Manufacturing method of grinding disc

Abstract

The manufacturing method of the grinding disc comprises the following steps: preparing a grinding disc material: uniformly mixing and stirring abrasive particles and a composite adhesive to obtain the grinding disc material; and drying the grinding disc material, pressing a die, heating and pressurizing, fixing and forming, and sintering at a preset temperature to obtain the grinding disc, wherein the abrasive particles comprise ceramic abrasive particles and diamond abrasive particles, and the ceramic abrasive particles and the diamond abrasive particles are mixed according to the weight ratio of 9.4: 0.6 to 9.6: 0.4. The grinding disc manufactured through the method is uniform in grinding material distribution, good in grinding effect and stable in performance, so that the product consistency is guaranteed, meanwhile, the manufacturing cost is low, and the manufacturing efficiency is high.

Description

Technical Field

[0001] The invention relates to the field of microelectronics manufacturing, and in particular to a method for manufacturing a grinding disc. Background Art

[0002] With the rapid development of the semiconductor industry, the requirements for the flatness and precision of the surface of electronic components are getting higher and higher. The material of the grinding disc plays a key role in the performance of the grinding disc. At present, the types of grinding discs include cast iron, tin discs, diamonds, etc., and the problems they have are easy to rust, easy to wear, short life, high cost, etc. Among them, in the application of ceramic grinding tools, high requirements are also put forward for the uniformity of abrasive distribution, performance consistency and stability in ceramic grinding tools. The current grinding discs have not yet met the above requirements.

[0003] Therefore, it is urgent to provide an improved method for manufacturing a grinding disc to overcome the above defects. Summary of the invention

[0004] The object of the present invention is to provide an improved method for manufacturing a grinding disc, wherein the grinding disc manufactured by the method has uniform abrasive distribution, good grinding effect, stable performance to ensure product consistency, and at the same time, low manufacturing cost and high manufacturing efficiency.

[0005] To achieve the above object, the manufacturing method of the grinding disc of the present invention comprises the following steps:

[0006] Preparation of grinding disc material: mixing abrasive grains and composite binder to obtain grinding disc material; and

[0007] The grinding disc material is dried and then pressed into a mold, fixed into a shape after heating and pressurizing, and sintered at a predetermined temperature to obtain a grinding disc;

[0008] The abrasive grains include ceramic abrasive grains and diamond abrasive grains, and the ceramic abrasive grains and the diamond abrasive grains are mixed in a weight ratio of 9.4:0.6 to 9.6:0.4.

[0009] Compared with the prior art, the present invention combines ceramic abrasives and diamond abrasives, mixes them with a composite adhesive in a specific ratio, and obtains a uniform grinding disc material, which is then pressed into a mold after drying, fixed into a shape after heating and pressurization, and sintered at a predetermined temperature to obtain a grinding disc. The present invention makes the abrasive distribution more uniform by mixing ceramic abrasives and diamond abrasives; by molding in a mold, it is more conducive to uniform material distribution and avoids uneven material distribution caused by grinding disc molding; after the grinding disc is sintered, the problem of uneven material on the inner and outer edges of the grinding disc is avoided. Moreover, the manufacturing method is simple and effective, low in cost, and high in efficiency. The ceramic abrasives and diamond particles manufactured by this method are evenly distributed, have good grinding effects, and stable performance, thereby ensuring product consistency.

[0010] As a preferred embodiment, the weight ratio of the abrasive particles to the composite binder is 6:1 to 7:1.

[0011] As a preferred embodiment, the preparation of the grinding disc material specifically includes:

[0012] Preparation of granulated rubber: dissolving the composite binder in isopropanol and stirring evenly to obtain granulated rubber;

[0013] Abrasive grain mixing: the ceramic abrasive grains and the diamond abrasive grains are mixed evenly according to a proportion; and

[0014] The granulating rubber is added to the abrasive particles and stirred uniformly to obtain the grinding disc material.

[0015] As a preferred embodiment, the grinding disc material is placed in a constant temperature drying oven for drying, the drying temperature is 110° C.-120° C., and the drying time is 30-50 minutes.

[0016] As a preferred embodiment, the heating and pressurizing followed by fixing and forming specifically comprises: constant temperature heating at 200-220° C., maintaining a pressure of 8-9T for 4-5 hours.

[0017] As a preferred embodiment, after the heating, pressurizing and fixing forming, the grinding disc material is further cooled.

[0018] As a preferred embodiment, the sintering comprises: placing the grinding disc material in a muffle furnace for sintering at a sintering temperature of 800° C.-1000° C. and keeping the temperature for 6-8 hours. DETAILED DESCRIPTION

[0019] The manufacturing method of the grinding disc of the present invention is further described below in conjunction with the embodiments, but the present invention is not limited thereby. The method of the present invention is intended to provide a manufacturing method of a grinding disc, wherein the abrasive material of the grinding disc prepared by the method is evenly distributed, the grinding effect is good, the performance is stable so as to ensure the consistency of the product, and at the same time, the manufacturing cost is low and the manufacturing efficiency is high.

[0020] The manufacturing method of the grinding disc of the present invention comprises the following steps:

[0021] Preparation of grinding disc material: mixing abrasive grains and composite binder to obtain grinding disc material; and

[0022] The grinding disc material is dried and then pressed into a mold, fixed into a shape after heating and pressurizing, and sintered at a predetermined temperature to obtain a grinding disc;

[0023] The abrasive grains include ceramic abrasive grains and diamond abrasive grains, and the ceramic abrasive grains and the diamond abrasive grains are mixed in a weight ratio of 9.4:0.6 to 9.6:0.4.

[0024] The present invention combines ceramic abrasive grains and diamond abrasive grains, mixes them with a composite adhesive in a specific ratio, and obtains a uniform grinding disc material, which is then pressed into a mold after drying, fixed into a shape after heating and pressurization, and sintered at a predetermined temperature to obtain a grinding disc. The present invention makes the abrasive distribution more uniform by mixing ceramic abrasive grains and diamond abrasive grains; by molding in a mold, it is more conducive to the uniform distribution of the material, avoiding the uneven distribution of the material caused by the molding of the grinding disc; after the grinding disc is sintered, the problem of uneven material on the inner and outer edges of the grinding disc is avoided. Specific ceramic abrasive grains and diamond abrasive grains can improve the grinding ability of the grinding disc while ensuring a low manufacturing cost. Moreover, the manufacturing method is simple and effective, low in cost, and high in efficiency. The ceramic abrasive grains and diamond particles manufactured by this method are evenly distributed, have a good grinding effect, and stable performance, thereby ensuring product consistency.

[0025] Specifically, in a preferred embodiment, the mass ratio of abrasive grains to composite binder is 6:1 to 7:1, preferably 6:1. Among them, the weight ratio of ceramic abrasive grains to diamond abrasive grains in the abrasive grains is 9.4:0.6 to 9.6:0.4, preferably 9.5:0.5. Specifically, the specific steps for preparing grinding disc material are as follows. First, prepare granulation rubber: the composite binder is dissolved in isopropanol and stirred evenly to obtain granulation rubber. For example, take 20Kg of WS-120 (produced by Nanjing Si Shang Science and Technology Trade Center) and add it to 500L of isopropanol to dissolve, stir evenly, and prepare granulation rubber. Then, 95Kg of ceramic abrasive grains and 5Kg of diamond abrasive grains are mixed evenly, and the above-prepared 20Kg of granulation rubber is added and stirred evenly to obtain grinding disc material.

[0026] Next, the grinding disc material is placed in a constant temperature drying oven for drying at a temperature of 110-120°C for 30-50 minutes. After drying, it is placed in a special mold for compression molding, and heated at a constant temperature of 200-220°C, preferably 200°C, and the pressure is maintained at 8-9T, preferably 8T, for 4-5 hours to fix the shape. After heating, it is fully cooled. Finally, the grinding disc material is placed in a muffle furnace for sintering at a sintering temperature of 800-1000°C for 6-8 hours to obtain a ceramic grinding disc.

[0027] Therefore, the present invention combines ceramic abrasive grains and diamond abrasive grains, mixes them with a composite adhesive in a specific ratio, and obtains a uniform grinding disc material, which is then pressed into a mold after drying, fixed into a shape after heating and pressurization, and sintered at a predetermined temperature to obtain a grinding disc. The present invention makes the abrasive distribution more uniform by mixing ceramic abrasive grains and diamond abrasive grains; by molding in a mold, it is more conducive to the uniform distribution of the material, avoiding the uneven distribution of the material caused by the molding of the grinding disc; after the grinding disc is sintered, the problem of uneven material on the inner and outer edges of the grinding disc is avoided. Specific ceramic abrasive grains and diamond abrasive grains can improve the grinding ability of the grinding disc while ensuring a low manufacturing cost. Moreover, the manufacturing method is simple and effective, low cost, and high efficiency. The ceramic abrasive grains and diamond particles manufactured by this method are evenly distributed, have a good grinding effect, and stable performance, thereby ensuring product consistency.

[0028] The above disclosure is only a preferred embodiment of the present invention, which certainly cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made according to the scope of the patent application of the present invention are still within the scope covered by the present invention.

Claims

1. A method for manufacturing a grinding disc, characterized in that: The following steps are involved: Preparation of grinding disc material: mixing and stirring the abrasive grains and the composite binder to obtain the grinding disc material; as well as The grinding disc material is dried and then pressed into a mold, fixed into a shape after heating and pressurizing, and sintered at a predetermined temperature to obtain a grinding disc; The abrasive grains include ceramic abrasive grains and diamond abrasive grains, and the ceramic abrasive grains and the diamond abrasive grains are mixed in a weight ratio of 9.4:0.6 to 9.6:0.

4.

2. The method for manufacturing a grinding disc according to claim 1, wherein: The weight ratio of the abrasive particles to the composite binder is 6:1 to 7:

1.

3. The method for manufacturing a grinding disc according to claim 1, wherein: The preparation of the grinding disc material specifically comprises: Preparation of granulated rubber: dissolving the composite binder in isopropanol and stirring evenly to obtain granulated rubber; Abrasive grain mixing: the ceramic abrasive grains and the diamond abrasive grains are mixed evenly according to a proportion; and The granulating rubber is added to the abrasive particles and stirred uniformly to obtain the grinding disc material.

4. The method for manufacturing a grinding disc according to claim 1, wherein: The grinding disc material is placed in a constant temperature drying oven for drying, the drying temperature is 110° C.-120° C., and the drying time is 30-50 minutes.

5. The method for manufacturing a grinding disc according to claim 1, wherein: The post-heating and pressurizing fixing molding specifically includes: constant temperature heating at 200-220° C., maintaining the pressure at 8-9T for 4-5 hours.

6. The method for manufacturing a grinding disc according to claim 5, characterized in that: After the heating, pressurizing and fixing forming, the grinding disc material is further cooled.

7. The method for manufacturing a grinding disc according to claim 1, wherein: The sintering comprises: placing the grinding disc material in a muffle furnace for sintering at a sintering temperature of 800° C.-1000° C. and keeping the temperature for 6-8 hours.