A tubular reaction device for preparing semiconductor materials

Abstract

The present invention discloses a tubular reaction device for preparing semiconductor materials, which belongs to the technical field of semiconductor material preparation, and comprises a reaction tube body and a first end cap and a second end cap arranged at both ends thereof, wherein the first end cap and the second end cap are respectively provided with a first cover plate and a second cover plate at the connection places with the two ends of the reaction tube body; a row of first through holes is provided on the first cover plate along the diameter direction, and a plurality of pairs of second through holes are distributed along the radial direction on the second cover plate, and each pair of second through holes is fixedly connected with two leg tubes of a Y-type three-way pipe arranged on the second cover plate, and the top tube of the Y-type three-way pipe is fixedly connected with the lower end of a stainless steel casing, and the top end of the stainless steel casing is connected to the first through hole; a mixing core tube and a ceramic tube are arranged inside the stainless steel casing, and the reaction solution is mixed through the mixing core tube and then flows through the ceramic tube and is discharged from the liquid outlet tube. The present invention is provided with a plurality of groups of mixing core tubes and ceramic tubes, which can improve the reaction efficiency and processing capacity of the tubular reaction device.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor material preparation, and in particular to a tubular reaction device for semiconductor material preparation. Background Art

[0002] A tubular reactor is a long, continuous reactor with a large aspect ratio. It has low backmixing and high volumetric efficiency. Compared with conventional reactors, it has a larger specific surface area and heat exchange efficiency, can achieve precise control of time, and has a wide range of applications.

[0003] Chinese patent CN117138725A discloses "a high shear mixing tubular reactor", including a reaction tube and a mixing mechanism, a spiral heat conduction channel is provided in the interlayer of the reaction tube, and docking plates are provided at the upper and lower ends of the heat conduction channel, a cover is installed on the top of the docking plate through a sealing gasket and a fastener, and a feeding tube is fixed on both sides of the docking plate. This technical solution introduces the raw materials to be mixed into the reaction tube, starts the mixing mechanism, and drives the three groups of shearing components to rotate counterclockwise. When the three groups of shearing components rotate, they can drive the upper and lower staggered turntables to quickly pull the raw materials through the transverse shear grooves. At the same time, the rotating turntable can drive the raw materials at the bottom of the tubular reactor to continuously swing upward for shearing through the oblique shear strips, and the three groups of staggered shearing components are used to achieve efficient shear mixing of horizontal pulling shearing and continuous upward swinging shearing. Although this technical solution can achieve efficient shear mixing of reaction materials, the following problems exist during the production process: (1) The mixing mechanism is inconvenient to disassemble and clean; (2) High shear force causes certain reactions to produce colloidal substances that adhere to the stirring paddle and are difficult to separate; (3) In the preparation process of semiconductor materials, etc., high purity requirements for the product are high, and the rotating parts of the mixing mechanism have difficult-to-solve sealing problems, which can easily cause contamination to the product. Summary of the invention

[0004] Technical problem to be solved: In view of the technical problems existing in the tubular reactors of the prior art, the present invention provides a tubular reaction device for preparing semiconductor materials. A plurality of groups of mixing core tubes and ceramic tubes are arranged in the reaction tube body. The mixing core tubes can improve the mixing efficiency of different reaction materials. The mixed reaction materials enter the ceramic tubes loaded with fillers for efficient reaction, thereby improving the reaction efficiency and processing capacity of the tubular reaction device.

[0005] Technical solution: The tubular reaction device for preparing semiconductor materials described in the present invention comprises a reaction tube body and a first end cap and a second end cap detachably connected to both ends of the reaction tube body, wherein a first cover plate is arranged at the connection between the first end cap and the reaction tube body, and a liquid outlet pipe communicating with the inner cavity of the first end cap is arranged on the outer wall of the first end cap; a second cover plate is arranged at the connection between the second end cap and the reaction tube body, and a partition plate is arranged vertically in the second end cap and the second cover plate, wherein the partition plate divides the second end cap into a first cavity and a second cavity which are symmetrically arranged, and a first feed pipe and a second feed pipe are arranged on the outer wall of the second end cap corresponding to the first cavity and the second cavity respectively;

[0006] Among them, a row of first through holes is provided on the first cover plate along the diameter direction consistent with the direction of the partition plate, and a plurality of pairs of second through holes are symmetrical to the partition plate and distributed along its radial direction on the second cover plate, and each pair of the second through holes is fixedly connected with two leg tubes of a Y-shaped tee pipe arranged on the second cover plate, and the top tube of the Y-shaped tee pipe is fixedly connected with the lower end of the stainless steel sleeve, and the top end of the stainless steel sleeve is connected to the first through hole corresponding to the first cover plate; a mixing core tube connected with the Y-shaped tee pipe is provided at the lower part of the interior of the stainless steel sleeve, and a ceramic tube connected with the upper end of the mixing core tube is provided at the upper part of the interior of the stainless steel sleeve, and the ceramic tube is filled with filler, and the reaction solution is mixed through the mixing core tube and then flows through the ceramic tube and is discharged from the liquid outlet pipe.

[0007] Preferably, the length of the mixing core tube is 50-100 cm and the diameter is 6-8 mm; the length of the ceramic tube is 3-5 times the length of the mixing core tube.

[0008] Preferably, a plurality of spiral bodies are arranged at intervals along the length direction of the mixing core tube, and spiral guide surfaces are formed on both sides of the spiral bodies.

[0009] Preferably, a plurality of diverter lobes are arranged at intervals along the length direction of the mixing core tube, and the diverter lobes are spirally distributed along the circumference of the inner wall of the mixing core tube to form a vortex channel.

[0010] Preferably, the multiple Y-shaped tees arranged on the second cover plate along the length direction of the partition plate are selected from different models and sizes, and the second through holes corresponding to the Y-shaped tees are arranged roughly evenly on the second cover plate.

[0011] Preferably, a heat exchange cavity is formed inside the reaction tube body outside the stainless steel sleeve, and a heat exchange medium inlet end tube and a heat exchange medium outlet end tube communicating with the heat exchange cavity are respectively arranged on the upper and lower side walls of the reaction tube body.

[0012] Preferably, a first pipe and a second pipe are respectively arranged in the stainless steel casing corresponding to the mixing core pipe and the ceramic pipe, the diameter of the first pipe is smaller than the diameter of the second pipe, and a conical sealing neck is arranged at the connection between the first pipe and the second pipe;

[0013] The upper end of the mixing core tube is inserted into the first pipe and is lower than the bottom surface of the conical sealing tube neck; the lower end of the ceramic tube is sleeved with a sealing member, and the lower end of the ceramic tube is inserted into the second pipe until the first pipe at the lower end of the conical sealing tube neck is docked with the mixing core tube, and the sealing member is stuck in the conical sealing tube neck.

[0014] Preferably, a conical supporting surface is provided on the lower portion of the outer wall of the sealing element in the circumferential direction corresponding to the conical sealing tube neck, and the length of the conical supporting surface is greater than the length of the conical sealing tube neck.

[0015] Preferably, a second limiting ring groove is provided on the upper portion of the inner wall of the sealing member along its circumference;

[0016] A supporting ring body and a limiting ring body are circumferentially arranged at the lower end of the outer wall of the ceramic tube, and a first limiting ring groove is formed between the supporting ring body and the limiting ring body;

[0017] Among them, the outer diameter of the support ring body is larger than the outer diameter of the seal, and as the ceramic tube moves downward, the support ring body can be pressed against the upper end of the seal and drive the seal to move downward and insert into the conical sealing tube neck; the outer diameter of the limiting ring body is smaller than the inner diameter of the second limiting ring groove, and the limiting ring body is clamped in the second limiting ring groove and drives the seal to move upward and break contact with the conical sealing tube neck as the ceramic tube moves upward; the inner wall of the seal is located at the lower side of the second limiting ring groove and is provided with two circles of flexible sealing steps along the axial direction, and the inner circle of the flexible sealing step is interference fit with the outer wall of the ceramic tube; the side wall of the seal is provided with a tensioning seam along its axial direction.

[0018] Preferably, the outer diameter of the ceramic tube is smaller than the inner diameter of the second pipe, and the outer diameter of the support ring is not larger than the inner diameter of the second pipe; an O-ring is arranged on the outer wall of the ceramic tube at intervals of 30 to 60 cm along its length, and the O-ring is interference-connected in the second pipe; a hook is arranged on the top of the ceramic tube.

[0019] Compared with the prior art, the present invention has at least the following beneficial effects:

[0020] 1. The reaction tube body of the present invention is equipped with multiple groups of mixing core tubes and ceramic tubes. The use of the mixing core tube can improve the mixing efficiency of different reaction materials. The mixed reaction materials enter the ceramic tube carrying the filler for efficient reaction, which can improve the reaction efficiency and processing capacity of the tubular reaction device;

[0021] 2. The structure and size of the mixing core tube and the ceramic tube can make the fully mixed reaction solution further react in the ceramic tube, which has higher volumetric efficiency and larger specific surface area, thereby improving the reaction efficiency;

[0022] 3. A spiral or diverter valve is arranged in the mixing core tube. When the reaction materials flow through the spiral or diverter valve under high pressure, violent collision can occur to achieve sufficient mixing reaction;

[0023] 4. The tubular reaction device does not need to use rotating parts to reduce its sealing requirements, thereby meeting the purity requirements of semiconductor material preparation;

[0024] 5. The seal cooperates with the internal structure of the stainless steel casing to achieve a stable and convenient sealed connection between the ceramic tube and the mixing core tube, and the ceramic tube can be easily cleaned and replaced. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the internal structure of the tubular reaction device of the present invention;

[0026] Figure 2 for Figure 1 Left view of the internal structure of the center tube reactor

[0027] Figure 3 for Figure 1 A top view of the first cover plate structure;

[0028] Figure 4 for Figure 1 A top view of the second cover plate structure;

[0029] Figure 5 for Figure 1 A schematic diagram of the structure enlargement in the middle;

[0030] Figure 6 for Figure 5 A magnified schematic diagram of the internal structure of the protective casing at point A in the middle;

[0031] Figure 7 for Figure 5 A magnified schematic diagram of the structure where the ceramic tube and the seal are in a state of conflict and extrusion;

[0032] Figure 8 for Figure 7 Schematic diagram of the structure of the middle seal;

[0033] Fig. 9 for Figure 7 A magnified schematic diagram of the structure in which the ceramic tube and the seal are separated;

[0034] Fig.10 for Figure 1 A magnified schematic diagram of the structure at B in the middle;

[0035] Fig.11 for Figure 1 The enlarged schematic diagram of the structure of the first embodiment of the mixing core tube at C in the middle;

[0036] Fig.12 for Fig.11 Schematic diagram of the spiral structure in the mixed core tube;

[0037] Fig.13 for Figure 1 The enlarged schematic diagram of the structure of the second embodiment of the mixing core tube at C in the middle;

[0038] Fig.14 for Fig.13 Schematic diagram of the diverter valve structure in the mixing core tube.

[0039] Figure numerals: 100, tubular reaction device; 1, reaction tube body; 2, first end cap; 3, first cover plate; 31, first through hole; 4, liquid outlet pipe; 5, second end cap; 6, second cover plate; 61, second through hole; 7, partition plate; 8, first cavity; 9, second cavity; 10, first feed pipe; 11, second feed pipe; 12, Y-type three-way pipe; 13, stainless steel sleeve; 131, first pipeline; 132, second pipeline; 133, conical sealing pipe Neck; 14, mixing core tube; 141, spiral body; 1411, spiral guide surface; 142, diverter flap; 15, ceramic tube; 151, supporting ring body; 152, limiting ring body; 153, first limiting ring groove; 16, heat exchange medium inlet end tube; 17, heat exchange medium outlet end tube; 18, packing; 19, sealing element; 191, second limiting ring groove; 192, conical supporting surface; 193, flexible sealing step; 20, O-ring; 21, hook. DETAILED DESCRIPTION

[0040] To make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the following will be combined with the attached Figures 1 to 14 The technical solutions of the embodiments of the present invention are described clearly and completely. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the present invention.

[0041] like Figures 1 to 4As shown, a tubular reaction device for preparing semiconductor materials according to an embodiment of the present invention, the tubular reaction device 100 comprises a reaction tube body 1 and a first end cap 2 and a second end cap 5 detachably connected to both ends of the reaction tube body 1, the first end cap 2 and the second end cap 5 are both hemispherical structures, and the first end cap 2 and the second end cap 5 are respectively fixedly connected to both ends of the reaction tube body 1 through flanges. A first cover plate 3 is provided at the connection between the first end cap 2 and the reaction tube body 1, and the first cover plate 3 covers the entire end surface of the reaction tube body 1 so that the reaction tube body 1 is separated from the first end cap 2; a liquid outlet pipe 4 connected to the inner cavity of the first end cap 2 is provided on the outer wall of the first end cap 2, which can meet the discharge of the reaction liquid entering the cavity of the first end cap 2 from the liquid outlet pipe 4. A second cover plate 6 is provided at the connection between the second head 5 and the reaction tube body 1, and the second cover plate 6 covers the entire end surface of the reaction tube body 1 so as to separate the reaction tube body 1 from the second head 5; a partition plate 7 is vertically arranged in the second head 5 and the second cover plate, and the partition plate 7 divides the second head 5 into a symmetrically arranged first cavity 8 and a second cavity 9, and a first feed pipe 10 and a second feed pipe 11 are respectively arranged on the outer wall of the second head 5 corresponding to the first cavity 8 and the second cavity 9.

[0042] Among them, a row of first through holes 31 is provided on the first cover plate 3 along the diameter direction consistent with the partition plate 7, and the number of the first through holes 31 is multiple, and the number of the first through holes 31 should be consistent with the number of stainless steel sleeves 13 arranged in the reaction tube body 1. The second cover plate 6 has multiple pairs of second through holes 61 symmetrically arranged with the partition plate 7 and distributed along its radial direction, and each pair of second through holes 61 is fixedly connected with two leg tubes of a Y-type tee 12 arranged on the second cover plate 6, that is, a Y-type tee 12 is connected through each pair of second through holes 61, and multiple Y-type tee tubes 12 can be correspondingly arranged on the second cover plate 6; the top tube of each Y-type tee 12 is fixedly connected with the lower end of a stainless steel sleeve 13, and the top end of each stainless steel sleeve 13 is connected to the first through hole 31 corresponding to the first cover plate 3, so that multiple stainless steel sleeves 13 arranged at intervals are formed between the first cover plate 3 and the second cover plate 6 along the distribution direction of the first through holes 31. Each stainless steel sleeve 13 has a mixing core tube 14 in the lower part thereof connected to the corresponding Y-shaped three-way pipe 12, and a ceramic tube 15 connected to the upper end of the mixing core tube 14 is installed in the upper part of the stainless steel sleeve 13. The ceramic tube 15 is filled with a filler 18, and the filler can be selected from suitable catalysts to promote the reaction. During operation, the reaction material a and the reaction material b can enter the corresponding first cavity 8 and the second cavity 9 through the first feed pipe 10 and the second feed pipe 11 respectively, and the reaction solution in the first cavity 8 and the second cavity 9 can enter the mixing core tube 14 after converging through the second through hole 61 on the corresponding side of the second cover plate 6 through the Y-shaped three-way pipe 12. In this process, the pressure of the reaction solution is increased, and the liquid entering the mixing core tube 14 will further undergo multiple diversions and mixing to achieve efficient and sufficient mixing, and then flow through the ceramic tube 15 to react under the action of fillers such as catalysts and then be discharged from the liquid outlet pipe 4. The reaction tube body of the present invention is equipped with multiple groups of mixing core tubes and ceramic tubes. The use of the mixing core tube can improve the mixing efficiency of different reaction materials, and there is no need to use rotating parts to reduce the sealing requirements. The mixed reaction materials enter the ceramic tube carrying fillers for efficient reaction, which can improve the reaction efficiency and processing capacity of the tubular reaction device.

[0043] In a preferred embodiment, the length of the mixing core tube 14 is 50-100 cm and the diameter is 6-8 mm; the length of the ceramic tube 15 is 3-5 times the length of the mixing core tube 14. The structure of the mixing core tube 14 and the ceramic tube 15 can make the fully mixed reaction solution further react in the ceramic tube 15, have higher volumetric efficiency and larger specific surface area, and thus improve the reaction efficiency.

[0044] In an alternative embodiment, if Figures 11-12As shown, a plurality of spirals 141 are arranged at intervals along the length direction of the mixing core tube 14, spiral guide surfaces 1411 are formed on both sides of the spirals 141, and there is a certain gap between two adjacent spirals 141. When the reaction materials a and the reaction materials b enter the mixing core tube 14 and flow through the plurality of spirals 141, multiple diversions and mixing will occur along the two spiral guide surfaces 1411 of each spiral in turn, and the reaction materials will collide violently under the action of high-pressure flow to achieve a sufficient mixing reaction.

[0045] In another alternative embodiment, if Figures 13 and 14 As shown, a plurality of diverter flaps 142 are arranged at intervals along the length direction of the mixing core tube 14. The diverter flaps 142 are spirally distributed along the circumference of the inner wall of the mixing core tube 14 to form a vortex channel. When the reaction materials a and the reaction materials b enter the mixing core tube 14 and flow through the vortex channel formed by the plurality of diverter flaps 142, intense diversion and mixing will also occur, thereby improving the mixing efficiency of the reaction materials.

[0046] In a preferred embodiment, if Figure 4 As shown, the plurality of Y-shaped three-way pipes 12 arranged on the second cover plate 6 along the length direction of the partition plate 7 can be selected from different models and sizes, from Figure 4 It can be seen that the Y-type tee 12 adopts three types of leg tube size structures with different opening degrees, namely, a Y-type tee 12 with multiple pairs of second through holes 61 arranged close to the partition plate, a Y-type tee 12 with multiple pairs of second through holes 61 arranged relatively far away from the partition plate, and a Y-type tee 12 with a pair of second through holes 61 arranged far away from the partition plate. This arrangement makes the second through holes 61 corresponding to the Y-type tee 12 roughly evenly arranged on the second cover plate 6, so that the reaction materials in the first cavity 8 and the second cavity 9 have roughly the same pressure and flow rate when entering the corresponding Y-type tee 12, ensuring that the reaction materials entering each corresponding mixing core tube 14 and ceramic tube 15 have roughly the same reaction degree, thereby improving the stability of the product.

[0047] like Figure 1 As shown, a heat exchange cavity is formed inside the reaction tube body 1 outside the stainless steel sleeve 13, and a heat exchange medium inlet end tube 16 and a heat exchange medium outlet end tube 17 connected to the heat exchange cavity are respectively arranged on the upper and lower end side walls of the reaction tube body 1. After the heat exchange medium enters from the heat exchange medium inlet end tube 16, it is fully filled on the outside of the multiple stainless steel sleeves 13, thereby fully exchanging heat with the mixing core tube and the ceramic tube machine in the reaction process.

[0048] In a preferred embodiment, if Figures 5 to 9As shown, the stainless steel sleeve 13 is provided with a first pipe 131 and a second pipe 132 corresponding to the mixing core pipe 14 and the ceramic pipe 15, respectively. The diameter of the first pipe 131 is smaller than the diameter of the second pipe 132, and a conical sealing pipe neck 133 is provided at the connection between the first pipe 131 and the second pipe 132. The upper end of the mixing core pipe 14 is inserted into the first pipe 131 and is lower than the bottom surface of the conical sealing pipe neck 133; the lower end of the ceramic pipe 15 is sleeved with a sealing member 19, and the lower end of the ceramic pipe 15 is inserted into the second pipe 132 until the first pipe 131 at the lower end of the conical sealing pipe neck 133 is docked with the mixing core pipe 14, and the sealing member 19 is stuck in the conical sealing pipe neck 133, and a conical support surface 192 is provided in the circumferential direction of the lower part of the outer wall of the sealing member 19 corresponding to the conical sealing pipe neck 133, and the length of the conical support surface 192 is greater than the length of the conical sealing pipe neck 133. Since the filler 18 filled in the ceramic tube 15 will become invalid after a period of use, the ceramic tube 15 needs to be removed from the stainless steel sleeve 13 regularly. Therefore, it is necessary to consider the sealing and installation convenience of the connection between the ceramic tube and the mixing core tube 14 when installing the ceramic tube. The sealing 19 provided in the present invention cooperates with the internal structure of the stainless steel sleeve 13 to achieve a stable and convenient sealed connection between the ceramic tube 15 and the mixing core tube 14.

[0049] Based on the above-mentioned seal 19 structure, further, as Figure 7-8 As shown, a second limiting ring groove 191 is provided along the circumference of the upper inner wall of the sealing member 19; a supporting ring body 151 and a limiting ring body 152 are provided in the circumferential direction of the lower outer wall of the ceramic tube 15, and a first limiting ring groove 153 is formed between the supporting ring body 151 and the limiting ring body 152; wherein, the outer diameter of the supporting ring body 151 is larger than the outer diameter of the sealing member 19, and the supporting ring body 151 can press against the upper end of the sealing member 19 and drive the sealing member 19 to move downward and be inserted into the conical sealing tube neck 133 as the ceramic tube 15 moves downward and is inserted into the second pipe 132 and the first pipe 131, thereby completing the insertion of the ceramic tube 15, as shown in FIG. Figure 7 The outer diameter of the limiting ring body 152 is smaller than the inner diameter of the second limiting ring groove 191, and the limiting ring body 152 is clamped in the second limiting ring groove 191. When the ceramic tube 15 needs to be pulled out for replacement, the sealing member 19 moves upward with the ceramic tube 15 to break away from the conical sealing tube neck 133. At this time, the limiting ring body 152 of the ceramic tube 15 is clamped on the upper edge of the second limiting ring groove 191, so as to facilitate the pulling out of the sealing member 19. Fig. 9 shown.

[0050] Furthermore, if Figure 8As shown, the inner wall of the seal 19 is located at the lower side of the second limiting ring groove 191 and is provided with two circles of flexible sealing steps 193 along the axial interval. The inner circle of the flexible sealing step 193 is interference fit with the outer wall of the ceramic tube 15. During the process of inserting the seal 19 into the conical sealing tube neck 133, as the extrusion force increases, the flexible sealing step 193 can be deformed and fit tightly on the outer wall of the ceramic tube 15, thereby achieving a better sealing effect.

[0051] In a preferred embodiment, the side wall of the seal 19 is provided with a tensioning slit along its axial direction. If the seal 19 is made of a flexible plastic or rubber material with a certain structural strength, the seal 19 can be unfolded along the tensioning slit and can be conveniently mounted on the limiting ring 152 at the lower end of the ceramic tube 15; as the seal 19 enters the conical sealing tube neck 133, the seal 19 is deformed so that the two side walls of the tensioning slit fit closely together to form a sealing structure.

[0052] In a preferred embodiment, if Figure 5 and Fig.10 In the embodiment, the outer diameter of the ceramic tube 15 is smaller than the inner diameter of the second pipe 132, and the outer diameter of the support ring body 151 is not larger than the inner diameter of the second pipe 132, so that the support ring body 151 can be supported in the second pipe 132 accordingly. An O-ring 20 is arranged on the outer wall of the ceramic tube 15 at intervals of 30 to 60 cm along its length direction, and the O-ring 20 is interference-connected in the second pipe 132, wherein an O-ring 20 can be mounted on the upper side of the support ring body 151 to improve the stability of the connection between the ceramic tube 15 and the stainless steel sleeve 13, and also facilitate the extraction of the ceramic tube 15. A hook 21 is arranged at the top of the ceramic tube 15, and when the ceramic tube 15 is replaced, the ceramic tube can be conveniently lifted out by the hook 21.

[0053] The above are preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A tubular reaction device for preparing semiconductor materials, characterized in that: A tubular reaction device (100) comprises a reaction tube body (1) and a first end cap (2) and a second end cap (5) detachably connected to both ends of the reaction tube body (1); a first cover plate (3) is provided at the connection between the first end cap (2) and the reaction tube body (1); a liquid outlet pipe (4) communicating with the inner cavity of the first end cap (2) is provided on the outer wall of the first end cap (2); a second cover plate (6) is provided at the connection between the second end cap (5) and the reaction tube body (1); a partition plate (7) is provided in the second end cap (5) perpendicular to the second cover plate; the partition plate (7) partitions the second end cap (5) into a first cavity (8) and a second cavity (9) which are symmetrically arranged; and a first feed pipe (10) and a second feed pipe (11) are provided on the outer wall of the second end cap (5) corresponding to the first cavity (8) and the second cavity (9), respectively. The first cover plate (3) is provided with a row of first through holes (31) along a diameter direction consistent with the direction of the partition plate (7); the second cover plate (6) is provided with a plurality of pairs of second through holes (61) symmetrically with the partition plate (7) and distributed along its radial direction; each pair of the second through holes (61) is fixedly connected to two leg tubes of a Y-shaped three-way pipe (12) arranged on the second cover plate (6); the top end tube of the Y-shaped three-way pipe (12) is fixedly connected to the lower end of the stainless steel sleeve (13), and the top end of the stainless steel sleeve (13) is connected to the corresponding first through hole (31) of the first cover plate (3); the plurality of Y-shaped three-way pipes (12) arranged on the second cover plate (6) along the length direction of the partition plate (7) are selected from different models and sizes, and the second through holes (61) corresponding to the Y-shaped three-way pipes (12) are arranged approximately evenly on the second cover plate (6); The lower part of the stainless steel sleeve (13) is provided with a mixing core tube (14) connected to the Y-shaped three-way tube (12), and the upper part of the stainless steel sleeve (13) is provided with a ceramic tube (15) connected to the upper end of the mixing core tube (14). The ceramic tube (15) is filled with a filler (18). After the reaction solution is mixed through the mixing core tube (14), it flows through the ceramic tube (15) and is discharged from the liquid outlet tube (4).

2. The tubular reaction device for preparing semiconductor materials according to claim 1, characterized in that: The length of the mixing core tube (14) is 50 to 100 cm and the diameter is 6 to 8 mm; the length of the ceramic tube (15) is 3 to 5 times the length of the mixing core tube (14).

3. The tubular reaction device for preparing semiconductor materials according to claim 2, characterized in that: A plurality of spiral bodies (141) are arranged at intervals in the mixing core tube (14) along its length direction, and spiral guide surfaces (1411) are formed on both sides of the spiral bodies (141).

4. The tubular reaction device for preparing semiconductor materials according to claim 2, characterized in that: A plurality of flow dividing flaps (142) are arranged at intervals in the mixing core tube (14) along its length direction, and the flow dividing flaps (142) are spirally distributed along the circumference of the inner wall of the mixing core tube (14) to form a vortex channel.

5. The tubular reaction device for preparing semiconductor materials according to claim 1, characterized in that: A heat exchange cavity is formed inside the reaction tube body (1) outside the stainless steel casing (13), and a heat exchange medium inlet end tube (16) and a heat exchange medium outlet end tube (17) communicating with the heat exchange cavity are respectively arranged on the upper and lower end side walls of the reaction tube body (1).

6. The tubular reaction device for preparing semiconductor materials according to any one of claims 1 to 5, characterized in that: A first pipe (131) and a second pipe (132) are respectively arranged in the stainless steel casing (13) corresponding to the mixing core pipe (14) and the ceramic pipe (15); the diameter of the first pipe (131) is smaller than the diameter of the second pipe (132); and a conical sealing pipe neck (133) is arranged at the connection between the first pipe (131) and the second pipe (132); The upper end of the mixing core tube (14) is inserted into the first pipe (131) and is lower than the bottom surface of the conical sealing tube neck (133); the lower end of the ceramic tube (15) is sleeved with a sealing member (19); the lower end of the ceramic tube (15) is inserted into the second pipe (132) until the first pipe (131) at the lower end of the conical sealing tube neck (133) is butted against the mixing core tube (14), and the sealing member (19) is inserted into the conical sealing tube neck (133).

7. The tubular reaction device for preparing semiconductor materials according to claim 6, characterized in that: A conical support surface (192) is provided at the lower portion of the outer wall of the sealing element (19) in the circumferential direction corresponding to the conical sealing tube neck (133); the length of the conical support surface (192) is greater than the length of the conical sealing tube neck (133).

8. The tubular reaction device for preparing semiconductor materials according to claim 7, characterized in that: The upper portion of the inner wall of the sealing member (19) is provided with a second limiting ring groove (191) along its circumference; A supporting ring body (151) and a limiting ring body (152) are circumferentially arranged at the lower end of the outer wall of the ceramic tube (15), and a first limiting ring groove (153) is formed between the supporting ring body (151) and the limiting ring body (152); The outer diameter of the support ring body (151) is larger than the outer diameter of the sealing member (19), and as the ceramic tube (15) moves downward, the support ring body (151) can press against the upper end of the sealing member (19) and drive the sealing member (19) to move downward and be inserted into the tapered sealing tube neck (133); the outer diameter of the limiting ring body (152) is smaller than the inner diameter of the second limiting ring groove (191), and the limiting ring body (152) is clamped in the second limiting ring groove (191) and as the ceramic tube (15) moves upward, drives the sealing member (19) to move upward and be out of contact with the tapered sealing tube neck (133); the inner wall of the sealing member (19) is located at the lower side of the second limiting ring groove (191) and is provided with two circles of flexible sealing steps (193) at intervals along the axial direction, and the inner circle of the flexible sealing steps (193) is interference fit with the outer wall of the ceramic tube (15); and the side wall of the sealing member (19) is provided with a tensioning through seam along its axial direction.

9. The tubular reaction device for preparing semiconductor materials according to claim 8, characterized in that: The outer diameter of the ceramic tube (15) is smaller than the inner diameter of the second pipe (132), and the outer diameter of the support ring (151) is not larger than the inner diameter of the second pipe (132); an O-type sealing ring (20) is provided on the outer wall of the ceramic tube (15) at intervals of 30 to 60 cm along its length, and the O-type sealing ring (20) is interference-connected in the second pipe (132); and a hook (21) is provided at the top end of the ceramic tube (15).

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