a second through hole 15. One end of the first through hole is connected to the second water inlet connector 11, and the other end is connected to the water inlet port 1011 of the arc-shaped water channel 101; one end of the second through hole is connected to the second water outlet connector 12, and the other end is connected to the water outlet port 1021 of the meandering heat dissipation water channel 102. Since the water outlet port 1021 of the meandering heat dissipation water channel 102 is located on the outer side of the flange radially, while the second through hole 15 is located on the water channel wall 104 on the inner side of the meandering heat dissipation water channel 102, a radial return groove 103 is provided on the flange to connect the port of the second through hole 15 and the water outlet port 1021 of the meandering heat dissipation water channel 102. The water outlet end of the arc-shaped water channel 101 is connected to the water inlet end of the meandering heat dissipation water channel 102 through a connecting groove 105 provided on the inner side of the flange body. The groove and the connecting groove 105 can be sealed with a second seal 16 to form a water flow channel. The specific embodiments described herein are merely illustrative examples illustrating the spirit of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, without departing from the spirit of this utility model or exceeding the scope defined by the appended claims.

Claims

1. A semiconductor process furnace, comprising a cylindrical furnace body, wherein a plurality of electrode holders for connecting heaters are disposed at a first end of the furnace body, characterized in that, A spiral heat dissipation channel is provided at the first end of the furnace body, and the electrode holders are arranged along the spiral heat dissipation channel.

2. The semiconductor process furnace according to claim 1, characterized in that, The spiral cooling water channel has a water inlet at the beginning of the spiral line, and the water inlet is connected to the water inlet connector through a water inlet channel provided on the first end.

3. The semiconductor process furnace according to claim 2, characterized in that, The end of the spiral of the spiral cooling channel is connected to the water outlet connector.

4. The semiconductor process furnace according to claim 3, characterized in that, The first end includes a furnace top cover, and the spiral heat dissipation channel is disposed on the top cover, the depth of the spiral heat dissipation channel gradually decreasing from the first end to the last end.

5. The semiconductor process furnace according to claim 4, characterized in that, The top cover includes a top cover base and a cover plate. The spiral heat dissipation channel is formed in a spiral groove on the top cover base, and the cover plate seals and covers the spiral groove.

6. The semiconductor process furnace according to claim 5, characterized in that, The top cover base is provided with a water inlet channel that connects the water inlet and the water inlet connector.

7. The semiconductor process furnace according to claim 1, characterized in that, Several annular heat dissipation channels are arranged along the axis of the furnace body on the side wall between the two ends of the furnace body. Adjacent annular heat dissipation channels are connected by flow guides. Adjacent flow guides are staggered in the circumferential direction. A water inlet connected to the annular heat dissipation channels is provided at the bottom of the furnace body, and a water outlet connected to the annular heat dissipation channels is provided at the top of the furnace body.

8. The semiconductor process furnace according to claim 7, characterized in that, The furnace body sidewall is provided with several mounting bases and cooling water pipes for installing furnace temperature control or temperature measuring elements. The mounting base has a double-layer water channel, and the cooling water pipe is connected to the double-layer water channel on the mounting base. The two ends of the cooling water pipe are respectively connected to the water supply port and the water inlet.

9. The semiconductor process furnace according to claim 1, characterized in that... An end flange is provided on the second end of the furnace body opposite to the first end. An arc-shaped water channel is provided in the middle of the end flange. A meandering heat dissipation water channel is concentrically wound between the arc-shaped water channel and the edge of the end flange. One end of the arc-shaped water channel is connected to the water inlet connector, and the other end is connected to the water outlet connector of the meandering heat dissipation water channel. The inner end of the meandering heat dissipation water channel is connected to the water inlet connector in the radial direction, and the outer end of the meandering heat dissipation water channel is connected to the water outlet connector.

10. The semiconductor process furnace according to claim 9, characterized in that, Both the arc-shaped water channel and the meandering heat dissipation water channel are grooves formed on the end flange. The groove of the meandering heat dissipation water channel is covered by a sealing plate. The arc-shaped water channel is set on the annular water channel wall, and the water channel wall is higher than the sealing plate. The inlet connector and the outlet connector are connected side by side on the water channel wall between the two ends of the arc-shaped water channel. The inlet connector and the outlet connector are connected to the inlet port of the arc-shaped water channel and the outlet port of the meandering heat dissipation water channel through through holes formed on the water channel wall.

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