Combustion type tail gas treatment equipment

Abstract

The invention discloses combustion type tail gas treatment equipment which comprises a gas mixing chamber used for receiving and mixing fuel gas, combustion-supporting gas and waste gas to be treated; comprising a main shell and a combustion head arranged in the main shell. The reaction chamber is connected to the gas outlet end of the gas mixing chamber, and the to-be-treated tail gas is combusted in an inner cavity of the reaction chamber; an air supplementing pipe is externally connected; the cooling and purifying pipe section is connected to the gas outlet end of the reaction chamber and is used for cooling and purifying waste gas generated after combustion; the water tank is communicated with the cooling and purifying pipe section; the condensation treatment pipe is arranged on the other side of the water tank and communicated with the inner cavity; the water-vapor separator is arranged at the gas outlet end of the condensation treatment pipe and is used for carrying out water-vapor separation on the waste gas. The combustion type tail gas treatment equipment is reasonable and compact in structural design, full reaction, purification and water-vapor separation of tail gas in the equipment are guaranteed through ingenious arrangement and cooperation of all the structures, and the tail gas treatment efficiency is greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor harmful gas treatment, and in particular to a combustion type tail gas treatment device. Background Art

[0002] In the manufacturing of semiconductor industry-related products such as chips, different waste gases are generated at each stage. For example, the thermal oxidation process of the thin film deposition process generates acidic waste gas containing unreacted halogen-containing oxidants, the CVD process generates waste gas containing SiH4, SiCl4, SiH2Cl2, PH3, HF, HCl, NH3, etc., the etching process generates acid, alkali, and organic waste gas, including some gaseous byproducts (such as H2, NO, NH3, etc.), and the doping process generates acidic waste gas containing phosphine and arsine, etc. These tail gases are generally toxic and flammable. Improper handling will cause serious safety accidents, serious economic losses, and serious pollution to the environment.

[0003] Existing semiconductor tail gas treatment equipment is divided into many different types based on different principles, such as combustion tail gas treatment equipment, plasma tail gas treatment equipment, electric heating tail gas treatment equipment, etc. Among them, the existing combustion tail gas treatment equipment uses the high temperature generated by the combustion head of the reaction chamber to fully burn the tail gas. However, the tail gas in the combustion chamber of the existing combustion tail gas treatment equipment often cannot be fully burned, and the tail gas treatment efficiency is low.

[0004] Therefore, the prior art needs to be further developed. Summary of the invention

[0005] In view of the above technical problems, the present invention provides a new combustion-type exhaust gas treatment equipment, which promotes the complete combustion of exhaust gas by adding an air supplement structure in the reaction chamber, thereby greatly improving the exhaust gas treatment efficiency.

[0006] To solve the above problems, the present invention provides the following technical solutions:

[0007] The present application provides a combustion type tail gas treatment device, which includes:

[0008] The gas mixing chamber is used to receive and mix the fuel gas, the combustion-supporting gas and the waste gas to be treated; it includes a main shell and a combustion head arranged in the main shell;

[0009] The reaction chamber is connected to the gas outlet of the mixing chamber, and the tail gas to be treated is burned in the inner cavity of the reaction chamber; an external gas supply pipe is connected;

[0010] The cooling and purification pipe section is connected to the gas outlet of the reaction chamber and is used to cool and purify the waste gas generated after combustion;

[0011] A water tank connected to the cooling and purification pipe section;

[0012] A condensation treatment pipe is arranged on the other side of the water tank and communicates with the inner cavity thereof;

[0013] The water vapor separator is arranged at the gas outlet end of the condensation treatment pipe and is used to separate water vapor from the exhaust gas.

[0014] Optionally, in the combustion-type exhaust gas treatment equipment, the reaction chamber includes a cooling outer tube and a gas permeation tube located in the center which are sequentially arranged from the outside to the inside, a closed interlayer for accommodating cooling water is arranged inside the cooling outer tube, and the outer layer of the cooling outer tube is provided with a first water inlet and a first water outlet which are connected to the interlayer.

[0015] Optionally, in the combustion-type exhaust gas treatment equipment, the first water inlet is arranged at the bottom of the cooling outer tube, and the first water outlet is located at the top of the cooling outer tube.

[0016] Optionally, in the combustion-type exhaust gas treatment equipment, the space between the outer wall of the gas permeation tube and the inner wall of the cooling outer tube forms an air supply cavity; the outer wall of the gas permeation tube is provided with an air supply pipe, one end of the air supply pipe extends to communicate with the air supply cavity, and the other end of the air supply pipe passes through to the outside of the cooling outer tube; the gas permeation tube adopts a high-temperature resistant breathable material.

[0017] Optionally, the gas permeation tube is made of high temperature resistant silicon carbide material, or a porous tube made of other high temperature resistant materials.

[0018] Optionally, in the combustion-type exhaust gas treatment equipment, a fixed pressure plate for sealing the top surface of the gas permeation tube is provided at the upper end of the gas permeation tube, an inner hole with an inner diameter not greater than the inner diameter of the gas leakage tube is provided at the center of the fixed pressure plate, and the fixed pressure plate is fixedly connected to the upper end surface of the cooling outer tube; a fixed pressure plate is also provided at the lower end of the gas permeation tube, or the lower end of the gas leakage tube is sealed by the bottom of the cooling outer tube.

[0019] Optionally, in the combustion-type exhaust gas treatment equipment, the fixed pressure plate is annular, and the inner hole of the fixed pressure plate is aligned with the inner hole of the gas leakage pipe.

[0020] Optionally, in the combustion-type exhaust gas treatment equipment, the bottom wall of the cooling outer tube extends toward the center to form an annular support portion for supporting and sealing the bottom surface of the gas permeation tube.

[0021] Optionally, in the combustion-type tail gas treatment equipment, a gasket is arranged between the lower end surface of the gas permeation tube and the annular support portion, and a gasket is also arranged directly between the upper end surface of the gas permeation tube and the fixed pressure plate.

[0022] Optionally, in the combustion-type exhaust gas treatment equipment, the mixing chamber includes a main shell, a combustion head installed in the main shell, a fuel gas air supply pipe connected to the inner cavity of the combustion head, and an exhaust gas air supply pipe fixed to and connected to the inner cavity of the main shell; the mixing chamber is also provided with a combustion-supporting gas air supply pipe connected to the inner cavity of the main shell.

[0023] Optionally, in the combustion-type exhaust gas treatment equipment, the condensation treatment tubes are arranged in two or more series.

[0024] Optionally, in the combustion-type exhaust gas treatment equipment, an atomizing disk is provided between two condensation treatment tubes and / or at the gas outlet end of a single condensation treatment tube.

[0025] Optionally, in the combustion-type exhaust gas treatment equipment, the cooling and purification pipe section includes an inner tube, a cooling outer tube sleeved outside the inner tube, and a cooling cavity defined between the outer wall of the inner tube and the inner wall of the cooling outer tube, a second water inlet is provided on the tube wall of the cooling outer tube, a first air inlet is provided at the top of the cooling outer tube, and a second air inlet is correspondingly provided at the top of the inner tube; a gap is provided between the top wall of the inner tube and the inner wall of the top of the cooling outer tube; the inner diameter of the second air inlet is larger than that of the first air inlet.

[0026] Optionally, in the combustion-type exhaust gas treatment equipment, the outer wall of the inner tube is fixedly provided with or integrally formed with a flange base for fixing and sealingly connecting with the bottom of the cooling outer tube; the outer wall of the bottom of the cooling outer tube is correspondingly provided with a connecting portion.

[0027] Optionally, in the combustion-type exhaust gas treatment equipment, the side wall of the inner tube extends below the flange base to form a cooling spray pipe, and one or more spray head mounting seats are installed on the inner wall of the cooling spray pipe, and the multiple spray head mounting seats are respectively arranged at different heights; a connecting seat for connecting to a water tank is provided at the bottom of the inner tube.

[0028] A plurality of spray head mounting seats respectively installed at different heights can realize sequential spraying treatment of the exhaust gas flowing through the inner tube, thereby improving the treatment efficiency.

[0029] The cooling spray seat is a tubular structure, and the tubular structure is provided with an inner cavity for installing the spray head, and the inner cavities are communicated with each other.

[0030] The combustion type tail gas treatment equipment provided by the present invention has the following beneficial effects:

[0031] 1. The improved reaction chamber and gas mixing chamber of the combustion-type tail gas treatment equipment are used together to greatly ensure the full combustion of the input tail gas and improve the tail gas treatment efficiency. The reaction chamber structure is cleverly designed and multifunctional. The cooling of the reaction chamber is achieved through the sandwich design of the cooling outer tube. The gas leakage pipe and the air supply pipe are set to achieve uniform air or oxygen supplementation in the inner cavity of the reaction chamber, promoting the full reaction of the tail gas.

[0032] 2. The cooling and purification pipe section has a simple structure and is easy to assemble and use. It has a high degree of integration and a multifunctional design, taking into account the functions of cooling and flushing the inner wall of the inner pipe. The cooling spray pipe added below the inner pipe can further wash and purify the waste gas after the reaction in the inner pipe.

[0033] 3. The condensation balls used in the condensation treatment tube not only slow down the airflow and prolong the condensation time of the exhaust gas, but the densely distributed small holes of a large number of condensation balls can also quickly condense the exhaust gas; after the preliminary condensation in the condensation treatment tube, the water vapor separator further condenses the purified exhaust gas, thereby achieving the purpose of efficient water vapor separation.

[0034] The combustion-type tail gas treatment equipment has a reasonable and compact structural design, and the tail gas treatment efficiency is greatly improved through the ingenious coordination of various structures. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is a schematic diagram of the overall structure of the combustion chamber tail gas treatment device in Example 1 of the present invention;

[0036] Figure 2 It is an AA cross-sectional view of the combustion chamber tail gas treatment device in Example 1;

[0037] Figure 3 It is a BB cross-sectional view of the combustion chamber tail gas treatment device in Example 1;

[0038] Figure 4 is a schematic diagram of the three-dimensional structure of the gas mixing chamber of Example 1;

[0039] Figure 5 is a side view of the reaction chamber of Example 1;

[0040] Figure 6 AA cross-sectional view of the reaction chamber of the embodiment;

[0041] Figure 7 is a CC cross-sectional view of the reaction chamber of the embodiment;

[0042] Figure 8 is a top view of a reaction chamber of an embodiment;

[0043] Fig. 9 This is a partial structural exploded view of the combustion chamber exhaust gas treatment equipment;

[0044] Fig.10 Schematic diagram of the cross-sectional structure of the cooling and purification pipe section in Example 1;

[0045] Fig.11 It is a schematic diagram of the planar explosion structure of the cooling and purification pipe section of Example 1;

[0046] Fig.12 It is a schematic diagram of the cross-sectional structure of a cooling and purification pipe section in other embodiments;

[0047] Fig.13 is a schematic diagram of the cross-sectional structure of the condensation treatment tube of Example 1;

[0048] Fig.14 is a schematic cross-sectional structural diagram of a water vapor separator of Example 1;

[0049] The following are the descriptions of the reference numerals:

[0050] Cooling and purification pipe section 1, inner pipe 11, cooling outer pipe 12, cooling cavity 13, first air inlet 122, second air inlet 111, gap 14, flange base 112, connecting part 123, cooling spray pipe 15, spray head mounting seat 151, connecting seat 16, first mounting groove 1121, second mounting groove 1231; water tank 2, gas mixing chamber 3, main shell 31, combustion head 32, tail gas transmission pipe 33, fuel gas transmission pipe 34 , combustion-supporting gas transmission pipe 35; reaction chamber 4, cooling outer tube 41, interlayer 411, gas permeation tube 42, fixed pressure plate 43, first water inlet 411a, first water outlet 411b, air supply cavity 43, air supply pipe 44, annular support part 412, gasket 44; condensation treatment tube 5, first tube 51, orifice plate 52, condensation ball 53, spray pipe 54; water vapor separator 6, second tube 61, condensation plate 62, atomizing disk 7. DETAILED DESCRIPTION

[0051] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0052] It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or there can be one or more centered elements between them. When an element is described as "connected" to another element, it can be directly connected to the other element, or there can be one or more centered elements between them. The orientation or positional relationship indicated in this specification is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as those generally understood by technicians in the technical field of the present invention. The terms used in this specification in the specification of the present invention are only for the purpose of describing specific embodiments, not for limiting the present invention. The term "and / or" used in this specification includes any and all combinations of one or more related listed items. In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0053] Example 1

[0054] In this embodiment, Figures 1 to 3 As shown, a combustion type exhaust gas treatment device includes the following structure:

[0055] The gas mixing chamber 3 is used to receive and mix the fuel gas, the combustion-supporting gas and the waste gas to be treated; it includes a main shell 31 and a combustion head 32 arranged inside the main shell;

[0056] The reaction chamber 4 is fixedly connected to the gas outlet end of the gas mixing chamber, and the tail gas to be treated is burned in the inner cavity of the reaction chamber; a gas supply pipe connected to the inner cavity is provided to supply the combustion-supporting gas to the reaction chamber;

[0057] The cooling and purification pipe section 1 is connected to the gas outlet of the reaction chamber and is used to cool and purify the waste gas generated after combustion;

[0058] Water tank 2, connected to the cooling and purification pipe section;

[0059] A condensation treatment pipe 5, which is arranged on the other side of the water tank and communicates with the inner cavity thereof;

[0060] The water vapor separator 6 is arranged at the gas outlet end of the condensation treatment pipe and is used to separate water vapor from the exhaust gas.

[0061] During operation, natural gas, oxygen / air and tail gas are mixed and burned in the mixing chamber. When air / oxygen is added to the reaction chamber, the unreacted tail gas is fully burned in the reaction chamber. The final waste gas is cooled and washed with water after entering the cooling purification pipe, and then enters the water tank. Then the cleaner gas with water vapor is dehumidified by the condensation treatment pipe and the water vapor separator, and is finally discharged.

[0062] The specific settings of each structure will be explained separately.

[0063] Mixing chamber

[0064] like Figure 2 and Figure 4 As shown, the gas mixing chamber 3 includes a main shell 31, a burner head 32 installed in the main shell, a fuel gas delivery pipe 34 connected to the inner cavity of the burner head, and a tail gas delivery pipe 33 fixed to and connected to the inner cavity of the main shell. The gas mixing chamber is also provided with a combustion-supporting gas delivery pipe 35 connected to the inner cavity of the main shell. The combustion-supporting gas is oxygen or air.

[0065] Optionally, the number of the gas delivery pipe 34 and the combustion-supporting gas delivery pipe 35 is set to at least one. In this embodiment, the gas delivery pipe 34 and the combustion-supporting gas delivery pipe 35 are located at or near the central position. Optionally, the exhaust gas delivery pipe 33 is provided in multiple pieces, such as six symmetrically arranged in this embodiment, to facilitate uniform and efficient intake of the exhaust gas.

[0066] In this embodiment, the burner head 32 is cylindrical, and its bottom is a conical closing structure, and it is a double-layer structure with an inner and outer layer. The inner layer of the burner head is made of high-temperature resistant material, such as high-temperature resistant ceramics; the outer layer of the burner head is made of high-temperature resistant metal material. The above double-layer setting has a better thermal insulation effect, which helps to maintain a high temperature in the inner cavity of the burner head and ensure efficient combustion of the exhaust gas.

[0067] During operation, natural gas enters the combustion head and mixes with the combustion-supporting gas (such as oxygen or air) input from the combustion-supporting gas transmission pipe. After the combustion head is ignited by the ignition rod, the natural gas promotes the combustion of the exhaust gas in the mixing chamber 3 and the connected reaction chamber 4, so that the exhaust gas is converted into harmless or soluble gas and precipitable particulate matter, which is convenient for step-by-step absorption and purification by the subsequent mechanisms of the device.

[0068] Reaction Chamber

[0069] In this embodiment, Figures 5 to 8 As shown, the reaction chamber 4 includes a cooling outer tube 41 which is sleeved from the outside to the inside and a gas permeation tube 42 located in the center. A closed interlayer 411 for accommodating cooling water is arranged inside the cooling outer tube. The outer layer of the cooling outer tube is provided with a first water inlet 411a and a first water outlet 411b which are connected to the interlayer.

[0070] In this embodiment, the interlayer is distributed over the entire side wall of the cooling outer tube to expand the cooling area so as to achieve the best cooling effect. In other embodiments, the interlayer can be configured as a tubular liquid pipeline arranged along the side wall of the cooling outer tube.

[0071] Optionally, the first water inlet 411b is arranged at the bottom of the cooling outer tube, and the first water outlet 411a is arranged at the top of the cooling outer tube. This arrangement makes the flow direction of the cooling water opposite to the flow direction of the tail gas in the reaction chamber to improve the cooling effect.

[0072] Preferably, the water circulation pipeline is connected between the first water inlet and the first water outlet to realize the recycling of water. A water pump and a refrigeration mechanism (such as a heat exchanger) are connected to the water circulation pipeline. During operation, low-temperature water enters the interlayer of the cooling outer tube from the first water inlet, flows upward and flows out from the first water outlet above, and the heated water is cooled after passing through the refrigeration mechanism (such as a heat exchanger) and then flows to the cooling outer tube, thereby completing the water circulation of this pipeline.

[0073] Optionally, the space between the outer wall of the gas permeable tube and the inner wall of the cooling outer tube 41 forms a gas replenishing cavity 43; the outer wall of the gas permeable tube is provided with a gas replenishing tube 44, one end of which extends to communicate with the gas replenishing cavity, and the other end of which penetrates outside the cooling outer tube and is connected with the gas supply device; the gas permeable tube is made of high temperature resistant breathable material. The above arrangement allows the replenished air or oxygen to enter every corner of the reaction chamber more evenly and react with the tail gas at each spatial position.

[0074] During operation, a combustion-supporting gas (such as air or oxygen) is introduced into the entire gas supply chamber 43 from the gas supply pipe 44. The combustion-supporting gas in the gas supply chamber evenly penetrates into the inner cavity 45 of the reaction chamber through the pores on the outer wall of the gas permeation tube. In this chamber, the evenly supplied combustion-supporting gas and the incompletely burned exhaust gas continue to burn and react, thereby ensuring that the exhaust gas entering the reaction chamber is fully treated.

[0075] In other embodiments, the inner end of the gas supply pipe is directly connected to the interior of the reaction chamber.

[0076] Optionally, the gas permeation tube is made of high temperature resistant silicon carbide material, or a porous tube made of other high temperature resistant materials.

[0077] In order to ensure that the gas permeable tube can fully play the role of uniform gas supply of its side wall, the end surface of the gas permeable tube needs to be blocked. In this embodiment, the setting is as follows:

[0078] A fixed pressure plate 43 for sealing the top surface of the gas permeation tube is provided at the upper end of the gas permeation tube. The fixed pressure plate is fixedly connected to the upper end surface of the cooling outer tube. The bottom wall of the cooling outer tube extends toward the center to form an annular support portion 412 for supporting and sealing the bottom surface of the gas permeation tube 42.

[0079] In order to maintain the sealing of the connection, a gasket 44 is arranged between the lower end surface of the gas permeable tube 42 and the annular support portion, and a gasket is also arranged directly between the upper end surface of the gas permeable tube and the fixed pressure plate.

[0080] The fixed pressing plate is annular, and the inner hole of the fixed pressing plate is aligned with the inner hole of the gas leakage pipe.

[0081] In other embodiments, an inner hole with an inner diameter smaller than that of the gas leakage tube is arranged in the center of the fixed pressure plate. A fixed pressure plate is also arranged at the lower end of the gas leakage tube to be fixedly connected with the bottom of the cooling outer tube.

[0082] Cooling and purification pipe section

[0083] In this embodiment, Fig.10 and 11 As shown, the cooling and purification pipe section includes an inner tube 11, a cooling outer tube 12 sleeved outside the inner tube, and a cooling cavity 13 defined between the outer wall of the inner tube and the inner wall of the cooling outer tube. A second water inlet 121 is arranged on the tube wall of the cooling outer tube, a first air inlet 122 is arranged on the top of the cooling outer tube, and a second air inlet 111 is arranged correspondingly on the top of the inner tube; a gap 14 is arranged between the top wall of the inner tube and the inner wall of the top of the cooling outer tube; and the inner diameter of the second air inlet is larger than that of the first air inlet.

[0084] During operation, the cooling water enters the cooling chamber 13 through the water inlet 121, and forms a vortex upward from the bottom of the cooling box and flows into the inner tube along the gap between the top wall of the inner tube and the top inner wall of the cooling outer tube, and stays along the inner wall of the inner chamber. In this process, not only the inner chamber is cooled and the soluble gas near the inner wall in the exhaust gas in the inner tube is absorbed, but also the inner wall is flushed.

[0085] Preferably, the outer wall of the inner tube 11 is fixedly provided or integrally formed with a flange base 112 for fixing and sealingly connecting with the bottom of the cooling outer tube 12. A connecting portion 123 is provided on the outer wall of the bottom of the cooling outer tube corresponding to the flange base 112.

[0086] In order to improve the cooling and washing effects, the side wall of the inner tube extends below the flange base to form a cooling spray pipe 15, and one or more spray head mounting seats 151 are installed on the inner wall of the cooling spray pipe, and the multiple spray head mounting seats are respectively arranged at different heights.

[0087] A plurality of spray head mounting seats respectively installed at different heights can realize sequential spraying treatment of the exhaust gas flowing through the inner tube, thereby improving the treatment efficiency.

[0088] The cooling spray seat is a tubular structure, and the tubular structure is provided with an inner cavity for installing the spray head, and the inner cavities are communicated with each other.

[0089] In order to facilitate the fixed connection with the water tank, the bottom of the inner tube is provided with a connection seat 16 for connecting with the water tank 2. The corresponding surfaces of the flange base and the connecting part are respectively provided with mounting grooves for mounting a sealing ring.

[0090] In this embodiment, Figure 2 As shown, a first mounting groove 1121 is provided on the flange base, and a second mounting groove 1231 is provided on the connecting portion.

[0091] Furthermore, the inner edge of the second air inlet 111 is tilted inwards. The second air inlet arranged in this way allows the cooling water in the cooling cavity to flow downwards along the inner wall of the inner tube when flowing into the inner tube from the gap.

[0092] In this embodiment, the number of the water inlets 121 is at least one group, and the two water inlets in each group are located at the same height of the bottom of the cooling outer tube and are centrally symmetrically arranged. Such an arrangement is more convenient for the formation of vortex in the cooling cavity 13.

[0093] The cooling and purification pipe section of this embodiment has a simple structure, and is composed of a detachable assembly of an inner tube and a cooling outer tube, and has the dual functions of cooling and water washing; this structure can be assembled and applied in different types of semiconductor exhaust gas treatment equipment, not limited to the combustion-type exhaust gas treatment equipment of Example 2.

[0094] In other embodiments, Fig.12 As shown, the cooling and purification pipe section is another split structure, specifically: the bottom of the cooling outer pipe is provided with a cooling outer pipe base extending to the outer wall of the inner pipe, and the outer wall of the inner pipe and the bottom of the cooling outer pipe are integrally provided or fixedly connected. This embodiment has high structural stability and is not easy to leak, but is more difficult to process.

[0095] On the basis of the above, the cooling and purification pipe section further includes a cooling spray pipe 15 fixedly connected to the cooling outer pipe base, the top opening of the cooling spray pipe 15 corresponds to and is connected to the lower air outlet of the inner pipe; one or more spray head mounting seats 151 are installed on the inner wall of the cooling spray pipe 15. In this embodiment, the cooling spray pipe 15 and the inner pipe are separated. Other settings are the same as in this embodiment.

[0096] In addition, in order to achieve the effect of water saving, the following settings are made:

[0097] The bottom of the inner tube is connected to the water tank 2, and the water inlet 121 of the cooling and purification pipe section is connected to the water tank through a connecting pipe, and a water pump for driving water circulation is arranged in the water tank. During operation, the water in the water tank is fed into the cooling cavity 13 from the water inlet 121 of the purification pipe section along the connecting pipe, and forms a vortex upward from the bottom of the cooling box and flows into the inner tube along the gap between the top wall of the inner tube and the top inner wall of the cooling outer tube, and stays along the inner wall of the inner cavity and returns to the water tank. This process completes the circulation of cooling water. Therefore, the above-mentioned method of supplying water to the cooling and purification pipe section by using the water tank greatly achieves the effect of saving water.

[0098] Condensation treatment tube

[0099] like Fig.13 As shown, the condensation treatment tube includes a first tube 51, a perforated plate 52 vertically fixed on the inner tube wall, and a condensation ball 53 filled in the space between the two perforated plates or between the perforated plate and the top wall of the first tube. Through holes are distributed on the perforated plate, and the aperture of the through hole is smaller than the diameter of the condensation ball. The condensation ball is a hole-shaped structure, and a large number of through holes are arranged on the sphere to greatly increase its specific surface area and improve its treatment effect.

[0100] The first tube is open at both ends, and the two ends are respectively provided with connection seats for fixing to the ends of other structures, so as to facilitate flexible assembly in the exhaust gas treatment device.

[0101] The functions of the above-mentioned condensation balls are: first, to slow down the rising airflow through the spherical structure and the internal small holes, thereby prolonging the condensation time of the exhaust gas; second, the exhaust gas rich in water vapor is gradually cooled and condensed when passing through the inner holes of a large number of condensation balls, and the condensed water flows back to the water tank below along the pipe.

[0102] Further preferably, a spray pipe 54 is provided on the inner wall of the first tube, and the position of the spray pipe is higher than the condensation ball. The spray pipe can be provided in plurality, and the position can be reasonably adjusted.

[0103] The spray pipe can play two roles: on the one hand, it can further wash the condensed exhaust gas with water to further remove the harmful gases that are not absorbed in the exhaust gas, thereby improving the exhaust gas treatment effect; on the other hand, the spray pipe can flush the condensation ball below to a certain extent, thereby avoiding the blockage of the condensation ball to a certain extent and extending the cleaning cycle of the condensation ball.

[0104] The condensation ball can be made of various materials, such as metal, ceramic or others.

[0105] Further preferably, the condensation ball may also be made of adsorption material, so that the condensation ball has dual functions of condensation and adsorption.

[0106] In this embodiment, Figure 1 and Figure 3As shown, there are two condensation processing tubes 5 connected in series front and back. In other embodiments, the number and installation positions of the condensation processing tubes can be adjusted as needed.

[0107] An atomizing disk 7 is provided between the two condensation treatment tubes 5 and at the gas outlet end of a single condensation treatment tube 5 to improve the purification effect of the exhaust gas through further water washing.

[0108] Water vapor separator

[0109] like Fig.14 As shown, the water vapor separator includes a second tube 61 and a plurality of condensation plates 62 fixedly arranged on the inner side wall of the second tube, and the plurality of condensation plates are staggered along the height direction of the second tube.

[0110] Preferably, the outer end of the condensation plate extends beyond the central axis of the second tube.

[0111] The shape of the condensation plate can be set to various shapes such as square, semicircle, etc.

[0112] In this embodiment, preferably, the second sleeve is a square tube, the condensation plate is a square plate, and the width of the condensation plate is consistent with the width of the second sleeve. Such an arrangement can maximize the area of ​​the condensation plate and achieve the best water vapor separation effect.

[0113] Further preferably, the condensation plate can be arranged horizontally or tilted downward. In this embodiment, the square condensation plate is tilted downward at an acute angle. Such an arrangement allows the water droplets condensed on the condensation plate to automatically slide down from the tilted condensation plate under the action of gravity.

[0114] It is understandable that those skilled in the art can make equivalent substitutions or changes based on the technical solution and concept of the present invention, and all these changes or substitutions should fall within the protection scope of the claims attached to the present invention.

Claims

1. A combustion type tail gas treatment equipment, characterized in that: include: The gas mixing chamber (3) is used to receive and mix the fuel gas, the combustion-supporting gas and the waste gas to be treated; it comprises a main shell (31) and a combustion head (32) arranged inside the main shell; The reaction chamber (4) is connected to the gas outlet of the gas mixing chamber, and the tail gas to be treated is burned in the inner cavity of the reaction chamber and is externally connected to a gas supply pipe (44); A cooling and purification pipe section (1) is connected to the gas outlet of the reaction chamber and is used to cool and purify the waste gas generated after combustion; A water tank (2) is connected to the air outlet end of the cooling and purification pipe section; A condensation treatment pipe (5) is arranged on the other side of the water tank and communicates with the inner cavity thereof; The water vapor separator (6) is arranged at the gas outlet end of the condensation treatment pipe and is used to separate water vapor from the exhaust gas.

2. The combustion type exhaust gas treatment equipment according to claim 1, characterized in that: The reaction chamber (4) comprises a cooling outer tube (41) and a gas permeation tube (42) located in the center, which are sequentially sleeved from the outside to the inside. A closed interlayer (411) for accommodating cooling water is arranged inside the cooling outer tube. The outer layer of the cooling outer tube is provided with a first water inlet (411b) and a first water outlet (411a) which are connected to the interlayer.

3. The combustion type tail gas treatment equipment according to claim 2, characterized in that: The first water inlet is arranged at the bottom of the cooling outer tube, and the first water outlet (411b) is located at the top of the cooling outer tube.

4. The combustion type tail gas treatment equipment according to claim 2, characterized in that: The space between the outer wall of the gas permeable tube and the inner wall of the cooling outer tube (41) forms an air replenishment cavity (43); the outer wall of the gas permeable tube is connected to an air replenishment tube (44), one end of the air replenishment tube extends to communicate with the air replenishment cavity, and the other end of the air replenishment tube passes through the outside of the cooling outer tube; the gas permeable tube is made of high temperature resistant breathable material.

5. The combustion type tail gas treatment equipment according to claim 4, characterized in that: The upper end of the gas permeation tube is provided with a fixed pressing plate (43) for sealing the top surface of the gas permeation tube, an inner hole with an inner diameter not greater than the inner diameter of the gas leakage tube is provided at the center of the fixed pressing plate, and the fixed pressing plate is fixedly connected to the upper end surface of the cooling outer tube; the lower end of the gas permeation tube is also provided with a fixed pressing plate, or the lower end of the gas leakage tube is sealed by the bottom of the cooling outer tube.

6. The combustion type tail gas treatment equipment according to claim 5, characterized in that: The fixed pressing plate is annular, and the inner hole of the fixed pressing plate is aligned with the inner hole of the gas leakage pipe.

7. The combustion type tail gas treatment equipment according to claim 5, characterized in that: The bottom wall of the cooling outer tube extends toward the center to form an annular support portion (412) for supporting and sealing the bottom surface of the gas permeation tube (42).

8. The combustion type tail gas treatment equipment according to claim 7, characterized in that: A gasket (44) is arranged between the lower end surface of the gas permeable tube (42) and the annular support portion, and a gasket is also arranged directly between the upper end surface of the gas permeable tube and the fixed pressure plate.

9. The combustion type tail gas treatment equipment according to claim 9, characterized in that: The gas mixing chamber (3) comprises a main shell (31), a burner head (32) installed in the main shell, a fuel gas transmission pipe (34) connected to the inner cavity of the burner head, and a tail gas transmission pipe (33) fixed to and connected to the inner cavity of the main shell; the gas mixing chamber is also provided with a combustion-supporting gas transmission pipe (35) connected to the inner cavity of the main shell.

10. The combustion type tail gas treatment equipment according to claim 1, characterized in that: The condensation treatment tubes (5) are arranged in two or more arrangements connected in series.

11. The combustion type tail gas treatment equipment according to claim 1, characterized in that: An atomizing disk (7) is provided between two condensation processing tubes (5) and / or at the gas outlet end of a single condensation processing tube (5).

12. The combustion type exhaust gas treatment equipment according to claim 1, characterized in that: The cooling and purification pipe section (1) comprises an inner pipe (11) and a cooling outer pipe (12) sleeved outside the inner pipe, a cooling cavity (13) is defined between the outer wall of the inner pipe and the inner wall of the cooling outer pipe, a second water inlet (121) is provided on the pipe wall of the cooling outer pipe, a first air inlet (122) is provided at the top of the cooling outer pipe, and a second air inlet (111) is correspondingly provided at the top of the inner pipe; a gap (14) is provided between the top wall of the inner pipe and the inner wall of the top of the cooling outer pipe; and the inner diameter of the second air inlet is larger than that of the first air inlet.

13. The combustion type tail gas treatment equipment according to claim 12, characterized in that: The outer wall of the inner tube (11) is fixedly provided or integrally formed with a flange base (112) for fixing and sealingly connecting with the bottom of the cooling outer tube (12); the outer wall of the bottom of the cooling outer tube is correspondingly provided with a connecting portion (123).

14. The combustion type tail gas treatment equipment according to claim 12, characterized in that: The side wall of the inner tube extends toward the bottom of the flange base to form a cooling spray pipe (15), one or more spray head mounting seats (151) are installed on the inner wall of the cooling spray pipe, and the multiple spray head mounting seats are respectively arranged at different heights; a connecting seat (16) for connecting to a water tank (2) is arranged at the bottom of the inner tube.

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