Manufacturing method of low temperature co-fired ceramic

Abstract

To provide a whole crystal phase low temperature co-fired ceramic powder and a manufacturing method and application thereof, for overcoming performance deterioration due to introduction of a glass phase to a low temperature co-fired ceramic.SOLUTION: A raw material composition of a low temperature co-fired ceramic powder comprises xRO yM2O3 zXO2, where R is at least one kind of Mg, Ca, Ba, Zn, Cu and Pb, M is at least one kind of B, Al, Co, In, Bi, Nd, Sm and La, X is at least one kind of Si, Ge, Sn, Ti, Zr and Hf, 0≤x≤85 wt.%, 15 wt.%≤y≤90 wt.%, 10 wt.%≤z≤85 wt.%, and x+y+z=1 are satisfied, the low temperature co-fired ceramic powder is obtained by high temperature melting, hardening treatment, and recrystallization treatment, a temperature of the high temperature melting is 1200°C-1600°C, and a temperature of the recrystallization treatment is 500°C-900°C.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to low-temperature co-fired ceramic powder and its preparation and application, in particular to a method for preparing low-temperature co-fired ceramic with low dielectric loss and all-solid-state phase by glass recrystallization. The present invention belongs to the field of low-temperature co-fired ceramic preparation, and a multi-component low-temperature co-fired ceramic with low dielectric loss can be obtained by the present invention. [Background technology]

[0002] Low-temperature co-fired ceramic (LTCC) technology is one of the core technologies for passive integration and package interconnection. It is to make green ceramic tape from low-temperature sintered ceramic powder, and then use processes such as punching, micro-hole grouting, and electrode printing to make the required circuit pattern on the green ceramic tape. Various passive components (capacitors, resistors, filters, couplers, etc.) can be embedded in a multi-layer ceramic substrate, stacked, and sintered at 950°C or less to create a three-dimensional high-density circuit, and can also be made into a three-dimensional circuit substrate with built-in passive components. LTCC technology is particularly suitable for high-frequency communication components, as it can also mount ICs and active devices on its surface to create passive / active integrated functional modules. Due to its excellent electrical, mechanical, thermal and process properties, LTCC technology has become a core technology for miniaturization, integration, and modularization of electronic components, and is widely used in fields such as aviation, aerospace, military, automotive electronics, and wireless communications. In order to realize high-speed wireless information transmission of large data volumes in the future, the new generation of LTCC passive components must meet the requirements of high frequency, wide bandwidth and low loss, and low dielectric loss LTCC ceramic blocks are the foundation and key to realizing the above technology. Therefore, it is very important to develop low dielectric loss LTCC microwave ceramics that can handle frequencies of 30 GHz and even above 100 GHz.

[0003] The most typical systems of LTCC are glass + ceramic and glass-ceramic systems, and in order to meet the process requirement that LTCC can be co-fired with metal electrodes such as gold, silver, and copper at temperatures below 950 °C, a glass phase is generally introduced into the ceramic. However, the glass phase with a disordered structure is likely to lead to large intrinsic losses in the ceramic, and how to achieve good microwave performance of the material while maintaining a low sintering temperature has particular difficulties for LTCC.

[0004] Many researchers in LTCC have been trying to solve this problem for a long time and have made many useful studies. For example, LTCC microwave dielectrics without glass phase based on low melting point crystalline compounds such as molybdate, tungstate, tellurite, phosphate, etc. compounds, Li-Nb-Ti-O-based LTCC microwave dielectrics based on low melting point liquid phase sintering aids, new low loss LTCC dielectrics without glass phase by cold sintering technology, etc. have been studied. Although most of the above new LTCC dielectric systems show excellent dielectric properties and sintering characteristics, these systems have problems such as complex components, insufficient stability, special and sensitive sintering process, etc., making it difficult to cooperate with other materials to form a mutually compatible system, and there is still a long way to practical application. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] China Patent Application Publication No. 111499187 [Patent Document 2] Korean Patent Publication No. 1999-0058244 [Patent Document 3] China Patent Application Publication No. 101538117 [Patent Document 4] China Patent Application Publication No. 107602088 [Patent Document 5] China Patent Application Publication No. 106396414 [Patent Document 6] U.S. Patent No. 6,534,161 Summary of the Invention [Problem to be solved by the invention]

[0006] In order to overcome the drawback of performance degradation due to the introduction of a glass phase in LTCC, the present disclosure provides an all-crystalline phase LTCC of A method for producing a low-temperature co-fired ceramic is provided. K Manufacturing method Law Disclose. [Means for solving the problem]

[0007] In a first aspect, the present invention provides a low-temperature co-fired ceramic powder, the low-temperature co-fired ceramic powder having a chemical composition of xRO·yM2O3·zXO2, where R is at least one of Mg, Ca, Ba, Zn, Cu, and Pb, M is at least one of B, Al, Co, In, Bi, Nd, Sm, and La, and X is at least one of Si, Ge, Sn, Ti, Zr, and Hf, and 0≦x≦85wt%, 15wt%≦y≦90wt%, 10wt%≦z≦85wt%, and x+y+z=1. The low-temperature co-fired ceramic powder is obtained by high-temperature melting, quenching, and recrystallization, the high-temperature melting temperature being 1200°C to 1600°C, and the recrystallization temperature being 500°C to 900°C.

[0008] Preferably, R includes at least one of Mg, Ca, Ba elements and at least one of Zn, Cu, Pb elements, M includes at least one of B, Co, In, Bi elements and at least one of Al, Nd, Sm, La elements, and X includes at least one of Si, Ge, Sn, Ti, Zr, Hf elements, and 0≦x≦50wt%, 40wt%≦y≦90wt%, 10wt%≦z≦60wt%, the low-temperature co-fired ceramic powder is a low-softening point glass recrystallization. powder In the above composition, R3M6X2O 16 Or RM8O 13It is easy to form a phase with a low softening point such as (for example, FIG. 3). Preferably, the low softening point glass recrystallization powder In this case, 20wt%≦x≦30wt%, 40wt%≦y≦60wt%, 20wt%≦z≦30wt%, and x+y+z=100wt%.

[0009] Also preferably, Low softening point glass recrystallized powder The melting point of said low temperature co-fired ceramic powder is <850°C, more preferably ≦750°C.

[0010] Preferably, R is at least one of Mg, Ca, Ba, Zn, and Cu elements, M is at least one of B, Al, Co, In, Bi, Nd, Sm, and La elements, and X is at least one of Si, Ge, Sn, Ti, Zr, and Hf elements, and when 0≦x≦70wt%, 15wt%≦y<40wt%, and 15wt%≦z≦85wt%, the low-temperature co-fired ceramic powder is a high-softening point glass recrystallization. powder Preferably, high softening point glass recrystallization powder In this case, 40wt%≦x≦50wt%, 20wt%≦y≦30wt%, 30wt%≦z≦40wt%, and x+y+z=100wt%.

[0011] Also preferably, High softening point glass recrystallized powder The melting point of said low temperature co-fired ceramic powder is ≧850°C, more preferably ≧950°C.

[0012] Preferably, the low temperature co-fired ceramic powder has an average particle size of 0.5 microns to 3 microns, and a maximum particle size of ≦15 microns.

[0013] In a second aspect, the present invention provides a method for producing a low-temperature co-fired ceramic powder, comprising: (1) weighing and mixing RO powder, M2O3 powder, and XO2 powder according to the chemical composition of the low-temperature co-fired ceramic powder to obtain raw material powder; (2) melting the raw material powder at a high temperature of 1200°C to 1600°C, then quenching and secondary pulverizing to obtain glass powder; and (3) subjecting the obtained glass powder to a recrystallization treatment at 500 to 900° C. to obtain the low-temperature co-fired ceramic powder.

[0014] Preferably, the quenching method is water quenching or oil quenching, among which water quenching is the most common quenching method, while other methods such as oil quenching have the problems of high cost and troublesome cleaning.

[0015] Preferably, the recrystallization treatment time is 4 to 8 hours, more preferably 6 hours.

[0016] The temperature of the recrystallization treatment is preferably 600 to 800°C, and more preferably 600°C or 800°C.

[0017] In a third aspect, the present invention provides a low-temperature co-fired ceramic. The low-temperature co-fired ceramic of the present invention comprises: , low It is characterized by being obtained by molding and processing warm co-fired ceramic powder, followed by sintering at 750°C to 950°C.

[0018] In a fourth aspect, the present invention provides another low-temperature co-fired ceramic. The other low-temperature co-fired ceramic of the present invention has a low softening point glass recrystallization. powder year Low A high-temperature co-fired ceramic powder is selected, and the low-temperature co-fired ceramic powder is recrystallized into a high-softening glass. powder The powder is mixed, molded, and sintered at 850°C to 950°C.

[0019] Preferably, the low softening point glass recrystallization powder The mass of low-softening-point glass recrystallization powder and high softening point glass recrystallization powder % of the total mass, more preferably not more than 15 wt. %.

[0020] Preferably, the low-temperature co-fired ceramic is obtained by sintering the low-temperature synthesis composite ceramic powder at 850°C to 920°C. Effect of the Invention

[0021] The beneficial effects of the present invention are as follows: The present invention makes it possible to manufacture a multi-component composite low-loss LTCC microwave dielectric by a glass recrystallization process. Using oxide raw materials that can form glass ceramics, a glass raw material powder is manufactured by using a high-temperature water quenching and ball milling process, and then the glass is recrystallized by a high-temperature sintering process to manufacture a multi-component composite crystalline phase ceramic raw material, and the comprehensive properties such as the crystal phase composition, final softening point, sintering temperature, and microwave dielectric properties of the material are adjusted by adjusting the composition and ratio of the raw materials. Since the material is a multi-component multi-phase composition, the LTCC obtained by this method has the advantage that it is easy to adjust the comprehensive properties such as microwave dielectric properties, sintering process system, mechanical and chemical stability. In addition, the present invention first melts the raw materials at high temperatures, then sinters and recrystallizes to form an all-solid-phase material, so that the dielectric loss is reduced. [Brief description of the drawings]

[0022] [Figure 1] 1 is an XRD pattern of the glass recrystallized LTCC ceramic powder of Example 1. [Diagram 2] 1 is a SEM photograph of the ceramic obtained by low-temperature sintering of the LTCC ceramic powder produced in Example 1. [Diagram 3] 1 is an XRD pattern of the low softening point crystallized powder of Example 2. [Figure 4] 1 is an XRD pattern of the multi-component composite LTCC ceramic powder in Example 3. [Diagram 5] 1 is a diagram showing the composition and performance parameters of low-temperature co-fired ceramic blocks produced according to the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] The present invention will be further described below by the following embodiments. It should be understood that the following embodiments are only used to explain the present invention, and are not intended to limit the present invention.

[0024] In the present disclosure, a multi-component composite high-quality all-solid-state low-temperature co-fired ceramic powder is prepared by glass recrystallization, and based on this, a multi-component composite high-quality all-solid-state LTCC microwave dielectric (low-temperature co-fired ceramic) with low power loss is further prepared.

[0025] The present invention specifically includes the following: Using a crystallizable glass-ceramic raw material, melt the glass by a high-temperature water quenching method (high-temperature melting + water quenching treatment) to obtain glass powder; Sintering the glass powder at high temperature to realize glass recrystallization to obtain low-temperature co-fired ceramic powder with multi-element complex crystal phase; Adjusting the composition and proportion of the low-temperature co-fired ceramic powder adjusts the comprehensive properties of the ceramic, such as the crystal phase composition, final softening point, sintering temperature, microwave dielectric properties, etc. Since the ceramic has a multi-element multi-phase composition, the ceramic obtained by this method has the advantage that it is easy to adjust the comprehensive properties, such as microwave dielectric properties, sintering process system, mechanical and chemical stability, etc.

[0026] In the present disclosure, the raw material composition of the low-temperature co-fired ceramic powder is xRO·yM2O3·zXO2, where R is at least one of Mg, Ca, Ba, Zn, Cu, and Pb, M is at least one of B, Al, Co, In, Bi, Nd, Sm, and La, X is at least one of Si, Ge, Sn, Ti, Zr, and Hf, and x, y, and z are mass percentages, 75%≧x≧0, 90%≧y≧15%, 85%≧z≧10%, and x+y+z=1. The material composition can be optimized according to the softening point and dielectric constant of the target material.

[0027] For low softening point multi-composite crystalline phase material (low softening point low temperature co-fired ceramic powder), R is at least one of Mg, Ca, Ba, and at least one of Zn, Cu, Pb, M, M is at least one of B, Co, In, Bi, and at least one of Al, Nd, Sm, La, X is at least one of Si, Ge, Sn, Ti, Zr, Hf, x, y, and z are mass percentages, 0≦x≦50wt%, 40wt%≦y≦90wt%, 10wt%≦z≦60wt%, x+y+z=1. For example, low softening point includes CaSiO3 / CaB2O4 / BaAl2Si2O8.

[0028] For high softening point multi-composite crystalline phase material (high softening point low temperature co-fired ceramic powder), R is at least one of Mg, Ca, Ba, Zn, Cu elements, M is at least one of B, Al, Co, In, Bi, Nd, Sm, La elements, X is at least one of Si, Ge, Sn, Ti, Zr, Hf elements, and x, y, and z are mass percentages, 0≦x≦70wt%, 15wt%≦y<40wt%, 15wt%≦z≦85wt%, x+y+z=1. For example, high softening point includes CaSiO3 / CaB2O4 / CaB2O5.

[0029] The present invention provides a method for preparing low-temperature co-fired ceramic powder by glass recrystallization, which includes: water quenching mixed raw materials into glass at high temperature, ball milling the glass into glass powder, and then sintering the glass at a certain temperature for a certain time, and then recrystallizing the glass, and the sintering temperature is lower than the melting temperature of the multi-component composite material.

[0030] After the raw materials are proportionally weighed, they are placed in a nylon ball mill tank and dry mixed without adding any liquid solvent. After dry mixing for 10 to 16 hours (e.g., 12 hours), the uniformly mixed powder raw materials and zirconia grinding media are separated.

[0031] The homogeneously mixed raw materials are put into a quartz crucible, then put into a high-temperature furnace to melt them into glass liquid, poured into deionized water, and cooled to produce glass slag. After crushing and ball milling, glass powder is obtained.

[0032] The glass powder is poured into an alumina crucible with a lid and placed in a muffle furnace for firing (i.e., recrystallization). The firing temperature in the muffle furnace is 500-900°C, and the temperature is maintained for 4-8 hours. The heating rate is preferably 1-10°C / min, more preferably 5°C / min.

[0033] The material obtained by firing and crystallization is crushed and ball milled to obtain multi-composite ceramic powder (i.e., low-temperature co-fired ceramic powder). The obtained low-temperature co-fired ceramic powder is finely ground to a particle size of 0.5 to 3 microns. The maximum particle size does not exceed 10 microns and is used as a raw material for producing high-quality LTCC microwave dielectric ceramics.

[0034] LTCC is manufactured by mixing two or more kinds of low-temperature co-fired ceramic powders in proportion to each other. The low-temperature co-fired ceramic powders used include at least one low-softening point multi-element composite ceramic powder and one or more high-softening point multi-element composite ceramic powders. Among them, low-softening point glass recrystallization powder The mass of low-softening-point glass recrystallization powder and high softening point glass recrystallization powder The total mass of the low-softening point glass recrystallization does not exceed 20 wt%. powder and high softening point glass recrystallization powder The mass ratio of these components must not exceed 1:4.

[0035] In the present invention, the softening point of the low softening point multi-element composite ceramic powder is less than 850°C, and the softening point of the high softening point multi-element composite ceramic is above 850°C. Under the optimized conditions, the softening point of the low softening point multi-element composite ceramic is less than 800°C, and the softening point of the high softening point multi-element composite ceramic is above 850°C. powder The softening point of is 900°C or higher.

[0036] Multi-component crystal phase Low softening point multi-component crystal phase in LTCC powder The content of is less than 20 wt.%, and the sintering temperature of the LTCC obtained by the compounding is less than 950°C, preferably ≦920°C. At this preferred temperature, the silver wire obtained by co-firing with silver has excellent quality. Under the optimized conditions, the low softening point multi-composite crystal phase powder The content of is less than 15wt%, and the sintering temperature of the composite LTCC is less than 920℃. The obtained LTCC has good co-firing matching with the silver electrode.

[0037] In the present invention, TMA is used to test the softening point of low-temperature co-fired ceramic powders.

[0038] In the present invention, a resonant cavity method is used to test the dielectric constant of low temperature co-fired ceramic blocks.

[0039] In this invention, a resonant cavity method is used to test the dielectric loss of low temperature co-fired ceramic blocks.

[0040] In this invention, the resonant cavity method is used to test the quality factor of low-temperature co-fired ceramic blocks.

[0041] The present invention will be described in detail below with further examples. It should also be understood that the following examples are only used to further explain the present invention and should not be construed as limiting the scope of protection of the present invention, and some non-essential improvements and adjustments made by those skilled in the art according to the above content of the present invention belong to the scope of protection of the present invention. The specific process parameters in the following examples are also only examples of suitable ranges, that is, those skilled in the art can make selections within the appropriate ranges through the description in this specification, and are not intended to be limited to the specific numerical values ​​exemplified below.

[0042] Example 1 When R=Ca, M=B, X=Si, x=0.42, y=0.26, z=0.32 were selected, the composition of the material was expressed as 0.42CaO·0.26B2O3·0.32SiO2, which was called CBS. CaCO3, B2O3, and fused silica were used as raw materials, and the raw materials were mixed in proportion and charged into a nylon ball mill tank, and dry grinding was performed for 12 hours without adding solvent to make the raw materials uniformly mixed. The mixed raw materials were placed in a quartz crucible and melted at high temperature in a muffle furnace. The melting temperature was 1400°C, and after holding the temperature for 20 minutes, the glass slag was made by water quenching, and after crushing and ball milling, glass fine powder was obtained. Next, the glass powder was placed in an alumina crucible and pre-sintered in a muffle furnace, and the heating rate was 5°C / min, and the temperature was raised to 800°C, and then the temperature was held at that temperature for 6 hours, and then naturally cooled. The crystallized material was crushed and ball milled to obtain a fully crystallized ceramic powder with a softening point of 972°C. X-ray diffraction (XRD) analysis shows that the phase composition of the ceramic powder is mainly CaSiO3, CaB2O4, and Ca2B2O5. The XRD pattern of the glass-recrystallized LTCC ceramic powder of Example 1 is shown in Figure 1.

[0043] The multiphase ceramic powder was used as a raw material, and PVA binder was added, granulated, and molded to obtain a cylindrical sample green body. After removing the rubber at 450°C, it was sintered at 950°C for 2 hours to obtain a sintered dense ceramic sample. In terms of microwave dielectric performance testing, the dielectric constant of the obtained ceramic sample was 6.1 (@10GHz) and the dielectric loss was 0.9×10 -3 The quality factor was Q·f~11000GHz, and the ceramic sample had excellent microwave dielectric properties. The microstructure of the ceramic sample was observed by scanning electron microscope. Figure 2 is a scanning electron microscope photograph of the ceramic sample obtained by low-temperature sintering of the LTCC ceramic powder produced in Example 1. As can be seen from Figure 2, there was no glass phase in this low-temperature sintered ceramic powder.

[0044] Example 2 R=Ba, M=B and Al, X=Si, x=0.25, y=(0.4+0.1), z=0.25, the ceramic raw material was synthesized with the composition of 25%BaO·40%B2O3·10%Al2O3-25%SiO2, which was called BBAS. BaCO3, B2O3, Al2O3, fused silica were used as raw materials, and the raw materials were mixed in proportion. The mixed materials were placed in a nylon ball mill tank and dry mixed for 6 hours without adding any solvent to mix the raw materials uniformly. After mixing, the raw materials were placed in a quartz crucible, melted at a high temperature of 1400℃ in a glass furnace, kept at the temperature for 20 minutes, and then quenched in water to make glass slag, which was crushed and ball milled to obtain glass fine powder. Next, the glass powder was placed in an alumina crucible and pre-sintered in a muffle furnace. The temperature was raised to 600°C at a heating rate of 5°C / min, and the temperature was kept at that temperature for 6 hours and then naturally cooled, resulting in a completely crystallized ceramic powder with a softening point of 630°C (see Figure 3).

[0045] Example 3 The CBS ceramic powder synthesized in Example 1 and the BBAS ceramic powder synthesized in Example 2 were mixed in a mass ratio of 10:1 and uniformly mixed in a ball mill, and then a ceramic sample was manufactured according to the above sample manufacturing process. It was rubber-extruded at 450°C and sintered at 900°C for 2 hours to obtain a dense ceramic sample. In terms of microwave dielectric performance testing, the obtained ceramic sample showed excellent microwave dielectric properties, with a dielectric constant of 6.2 (@10GHz) and a dielectric loss of 1.1×10 -3 , and the quality factor was Q·f~9000GHz. X-ray diffraction (XRD) analysis showed that the phase composition of the ceramic powder was mainly CaSiO3, CaB2O4, and BaAl2Si2O8. The XRD pattern of the multi-composite LTCC ceramic sample in Example 3 is shown in Figure 4. The obtained ceramic has good co-firing matching with silver electrodes and can be used for the manufacture of LTCC package substrates.

[0046] Example 4 The manufacturing process of the low-temperature co-fired ceramic block in this Example 4 is different from that in Example 3 in that the mass ratio of the CBS ceramic powder synthesized in Example 1 to the BBAS ceramic powder in Example 2 is 4:1 (20%).

[0047] Example 5 The manufacturing process of the low-temperature co-fired ceramic block in this Example 5 is different from that in Example 3 in that the mass ratio of the CBS ceramic powder synthesized in Example 1 to the BBAS ceramic powder in Example 2 is 17:3 (15 wt%).

[0048] Example 6 The manufacturing process of the low-temperature co-fired ceramic block in this Example 6 is different from that in Example 3 in that the mass ratio of the CBS ceramic powder synthesized in Example 1 to the BBAS ceramic powder in Example 2 is 19:1 (5 wt%).

[0049] FIG. 5 shows the composition and performance parameters of the low temperature co-fired ceramic block produced according to the present invention.

[0050] Although the quality factor of Example 1 is the highest, the sintering temperature is above 950°C, which cannot meet the requirements of co-firing metals such as gold, silver or copper. Although the sintering temperature of the low-temperature co-firing ceramic block is reduced after adding a certain content of low-softening point multi-element composite crystalline phase material, from Figure 5 and Examples 3 to 6, the low-softening point glass recrystallization powder As the amount of added increases, the dielectric loss of the obtained low-temperature co-fired ceramic increases, but the quality factor shows a tendency to decrease. Considering the performance requirements of the LTCC package substrate itself, it is preferable to use a low-softening point glass recrystallization powder Mass of low softening point glass recrystallization powder and high softening point glass recrystallization powder The amount of the sintering agent can be controlled so as not to exceed 20 wt% of the total mass of the components.

Claims

1. A low-temperature co-fired ceramic powder comprising: The raw material composition of the low-temperature co-fired ceramic powder is xRO·yM ２ O ３ ・zXO ２ and Here, R is at least one of Mg, Ca, Ba, Zn, Cu, and Pb; M is at least one of B, Al, Co, In, Bi, Nd, Sm, and La; X is at least one of Si, Ge, Sn, Ti, Zr, and Hf, 0≦x≦85 wt%, 15 wt%≦y≦90 wt%, 10 wt%≦z≦85 wt%, and x+y+z=1; The low-temperature co-fired ceramic powder is obtained by high-temperature melting, quenching, and recrystallization, and the high-temperature melting temperature is 1200°C to 1600°C, and the recrystallization temperature is 500°C to 900°C.

2. R contains at least one of Mg, Ca, and Ba elements, and at least one of Zn, Cu, and Pb elements; M includes at least one of B, Co, In, and Bi elements, and at least one of Al, Nd, Sm, and La elements; 2. The low-temperature co-fired ceramic powder according to claim 1, wherein X is at least one of Si, Ge, Sn, Ti, Zr, and Hf elements, and when 0≦x≦50 wt%, 40 wt%≦y≦90 wt%, and 10 wt%≦z≦60 wt%, the low-temperature co-fired ceramic powder is a low-softening point glass recrystallized powder.

3. 3. The low temperature co-fired ceramic powder according to claim 2, wherein the melting point of the low temperature co-fired ceramic powder is <850°C.

4. 4. The low-temperature co-fired ceramic powder according to claim 3, wherein the melting point of the low-temperature co-fired ceramic powder is ≦750° C.

5. R is at least one of Mg, Ca, Ba, Zn, and Cu elements; M is at least one of B, Al, Co, In, Bi, Nd, Sm, and La; 2. The low-temperature co-fired ceramic powder according to claim 1, wherein X is at least one of Si, Ge, Sn, Ti, Zr, and Hf elements, and when 0≦x≦70 wt%, 15 wt%≦y<40 wt%, and 15 wt%≦z≦85 wt%, the low-temperature co-fired ceramic powder is a high-softening point glass recrystallized powder.

6. 6. The low temperature co-fired ceramic powder according to claim 5, wherein the melting point of the low temperature co-fired ceramic powder is ≧850° C.

7. 7. The low temperature co-fired ceramic powder according to claim 6, wherein the melting point of the low temperature co-fired ceramic powder is ≧950° C.

8. 8. The low temperature co-fired ceramic powder according to claim 1, wherein the average particle size of the low temperature co-fired ceramic powder is between 0.5 microns and 3 microns, and the maximum particle size is ≦15 microns.

9. A method for producing the low-temperature co-fired ceramic powder according to any one of claims 1 to 8, comprising the steps of: According to the chemical composition of the low-temperature co-fired ceramic powder, RO powder, M ２ O ３ Powder, and XO ２ (1) weighing and mixing powders to obtain a raw powder; (2) melting the raw material powder at a high temperature of 1200°C to 1600°C, followed by quenching and secondary pulverization to obtain glass powder; and (3) subjecting the obtained glass powder to a recrystallization treatment at 500 to 900° C. to obtain the low-temperature co-fired ceramic powder.

10. 10. The method of claim 9, wherein the quenching is water quenching, the recrystallization time is 4-8 hours, and the recrystallization temperature is 600-800°C.

11. A low-temperature co-fired ceramic, comprising: A low-temperature co-fired ceramic is obtained by selecting the low-temperature co-fired ceramic powder according to claim 2 as a low-softening point glass recrystallized material and the low-temperature co-fired ceramic powder according to claim 5 as a high-softening point glass recrystallized material, mixing them, forming them, and sintering them at 850°C to 950°C.

12. 12. The low-temperature co-fired ceramic of claim 11, wherein the mass of the low-softening-point glass recrystallization does not exceed 20 wt% of the total mass of the low-softening-point glass recrystallization and the high-softening-point glass recrystallization.

13. 13. The low-temperature co-fired ceramic of claim 12, wherein the mass of the low-softening point glass recrystallization does not exceed 15 wt% of the total mass of the low-softening point glass recrystallization and the high-softening point glass recrystallization.

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