Device for realizing accurate patterning transfer of microstructure through air pressure type vibration-assisted ultraviolet nanoimprint

Abstract

The invention relates to a device for realizing accurate patterning transfer of a microstructure through air pressure type vibration-assisted ultraviolet nano-imprinting, and belongs to the field of ultra-precision machining. The device comprises an outer closed compartment, a lifting platform, an xyz-axis displacement micro-motion platform, a vibration platform, an imprinting device, an ultraviolet light curing device, a substrate, a supporting frame, an air pressure device and a tray. An impressing film is fixed through a machine cover, an impressing device is installed in an outer closed compartment through a partition plate, a lifting platform and an xyz-axis displacement micro-motion platform are matched to control a substrate on a tray to be attached to the impressing device, an air pressure device can increase air pressure to provide impressing force to achieve impressing, and a vibration platform assists in impressing glue filling and demolding. And the ultraviolet light curing device is used for carrying out ultraviolet light irradiation curing, demolding is carried out after curing is completed, and microstructure transfer of the upper template of the imprinting film is completed. According to the device, patterning transfer of a large-area microstructure is achieved through gas imprinting, imprinting force is controlled through air pressure, imprinting efficiency, the filling rate and fidelity are improved, and damage to the imprinting device and a template is reduced.

Description

Technical Field

[0001] The invention relates to nano-imprinting in the field of ultra-precision processing, and utilizes gas imprinting to realize the imprinting processing in ultraviolet light nano-imprinting through vibration assistance. Background Art

[0002] In 1995, Chinese-American Professor Zhou Yu first proposed the nanoimprint technology. Its basic principle is to use a nano-graphic template to press on a polymer for molding to achieve the processing and transfer of nano-graphics. In 2013, Duan Zhiyong's team at Zhengzhou University developed a vacuum negative pressure UV curing nanoimprinting device based on gas-assisted pressure. With the increasing demand for applications in the optical and optoelectronic industries, the future development direction of nanoimprinting has gradually become clear, among which rapid imprinting and improving the fidelity of graphics have become an inevitable trend. In particular, polymers are rich in types and functions, and have the advantage of customizable synthesis, which can meet the applications of micro-nano optics and optoelectronics. At the same time, nanoimprinting has the characteristics of rapid prototyping and low cost for various polymers, so nanoimprinting has become an irreplaceable method.

[0003] With the continuous expansion of nanoimprinting patterning efficiency, fidelity and template processing capabilities, various nanoimprinting technologies have been continuously developed, and various imprinting methods have gradually developed from traditional mechanical imprinting, such as gas-assisted imprinting and vibration-assisted imprinting. Due to the uneven imprinting force and low fidelity of mechanical imprinting, template damage may occur, or the imprinted microstructure pattern fails to meet the expected ideal, it is necessary to replace the imprinting method with higher efficiency and faster time. Therefore, how to produce large-area patterns with high efficiency and high fidelity is one of the current problems. Summary of the invention

[0004] The purpose of the present invention is to solve the problem that the imprinting force is uneven during imprinting, resulting in low fidelity, possible template damage, or the imprinted microstructure pattern fails to meet the expected requirements. We provide a nanoimprinting device for air pressure vibration-assisted ultraviolet nanoimprinting.

[0005] The technical solution adopted by the present invention is: a device for realizing precise pattern transfer of microstructure by air pressure vibration assisted ultraviolet nano-imprinting, comprising: an outer sealed compartment, a lifting platform, an xyz-axis displacement micro-motion platform, a support frame, a vibration platform, an imprinting device, an ultraviolet light curing device, an air pressure device and a tray, the lifting platform is fixed to the inner base of the outer sealed compartment by supporting feet and screws, the xyz-axis displacement micro-motion platform is fixed to the bearing platform 2 of the lifting platform by screws, the support frame is fixed to the bearing platform 3 of the xyz-axis displacement micro-motion platform by screws, the vibration platform is combined with the support frame by screws, the imprinting device is combined and fixed with the splint bracket of the outer sealed compartment by a splint, the ultraviolet light curing device is hung upside down on the inner top of the outer sealed compartment by screws, the air pressure device is connected and fixed to the air hole 1 and the air hole 2 on the outer sealed compartment by an air pipe, and the tray 9 is combined and fixed with the support frame by a mortise and tenon structure.

[0006] The outer sealed compartment described in the present invention includes: an outer sealed compartment shell, an outer sealed compartment door, a plywood bracket, air hole 1, air hole 2, an air pressure sensor 1 and a small hole, wherein the plywood bracket is fixed to the inner walls on both sides by screws, air hole 1 and air hole 2 are penetrated through the inner wall on one side and above and below the plywood bracket 1, the air pressure sensor 1 is fixed to the inner bottom of the outer sealed compartment by screws, and the small hole is penetrated through one side of air hole 1 and air hole 2 and below the plywood bracket, corresponding to the piezoelectric brake.

[0007] The xyz-axis displacement micro-motion platform described in the present invention includes: a base one, a servo motor two, a lifting frame three, a lifting frame four, a distance sensor and a bearing platform three, the distance sensor is connected to the base one by screws, the base one is fixed on the bearing platform one of the lifting platform by screws, wherein the base one, the lifting frame three, the lifting frame four, the bearing platform three and the servo motor two are a fixed whole.

[0008] The vibration platform of the present invention comprises: a lever mechanism, a four-bar guide mechanism, a piezoelectric brake and a vibration module, wherein the lever mechanism, the four-bar guide mechanism, the piezoelectric brake and the vibration module are fixed as a whole.

[0009] The air pressure device described in the present invention comprises: air pipe 1, air pipe 2, air pipe 3, air pipe 4, air pipe 5, solenoid valve 1, solenoid valve 2, solenoid valve 3, solenoid valve 4, a micro air pump and a box body, air pipe 1 is connected and fixed to air hole 2 on the outer closed compartment, air pipe 2 is connected and fixed to air hole 1 on the outer closed compartment, air pipe 1 is connected and fixed to solenoid valve 1, solenoid valve 1 is fixed to the box body by screws, solenoid valve 1 is connected and fixed to the lower port of air pipe 5, the upper port of air pipe 5 is connected and fixed to solenoid valve 2, solenoid valve 2 is fixed to the box body by screws, solenoid valve 2 is connected and fixed to air pipe 2, the micro air pump is fixed to the inner wall of the box body by screws, the micro air pump is connected and fixed to air pipe 3, the micro air pump is connected and fixed to air pipe 4, air pipe 3 and air pipe 4 are connected to solenoid valve 3, solenoid valve 3 is fixed to the box body by screws, solenoid valve 4 is fixed to the box body by screws, and solenoid valve 3 and solenoid valve 4 are connected to air pipe 5.

[0010] The ultraviolet curing device described in the present invention includes: a base two and ultraviolet lamps, the base two is fixed to the top of the outer closed compartment by screws, the ultraviolet lamps are installed on the base two in an alternating and orderly manner by screws and the light is directly facing the center of the imprinting device, and there are three ultraviolet lamps in total.

[0011] A device for achieving precise pattern transfer of microstructures by air pressure vibration-assisted ultraviolet nano-imprinting, comprising the following steps: (i) Equipment debugging stage: a micro air pump starts working to make the air tube suck air and inflate, and at the same time, the air pressure sensor starts working, so that the imprinted film begins to deform to reach the maximum recorded equilibrium data value and transmit feedback; (ii) Before starting imprinting: a substrate coated with imprinting glue is placed on a tray, the outer sealed compartment door is closed, and the servo motor of the lifting platform is started to adjust the ball screw to rotate to make the lifting frame move, thereby raising the load-bearing platform. Start the servo motor and distance sensor of the xyz-axis displacement micro-motion platform, survey the distance between the base and the bottom surface of the support frame, and feed back the signal to the servo motor, adjust the lifting frame of the micro-motion platform to control the lifting of the carrying platform, so that the tray is close to the imprinting device; (iii) Start imprinting: the air pressure sensor and micro air pump start working at the same time, the micro air pump controls the solenoid valve to open so that the air pipe deflates through the air hole, and at the same time the micro air pump controls the solenoid valve to inhale air through the other air pipe through the air hole, changing the air pressure to make the imprinted film begin to deform, contact the imprinting glue for imprinting, and at the same time the vibration platform starts to apply vibration. When the data value of the air pressure sensor reaches the equilibrium state, the feedback signal is given to the micro air pump to close the solenoid valve, so that the imprinted film completes contact with the imprinting glue on the substrate, and at the same time the ultraviolet lamp curing device is started to turn on the ultraviolet lamp, and the imprinting glue on the imprinted film and the substrate is cured when the imprinting is completed; (iv) Complete imprinting: start the vibration platform and servo motor, adjust the lifting frame, and lower the height of the carrying platform. At the same time, the piezoelectric brake controls the vibration module to apply vibration to separate the imprinted film from the imprinting glue on the substrate, and then lower the height of the carrying platform. Open the outer sealed compartment door to take out the substrate, refill it and start a new round of stamping.

[0012] Advantages of the present invention: (1) The present invention proposes a device for realizing precise pattern transfer of microstructures by air pressure vibration-assisted ultraviolet nanoimprinting. The micro air pump starts to work to inhale and inflate the air tube, and at the same time, the air pressure sensor starts to work to make the imprinted film begin to deform to the maximum, which can achieve more precise control and adjustment, improve the precision of nanoimprinting, and the vibration assistance can better fill the imprinting glue and remove, thereby improving the quality stability and accuracy of the microstructure. The use of gas to control the imprinting force to protect the template reduces template damage and reduces the imprinting cost; (2) The servo motor of the lifting platform adjusts the ball screw to rotate to move the lifting frame and raise the carrying platform. The lifting platform can accurately control the position of the tray to ensure the accuracy and stability during the imprinting process. By controlling the lifting and lowering of the platform, the influence of manual operation on the equipment and samples can be reduced. The height of the lifting platform can be adjusted as needed to adapt to substrates of different thicknesses or shapes, thereby improving the flexibility and applicability of the device. At the same time, the signal is fed back to the servo motor to adjust the lifting frame movement of the micro-motion platform to control the lifting of the carrying platform, so that the tray is close to the imprinting device for height adjustment and automation; (3) The vibration platform starts to apply vibration during contact with the imprinting glue for imprinting. Vibration can help the material better fill the tiny gaps in the mold, improve the embossing effect and quality, help evenly distribute pressure, reduce uneven deformation of the material during the embossing process, and greatly improve the precision transfer and fidelity of the pattern. At the same time, the UV lamp curing device is started to turn on the UV lamp, and the embossing glue on the embossed film and the substrate is cured when the embossing is completed, which accelerates the embossing process, improves production efficiency, and reduces the production cycle; (4) The piezoelectric brake controls the vibration module to apply vibration to separate the embossed film from the embossed glue on the substrate. Vibration separation helps the film and the embossed glue on the substrate to be completely separated to avoid residues affecting the quality of the next embossing. It can reduce the risk of damage to the film during the separation process and reduce the material damage rate. By ensuring complete separation between the film and the substrate, the quality stability and consistency of each embossing can be guaranteed. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a positive trimetric view of a device that uses air pressure vibration-assisted UV nanoimprinting to achieve precise patterned transfer of microstructures; Figure 2 It is a schematic diagram of the structure of a device for realizing precise pattern transfer of microstructures by air pressure vibration-assisted ultraviolet nanoimprinting; Figure 3 It is a schematic diagram of the structure of the outer closed compartment; Figure 4 It is a structural diagram of the lifting platform; Figure 5 It is a schematic diagram of the structure of the xyz axis displacement micro-motion platform; Figure 6 It is a structural schematic diagram of the support frame; Figure 7 It is a structural schematic diagram of the vibration platform; Figure 8 is a schematic diagram of the structure of the imprinting device; Fig. 9 is a schematic structural diagram of a UV curing device; Fig.10 It is a schematic diagram of the structure of the air pressure device; Fig.11 It is a schematic diagram of the structure of a pallet.

[0014] Explanation of reference numerals: outer sealed compartment 1, lifting platform 2, xyz axis displacement micro-motion platform 3, support frame 4, vibration platform 5, imprinting device 6, UV curing device 7, air pressure device 8, tray 9, outer sealed compartment shell 101, outer sealed compartment door 102, clamping plate bracket 103, air hole 104, air hole 2 105, air pressure sensor 1 106, small hole 107, servo motor 1 201, support foot 202, bearing platform 1 203, ball screw 204, lifting frame 1 205, lifting frame 2 206, bearing platform 2 207, servo motor 2 301, Lifting frame three 302, lifting frame four 303, distance sensor 304, carrying platform three 305, base one 306, lever mechanism 501, four-rod guide mechanism 502, piezoelectric brake 503, vibration module 504, splint 601, machine cover 602, air pressure sensor two 603, base two 701, ultraviolet lamp 702, trachea one 801, trachea two 802, trachea three 803, trachea four 804, trachea five 805, solenoid valve one 806, solenoid valve two 807, solenoid valve three 808, solenoid valve four 809, micro air pump 810, box 811.

[0015] like Figure 1 , 2 As shown, a device for realizing precise pattern transfer of microstructure by air pressure vibration assisted ultraviolet nanoimprinting comprises: an outer sealed compartment 1, a lifting platform 2, an xyz-axis displacement micro-motion platform 3, a support frame 4, a vibration platform 5, an imprinting device 6, an ultraviolet light curing device 7, an air pressure device 8, and a tray 9. The lifting platform 2 is fixed to the inner base of the outer sealed compartment 1 by supporting feet 202 and screws, the xyz-axis displacement micro-motion platform 3 is fixed to the bearing platform 207 of the lifting platform 2 by screws, and the support frame 4 is fixed to the bearing platform 207 of the lifting platform 2 by screws. It is fixed on the bearing platform three 305 of the xyz-axis displacement micro-motion platform 3, the vibration platform 5 is combined with the support frame 4 by screws, the stamping device 6 is combined and fixed with the clamping plate bracket 103 of the outer closed compartment 1 by the clamping plate 601, the ultraviolet lamp curing device 7 is fixed on the inner top of the outer closed compartment 1 by screws, the air pressure device 8 is connected and fixed with the air hole two 105 on the outer closed compartment 1 through the air pipe one 801, and the air pipe two 802 is connected and fixed with the air hole one 104 on the outer closed compartment 1, and the tray 9 is combined and fixed with the support frame by the mortise and tenon structure.

[0016] like Figure 3 As shown, the outer sealed compartment 1 includes: an outer sealed compartment shell 101, an outer sealed compartment door 102, a clamp bracket 103, an air hole 104, an air hole 2 105, an air pressure sensor 1 106, and a small hole 107. The clamp bracket 103 is fixed to the inner walls on both sides by screws, the air hole 104 and the air hole 2 105 are penetrated on one side of the inner wall and one above and one below the clamp bracket 103, and the air pressure sensor 1 106 is fixed to the inner bottom of the outer sealed compartment 1 by screws. The small hole is penetrated on one side of the air hole 104 and the air hole 2 105 and below the clamp bracket 103, corresponding to the piezoelectric brake 503.

[0017] like Figure 4 As shown, the lifting platform 2 includes a servo motor 1 201, a support foot 202, a bearing platform 1 203, a ball screw 204, a lifting frame 1 205, a lifting frame 206, and a bearing platform 2 207. The support foot 202 is fixedly connected to the bearing platform 1 203 by screws, and the lifting frame 1 205 and the lifting frame 2 206 are fixedly connected to the bearing platform 1 203 and the bearing platform 2 207 by screws. The ball screw 204 is mechanically fixed to the lifting frame 1 205 and the lifting frame 2 206, and the servo motor 1 201 is fixed to the ball screw 204 by screws.

[0018] like Figure 5 As shown, the xyz-axis displacement micro-motion platform 3 includes: a servo motor 2 301, a lifting frame 302, a lifting frame 4 303, a distance sensor 304, a bearing platform 3 305, and a base 1 306. The distance sensor 304 is connected to the base 1 306 by screws, and the base 1 306 is fixed to the bearing platform 1 203 of the lifting platform by screws, wherein the base 1 306, the lifting frame 302, the lifting frame 4 303, the bearing platform 3 305, and the servo motor 2 301 are a fixed whole.

[0019] like Figure 6 As shown, the support frame 4 has a specific structure and is fixed on the bearing platform 305 by screws.

[0020] like Figure 7 As shown, the vibration platform 5 includes: a lever mechanism 501, a four-bar guide mechanism 502, a piezoelectric brake 503, and a vibration module 504. The lever mechanism 501, the four-bar guide mechanism 502, the piezoelectric brake 503, and the vibration module 504 are fixed as a whole. The piezoelectric brake 503 is connected to an external device through a small hole 107 to provide power.

[0021] like Figure 8As shown, the stamping device 6 includes: a clamping plate 601, a machine cover 602, and an air pressure sensor 603. The clamping plate 601 is fixed by combining with the clamping plate bracket 103, the machine cover 602 and the clamping plate 601 are tightened by screws, and the air pressure sensor 603 is fixed to the clamping plate 601 by screws.

[0022] like Fig. 9 As shown, the UV curing device 7 includes: a base 701, a UV lamp 702, the base 701 is fixed to the inner top of the outer sealed compartment 1 by screws, and the UV lamp 702 is installed on the base 701 by screws. The UV light irradiation range can be used to cooperate with the embossing glue according to specific embossing requirements to complete the curing.

[0023] like Fig.10 As shown, the air pressure device 8 includes: an air pipe 1 801, an air pipe 2 802, an air pipe 3 803, an air pipe 4 804, an air pipe 5 805, an electromagnetic valve 1 806, an electromagnetic valve 2 807, an electromagnetic valve 3 808, an electromagnetic valve 4 809, a micro air pump 810, and a box 811. The air pipe 1 801 is connected and fixed to the air hole 2 105 on the outer closed compartment 1, the air pipe 2 802 is connected and fixed to the air hole 104 on the outer closed compartment 1, the air pipe 1 801 is connected and fixed to the electromagnetic valve 1 806, the electromagnetic valve 1 806 is fixed to the box 811 by screws, the electromagnetic valve 1 806 is connected and fixed to the lower end of the air pipe 5 805, and the air The upper port of tube five 805 is connected and fixed to solenoid valve two 807, solenoid valve two 807 is fixed to the box body by screws, solenoid valve two 807 is connected and fixed to air pipe two 802, micro air pump 810 is fixed to the inner wall of box body 811 by screws, micro air pump 810 is connected and fixed to air pipe three 803, micro air pump 810 is connected and fixed to air pipe four 804, air pipe three 803 and air pipe four 804 are connected to solenoid valve three 808, solenoid valve three 808 is fixed to the box body by screws, solenoid valve four 809 is fixed to the box body 811 by screws, solenoid valve three 808 and solenoid valve four 809 are connected to air pipe five 805.

[0024] like Fig.11 As shown, the tray 9 has a specific structure combined with the support frame 4.

[0025] A device for realizing precise pattern transfer of microstructures by air pressure vibration-assisted ultraviolet nano-imprinting, comprising the following steps: (1) Equipment debugging stage: Micro air pump 810 starts working to make air pipe 1 801 suck air and air pipe 2 802 inflate, and at the same time air pressure sensor 106 and air pressure sensor 2 603 start working to make the imprint film begin to deform to the maximum, air pressure sensor 106 and air pressure sensor 2 603 start working, record the balance data value and transmit feedback; (2) Before starting imprinting: Place the substrate with imprinting glue on the tray 9, close the outer sealed compartment door 102, start the servo motor 1 201 of the lifting platform 2 to adjust the ball screw 204 to rotate to make the lifting frame 1 205 and the lifting frame 206 move, and raise the supporting platform 2 207. Start the servo motor 2 301 and distance sensor 304 of the xyz-axis displacement micro-motion platform 3, measure the distance between the base 1 306 and the bottom surface of the support frame 4, and feed back the signal to the servo motor 2 301, adjust the lifting frame 3 302 and the lifting frame 4 303 to control the lifting of the supporting platform 3 305, so that the tray 9 is close to the imprinting device 6; (3) Start imprinting: the air pressure sensor 106, the air pressure sensor 2 603, and the micro air pump 810 start working at the same time, the micro air pump 810 controls the solenoid valve 3 808 to open so that the air pipe 2 802 is deflated through the air hole 104, and at the same time, the micro air pump 810 controls the solenoid valve 4 809 to open so that the air pipe 1 801 is inhaled through the air hole 2 105, and the air pressure is changed to make the imprinting film begin to deform, contact the imprinting glue for imprinting, and at the same time, the vibration platform starts to apply vibration. When the data values ​​of the air pressure sensor 106 and the air pressure sensor 2 603 reach a balanced state, a feedback signal is given to the micro air pump 810 to close the electromagnetic valve 3 808 and the electromagnetic valve 4 809, so that the imprint film is completely in contact with the imprint glue on the substrate, and at the same time, the ultraviolet lamp curing device 7 is started to turn on the ultraviolet lamp 702, and the imprint glue on the imprint film and the substrate is cured when the imprint is completed; (4) Imprinting is completed: the vibration platform 5 and the servo motor 2 301 are started, and the lifting frame 3 302 and the lifting frame 4 303 are adjusted to lower the height of the carrying platform 3 305. At the same time, the piezoelectric brake 503 controls the vibration module 504 to apply vibration to separate the imprint film from the imprint glue on the substrate, and then the servo motor 1 201 is started to adjust the lifting frame 1 205 and the lifting frame 2 206 to lower the height of the carrying platform 2 207. The outer sealed compartment door 102 is opened to take out the substrate, and it is refilled for a new round of imprinting.

Claims

1. A device for realizing accurate pattern transfer of microstructures by air pressure vibration-assisted ultraviolet nanoimprinting, characterized in that: It includes an outer sealed compartment, a lifting platform, an xyz-axis displacement micro-motion platform, a support frame, a vibration platform, an imprinting device, an ultraviolet light curing device, an air pressure device, and a tray, wherein the lifting platform is fixed to the inner base of the outer sealed compartment by supporting feet and screws, the xyz-axis displacement micro-motion platform is fixed to the bearing platform 2 of the lifting platform by screws, the support frame is fixed to the bearing platform 3 of the xyz-axis displacement micro-motion platform by screws, the vibration platform is fixed to the bracket by screws, the imprinting device is fixed to the splint bracket of the outer sealed compartment by a splint, the ultraviolet light curing device is fixed to the inner top of the outer sealed compartment by screws, and the air pressure device is connected and fixed to the air hole 2 on the outer sealed compartment through the air pipe 1, and the air pipe 2 is connected and fixed to the air hole 1 on the outer sealed compartment through the air pipe 1.

2. The device for realizing accurate pattern transfer of microstructure by air pressure vibration-assisted ultraviolet nanoimprinting according to claim 1, characterized in that: The outer sealed compartment includes an outer sealed compartment shell, an outer sealed compartment door, a plywood bracket, air hole 1, air hole 2, air pressure sensor 1, and a small hole, wherein the plywood bracket is fixed to the inner walls on both sides by screws, air hole 1 and air hole 2 are penetrated through the inner wall on one side and above and below the plywood bracket 1, air pressure sensor 1 is fixed to the bottom of the outer sealed compartment by screws, and the small hole is penetrated through one side of air hole 1 and air hole 2 and below the plywood bracket, corresponding to the piezoelectric brake.

3. The device for realizing accurate pattern transfer of microstructure by air pressure vibration-assisted ultraviolet nanoimprinting according to claim 1, characterized in that: The xyz-axis displacement micro-motion platform includes a base 1, a servo motor 2, a lifting frame 3, a lifting frame 4, a distance sensor, and a bearing platform 3, wherein the base 1 is fixed to the bearing platform 1 of the lifting platform by screws, and the distance sensor is connected to the base 1 by screws, wherein the base 1, the lifting frame 3, the lifting frame 4, the bearing platform 3, and the servo motor 2 are a fixed whole.

4. The device for realizing accurate pattern transfer of microstructure by air pressure vibration-assisted ultraviolet nanoimprinting according to claim 1, characterized in that: The vibration platform comprises a lever mechanism, a four-bar guide mechanism, a piezoelectric brake and a vibration module, wherein the lever mechanism, the four-bar guide mechanism, the piezoelectric brake and the vibration module are fixed as a whole.

5. The device for realizing accurate pattern transfer of microstructure by air pressure vibration-assisted ultraviolet nanoimprinting according to claim 1, characterized in that: The UV curing device includes a base 2 and a UV lamp, wherein the base 2 is fixed to the top of the outer sealed compartment by screws, wherein the UV lamps are alternately and orderly installed on the base 2 by screws and the light is directly facing the center of the imprinting device, with a total of three UV lamps.

6. The device for realizing accurate pattern transfer of microstructure by air pressure vibration-assisted ultraviolet nanoimprinting according to claim 1, characterized in that: The air pressure device comprises air pipe 1, air pipe 2, air pipe 3, air pipe 4, air pipe 5, solenoid valve 1, solenoid valve 2, solenoid valve 3, solenoid valve 4, a micro air pump and a box body, wherein air pipe 1 is connected and fixed to air hole 2 on the outer closed compartment, air pipe 2 is connected and fixed to air hole 1 on the outer closed compartment, air pipe 1 is connected and fixed to solenoid valve 1, solenoid valve 1 is fixed to the box body by screws, solenoid valve 1 is connected and fixed to the lower port of air pipe 5, the upper port of air pipe 5 is connected and fixed to solenoid valve 2, solenoid valve 2 is fixed to the box body by screws, solenoid valve 2 is connected and fixed to air pipe 2, the micro air pump is fixed to the inner wall of the box body by screws, the micro air pump is connected and fixed to air pipe 3, the micro air pump is connected and fixed to air pipe 4, air pipe 3 and air pipe 4 are connected to solenoid valve 3, solenoid valve 3 is fixed to the box body by screws, solenoid valve 4 is fixed to the box body by screws, and solenoid valve 3 and solenoid valve 4 are connected to air pipe 5.

7. A device for realizing accurate pattern transfer of microstructures by air pressure vibration-assisted ultraviolet nanoimprinting, characterized in that , including the following steps: (i) During the equipment debugging stage, the micro air pump starts to work to inhale and inflate the air tube, and at the same time, the air pressure sensor starts to work, so that the imprint film begins to deform to the maximum, and the balance data value is recorded and feedback is transmitted. (ii) Before starting imprinting, the substrate is coated with imprint glue and placed on the tray, the outer sealed compartment door is closed, and the servo motor of the lifting platform is started to adjust the ball screw to rotate to move the lifting frame to raise the carrying platform. The servo motor and distance sensor of the xyz axis displacement micro-motion platform are started, the distance between the base and the bottom surface of the support frame is surveyed and the signal is fed back to the servo motor, and the lifting frame of the micro-motion platform is adjusted to control the lifting of the carrying platform, so that the tray is close to the imprinting device. (iii) When starting imprinting, the air pressure sensor and micro air pump start to work at the same time, the micro air pump controls the solenoid valve to open so that the air tube deflates through the air hole, and at the same time, the micro air pump controls the solenoid valve to inhale air through the air hole of the other air tube, changing the air pressure to make the imprint film begin to deform, contact the imprint glue for imprinting, and at the same time, the vibration platform starts to apply vibration. When the data value of the air pressure sensor reaches the equilibrium state, the feedback signal is given to the micro air pump to close the solenoid valve, so that the imprinted film completes the contact with the imprinted glue on the substrate, and at the same time, the UV lamp curing device is started to turn on the UV lamp, and the imprinted film and the imprinted glue on the substrate are cured when the imprinting is completed. (IV) After the imprinting is completed, the vibration platform and servo motor are started, and the lifting frame is adjusted to lower the height of the load platform. At the same time, the piezoelectric brake controls the vibration module to apply vibration to separate the imprinted film from the imprinted glue on the substrate, and then the height of the load platform is lowered. Open the outer sealed compartment door to take out the substrate, and refill it for a new round of imprinting.

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