Light source device

Abstract

To provide a light source device which can stabilize a radiant flux by suppressing thermal effects of changes in external environment on an irradiation target object side on a light-emitter, and suppresses thermal effects of the light-emitter on the irradiation target object.SOLUTION: A light source device is provided, comprising an integrating sphere, a light emitter with a light-emitting part located in the integrating sphere, an output port for outputting light from the integrating sphere, a flow channel having a circulating portion extending around the output port, and a heat exchanger including the circulating portion of the flow channel and being thermally connected to the integrating sphere.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a light source device. [Background technology]

[0002] 2. Description of the Related Art A light source device is known that has an integrating sphere, a light emitter having a light emitting portion located inside the integrating sphere, and an exit port that emits light from the integrating sphere (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-014590 A Summary of the Invention [Problem to be solved by the invention]

[0004] It is preferable that the light source device as described above can stabilize the radiant flux by suppressing the thermal effect on the light emitter caused by changes in the external environment on the object to be irradiated, and can also suppress the thermal effect on the object to be irradiated from the light emitter.

[0005] Therefore, the object of the present disclosure is to provide a light source device that can stabilize the radiant flux by suppressing the thermal effects on the light-emitting body caused by changes in the external environment of the object to be irradiated, and that can suppress the thermal effects on the object to be irradiated from the light-emitting body. [Means for solving the problem]

[0006] One aspect of the present disclosure is as follows.

[0007] [1] An integrating sphere; a light emitter having a light emitting portion located within the integrating sphere; an exit port for exiting the light from the integrating sphere; a flow path having a turn extending around the ejection port; a heat exchanger having the circulating portion of the flow path and thermally connected to the integrating sphere;

[0008] [2] the heat exchange unit includes a support member that supports the integrating sphere and a heat conduction member that overlaps the support member, the thermally conductive member has a circumferential groove extending around the ejection port; The light source device according to [1], wherein the circumferential portion of the flow path is formed by the circumferential groove of the heat conduction member and the support member.

[0009] [3] The heat exchange unit has a cover member, The light source device according to [2], wherein the heat conductive member is sandwiched and held between the support member and the cover member.

[0010] [4] an overlapping member including the support member and the heat conducting member has an annular shape; The light source device according to [2] or [3], wherein an annular gap is formed between an inner surface of the overlapping member and the integrating sphere.

[0011] [5] The light source device described in [4], wherein the heat exchange portion has a sealing member arranged between the support member and the heat conduction member so as to extend annularly along the inner peripheral edge portion of the overlapping member, radially inward from the circumferential portion of the flow path.

[0012] [6] The light source device according to any one of [1] to [5], further comprising a heat conduction suppressing member that is held by the integrating sphere, into which the light emitter is inserted, and that suppresses heat conduction from the light emitter to the integrating sphere.

[0013] [7] The light source device according to [6], wherein the heat conduction suppressing member has a reflective surface that reflects light inside the integrating sphere.

[0014] [8] The light source device according to [7], wherein the heat conduction suppressing member has a coating layer that forms the reflective surface.

[0015] [9] The light source device according to [6], further comprising a reflector having a reflective surface that overlaps the heat conduction suppressing member and reflects light within the integrating sphere.

[0016]

[10] The light source device according to any one of [6] to [9], wherein the thermal conductivity of the heat-conduction suppressing member is 0.5 W / m·k or less.

[0017]

[11] The light source device according to any one of [1] to

[10] , further comprising a fluid control device for controlling a temperature or a flow rate, or both, of a fluid flowing through the flow path.

[0018]

[12] A measurement device comprising: a light source device according to any one of claims [1] to

[11] ; and a detection unit that detects a physical quantity of an object to be measured as an irradiation target by receiving light irradiated onto the object to be measured by the light source device.

[0019]

[13] The measuring device according to

[12] , further comprising a moving device that moves the light source device and the detection unit in a direction intersecting a direction of movement of the object to be measured.

[0020]

[14] The object to be measured is paper, a film, a battery separator, or any combination thereof; The measuring apparatus according to claim 12, wherein the physical quantity of the object to be measured is thickness, basis weight, or moisture, or any combination thereof. Effect of the Invention

[0021] According to the present disclosure, it is possible to provide a light source device that can stabilize the radiant flux by suppressing the thermal effects on the light-emitting body caused by changes in the external environment on the object to be irradiated, and that can suppress the thermal effects on the object to be irradiated from the light-emitting body. [Brief description of the drawings]

[0022] [Figure 1] 1 is a cross-sectional view showing a light source device according to an embodiment. [Diagram 2] FIG. 11 is a cross-sectional view showing a part of a light source device according to another embodiment. [Diagram 3] FIG. 11 is a cross-sectional view showing a part of a light source device according to another embodiment. [Figure 4] FIG. 1 is an external view showing a measurement device according to an embodiment. [Diagram 5] FIG. 13 is an external view showing a measurement device according to another embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings.

[0024] As shown in FIG. 1, light source device 1 according to one embodiment includes an integrating sphere 2, a light emitter 3 having a light emitting portion 3a located within integrating sphere 2, an emission port 4 for emitting light from integrating sphere 2, a flow path 5 having a circulating portion 5a extending around emission port 4, and a heat exchanger 6 having the circulating portion 5a of flow path 5 and thermally connected to integrating sphere 2.

[0025] According to the above configuration, by flowing a fluid having a lower temperature than the light-emitting unit 3a as a heat exchange medium through the flow path 5 during light emission, the temperature of the heat exchange unit 6 can be maintained at a predetermined temperature lower than that of the light-emitting unit 3a by heat exchange between the fluid flowing through the circulation unit 5a and the heat exchange unit 6. Therefore, by setting the above-mentioned predetermined temperature to an appropriate temperature sufficiently lower than the temperature of the light-emitting unit 3a, the heat exchange unit 6 can suppress the thermal influence from the external environment of the irradiation object 7 side, the heat exchange unit 6, the integrating sphere 2, and the light-emitting unit 3 to be propagated in this order, and the heat exchange unit 6 can suppress the thermal influence from the light-emitting unit 3, the integrating sphere 2, the heat exchange unit 6, and the external environment of the irradiation object 7 side to be propagated in this order. Therefore, according to the above configuration, the light source device 1 can be realized that can stabilize the radiant flux by suppressing the thermal influence on the light-emitting unit 3 from the change in the external environment of the irradiation object 7 side, and can suppress the thermal influence on the irradiation object 7 from the light-emitting unit 3. The above effect is particularly remarkable when the light-emitting unit 3 is configured as a heater light source mainly in the mid-infrared wavelength range such as ceramic. The fluid is not particularly limited and may be a gas or a liquid. The change in the external environment on the irradiation target 7 side is, for example, a change in temperature or heat transfer rate or both due to, for example, a relative movement of the external atmosphere (e.g., air) with respect to the measuring device 19 (e.g., the generation of wind or the movement of the measuring device 19, or both).

[0026] The heat exchanger 6 has a support member 6a that supports the integrating sphere 2 and a heat conductive member 6b that overlaps the support member 6a. The heat conductive member 6b has a circumferential groove 6b1 that extends around the injection port 4, and the circumferential portion 5a of the flow path 5 is formed by the circumferential groove 6b1 of the heat conductive member 6b and the support member 6a. According to the above configuration, the support member 6a can support the integrating sphere 2 while ensuring thermal connection with the integrating sphere 2. In addition, the heat conductive member 6b having the circumferential groove 6b1 can realize good heat exchange between the fluid flowing through the circumferential portion 5a and the heat exchanger 6. The heat conductive member 6b is formed of, for example, a metal, and more specifically, is formed of, for example, aluminum, copper, or the like. In addition, when the term "support" is used in this application, the configuration for supporting is not particularly limited, but may be a configuration in which the integrating sphere 2 is directly connected or placed on the support member 6a, or a configuration in which the integrating sphere 2 is indirectly connected or placed on the support member 6a via another member. The configuration in which support member 6a supports integrating sphere 2 is not particularly limited, but from the viewpoint of ensuring good thermal connection between support member 6a and integrating sphere 2, it is preferable that support member 6a be configured to directly connect to or place integrating sphere 2, as shown in FIG. 1.

[0027] The flow path 5 has an inlet portion 5b connected to the upstream end of the circulating portion 5a and an outlet portion 5c connected to the downstream end of the circulating portion 5a, and the inlet portion 5b can be formed of one or more inlet paths, the outlet portion 5c can be formed of one or more outlet paths, and the circulating portion 5a can be formed of one or more circulating paths. The circulating path may have a branching portion that branches from the upstream side toward the downstream side, or a merging portion that merges from the upstream side toward the downstream side, or may have both of these. The circulating portion 5a may extend around the entire circumference of the injection port 4, or may extend around the injection port 4 without extending around the entire circumference.

[0028] The inlet section 5b is formed by an inlet tube flow path 5b1 formed inside the inlet tube 8, and an inlet radial flow path 5b2 formed between the support member 6a and the heat conductive member 6b so as to connect the downstream end of the inlet tube flow path 5b1 and the upstream end of the winding section 5a. According to the above configuration, the inlet section 5b can be realized with a simple structure.

[0029] The outflow section 5c is formed by an outflow tube flow passage 5c1 formed inside the outflow tube 9, and an outflow radial flow passage 5c2 formed between the support member 6a and the heat conductive member 6b so as to connect the downstream end of the circulating section 5a and the upstream end of the outflow tube flow passage 5c1. According to the above configuration, the outflow section 5c can be realized with a simple structure.

[0030] The flow path 5 may be configured to discharge the fluid from the outlet portion 5c, or may be configured to return the fluid from the outlet portion 5c to the inlet portion 5b for circulation.

[0031] The heat exchanger 6 has a cover member 6c, and the heat conductive member 6b is sandwiched and held between the support member 6a and the cover member 6c. According to the above configuration, the heat conductive member 6b can be easily held by the support member 6a and the cover member 6c. In addition, the cover member 6c can suppress the propagation of thermal influence between the heat exchanger 6 and the external environment of the irradiation target 7 side.

[0032] Overlapping member 6d, which is composed of supporting member 6a and thermally conductive member 6b, is annular, and annular gap 10 is formed between the inner peripheral surface of overlapping member 6d and integrating sphere 2. According to the above configuration, annular gap 10 formed between the inner peripheral surface of overlapping member 6d and integrating sphere 2 allows expansion and contraction of integrating sphere 2 due to heat, thereby suppressing the occurrence of thermal stress between integrating sphere 2 and overlapping member 6d.

[0033] The heat exchange unit 6 has a sealing member 6e disposed between the support member 6a and the heat conductive member 6b so as to extend annularly along the inner peripheral edge of the overlapping member 6d radially inward from the circumferential portion 5a of the flow path 5. According to the above configuration, the sealing member 6e can prevent the fluid flowing through the circumferential portion 5a from flowing out through between the support member 6a and the heat conductive member 6b toward the annular gap 10 formed between the inner peripheral surface of the overlapping member 6d and the integrating sphere 2. The sealing member 6e has elasticity in this embodiment, but is not limited thereto.

[0034] Cover member 6c has ejection port outer periphery cover portion 6c1 located outside integrating sphere 2 at the outer periphery of ejection port 4. According to the above configuration, the thermal influence in both directions between integrating sphere 2 at the outer periphery of ejection port 4 and the external environment on the irradiation target 7 side can be suppressed by ejection port outer periphery cover portion 6c1.

[0035] Light source device 1 has heat conduction suppressing member 11, which is held by integrating sphere 2 and has light emitter 3 inserted therein, and which suppresses heat conduction from light emitter 3 to integrating sphere 2. According to the above configuration, by suppressing heat conduction from light emitter 3 to integrating sphere 2, it is possible to further stabilize the radiant flux and further suppress the thermal effect on irradiation object 7. Note that, although light emitter 3 is rod-shaped in this embodiment, the shape is not limited to this.

[0036] Light emitter 3 is inserted so as not to come into contact with heat conduction suppressing member 11. According to the above configuration, heat conduction between light emitter 3 and integrating sphere 2 can be further suppressed.

[0037] Heat conduction suppressing member 11 has reflective surface 11a that reflects light inside integrating sphere 2. The reflection by reflective surface 11a may be, for example, diffuse reflection due to an uneven structure, or may be specular reflection. With the above configuration, reflective surface 11a (a surface with high reflectivity) can improve (increase) the radiant flux of light emitted from exit port 4 compared to when the surface of heat conduction suppressing member 11 is an absorbing surface. Furthermore, the diffuse reflection surface can improve the uniformity of the light emitted from exit port 4.

[0038] The reflective surface 11a may be configured to reflect light in the mid-infrared wavelength range. According to the above configuration, when the light emitter 3 is configured as a heater light source mainly in the mid-infrared wavelength range, such as ceramic, the radiant flux of the light emitted from the emission port 4 can be improved by the reflective surface 11a of the heat conduction suppressing member 11.

[0039] 2, the heat conduction suppressing member 11 may have a coating layer 11b forming the reflective surface 11a, and more specifically, may have a configuration including a heat conduction suppressing plate 11c and the coating layer 11b. According to the above configuration, the radiant flux of the light emitted from the emission port 4 can be improved by an efficient structure using the coating layer 11b. The coating layer 11b is formed of, for example, gold or aluminum. The reflection by the reflective surface 11a of the coating layer 11b may be a diffuse reflection due to, for example, an uneven structure, or may be a specular reflection.

[0040] As shown in the example of FIG. 3, the light source device 1 may have a reflector 23 having a reflecting surface 23a that overlaps the heat conduction suppressing member 11 and reflects light in the integrating sphere 2. According to the above configuration, the radiant flux of light emitted from the emission port 4 can be improved by an efficient structure using the reflector 23a. Although not shown, the reflector 23 may have a coating layer that forms the reflecting surface 23a. In this case, the reflection by the reflecting surface 23a of the coating layer may be, for example, a diffuse reflection due to an uneven structure or may be a specular reflection. The reflector 23 may not have a coating layer, and in this case, it is formed of aluminum, for example. In addition, in this case, the reflection by the reflecting surface 23a of the reflector 23 may be, for example, a diffuse reflection due to an uneven structure or may be a specular reflection.

[0041] Although there are no particular limitations on the thermal conductivity of heat-conduction suppressing member 11, it is preferable that the thermal conductivity be equal to or less than 0.5 W / m·k. According to the above configuration, heat-conduction suppressing member 11 can satisfactorily suppress the heat conduction from light-emitting body 3 to integrating sphere 2.

[0042] Inner surface 2a of integrating sphere 2 has a shape that follows a spherical surface and reflects light. According to the above configuration, inner surface 2a of integrating sphere 2 can efficiently improve the uniformity of the light emitted from emission port 4. Note that inner surface 2a of integrating sphere 2 is not limited to a shape that follows a spherical surface. The reflection by inner surface 2a of integrating sphere 2 may be diffuse reflection or specular reflection.

[0043] The light source device 1 has a reflector 12 that reflects light on one or both surfaces on a straight line passing through the light emitting unit 3a and the exit port 4. According to the above configuration, the number of reflections in the integrating sphere 2 is increased by suppressing the light from the light emitting unit 3a from directly reaching the exit port 4 according to the positional relationship between the reflector 12, the light emitting surface of the light emitting unit 3a, and the exit port 4, and the uniformity of the light emitted from the exit port 4 can be efficiently improved. Although not shown, the reflector 12 can be held at a desired position by providing a holding portion 15 that connects the reflector 12 to the integrating sphere 2. The reflector 12 is plate-shaped, but is not limited thereto. The reflection by the reflector 12 may be a diffuse reflection or a specular reflection.

[0044] Light source device 1 has window portion 14 at exit port 4 that separates inner space 13 of integrating sphere 2 from the external environment on the irradiation object 7 side and transmits light. According to the above configuration, window portion 14 can suppress the thermal effect on light-emitting body 3 from changes in the external environment on the irradiation object 7 side via inner space 13 of integrating sphere 2, and as a result, the radiant flux can be further stabilized. In addition, window portion 14 can suppress the intrusion of dust from the external environment into integrating sphere 2.

[0045] Light source device 1 has a holder 15 that holds light emitter 3 at a predetermined position relative to integrating sphere 2, and holder 15 is formed by a housing 16 that covers integrating sphere 2 on the side opposite to the irradiation target 7 side as viewed from heat exchanger 6, and housing 16 is connected to light emitter 3 on the outside of integrating sphere 2. According to the above configuration, the thermal influence on light emitter 3 caused by changes in the external environment can be suppressed by housing 16, and as a result, the radiant flux can be further stabilized. Note that holder 15 that holds light emitter 3 at a predetermined position relative to integrating sphere 2 is not limited to a configuration formed by housing 16.

[0046] The housing 16 has a light-emitting body connecting member 16a into which the light-emitting body 3 is inserted and which connects to the light-emitting body 3, and a housing main body 16b which supports the light-emitting body connecting member 16a. According to the above configuration, the thermal effect on the light-emitting body 3 caused by changes in the external environment can be suppressed by the housing main body 16b, and as a result, the radiant flux can be further stabilized. In addition, the light-emitting body connecting member 16a allows the light-emitting body 3 to be easily supported by the housing main body 16b.

[0047] The light source device 1 has a housing connection part 17 that is connected to the housing 16 and covers the light emitter 3 on the outside of the housing 16. According to the above configuration, the thermal effect on the light emitter 3 caused by changes in the external environment can be further suppressed by the housing connection part 17, and as a result, the radiant flux can be further stabilized. Note that, from the viewpoint of suppressing the thermal effect on the light emitter 3 caused by changes in the external environment by the housing main body part 16b, the light emitter connecting member 16a may be indirectly connected to or placed on the housing main body part 16b via the housing connection part 17.

[0048] The light source device 1 has a fluid control device 18 that controls the temperature, the flow rate, or both of the fluid flowing through the flow path 5. According to the above configuration, the temperature of the heat exchanger 6 can be appropriately controlled by appropriately controlling the temperature, the flow rate, or both of the fluid.

[0049] 4, a measuring device 19 according to one embodiment includes a light source device 1 and a detection unit 20 that detects a physical quantity of an object to be measured as an irradiation target 7 by receiving light irradiated onto the object to be measured by the light source device 1. According to the above configuration, it is possible to realize a measuring device 19 that can stabilize the radiant flux by suppressing the thermal effect on the light emitter 3 caused by changes in the external environment of the object to be measured, and can also suppress the thermal effect on the object to be measured from the light emitter 3.

[0050] The measuring device 19 is a transmissive type in which the light source device 1 and the detection unit 20 are arranged on different sides of the object to be measured, but it may also be configured as a reflective type in which the light source device 1 and the detection unit 20 are arranged on the same side of the object to be measured, as shown in Figure 5.

[0051] The measuring device 19 has a moving device 21 that moves the light source device 1 and the detection unit 20 in a cross direction (indicated by a thick double-headed arrow in Figs. 4 and 5) that crosses the moving direction of the object to be measured (indicated by a thick double-headed arrow in Figs. 4 and 5). According to the above configuration, while the object to be measured is moved in-line by a conveying device 22 as shown in the figure, the physical quantity of the object to be measured can be measured within the moving range of the moving device 21 in the cross direction. The external environment on the side of the irradiation object 7 changes, for example, due to the above movement.

[0052] The object to be measured is, for example, paper, film, or battery separator, or any combination thereof, and the physical quantity of the object to be measured is, for example, thickness, basis weight, or moisture, or any combination thereof. The basis weight of paper can be measured, for example, by a radiation method or an infrared absorption method. Generally, since the density of a film is generally constant, the thickness is often used as the measurement parameter, rather than the basis weight. The thickness of a film can be measured, for example, by detecting CH absorption by an infrared absorption method. The moisture content of paper, etc. can be measured, for example, by detecting OH absorption by an infrared absorption method.

[0053] The present disclosure is not limited to the above-described embodiment, and various modifications are possible without departing from the spirit and scope of the present disclosure. [Explanation of symbols]

[0054] 1 Light source device 2 integrating sphere 2a Inner surface 3. Luminous object 3a Light emitting part 4 Injection Port 5 Flow Path 5a Circling section 5b Inlet 5b1 Inlet tube flow path 5b2 Inlet radial flow passage 5c Outlet 5c1 Outlet tube flow path 5c2 Outlet radial flow passage 6 Heat exchange section 6a Support member 6b Thermal conductive material 6b1 Circumferential groove 6c Cover material 6c1 Outer cover of ejection port 6d Overlapping member 6e Sealing material 7. Irradiation target 8 Inlet tube 9 Outlet tube 10. Gap 11. Heat conduction suppression material 11a Reflective surface 11b Coating layer 11c Heat conduction suppression plate 12 Reflector 13 Inner Space 14 Window section 15 Holding part 16 Case 16a Light-emitting body connecting member 16b Housing body 17 Housing connection part 18 Fluid Control Device 19 Measuring Equipment 20 Detection unit 21 Mobile Devices 22 Transport equipment 23 Reflector 23a Reflective surface

Claims

1. An integrating sphere; a light emitter having a light emitting portion located within the integrating sphere; an exit port for exiting the light from the integrating sphere; a flow path having a turn extending around the ejection port; a heat exchanger having the circulating portion of the flow path and thermally connected to the integrating sphere;

2. the heat exchange unit includes a support member that supports the integrating sphere and a heat conduction member that overlaps the support member, the thermally conductive member has a circumferential groove extending around the ejection port; The light source device according to claim 1 , wherein the circumferential portion of the flow passage is formed by the circumferential groove of the heat conduction member and the support member.

3. The heat exchange unit has a cover member, The light source device according to claim 2 , wherein the heat conductive member is sandwiched and held by the support member and the cover member.

4. an overlapping member including the support member and the heat conducting member has an annular shape; The light source device according to claim 2 , wherein an annular gap is formed between an inner circumferential surface of the overlapping member and the integrating sphere.

5. The light source device according to claim 4 , wherein the heat exchange portion has a sealing member arranged between the support member and the heat conduction member so as to extend annularly along an inner peripheral edge portion of the overlapping member, radially inward from the circumferential portion of the flow path.

6. 2. The light source device according to claim 1, further comprising a heat conduction suppressing member that is held by the integrating sphere, has the light emitter inserted therein, and suppresses heat conduction from the light emitter to the integrating sphere.

7. The light source device according to claim 6 , wherein the heat conduction suppressing member has a reflective surface that reflects light inside the integrating sphere.

8. The light source device according to claim 7 , wherein the heat conduction suppressing member has a coating layer that forms the reflective surface.

9. The light source device according to claim 6 , further comprising a reflector having a reflecting surface that overlaps the heat conduction suppressing member and reflects light within the integrating sphere.

10. The light source device according to claim 6 , wherein the thermal conductivity of the heat conduction suppressing member is 0.5 W / m·k or less.

11. The light source device according to claim 1 , further comprising a fluid control device for controlling a temperature or a flow rate, or both, of the fluid flowing through the flow passage.

12. 13. A measuring device comprising: a light source device according to claim 1; and a detector that detects a physical quantity of an object to be measured as an illumination target by receiving light irradiated onto the object to be measured by the light source device.

13. The measurement apparatus according to claim 12 , further comprising a moving device that moves the light source device and the detection unit in a direction intersecting a moving direction of the object to be measured.

14. The object to be measured is paper, a film, a battery separator, or any combination thereof; The measurement apparatus according to claim 12 , wherein the physical quantity of the object to be measured is a thickness, a basis weight, or a moisture content, or any combination thereof.

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