Multi-mode microscopic optical detection system

Abstract

The invention relates to the technical field of microscopic optical detection, in particular to a multi-mode microscopic optical detection system which comprises a microscopic system, and a Raman module, a fluorescent module, a polarization module and a hyperspectral module which are arranged on the microscopic system, wherein a sample is placed in the microscopic system, and the microscopic system emits illumination light to the sample; the Raman module and the fluorescent module emit corresponding light beams to the same position of the sample, so that the sample generates Raman light and fluorescent light; the Raman light returns to the Raman module, the fluorescence returns to the fluorescence module, the illumination light is reflected by the sample and then enters the polarization module and the hyperspectral module, and the characterization of the same position of the sample under different lights is obtained. According to the invention, the same position of the detected sample is detected by a plurality of detection modules, so that multi-dimensional detection of the detected sample can be realized. And the multi-dimensional detection can improve the accuracy and reliability of the detection, and in addition, the multi-dimensional results can more comprehensively understand the sample.

Description

Technical Field

[0001] The present invention belongs to the technical field of microscopic optical detection, and in particular relates to a multimodal microscopic optical detection system. Background Art

[0002] Confocal microscopy is a high-resolution, high-sensitivity microscope that can obtain clear three-dimensional structural information of samples by using the confocal imaging principle. Confocal microscopy is usually combined with other detection methods to obtain multi-dimensional sample information. Commonly combined detection methods include: Raman spectroscopy, fluorescence spectroscopy, polarization imaging and hyperspectral imaging. Raman spectroscopy can provide information about the chemical composition, molecular structure, crystal structure, solvent effect, stress and strain of the sample; fluorescence spectroscopy can provide information about the molecular structure, solvent environment and chemical properties of the sample; polarization imaging can provide information about the structure, orientation and stress distribution of the sample by analyzing the polarization state of light; hyperspectral imaging can provide rich spectral information and spatial distribution information.

[0003] When there is a high demand for detection information on the sample being tested, the confocal microscope needs to combine multiple detection methods to meet the detection needs. However, since the confocal microscope is usually equipped with a high numerical aperture objective, the objective focuses the laser beam into a very small area. In the process of changing different detection systems, due to the need to move the sample being tested, it is difficult for different detection systems to detect the same position of the sample being tested, which makes it difficult for the overall detection process to achieve multi-dimensional detection of the same position of the sample being tested. At the same time, moving the reflector will cause changes in optical parameters such as focal length. In order to cope with this problem, it is usually equipped with an automatic or manual focus adjustment mechanism. By real-time monitoring and adjusting the focal length, it can ensure that the laser beam is always accurately focused on the sample surface to obtain high-quality spectral data. Summary of the invention

[0004] In view of this, the invention aims to provide a multimodal microscopic optical detection system, which uses multiple detection modules to detect the same position of the sample to be detected, and can realize multi-dimensional detection of the sample to be detected. Multi-dimensional detection can improve the accuracy and reliability of detection, and the results of multiple dimensions will provide a more comprehensive understanding of the sample.

[0005] To achieve the above object, the technical solution created by the present invention is implemented as follows: A multimodal microscopic optical detection system includes a microscopic system, a Raman module, a fluorescence module, a polarization module and a hyperspectral module; wherein: The sample is placed in a microscope system, which emits illumination light to the sample; The Raman module includes a Raman spectrometer and a Raman imaging structure. The Raman spectrometer emits a Raman light excitation laser to the sample through the Raman imaging structure. The sample generates Raman light after being excited by the Raman light excitation laser. The Raman light enters the Raman spectrometer through the Raman imaging structure. The fluorescence module includes a fluorescence spectrometer and a fluorescence imaging structure. The fluorescence spectrometer emits a fluorescence excitation laser to the sample through the fluorescence imaging structure. The sample generates fluorescence after being excited by the fluorescence excitation laser, and the fluorescence enters the fluorescence spectrometer through the fluorescence imaging structure. The polarization module includes a polarization imaging structure and a polarization imager, and the hyperspectral imaging module includes a hyperspectral imaging structure and a hyperspectral imager; after being reflected by the sample, the illumination light passes through the polarization imaging structure and the hyperspectral imaging structure and enters the polarization imager and the hyperspectral imager respectively; The Raman imaging structure, the fluorescence imaging structure, the polarization imaging structure and the hyperspectral imaging structure are arranged on the microscope system with the same optical axis, so that the Raman light, the fluorescence light and the illumination light reflected by the sample come from the same position of the sample, thereby obtaining the characterization of the same position of the sample under different lights.

[0006] Furthermore, the Raman imaging structure includes a white light optical path, a laser optical path, a Raman imaging optical path, and a camera optical path; The white light path is connected to the white light source of the Raman spectrometer, and the white light source irradiates white light to the sample through the white light path and the Raman imaging light path; The laser optical path is connected to the laser of the Raman spectrometer, and the laser irradiates the sample with Raman light excitation laser through the laser optical path and the Raman imaging optical path; The Raman imaging optical path is connected to the Raman spectrometer, the Raman imaging optical path receives the Raman light and the white light reflected back by the sample, and inputs the Raman light into the Raman spectrometer; the camera optical path receives the light beam reflected back by the sample to complete the shooting of the sample.

[0007] Furthermore, the Raman imaging optical path includes a movable reflecting device, a first beam splitter and a first Raman filter; wherein the Raman light and the white light reflected back by the sample are irradiated on the first beam splitter through the movable reflecting device; the first beam splitter splits the Raman light into the first Raman light and the second Raman light; the first Raman light enters the Raman spectrometer after passing through the first Raman filter; the second Raman light and the white light reflected back by the sample enter the camera optical path through the white light optical path.

[0008] Furthermore, the laser optical path includes a laser filter and a second Raman filter; wherein: the laser emits a Raman light excitation laser; the Raman light excitation laser passes through the laser filter and irradiates the second Raman filter; the Raman light excitation laser is reflected by the second Raman filter to the first beam splitter; and the Raman light excitation laser passes through the first beam splitter and is reflected by the movable reflection device to the sample.

[0009] Furthermore, the white light path includes a second beam splitter; wherein the white light emitted by the white light source is irradiated onto the first beam splitter after passing through the second beam splitter; and the white light is irradiated onto the sample after passing through the first beam splitter and the movable reflection device in sequence.

[0010] Furthermore, the camera optical path includes a camera; wherein the movable reflection device irradiates the second Raman light and the white light reflected by the sample onto the second beam splitter; the second Raman light and the white light reflected by the second beam splitter enter the camera.

[0011] Furthermore, the fluorescence module includes a fluorescence spectrometer and a fluorescence imaging structure; wherein the fluorescence imaging structure includes a movable reflecting device and a dichroic mirror; wherein the laser in the fluorescence spectrometer emits a fluorescence excitation laser; the fluorescence excitation laser is reflected by the dichroic mirror onto the movable reflecting device; the movable reflecting device reflects the fluorescence excitation laser onto the sample; the fluorescence is reflected by the movable reflecting device onto the dichroic mirror; and the fluorescence enters the fluorescence spectrometer through the dichroic mirror.

[0012] Furthermore, the polarization imaging structure includes a movable reflection device, the sample reflects the illumination light onto the movable reflection device; and the movable reflection device reflects the illumination light into the polarization imager.

[0013] Furthermore, the hyperspectral imaging structure includes a movable reflecting device, and the sample reflects the illumination light onto the movable reflecting device; the movable reflecting device reflects the illumination light into the hyperspectral imager.

[0014] Furthermore, the mobile reflection device includes an electric displacement stage and a plane reflection mirror arranged on the electric displacement stage. Compared with the prior art, the invention can achieve the following beneficial effects: (1) In the multimodal microscopic optical detection system created by the present invention, multiple detection modules are integrated into one microscopic detection system, so that multiple detection results at the same position of the sample under test can be obtained, and multi-dimensional detection of the sample under test can be realized, thereby having the advantages of high resolution, high sensitivity, high efficiency, rich information and wide application range, thereby improving the accuracy and reliability of detection and providing a more comprehensive understanding of the sample; (2) In the multimodal microscopic optical detection system created by the present invention, different detection instruments can detect the sample under test by setting a mobile reflection device, which effectively avoids the problem of low detection efficiency caused by moving the sample under test during the replacement of different detection instruments. At the same time, it can solve the problems of being unable to detect the same position and low detection efficiency due to the light beam focusing on a very small area. This effectively improves the detection efficiency and detection accuracy, and can realize multi-dimensional analysis of the same position of the sample under test to achieve comprehensive analysis; (3) In the multimodal microscopic optical detection system created by the present invention, each module does not affect each other during the detection process, and one or more modules can be flexibly selected for purchase based on specific detection requirements and budget. Users can add required modules at any time based on actual needs and available budget to achieve more comprehensive detection functions while reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings constituting part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments and descriptions of the present invention are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings: Figure 1 The overall schematic diagram of the multimodal microscopic optical detection system described in the embodiment of the present invention; Figure 2 A schematic diagram of the optical path structure of the Raman module according to an embodiment of the present invention; Figure 3 A schematic diagram of the optical path structure of the fluorescent module according to an embodiment of the present invention; Figure 4 Schematic diagram of the optical path structure of the polarization module according to the embodiment of the present invention Figure 5 A schematic diagram of the optical path structure of the hyperspectral imaging module according to an embodiment of the present invention; Figure 6 A schematic diagram of the optical paths between various structures and between microscope objective lenses in the hyperspectral imaging module described in an embodiment of the present invention.

[0016] Description of reference numerals: 1. Sample stage; 2. Microscope objective; 3. Annular white light source; 4. Eyepiece; 5. Raman imaging structure; 6. Raman spectrometer; 7. Fluorescence imaging structure; 8. Fluorescence spectrometer; 9. Polarization imaging structure; 10. Polarization imager; 11. Hyperspectral imaging structure; 12. Hyperspectral imager; 13. Optical fiber; 14. First beam splitter; 15. First Raman filter; 16. Achromatic lens; 17. Second Raman filter; 18. Laser filter; 19. Light emitter; 20. Plane reflector; 21. Second beam splitter; 22. Camera; 23. Dichroic mirror; 24. Light receiver; 25. Electric translation stage. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solution and advantages of the invention more clear, the invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the invention and do not constitute a limitation of the invention.

[0018] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0019] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0020] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0021] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0022] like Figure 1 to Figure 6 As shown, the multimodal microscopic optical detection system described in the embodiment of the invention includes a microscopic system, a Raman module, a fluorescence module, a polarization module and a hyperspectral module. The sample is placed in the microscopic system, the microscopic system emits illumination light to the sample, and the Raman module and the fluorescence module emit corresponding light beams to the same position of the sample, so that the sample generates Raman light and fluorescence. The Raman light returns to the Raman module, the fluorescence returns to the fluorescence module, and the illumination light is reflected by the sample and enters the polarization module and the hyperspectral module to obtain the characterization of the same position of the sample under different light.

[0023] In the embodiment of the present invention, the microscope system includes a sample stage 1, a microscope objective lens 2, an annular white light source 3 and an eyepiece 4. The sample is placed on the sample stage 1, the microscope objective lens 2 is mounted above the sample stage 1, the annular white light source 3 is mounted on the microscope objective lens 2, the annular white light source 3 emits illumination light to the sample, the illumination light reflected by the sample passes through the microscope objective lens 2 and enters the polarization module and the hyperspectral module to obtain the characterization of the sample under the illumination light, and at the same time, the illumination light reflected by the sample enters the eyepiece 4, and the operator observes the condition of the sample through the eyepiece 4.

[0024] The Raman module includes a Raman imaging structure 5 and a Raman spectrometer 6. Figure 2 As shown, the Raman imaging structure 5 includes a laser optical path, a Raman imaging optical path, a white light optical path, and a camera optical path. The laser optical path is connected to the laser of the Raman spectrometer 6 through the optical fiber 13. The laser irradiates the Raman light excitation laser to the sample through the laser optical path and the Raman imaging optical path. The sample generates Raman light after being excited by the Raman light excitation laser. The white light optical path is connected to the white light source of the Raman spectrometer 6 through the optical fiber 13. The white light source irradiates white light to the sample through the white light optical path and the Raman imaging optical path. The Raman imaging optical path is connected to the Raman spectrometer 6 through the optical fiber 13. The Raman imaging optical path receives the Raman light and the white light reflected back by the sample, and inputs the Raman light into the Raman spectrometer 6. The camera optical path receives the light beam reflected back by the sample to complete the shooting of the sample.

[0025] The Raman imaging optical path includes a movable reflection device, a first beam splitter 14 and a first Raman filter 15. Among them, the Raman light and the white light reflected by the sample are irradiated on the first beam splitter 14 through the movable reflection device, and the first beam splitter 14 divides the Raman light into a first Raman light and a second Raman light. After passing through the first Raman filter 15, the first Raman light and the white light enter the Raman spectrometer 6 through the optical fiber 13, and the second Raman light and the white light enter the camera optical path through the white light optical path. In an embodiment of the present invention, the first Raman filter 15 is preferably set to a 532nm long-wave pass filter. In order to improve the quality of receiving Raman light, one end of the optical fiber 13 is connected to the Raman spectrometer 6, and the other end of the optical fiber 13 is connected to the optical receiver 24. At the same time, an achromatic lens 16 is arranged between the optical receiver 24 and the first Raman filter 15. The first Raman light passing through the first Raman filter 15 passes through the achromatic lens 16, and is finally received by the optical receiver 24 and enters the Raman spectrometer 6 through the optical fiber 13.

[0026] The laser optical path includes a second Raman filter 17 and a laser filter 18. The Raman light excitation laser emitted by the laser of the Raman spectrometer 6 passes through the laser filter 18 and then irradiates the second Raman filter 17. The Raman light excitation laser is reflected by the second Raman filter 17 to the first beam splitter 14 in the Raman imaging optical path, and finally the Raman light excitation laser passes through the first beam splitter 14 and is reflected to the sample by the movable reflection device. In an embodiment of the present invention, in order to improve the laser light emission quality of the laser in the Raman spectrometer 6, one end of the optical fiber 13 is connected to the laser, and the other end of the optical fiber 13 is connected to the light emitter 19. The Raman light excitation laser from the laser can be concentrated at the light emitter 19 after being transmitted by the optical fiber 13, and an achromatic lens 16 is arranged between the light emitter 19 and the laser filter 18. At the same time, in order to reduce the volume of the Raman imaging structure 5, two plane mirrors 20 for folding the optical path are preferably provided between the laser filter 18 and the second Raman filter 17, that is, the laser light passing through the laser filter 18 is continuously reflected by the two plane mirrors 20 and then transmitted to the second Raman filter 17. The second Raman filter 17 is preferably configured as a superimposed filter, one filter in the second Raman filter 17 is a 532nm long-wave pass filter, and the other is a 700nm short-wave pass filter.

[0027] Since a single Raman filter cannot guarantee complete filtering of the 532nm laser, in an embodiment of the present invention, the first Raman filter 15 and the second Raman filter 17 are used in a superimposed manner, that is, in the Raman imaging optical path, the first Raman light separated by the first beam splitter 14 first passes through the second Raman filter 17 and then passes through the first Raman filter 15. The two superimposed Raman filters can better filter out the 532nm laser.

[0028] The white light path includes a second beam splitter 21. The white light emitted by the white light source of the Raman spectrometer 6 is irradiated onto the first beam splitter 14 after passing through the second beam splitter 21. The white light is irradiated onto the sample after passing through the first beam splitter 14 and the movable reflecting device in sequence. In the embodiment of the present invention, in order to improve the light emission quality of the white light source in the Raman spectrometer 6, one end of the optical fiber 13 is connected to the white light source, and the other end of the optical fiber 13 is connected to the light emitter 19. The white light from the white light source can be concentrated at the light emitter 19 after being transmitted by the optical fiber 13. At the same time, an achromatic lens 16 is arranged between the light emitter 19 and the second beam splitter 21, and a plane reflector 20 is arranged between the first beam splitter 14 and the second beam splitter 21, so that the white light passing through the second beam splitter 21 is reflected by the plane reflector 20 onto the first beam splitter 14.

[0029] The camera optical path includes a camera 22. The first beam splitter 14 irradiates the second Raman light and the white light onto the second beam splitter 21, and the second Raman light and the white light reflected by the second beam splitter 21 enter the camera 22. In the embodiment of the present invention, in order to improve the imaging quality of the camera 22, an achromatic lens 16 is arranged in front of the camera 22, and a plane reflector 20 is arranged between the achromatic lens 16 and the second beam splitter 21, so that the second Raman light transmitted by the second beam splitter 21 is reflected by the plane reflector 20 onto the achromatic lens 16, and the second Raman light passes through the achromatic lens 16 and enters the camera 22, so that the camera 22 collects the second Raman light and completes the shooting of the sample.

[0030] In the embodiment of the present invention, an electric translation stage 25 is provided at the first beam splitter 14. When the camera optical path is required to shoot the sample, the electric translation stage 25 is controlled to drive the first beam splitter 14 to move, so that the first beam splitter 14 splits the Raman light into the first Raman light and the second Raman light, and at the same time, the first beam splitter 14 reflects the white light onto the second beam splitter 21, and the second Raman light and the white light enter the camera 22 together. When the camera optical path is not required to shoot the sample, the electric translation stage 25 is controlled to drive the first beam splitter 14 to move, so that the Raman light directly passes through the first Raman filter 15 and the second Raman filter 17 and enters the Raman spectrometer 6. At the same time, in order to enable the Raman imaging structure 5 to stably emit Raman light excitation laser to the sample and receive Raman light, it is preferred that the Raman imaging structure 5 is installed in a shielding shell, and an optical hole for emitting laser and receiving Raman light is left at the bottom of the shielding shell, and an observation hole matching the eyepiece 4 is left at the top of the shielding shell.

[0031] The fluorescence module includes a fluorescence imaging structure 7 and a fluorescence spectrometer 8. Figure 3 As shown, the fluorescence imaging structure 7 includes a mobile reflecting device and a dichroic mirror 23. The laser in the fluorescence spectrometer 8 emits a fluorescence excitation laser through the optical fiber 13, and the fluorescence excitation laser is reflected by the dichroic mirror 23 to the mobile reflecting device, and the mobile reflecting device reflects the fluorescence excitation laser to the sample. The sample is excited by the fluorescence excitation laser to generate fluorescence, and the fluorescence is reflected by the mobile reflecting device to the dichroic mirror 23. The fluorescence passes through the dichroic mirror 23 and enters the fluorescence spectrometer 8 through the optical fiber 13.

[0032] In the embodiment of the present invention, in order to improve the laser light emission quality of the laser in the fluorescence spectrometer 8, one end of the optical fiber 13 is connected to the laser, and the other end of the optical fiber 13 is connected to the light emitter 19. The fluorescence excitation laser from the laser can be concentrated at the light emitter 19 after being transmitted by the optical fiber 13, and an achromatic lens 16 is arranged between the light emitter 19 and the dichroic mirror 23. In order to improve the receiving quality of fluorescence, one end of the optical fiber 13 is connected to the fluorescence spectrometer 8, and the other end of the optical fiber 13 is connected to the light receiver 24. At the same time, an achromatic lens 16 and a plane mirror 20 are arranged between the light receiver 24 and the dichroic mirror 23. The fluorescence passing through the dichroic mirror 23 is reflected by the plane mirror 20 and then passes through the achromatic lens 16, and is finally received by the light receiver 24 and enters the fluorescence spectrometer 8 through the optical fiber 13.

[0033] At the same time, in order to enable the fluorescent imaging structure 7 to stably emit fluorescent excitation laser to the sample and receive fluorescence, it is preferred to install the fluorescent imaging structure 7 in a shielding shell, and leave light holes for emitting laser and receiving fluorescence at the bottom of the shielding shell, and leave an observation hole matching the eyepiece 4 at the top of the shielding shell.

[0034] The polarization module includes a polarization imaging structure 9 and a polarization imager 10 . The polarization imaging structure 9 includes a moving reflection device, the sample reflects the illumination light onto the moving reflection device, and the moving reflection device reflects the illumination light and enters the polarization imager 10 through the optical fiber 13 .

[0035] In an embodiment of the present invention, in order to improve the polarization imaging effect, one end of the optical fiber 13 is connected to the polarization imager 10, and the other end of the optical fiber 13 is connected to the light receiver 24. At the same time, an achromatic lens 16 is arranged between the light receiver 24 and the movable reflecting device. The illumination light reflected by the movable reflecting device passes through the achromatic lens 16, is received by the light receiver 24, and enters the polarization imager 10 through the optical fiber 13.

[0036] At the same time, in order to enable the polarization imaging structure 9 to stably receive the illumination light, the polarization imaging structure 9 is preferably installed in a shielding shell, and a light hole for receiving the illumination light is left at the bottom of the shielding shell, and an observation hole matching the eyepiece 4 is left at the top of the shielding shell.

[0037] The hyperspectral imaging module includes a hyperspectral imaging structure 11 and a hyperspectral imager 12. The hyperspectral imaging structure 11 includes a mobile reflecting device, the sample reflects the illumination light onto the mobile reflecting device, and the mobile reflecting device reflects the illumination light and enters the hyperspectral imager 12 through the optical fiber 13.

[0038] In an embodiment of the present invention, in order to improve the hyperspectral imaging effect, one end of the optical fiber 13 is connected to the hyperspectral imager 12, and the other end of the optical fiber 13 is connected to the light receiver 24. At the same time, an achromatic lens 16 is arranged between the light receiver 24 and the movable reflecting device. The illumination light reflected by the movable reflecting device passes through the achromatic lens 16, is received by the light receiver 24, and enters the hyperspectral imager 12 through the optical fiber 13.

[0039] At the same time, in order to enable the hyperspectral imaging structure 11 to stably receive illumination light, it is preferred to install the hyperspectral imaging structure 11 in a shielding shell, and leave a light hole for receiving illumination light at the bottom of the shielding shell, and leave an observation hole matching the eyepiece 4 at the top of the shielding shell.

[0040] The Raman imaging structure 5, the fluorescence imaging structure 7, the polarization imaging structure 9 and the hyperspectral imaging structure 11 are arranged on the microscope system with the same optical axis, so that the Raman light, the fluorescence and the illumination light reflected by the sample come from the same position of the sample, thereby obtaining the characterization of the same position of the sample under different light. In the embodiment of the present invention, the Raman imaging structure 5, the fluorescence imaging structure 7, the polarization imaging structure 9 and the hyperspectral imaging structure 11 are fixed between the white light source and the eyepiece 4 by screws and a support frame, and the positions between these structures can be adjusted according to actual conditions, and all the observation holes and light holes of the shielding shell are arranged on the optical path between the eyepiece 4 and the sample, so that all the observation holes and light holes are on the same optical axis, thereby making the center position of the light spot irradiated on the sample unchanged. The mobile reflection device in the Raman imaging structure 5, the fluorescence imaging structure 7, the polarization imaging structure 9 and the hyperspectral imaging structure 11 includes an electric displacement stage 25, and a plane reflector 20 arranged on the electric displacement stage 25.

[0041] When using the multimodal microscopic optical detection system provided by the embodiment of the present invention, for example, when it is necessary to observe the fluorescence characterization characteristics of the sample, the electric displacement stage 25 in the Raman imaging structure 5, the polarization imaging structure 9 and the hyperspectral imaging structure 11 is controlled to make the plane reflector 20 on the electric displacement stage 25 away from the light holes of the respective structures, so that the fluorescence generated by the sample does not enter the structure except the fluorescence imaging structure 7. When it is necessary to replace other structures to complete the characterization observation of the sample in different light environments, for example, when it is necessary to observe the characterization of the sample under Raman light, the electric displacement stage 25 in the fluorescence imaging structure 7 is controlled to make the electric displacement stage 25 in the fluorescence imaging structure 7 drive the plane reflector 20 away from the light hole of the fluorescence imaging structure 7, and at the same time, the electric displacement stage 25 in the Raman imaging structure 5 is controlled to make the electric displacement stage 25 in the Raman imaging structure 5 drive the plane reflector 20 to move to the light hole of the Raman imaging structure 5, so that the laser in the Raman imaging structure 5 and the Raman light generated by the sample can pass through the light hole of the Raman imaging structure 5.

[0042] When it is necessary to observe the sample through the eyepiece 4, the electric displacement stage 25 in the Raman imaging structure 5, the fluorescence imaging structure 7, the polarization imaging structure 9 and the hyperspectral imaging structure 11 is controlled so that the electric displacement stage 25 drives the respective plane reflectors 20 away from the light holes and observation holes of each structure to avoid the electric displacement stage 25 in each structure driving the plane reflectors 20 to block the light path between the eyepiece 4 and the sample.

[0043] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A multimodal microscopic optical detection system, characterized in that: It includes a microscope system, a Raman module, a fluorescence module, a polarization module and a hyperspectral module; wherein the sample is placed in the microscope system, and the microscope system emits illumination light to the sample; The Raman module comprises a Raman spectrometer and a Raman imaging structure, wherein the Raman spectrometer emits a Raman light excitation laser to the sample through the Raman imaging structure, and the sample generates Raman light after being excited by the Raman light excitation laser, and the Raman light enters the Raman spectrometer through the Raman imaging structure; The fluorescence module comprises a fluorescence spectrometer and a fluorescence imaging structure, wherein the fluorescence spectrometer emits a fluorescence excitation laser to the sample through the fluorescence imaging structure, and the sample generates fluorescence after being excited by the fluorescence excitation laser, and the fluorescence enters the fluorescence spectrometer through the fluorescence imaging structure; The polarization module includes a polarization imaging structure and a polarization imager, and the hyperspectral imaging module includes a hyperspectral imaging structure and a hyperspectral imager; after being reflected by the sample, the illumination light passes through the polarization imaging structure and the hyperspectral imaging structure respectively and enters the polarization imager and the hyperspectral imager respectively; The Raman imaging structure, the fluorescence imaging structure, the polarization imaging structure and the hyperspectral imaging structure are arranged on the microscope system with the same optical axis, so that the Raman light, the fluorescence and the illumination light reflected by the sample come from the same position of the sample, thereby obtaining the characterization of the same position of the sample under different lights.

2. The multimodal microscopic optical detection system according to claim 1, characterized in that: The Raman imaging structure includes a white light path, a laser light path, a Raman imaging light path and a camera light path; The white light path is connected to the white light source of the Raman spectrometer, and the white light source irradiates white light to the sample through the white light path and the Raman imaging light path; The laser optical path is connected to the laser of the Raman spectrometer, and the laser irradiates the Raman light excitation laser to the sample through the laser optical path and the Raman imaging optical path; The Raman imaging optical path is connected to the Raman spectrometer, receives the Raman light and the white light reflected by the sample, and inputs the Raman light into the Raman spectrometer; the camera optical path receives the light beam reflected by the sample to complete the shooting of the sample.

3. The multimodal microscopic optical detection system according to claim 2, characterized in that: The Raman imaging optical path includes a movable reflecting device, a first beam splitter and a first Raman filter; wherein the Raman light and the white light reflected back by the sample are irradiated on the first beam splitter through the movable reflecting device; the first beam splitter splits the Raman light into a first Raman light and a second Raman light; the first Raman light enters the Raman spectrometer after passing through the first Raman filter; the second Raman light and the white light reflected back by the sample enter the camera optical path through the white light optical path.

4. The multimodal microscopic optical detection system according to claim 3, characterized in that: The laser optical path includes a laser filter and a second Raman filter; wherein: the laser emits the Raman light excitation laser; the Raman light excitation laser passes through the laser filter and is irradiated on the second Raman filter; the Raman light excitation laser is reflected by the second Raman filter to the first beam splitter; the Raman light excitation laser passes through the first beam splitter and is reflected by the movable reflection device to the sample.

5. The multimodal microscopic optical detection system according to claim 3, characterized in that: The white light path includes a second beam splitter; wherein the white light emitted by the white light source passes through the second beam splitter and then irradiates the first beam splitter; the white light passes through the first beam splitter and the movable reflection device in sequence and then irradiates the sample.

6. The multimodal microscopic optical detection system according to claim 5, characterized in that: The camera optical path includes a camera; wherein the first beam splitter irradiates the second Raman light and the white light reflected by the sample onto the second beam splitter; and the second Raman light and the white light reflected by the second beam splitter enter the camera.

7. The multimodal microscopic optical detection system according to claim 1, characterized in that: The fluorescence imaging structure includes a movable reflecting device and a dichroic mirror; wherein, the laser in the fluorescence spectrometer emits the fluorescence excitation laser; the fluorescence excitation laser is reflected by the dichroic mirror to the movable reflecting device; the movable reflecting device reflects the fluorescence excitation laser to the sample; the fluorescence is reflected by the movable reflecting device to the dichroic mirror; the fluorescence enters the fluorescence spectrometer through the dichroic mirror.

8. The multimodal microscopic optical detection system according to claim 1, characterized in that: The polarization imaging structure includes a movable reflection device, the sample reflects the illumination light onto the movable reflection device; and the movable reflection device reflects the illumination light into the polarization imager.

9. The multimodal microscopic optical detection system according to claim 1, characterized in that: The hyperspectral imaging structure comprises a movable reflecting device, the sample reflects the illumination light onto the movable reflecting device; the movable reflecting device reflects the illumination light into the hyperspectral imager.

10. The multimodal microscopic optical detection system according to any one of claims 3 to 9, characterized in that: The movable reflection device comprises an electric displacement stage and a plane reflection mirror arranged on the electric displacement stage.

Images