Aerostatic bearing with circumferential groove structure

Abstract

The invention discloses an air static pressure bearing with a circumferential groove structure, which belongs to the technical field of bearings and comprises a bearing outer ring, a bearing inner ring and a sealing mechanism. The bearing inner ring is sleeved on a core shaft of a rotor, the bearing outer ring is sleeved on the bearing inner ring, and the sealing mechanism is arranged at two axial ends of the bearing outer ring and the bearing inner ring and is in sealing connection with the bearing outer ring and the bearing inner ring; an air inlet hole is formed in the bearing outer ring, and at least one circumferential groove is symmetrically formed in the inner surface of the bearing outer ring along the air inlet hole; an air inlet channel is arranged between the bearing outer ring and the bearing inner ring; an airflow adjusting structure is arranged on the bearing inner ring; the air inlet hole, the air inlet channel and the airflow adjusting structure are sequentially communicated. Stress, strain and displacement of the outer ring of the aerostatic bearing can be effectively reduced, surface fatigue damage is reduced, and the service life of the bearing is prolonged; meanwhile, more stable air pressure and air flow are provided for the inner cavity of the bearing, and vibration is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of bearings, and in particular to an air static pressure bearing with a circumferential groove structure. Background Art

[0002] In the field of high-speed fully CNC machine tools and other high-precision industrial equipment, air static pressure bearings have become indispensable core components due to their unique non-contact design, extremely high rotation accuracy and stability, as well as low wear, low power loss and other significant advantages. This type of bearing forms an air film in the bearing gap through high-pressure air to support and lubricate the rotating parts, thereby achieving high-speed, high-precision and low-noise operation. However, with the continuous improvement of modern industry's requirements for processing accuracy and efficiency, especially the leap-forward growth of high-speed electric spindle speed, traditional air static pressure bearings are facing unprecedented challenges.

[0003] Specifically, the speed of existing electric spindles is as high as tens of thousands to hundreds of thousands of revolutions per minute. Under high-speed rotation, the air static pressure bearing is in a high-frequency cyclic load condition for a long time. Its outer ring surface is very likely to cause fatigue damage due to stress concentration and cyclic loading, which leads to the degradation of bearing performance or even failure. This fatigue damage not only limits the service life of the bearing, but also seriously affects the stability and processing accuracy of the entire machine tool system. In addition, the traditional design still has room for improvement in optimizing airflow distribution and improving air pressure stability to further reduce vibration and improve rotation accuracy.

[0004] Therefore, there is an urgent need to design a high-performance aerostatic bearing to effectively alleviate or solve the fatigue problem of the outer ring of the bearing at high speed, while optimizing the aerodynamic performance and creating a more ideal air pressure environment for the inner cavity of the bearing to support higher speed, longer life and higher precision operation requirements. Summary of the invention

[0005] In view of the problems existing in the above-mentioned prior art, the present invention provides an air static pressure bearing with a circumferential groove structure, which can effectively reduce the stress, strain and displacement of the outer ring of the air static pressure bearing, reduce surface fatigue damage, and extend the service life of the bearing; at the same time, the new structure can make full use of the aerodynamic effect, and can provide a more stable air pressure and airflow for the inner cavity of the bearing, thereby improving the vibration reduction and rotation accuracy of the electric spindle. To achieve the above-mentioned purpose, the present invention provides the following technical solutions:

[0006] An air static pressure bearing with a circumferential groove structure comprises a bearing outer ring, a bearing inner ring and a sealing mechanism;

[0007] The bearing inner ring is sleeved on the core shaft of the rotor, the bearing outer ring is sleeved on the bearing inner ring, and the sealing mechanism is arranged at both axial ends of the bearing outer ring and the bearing inner ring, and is sealed and connected with the bearing outer ring and the bearing inner ring;

[0008] An air inlet hole is provided on the outer ring of the bearing, and at least one circumferential groove is symmetrically provided on the inner surface of the outer ring of the bearing along the air inlet hole; an air inlet channel is provided between the outer ring of the bearing and the inner ring of the bearing; an air flow regulating structure is provided on the inner ring of the bearing; the air inlet hole, the air inlet channel and the air flow regulating structure are connected in sequence.

[0009] Furthermore, an air outlet hole is provided on the outer ring of the bearing, and the air inlet hole and the air outlet hole are opened perpendicular to the extension direction of the outer ring of the bearing and penetrate the outer ring of the bearing.

[0010] Furthermore, the airflow regulating structure includes a plurality of groups of airflow regulating channels, and the airflow regulating channels include a throttle hole and an air cavity, the throttle hole is communicated with the air inlet channel, and the air cavity connects the throttle hole with the cavity of the rotor.

[0011] Furthermore, the throttling hole and the air cavity are opened perpendicular to the extension direction of the bearing inner ring.

[0012] Furthermore, the throttle holes and the air cavities are evenly arranged along the circumferential direction and axial direction of the bearing inner ring.

[0013] Furthermore, a plurality of guide grooves are provided on the outer surface of the bearing inner ring, and the plurality of guide grooves are respectively used to connect the throttling holes in the circumferential direction.

[0014] Furthermore, the sealing mechanism includes a left end cover and a right end cover, and the left end cover and the right end cover are respectively arranged at the axial ends of the bearing inner ring and fixedly connected to the bearing inner ring and the bearing outer ring through a flexible sealing gasket.

[0015] Furthermore, the left end cover and the right end cover are both provided with mounting holes, and the mounting holes are evenly distributed circumferentially along the left end cover and the right end cover; and positioning holes are correspondingly provided on the two end surfaces of the inner ring of the bearing.

[0016] Furthermore, sealing rings are provided at the centers of the inner side walls of the left end cover and the right end cover, and the sealing rings are used to seal the left end cover and the right end cover with the rotor.

[0017] Furthermore, the circumferential groove is one of a rectangular shape, an arc shape, a herringbone shape and a serpentine shape.

[0018] The beneficial effects of the present invention are:

[0019] The present invention discloses an air static pressure bearing with a circumferential groove structure, which reduces stress concentration of the outer ring of the bearing under high-frequency cyclic load, disperses strain, and reduces displacement by setting a circumferential groove structure on the inner surface of the outer ring of the bearing, thereby significantly extending the service life of the bearing and improving the overall performance. At the same time, the circumferential groove structure can also enhance the aerodynamic effect, optimize the airflow distribution, provide more stable air pressure support for the inner cavity of the bearing, further reduce vibration, improve rotation accuracy, and meet the urgent needs of modern industry for high-precision and high-efficiency machine tools. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is an overall diagram of the rectangular groove air static pressure bearing provided by the present invention;

[0021] Figure 2 is a cross-sectional view of a rectangular groove air static pressure bearing provided by the present invention, in which air intake method 1 is adopted, wherein air intake method 1 is a method in which gas enters from an air inlet hole and exits from an air outlet hole;

[0022] Figure 3 It is a cross-sectional view of the rectangular groove air static pressure bearing provided by the present invention in the AA direction, and the air intake method 1 is adopted at this time;

[0023] Figure 4 It is a cross-sectional view of the rectangular groove air static pressure bearing provided by the present invention, and the air intake method 2 is adopted at this time, wherein the air intake method 2 is a method of simultaneously intake air through the air inlet hole and the air outlet hole;

[0024] Figure 5 It is a cross-sectional view of the air static pressure bearing provided by the present invention in the BB direction, and the second air intake method is adopted at this time;

[0025] Figure 6 The outer ring of the rectangular groove air static pressure bearing provided by the present invention;

[0026] Figure 7 The inner ring of the rectangular groove air static pressure bearing provided by the present invention;

[0027] Figure 8 It is a cross-sectional view of the inner ring of the rectangular groove air static pressure bearing provided by the present invention in the CC direction;

[0028] Fig. 9 It is a cross-sectional view of the outer ring of the circular arc groove air static pressure bearing provided by the present invention;

[0029] Fig.10 It is a cross-sectional view of the outer ring of the single arc groove air static pressure bearing provided by the present invention;

[0030] Fig.11 It is a stress cloud diagram of the outer ring of the air static pressure bearing with circular arc groove structure provided by the present invention;

[0031] Fig.12 It is a stress cloud diagram of the outer ring of the conventional structure air static pressure bearing provided by the present invention, wherein the conventional structure air static pressure bearing is a structure that only contains the outer ring of the bearing but does not have the inner ring of the bearing;

[0032] Fig.13 It is a strain cloud diagram of the outer ring of the air static pressure bearing with circular arc groove structure provided by the present invention;

[0033] Fig.14 It is a strain cloud diagram of the outer ring of the conventional structure air static pressure bearing provided by the present invention;

[0034] Fig.15 It is a displacement cloud diagram of the outer ring of the air static pressure bearing with circular arc groove structure provided by the present invention;

[0035] Fig.16 It is a displacement cloud diagram of the outer ring of the conventional structure air static pressure bearing provided by the present invention;

[0036] Fig.17 is a cross-sectional view of a herringbone groove air static pressure bearing provided by the present invention;

[0037] Fig.18 It is a front view of the bearing inner ring of the herringbone groove air static pressure bearing provided by the present invention;

[0038] Fig.19 is a cross-sectional view of a serpentine groove air static pressure bearing provided by the present invention;

[0039] Fig. 20 It is a front view of the bearing inner ring of the serpentine groove air static pressure bearing provided by the present invention;

[0040] In the attached drawings: 101, air inlet; 102, air outlet; 103, bearing outer ring; 104, circumferential groove; 201, air inlet channel; 301, throttle hole; 302, air cavity; 303, bearing inner ring; 304, positioning hole; 305, guide groove; 321, herringbone groove; 331, serpentine groove; 401, rotor; 501, flexible sealing gasket; 601, left end cover; 602, right end cover; 603, mounting hole; 604, sealing ring. DETAILED DESCRIPTION

[0041] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific implementation methods, but the present invention is not limited to the following embodiments.

[0042] Unless otherwise specified, in the present invention, the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", "x direction", "y direction", "z direction", etc. indicating orientation or position relationship are based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, the terms describing the orientation or position relationship in the present invention are only used for illustrative purposes and cannot be understood as a limitation on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood in conjunction with the drawings and according to specific circumstances.

[0043] Embodiment 1:

[0044] See attached Figures 1 to 20 The present invention discloses a high-speed electric spindle air static pressure bearing with a circumferential groove structure, such as Figure 1 and Figure 2 As shown, it includes a bearing outer ring 103, a bearing inner ring 303 and a sealing mechanism, wherein the bearing inner ring 303 is sleeved on the core shaft of the rotor 401, and the bearing outer ring 103 is sleeved on the bearing inner ring 303, that is, the rotor 401 is arranged in the cavity of the bearing inner ring 303, and the bearing inner ring 303 and the bearing outer ring 103 form a thin air film, and the bearing of the rotor 401 is achieved through the air film.

[0045] The outer ring 103 of the bearing is provided with an air inlet hole 101, through which external compressed gas can enter the bearing; an air inlet channel 201 is provided between the outer ring 103 of the bearing and the inner ring 303 of the bearing, and an air flow regulating structure is provided on the inner ring 303 of the bearing, and the air inlet hole 101, the air inlet channel 201 and the air flow regulating structure are connected in sequence. At least one circumferential groove 104 is symmetrically provided along the air inlet hole 101 on the inner surface of the outer ring 103 of the bearing. According to the different requirements for the use of the core shaft of the rotor 401, rectangular, arc-shaped, herringbone-shaped and serpentine-shaped circumferential grooves 104 can be selected. Figure 1 and Figure 2 As shown, Figure 1 and Figure 2 The circumferential grooves 104 are rectangular, and the number of the circumferential grooves 104 is set to two, and the two circumferential grooves 104 are symmetrically arranged along the air inlet 101, which can improve the air vortex effect in the cavity. It can be understood that in this embodiment, the specific number of the circumferential grooves 104 is not limited, and the number of the circumferential grooves 104 can be increased or decreased according to the axial length of the rotor 401.

[0046] When compressed air enters the bearing air inlet channel 201 from the air inlet hole 101, the air is split into two directions and enters the inner cavity through the airflow regulating structure of the bearing inner ring 303 to support the floating rotor 401; the circumferential groove 104 on the bearing outer ring 103 is conducive to improving the air vortex effect in the cavity, increasing the air intake per unit time of the airflow regulating structure, so that the rotor 401 maintains high-speed rotation accuracy, and effectively reduces the wear of the tool or grinding wheel. In order to avoid leakage of compressed gas, a sealing mechanism is also provided, which is arranged at the axial ends of the bearing outer ring 103 and the bearing inner ring 303, and is sealed and connected to the bearing outer ring 103 and the bearing inner ring 303.

[0047] In this embodiment, unlike the conventional air bearing structure which only contains a bearing outer ring but no bearing inner ring, the air static pressure bearing of the present invention is divided into a bearing inner ring 303 and a bearing outer ring 103, so as to facilitate the disassembly and maintenance of the bearing, and the thickness of the air mold can be controlled by adjusting the inner diameter of the bearing inner ring 303 and changing the gap between the bearing inner ring 303 and the rotor 401, so as to improve the rotation accuracy of the rotor; in addition, by providing a circumferential groove 104 on the bearing outer ring 103, it is beneficial to improve the vortex effect of the air in the cavity, and to increase the air intake per unit time of the throttle hole, so that the rotor 401 maintains high-speed rotation accuracy, which can effectively reduce the wear of the tool or grinding wheel.

[0048] Specifically, the outer ring 103 of the bearing is provided with an air outlet 102, and the compressed gas can be taken in from the air inlet 101, and discharged from the air outlet 102 of the outer ring 103 of the bearing along the air passage inside the air bearing. The direction of the air passage can be as follows: Figure 2 , Figure 3 The direction of the arrow is shown. It is also possible to use the air inlet hole 101 and the air outlet hole 102 on the outer ring 103 of the bearing to simultaneously inlet air to improve the stability of the operation of the rotor 401. The direction of the air path can be as follows: Figure 4 , Figure 5 As shown in the direction of the arrow, the external compressed gas enters the air inlet channel 201 through the air inlet hole 101 and the air outlet hole 102 on the bearing outer ring 103 at the same time, and then enters the bearing inner ring 303 through the air flow adjustment structure, and forms a stable air film with the rotor 401, and finally the gas is discharged from the left and right end faces of the bearing.

[0049] Specifically, the airflow regulating structure includes several groups of airflow regulating channels, and the airflow regulating channels include a throttle hole 301 and an air cavity 302. The throttle hole 301 and the air cavity 302 are arranged on the inner ring 303 of the bearing. The throttle hole 301 is communicated with the air inlet channel 201, and the air cavity 302 connects the throttle hole 301 with the cavity of the rotor 401. The rotor 401 and the inner wall of the inner ring 303 of the bearing form an air gap to support the rotation of the rotor 401. The air cavity 302 can be designed in different structures according to specific needs. For example, the air cavity 302 can be a cylindrical cavity, which is used to balance the pressure of the gas entering from the throttle hole 301 and increase the bearing capacity of the rotor 401. The positions of the throttle hole 301 and the air cavity 302 are perpendicular to the axis of the rotor 401 and are evenly distributed on the inner ring 303 of the bearing, so that the gas can enter the cavity of the rotor 401 evenly, and prevent the rotor 401 from colliding with the inner surface of the inner ring 303 of the bearing due to uneven force. In this embodiment, the number of throttle holes 301 distributed circumferentially is eight, and the number of throttle holes 301 distributed axially is four rows. It is understandable that this embodiment does not limit the number and arrangement of throttle holes 301, and they can be increased or decreased according to the shaft diameter and shaft length of the rotor 401. When the air static pressure bearing is working, the external compressed gas enters the air inlet channel 201 through the air inlet hole 101. After the gas passes through the circumferential groove 104, it provides a more stable air pressure and airflow. The airflow then passes through the throttle hole 301 and the air cavity 302 in turn to enter the bearing inner ring 303 and form a stable air film with the rotor 401. Finally, the gas is discharged from the air outlet hole 102 of the bearing outer ring.

[0050] Specifically, Figure 7 As shown, a plurality of guide grooves 305 are provided on the outer surface of the bearing inner ring 303, which are respectively connected to the throttling holes 301 in the circumferential direction. When the bearing is working, as the compressed gas enters the outer surface of the bearing inner ring 303, the guide grooves 305 can guide the gas flowing through the outer surface of the bearing inner ring 303, making it easier for the gas to enter the throttling holes 301, while reducing the pressure drop of the gas along the outer surface of the bearing inner ring 303, thereby improving the stability of the operation of the rotor 401.

[0051] Specifically, in order to reduce bearing gas leakage, the air static pressure bearing is provided with two sealing mechanisms, one of which is set between the left end cover 601, the right end cover 602 and the bearing inner ring 303 and the bearing outer ring 103, and by pressing the flexible sealing gasket 501, the gas leakage between the bearing outer ring 103 and the bearing inner ring 303 is reduced to avoid the reduction of the bearing inner ring air intake due to leakage. The other is set between the left end cover 601, the right end cover 602 and the rotor 401, and the inner hole of the left end cover 601 and the right end cover 602 is sealed with the rotor 401 through the sealing ring 604 to reduce the gas leakage at both ends of the rotor 401; at the same time, in order to facilitate the installation of the left end cover 601 and the right end cover 602, positioning holes 304 are opened on the left and right end faces of the bearing inner ring. Among them, the sealing mechanism can be adjusted to match different air intake methods. Specifically, when the air is taken in through the air inlet 101 and discharged through the air outlet 102, the left end cover 601, the right end cover 602 and the bearing inner ring 303 and the bearing outer ring 103 are sealed and connected through the flexible sealing gasket 501; at the same time, the inner hole of the left end cover 601 and the right end cover 602 is sealed with the rotor 401 through the sealing ring 604. When the air is taken in through the air inlet 101 and the air outlet 102 at the same time, at this time, the left end cover 601, the right end cover 602 and the bearing inner ring 303 and the bearing outer ring 103 are still sealed and connected through the flexible sealing gasket 501; but the inner holes of the left end cover 601 and the right end cover 602 and the rotor 401 are not sealed through the sealing ring 604. For example, a flexible sealing gasket with an adjustable outer diameter can be used to leave a gap for gas discharge between the inner holes of the left end cover 601 and the right end cover 602 and the rotor 401, so that the gas can be discharged from the left and right end faces of the bearing.

[0052] Embodiment 2:

[0053] See attached Figures 1 to 20 On the basis of the first embodiment, in this embodiment, the circumferential groove 104 provided on the outer ring 103 of the bearing is set to be an arc shape, and the other structures of the bearing remain unchanged. Compared with the rectangular circumferential groove 104, the arc-shaped circumferential groove 104 can reduce the resistance and turbulence of the airflow, provide better fluid dynamic characteristics, thereby improving the ventilation effect and airflow uniformity, helping to reduce vibration and improve rotation accuracy, thereby effectively reducing the wear of the tool or grinding wheel. Fig. 9 and Fig.10 As shown, Fig. 9 Two arc-shaped circumferential grooves 104 are provided on the bearing outer ring 103. Fig.10 A single arc-shaped circumferential groove 104 is provided on the bearing outer ring 103 .

[0054] In order to verify the structural and functional superiority of the air static pressure bearing in this embodiment, taking the bearing outer ring 103 with a single arc-shaped circumferential groove 104 as an example, three-dimensional models of the air static pressure bearing outer ring 103 with a single arc-shaped circumferential groove 104 structure and the traditional air static pressure bearing outer ring were established respectively, and the influence of compressed air on the stress, strain and displacement of the bearing outer ring was analyzed. Finite element analysis was performed on the bearing outer ring 103 with an arc-shaped circumferential groove 104 structure and the traditional structure bearing outer ring. The material is steel, the elastic modulus is 200GPa, the Poisson's ratio is 0.3, and the grid unit is a regular octahedron. The load addition method is Pressure, and the constraint is a fixed constraint on the outer surface of the bearing outer ring.

[0055] Fig.11 and Fig.12 By comparison, it was found that the maximum stress of the outer ring of the traditional bearing structure occurs at the center of the inner surface, which is about 4.958 KPa, while the maximum stress of the outer ring 103 of the bearing with the arc-shaped circumferential groove 104 structure occurs on both sides of the arc-shaped circumferential groove 104, which is about 4.5018 KPa, and the stress of the circumferential groove 104 is about 4.052 KPa; it is obvious that under the same cyclic load, the maximum stress of the outer ring 103 of the bearing with the arc-shaped circumferential groove 104 structure is reduced by about 0.858 KPa, and the stress at the center of the inner surface of the outer ring is reduced by 0.906 KPa, and the stress is reduced by about 18.27%. Fig.13 and Fig.14 By comparison, it is found that the maximum strain of the bearing outer ring 103 with the arc-shaped circumferential groove 104 structure occurs on both sides of the arc-shaped circumferential groove 104, and the maximum strain is reduced by about 15.69%. The maximum strain at the arc-shaped circumferential groove 104 is reduced by about 18.17%. Fig.15 and Fig.16 By comparison, it is found that the maximum displacement of the bearing outer ring 103 with the arc-shaped circumferential groove 104 structure is reduced by 0.23 μm compared with the ordinary structure, which is a decrease of about 1.101%.

[0056] Embodiment three:

[0057] See attached Figures 1 to 20. On the basis of the second embodiment, in this embodiment, the circumferential groove 104 provided on the outer ring 103 of the bearing is set to a herringbone shape, and the other structures of the bearing remain unchanged. The above-mentioned simulation structure shows that in the design of the air static pressure bearing, the shape of the circumferential groove 104 has a significant effect on the airflow characteristics and the bearing performance. Compared with the arc shape, the herringbone circumferential groove 104 has the following obvious advantages. First, airflow guidance: The inclined surface design of the herringbone circumferential groove 104 helps to guide the airflow more smoothly, reduce fluid separation and turbulence, improve the uniformity of the airflow, reduce the eddy effect, and make the air distribution more uniform. Second, reduce vibration: Since the airflow is more stable, the herringbone circumferential groove 104 can effectively reduce the vibration of the bearing and provide a smoother rotation, which is particularly important for high-speed electric spindles. Third, improve the cooling effect: The airflow distribution of the herringbone circumferential groove 104 can better take away heat from the bearing surface, thereby enhancing the cooling effect and helping to maintain the performance and life of the bearing and the tool. Therefore, in this embodiment, the circumferential groove 104 is configured as a herringbone groove 321. Since it is difficult to machine the herringbone groove 321 on the inner surface of the bearing outer ring 103, in this embodiment, the herringbone groove 321 is configured on the outer surface of the bearing inner ring 303. Fig.17 and Fig.18 As shown, Fig.17 This is a cross-sectional view of a herringbone groove 321 air static pressure bearing. Fig.18 It is a front view of the bearing inner ring 303 with the herringbone groove 321 .

[0058] Embodiment 4:

[0059] See attached Figures 1 to 20. On the basis of the third embodiment, in this embodiment, the circumferential groove 104 provided on the outer ring 103 of the bearing is set to be serpentine, and the other structures of the bearing remain unchanged. In the design of the air static pressure bearing, the serpentine circumferential groove 104 has the following unique advantages compared with the herringbone circumferential groove 104. First, the airflow stability can be improved. The continuous curved path of the serpentine circumferential groove 104 helps to smooth the airflow and reduce eddy currents and separation phenomena. This airflow stability can reduce the vibration inside the bearing and improve the rotation accuracy. Second, the uniformity of the airflow can be enhanced. The complex shape of the serpentine circumferential groove 104 can distribute the airflow more evenly and avoid local concentration of the airflow. This uniform distribution helps to improve the cooling effect and reduce the heat accumulation caused by uneven airflow. Third, the cooling performance can be optimized. Since the design of the serpentine circumferential groove 104 allows air to flow over a longer path, it can more effectively take away heat, thereby improving the cooling efficiency. Better cooling effect helps to maintain the performance of the electric spindle and extend the service life of the tool or grinding wheel. In general, the serpentine circumferential groove 104 can further optimize the operating stability and accuracy of the rotor 401 by improving the airflow path and improving the cooling efficiency, and may show better performance in some application scenarios than the herringbone groove 321. Therefore, in this embodiment, the circumferential groove 104 structure is set as a serpentine groove 331 structure. Since it is difficult to machine the serpentine groove 331 on the inner surface of the bearing outer ring 103, the serpentine groove 331 structure is set on the outer surface of the bearing inner ring 303 in this embodiment. Fig.19 and Fig. 20 As shown, Fig.19 The sectional view of the serpentine groove 331 air bearing is shown in FIG. Fig. 20 The front view of the bearing inner ring 303 with the serpentine groove 331 is shown.

[0060] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. An air static pressure bearing with a circumferential groove structure, characterized in that: It comprises a bearing outer ring (103), a bearing inner ring (303) and a sealing mechanism; The bearing inner ring (303) is sleeved on the core shaft of the rotor (401), the bearing outer ring (103) is sleeved on the bearing inner ring (303), and the sealing mechanism is provided at two axial ends of the bearing outer ring (103) and the bearing inner ring (303), and is sealedly connected to the bearing outer ring (103) and the bearing inner ring (303); An air inlet hole (101) is provided on the bearing outer ring (103); and at least one circumferential groove (104) is symmetrically provided on the inner surface of the bearing outer ring (103) along the air inlet hole (101); an air inlet channel (201) is provided between the bearing outer ring (103) and the bearing inner ring (303); an air flow regulating structure is provided on the bearing inner ring (303); and the air inlet hole (101), the air inlet channel (201) and the air flow regulating structure are sequentially connected.

2. The air static pressure bearing with a circumferential groove structure according to claim 1, characterized in that: An air outlet hole (102) is also provided on the bearing outer ring (103); the air inlet hole (101) and the air outlet hole (102) are opened perpendicular to the extension direction of the bearing outer ring (103) and penetrate the bearing outer ring (103).

3. The air static pressure bearing with a circumferential groove structure according to claim 1, characterized in that: The airflow regulating structure comprises a plurality of groups of airflow regulating channels, wherein the airflow regulating channels comprise a throttle hole (301) and an air cavity (302), wherein the throttle hole (301) is in communication with the air inlet channel (201), and the air cavity (302) connects the throttle hole (301) with the cavity of the rotor (401).

4. The air static pressure bearing with a circumferential groove structure according to claim 3, characterized in that: The throttling hole (301) and the air cavity (302) are opened perpendicularly to the extension direction of the bearing inner ring (303).

5. The air static pressure bearing with a circumferential groove structure according to claim 3, characterized in that: The throttling holes (301) and the air cavities (302) are evenly arranged along the circumferential direction and axial direction of the bearing inner ring (303).

6. The air static pressure bearing with a circumferential groove structure according to claim 5, characterized in that: A plurality of guide grooves (305) are provided on the outer surface of the bearing inner ring (303), and the plurality of guide grooves (305) are respectively used to connect to throttling holes (301) in the circumferential direction.

7. The air static pressure bearing with a circumferential groove structure according to claim 1, characterized in that: The sealing mechanism comprises a left end cover (601) and a right end cover (602), wherein the left end cover (601) and the right end cover (602) are respectively arranged at two axial ends of the bearing inner ring (303), and are fixedly connected to the bearing inner ring (303) and the bearing outer ring (103) through a flexible sealing gasket (501).

8. The air static pressure bearing with a circumferential groove structure according to claim 7, characterized in that: The left end cover (601) and the right end cover (602) are both provided with mounting holes (603), and the mounting holes (603) are evenly distributed circumferentially along the left end cover (601) and the right end cover (602); positioning holes (304) are correspondingly opened on the two end surfaces of the bearing inner ring (303).

9. The air static pressure bearing with a circumferential groove structure according to claim 7, characterized in that: A sealing ring (604) is provided at the center of the inner side wall of the left end cover (601) and the right end cover (602), and the sealing ring (604) is used to seal the left end cover (601) and the right end cover (602) with the rotor (401).

10. The air static pressure bearing with a circumferential groove structure according to claim 1, characterized in that: The circumferential groove (104) is in the shape of a rectangle, an arc, a herringbone or a serpentine.

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