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Knife pouch device

A technology of tool sleeve and cutting knife, applied in the field of tool sleeve device, can solve problems such as nozzle breakage, and achieve the effect of preventing position deviation

Inactive Publication Date: 2016-04-06
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, if the positions of the nozzles moved by the moving mechanism are slightly misaligned, the nozzles may interfere with each other and be damaged.

Method used

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Experimental program
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Embodiment Construction

[0018] Embodiments of the present invention will be described with reference to the drawings. First, a cutting device including the holder device of the present embodiment will be described. figure 1 It is a perspective view schematically showing a structural example of a cutting device. Such as figure 1 As shown, the cutting device 2 has a base 4 supporting the structures.

[0019] A rectangular opening 4 a is formed at a front corner of the base 4 , and a cartridge placement table 6 is provided in a manner capable of ascending and descending within the opening 4 a. A rectangular parallelepiped magazine 8 for storing a plurality of wafers 11 is placed on the upper surface of the magazine placement table 6 . in addition, figure 1 In order to facilitate the description, only the outline of the cartridge 8 is shown.

[0020] The wafer 11 is a substantially circular plate-shaped object made of a material such as silicon, and its front side is divided into a device region in ...

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PUM

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Abstract

The invention provides a knife pouch device capable of preventing nozzle offset positions; the knife pouch comprises the following structures: a drill base (50) fixed on a main shaft housing (48); a mobile drill base (52) fixedly provided with a water sprayer (56) supplying water for a cutter (40), and the mobile drill base can move relative to the drill base; a mobile unit (54) connected with the mobile drill base, and allows the water sprayer (56) to move between cutter water supply application position and a withdraw position far away from the cutter relative to the application position; positioning embedded portions (66, 72, 78) setting application positions and arranged in a contact portion between the mobile drill base and the drill base.

Description

technical field [0001] The present invention relates to a holder device covering a cutting blade of a cutting device. Background technique [0002] A cutting device used for processing a plate-shaped object such as a wafer has an annular cutting blade and a holder device covering the cutting blade. A pair of nozzles clamping the front and back of the cutting knife are fixed on the knife holder device. While the cutting water is supplied through the nozzle, the cutting blade is rotated and cut into the plate, thereby enabling processing of the plate. [0003] In the above-mentioned cutting device, when the cutting blade is attached or detached, the nozzle fixed to the holder device hinders the operation. Therefore, the tool holder device is provided with a movement mechanism that moves the nozzle between an active position where cutting water is supplied to the cutting blade and a retracted position where the cutting blade is not hindered from being attached or detached (fo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D7/02B28D5/02
Inventor 畑亮
Owner DISCO CORP
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