Plasma combustion type tail gas treatment process capable of concentrating air

Abstract

The invention relates to the field of tail gas treatment. The invention provides a plasma combustion type tail gas treatment process capable of concentrating air. The plasma combustion type tail gas treatment process comprises the following steps: S1, cooling and introducing tail gas; s2, centralized air introduction and mixing: air enters a first air cavity, an annular groove is formed in the upper wall of the first air cavity, and the air is uniformly introduced into the first reaction cavity through the annular groove; s3, combustion reaction; s4, secondary air introduction and further treatment: tail gas which is not completely decomposed enters a second reaction cavity from the first reaction cavity, air is introduced for the second time, and the tail gas is further treated; and S5, tail gas cooling and treatment: cooling the treated tail gas in a second reaction cavity through a second cooling cavity, and finally carrying out water washing treatment on the cooled tail gas. According to the plasma combustion type tail gas treatment process capable of concentrating the air, provided by the invention, the tail gas treatment efficiency and effect are remarkably improved by optimizing an air leading-in mode aiming at the problem that airflow is dispersed when the air enters a reaction cavity in existing plasma tail gas treatment equipment.

Description

Technical Field

[0001] The invention relates to the field of semiconductor tail gas treatment, and in particular to a plasma combustion tail gas treatment process capable of concentrating air. Background Art

[0002] In existing plasma exhaust gas treatment equipment, the air flow entering the reaction chamber is relatively dispersed, resulting in uneven distribution of exhaust gas in the reaction chamber. This uneven air flow distribution makes the exhaust gas in some areas unable to fully contact the high-temperature plasma flame, thereby affecting the efficiency and effect of exhaust gas treatment.

[0003] Due to the dispersion of air flow, the contact area between the tail gas and the plasma flame is reduced, resulting in insufficient energy transfer, which not only reduces the energy efficiency, but also slows down the chemical reaction rate, prolongs the processing time, and increases energy consumption.

[0004] The dispersed air flow reduces the chances of effective collision between pollutant molecules in the exhaust gas and the plasma flame, resulting in a lower reaction rate, which further affects the thoroughness and speed of exhaust gas treatment, especially when treating exhaust gas with high concentration or complex components.

[0005] Moreover, the energy utilization caused by air flow dispersion is not fully utilized, and the equipment needs higher power input to maintain the required processing effect, which increases the operating cost. At the same time, the uneven air flow distribution may also cause local overheating inside the equipment, shorten the service life of the equipment, and increase the cost of maintenance and replacement of parts.

[0006] Therefore, the prior art needs to be solved urgently. Summary of the invention

[0007] The purpose of the present invention is to provide a plasma combustion tail gas treatment process that can concentrate air in order to address the deficiencies of the prior art. The present invention proposes a plasma combustion tail gas treatment process that can concentrate air, which ensures that the air is concentrated in one place and introduced into the first reaction chamber, thereby improving the mixing efficiency of air and tail gas and ensuring full contact.

[0008] The technical solution of the present invention is achieved in this way: A plasma combustion tail gas treatment process capable of concentrating air comprises the following steps: S1. Exhaust cooling and introduction: Exhaust gas passes through the exhaust inlet of the exhaust pipe and is cooled in the first cooling chamber before entering the first reaction chamber; S2. Concentrated air introduction and mixing: air enters the first air chamber through the first air inlet, and the upper wall of the first air chamber has an annular groove, so that the air is uniformly introduced into the first reaction chamber through the annular groove; S3. Combustion reaction: In the first reaction chamber, the plasma burner assembly generates a high-temperature plasma flame, the exhaust gas and the air are fully mixed around the plasma burner assembly and a chemical reaction occurs, and the harmful components in the exhaust gas are decomposed and converted by high temperature; S4. Secondary air introduction and further processing: the incompletely decomposed tail gas enters the second reaction chamber from the first reaction chamber, and the additional air is introduced for the second time to further process the tail gas; S5. Tail gas cooling and treatment: The tail gas treated in step S4 is cooled in the second cooling chamber in the second reaction chamber, and the cooled tail gas is finally washed with water.

[0009] In the plasma combustion exhaust gas treatment process capable of concentrating air as described above, in step S1, the exhaust gas inlets are arranged at equal intervals and tilted downward, and the exhaust gas enters the first reaction chamber tilted downward through the exhaust gas inlet of the exhaust gas inlet pipe.

[0010] In the plasma combustion tail gas treatment process capable of concentrating air as described above, in the step S1, the first cooling cavity is disposed above the first air cavity.

[0011] In the plasma combustion exhaust gas treatment process capable of concentrating air as described above, in step S1, the inner wall of the exhaust gas inlet is coated with refractory mud.

[0012] As described above, in a plasma combustion exhaust gas treatment process that can concentrate air, in step S2, a first inclined plate inclined downward is provided at the end of the upper wall of the first air cavity, and a second inclined plate inclined downward is provided at the end of the side wall of the first air cavity. The first inclined plate and the second inclined plate are arranged in parallel and spaced apart to form a narrow channel, so that the air is concentrated in one place when entering the first reaction chamber along the narrow channel.

[0013] In the plasma combustion exhaust gas treatment process capable of concentrating air as described above, in step S2, the first inclined plate and the second inclined plate are parallel and spaced apart, and the angle formed by the first inclined plate and the second inclined plate with the vertical plane is 10°-40°.

[0014] In the plasma combustion exhaust gas treatment process capable of concentrating air as described above, in step S3, the temperature of the high-temperature plasma flame of the plasma burner assembly is 6000°C-8000°C.

[0015] In the plasma combustion exhaust gas treatment process capable of concentrating air as described above, the specific step of introducing additional air for the second time in step S4 includes: air enters the second air cavity through the second air inlet, and then enters the second reaction cavity through the vent hole.

[0016] As described above, in a plasma combustion exhaust gas treatment process that can concentrate air, the specific steps of secondary introducing additional air in step S4 include: air enters the second air cavity through the second air inlet, and then enters the second reaction cavity through the air vent under the introduction of the third inclined plate and is concentrated again, ensuring that the air is fully mixed with the unreacted exhaust gas, undergoing a secondary reaction, and further decomposing and transforming the harmful components in the exhaust gas.

[0017] In the plasma combustion exhaust gas treatment process capable of concentrating air as described above, in step S5, the second cooling chamber is located between the middle wall of the second reaction chamber and the outer shell of the second reaction chamber, and the second cooling chamber is separated from the second air chamber by a partition.

[0018] Compared with the prior art, the present invention has the following advantages and beneficial effects: The present invention provides a plasma combustion exhaust gas treatment process capable of concentrating air. When air is concentratedly introduced and mixed, the air enters the first air cavity through the first air inlet. The upper wall of the first air cavity has an annular groove, so that the air is uniformly introduced into the first reaction cavity through the annular groove. In particular, the first inclined plate (422) and the second inclined plate (431) are parallel and spaced apart and the angle formed with the vertical plane is 10°-40°. The air can be concentrated in one place. First, the dispersion of air flow is avoided, and the air and exhaust gas are fully mixed around the plasma flame, which not only improves the contact between the air and the exhaust gas, but also improves the air flow dispersion. area, and also enhances the efficiency of energy transfer and promotes the progress of chemical reactions; secondly, the concentrated air and exhaust gas are fully mixed around the plasma flame, which increases the effective collision opportunities between the pollutant molecules and the plasma flame, which not only improves the reaction rate, but also ensures that the harmful components in the exhaust gas can be completely decomposed, especially for the exhaust gas with high concentration or complex components, the treatment effect is more significant; thirdly, the uniform airflow distribution avoids the phenomenon of local overheating inside the equipment and reduces the risk of damage to the materials of the exhaust gas treatment equipment due to high temperature, which not only extends the service life of the equipment, but also reduces the cost of maintenance and replacement of parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, what is described below is only one embodiment of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 A schematic diagram of the structure of a plasma combustion tail gas treatment process capable of concentrating air provided by the present invention; Figure 2 for Figure 1AA section view; Figure 3 for Figure 1 A partial enlarged view of the C part; Figure 4 for Figure 1 A partial enlarged view of part D.

[0021] In the figure, 1-exhaust inlet pipe, 11-exhaust inlet, 2-first cooling chamber, 3-first reaction chamber, 4-first air chamber, 5-second reaction chamber, 6-second air chamber, 7-second cooling chamber, 8-connecting column, 9-partition, 31-plasma burner assembly, 41-first air inlet, 42-first air chamber upper wall, 421-annular groove, 422-first inclined plate, 43-first air chamber side wall, 431-second inclined plate, 51-second reaction chamber inner wall, 52-second reaction chamber middle wall, 53-second reaction chamber outer shell, 54-second air inlet, 55-vent, 56-third inclined plate. DETAILED DESCRIPTION

[0022] In the following description, it should be understood that the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the statement "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same similar parts between the embodiments can be referred to each other. The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like used herein to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description herein, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, or it can be the internal connection of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to the specific circumstances. In this document, unless otherwise specified, the term "plurality" means two or more.

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] Embodiment 1: like Figure 1-3As shown, a plasma combustion exhaust gas treatment equipment capable of concentrating air comprises a first reaction chamber 3, a first air chamber 4, a first air chamber upper wall 42 and a second reaction chamber 5, a plasma burner assembly 31 is arranged above the first reaction chamber 3, a plurality of exhaust gas inlet pipes 1 are arranged on the side of the first reaction chamber 3, and the exhaust gas inlet pipes 1 are connected to the first reaction chamber 3; a first air inlet 41 is arranged on the first air chamber 4, and the first air chamber upper wall 42 has an annular groove 421, and the first air chamber 4 is connected to the first reaction chamber 3 through the annular groove 421.

[0025] Preferably, the first air cavity side wall 43 is further included, a first inclined plate 422 inclined downward is provided at the end of the first air cavity upper wall 42, a second inclined plate 431 inclined downward is provided at the end of the first air cavity side wall 43, and the first inclined plate 422 and the second inclined plate 431 are arranged in parallel and spaced apart to form a channel for accommodating air introduction. Under the guidance of the first inclined plate 422 and the second inclined plate 431, it is ensured that the air is concentrated in one place when entering the first reaction chamber 3, avoiding air flow dispersion, achieving full mixing of air and exhaust gas, and improving the efficiency of plasma combustion; the parallel and spaced arrangement forms a narrow channel, ensuring that the air is evenly distributed when entering, and improving the treatment effect of plasma combustion.

[0026] Preferably, a connecting column 8 is provided between the first air cavity upper wall 42 and the first air cavity side wall 43. The connecting column 8 provides structural support, enhances the overall stability of the first air cavity 4, and ensures that the device maintains good performance during long-term operation.

[0027] like Figure 4 As shown, preferably, it also includes a second air cavity 6 , which is arranged at the lower end of the second reaction cavity 5 .

[0028] Preferably, the second reaction chamber 5 is provided with a second reaction chamber inner wall 51, a second reaction chamber middle wall 52 and a second reaction chamber outer shell 53 in sequence from the inside to the outside.

[0029] Preferably, a second air inlet 54 is provided at the lower end of the second reaction chamber shell 53, and the second air inlet 54 is externally connected to a blower (not shown in the figure); the second reaction chamber middle wall 52 is provided with an air vent 55, and the second air cavity 6 is connected to the second reaction chamber 5 through the air vent 55.

[0030] Preferably, a third inclined plate 56 inclined downward is provided above the vent hole 55 , one end of the third inclined plate 56 is connected to the second reaction chamber inner wall 51 , and the other end of the third inclined plate 56 is connected to the second reaction chamber middle wall 52 .

[0031] Under this condition, additional air is introduced through the second air inlet 54 to ensure sufficient oxygen supply; the design of the air vent 55 and the third inclined plate 56 ensures that air is evenly introduced into the second reaction chamber 5, and the exhaust gas that is not completely decomposed in the initial treatment continues to react with the oxygen in the air, further decomposes and transforms, and improves the treatment effect; in addition, cold air is mixed with the high-temperature exhaust gas to reduce the temperature of the exhaust gas, reduce the impact of high temperature on the equipment, extend the equipment life, and improve the stability and safety of the system.

[0032] Preferably, a first cooling chamber 2 is further included, and the first cooling chamber 2 is arranged above the first air chamber 4. The first cooling chamber 2 absorbs the heat of the high-temperature tail gas in the first reaction chamber 3 by introducing a cooling medium, thereby reducing the temperature of the tail gas.

[0033] Preferably, a second cooling chamber 7 is further included, the second cooling chamber 7 is located between the second reaction chamber middle wall 52 and the second reaction chamber shell 53, and the second cooling chamber 7 is separated from the second air chamber 6 by a partition 9. The temperature of the second cooling chamber 7 is reduced to ensure that the tail gas has a suitable temperature when entering the subsequent treatment stage, thereby improving the treatment efficiency.

[0034] Preferably, the exhaust gas inlet pipe 1 comprises exhaust gas inlets 11, and the exhaust gas inlets 11 are arranged at equal intervals and tilted downward. Such a design optimizes the introduction of exhaust gas flow, ensures uniform distribution of exhaust gas, and improves the mixing efficiency of exhaust gas and air.

[0035] Preferably, the inner wall of the exhaust gas inlet 11 is coated with refractory clay to effectively prevent thermal damage to the exhaust gas inlet pipe 1 caused by high-temperature exhaust gas.

[0036] Embodiment 2: The present embodiment provides a plasma combustion tail gas treatment process capable of concentrating air, comprising the following steps: S1. Exhaust cooling and introduction: Exhaust gas passes through the exhaust inlet 11 of the exhaust pipe 1 and is cooled in the first cooling chamber 2 before entering the first reaction chamber 3; S2. Concentrated air introduction and mixing: air enters the first air chamber 4 through the first air inlet 41, and the upper wall 42 of the first air chamber has an annular groove 421, so that the air is uniformly introduced into the first reaction chamber 3 through the annular groove 421; S3. Combustion reaction: In the first reaction chamber 3, the plasma burner assembly 31 generates a high-temperature plasma flame, the exhaust gas and the air are fully mixed around the plasma burner assembly 31 and a chemical reaction occurs, and the harmful components in the exhaust gas are decomposed and converted at high temperature; S4. Secondary air introduction and further processing: The incompletely decomposed exhaust gas enters the second reaction chamber 5 from the first reaction chamber 3, and the secondary introduction of additional air further processes the exhaust gas; S5. Tail gas cooling and treatment: The tail gas treated in step S4 is cooled in the second reaction chamber 5 through the second cooling chamber 7, and the cooled tail gas is finally washed with water.

[0037] In this embodiment, the tail gas to be treated is silane (SiH 4 ) and its derivatives, phosphine (PH 3 ), Arsenic Hydrogen (AsH 3 ), nitrides (such as NH 3 、N 2 O), fluoride (such as NF 3 , SF 6 CF 4 ), volatile organic compounds (VOCs), metal organic compounds (such as TDMAT, TDMAA), chlorides (such as Cl 2 , HCl), etc.

[0038] Preferably, in step S1 , the exhaust gas inlets 11 are arranged at equal intervals and tilted downward, and the exhaust gas enters the first reaction chamber 3 through the exhaust gas inlet 11 of the exhaust gas inlet pipe 1 and tilted downward.

[0039] Preferably, in step S1 , the first cooling cavity 2 is disposed above the first air cavity 4 .

[0040] Preferably, in step S1, the inner wall of the exhaust gas inlet 11 is coated with refractory clay.

[0041] Preferably, in step S2, a first inclined plate 422 inclined downward is provided at the end of the first air cavity upper wall 42, and a second inclined plate 431 inclined downward is provided at the end of the first air cavity side wall 43. The first inclined plate 422 and the second inclined plate 431 are arranged in parallel and spaced apart to form a narrow channel, so that the air is concentrated in one place when entering the first reaction chamber 3 along the narrow channel.

[0042] Preferably, in step S2, the first inclined plate 422 and the second inclined plate 431 are parallel and spaced apart, and the angle formed with the vertical plane is 10°-40°. Preferably, in step S2, the first inclined plate 422 and the second inclined plate 431 are parallel and spaced apart, and the angle formed with the vertical plane is 15°-35°. The design of the inclination angle of 15°-35° can effectively reduce the dispersion phenomenon when the air enters the first reaction chamber (3). By forming a narrow channel, the air is guided to be concentrated along the direction of the first inclined plate 422 and the second inclined plate 431, thereby avoiding the disorderly diffusion of the airflow when entering the reaction chamber. The appropriate inclination angle helps to maintain the stability of the airflow and reduce the generation of turbulence and eddy currents. Too small an angle (less than 15°) may cause the airflow to be too slow, while too large an angle (greater than 35°) may increase the instability of the airflow. The range of the inclination angle of 15°-35° can maintain the stable flow of the airflow while ensuring the concentration of the airflow, and ensure that the air is evenly distributed in the entire reaction chamber. Preferably, in step S2, the first inclined plate 422 and the second inclined plate 431 are parallel and spaced apart, and the angle between them and the vertical plane is 30°.

[0043] Preferably, in step S3, the temperature of the high-temperature plasma flame of the plasma burner assembly 31 is 6000° C.-8000° C. Under this condition, it is ensured that the harmful components in the tail gas are completely destroyed to avoid secondary pollution.

[0044] Preferably, the specific step of introducing the additional air for the second time in step S4 includes: the air enters the second air cavity 6 through the second air inlet 54 , and then enters the second reaction cavity 5 through the vent hole 55 .

[0045] Preferably, the specific steps of introducing additional air for the second time in step S4 include: the air enters the second air cavity 6 through the second air inlet 54, and then enters the second reaction cavity 5 through the vent hole 55 under the introduction of the third inclined plate 56 to be concentrated again, ensuring that the air is fully mixed with the unreacted exhaust gas, undergoing a secondary reaction, and further decomposing and transforming the harmful components in the exhaust gas.

[0046] Preferably, in step S5 , the second cooling chamber 7 is located between the second reaction chamber middle wall 52 and the second reaction chamber shell 53 , and the second cooling chamber 7 is separated from the second air chamber 6 by a partition plate 9 .

[0047] The exhaust gas enters the first reaction chamber 2 through the exhaust gas inlet 11 of the exhaust gas inlet pipe 1 after being cooled by the first cooling chamber 2. Since the exhaust gas inlet 11 is arranged at equal intervals and tilted downward, the exhaust gas is concentrated in the middle of the first reaction chamber 2; the air enters the first reaction chamber 2 through the first air inlet 41, and the first inclined plate 422 and the second inclined plate 431 are arranged in parallel and spaced to form a channel for accommodating the introduction of air, so that the air is also concentrated in the middle of the first reaction chamber 2, thereby ensuring that the air and the exhaust gas are fully mixed and reacted around the plasma flame of the plasma burner assembly 31, thereby improving the gas The mixing efficiency of the flow is improved, thereby improving the exhaust gas treatment effect; in addition, when the unreacted exhaust gas enters the lower end of the second reaction chamber 5 through the first reaction chamber 2, air is blown in by a blower (not shown in the figure), and the air entering the second reaction chamber 5 through the vent hole 55 is concentrated again under the action of the third inclined plate 56. The air entering from the second air chamber 6 participates in the secondary treatment on the one hand and reacts with the unreacted exhaust gas for the secondary reaction, and on the other hand, plays a cooling role. The high-temperature exhaust gas is mixed with the cooling air in the second reaction chamber 5 and gradually cools down, thereby reducing the impact of high temperature on the equipment and extending the life of the equipment.

[0048] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A plasma combustion tail gas treatment process capable of concentrating air, characterized in that: The following steps are involved: S1. Exhaust gas cooling and introduction: the exhaust gas passes through the exhaust gas inlet (11) of the exhaust gas inlet pipe (1), passes through the first cooling chamber (2) for cooling, and then enters the first reaction chamber (3); S2. Concentrated air introduction and mixing: air enters the first air chamber (4) through the first air inlet (41), and the upper wall (42) of the first air chamber has an annular groove (421), so that the air is uniformly introduced into the first reaction chamber (3) through the annular groove (421); S3. Combustion reaction: In the first reaction chamber (3), the plasma burner assembly (31) generates a high-temperature plasma flame, the exhaust gas and the air are fully mixed around the plasma burner assembly (31) and a chemical reaction occurs, and the harmful components in the exhaust gas are decomposed and converted by the high temperature; S4. Secondary air introduction and further processing: the incompletely decomposed tail gas enters the second reaction chamber (5) from the first reaction chamber (3), and additional air is introduced for the second time to further process the tail gas; S5. Tail gas cooling and treatment: The tail gas treated in step S4 is cooled in the second reaction chamber (5) through the second cooling chamber (7), and the cooled tail gas is finally washed with water.

2. The plasma combustion tail gas treatment process capable of concentrating air according to claim 1, characterized in that: In the step S1, the exhaust gas inlets (11) are arranged at equal intervals and tilted downward, and the exhaust gas enters the first reaction chamber (3) tilted downward through the exhaust gas inlet (11) of the exhaust gas inlet pipe (1).

3. The plasma combustion tail gas treatment process capable of concentrating air according to claim 1, characterized in that: In the step S1, the first cooling cavity (2) is arranged above the first air cavity (4).

4. The plasma combustion tail gas treatment process capable of concentrating air according to claim 1, characterized in that: In the step S1, the inner wall of the exhaust gas inlet (11) is coated with refractory clay.

5. The plasma combustion tail gas treatment process capable of concentrating air according to claim 1, characterized in that: In step S2, a first inclined plate (422) inclined downward is provided at the end of the upper wall (42) of the first air cavity, and a second inclined plate (431) inclined downward is provided at the end of the side wall (43) of the first air cavity. The first inclined plate (422) and the second inclined plate (431) are arranged in parallel and spaced apart to form a narrow channel, so that air is concentrated in one place when entering the first reaction chamber (3) along the narrow channel.

6. The plasma combustion tail gas treatment process capable of concentrating air according to claim 5, characterized in that: In the step S2, the first inclined plate (422) and the second inclined plate (431) are parallel and spaced apart, and the angle formed by the two with the vertical plane is 10°-40°.

7. The plasma combustion tail gas treatment process capable of concentrating air according to claim 1, characterized in that: In step S3, the temperature of the high-temperature plasma flame of the plasma burner assembly (31) is 6000° C.-8000° C.

8. The plasma combustion tail gas treatment process capable of concentrating air according to claim 1, characterized in that: The specific steps of introducing the additional air for the second time in step S4 include: the air enters the second air cavity (6) through the second air inlet (54), and then enters the second reaction cavity (5) through the vent hole (55).

9. The plasma combustion tail gas treatment process capable of concentrating air according to claim 1, characterized in that: The specific steps of introducing the additional air for the second time in step S4 include: the air is connected to the second air cavity (6) through the second air inlet (54), and then enters the second reaction cavity (5) through the vent hole (55) under the guidance of the third inclined plate (56) to be concentrated again, so as to ensure that the air is fully mixed with the unreacted exhaust gas, and a secondary reaction is carried out to further decompose and transform the harmful components in the exhaust gas.

10. The plasma combustion tail gas treatment process capable of concentrating air according to claim 9, characterized in that: In the step S5, the second cooling chamber (7) is located between the second reaction chamber middle wall (52) and the second reaction chamber outer shell (53), and the second cooling chamber (7) is separated from the second air chamber (6) by a partition plate (9).

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