Jig for machining inclined air hole for vacuum chuck and machining method

Abstract

The jig comprises a supporting frame, a supporting inclined face is arranged on the supporting frame, the vacuum suction cup is detachably connected to the supporting inclined face, a tool setting block is arranged on the supporting inclined face, a horizontal tool setting face is arranged on the tool setting block, a tool setting hole is formed in the supporting inclined face, and the vacuum suction cup is detachably connected to the supporting inclined face. The tool setting hole extends in the axis direction of the inclined air hole. In the embodiment, the arranged supporting frame is provided with the supporting inclined face, the vacuum suction cup is obliquely placed on the supporting inclined face, so that it can be guaranteed that the machining tool can keep vertical machining in the machining process, the cutting quality is improved, the machining tool is prevented from being broken, meanwhile, the tool setting hole is formed in the supporting inclined face, interference is avoided, and the machining efficiency is improved. And a horizontal tool setting surface is arranged on the tool setting block, so that the machining tool can be calibrated and positioned, and the machining accuracy is ensured.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a jig and a processing method for processing oblique air holes for a vacuum chuck. Background Art

[0002] Vacuum chucks are widely used in semiconductor manufacturing as wafer loading and transportation devices. Silicon nitride ceramic vacuum chucks are particularly special because they can be used normally in extreme environments. However, silicon nitride ceramics are limited by hardness, and the air holes for ventilation in the middle are small in size, deep, and inclined, which increases the difficulty of processing and makes it difficult to process using traditional machine tools and traditional methods.

[0003] For example, the publication number "CN221632547U" discloses "a semiconductor vacuum suction cup", including a gas collecting hood, the top of which is fixedly connected to an assembly tube, and the top surface of which is fixedly mounted with a suction cup shell by bolts. However, in actual applications, when oblique air holes need to be set on the vacuum suction cup, it will face processing difficulties and inconvenience in cutting. Oblique processing cannot guarantee the processing accuracy, and it is inconvenient for the staff to perform subsequent transposition processing on the vacuum suction cup. Summary of the invention

[0004] In view of the problem that the prior art mentioned in the background technology has the problem of inconvenience in processing oblique air holes, the present invention provides a jig for processing oblique air holes for a vacuum suction cup, which can improve the convenience during the processing, while ensuring that the processing tool can be vertical, thereby improving the accuracy of the cutting tool and ensuring the cutting quality.

[0005] To achieve the above objectives, the present invention adopts the following technical solutions.

[0006] A jig for machining oblique air holes with a vacuum suction cup comprises a support frame, a support bevel is provided on the support frame, a vacuum suction cup is detachably connected to the support bevel, a tool setting block is provided on the support bevel, a horizontal tool setting surface is provided on the tool setting block, a tool setting hole is provided on the support bevel, and the tool setting hole extends along the axis direction of the oblique air hole. In this embodiment, the support frame has a support bevel, and the vacuum suction cup is placed obliquely on the support bevel, so that the machining tool can maintain vertical machining during the machining process, thereby improving the cutting quality and avoiding the machining tool from breaking. At the same time, the tool setting hole is provided on the support bevel to avoid interference, and the horizontal tool setting surface is provided on the tool setting block, so that the machining tool can be calibrated and positioned to ensure the machining accuracy.

[0007] Preferably, the supporting inclined surface is provided with a supporting edge, the shape of which corresponds to the shape of the edge of the vacuum suction cup. The fixing effect of the vacuum suction cup can be improved by providing the supporting edge.

[0008] Preferably, the support edge is provided with an adjustment hole, the adjustment hole is movably connected with an adjustment block, and the adjustment block abuts against the vacuum suction cup. By providing the adjustment block on the support edge, the vacuum suction cup can be fixed more stably by the adjustment block.

[0009] Preferably, a positioning support column is provided on the support slope, and a positioning hole corresponding to the positioning support column is provided on the vacuum suction cup. The positioning support column is engaged with the positioning hole, so that the vacuum suction cup can be pre-positioned initially to avoid position deviation during the vacuum suction cup processing.

[0010] Preferably, the tool setting block is provided with a support edge on one side close to the vacuum suction cup, and the support edge adapts to the edge shape of the vacuum suction cup. The tool setting block is provided with a support edge adapted to the shape of the vacuum suction cup, thereby ensuring uniform fixing effect of the vacuum suction cup and saving installation space.

[0011] Preferably, the support frame includes a fixed outer ring and a central inner ring, a rotating ring is rotatably connected between the fixed outer ring and the central inner ring, the tool setting block is arranged on the fixed outer ring, the tool setting hole is arranged on the central inner ring, the rotating ring is provided with a supporting edge for fixing the vacuum suction cup, the supporting edge is provided with an adjustment hole, the tool setting block is provided with a fixed hole, and the fixed hole and the adjustment hole can be connected with an adjustment block at the same time. By setting the central inner ring, the rotating ring and the fixed outer ring, the vacuum suction cup can be driven to rotate synchronously when only the rotating ring can be rotated, thereby avoiding the steps of disassembling and reassembling the vacuum suction cup, improving the processing efficiency, and avoiding the steps of multiple positioning. The tool setting hole is arranged on the central inner ring, so that the setting position of the tool setting hole can be ensured to remain unchanged. In the second oblique air hole processing process, only the rotating ring needs to be rotated to complete it.

[0012] Preferably, a slide bar is slidably connected to the support frame, the end of the slide bar is movably connected in the fixing hole, the other end of the slide bar is hinged with a telescopic tilting rod, the telescopic tilting rod is hinged to the center inner ring away from one end of the slide bar, the center inner ring is slidably connected to the support frame, when the adjustment block is separated from the fixing hole, the center inner ring falls, and the slide bar rises to the inside of the fixing hole. When the vacuum suction cup needs to rotate, the adjustment piece between the fixing hole and the adjustment hole will be loosened, and the slide bar loses its constraint at this time. Due to the large gravity of the center inner ring, it will fall back downward, and the slide bar is driven to move upward by the telescopic tilting rod. At this time, during the rotation of the vacuum suction cup, the center inner ring loses its contact effect with the vacuum suction cup, avoiding friction loss between the vacuum suction cup and the center inner ring during the rotation process, affecting the molding accuracy, and during the rotation process, the vacuum suction cup and the rotating ring rotate synchronously, so during the rotation process, the vacuum suction cup is not subject to any friction blocking effect, ensuring the smoothness of the rotation.

[0013] A processing method comprises the following steps: S1. Use a table to mark the center of the oblique air hole; S2, fix the vacuum suction cup on the supporting inclined plane; S3, leveling the machining tool through the horizontal tool surface; S4. Align the machining tool to drill the tool hole.

[0014] Preferably, in step S4, the vacuum suction cup is drilled in multiple directions. After the first drilling is completed, the adjustment block between the adjustment hole and the fixing hole is loosened, the ring is rotated until the designated adjustment hole is aligned with the fixing hole, and drilling is performed after the adjustment block is connected.

[0015] Preferably, the adjusting block is completely separated from the fixing hole before the moving table rotates the ring.

[0016] The beneficial effects of the present invention are as follows: (1) It can improve the convenience of the processing process, while ensuring that the processing tool can be vertical, improving the accuracy of the cutting tool, and ensuring the cutting quality; (2) It can improve cutting efficiency, avoid repeated positioning of processing tools, and ensure the positioning accuracy of the vacuum suction cup; (3) During the rotation process, the vacuum suction cup is not affected by any friction blocking effect, which ensures the smoothness of rotation and avoids friction loss to the vacuum suction cup. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of embodiment 1 of the present invention.

[0018] Figure 2 It is a structural diagram of embodiment 2 of the present invention.

[0019] Figure 3 It is a structural diagram of embodiment 3 of the present invention.

[0020] In the figure: 1 support frame, 11 support inclined surface, 12 counter-tool hole, 13 positioning support column, 101 fixed outer ring, 102 rotating ring, 103 center inner ring; 2 vacuum suction cups, 21 positioning holes; 3 tool setting block, 31 horizontal tool setting surface, 32 supporting edge, 33 fixing hole; 4 supporting edges, 41 adjusting holes; 5 sliders; 6 telescopic lever. DETAILED DESCRIPTION

[0021] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0022] Embodiment 1: like Figure 1 As shown, a fixture for machining oblique air holes with a vacuum suction cup includes a support frame 1, a support bevel 11 is provided on the support frame 1, a vacuum suction cup 2 is detachably connected to the support bevel 11, a tool setting block 3 is provided on the support bevel 11, a horizontal tool setting surface 31 is provided on the tool setting block 3, and a tool setting hole 12 is provided on the support bevel 11, and the tool setting hole 12 extends along the axis direction of the oblique air hole. In this embodiment, the support frame 1 has a support bevel 11, and by placing the vacuum suction cup 2 obliquely on the support bevel 11, it is possible to ensure that the machining tool can maintain vertical machining during the machining process, thereby improving the cutting quality and avoiding the machining tool from breaking. At the same time, the tool setting hole 12 is provided on the support bevel 11 to avoid interference, and the horizontal tool setting surface 31 is provided on the tool setting block 3, so that the machining tool can be calibrated and positioned to ensure the accuracy of the machining.

[0023] like Figure 1 As shown, a supporting edge 4 is provided on the supporting inclined surface 11, and the shape of the supporting edge 4 corresponds to the shape of the edge of the vacuum suction cup 2. By providing the supporting edge 4, the fixing effect of the vacuum suction cup 2 can be improved.

[0024] like Figure 1 As shown, an adjustment hole 41 is provided on the support edge 4, and an adjustment block is movably connected to the adjustment hole 41, and the adjustment block abuts against the vacuum suction cup 2. By providing the adjustment block on the support edge 4, the vacuum suction cup 2 can be fixed more stably by the adjustment block.

[0025] like Figure 1 As shown, a positioning support column 13 is provided on the support slope 11, and a positioning hole 21 corresponding to the positioning support column 13 is provided on the vacuum suction cup 2. The positioning support column 13 is engaged with the positioning hole 21, so that the vacuum suction cup 2 can be pre-positioned initially to avoid position deviation during the processing of the vacuum suction cup 2.

[0026] like Figure 1 As shown, a support edge 32 is provided on the side of the tool setting block 3 close to the vacuum suction cup 2, and the support edge 32 adapts to the edge shape of the vacuum suction cup 2. The support edge 32 adapted to the shape of the vacuum suction cup 2 is provided on the tool setting block 3, so that the fixing effect of the vacuum suction cup 2 can be uniform and the installation space can be saved.

[0027] The assembly and working process of the jig for processing the oblique air holes for the vacuum suction cup in this embodiment are as follows: In this embodiment, the support frame 1 is a triangular structure, and a supporting inclined surface 11 is arranged on the support frame 1, wherein the supporting inclined surface 11 is inclined, and a tool setting hole 12 is arranged on the supporting inclined surface 11, wherein the tool setting hole 12 is vertically arranged, and the tool setting hole 12 is arranged in the central area of ​​the supporting inclined surface 11, but is not arranged at the center point of the supporting inclined surface 11; wherein a positioning support column 13 is also arranged on the supporting inclined surface 11, wherein three positioning support columns 13 are arranged, and further, the positioning support columns 13 are arranged in a ring in the circumferential direction, wherein the axis of the positioning support column 13 is aligned with the supporting inclined surface 11. The surface 11 is perpendicular; further, in the present embodiment, a supporting edge 4 is further provided on the supporting inclined surface 11, and the supporting edge 4 is adapted to the edge shape of the vacuum suction cup 2. In the present embodiment, the supporting edge 4 is an annular edge, wherein the supporting edge 4 is provided with a notch, so as to facilitate the picking up of the vacuum suction cup 2 on the supporting inclined surface 11 during the installation process, thereby improving the picking up efficiency and preventing the vacuum suction cup 2 from being stuck inside the supporting edge 4, and an adjusting hole 41 is provided on the supporting edge 4, wherein an adjusting member can be connected in the adjusting hole 41, and in the present embodiment, the adjusting member is an adjusting bolt, wherein the adjusting bolt can abut against the vacuum suction cup 2, thereby fixing the position of the vacuum suction cup 2.

[0028] Furthermore, in the present embodiment, a tool setting block 3 is provided on the supporting inclined surface 11, wherein the tool setting block 3 is provided on the top of the supporting inclined surface 11, and a horizontal tool setting surface 31 is provided on the tool setting block 3, wherein the horizontal tool setting surface 31 can align the position of the processing tool, thereby positioning and calibrating the processing tool, so that in the subsequent processing process, the processing tool can process the vacuum suction cup 2 along the vertical direction, and during the processing process, the processing tool needs to be aligned with the position of the tool setting hole 12 for processing, so that the processing tool can move along the tool setting hole 12 after processing the vacuum suction cup 2, so that the processing tool will not be interfered with during the processing.

[0029] In the present embodiment, the tool setting block 3 is provided with an arc-shaped supporting edge 32 on the side close to the vacuum suction cup 2, and the shape of the supporting edge 32 is adapted to the shape of the vacuum suction cup 2, so that the edge of the vacuum suction cup 2 can fit and fit the supporting edge 32, and an adjustment hole 41 is also provided on the tool setting block 3, and the adjustment hole 41 can also be connected to the adjusting bolt, so as to achieve a fixing effect on the vacuum suction cup 2.

[0030] During use, it is first necessary to mark the tool hole 12 to record the center of the oblique air hole, then place the vacuum suction cup 2 inside the supporting edge 4, and at the same time align the positioning hole 21 on the vacuum suction cup 2 with the positioning support column 13 on the supporting inclined surface 11, and engage the positioning hole 21 on the positioning support column 13, and then connect the adjusting hole 41 through the adjusting bolt, and abut the vacuum suction cup 2, so that the vacuum suction cup 2 is fixed and stabilized, and then the processing tool is calibrated on the tool block 3, and then the processing tool is moved to the top of the tool hole 12, and then the vacuum suction cup 2 is processed and drilled. When the drilling is completed, the processing tool is moved, and the adjusting bolt is loosened. The vacuum suction cup 2 is removed and rotated 120° around the axis, and then the positioning support column 13 is engaged with the positioning hole 21, and then the adjusting bolt is tightened to fix the vacuum suction cup 2, and the second oblique air hole is processed, and then the above steps are repeated, the vacuum suction cup 2 is disassembled and rotated 120°, and the third oblique air hole is processed.

[0031] Embodiment 2: like Figure 2 As shown, different from Example 1, the support frame 1 in this embodiment includes a fixed outer ring 101 and a central inner ring 103, a rotating ring 102 is rotatably connected between the fixed outer ring 101 and the central inner ring 103, the tool setting block 3 is arranged on the fixed outer ring 101, the tool setting hole 12 is arranged on the central inner ring 103, and a positioning component for fixing the vacuum suction cup 2 is arranged on the rotating ring 102, and the positioning component includes a supporting edge 4, an adjusting hole 41 is arranged on the supporting edge 4, and a fixing hole 33 is arranged on the tool setting block 3, and the fixing hole 33 and the adjusting hole 41 can be connected to the adjusting block at the same time. By setting the central inner ring 103, the rotating ring 102 and the fixed outer ring, the vacuum suction cup 2 can be driven to rotate synchronously when only the rotating ring 102 can be rotated, thereby avoiding the steps of disassembling and reassembling the vacuum suction cup 2, improving the processing efficiency, and avoiding the steps of multiple positioning. The tool hole 12 is set on the central inner ring 103, thereby ensuring that the setting position of the tool hole 12 remains unchanged. In the second oblique air hole processing process, it is only necessary to rotate the rotating ring 102 to complete it.

[0032] The assembly and working process of the jig for processing oblique air holes for the vacuum suction cup in this embodiment are as follows: In this embodiment, the support frame 1 is a triangular structure, and a supporting inclined surface 11 is arranged on the support frame 1, wherein the supporting inclined surface 11 is inclined, and a tool setting hole 12 is arranged on the supporting inclined surface 11, wherein the tool setting hole 12 is vertically arranged, and the tool setting hole 12 is arranged in the central area of ​​the supporting inclined surface 11, but is not arranged at the center point of the supporting inclined surface 11, wherein in this embodiment, the tool setting hole 12 is arranged on the central inner ring 103, and the circumferential direction of the central inner ring 103 is fixed; wherein a positioning support column 13 is also arranged on the supporting inclined surface 11, wherein three positioning support columns 13 are arranged, and further, the positioning support columns 13 are arranged in a ring in the circumferential direction, wherein the axis of the positioning support column 13 is perpendicular to the supporting inclined surface 11, and in this embodiment, the positioning support column 13 is arranged in a rotating On the moving ring 102, since the rotating ring 102 can rotate circumferentially, during use, the vacuum suction cup 2 can be directly driven to rotate by rotating the rotating ring 102, thereby improving the processing efficiency of the vacuum suction cup 2; further, in the present embodiment, a supporting edge 4 is also provided on the supporting inclined surface 11, and the supporting edge 4 is adapted to the edge shape of the vacuum suction cup 2. In the present embodiment, the supporting edge 4 is an annular edge, wherein the supporting edge 4 is provided with a notch, which is convenient for picking up the vacuum suction cup 2 on the supporting inclined surface 11 during installation, thereby improving the picking efficiency and preventing the vacuum suction cup 2 from being stuck inside the supporting edge 4, and an adjusting hole 41 is provided on the supporting edge 4, wherein an adjusting member can be connected in the adjusting hole 41, and in the present embodiment, the adjusting member is an adjusting bolt, wherein the adjusting bolt can abut against the vacuum suction cup 2, thereby fixing the position of the vacuum suction cup 2.

[0033] Furthermore, in the present embodiment, a tool setting block 3 is provided on the supporting bevel 11, wherein the tool setting block 3 is provided on a fixed outer ring 101 of the supporting bevel 11, and the fixed outer ring 101 remains in a fixed state during use, so that the tool setting block 3 can maintain the positioning accuracy and stability, and a horizontal tool setting surface 31 is provided on the tool setting block 3, wherein the horizontal tool setting surface 31 can align the position of the machining tool, so that the machining tool can be positioned and calibrated, so that in the subsequent machining process, the machining tool can machine the vacuum suction cup 2 along the vertical direction, and in the machining process, the machining tool needs to be aligned with the position of the tool setting hole 12 for machining, so that the machining tool can move along the tool setting hole 12 after machining the vacuum suction cup 2, so that the machining tool will not be interfered with during the machining process.

[0034] Furthermore, in the present embodiment, a fixing hole 33 is provided on the tool setting block 3. Since the fixing hole 33 is provided on the tool setting block 3 in the present embodiment, the position is kept fixed during the processing. Since the supporting edge 4 is provided on the rotating ring 102, the adjusting hole 41 on the supporting edge 4 can rotate with the rotation of the supporting edge 4, and thus in the process of adjusting the position of the vacuum suction cup 2, different adjusting holes 41 can be rotated relative to the fixing hole 33. Long-rod bolts are connected to the fixing holes 33, so that the fixing holes 33 and the adjusting holes 41 can be connected. Short-rod bolts are provided on the adjusting holes 41 that are not connected to the fixing holes 33, and the adjusting holes 41 are provided with countersunk structures, so that it can be ensured that the short-rod bolts will not protrude relative to the adjusting holes 41, so that in the process of rotating the rotating ring 102, the short-rod bolts connected to the adjusting holes 41 can be prevented from interfering with the tool setting block 3, and there is no need to remove the short-rod bolts, thereby ensuring the stable fixation of the vacuum suction cup 2 in the process of grasping and rotating the rotating ring 102.

[0035] The use of this embodiment is different from that of Embodiment 1. In this embodiment, after the vacuum suction cup 2 is fixed on the supporting inclined surface 11 and the first oblique air hole is processed by the tool, the long rod bolts connecting the fixing hole 33 and its adjusting hole 41 are loosened, and then the outer ring is rotated to a suitable position, and the fixing hole 33 and the corresponding adjusting hole 41 at the position are connected with the long rod bolts. Since the fixing hole 33 is arranged on the fixed outer ring 101, the rotating ring 102 is locked relative to the fixed outer ring 101 by the long rod bolts, ensuring that the circumferential position of the vacuum suction cup 2 is fixed. Then, processing is carried out. After all the oblique air holes are processed in sequence, each short rod bolt and long rod bolt are removed, and the processed vacuum suction cup 2 is removed.

[0036] Embodiment 3: like Figure 3As shown, what is different from Example 1 is that in this embodiment, a slide rod 5 is slidably connected to the support frame 1, and the end of the slide rod 5 is movably connected in the fixing hole 33. The other end of the slide rod 5 is hinged with a telescopic tilt rod 6. The telescopic tilt rod 6 is hinged to the center inner ring 103 at one end away from the slide rod 5. The center inner ring 103 is slidably connected to the support frame 1. When the adjustment block is separated from the fixing hole 33, the center inner ring 103 falls, and the slide rod 5 rises to the inside of the fixing hole 33. When the vacuum suction cup 2 needs to rotate, the adjustment piece between the fixing hole 33 and the adjustment hole 41 will be loosened. At this time, the slide bar 5 loses its constraint and will fall back due to the greater gravity of the center inner ring 103. The slide bar 5 is driven upward by the telescopic tilt rod 6. At this time, during the rotation of the vacuum suction cup 2, the center inner ring 103 loses its contact with the vacuum suction cup 2, thereby preventing the vacuum suction cup 2 from having friction loss with the center inner ring 103 during the rotation, thereby affecting the molding accuracy. During the rotation, the vacuum suction cup 2 and the rotating ring 102 rotate synchronously. Therefore, during the rotation, the vacuum suction cup 2 is not affected by any friction blocking effect, thereby ensuring the smoothness of the rotation.

[0037] The assembly and working process of the jig for processing oblique air holes for the vacuum suction cup in this embodiment are as follows: In this embodiment, the support frame 1 is a triangular structure, and a supporting inclined surface 11 is arranged on the support frame 1, wherein the supporting inclined surface 11 is inclined, and a tool setting hole 12 is arranged on the supporting inclined surface 11, wherein the tool setting hole 12 is vertically arranged, and the tool setting hole 12 is arranged in the central area of ​​the supporting inclined surface 11, but is not arranged at the center point of the supporting inclined surface 11, wherein in this embodiment, the tool setting hole 12 is arranged on the central inner ring 103, and the circumferential direction of the central inner ring 103 is fixed; wherein a positioning support column 13 is also arranged on the supporting inclined surface 11, wherein three positioning support columns 13 are arranged, and further, the positioning support columns 13 are arranged in a ring in the circumferential direction, wherein the axis of the positioning support column 13 is perpendicular to the supporting inclined surface 11, and in this embodiment, the positioning support column 13 is arranged in a rotating On the moving ring 102, since the rotating ring 102 can rotate circumferentially, during use, the vacuum suction cup 2 can be directly driven to rotate by rotating the rotating ring 102, thereby improving the processing efficiency of the vacuum suction cup 2; further, in the present embodiment, a supporting edge 4 is also provided on the supporting inclined surface 11, and the supporting edge 4 is adapted to the edge shape of the vacuum suction cup 2. In the present embodiment, the supporting edge 4 is an annular edge, wherein the supporting edge 4 is provided with a notch, which is convenient for picking up the vacuum suction cup 2 on the supporting inclined surface 11 during installation, thereby improving the picking efficiency and preventing the vacuum suction cup 2 from being stuck inside the supporting edge 4, and an adjusting hole 41 is provided on the supporting edge 4, wherein an adjusting member can be connected in the adjusting hole 41, and in the present embodiment, the adjusting member is an adjusting bolt, wherein the adjusting bolt can abut against the vacuum suction cup 2, thereby fixing the position of the vacuum suction cup 2.

[0038] Furthermore, in the present embodiment, a tool setting block 3 is provided on the supporting bevel 11, wherein the tool setting block 3 is provided on a fixed outer ring 101 of the supporting bevel 11, and the fixed outer ring 101 remains in a fixed state during use, so that the tool setting block 3 can maintain the positioning accuracy and stability, and a horizontal tool setting surface 31 is provided on the tool setting block 3, wherein the horizontal tool setting surface 31 can align the position of the machining tool, so that the machining tool can be positioned and calibrated, so that in the subsequent machining process, the machining tool can machine the vacuum suction cup 2 along the vertical direction, and in the machining process, the machining tool needs to be aligned with the position of the tool setting hole 12 for machining, so that the machining tool can move along the tool setting hole 12 after machining the vacuum suction cup 2, so that the machining tool will not be interfered with during the machining process.

[0039] Furthermore, in the present embodiment, a fixing hole 33 is provided on the tool setting block 3. Since the fixing hole 33 is provided on the tool setting block 3 in the present embodiment, the position is kept fixed during the processing. Since the supporting edge 4 is provided on the rotating ring 102, the adjusting hole 41 on the supporting edge 4 can rotate with the rotation of the supporting edge 4, and thus in the process of adjusting the position of the vacuum suction cup 2, different adjusting holes 41 can be rotated relative to the fixing hole 33. Long-rod bolts are connected to the fixing holes 33, so that the fixing holes 33 and the adjusting holes 41 can be connected. Short-rod bolts are provided on the adjusting holes 41 that are not connected to the fixing holes 33, and the adjusting holes 41 are provided with countersunk structures, so that it can be ensured that the short-rod bolts will not protrude relative to the adjusting holes 41, so that in the process of rotating the rotating ring 102, the short-rod bolts connected to the adjusting holes 41 can be prevented from interfering with the tool setting block 3, and there is no need to remove the short-rod bolts, thereby ensuring the stable fixation of the vacuum suction cup 2 in the process of grasping and rotating the rotating ring 102.

[0040] Furthermore, in the present embodiment, a notch is provided on the fixing hole 33, and the notch can pass through the sliding rod 5. The sliding rod 5 is slidably connected to the support frame 1 and can slide up and down relative to the fixing hole 33. Since an adjusting piece needs to be connected to the inside of the fixing hole 33, when the adjusting piece is connected to the inside of the fixing hole 33, an extrusion effect is generated on the end of the sliding rod 5. Since the entire supporting inclined surface 11 is obliquely arranged, when the adjusting piece is installed, an oblique extrusion force can be generated on the sliding rod 5, thereby driving the sliding rod 5 to move downward. Further, in the present embodiment, a telescopic tilting rod 6 is also connected to the other end of the sliding rod 5 away from the fixing hole 33, wherein the other end of the telescopic tilting rod 6 is hinged to the center inner ring 103, and the center inner ring 103 is slidably connected to the support frame 1. When the sliding rod 5 moves downward, the telescopic tilting rod 6 drives the center inner ring 103 to move downward. The inner ring 103 moves upward and maintains a flush state with the rotating ring 102, thereby providing a stable support effect for the vacuum suction cup 2. When the vacuum suction cup 2 needs to rotate, the adjustment piece between the fixing hole 33 and the adjustment hole 41 will be loosened. At this time, the slide bar 5 loses its constraint. Due to the large gravity of the center inner ring 103, it will fall back downward, and the slide bar 5 will be driven upward by the telescopic tilt rod 6. At this time, during the rotation of the vacuum suction cup 2, the center inner ring 103 loses the contact effect with the vacuum suction cup 2, avoiding friction loss between the vacuum suction cup 2 and the center inner ring 103 during the rotation process, affecting the molding accuracy. During the rotation process, the vacuum suction cup 2 and the rotating ring 102 rotate synchronously. Therefore, during the rotation process, the vacuum suction cup 2 is not affected by any friction blocking effect, thereby ensuring the smoothness of the rotation.

[0041] In this embodiment, since the central inner ring 103 is slidably connected to the support frame 1 , the rotating ring 102 is rotatably connected to the fixed outer ring, thereby avoiding interference between the rotating ring 102 and the central inner ring 103 .

[0042] The use of this embodiment is different from that of Embodiment 1. In this embodiment, after the vacuum suction cup 2 is fixed on the supporting inclined surface 11 and the first oblique air hole is processed by the tool, the long rod bolts connecting the fixing hole 33 and its adjusting hole 41 are loosened, and then the outer ring is rotated to a suitable position, and the fixing hole 33 and the corresponding adjusting hole 41 at the position are connected with the long rod bolts. Since the fixing hole 33 is arranged on the fixed outer ring 101, the rotating ring 102 is locked relative to the fixed outer ring 101 by the long rod bolts, ensuring that the circumferential position of the vacuum suction cup 2 is fixed. Then, processing is carried out. After all the oblique air holes are processed in sequence, each short rod bolt and long rod bolt are removed, and the processed vacuum suction cup 2 is removed.

Claims

1. A jig for machining oblique air holes for a vacuum suction cup, characterized in that: The invention comprises a support frame (1), the support frame (1) is provided with a support inclined surface (11), a vacuum suction cup (2) is detachably connected to the support inclined surface (11), a tool setting block (3) is provided on the support inclined surface (11), a horizontal tool setting surface (31) is provided on the tool setting block (3), and a tool setting hole (12) is provided on the support inclined surface (11), and the tool setting hole (12) extends along the oblique air hole axis direction.

2. According to the jig for machining oblique air holes for a vacuum chuck as described in claim 1, it is characterized in that: The supporting inclined surface (11) is provided with a supporting edge (4), and the shape of the supporting edge (4) corresponds to the shape of the edge of the vacuum suction cup (2).

3. A jig for machining oblique air holes for a vacuum chuck according to claim 2, characterized in that: An adjustment hole (41) is provided on the supporting edge (4), an adjustment block is movably connected to the adjustment hole (41), and the adjustment block abuts against the vacuum suction cup (2).

4. According to the jig for machining oblique air holes for a vacuum chuck as described in claim 1, it is characterized in that: A positioning support column (13) is provided on the supporting inclined surface (11), and a positioning hole (21) corresponding to and connected to the positioning support column (13) is provided on the vacuum suction cup (2).

5. The jig for machining oblique air holes for a vacuum chuck according to claim 1, characterized in that: A supporting edge (32) is provided on the side of the tool setting block (3) close to the vacuum suction cup (2), and the supporting edge (32) adapts to the edge shape of the vacuum suction cup (2).

6. A jig for machining oblique air holes for a vacuum chuck according to any one of claims 1 to 5, characterized in that: The support frame (1) comprises a fixed outer ring (101) and a central inner ring (103); a rotating ring (102) is rotatably connected between the fixed outer ring (101) and the central inner ring (103); the tool setting block (3) is arranged on the fixed outer ring (101); the tool setting hole (12) is arranged on the central inner ring (103); a supporting edge (4) for fixing a vacuum suction cup (2) is arranged on the rotating ring (102); an adjusting hole (41) is arranged on the supporting edge (4); a fixing hole (33) is arranged on the tool setting block (3); and the fixing hole (33) and the adjusting hole (41) can be connected to an adjusting block at the same time.

7. A jig for machining oblique air holes for a vacuum chuck according to claim 6, characterized in that: A slide bar (5) is slidably connected to the support frame (1), and the end of the slide bar (5) is movably connected to the fixing hole (33). The other end of the slide bar (5) is hinged with a telescopic tilting rod (6). The telescopic tilting rod (6) is hinged to a center inner ring (103) at one end away from the slide bar (5). The center inner ring (103) is slidably connected to the support frame (1). When the adjustment block is separated from the fixing hole (33), the center inner ring (103) falls, and the slide bar (5) rises to the inside of the fixing hole (33).

8. A processing method, using a jig for processing oblique air holes for a vacuum chuck as claimed in any one of claims 1 to 7, characterized in that: The following steps are included: S1. Use a table to mark the center of the oblique air hole (12). S2, fixing the vacuum suction cup (2) on the supporting inclined surface (11); S3, leveling the machining tool through the horizontal tool setting surface (31); S4, the machining tool is aligned with the tool hole (12) to perform drilling.

9. A processing method according to claim 8, characterized in that: In step S4, the vacuum suction cup (2) is drilled in multiple directions. After the first drilling is completed, the adjustment block between the adjustment hole (41) and the fixing hole (33) is loosened, and the ring (102) is rotated until the designated adjustment hole (41) is aligned with the fixing hole (33), and the drilling is performed after the adjustment block is connected.

10. A processing method according to claim 9, characterized in that: After the adjusting block is completely separated from the fixing hole (33), the moving platform rotates the ring (102).

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