Heat treatment apparatus

Abstract

A thermal processing apparatus including a chamber, an injection nozzle array, and a discharge nozzle array is disclosed. The chamber includes an injection surface and a discharge surface, and the chamber provides a containment space to contain a thermal processing object. The injection nozzle array is connected to the containment space through the injection surface, and the injection nozzle array includes a plurality of injection nozzles arranged along a row direction and a column direction. The discharge nozzle array is connected to the containment space through the discharge surface, and the discharge nozzle array includes a plurality of discharge nozzles arranged along the row direction and the column direction. A plurality of first additional discharge nozzles is connected to the containment space through the discharge surface, the plurality of first additional discharge nozzles is disposed above the plurality of discharge nozzles, and the plurality of first additional discharge nozzles is arranged along the row direction. A number of the plurality of injection nozzles is less than a sum of a number of the plurality of discharge nozzles and a number of the plurality of first additional discharge nozzles.

Description

[0001] Cross-references to related applications

[0002] This application claims priority and benefit to Korean Patent Application No. 10-2024-0077109, filed on June 13, 2024, with the Korean Intellectual Property Office, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This disclosure relates to a heat treatment apparatus and an electronic device. Background Technology

[0004] A heat treatment apparatus is an apparatus for performing heat treatment on an object. A heat treatment apparatus includes a chamber for providing a receiving space for accommodating the object, an injection nozzle for supplying injection gas into the receiving space, and an exhaust nozzle for discharging gas from the receiving space.

[0005] When gas in the containment space cannot be properly released, it may adhere (or solidify) (e.g., form a film) and cause defects in the heat treatment equipment. Utility Model Content

[0006] This disclosure provides a heat treatment apparatus that can prevent gas adhesion or film formation.

[0007] An embodiment of a heat treatment apparatus includes: a chamber including an injection surface and an exhaust surface facing the injection surface, the chamber providing a receiving space for accommodating a heat-treated object; an injection nozzle array connected to the receiving space via the injection surface, the injection nozzle array including a plurality of injection nozzles arranged along a row direction and a column direction; an exhaust nozzle array connected to the receiving space via the exhaust surface, the exhaust nozzle array including a plurality of exhaust nozzles arranged along the row direction and the column direction; and a plurality of first additional exhaust nozzles connected to the receiving space via the exhaust surface, the plurality of first additional exhaust nozzles being disposed above the plurality of exhaust nozzles and arranged along the row direction. The number of the plurality of injection nozzles is less than the sum of the number of the plurality of exhaust nozzles and the number of the plurality of first additional exhaust nozzles.

[0008] The injection nozzle array may include a first row of injection nozzles to an Nth row of injection nozzles arranged along the column direction, and the discharge nozzle array may include a first row of discharge nozzles to an Nth row of discharge nozzles arranged along the column direction, wherein N is a natural number of 3 or greater.

[0009] The first discharge nozzle line to the Mth injection nozzle line in the Nth injection nozzle line can be set at the same height as the first discharge nozzle line to the Mth discharge nozzle line in the Nth discharge nozzle line, where M is a natural number of 1 or greater and N is a natural number of less than N.

[0010] The heat treatment equipment may further include a plurality of second additional exhaust nozzles connected to the receiving space via the exhaust surface, the plurality of second additional exhaust nozzles being disposed between the Nth exhaust nozzle row and the (N-1)th exhaust nozzle row, and the plurality of second additional exhaust nozzles being arranged along the row direction.

[0011] The number of the plurality of injection nozzles may be the same as the number of the plurality of discharge nozzles.

[0012] The heat treatment apparatus may also include a heater connected to the plurality of injection nozzles and for heating the injection gas supplied to the plurality of injection nozzles.

[0013] The heat treatment apparatus may further include a heating unit surrounding at least one of the plurality of injection nozzles, the plurality of discharge nozzles, and the plurality of first additional discharge nozzles.

[0014] An embodiment of a heat treatment apparatus includes: a chamber including an injection surface and an exhaust surface facing the injection surface, the chamber providing a receiving space for accommodating a heat-treated object; an injection nozzle array connected to the receiving space via the injection surface, the injection nozzle array including a plurality of injection nozzles arranged along row and column directions; and an exhaust nozzle array connected to the receiving space via the exhaust surface, the exhaust nozzle array including a plurality of exhaust nozzles arranged along the row and column directions. The inner diameter of each of the plurality of exhaust nozzles located in the uppermost row is larger than the inner diameter of each of the plurality of exhaust nozzles located in the lowermost row.

[0015] The number of the plurality of injection nozzles can be the same as the number of the plurality of discharge nozzles.

[0016] The injection nozzle array may include a first row of injection nozzles to an Nth row of injection nozzles arranged along the column direction, and the discharge nozzle array may include a first row of discharge nozzles to an Nth row of discharge nozzles arranged along the column direction, wherein N is a natural number of 3 or greater.

[0017] The first discharge nozzle line to the Mth injection nozzle line in the Nth injection nozzle line can be set at the same height as the first discharge nozzle line to the Mth discharge nozzle line in the Nth discharge nozzle line, where M is a natural number of 1 or greater and N is a natural number of less than N.

[0018] The inner diameter of each of the plurality of discharge nozzles defining the Nth row of discharge nozzles may be larger than the inner diameter of each of the plurality of injection nozzles defining the Nth row of injection nozzles.

[0019] The inner diameter of each of the discharge nozzles in the (N-1)th row of discharge nozzles may be greater than the inner diameter of each of the injection nozzles in the (N-1)th row of injection nozzles.

[0020] The inner diameter of each of the plurality of exhaust nozzles defining the Nth row of exhaust nozzles may be greater than the inner diameter of each of the plurality of exhaust nozzles defining the (N-1)th row of exhaust nozzles.

[0021] The inner diameter of each of the plurality of discharge nozzles defining the first row of discharge nozzles may be the same as the inner diameter of each of the plurality of injection nozzles defining the first row of injection nozzles.

[0022] An embodiment of a heat treatment apparatus includes: a chamber comprising an injection surface and an exhaust surface facing the injection surface, the chamber providing a receiving space for accommodating a heat-treated object; an injection nozzle array connected to the receiving space via the injection surface, the injection nozzle array comprising a plurality of injection nozzles arranged along row and column directions; and an exhaust nozzle array connected to the receiving space via the exhaust surface, the exhaust nozzle array comprising a plurality of exhaust nozzles arranged along the row and column directions. The number of exhaust nozzles located in the uppermost row may be greater than the number of exhaust nozzles located in the lowermost row.

[0023] The injection nozzle array may include a first row of injection nozzles to an Nth row of injection nozzles arranged along the column direction, and the discharge nozzle array may include a first row of discharge nozzles to an Nth row of discharge nozzles arranged along the column direction, wherein N is a natural number of 3 or greater.

[0024] The Mth injection nozzle row from the first injection nozzle row to the Nth injection nozzle row can be located at the same height as the Mth discharge nozzle row from the first discharge nozzle row to the Nth discharge nozzle row, where M is a natural number of 1 or greater and N is a natural number of less than N.

[0025] The number of discharge nozzles defining the Nth discharge nozzle row among the plurality of discharge nozzles may be greater than the number of injection nozzles defining the Nth injection nozzle row among the plurality of injection nozzles.

[0026] The number of discharge nozzles in the (N-1)th discharge nozzle row among the plurality of discharge nozzles may be greater than the number of injection nozzles in the (N-1)th injection nozzle row among the plurality of injection nozzles.

[0027] An embodiment of the electronic device includes: a processor that provides input image data; and a display device that displays an image based on the input image data. The display device may include a window. The window may be a heat-treated object that is heat-treated using the heat-treatment apparatus according to an embodiment of this disclosure.

[0028] According to embodiments of the heat treatment apparatus of this disclosure, additional discharge nozzles may be provided at the upper portion of the discharge surface. The inner diameter of the discharge nozzles may be relatively large, or the number of discharge nozzles may be relatively large. Therefore, the gas, which is mainly distributed in the upper portion of the containment space at a relatively high temperature, can be discharged more smoothly. Thus, defects in the heat treatment apparatus due to gas adhesion can be prevented. Attached Figure Description

[0029] Figure 1 A heat treatment apparatus according to an embodiment of the present disclosure is shown.

[0030] Figure 2 Show Figure 1 A plan view of an embodiment of a heat treatment apparatus with multiple injection nozzles.

[0031] Figure 3 Show Figure 1 A plan view of an embodiment of a heat treatment device with multiple exhaust nozzles and multiple additional exhaust nozzles.

[0032] Figure 4 An embodiment of the heating unit is shown.

[0033] Figure 5 A heat treatment apparatus according to an embodiment of the present disclosure is shown.

[0034] Figure 6 Show Figure 5 A plan view of an embodiment of a heat treatment apparatus with multiple injection nozzles.

[0035] Figure 7 Show Figure 5 A plan view of an embodiment of a heat treatment device with multiple exhaust nozzles.

[0036] Figure 8 A heat treatment apparatus according to an embodiment of the present disclosure is shown.

[0037] Figure 9 Show Figure 8 A plan view of an embodiment of a heat treatment apparatus with multiple injection nozzles.

[0038] Figure 10 Show Figure 8 A plan view of an embodiment of a heat treatment device with multiple exhaust nozzles.

[0039] Figure 11 A schematic block diagram of an electronic device including a display device is shown.

[0040] Figure 12 Show Figure 11 The electronic device shown is a schematic diagram of an example of a smartphone.

[0041] Figure 13 Show Figure 11 The electronic device is a schematic diagram of an example of a tablet computer. Detailed Implementation

[0042] In the following, exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. The following description is intended only to provide sufficient disclosure to enable an understanding of the present invention, and any other disclosure is omitted to avoid obscuring the scope of the present invention. Furthermore, the present invention may be embodied in different forms and is not limited to the embodiments set forth herein. Embodiments described herein are provided for the purpose of describing the technical concept of the present invention in sufficient detail for those skilled in the art to readily implement the present invention.

[0043] Throughout this specification, when describing an element as "connected" to another element, this includes not only "direct connection" but also "indirect connection" where the other element is located between the two elements. The terminology used herein is for the purpose of describing particular embodiments and is not intended to limit the scope of the invention. Throughout this specification, unless explicitly stated otherwise, the words "comprise" and "includes" (and variations such as "comprises" and "comprising") will be understood to mean including the stated elements without excluding any other elements. For the purposes of this disclosure, "at least one of X, Y, and Z" and "at least one selected from an array of X, Y, and Z" can be understood as only X, only Y, only Z, or any combination of two or more of X, Y, and Z (such as XYZ, XY, YZ, and XZ, for example). As used in this article, the word “or” means logical “or”, such that unless the context otherwise indicates, the expression “A, B or C” means “A and B and C”, “A and B but no C”, “A and C but no B”, “B and C but no A”, “A but no B and no C”, “B but no A and no C”, and “C but no A and no B”.

[0044] Although the terms first, second, etc., may be used herein to describe various constituent elements, these constituent elements should not be limited by these terms. These terms are used to distinguish one constituent element from another. Therefore, without departing from the teachings of this disclosure, the first constituent element discussed below may be referred to as the second constituent element.

[0045] For descriptive purposes, spatial relative terms such as “below,” “under,” “down,” “above,” and “above” may be used herein to describe the relationship of one element or feature to another element (or feature) or feature (or feature) as shown in the accompanying drawings. In addition to the orientations depicted in the drawings, spatial relative terms are also intended to cover different orientations of the device during use, operation, or manufacture. For example, if the device is flipped in the drawings, an element described as “below” or “under” other elements or features will subsequently be oriented “above” other elements or features. Thus, the term “below” can cover both above and below orientations. Furthermore, the device may be oriented in other ways (e.g., rotated 90 degrees or in other orientations), and in such cases, the spatial relative descriptive terms used herein should be interpreted accordingly.

[0046] Various embodiments are described herein with reference to cross-sectional views, which are schematic diagrams of idealized embodiments. Thus, variations in the shapes illustrated will be expected due to factors such as manufacturing techniques or tolerances. Therefore, the exemplary embodiments disclosed herein should not be construed as limited to the specific shapes of the illustrated areas, but should include deviations in shape due to factors such as manufacturing. Consequently, the areas shown in the figures are schematic in nature, and the shapes of these areas are not intended to represent the actual shapes of areas of the device, nor are they intended to be limiting.

[0047] Figure 1 A heat treatment apparatus according to an embodiment of the present disclosure is shown.

[0048] Reference Figure 1 The heat treatment equipment 1000 may include a chamber 100 and a plurality of injection nozzles. Figure 2 The injection nozzle array 200 (INZ) includes multiple discharge nozzles. Figure 3 The exhaust nozzle array 300 (ONZ) and multiple additional exhaust nozzles ( Figure 3 Additional exhaust nozzles (AONZ).

[0049] Chamber 100 can provide a receiving space for accommodating heat-treated objects TG. For example, the heat-treated object TG can be the glass of a window for configuring a display device. In an embodiment, the heat-treated object TG can include a first to an Nth heat-treated object arranged spaced apart from each other along a third direction DR3. Here, N can be a natural number of 3 or greater. In the following, N is defined as a natural number of 3 or greater. For example, the heat-treated object TG can include a first heat-treated object TG1, a second heat-treated object TG2, a third heat-treated object TG3, a fourth heat-treated object TG4, and a fifth heat-treated object TG5.

[0050] Chamber 100 may include an injection surface 100IN and an exhaust surface 100OUT facing the injection surface 100IN. The injection surface 100IN may be substantially parallel to a plane defined by a third direction DR3 and a first direction DR1 perpendicular to the third direction DR3. The exhaust surface 100OUT may be substantially parallel to the injection surface 100IN. The injection surface 100IN and the exhaust surface 100OUT may be spaced apart from each other in a second direction DR2 perpendicular to the first direction DR1 and the third direction DR3. The injection surface 100IN and the exhaust surface 100OUT may surround a portion of the receiving space.

[0051] Multiple injection nozzles configured in the injection nozzle array 200 Figure 2 The injection nozzle (INZ) can be connected to the receiving space via the injection surface 100IN. Multiple injection nozzles ( Figure 2 The injection nozzle (INZ) in the container provides injection gas to the containment space. By heating the injection gas, heat treatment can be performed on the heat-treated object (TG) in the containment space.

[0052] Multiple injection nozzles ( Figure 2 The injection nozzle (INZ) can be arranged along both the row and column directions. Here, the row direction can be a first direction DR1, and the column direction can be a third direction DR3. In the following text, the row direction will be referred to as the first direction DR1, and the column direction will be referred to as the third direction DR3.

[0053] In an embodiment, the injection nozzle array 200 may include a first row of injection nozzles to an Nth row of injection nozzles arranged along a third direction DR3. Hereinafter, for clarity and brevity, an embodiment with N equal to 5 will be described. However, this disclosure is not limited thereto, and N may be 3 or 6 or a greater natural number.

[0054] The injection nozzle array 200 may include a first injection nozzle row 201, a second injection nozzle row 202, a third injection nozzle row 203, a fourth injection nozzle row 204, and a fifth injection nozzle row 205. The first injection nozzle row 201, the second injection nozzle row 202, the third injection nozzle row 203, the fourth injection nozzle row 204, and the fifth injection nozzle row 205 may be arranged along a third direction DR3. Each of the first injection nozzle row 201, the second injection nozzle row 202, the third injection nozzle row 203, the fourth injection nozzle row 204, and the fifth injection nozzle row 205 may include one or more injection nozzles arranged along a first direction DR1 and spaced apart from each other.

[0055] The injection nozzle of the first injection nozzle row 201 is defined as follows: Figure 2 One end of the first injection nozzle INZ1 can be connected to the receiving space via the injection surface 100IN, and defines the injection nozzle of the first injection nozzle row 201. Figure 2 The other end of the first injection nozzle (INZ1) can be connected to the first injection connection portion 211. The first injection connection portion 211 can have a tubular shape extending along the first direction DR1.

[0056] The injection nozzle of the second injection nozzle row 202 is defined as follows: Figure 2 One end of the second injection nozzle (INZ2) can be connected to the receiving space via the injection surface 100IN, and defines the injection nozzle of the second injection nozzle row 202. Figure 2 The other end of the second injection nozzle (INZ2) can be connected to the second injection connection portion 212. The second injection connection portion 212 can have a tubular shape extending along the first direction DR1.

[0057] The injection nozzle of the third injection nozzle row 203 is defined as follows: Figure 2 The third injection nozzle (INZ3) can be connected to the receiving space via the injection surface 100IN, and the injection nozzle of the third injection nozzle row 203 is defined. Figure 2 The other end of the third injection nozzle (INZ3) can be connected to the third injection connection portion 213. The third injection connection portion 213 can have a tubular shape extending along the first direction DR1.

[0058] The injection nozzle of the fourth injection nozzle row 204 is defined as follows: Figure 2 One end of the fourth injection nozzle (INZ4) can be connected to the receiving space via the injection surface 100IN, and defines the injection nozzle of the fourth injection nozzle row 204. Figure 2The other end of the fourth injection nozzle (INZ4) can be connected to the fourth injection connection portion 214. The fourth injection connection portion 214 can have a tubular shape extending along the first direction DR1.

[0059] The injection nozzle of the fifth injection nozzle row 205 is limited ( Figure 2 One end of the fifth injection nozzle (INZ5) can be connected to the receiving space via the injection surface 100IN, and defines the injection nozzle of the fifth injection nozzle row 205. Figure 2 The other end of the fifth injection nozzle (INZ5) can be connected to the fifth injection connection portion 215. The fifth injection connection portion 215 can have a tubular shape extending along the first direction DR1.

[0060] The first injection connection portion 211, the second injection connection portion 212, the third injection connection portion 213, the fourth injection connection portion 214, and the fifth injection connection portion 215 can be connected to the heater 230 through the first injection connection pipe 220. The heater 230 can be connected to the second injection connection pipe 240. The injection gas supplied from the second injection connection pipe 240 can be heated by the heater 230 to be supplied to the first injection connection pipe 220. The injection gas supplied to the first injection connection pipe 220 can be supplied through the first injection connection portion 211, the second injection connection portion 212, the third injection connection portion 213, the fourth injection connection portion 214, and the fifth injection connection portion 215, as well as multiple injection nozzles ( Figure 2 The injection nozzle (INZ) in the middle provides to the receiving space.

[0061] Here, heater 230 can be used to prevent the injected gas from entering through the first injection connection 211, second injection connection 212, third injection connection 213, fourth injection connection 214, and fifth injection connection 215, as well as the plurality of injection nozzles, by heating the injected gas. Figure 2 The curing process takes place inside the injection nozzle (INZ).

[0062] Multiple exhaust nozzles configured in the exhaust nozzle array 300 Figure 3 The exhaust nozzle (ONZ) can be connected to the containment space via the exhaust surface 100OUT. Gas within the containment space can be discharged through multiple exhaust nozzles (ONZ). Figure 3 The exhaust nozzles (ONZ) emit exhaust. Multiple exhaust nozzles ( Figure 3 The exhaust nozzles (ONZ) can be arranged along the first direction DR1 and the third direction DR3.

[0063] In an embodiment, the exhaust nozzle array 300 may include a first row of exhaust nozzles to an Nth row of exhaust nozzles arranged along a third direction DR3. For example, the exhaust nozzle array 300 may include a first row of exhaust nozzles 301, a second row of exhaust nozzles 302, a third row of exhaust nozzles 303, a fourth row of exhaust nozzles 304, and a fifth row of exhaust nozzles 305. The first row of exhaust nozzles 301, the second row of exhaust nozzles 302, the third row of exhaust nozzles 303, the fourth row of exhaust nozzles 304, and the fifth row of exhaust nozzles 305 may be arranged along a third direction DR3. Each of the first row of exhaust nozzles 301, the second row of exhaust nozzles 302, the third row of exhaust nozzles 303, the fourth row of exhaust nozzles 304, and the fifth row of exhaust nozzles 305 may include one or more exhaust nozzles arranged along a first direction DR1 and spaced apart from each other.

[0064] The exhaust nozzle of the first exhaust nozzle row 301 is defined as follows: Figure 3 One end of the first discharge nozzle ONZ1 can be connected to the receiving space via the discharge surface 100OUT, and defines the discharge nozzle of the first discharge nozzle row 301. Figure 3 The other end of the first discharge nozzle (ONZ1) can be connected to the first discharge connection portion 311. The first discharge connection portion 311 can have a tubular shape extending along the first direction DR1.

[0065] The exhaust nozzle of the second exhaust nozzle row 302 is defined as follows: Figure 3 One end of the second discharge nozzle (ONZ2) can be connected to the receiving space via the discharge surface 100OUT, and the discharge nozzle of the second discharge nozzle row 302 is defined. Figure 3 The other end of the second discharge nozzle (ONZ2) can be connected to the second discharge connection portion 312. The second discharge connection portion 312 can have a tubular shape extending along the first direction DR1.

[0066] The exhaust nozzle of the third exhaust nozzle row 303 is limited to the exhaust nozzle ( Figure 3 One end of the third discharge nozzle (ONZ3) can be connected to the receiving space via the discharge surface 100OUT, and the discharge nozzle of the third discharge nozzle row 303 is defined. Figure 3 The other end of the third exhaust nozzle (ONZ3) can be connected to the third exhaust connection portion 313. The third exhaust connection portion 313 can have a tubular shape extending along the first direction DR1.

[0067] The exhaust nozzle of the fourth exhaust nozzle row 304 is limited to the exhaust nozzle ( Figure 3 One end of the fourth discharge nozzle (ONZ4) can be connected to the receiving space via the discharge surface 100OUT, and defines the discharge nozzle of the fourth discharge nozzle row 304. Figure 3The other end of the fourth exhaust nozzle (ONZ4) can be connected to the fourth exhaust connection portion 314. The fourth exhaust connection portion 314 can have a tubular shape extending along the first direction DR1.

[0068] The fifth emission nozzle row 305 is limited to the emission nozzle ( Figure 3 One end of the fifth exhaust nozzle (ONZ5) can be connected to the receiving space via the exhaust surface 100OUT, and the exhaust nozzle of the fifth exhaust nozzle row 305 is defined. Figure 3 The other end of the fifth emission nozzle (ONZ5) can be connected to the fifth emission connection portion 315. The fifth emission connection portion 315 can have a tubular shape extending along the first direction DR1.

[0069] Multiple additional exhaust nozzles ( Figure 3 The additional exhaust nozzle (AONZ) can be connected to the containment space via the exhaust surface 100OUT. Gas within the containment space can be discharged through multiple additional exhaust nozzles (AONZ). Figure 3 The additional emission nozzle (AONZ) in the middle emits emissions.

[0070] In the embodiment, multiple additional exhaust nozzles ( Figure 3 The additional exhaust nozzle (AONZ) may include a first additional exhaust nozzle that defines the first additional exhaust nozzle row A10. Figure 3 The first additional exhaust nozzle (AONZ1) and the second additional exhaust nozzle (A20) defining the second additional exhaust nozzle row. Figure 3 The second additional exhaust nozzle (AONZ2). The first additional exhaust nozzle ( Figure 3 The first auxiliary exhaust nozzle (AONZ1) can be arranged along the first direction DR1. The second auxiliary exhaust nozzle ( Figure 3 The second additional exhaust nozzle (AONZ2) can be arranged along the first direction DR1.

[0071] In an embodiment, the first additional exhaust nozzle row A10 may be disposed above the fifth exhaust nozzle row 305. Among the first exhaust nozzle row 301, the second exhaust nozzle row 302, the third exhaust nozzle row 303, the fourth exhaust nozzle row 304, and the fifth exhaust nozzle row 305, the fifth exhaust nozzle row 305 is disposed at the uppermost position.

[0072] In an embodiment, the second additional exhaust nozzle row A20 may be disposed between the fifth exhaust nozzle row 305 and the fourth exhaust nozzle row 304. Among the first exhaust nozzle row 301, the second exhaust nozzle row 302, the third exhaust nozzle row 303, the fourth exhaust nozzle row 304 and the fifth exhaust nozzle row 305, the fifth exhaust nozzle row 305 is disposed at the uppermost part and the fourth exhaust nozzle row 304 is disposed below the fifth exhaust nozzle row 305.

[0073] The first additional exhaust nozzle (limiting the first additional exhaust nozzle row A10) Figure 3 One end of the first additional exhaust nozzle (AONZ1) can be connected to the receiving space via the exhaust surface 100OUT, and defines the first additional exhaust nozzle (A10) of the first additional exhaust nozzle row. Figure 3 The other end of the first additional exhaust nozzle (AONZ1) can be connected to the first additional exhaust connection portion A11. The first additional exhaust connection portion A11 can have a tubular shape extending along the first direction DR1.

[0074] The second additional exhaust nozzle (limiting the second additional exhaust nozzle row A20) Figure 3 One end of the second additional exhaust nozzle (AONZ2) can be connected to the receiving space via the exhaust surface 100OUT, and the second additional exhaust nozzle (A20) defines the second additional exhaust nozzle row. Figure 3 The other end of the second additional exhaust nozzle (AONZ2) can be connected to the second additional exhaust connection portion A21. The second additional exhaust connection portion A21 can have a tubular shape extending along the first direction DR1.

[0075] The first discharge connection portion 311, the second discharge connection portion 312, the third discharge connection portion 313, the fourth discharge connection portion 314, and the fifth discharge connection portion 315, as well as the first additional discharge connection portion A11 and the second additional discharge connection portion A21, can be connected to the intake portion 330 via the first discharge connection pipe 320. The intake portion 330 can be connected to the second discharge connection pipe 340. The intake portion 330 can be used to provide suction for gas. Through the intake portion 330, gas in the containment space can be discharged to the second discharge connection pipe 340 via the first discharge connection portion 311, the second discharge connection portion 312, the third discharge connection portion 313, the fourth discharge connection portion 314, the fifth discharge connection portion 315, the first additional discharge connection portion A11, the second additional discharge connection portion A21, and the first discharge connection pipe 320.

[0076] Figure 2 Show Figure 1 A plan view of an embodiment of a heat treatment apparatus with multiple injection nozzles.

[0077] Reference Figure 1 and Figure 2 The multiple injection nozzles INZ may include multiple first injection nozzles INZ1, multiple second injection nozzles INZ2, multiple third injection nozzles INZ3, multiple fourth injection nozzles INZ4, and multiple fifth injection nozzles INZ5.

[0078] Multiple first injection nozzles INZ1 may be arranged along a first direction DR1. The multiple first injection nozzles INZ1 may define a first injection nozzle row 201.

[0079] Multiple second injection nozzles INZ2 can be arranged along the first direction DR1. The multiple second injection nozzles INZ2 can define a second injection nozzle row 202. The second injection nozzle row 202 can be positioned above the first injection nozzle row 201.

[0080] Multiple third injection nozzles INZ3 can be arranged along the first direction DR1. The multiple third injection nozzles INZ3 can define a third injection nozzle row 203. The third injection nozzle row 203 can be positioned above the second injection nozzle row 202.

[0081] Multiple fourth injection nozzles INZ4 can be arranged along the first direction DR1. The multiple fourth injection nozzles INZ4 can define a fourth injection nozzle row 204. The fourth injection nozzle row 204 can be positioned above the third injection nozzle row 203.

[0082] Multiple fifth injection nozzles INZ5 can be arranged along the first direction DR1. The multiple fifth injection nozzles INZ5 can define a fifth injection nozzle row 205. The fifth injection nozzle row 205 can be positioned above the fourth injection nozzle row 204.

[0083] In an embodiment, the number of injection nozzles in each of the first injection nozzle row 201, the second injection nozzle row 202, the third injection nozzle row 203, the fourth injection nozzle row 204, and the fifth injection nozzle row 205 can be the same. For example, five first injection nozzles INZ1, five second injection nozzles INZ2, five third injection nozzles INZ3, five fourth injection nozzles INZ4, and five fifth injection nozzles INZ5 can be provided respectively.

[0084] In an embodiment, multiple injection nozzles INZ may have substantially the same inner diameter.

[0085] Figure 3 Show Figure 1 A plan view of an embodiment of a heat treatment device with multiple exhaust nozzles and multiple additional exhaust nozzles.

[0086] Reference Figure 1 and Figure 3 The multiple emission nozzles ONZ may include multiple first emission nozzles ONZ1, multiple second emission nozzles ONZ2, multiple third emission nozzles ONZ3, multiple fourth emission nozzles ONZ4, and multiple fifth emission nozzles ONZ5.

[0087] Multiple first discharge nozzles ONZ1 may be arranged along a first direction DR1. The multiple first discharge nozzles ONZ1 may define a first discharge nozzle row 301. In an embodiment, the first discharge nozzle row 301 may be positioned at the same height as the first injection nozzle row 201.

[0088] Multiple second exhaust nozzles ONZ2 may be arranged along the first direction DR1. The multiple second exhaust nozzles ONZ2 may define a second exhaust nozzle row 302. The second exhaust nozzle row 302 may be positioned above the first exhaust nozzle row 301. In an embodiment, the second exhaust nozzle row 302 may be positioned at the same height as the second injection nozzle row 202.

[0089] Multiple third exhaust nozzles ONZ3 may be arranged along the first direction DR1. The multiple third exhaust nozzles ONZ3 may define a third exhaust nozzle row 303. The third exhaust nozzle row 303 may be positioned above the second exhaust nozzle row 302. In an embodiment, the third exhaust nozzle row 303 may be positioned at the same height as the third injection nozzle row 203.

[0090] Multiple fourth exhaust nozzles ONZ4 can be arranged along the first direction DR1. The multiple fourth exhaust nozzles ONZ4 can define a fourth exhaust nozzle row 304. The fourth exhaust nozzle row 304 can be positioned above the third exhaust nozzle row 303. In an embodiment, the fourth exhaust nozzle row 304 can be positioned at the same height as the fourth injection nozzle row 204.

[0091] Multiple fifth exhaust nozzles ONZ5 may be arranged along the first direction DR1. The multiple fifth exhaust nozzles ONZ5 may define a fifth exhaust nozzle row 305. The fifth exhaust nozzle row 305 may be positioned above the fourth exhaust nozzle row 304. In an embodiment, the fifth exhaust nozzle row 305 may be positioned at the same height as the fifth injection nozzle row 205.

[0092] In an embodiment, the number of exhaust nozzles in each of the first exhaust nozzle row 301, the second exhaust nozzle row 302, the third exhaust nozzle row 303, the fourth exhaust nozzle row 304, and the fifth exhaust nozzle row 305 can be the same. For example, five first exhaust nozzles ONZ1, five second exhaust nozzles ONZ2, five third exhaust nozzles ONZ3, five fourth exhaust nozzles ONZ4, and five fifth exhaust nozzles ONZ5 can be provided respectively.

[0093] In this embodiment, the number of multiple discharge nozzles ONZ can be the same as the number of multiple injection nozzles ( Figure 2 The number of injection nozzles (INZ) is the same. For example, 25 exhaust nozzles (ONZ) and 25 injection nozzles (INZ) can be provided separately. Figure 2 (Injection nozzle INZ).

[0094] Multiple additional emission nozzles AONZ may include multiple first additional emission nozzles AONZ1 and multiple second additional emission nozzles AONZ2.

[0095] Multiple first auxiliary emission nozzles AONZ1 may be arranged along a first direction DR1. The multiple first auxiliary emission nozzles AONZ1 may define a first auxiliary emission nozzle row A10. The first auxiliary emission nozzle row A10 may be positioned above a fifth emission nozzle row 305.

[0096] Multiple second auxiliary emission nozzles AONZ2 can be arranged along the first direction DR1. The multiple second auxiliary emission nozzles AONZ2 can define a second auxiliary emission nozzle row A20. The second auxiliary emission nozzle row A20 can be positioned between the fifth emission nozzle row 305 and the fourth emission nozzle row 304.

[0097] Reference Figure 2 and Figure 3 The number of injection nozzles INZ can be less than the sum of the number of discharge nozzles ONZ and the number of first additional discharge nozzles AONZ1. That is, the number of nozzles provided on the discharge surface 100OUT can be greater than the number of nozzles provided on the injection surface 100IN. In this case, the multiple first additional discharge nozzles AONZ1 can be located at the uppermost end of the discharge surface 100OUT.

[0098] Due to the room ( Figure 1 The relatively high temperature within the containment space of chamber 100 may generate byproducts (e.g., gases). These byproducts may be primarily distributed in the upper portion of the containment space. In this disclosure, by providing the aforementioned plurality of first additional discharge nozzles AONZ1, the byproducts distributed in the upper portion of the containment space can be discharged more easily.

[0099] Figure 4 An embodiment of the heating unit is shown.

[0100] Reference Figure 4 In reference Figures 1 to 3 At least one of the plurality of injection nozzles INZ, plurality of discharge nozzles ONZ and plurality of additional discharge nozzles AONZ included in the heat treatment apparatus 1000 described may be provided with a heating unit for preventing the adhesion of by-products (e.g., gases).

[0101] In one embodiment, the heating unit may include a heating wire HL surrounding the nozzle NZ. The heating wire HL can generate heat. The heating wire HL can heat the nozzle NZ surrounded by the heating wire HL (i.e., multiple injection nozzles INZ, multiple discharge nozzles ONZ, or multiple additional discharge nozzles AONZ). In this case, the temperature of the nozzle NZ surrounded by the heating wire HL rises, thereby preventing byproducts (e.g., gases) from solidifying inside the nozzle NZ.

[0102] Figure 5 A heat treatment apparatus according to an embodiment of the present disclosure is shown. Figure 6 Show Figure 5 A plan view of an embodiment of a heat treatment apparatus with multiple injection nozzles. Figure 7 Show Figure 5 A plan view of an embodiment of a heat treatment device with multiple exhaust nozzles.

[0103] Reference Figures 5 to 7 A heat treatment apparatus 1000' can be provided. In the following description of the heat treatment apparatus 1000', the description will primarily refer to... Figures 1 to 4 The differences in the heat treatment equipment 1000 described are noted, and any omitted descriptions will be found in the preceding description.

[0104] Compared to heat treatment equipment 1000, heat treatment equipment 1000' may not include multiple additional exhaust nozzles (see AONZ). Figure 3 In this case, to facilitate the discharge of gas from the upper part of the containment space of the chamber 100 of the heat treatment equipment 1000', the inner diameter of each of the plurality of fifth discharge nozzles ONZ5' defined in the fifth discharge nozzle row 305' located at the uppermost part can be formed relatively large. More specifically, the inner diameter of each of the plurality of fifth discharge nozzles ONZ5' defined in the fifth discharge nozzle row 305' located at the uppermost part can be larger than the inner diameter of each of the plurality of first discharge nozzles ONZ1 defined in the first discharge nozzle row 301 located at the lowermost part.

[0105] In an embodiment, the inner diameter of each of the plurality of fifth discharge nozzles ONZ5' defining the fifth discharge nozzle row 305' may be greater than the injection inner diameter of each of the plurality of fifth injection nozzles INZ5 defining the fifth injection nozzle row 205.

[0106] In an embodiment, the inner diameter of each of the plurality of fourth exhaust nozzles ONZ4' defining the fourth exhaust nozzle row 304' can be formed relatively large. For example, the inner diameter of each of the plurality of fourth exhaust nozzles ONZ4' can be larger than the injection inner diameter of each of the plurality of fourth injection nozzles INZ4 defining the fourth injection nozzle row 204. In this case, the inner diameter of each of the plurality of fourth exhaust nozzles ONZ4' can be smaller than the inner diameter of each of the plurality of fifth exhaust nozzles ONZ5'.

[0107] Figure 8 A heat treatment apparatus according to an embodiment of the present disclosure is shown. Figure 9 Show Figure 8 A plan view of an embodiment of a heat treatment apparatus with multiple injection nozzles. Figure 10 Show Figure 8 A plan view of an embodiment of a heat treatment device with multiple exhaust nozzles.

[0108] Reference Figures 8 to 10 It can provide heat treatment equipment 1000". In the following description of the heat treatment equipment 1000", the description will mainly refer to the description. Figures 1 to 4 The differences in the heat treatment equipment 1000 described are noted, and any omitted descriptions will be found in the preceding description.

[0109] Compared to heat treatment equipment 1000, heat treatment equipment 1000" may not include multiple additional exhaust nozzles (see AONZ). Figure 3 In this case, to facilitate the discharge of gas from the upper part of the containment space of the chamber 100 of the heat treatment equipment 1000", the number of fifth discharge nozzles ONZ5" defined in the fifth discharge nozzle row 305" located at the uppermost part can be relatively large. More specifically, the number of fifth discharge nozzles ONZ5" defined in the fifth discharge nozzle row 305" located at the uppermost part can be greater than the number of first discharge nozzles ONZ1 defined in the first discharge nozzle row 301 located at the lowermost part.

[0110] In an embodiment, the number of fifth emission nozzles ONZ5" defining the fifth emission nozzle row 305" may be greater than the number of fifth injection nozzles INZ5 defining the fifth injection nozzle row 205.

[0111] In an embodiment, the number of fourth exhaust nozzles ONZ4" defining the fourth exhaust nozzle row 304" can be relatively large. For example, the number of fourth exhaust nozzles ONZ4" can be greater than the number of fourth injection nozzles INZ4" defining the fourth injection nozzle row 204. In this case, the number of fourth exhaust nozzles ONZ4" can be less than the number of fifth exhaust nozzles ONZ5".

[0112] Figure 11A schematic block diagram of an electronic device including a display device is shown. Figure 12 Show Figure 11 The electronic device shown is a schematic diagram of an example of a smartphone. Figure 13 Show Figure 11 The electronic device is a schematic diagram of an example of a tablet computer.

[0113] Reference Figure 11 , Figure 12 and Figure 13 The electronic device ED may include a processor 1010, a memory device 1020, a storage device 1030, an input / output (I / O) device 1040, a power supply 1050, and a display device 1060. The display device 1060 may include a window, and the window may be created using a heat treatment device 1000 (see [link to heat treatment device]). Figure 1 ), 1000' (see Figure 5 ) or 1000" (see Figure 8 The heat-treated object (TG) undergoes heat treatment (see...) Figure 1 The electronic device ED may also include various ports for communicating with video cards, sound cards, memory cards, USB devices, or other systems. In embodiments, such as... Figure 12 As shown, the electronic device ED can be a smartphone. In an embodiment, as... Figure 13 As shown, the electronic device ED can be a tablet computer. However, the above examples are illustrative, and the electronic device ED is not limited to the examples described above. For example, the electronic device ED can be a cellular phone, video phone, smart tablet, smartwatch, navigation device for a vehicle, computer monitor, laptop computer, or head-mounted display device, etc.

[0114] Processor 1010 can perform specific calculations or tasks. In embodiments, processor 1010 can be a microprocessor, central processing unit, or application processor, etc. Processor 1010 can be connected to other components via address buses, control buses, and data buses, etc. In embodiments, processor 1010 can be connected to an expansion bus (such as a peripheral component interconnect (PCI) bus). In embodiments, processor 1010 can provide input image data to display device 1060. Therefore, display device 1060 can display images based on the input image data provided from processor 1010.

[0115] The memory device 1020 can store data required for performing the operation of the electronic device ED. The memory device 1020 can be used as working memory and / or buffer memory for the processor 1010. For example, the memory device 1020 may include one or more volatile memory devices (such as dynamic random access memory (DRAM) devices, static random access memory (SRAM) devices, and mobile DRAM devices).

[0116] Storage device 1030 can store data in response to control signals or data from processor 1010. Storage device 1030 may include one or more non-volatile memories to retain data even when the electronic device ED is turned off. In some embodiments, storage device 1030 may include a solid-state drive (SSD), a hard disk drive (HDD), or a read-only optical disc memory (CD-ROM), etc.

[0117] I / O device 1040 may include input devices (such as a keyboard, keypad, touchpad, touchscreen, and mouse) and output devices (such as a speaker and printer). In an embodiment, display device 1060 may be integrated with I / O device 1040.

[0118] Power supply 1050 can supply the power required to perform the operation of electronic device ED. For example, power supply 1050 may include a power management integrated circuit (PMIC). In an embodiment, power supply 1050 can supply power to display device 1060.

[0119] The display device 1060 can display images in response to control signals or data from the processor 1010. The display device 1060 can be connected to other components via a bus or other communication link.

[0120] While this disclosure has been described in conjunction with embodiments now considered practical, it should be understood that the present invention is not limited to the disclosed embodiments, but rather, rather, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

Claims

1. A heat treatment apparatus, characterized in that, The heat treatment equipment includes: The chamber includes an injection surface and an discharge surface facing the injection surface, and the chamber provides a receiving space to accommodate the heat-treated object; An injection nozzle array is connected to the receiving space via the injection surface, and the injection nozzle array includes a plurality of injection nozzles arranged along the row and column directions; An array of exhaust nozzles, connected to the receiving space via the exhaust surface, and the array of exhaust nozzles comprising a plurality of exhaust nozzles arranged along the row direction and the column direction; and A plurality of first additional emission nozzles are connected to the receiving space via the emission surface, the plurality of first additional emission nozzles being disposed above the plurality of emission nozzles and arranged along the row direction. The number of the plurality of injection nozzles is less than the sum of the number of the plurality of emission nozzles and the number of the plurality of first additional emission nozzles.

2. The heat treatment equipment according to claim 1, characterized in that, The injection nozzle array includes a first row of injection nozzles to an Nth row of injection nozzles arranged along the column direction, and The exhaust nozzle array includes a first row of exhaust nozzles to an Nth row of exhaust nozzles arranged along the column direction. Where N is a natural number of 3 or greater.

3. The heat treatment equipment according to claim 2, characterized in that, The first injection nozzle line, extending to the Mth injection nozzle line within the Nth injection nozzle line, and the first discharge nozzle line, extending to the Mth discharge nozzle line within the Nth discharge nozzle line, are positioned at the same height. Where M is a natural number that is 1 or greater and N or less.

4. The heat treatment equipment according to claim 2, characterized in that, The heat treatment equipment also includes: A plurality of second additional emission nozzles are connected to the receiving space via the emission surface, the plurality of second additional emission nozzles being disposed between the Nth emission nozzle row and the (N-1)th emission nozzle row, and the plurality of second additional emission nozzles being arranged along the row direction.

5. The heat treatment equipment according to claim 1, characterized in that, The number of the plurality of injection nozzles is the same as the number of the plurality of discharge nozzles.

6. A heat treatment apparatus, characterized in that, The heat treatment equipment includes: The chamber includes an injection surface and an discharge surface facing the injection surface, and the chamber provides a receiving space to accommodate the heat-treated object; An injection nozzle array, connected to the receiving space via the injection surface, and the injection nozzle array comprising a plurality of injection nozzles arranged along row and column directions; and An exhaust nozzle array, connected to the receiving space via the exhaust surface, and the exhaust nozzle array comprising a plurality of exhaust nozzles arranged along the row direction and the column direction. Among the plurality of exhaust nozzles, the inner diameter of each of the uppermost exhaust nozzles is greater than the inner diameter of each of the lowermost exhaust nozzles.

7. The heat treatment equipment according to claim 6, characterized in that, The injection nozzle array includes a first row of injection nozzles to an Nth row of injection nozzles arranged along the column direction. The exhaust nozzle array includes a first row of exhaust nozzles to an Nth row of exhaust nozzles arranged along the column direction. The first injection nozzle row to the Mth injection nozzle row of the Nth injection nozzle row and the first discharge nozzle row to the Mth discharge nozzle row of the Nth discharge nozzle row are positioned at the same height, and The inner diameter of each of the plurality of discharge nozzles defining the Nth row of discharge nozzles is larger than the inner diameter of each of the plurality of injection nozzles defining the Nth row of injection nozzles. Where N is a natural number of 3 or greater, and M is a natural number of 1 or greater and N or less.

8. The heat treatment equipment according to claim 7, characterized in that, The inner diameter of each of the discharge nozzles in the (N-1)th row of discharge nozzles is larger than the inner diameter of each of the injection nozzles in the (N-1)th row of injection nozzles. The inner diameter of each of the plurality of exhaust nozzles defining the Nth row of exhaust nozzles is greater than the inner diameter of each of the plurality of exhaust nozzles defining the (N-1)th row of exhaust nozzles.

9. A heat treatment apparatus, characterized in that, The heat treatment equipment includes: The chamber includes an injection surface and an discharge surface facing the injection surface, and the chamber provides a receiving space to accommodate the heat-treated object; An injection nozzle array, connected to the receiving space via the injection surface, and the injection nozzle array comprising a plurality of injection nozzles arranged along row and column directions; and An exhaust nozzle array, connected to the receiving space via the exhaust surface, and the exhaust nozzle array comprising a plurality of exhaust nozzles arranged along the row direction and the column direction. The number of exhaust nozzles located in the uppermost row among the plurality of exhaust nozzles is greater than the number of exhaust nozzles located in the lowermost row among the plurality of exhaust nozzles.

10. The heat treatment equipment according to claim 9, characterized in that, The injection nozzle array includes a first row of injection nozzles to an Nth row of injection nozzles arranged along the column direction. The exhaust nozzle array includes a first row of exhaust nozzles to an Nth row of exhaust nozzles arranged along the column direction. The first injection nozzle line, extending to the Mth injection nozzle line within the Nth injection nozzle line, and the first discharge nozzle line, extending to the Mth discharge nozzle line within the Nth discharge nozzle line, are positioned at the same height. The number of discharge nozzles defining the Nth discharge nozzle row among the plurality of discharge nozzles is greater than the number of injection nozzles defining the Nth injection nozzle row among the plurality of injection nozzles, and The number of discharge nozzles in the (N-1)th discharge nozzle row among the plurality of discharge nozzles is greater than the number of injection nozzles in the (N-1)th injection nozzle row among the plurality of injection nozzles. Where N is a natural number of 3 or greater, and M is a natural number of 1 or greater and N or less.

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