METHOD FOR MANUFACTURING A SEMICONDUCTOR LASER AND SEMICONDUCTOR LASER

Abstract

The invention relates to a method for producing at least one semiconductor laser. The method comprises: providing a semiconductor layer sequence having at least one ridge waveguide and a widened region, wherein the main direction of extension of the widened region runs transversely or perpendicularly with respect to the main direction of extension of the ridge waveguide; and forming at least one main structure of the semiconductor laser from the widened region, wherein the main structure is connected to the ridge waveguide and comprises a decoupling facet of the semiconductor laser. The main structure is stepped and / or at least one auxiliary structure is formed from the widened region, which auxiliary structure is laterally spaced from the main structure. The invention also relates to a semiconductor laser.

Description

[0001] Description

[0002] METHOD FOR PRODUCING A SEMICONDUCTOR LASER AND SEMICONDUCTOR LASER

[0003] A method for producing a semiconductor laser and a semiconductor laser are specified.

[0004] The facets of semiconductor lasers can be created, for example, by breaking a semiconductor layer sequence and thus by singulating the semiconductor lasers in the semiconductor laser array. Alternatively, the facets of semiconductor lasers can be created by etching before singulation. Depending, for example, on the semiconductor layer sequence or the atomic concentration in the semiconductor layer sequence, etchings can be created in the active region of the semiconductor layer sequence.

[0005] One problem to be solved is to provide a method for producing a semiconductor laser that can be used to efficiently produce a semiconductor laser. Another problem to be solved is to provide an improved semiconductor laser.

[0006] The objects are achieved by the subject matter of the independent claims. Advantageous embodiments and further developments are specified in the subclaims.

[0007] According to at least one embodiment, the method for producing at least one semiconductor laser comprises providing a semiconductor layer sequence. The semiconductor layer sequence can have a first semiconductor layer of a first conduction type and a second semiconductor layer of a second conduction type. For example, the first semiconductor layer is p-doped and the second semiconductor layer is n-doped, or vice versa.

[0008] An active region can be arranged between the first semiconductor layer and the second semiconductor layer. The active region is configured, for example, to generate electromagnetic radiation, for example radiation in the ultraviolet, visible, or infrared spectral range. The active region can, for example, have a pn junction, a quantum well structure, and / or a multi-quantum well structure. For example, the semiconductor layer sequence comprises a II-IV semiconductor material, for example GaN or AlInGaN, or a II-VI semiconductor material.

[0009] The semiconductor layer sequence may have a stacking direction. For example, the first semiconductor layer, the active region, and the second semiconductor layer are arranged consecutively along the stacking direction, for example, directly following one another.

[0010] The semiconductor layer sequence has, for example, a main extension plane. The stacking direction of the semiconductor layer sequence can be perpendicular or approximately perpendicular to the main extension plane of the semiconductor layer sequence.

[0011] The semiconductor layer sequence can be provided on a carrier. For example, providing the semiconductor layer sequence comprises successively growing the semiconductor layers of the semiconductor layer sequence on a growth substrate. The carrier can be the growth substrate. Alternatively, the carrier is, for example, a carrier different from the growth substrate.

[0012] According to at least one embodiment of the method for producing at least one semiconductor laser, the semiconductor layer sequence has at least one ridge waveguide.

[0013] The at least one ridge waveguide can be formed at least partially from the semiconductor layer sequence. The at least one ridge waveguide, hereinafter also referred to as the ridge waveguide, can be an elevation of the semiconductor layer sequence along a vertical direction. The vertical direction runs, for example, parallel to the stacking direction of the semiconductor layer sequence. In other words, the semiconductor layer sequence can have an elevation, for example a locally limited elevation, which can be the ridge waveguide. The elevation is arranged, for example, on the side of the semiconductor layer sequence facing away from the carrier.

[0014] The ridge waveguide can have a main direction of extension. The main direction of extension of the ridge waveguide runs, for example, at least in places parallel or approximately parallel to the main plane of extension of the semiconductor layer sequence. For example, the ridge waveguide is elongated, in particular ridge-shaped. In a plan view of the semiconductor layer sequence, the ridge waveguide can, for example, be at least approximately rectangular. The semiconductor layer sequence can have more than one ridge waveguide. For example, the semiconductor layer sequence has at least two ridge waveguides. The two ridge waveguides can be laterally spaced from one another. For example, the at least two ridge waveguides can run parallel or approximately parallel to one another.In other words, the main extension direction of the ridge waveguide can run, at least in places, parallel or approximately parallel to a main extension direction of another ridge waveguide. For example, the semiconductor layer sequence comprises a plurality of ridge waveguides, for example the ridge waveguide and a plurality of further ridge waveguides. The further ridge waveguides can have the same properties as the ridge waveguide, or as the at least one ridge waveguide.

[0015] A lateral direction is understood to be a direction that runs, in particular, parallel to the main extension plane of the semiconductor layer sequence. A vertical direction is generally understood to be a direction that is perpendicular to the main extension plane of the semiconductor layer sequence. The vertical direction and the lateral direction are transverse, approximately orthogonal, to each other.

[0016] According to at least one embodiment of the method for producing at least one semiconductor laser, the semiconductor layer sequence has a widened region. The widened region can have a structure, for example a layer stack, which corresponds completely or at least approximately to the structure of the ridge waveguide. For example, the widened region is a region of the ridge waveguide in which the ridge waveguide has a greater extension along a direction transverse or perpendicular to the main extension direction of the ridge waveguide than in regions of the ridge waveguide outside the widened region. The extension of the ridge waveguide outside the widened region is, for example, a width of the ridge waveguide. The ridge waveguide can be formed integrally with the widened region.

[0017] For example, at least two ridge waveguides can have the widened region. The widened regions of the ridge waveguides can then, for example, be connected to one another or spaced apart from one another. For example, the semiconductor layer sequence comprises a contiguously formed widened region, in particular only one contiguously formed widened region.

[0018] According to at least one embodiment of the method for producing at least one semiconductor laser, a main extension direction of the widened region runs transversely or perpendicularly to a main extension direction of the ridge waveguide. The main extension direction of the ridge waveguide can be, for example, the direction along which the ridge waveguide has the greatest extension. For example, the main extension direction of the ridge waveguide runs parallel or almost parallel to a resonator of the semiconductor laser. The resonator of the semiconductor laser is, for example, arranged between two resonator surfaces. For example, one of the resonator surfaces has an output facet of the semiconductor laser. The main extension direction of the widened region can run transversely or perpendicularly to the main extension direction of the ridge waveguide.For example, the widened region may intersect at least one ridge waveguide.

[0019] According to at least one embodiment, the method for producing at least one semiconductor laser comprises forming at least one main structure of the semiconductor laser from the widened region. The at least one main structure can thus be formed from the material of the widened region. The at least one main structure can be formed, for example, by structuring the widened region. For example, during structuring of the widened region, a recess is produced in the widened region. For example, during production of the recess, a side surface / side surfaces of the main structure is / are formed and / or the main structure is defined. The side surfaces of the main structure can also be referred to below as side surfaces of the main structure.The side surface of the main structure can then comprise all surfaces of the main structure that extend perpendicularly or at least approximately perpendicularly to the main extension plane of the semiconductor layer sequence. The side surface of the main structure can, for example, directly adjoin the recess and laterally delimit the recess at least in places.

[0020] Alternatively, more than one recess can be formed. The recesses are then arranged, for example, at a distance from one another. In particular, each recess can be arranged between a first partial region and a second partial region of a ridge waveguide.

[0021] The recess can, for example, be formed such that it extends through the semiconductor layer sequence in places. For example, the recess also extends into the carrier. The recess can, for example, divide the ridge waveguide into a first partial region and a second partial region of the ridge waveguide. In other words, the recess can be arranged between the first partial region and the second partial region of the ridge waveguide. The recess in the widened region can, for example, be produced by dry-chemical etching. The side surface of the main structure can therefore have etching traces.

[0022] The recess can be flush with the widened region in a direction parallel to the main extension direction of the ridge waveguide. Alternatively, the recess can project beyond the widened region at least in places along this direction, for example by at least 1 pm, for example by at least 5 pm. The recess can project beyond the widened region, for example by a maximum of 50 pm, for example by a maximum of 30 pm or by a maximum of 10 pm. It is also possible for the recess to be arranged completely within the widened region in the lateral direction. A width of an edge of the widened region surrounding the recess can then be between 0.1 pm and 5 pm inclusive, for example between 0.2 pm and 3 pm inclusive. A side of the main structure facing away from the recess borders, for example, at least in places on the ridge waveguide.It is possible for the side of the main structure facing away from the recess to directly adjoin the ridge waveguide. For example, the main structure extends the ridge waveguide. The main structure is arranged, for example, in an optically active region of the semiconductor laser. In contrast to an optically passive region of the semiconductor laser, the optically active region of the semiconductor laser can be a region of the semiconductor laser in which electromagnetic radiation is coupled out during operation of the semiconductor laser.

[0023] The main structure can therefore, for example, be a structured region of the widened region which directly borders on the ridge waveguide. The main structure can be designed as part of the widened region and / or as part of the ridge waveguide. The side surface of the main structure runs in a lateral direction, at least in places, curved or kinked. The main structure can project beyond the recess along the main direction of extension of the ridge waveguide. In other words, the main structure is designed, for example, as a projection from the widened region. The projection projects, for example, a length of between 1 pm and 60 pm inclusive, for example between 5 pm and 30 pm inclusive, into the recess. For example, the side surface of the main structure then runs, at least in places, transversely or perpendicularly to the main direction of extension of the widened region.According to at least one embodiment of the method for producing at least one semiconductor laser, the main structure is connected to the ridge waveguide. For example, the main structure can be adjacent to the ridge waveguide, in particular directly adjacent to it. Alternatively or additionally, the main structure can be formed integrally with the ridge waveguide.

[0024] The ridge waveguide can merge into the main structure. This can mean that the main structure is arranged at least in places along the main extension direction of the ridge waveguide. For example, the main structure follows the ridge waveguide directly along the main extension direction of the ridge waveguide. The edge of the widened region can be arranged between the ridge waveguide and the main structure. The resonator can be formed by the main structure, for example. In particular, a resonator length of the semiconductor laser can be defined by the main structure. For example, the resonator length results from a length of the ridge waveguide along the main extension direction of the ridge waveguide and an extension of the main structure along the main extension direction of the ridge waveguide.For example, the length of the ridge waveguide along the main extension direction of the ridge waveguide can range from 100 pm to 1500 pm. The main structure can extend the length of the ridge waveguide along the main extension direction of the ridge waveguide by, for example, a maximum of 60 pm to define the resonator length of the semiconductor laser.

[0025] According to at least one embodiment of the method for

[0026] To produce at least one semiconductor laser, the main structure comprises an output facet of the semiconductor laser. A region of the side surface of the main structure which runs, for example, perpendicular or almost perpendicular to the main direction of extension of the ridge waveguide has, for example, the resonator surface or the output facet. The output facet of the semiconductor laser can have a crystal plane which runs perpendicular or approximately perpendicular to the main direction of extension of the ridge waveguide. The output facet is, for example, the side of the main structure facing away from the ridge waveguide. The side surface of the main structure can be formed at least partially by the resonator surface and / or the output facet.The coupling-out facet, for example, is the surface of the semiconductor laser at which electromagnetic radiation is coupled out of the semiconductor laser during operation.

[0027] According to at least one embodiment of the method for producing at least one semiconductor laser, the main structure is designed in a stepped manner. For example, the main structure comprises two steps, for example at least two steps. The main structure can also comprise at least three steps or a plurality of steps.

[0028] The steps of the main structure are arranged, for example, along the main extension direction of the ridge waveguide. A first step can be arranged closest to the ridge waveguide. Thus, the first step can be arranged along the main extension direction of the ridge waveguide, for example, between the ridge waveguide and a further step. For example, the further step is arranged between the output facet of the main structure and the first step. Alternatively or additionally, the further step can have the output facet.

[0029] The steps can be characterized, for example, in that the steps have different extensions along a direction perpendicular or approximately perpendicular to the main extension direction of the ridge waveguide. Alternatively or additionally, the step can project beyond the further step in a lateral direction parallel to the main extension direction of the widened region, or vice versa. In other words, the stepped main structure can have steps and / or a multitude of angles and changes of direction in plan view.

[0030] According to at least one embodiment of the method for producing at least one semiconductor laser, at least one secondary structure is formed from the widened region. For example, the secondary structure is laterally spaced from the main structure.

[0031] The fact that the at least one secondary structure is formed from the widened region can mean that the at least one secondary structure consists of the material of the widened region. The secondary structure can thus be embodied as part of the widened region. For example, the secondary structure is not embodied as part of the ridge waveguide and is spaced from the ridge waveguide. In particular, the secondary structure is located laterally from the ridge waveguide. In other words, the ridge waveguide does not merge into the secondary structure. For example, the secondary structure does not have a side surface at which electromagnetic radiation generated during operation of the semiconductor laser is coupled out. The at least one secondary structure can, for example, be formed using the same method as the main structure and / or in a common method with the main structure.In other words, all features disclosed for forming the main structure can be used for forming the secondary structure and vice versa.

[0032] For example, the side surface of the secondary structure is formed when the recess is produced. The recess can be produced by dry-chemical etching. The side surface of the secondary structure can delimit the recess laterally at least in places. The side surface of the secondary structure can then comprise all surfaces of the secondary structure which extend perpendicular or at least approximately perpendicular to the main extension plane of the semiconductor layer sequence. For example, two partial regions of the side surface of the secondary structure can form an angle which is different from 180°. In other words, the side surface of the secondary structure can, for example in plan view of the semiconductor layer sequence, run at least in places transversely or perpendicular to the main extension direction of the widened region and / or run in a curved and / or kinked manner in places. In plan view, the secondary structure can have convex and / or concave structures.In particular, the side surface of the secondary structure can be convex or concave, at least in places. In other words, the secondary structure can be formed, for example, as a projection from the widened region. The secondary structure projects, for example, a length of between 0.5 pm and 60 pm inclusive, for example between 5 pm and 30 pm inclusive, into the recess. The secondary structure can be arranged at a distance from the main structure. For example, the secondary structure is arranged in the optically passive region of the semiconductor laser. The optically passive region can be a region of the semiconductor laser in which no electromagnetic radiation is generated or coupled out during operation. It is possible for the secondary structure not to have a resonator surface and / or coupling-out facet of the semiconductor laser.In particular, no electromagnetic radiation generated in the active region of the semiconductor laser can be coupled out at the secondary structure. The secondary structure does not, for example, directly adjoin the ridge waveguide. In particular, the secondary structure can be arranged such that the secondary structure does not follow the ridge waveguide along the main extension direction of the ridge waveguide. For example, the semiconductor layer sequence comprises two ridge waveguides with main structures arranged thereon. The at least one secondary structure, for example at least two secondary structures, can be arranged between the two main structures. Thus, the widened region between two main structures can have at least two projections.

[0033] In at least one embodiment of the method for producing at least one semiconductor laser, a semiconductor layer sequence is provided with at least one ridge waveguide and a widened region, wherein a main extension direction of the widened region runs transversely or perpendicularly to a main extension direction of the ridge waveguide. At least one main structure of the semiconductor laser is formed from the widened region, wherein the main structure is connected to the ridge waveguide and comprises an output facet of the semiconductor laser. The main structure is designed in a step-shaped manner and / or at least one secondary structure is formed from the widened region, which secondary structure is laterally spaced from the main structure.

[0034] Using the method described here for producing at least one semiconductor laser, a semiconductor laser can be produced efficiently. The at least one semiconductor laser can, among other things, be produced cost-effectively. In particular, the resonator surfaces and / or the output facet of the semiconductor laser can be produced by etching. By forming a step-shaped main structure or a secondary structure that is laterally spaced from the main structure, undercutting of the output facet can be minimized, reduced or prevented, particularly during wet-chemical etching to expose the crystal plane of the output facet or to smooth the side surfaces of the main structure and / or the secondary structure. As a result, a high-quality resonator surface or output facet can be produced efficiently. The wet-chemical etching can therefore be targeted by a shape of the recess orThe shape of the main structure and / or secondary structure can be influenced to achieve particularly smooth resonator surfaces through etching. Furthermore, a large number of resonator surfaces can be manufactured simultaneously with as little loss as possible.

[0035] According to at least one embodiment of the method for producing a semiconductor laser, the coupling-out facet of the semiconductor laser is produced by wet-chemical etching.

[0036] By means of wet-chemical etching, material can be removed not only in the vertical direction, but also in the lateral direction. The material can be the layers of the semiconductor layer sequence. During wet-chemical etching, the material of the semiconductor layer sequence can be etched, for example, along the lateral direction. For example, the lateral surface of the main structure is smoothed during wet-chemical etching. The average roughness of the lateral surface of the main structure after wet-chemical etching is, for example, a maximum of 50 nm, for example a maximum of 30 nm or a maximum of 10 nm. In particular, the RMS roughness is

[0037] (English: root mean square roughness) for example a maximum of 10 nm, for example a maximum of 2 nm or for example a maximum of 1 nm. The wet-chemical etching of the side surface of the main structure can be used to form, for example, the resonator surface and / or the output facet of the semiconductor laser. The side surface of the main structure can have in some places, in particular only in some places, a crystal plane which runs perpendicular or almost perpendicular to the main direction of extension of the ridge waveguide. The crystal plane running perpendicular to the main direction of extension of the ridge waveguide is exposed on the side surfaces of the main structure, for example by means of wet-chemical etching. The output facet can, for example, have etching traces.

[0038] The output facet can thus be etched into individual semiconductor lasers before the semiconductor laser array is singulated. In particular, the output facet is not created during singulation, for example, by breaking.

[0039] According to at least one embodiment, the at least one secondary structure is trapezoidal or semicircular in plan view of the semiconductor layer sequence. The secondary structure can then have at least two crystal planes. For example, the side surface of the secondary structure facing the recess has at least one change of direction. During the change of direction, the side surface of the secondary structure can be curved and / or kinked. The secondary structure can, for example, be semicircular in plan view. The secondary structure then has, for example, a large number of changes of direction. Alternatively, the secondary structure can be step-shaped and, for example, have a trapezoidal or semicircular outline in plan view. It is possible for all side surfaces of the secondary structure to have etching traces.For example, in the finished semiconductor laser, all exposed side surfaces of the secondary structure may have etching traces.

[0040] Due to the large number of changes in direction, the occurrence of undercuts or etchings when creating the resonator surfaces, for example the output facet, can be reduced or prevented by wet-chemical etching.

[0041] Alternatively or additionally, the main structure may be trapezoidal or semicircular in plan view.

[0042] According to at least one embodiment of the method for producing a semiconductor laser, the semiconductor layer sequence comprises at least two ridge waveguides, wherein at least two main structures are formed in the widened region, and at least two secondary structures are formed in the widened region, wherein the at least two secondary structures are arranged between the main structure and an adjacent further main structure. The at least two main structures are formed, for example, on the at least two ridge waveguides. In particular, a main structure can be formed on each ridge waveguide. Alternatively or additionally, at least one main structure can be formed on each region of the ridge waveguide that later forms a semiconductor laser. The fact that two main structures are adjacent can in particular mean that no further main structure is arranged between them.However, at least one secondary structure or a plurality of secondary structures can be arranged between two adjacent main structures.

[0043] By forming at least two secondary structures, the recess in the widened region can have a structuring by means of which a high-quality resonator surface, for example the coupling-out facet of the semiconductor laser, can be produced by means of wet-chemical etching.

[0044] According to at least one embodiment of the method for producing a semiconductor laser, the main structure and the at least one secondary structure are formed in a common etching process.

[0045] The main structure and the secondary structure of the semiconductor laser can be formed by a dry-chemical etching process, for example by plasma etching. In this case, for example, regions of the widened region from which no main structure or secondary structure of the semiconductor laser is formed are removed by means of dry-chemical etching. In other words, the widened region can be structured by means of dry-chemical etching, wherein regions of the widened region which form the at least one main structure and the at least one secondary structure of the semiconductor laser remain. In particular, the regions of the widened region which form the at least one main structure and the at least one secondary structure of the semiconductor laser are not removed when the recess is produced.

[0046] For example, the main structure and the secondary structure are formed before the wet-chemical etching of the resonator surfaces. However, it is also possible for the main structure and the secondary structure to be created sequentially using dry-chemical etching.

[0047] For example, the side surfaces of the main structure and the secondary structure are smoothed in a common wet-chemical etching process. During wet-chemical etching, it is possible that, depending on the structure or design of the semiconductor layer sequence and / or due to an atomic concentration in the semiconductor layer sequence, spontaneous etching can occur during wet-chemical etching. These etchings can occur, for example, in the active region.

[0048] By forming the main structure and the secondary structure before wet-chemical etching, the occurrence of etching marks can be prevented or at least reduced. This is achieved, for example, by the presence of a large number of different crystal planes on the secondary structure and / or the main structure. Lateral propagation of etching marks is slowed, for example, on convex and / or concave structures. The secondary structures can, for example, influence the etching behavior during wet-chemical etching on the outcoupling facet. The facet quality, for example of the outcoupling facet, can be improved by avoiding etching marks.

[0049] According to at least one embodiment, the main structure has, at least in places, a crystal plane extending perpendicular to the main extension direction of the ridge waveguide, which forms the coupling-out facet. The electromagnetic radiation generated by the active region can be efficiently coupled out of the semiconductor laser at a crystal plane extending perpendicular to the main extension direction of the ridge waveguide.

[0050] According to at least one embodiment, the main structure has at least two steps along the main extension direction of the ridge waveguide. The lateral surface of the main structure can be convex and / or concave, in particular curved or bent, in the region of the two steps and / or in a transition from the first step to the further step.

[0051] This can prevent the occurrence of etching during wet chemical etching.

[0052] According to at least one embodiment of the method for producing a semiconductor laser, a first stage arranged closest to the ridge waveguide has a lateral extension which is smaller than an extension of a further stage located between the first stage and the output facet. For example, the first stage has a lateral

[0053] Extension to which is smaller than the width of the

[0054] Ridge waveguide. The main structure can then have an undercut in plan view of the resonator surface.

[0055] By forming an undercut, for example, different crystal planes and / or a multitude of directional changes are formed. These can have a positive influence on the quality of the semiconductor laser's resonator surface during wet-chemical etching, as etching is slowed by the multitude of directional changes or by the convex and / or concave structures of the main structure.

[0056] According to at least one embodiment of the method for producing a semiconductor laser, the widened region is structured in the lateral direction before forming the at least one main structure and / or the at least one secondary structure. The structuring has, for example, at least one transition at which a side surface of the widened region is curved and / or bent.

[0057] The widened region has, for example, at least one notch which extends in the direction away from the later formed output facet of the semiconductor laser. The widened region can have a large number of notches. For example, a side surface of the widened region is at least approximately wave-shaped. The notches can, for example, be trapezoidal or semicircular in plan view. The notches extend, for example, at least 2 pm, for example at least 5 pm away from the output facet of the semiconductor laser. For example, the notches project beyond the output facet by at most 50 pm, for example by at most 30 pm.

[0058] According to at least one embodiment of the method for producing a semiconductor laser, a recess is formed in the widened region such that the structure of the recess follows the structuring of the widened region. For example, the main structure is convex. Alternatively, it is possible to form the main structure solely by a region of the widened region that is planar in the lateral direction. The secondary structure is convex or concave, for example.

[0059] One idea behind this embodiment is to increase the edge length of the side surface of the main structure and / or the secondary structure. Furthermore, different crystal axes can be formed.

[0060] According to at least one embodiment of the method for producing a semiconductor laser, a plurality of semiconductor lasers are produced in a common process. The plurality of semiconductor lasers can be separated into multiple emitters and / or single emitters.

[0061] For example, the semiconductor laser array is singulated into semiconductor lasers. A semiconductor laser can then, for example, comprise only one ridge waveguide or a region of a ridge waveguide. Alternatively, the semiconductor laser array can be singulated into at least one multiple emitter. The finished semiconductor laser can then comprise more than one ridge waveguide. A main structure with an output facet can be arranged on each ridge waveguide. At least one secondary structure or a plurality of secondary structures can be arranged between the main structures. For example, the semiconductor laser array is separated or singulated along the recess in a direction parallel to the main extension direction of the widened region. It is also possible for the semiconductor laser array to be singulated parallel to the main extension direction of a ridge waveguide.The semiconductor laser array can be severed or separated between, for example, approximately centrally between two adjacent ridge waveguides.

[0062] According to at least one embodiment of the method for producing a semiconductor laser, the at least one secondary structure is created in the widened region laterally between the main structure and another main structure. The at least one secondary structure can prevent lateral etching from the facet. A semiconductor laser with an etched output facet can thus be produced efficiently.

[0063] According to at least one embodiment of the method for producing a semiconductor laser, the at least one secondary structure remains completely in the singulated semiconductor laser. If only one secondary structure is arranged between the main structure and the further main structure, alternatively, only approximately half of a secondary structure can remain in the singulated semiconductor laser between the main structures during singulation.

[0064] A semiconductor laser is also specified. The

[0065] For example, a semiconductor laser can be manufactured using a method described here. In other words, all features disclosed for the method for manufacturing a semiconductor laser can be used for the semiconductor laser, and vice versa.

[0066] According to at least one embodiment of the semiconductor laser, the semiconductor laser comprises a semiconductor layer sequence, wherein the semiconductor layer sequence has a ridge waveguide and a widened region. A main extension direction of the widened region runs transversely or perpendicular to a main extension direction of the ridge waveguide. The semiconductor layer sequence has a main structure which is connected to the ridge waveguide, wherein the main structure comprises an output facet of the semiconductor laser and is formed from the widened region. The main structure is designed in a step-like manner. Alternatively or additionally, the semiconductor layer sequence has a secondary structure which is formed from the widened region and is laterally spaced from the main structure.

[0067] The semiconductor laser described here can have an output facet produced by etching. This can be manufactured efficiently, cost-effectively, and with good quality. The efficiency and functionality of the semiconductor laser can thus be improved.

[0068] According to at least one embodiment of the semiconductor laser, the main structure and / or the secondary structure have / have at least one side surface. The at least one side surface runs, for example, at least partially transversely and / or perpendicularly to the main extension direction of the widened region. According to at least one embodiment of the semiconductor laser, the secondary structure is at least approximately trapezoidal, quarter-circular, or semicircular in plan view of the semiconductor layer sequence.

[0069] According to at least one embodiment of the semiconductor laser, the main structure has at least two steps along the main extension direction of the ridge waveguide.

[0070] According to at least one embodiment of the semiconductor laser, the semiconductor laser is designed as a multiple emitter with at least two main structures and at least one secondary structure, wherein the secondary structure is arranged at a distance from the main structures along the main extension direction of the widened region.

[0071] In the following, the method described here for producing a semiconductor laser and the semiconductor laser described here are explained in more detail in conjunction with embodiments and the associated figures.

[0072] Figures 1A and 1B show comparative examples of a semiconductor laser.

[0073] Figures 2 to 7 show steps in methods for producing semiconductor lasers in a schematic plan view according to embodiments.

[0074] Figures 8 and 9 show step-shaped main structures or secondary structures in a schematic plan view according to exemplary embodiments. Figures 10 to 12 show intermediate steps in methods for producing semiconductor lasers according to exemplary embodiments in a schematic plan view.

[0075] Figures 13 to 15 show intermediate steps in methods for producing semiconductor lasers according to further embodiments in a schematic plan view.

[0076] Figure 16 shows an intermediate step in the method for producing a semiconductor laser according to a further embodiment in a schematic plan view.

[0077] Identical, similar, or functionally identical elements are provided with the same reference symbols in the figures. The figures and the relative sizes of the elements depicted in the figures are not to scale. Rather, individual elements may be exaggerated for clarity and / or clarity.

[0078] Figure 1A shows a schematic representation of a resonator surface 46 of a semiconductor laser 1. An etched portion 7 has formed in an active region 21 of a semiconductor layer sequence 2. The etched portion 7 may have been created during wet-chemical etching. The resonator surface 46 may thus be partially undercut. The resonator surface 46 of the semiconductor laser 1 may, for example, be a facet of the semiconductor laser 1, in particular an output facet 41 of the semiconductor laser 1.

[0079] Figure 1B shows a comparative example of a semiconductor laser 1 with a resonator surface 46 having an etched portion 7 in the active region 21 of the semiconductor layer sequence 2. The semiconductor layer sequence 2 has a ridge waveguide 3 and a widened region 32. A side surface 42 of a main structure 4 can be partially undercut by the etched portion 7. One idea of ​​the method described here for producing a semiconductor laser 1 is to minimize, reduce, or prevent an etched portion 7 shown in Figure 1A or 1B.

[0080] Figure 2 shows a schematic plan view of a semiconductor layer sequence 2 in the method for producing a semiconductor laser 1 according to an exemplary embodiment. Here and below, plan view means, for example, that the viewing direction is perpendicular to a main extension plane of the semiconductor layer sequence 2. In the method step shown here, a semiconductor layer sequence 2 is provided.

[0081] The semiconductor layer sequence 2 has at least one ridge waveguide 3. The semiconductor layer sequence 2 can have at least one further ridge waveguide 31. For example, the semiconductor layer sequence 2 has a plurality of ridge waveguides 3 and 31. The ridge waveguide 3 and the further ridge waveguide 31 run parallel or approximately parallel to one another.

[0082] The semiconductor layer sequence 2 has a widened region 32. A main extension direction of the widened region 32 runs transversely or perpendicularly to a main extension direction of the ridge waveguide 3. For example, the widened region 32 also runs transversely or perpendicularly to a main extension direction of the further ridge waveguide 31. The widened region 32 can be formed contiguously, in particular in one piece. For example, the widened regions 32 of the ridge waveguides 3 and 31 form a contiguous widened region 32.

[0083] Figure 3 shows a schematic representation of a further method step in the method for producing a semiconductor laser 1. Figure 3 shows a semiconductor laser array 10. The method step shown in Figure 3 follows, for example, the method step shown in Figure 2. At least one main structure 4 of the semiconductor laser 1 is formed from the widened region 32. The main structure 4 is connected to the ridge waveguide 3. The main structure 4 comprises a resonator surface 46 of the semiconductor laser 1. The resonator surface 46 is, for example, an output facet 41 of the semiconductor laser 1.

[0084] At least one secondary structure 5 can be formed from the widened region 32. The at least one secondary structure 5 can be formed during the formation of the main structure 4. The at least one secondary structure 5 is then laterally spaced from the at least one main structure 4. For example, the secondary structure 5 is laterally spaced from all main structures 4, 45 produced from the widened region 32. The secondary structure 5 is arranged between two adjacent main structures 4, 45.

[0085] Figure 4 shows a step in a method for producing a semiconductor laser 1 according to an exemplary embodiment in a schematic plan view. The method step illustrated in Figure 4 is the finished semiconductor laser array 10, which can be separated into semiconductor laser 1, single emitter 12 and / or multiple emitter 11 in a subsequent method step (see Figure 6).

[0086] In the exemplary embodiment shown here, the at least one main structure 4 and the at least one secondary structure 5 of the semiconductor laser 1 are trapezoidal in shape. Alternatively or additionally, the main structures 4, 45 can be convex and / or concave in plan view, for example, stepped and / or circular in shape. For example, at least one main structure 4, 45 is trapezoidal, at least one main structure 4, 45 is circular and / or at least one main structure 4, 45 is stepped. All main structures 4, 45 of the semiconductor laser array 10 can have the same or approximately the same shape or at least partially different shapes from one another. The main structure

[0087] 4 has a side surface 42 .

[0088] The secondary structure 5 is arranged between two adjacent main structures 4, 45. The secondary structure has a side surface 51. A further secondary structure 52 is arranged between the two adjacent main structures 4, 45. The further secondary structure 52 is arranged between the secondary structure 5 and the further main structure 45.

[0089] For example, a lateral size d2 of the secondary structure

[0090] 5 be smaller than or equal to a lateral size d i of the main structure 4, 45. For example, the lateral size of both the main structure 4, 45 and the secondary structure 5 can be greater than 1 pm. Furthermore, the lateral size of both the main structure 4, 45 and the secondary structure can be smaller than 100 pm. For example, the main structures 4, 45 and / or the secondary structures 5, 52 were produced or defined in the widened region by forming a recess 6 by means of dry-chemical etching. The recess 6 can extend in the vertical direction through the semiconductor layer sequence 2. For example, the recess 6 extends in the vertical direction completely through the semiconductor layer sequence 2, for example into a substrate, not shown.

[0091] The recess 6 is formed, for example, as a continuous trench in the lateral direction. In other words, the recess 6 in the widened region 32 is formed continuously and extends in the lateral direction completely or at least approximately completely over the extent of the widened region 32. For example, an extent of the recess 6 along the main extension direction of the widened region 32 corresponds at least approximately to the extension of the widened region 32 along the main extension direction of the widened region 32. At least approximately can mean here that the extensions of the recess 6 and of the widened region 32 along the main extension direction of the widened region 32 are the same. Alternatively, the recess 6 can have a smaller extension along the main extension direction of the widened region 32.

[0092] The recess 6 extends completely across the width of the ridge waveguide 3. The width of the ridge waveguide 3 is the extent of the ridge waveguide 3 perpendicular to the main extension direction of the ridge waveguide 3. The recess 6 is between a first partial area 35 of the

[0093] Ridge waveguide 3 and a further subregion 36 of the ridge waveguide 3. The subregions 35, 36 of the ridge waveguide 3 can be assigned to different semiconductor lasers 1 after the semiconductor laser array 10 has been separated.

[0094] In the widened region 32, a main structure 4 is arranged on the first partial region 35 of the ridge waveguide 3 and on the further partial region 36 of the ridge waveguide 3.

[0095] The main structure 4 and the secondary structure 5 are formed, for example, using a common etching process. The output facet of the semiconductor laser 1 is produced, for example, by wet-chemical etching.

[0096] Figure 5 shows a semiconductor laser array 10 according to a further embodiment.

[0097] The semiconductor laser array 10 of Figure 5 differs from the semiconductor laser array 10 shown in Figure 4 in that only one secondary structure 5 is arranged between two adjacent main structures 4, 45.

[0098] Figure 6 shows a semiconductor laser array 10 according to a further embodiment.

[0099] The semiconductor laser array 10 of Figure 6 differs from the semiconductor laser array 10 shown in Figure 4 in that a secondary structure 5 and two further secondary structures 52 are arranged between the main structure 4 and the further main structure 45. A distance between the main structure 4 and the further main structure 45 can be at least approximately the same in the exemplary embodiments of Figures 4 to 6. Thus, an extension of the recess 6 between the main structure 4 and the secondary structure 5 or an extension of the secondary structure 5 along the main extension direction of the widened region 32 can be different from one another. Furthermore, here and in the further exemplary embodiments, the main structures 4, 45 and the secondary structures 5, 52 can have different extensions, shapes and distances from one another.

[0100] The plurality of semiconductor lasers 1 in the semiconductor laser array 10 can be manufactured in a common process. Subsequently, the semiconductor laser array 10 can be singulated into multiple emitters 11 and / or single emitters 12. The semiconductor laser array is singulated, for example, along the singulation line LI and the singulation line L2. At least one secondary structure 5 can remain completely in the singulated semiconductor laser 1.

[0101] Figure 7 shows a semiconductor laser array 10 according to a further exemplary embodiment. The semiconductor laser array 10 comprises the ridge waveguide 3 with a first partial region 35 and a further partial region 36 and the further ridge waveguide 31. The further ridge waveguide also has a first and a second region. The first region 35 and the further region 36 are spaced from one another by a recess 6. A main structure 4 is arranged on the first partial region 35 of the ridge waveguide 3. The main structure 4 is designed in a step-like manner. The main structure 4 has two steps 43, 44. In particular, the main structure 4 can have at least two steps 43, 44. A first step 43 is the step of the main structure 4 that is arranged closest to the ridge waveguide. A further stage 44 is arranged between the coupling facet 41 of the main structure 4 and the first stage 43.Alternatively or additionally, the further stage 44 may have the coupling facet 41.

[0102] Figure 8 shows a schematic plan view of a stepped main structure 4 according to an exemplary embodiment. The main structure 4 has a first step 43 and a further step 44. Thus, the exemplary embodiment of the main structure 4 shown here has two steps.

[0103] Figure 9 shows a schematic plan view of a stepped main structure 4 according to a further exemplary embodiment. Compared to the exemplary embodiment shown in Figure 8, the main structure 4 shown here comprises a first step 43 and two further steps 44. The further step 44 has the output facet 41 of the semiconductor laser 1 on the side facing away from the first step 43.

[0104] Alternatively, Figures 8 and 9 can also show embodiments of a step-shaped secondary structure 5.

[0105] Figures 10 to 12 show a schematic plan view of a semiconductor laser array 10 according to an exemplary embodiment. In the exemplary embodiments of Figures 10 to 12, for example, the recess 6 is minimized. As a result, the contact region of the semiconductor layer sequence 2, which is in contact with an etching medium during wet-chemical etching, is minimized. This makes it possible to reduce or prevent the formation of etchings. In the exemplary embodiments of Figures 10 to 12, secondary structures 5 can also be produced.

[0106] Figure 10 shows an exemplary embodiment of a semiconductor laser array 10 with a continuous widened region 32. Alternatively, the widened region 32 can be formed from widened regions arranged at a distance from one another, which are shown, for example, in Figure 11.

[0107] In the embodiment of Figure 12, the right recess 6 projects beyond the widened area 32.

[0108] Figure 13 shows a schematic plan view of the semiconductor layer sequence 2 in a method for producing at least one semiconductor laser 1 according to a further exemplary embodiment. The widened region 32 is structured in the lateral direction when the semiconductor layer sequence 2 is provided, that is to say before the formation of the at least one main structure 4 and / or the at least one secondary structure 5, and the structuring has at least one transition 33 at which a side surface 34 of the widened region 32 is curved and / or kinked. For example, the widened region has notches 37.

[0109] Figures 14 and 15 show a schematic plan view of a semiconductor laser array 10 according to a further exemplary embodiment. The semiconductor laser array 10 of Figures 14 and 15 was formed by forming at least one main structure 4 and at least one secondary structure 5 from the widened region of the semiconductor layer sequence 2 shown in Figure 13. The recess 6 is formed in the widened region 32 such that the structure of the recess 6 follows the structuring of the widened region 32. In the exemplary embodiment of Figure 14, the main structure 4 was formed as a projection in the widened region 32. The main structure 4 is designed in a step-like manner. Alternatively, as shown in Figure 15, the main structure 4 is not designed in a step-like manner. In particular, the side surface of the main structure 4 is defined by the notch 37 of the widened region 32.

[0110] Figure 16 shows a semiconductor laser array 10 according to a further exemplary embodiment. The semiconductor laser array 10 has a plurality of semiconductor lasers 1 to be produced. The semiconductor laser 1 comprises at least the ridge waveguide 3, wherein a main structure 4 from the widened region 32 is arranged on the ridge waveguide 3. The main structure 4 is designed in a step-like manner. The main structure 4 has a first step 43 arranged closest to the ridge waveguide and a further step 44. The further step 44 is located between the first step 43 and the output facet 41 of the semiconductor laser 1. The first step 43 has a lateral extent which is smaller than an extent of the further step 44. The semiconductor laser array 10 of Figure 16 has two secondary structures 5, 52 between two adjacent main structures 4, 45.Alternatively, it is possible for the semiconductor laser array 10 to have no, only one, or a plurality of secondary structures 5, 52 between adjacent main structures 4, 45. The features and exemplary embodiments described in connection with the figures can be combined with one another according to further exemplary embodiments, even if not all combinations are described explicitly. Furthermore, the exemplary embodiments described in connection with the figures can alternatively or additionally have further features according to the description in the general part. The invention is not limited to the exemplary embodiments by the description based on these. Rather, the invention encompasses any new feature and any combination of features, which in particular includes any combination of features in the claims, even if this feature or this combination itself is not explicitly stated in the claims or exemplary embodiments.

[0111] Reference symbol list

[0112] 1 semiconductor laser

[0113] 10 semiconductor laser array

[0114] 11 multiple emitters

[0115] 12 single emitters

[0116] 2 Semiconductor layer sequence

[0117] 21 active area

[0118] 3 ridge waveguides

[0119] 31 Additional ridge waveguide

[0120] 32 Widened area

[0121] 33 Transition

[0122] 34 Side surface of the widened area

[0123] 35 first section of the ridge waveguide

[0124] 36 further section of the ridge waveguide

[0125] 37 Notch of the widened area

[0126] 4 Main structure

[0127] 41 output facet

[0128] 42 Side surface of the main structure

[0129] 43 First stage

[0130] 44 Next level

[0131] 45 additional main structures

[0132] 46 resonator surface

[0133] 5 Secondary structure

[0134] 51 Side surface of the secondary structure

[0135] 52 additional secondary structures

[0136] 6 Recess

[0137] 7 Etching

[0138] LI separation line

[0139] L2 further separation line

Claims

Patent claims 1. A method for producing at least one semiconductor laser (1), comprising the following steps: - Providing a semiconductor layer sequence (2) with at least one ridge waveguide (3) and a widened region (32), wherein a main extension direction of the widened region (32) runs transversely or perpendicularly to a main extension direction of the ridge waveguide (3), and - forming at least one main structure (4) of the semiconductor laser (1) from the widened region (32), wherein the main structure (4) is connected to the ridge waveguide and comprises a coupling-out facet (41) of the semiconductor laser (1), and wherein - the main structure (4) is designed in a stepped manner and has at least two steps (43, 44) along the main extension direction of the ridge waveguide (3) and / or - at least one secondary structure (5) is formed from the widened region (32), which is laterally spaced from the main structure (4) and has a lateral size along the main extension direction of the widened region (32) that is less than or equal to the lateral size of the main structure (4).

2. A method for producing a semiconductor laser (1) according to the preceding claim, wherein the coupling-out facet (41) of the semiconductor laser (1) is produced by means of wet-chemical etching.

3. A method for producing a semiconductor laser (1) according to one of the preceding claims, wherein the at least one Secondary structure (5) in plan view of the Semiconductor layer sequence (2) is formed trapezoidally or semicircularly.

4. A method for producing a semiconductor laser (1) according to one of the preceding claims, wherein - the semiconductor layer sequence (2) comprises at least two ridge waveguides (3, 31), - at least two main structures (4, 45) are formed in the widened region (23), and - at least two secondary structures (5, 52) are formed in the widened region (23), wherein the at least two secondary structures are arranged between the main structure (4) and an adjacent further main structure (45).

5. A method for producing a semiconductor laser (1) according to one of claims 1 to 4, wherein the main structure (4) and the at least one secondary structure (5) are formed in a common etching process.

6. A method for producing a semiconductor laser (1) according to one of the preceding claims, wherein the main structure (4) has, at least in places, a crystal plane running perpendicular to the main extension direction of the ridge waveguide (3), which forms the coupling-out facet (41).

7. A method for producing a semiconductor laser (1) according to one of the preceding claims, wherein a first step (43) arranged closest to the ridge waveguide (3) has a lateral extent which is smaller than an extent of a further step (44) which is located between the first step (43) and the coupling-out facet (41).

8. A method for producing a semiconductor laser (1) according to one of the preceding claims, wherein the widened region (32) is structured in the lateral direction before the formation of the at least one main structure (4) and / or the at least one secondary structure (5), and the structuring has at least one transition (33) at which a side surface (34) of the widened region (32) is curved and / or kinked.

9. A method for producing a semiconductor laser (1) according to claim 8, wherein a recess (6) is formed in the widened region (32) such that the structure of the recess (6) follows the structuring of the widened region (32).

10. A method for producing a semiconductor laser (1) according to one of the preceding claims, wherein - a plurality of semiconductor lasers (1) are manufactured in a common process, and - the multitude of semiconductor lasers (1) in multiple emitters (11) and / or single emitter (12).

11. A method for producing a semiconductor laser (1) according to the preceding claim, wherein the at least one secondary structure (5) is produced in the widened region (32) laterally between the main structure (4) and a further main structure (45).

12. A method for producing a semiconductor laser (1) according to one of claims 9 to 10, wherein the at least one secondary structure (5) remains completely in the singulated semiconductor laser (1).

13. Semiconductor laser (1) with a semiconductor layer sequence (2), wherein - the semiconductor layer sequence (2) has a ridge waveguide (3) and a widened region (32), - a main extension direction of the widened region (32) runs transversely or perpendicularly to a main extension direction of the ridge waveguide (3), - the semiconductor layer sequence (2) has a main structure (4), and - the main structure (4) is connected to the ridge waveguide (3), comprises a coupling-out facet (41) of the semiconductor laser (1) and is formed from the widened region (32), and wherein - the main structure (4) is designed in a stepped manner and has at least two steps (43, 44) along the main extension direction of the ridge waveguide (3) and / or - the semiconductor layer sequence has at least one secondary structure (5) which is formed from the widened region (32) and which is separated from the main structure (4) is laterally spaced and has a lateral size along the main extension direction of the widened region (32) which is less than or equal to the lateral size of the main structure (4).

14. Semiconductor laser (1) according to claim 13, wherein the main structure (4) and / or the secondary structure (5) have at least one side surface (42, 51), and the at least one side surface (42, 51) extends at least partially transversely and / or perpendicularly to the main extension direction of the widened region (32).

15. Semiconductor laser (1) according to one of claims 13 to 14, wherein the secondary structure (5) is at least approximately trapezoidal, quarter-circular or semicircular in plan view of the semiconductor layer sequence (2).

16. Semiconductor laser (1) according to one of claims 13 to 15, which is designed as a multiple emitter (11) with at least two main structures (4, 45) and at least one secondary structure (5), wherein the secondary structure (5) is arranged along the main extension direction of the widened region (32) at a distance from the main structures (4, 45).