Organic silane-containing waste gas and waste liquid incineration system and process
An organosilane and waste gas technology, which is applied to the incineration system and process field of waste gas and waste liquid containing organosilane, can solve the problems of secondary pollution, environmental damage, serious pollution, etc., and achieve the effect of eliminating safety problems and improving stability.
Pending Publication Date: 2020-07-28
宜兴市智博环境设备有限公司
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Problems solved by technology
Due to imperfect treatment methods and other reasons, the on-site working environment is poor and the pollution is serious. This part of the residual liquid is mainly composed of high-chlorinated silicon-based chlorosilane, silicon powder-based impurities, waste gas and waste liquid, and high value-added components. Divided into perchlorosilane and other components
At present, most domestic enterprises use extensive hydrolysis to process the residual liquid, which leads to serious waste of raw materials, harsh hydrolysis operatio
Method used
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Embodiment 1
[0025] Such as Figure 1-4 Shown, a kind of organic silane waste gas waste liquid incineration process, it specifically comprises the following steps:
[0026] S1. Send the waste gas containing organosilane into the spray water washing tower 4 to absorb chlorosilane gas and hydrogen chloride gas, and the waste gas sprayed by the spray water washing tower 4 is condensed through the condenser 5, and the condensed high chlorosilane is obtained After the liquid is recovered, the condensed waste gas is sent to the primary incinerator for combustion after being treated by the water seal tank 6 and the flame arrester 7 to prevent backfire explosion; at the same time, the waste liquid containing organic silane is atomized and sprayed into the primary incinerator synchronously Combustion in the furnace; the combustion temperature in the primary incinerator is 750-850°C, and the residence time of flue gas is 1.5-2 seconds;
[0027] S2. Send the flue gas produced by S1 into the secondar...
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The invention discloses an organic silane-containing waste gas and waste liquid incineration system and process, and relates to the technical field of waste gas and waste liquid incineration treatment. The organic silane-containing waste gas and waste liquid incineration system comprises a primary incineration chamber, a secondary incineration chamber and a tail gas purification device which are sequentially connected, wherein organic silane-containing waste gas is fed into the primary incineration chamber through a waste gas pretreatment device, and organic silane-containing waste liquid is fed into the primary incineration chamber through a high-pressure atomization device; the waste gas pretreatment device comprises a spraying water washing tower, a condenser, a water sealing tank and aflame arrester which are sequentially connected; external organic silane-containing waste gas is introduced into a waste gas inlet I of the spraying water washing tower, a waste gas inlet II and a waste gas outlet I are connected with a waste gas buffer tank, a waste gas outlet II is connected with the condenser, and a waste gas outlet III is connected with an activated carbon adsorption tank; and the condenser is connected with the activated carbon adsorption tank through a gas detector. The waste gas pretreatment process is adopted, the stability of the production system is improved, and chlorosilane, hydrogen chloride, silicon dioxide and the like in flue gas are recycled in a by-product mode.
Description
technical field [0001] The invention relates to the technical field of incineration treatment of waste gas and waste liquid, in particular to an incineration system and process for waste gas and liquid containing organosilane. Background technique [0002] At present, in the production process of domestic polysilicon-related industries, some chlorosilane residues will inevitably be produced in the cold hydrogenation tail gas quenching process and rectification process, synthesis tail gas rectification process, and reduction tail gas rectification process. Polysilicon production enterprises produce a large amount of pollutants such as chlorosilane, hydrogen, and hydrogen chloride in the process of producing polysilicon raw materials. The above-mentioned waste gas / waste liquid treatment problem has become one of the bottlenecks restricting the development of polysilicon. The research on the recovery of high value-added component silane is quite popular, but the research in thi...
Claims
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Patent Timeline
Login to View More IPC IPC(8): F23G7/06F23G7/04F23J15/00F23J15/02F23J15/04F23J15/06B01D53/00B01D53/04B01D50/00
CPCF23G7/06F23G7/04F23J15/006F23J15/025F23J15/04F23J15/06B01D53/00B01D53/04B01D50/00F23J2217/102F23J2217/50Y02E20/30
Inventor 王志军宗建勇毛黎强庄琴芳黄鑫庄琴英
Owner 宜兴市智博环境设备有限公司