Constant-temperature type ultra-clean bubbler and control method thereof

Abstract

The invention relates to a constant-temperature type ultra-clean bubbler and a control method thereof, and relates to the technical field of mixing equipment, the bubbler comprises a bubbling tank, the open end of the bubbling tank is connected with a sealing cover, the sealing cover is provided with a liquid inlet pipe, an air inlet pipe and a discharging pipe, the liquid inlet pipe and the air inlet pipe both extend into the bubbling tank, and the discharging pipe is connected with the bubbling tank. The liquid inlet pipe, the air inlet pipe and the discharging pipe are all communicated with the bubbling tank; one end of the air inlet pipe is communicated with a bubble generator; a heat preservation mechanism is arranged on the outer side of the bubbling tank and comprises a heat preservation tank, the bubbling tank is sleeved with the heat preservation tank, and a sealing cover is arranged at the opening end of the heat preservation tank and seals the opening end of the heat preservation tank; a heat preservation interlayer is formed between the inner wall of the heat preservation tank and the outer wall of the bubbling tank, and a first pipe and a second pipe are arranged on the sealing cover and both communicated with the heat preservation interlayer. The heat preservation mechanism is arranged on the outer side of the bubbling tank and is difficult to damage, the heat preservation effect of the heat preservation interlayer on the raw material liquid can be guaranteed, and then the efficiency of taking away the raw material liquid by gas is improved.

Description

Technical Field

[0001] The present application relates to the technical field of mixing equipment, and in particular to a constant temperature ultra-clean bubbler and a control method thereof. Background Art

[0002] The bubbling method is a method of passing process gas or inert gas as carrier gas into the liquid source to form bubbles containing liquid source vapor and output them to the process machine. The output of the liquid source is affected by the flow rate and carrying efficiency of the carrier gas.

[0003] A bubbler is a stirrer that achieves the function of stirring and mixing liquid through gas. The principle is: liquid is added into the bubbler, and then an inert gas is introduced. A large number of bubbles are generated in the liquid in the bubbler, so that the liquid in the bubbler is mixed and stirred.

[0004] Due to the principle of the bubbler, the bubbler can also meet the requirements of the bubbling method. The raw material liquid is loaded into the bubbler, and then the corresponding gas is introduced into the bubbler so that the gas forms bubbles in the raw material liquid. The bubbles can fully stir and mix the raw material liquid to form saturated bubbles carrying the raw material liquid. The saturated bubbles carrying the raw material liquid are output from the bubbler and can be used for subsequent production and processing of other equipment.

[0005] With respect to the above-mentioned related technologies, in order to increase the amount of raw material liquid carried by gas, a heating tube is often installed inside the bubbler to keep the temperature of the raw material liquid within a constant range.

[0006] However, some raw liquids are corrosive, which will cause the heating tube to corrode after long-term use, reducing the effectiveness of the heating tube or causing it to fail completely. In addition, since the heating tube is arranged inside the bubbler, it is difficult to replace or repair it, which will reduce the amount of raw liquid carried by the gas, thereby reducing the output efficiency of the raw liquid. Summary of the invention

[0007] The present application provides a constant temperature ultra-clean bubbler and a control method thereof, the purpose of which is to improve the stirring effect of bubbles on raw liquid, increase the carrying capacity of saturated bubbles on raw liquid, and thus improve the output efficiency of raw liquid.

[0008] In a first aspect, the present application provides a constant temperature ultra-clean bubbler adopts the following technical solution: a constant temperature ultra-clean bubbler, comprising a bubbler, an open end of the bubbler is connected to a closing cover, a liquid inlet pipe, an air inlet pipe and a discharge pipe are arranged on the closing cover, the liquid inlet pipe and the air inlet pipe are both extended into the bubbler, the liquid inlet pipe, the air inlet pipe and the discharge pipe are all connected to the bubbler, and one end of the air inlet pipe located in the bubbler is connected to a bubble generator; A heat preservation mechanism is arranged outside the bubbling tank, the heat preservation mechanism comprises a heat preservation tank, the heat preservation tank is sleeved outside the bubbling tank, the closing cover is arranged at the open end of the heat preservation tank, and the closing cover closes the open end of the heat preservation tank; A heat-insulating interlayer is formed between the inner wall of the heat-insulating tank and the outer wall of the bubbling tank, and a first tube and a second tube are arranged on the closing cover, and both the first tube and the second tube are connected to the heat-insulating interlayer.

[0009] By adopting the above technical solution, first, the bubbling tank, the closing cover, the liquid inlet pipe, the air inlet pipe, the bubble generator and the discharge pipe are arranged in coordination, and the raw liquid is injected into the bubbling tank through the liquid inlet pipe. After that, gas is blown into the bubbling tank through the air inlet pipe. The gas generates a large number of bubbles under the action of the bubble generator, and the bubbles are evenly distributed in the raw liquid. During the movement of the bubbles, the bubbles can be fully stirred and mixed with the raw liquid, and finally the gas is discharged from the bubbling tank from the discharge pipe. Therefore, the coordination of the above structure can realize the function of the bubbler.

[0010] Secondly, a heat preservation mechanism is arranged on the outer side of the bubbling tank, and the heat preservation mechanism includes a heat preservation tank, and a heat preservation interlayer is formed between the heat preservation tank and the bubbling tank, and the first tube and the second tube arranged on the closing cover are both connected with the heat preservation interlayer, so that the temperature regulating liquid can be injected into the heat preservation interlayer through the first tube, and the temperature regulating liquid in the heat preservation interlayer can be extracted through the second tube. Through the flow of the temperature regulating liquid in the heat preservation interlayer, the temperature of the raw material liquid in the bubbling tank can be maintained within a constant range.

[0011] Since the insulation mechanism is arranged on the outside of the bubbling tank, it is difficult to be damaged. Even if it is damaged, it is easy to replace or maintain. Even if it is used for a long time, the insulation effect of the insulation interlayer on the raw liquid can be guaranteed, thereby improving the stirring effect of the bubbles on the raw liquid and increasing the carrying capacity of the saturated bubbles on the raw liquid, thereby increasing the output efficiency of the raw liquid.

[0012] Optionally, a plurality of spacer rings are arranged between the outer wall of the insulation tank and the bubbling tank, and the plurality of spacer rings are arranged in sequence and spaced apart along the axial direction of the insulation tank, and the spacer rings are sleeved on the outer wall of the bubbling tank, the outer wall of the spacer rings is connected to the inner wall of the insulation tank, and the inner wall of the spacer rings is connected to the outer wall of the bubbling tank, and a flow outlet is opened through the spacer rings.

[0013] By adopting the above technical solution, the spacer ring is arranged between the heat preservation tank and the bubbling tank, so the heat preservation tank and the bubbling tank can be connected through a plurality of spacer rings. The opening of the flow outlet on the spacer ring can ensure the flow of the temperature regulating liquid in the heat preservation interlayer.

[0014] Optionally, a partition is provided between the heat preservation tank and the bubbling tank, the length direction of the partition is arranged along the axial direction of the heat preservation tank, the partition is sequentially connected to all the partition rings along its own length direction, and both sides of the partition in the width direction are respectively connected to the inner wall of the heat preservation tank and the outer wall of the bubbling tank; The outflow ports on two adjacent partition rings are located on both sides of the partition plate in the thickness direction; One end of the second tube extends to a side of the partition ring farthest from the closing cover and away from the closing cover.

[0015] By adopting the above technical solution, through the setting of the partition, and locating the two adjacent outlets on both sides of the thickness direction of the partition, a number of partitions and the outlets form a spiral liquid flow space, and then the temperature regulating liquid injected into the first tube must pass through the entire spiral flow space before being extracted by the second tube, so the flow speed of the temperature regulating liquid can be reduced, and the temperature uniformity of the raw material liquid in the bubbling tank can be improved, thereby improving the insulation effect of the insulation tank.

[0016] Optionally, the bubble generator includes a bubble disk, one axial side of the bubble disk is connected to the air inlet pipe, the other side of the bubble disk is provided with a plurality of bubble holes, a storage air cavity is provided in the bubble disk, and the storage air cavity is connected to the air inlet pipe and the plurality of bubble holes; A plurality of rotating plates are arranged on the side wall of the bubble disk, and the plurality of rotating plates are arranged at intervals along the circumference of the bubble disk. An air inlet cavity is opened in the rotating plate, and the air inlet cavity is connected to the storage air cavity. A plurality of auxiliary air holes are opened on the rotating plate, and the auxiliary air holes are connected to the storage air cavity.

[0017] By adopting the above technical solution, firstly, the opening of the storage air cavity and the opening of the bubble holes in the bubble generator allows the gas discharged from the air inlet pipe to enter the raw material liquid through a number of bubble holes, thereby achieving uniform generation of bubbles.

[0018] Secondly, an air inlet cavity and auxiliary air holes are provided in the rotating plate, so that the gas discharged from the air inlet pipe will enter the air inlet cavity through the storage air cavity, and then be discharged into the raw material liquid from the auxiliary air holes, thereby achieving uniform generation of bubbles.

[0019] Due to the setting of the rotating plate, the area that the bubble generator can cover in the raw liquid can be increased, thereby increasing the distribution area of ​​the bubbles ejected by the bubble generator in the raw liquid, so that more raw liquid can come into contact with the gas and can be better stirred and mixed, thereby improving the efficiency of the bubbles in carrying the raw liquid away.

[0020] Optionally, a rotating seat is provided between the rotating plate and the bubble disk, the rotating seat is connected to the bubble disk, a rotating shaft is provided on the side of the rotating plate facing the bubble disk, one end of the rotating shaft is plug-fitted with the rotating seat, and the rotating shaft is rotatably connected to the rotating seat; An air outlet cavity is provided in the rotating seat, an air outlet hole is provided on a side of the rotating seat facing the rotating shaft, the air outlet hole is communicated with the air outlet cavity, and the air outlet cavity is communicated with the storage air cavity; An air inlet hole is formed at one end of the rotating shaft facing the rotating seat, the air inlet hole is communicated with the air inlet cavity, and the air inlet hole is communicated with the air outlet hole; A rotation locking assembly for fixing the rotation angle of the rotation plate is arranged between the rotation seat and the rotation plate.

[0021] By adopting the above technical solution, firstly, the rotating plate can be rotated through the matching arrangement of the rotating seat and the rotating shaft.

[0022] Secondly, an air outlet cavity is provided in the rotating seat, and an air outlet hole is provided on the rotating seat; an air inlet hole is provided on the rotating shaft, and the air inlet hole is connected to the air inlet cavity. Therefore, when the rotating shaft is connected to the rotating seat, the air storage cavity, the air outlet cavity, the air outlet hole, the air inlet hole and the air inlet cavity are connected in sequence, so that the rotating plate and the bubble disk can be connected to each other during the rotation process.

[0023] The setting of the rotation locking assembly can lock the rotating seat and the bubble disk after the rotating seat is rotated.

[0024] The above-mentioned setting of the rotation connection between the rotating plate and the bubble disk has the following two functions: First, it can be installed in bubbling tanks with different inner diameters, and improve the stirring effect of the raw material liquid in the bubbling tank and the delivery efficiency of the raw material liquid.

[0025] When the rotating plate is perpendicular to the bubble disk, the diameter of the bubble generator is the smallest and can be installed in a bubbling tank with a smaller inner diameter; when the rotating plate is flush with the bubble disk, the diameter of the bubble generator is the largest and can be installed in a bubbling tank with a larger inner diameter, and the bubble generator can cover a larger area; and when the inner diameter of the bubbling tank is moderate, the inclination angle of the rotating plate can be adjusted so that the rotating plate does not conflict with the inner wall of the bubbling tank and does not affect the air inlet pipe and the liquid inlet pipe, so that the bubble generator can cover as large an area as possible in the bubbling tank.

[0026] Secondly, it can adapt to the shapes of the bottoms of different bubbling tanks and improve the stirring effect of the raw material liquid in the bubbling tank and the delivery efficiency of the raw material liquid.

[0027] The rotating plate can rotate to fit the bottom shape of the bubbling tank as closely as possible, so that the bubbles ejected by the bubble generator can impact all positions of the bottom of the bubbling tank as much as possible, thereby allowing the raw material liquid to be fully stirred and evenly mixed, thereby increasing the efficiency of gas delivery to the raw material liquid.

[0028] Optionally, an intermediate shaft is provided on one side of the rotating seat facing the rotating shaft, and the air outlet is provided at one end of the intermediate shaft facing the rotating shaft; The intermediate shaft is plug-fitted with the air inlet hole along its axial direction, and the intermediate shaft is rotationally connected to the inner wall of the air inlet hole.

[0029] By adopting the above technical solution, the intermediate shaft is arranged on the rotating seat, and the intermediate shaft is plugged into the air inlet, so that the rotating connection between the rotating seat and the rotating shaft can be achieved, and the communication between the air outlet and the air inlet can be achieved at the same time.

[0030] Optionally, the rotation locking assembly includes a locking disk, the locking disk is rotatably connected to the rotating seat, and the locking disk is connected to the rotating plate; An auxiliary hole is formed through the locking plate, and a threaded hole is formed on the rotating seat. The auxiliary hole is coaxially connected to the threaded hole, and a locking bolt is inserted into the auxiliary hole. The locking bolt is coaxially arranged with the rotating shaft, and the locking bolt is plugged into the threaded hole. The locking bolt is rotatably connected to the inner wall of the auxiliary hole, and the locking bolt is threadedly connected to the inner wall of the threaded hole, and the nut of the locking bolt abuts against the locking plate along its own axial direction.

[0031] By adopting the above technical solution, the locking disk is rotatably connected to the rotating seat, and the locking disk is connected to the rotating plate, so when the rotating plate rotates, the rotating plate can drive the locking disk to move synchronously.

[0032] An auxiliary hole is provided on the locking plate, a threaded hole is provided on the rotating seat, a locking bolt is coaxially inserted into the auxiliary hole and the threaded hole, and since the locking bolt is coaxially arranged with the rotating shaft, when the rotating plate drives the locking plate to move, the locking plate can rotate synchronously with the rotating shaft.

[0033] Therefore, when the locking bolt is loosened, the locking plate can rotate, and the rotating plate can adjust its position at this time; and when the locking bolt is tightened, the nut of the locking bolt presses against the locking plate, increasing the friction between the locking plate and the rotating seat, making the locking plate unable to rotate, and the rotating angle of the rotating plate can be locked at this time.

[0034] Optionally, a clearance groove is provided in the rotating seat, the locking plate is inserted into the clearance groove, and the locking plate is rotatably connected to the inner wall of the clearance groove; A locking hole is provided on one side of the rotating seat away from the rotating shaft. The locking hole is coaxially arranged with the auxiliary hole, and the locking bolt is inserted into the locking hole.

[0035] By adopting the above technical solution, the opening of the clearance groove is used to provide installation space for the locking disk, and the locking disk is installed in the clearance groove, which can reduce the contact area between the locking disk and the raw material liquid, thereby increasing the service life of the locking disk.

[0036] The locking hole is provided to provide a space for the locking bolt to ensure that the nut of the locking bolt can contact the locking plate.

[0037] Optionally, a sealing block is inserted into the locking hole, and the sealing block closes the locking hole.

[0038] By adopting the above technical solution, the sealing block is used to seal the locking hole, reducing the contact area between the locking bolt and the raw material liquid, thereby increasing the service life of the locking bolt.

[0039] In the second aspect, the control method of a constant temperature ultra-clean bubbler provided in the present application adopts the following technical solution: A method for controlling a constant temperature ultra-clean bubbler, comprising the following steps: S1: Injecting raw material liquid: injecting raw material liquid into the bubbling tank; S2: injecting temperature-adjusting liquid: injecting temperature-adjusting liquid into the thermal insulation interlayer; S3: Adding gas: injecting gas into the raw material liquid through the air inlet pipe; S4: Collect gas: discharge the gas through the discharge pipe.

[0040] By adopting the above technical solution, the raw material liquid is pre-temperature-controlled so that the temperature of the raw material liquid can be stably maintained within the required temperature range, thereby enabling the gas to have a better stirring effect on the raw material liquid and increasing the amount of raw material liquid carried by the gas, thereby improving the efficiency of the gas in carrying the raw material liquid away.

[0041] In summary, the present application includes at least one of the following beneficial technical effects: 1. Since the heat preservation mechanism is arranged on the outside of the bubbling tank, it is difficult to be damaged. Even if it is damaged, it is easy to replace or maintain. Even if it is used for a long time, the heat preservation effect of the heat preservation interlayer on the raw material liquid can be guaranteed, thereby improving the stirring effect of the bubbles on the raw material liquid, increasing the carrying capacity of the saturated bubbles on the raw material liquid, and then improving the efficiency of the gas taking the raw material liquid away.

[0042] 2. Due to the setting of the rotating plate, the coverage area of ​​the bubble generator can be increased, thereby increasing the distribution area of ​​the bubbles ejected by the bubble generator in the raw liquid, so that more raw liquid can contact with the gas and can be better stirred and mixed, thereby improving the efficiency of the bubbles in taking away the raw liquid.

[0043] 3. Due to the setting of the rotating connection between the rotating plate and the bubble disk and the setting of the rotating locking assembly, the bubble generator can be applicable to bubbling tanks with different inner diameters and different tank bottom shapes of the bubbling tank, thereby increasing the coverage area of ​​the bubble generator in the bubbling tank, improving the stirring effect of the raw material liquid in the bubbling tank and the delivery efficiency of the raw material liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 It is a schematic diagram of the overall structure of the bubbler of Example 1 of the present application.

[0045] Figure 2 It is a schematic diagram of the cross-sectional structure of the bubbler of Example 1 of the present application.

[0046] Figure 3 It is a schematic diagram of the internal structure of the insulation tank of Example 1 of the present application.

[0047] Figure 4 It is a schematic diagram of the overall structure of the bubble generator of Example 2 of the present application.

[0048] Figure 5 It is a schematic diagram of the cross-sectional structure of the bubble generator of Example 2 of the present application.

[0049] Figure 6 It is a schematic diagram of the exploded structure of the connection position between the rotating plate and the bubble disk in Example 2 of the present application.

[0050] Figure 7 yes Figure 5 Schematic diagram of the local enlarged structure of part A.

[0051] In the figure, 1, bubbling tank; 2, closing cover; 3, liquid inlet pipe; 4, air inlet pipe; 5. Bubble generator; 51. Bubble disk; 511. Bubble hole; 512. Air storage cavity; 52. Extension assembly; 521. Rotating plate; 5211. Air inlet cavity; 5212. Auxiliary air hole; 522. Rotating shaft; 5221. Air inlet hole; 523. Rotating seat; 5231. Air outlet cavity; 524. Intermediate shaft; 5241. Air outlet hole; 53. Rotation locking assembly; 531. Half ring; 5311. First clamping block; 5312. Clamping slot; 532. Give way slot; 533. Clamping disk; 5331. Second clamping block; 534. Locking hole; 535. Auxiliary hole; 536. Threaded hole; 537. Locking bolt; 538. Sealing block; 6. Discharge pipe; 7. Liquid level meter; 8. Temperature probe; 9. Insulation mechanism; 91. Insulation tank; 92. Insulation interlayer; 93. First tube; 94. Second tube; 95. Spacer ring; 96. Partition plate; 97. Outlet. DETAILED DESCRIPTION

[0052] The following is combined with Figure 1 -Attached Figure 7 , further details of this application are given.

[0053] Example 1: A constant temperature ultra-clean bubbler, referring to Figure 1 and Figure 2 , including a bubbling tank 1, the axial direction of the bubbling tank 1 is arranged along the vertical direction, the opening end of the bubbling tank 1 is located at the upper end of the bubbling tank 1, a closing cover 2 is arranged at the upper end of the bubbling tank 1, the closing cover 2 is welded to the bubbling tank 1, and the closing cover 2 closes the opening end of the bubbling tank 1.

[0054] Reference Figure 1 and Figure 2 The closing cover 2 is provided with a liquid inlet pipe 3, which is fixedly connected to the closing cover 2, and the lower end of the liquid inlet pipe 3 extends to contact the bottom wall of the bubbling tank 1. The closing cover 2 is also provided with an air inlet pipe 4, which is fixedly connected to the closing cover 2, and the lower end of the air inlet pipe 4 extends to the upper side of the lower end opening of the liquid inlet pipe 3, and the lower side of the air inlet pipe 4 is connected to a bubble generator 5. The closing cover 2 is also provided with a discharge pipe 6, which is arranged in the vertical direction, and the lower end of the discharge pipe 6 is connected to the closing cover 2, and the discharge pipe 6 is communicated with the bubbling tank 1.

[0055] The raw liquid can be injected into the bubbling tank 1 through the liquid inlet pipe 3, and then the corresponding gas can be blown into the bubbling tank 1 through the air inlet pipe 4. The blown gas can form tiny bubbles in the raw liquid through the bubble generator 5, and the bubbles can be evenly distributed in the raw liquid, so that during the movement of the bubbles, the bubbles can be fully stirred and mixed with the raw liquid, and finally the bubbles are discharged from the bubbling tank 1 through the discharge pipe 6.

[0056] Therefore, the bubbling tank 1 has two functions. First, the raw material liquid can be stirred by the stirring effect of the gas. At this time, the bubbler can be used to stir and mix the raw material liquid, and the discharge pipe 6 is used to discharge the stirred gas to prevent the internal pressure of the bubbling tank 1 from increasing. Second, the raw material liquid is fully stirred by bubbles to form saturated bubbles carrying the raw material liquid, and the saturated bubbles carrying the raw material liquid will be discharged from the bubbling tank 1 from the discharge pipe 6. At this time, the bubbler can feed the steam of the raw material liquid to other equipment.

[0057] In addition, during the production and processing of the bubbling tank 1 of the present application, the inner wall of the bubbling tank 1 is first mechanically polished, then electroplated and polished, and finally cleaned with pure water until the ion concentration is lower than the set value, so that the inner wall of the bubbling tank 1 can be in an ultra-clean state.

[0058] Reference Figure 1 and Figure 2 The closing cover 2 is also provided with a liquid level gauge 7, which is arranged in the vertical direction, the upper end of the liquid level gauge 7 is connected to the closing cover 2, and the lower end of the liquid level gauge 7 extends to the bottom of the tank close to the bubbling tank 1. The liquid level height of the raw material liquid in the bubbling tank 1 can be detected by the liquid level gauge 7.

[0059] Reference Figure 1 and Figure 2 The sealing cover 2 is also provided with a temperature probe 8, the upper end of the temperature probe 8 is connected to the sealing cover 2, and the lower end of the temperature probe 8 extends to the bottom of the tank close to the bubbling tank 1. The temperature probe 8 can detect the temperature of the raw material liquid in the bubbling tank 1.

[0060] Reference Figure 2 and Figure 3 A heat preservation mechanism 9 is arranged on the outside of the bubbling tank 1, and the heat preservation mechanism 9 includes a heat preservation tank 91, which is sleeved on the outside of the bubbling tank 1, and the axial direction of the heat preservation tank 91 is arranged along the vertical direction. The open end of the heat preservation tank 91 is located at the upper end of the heat preservation tank 91, and the closing cover 2 closes the open end of the heat preservation tank 91, and the closing cover 2 is welded to the heat preservation tank 91.

[0061] Reference Figure 2 and Figure 3 The inner wall of the heat preservation tank 91 and the outer wall of the bubbling tank 1 are spaced apart, and a heat preservation interlayer 92 is formed between the inner wall of the heat preservation tank 91 and the outer wall of the bubbling tank 1. The closing cover 2 is provided with a first tube 93 and a second tube 94, both of which are arranged in the vertical direction, and both of which are connected to the heat preservation interlayer 92. The heat preservation interlayer 92 can be injected with a temperature regulating liquid through the first tube 93, and the temperature regulating liquid in the heat preservation interlayer 92 can be drawn out through the second tube 94. By the flow of the temperature regulating liquid in the heat preservation interlayer 92, the temperature of the raw material liquid in the bubbling tank 1 can be maintained within a constant range.

[0062] Reference Figure 2 and Figure 3 A plurality of spacer rings 95 are arranged between the heat preservation tank 91 and the bubbling tank 1. The plurality of spacer rings 95 are arranged in sequence along the axial direction of the heat preservation tank 91. The spacer rings 95 are sleeved on the outside of the bubbling tank 1. The inner wall of the spacer ring 95 is fixedly connected to the outer wall of the bubbling tank 1. The outer wall of the spacer ring 95 is fixedly connected to the inner wall of the heat preservation tank 91. Therefore, the spacer ring 95 can be used to connect the heat preservation tank 91 and the bubbling tank 1.

[0063] Reference Figure 2and Figure 3 A partition 96 is also provided between the insulation tank 91 and the bubbling tank 1. The length direction of the partition 96 is arranged in the vertical direction. The two sides of the partition 96 in the width direction are fixedly connected to the inner wall of the insulation tank 91 and the outer wall of the bubbling tank 1 respectively. The partition 96 is fixedly connected to all the partition rings 95 along its own length direction. An outflow port 97 is provided on the partition 96. The outflow port 97 passes through the partition ring 95 in the vertical direction, and the outflow ports 97 on two adjacent partition rings 95 in the vertical direction are respectively located on both sides of the thickness direction of the partition 96. The first tube 93 is connected to the upper space of the uppermost partition 96, and the outflow ports 97 of the first tube 93 and the uppermost partition 96 are respectively located on both sides of the thickness direction of the partition 96. The lower end of the second tube 94 extends to the lower space of the lowermost partition 96, and the lower end of the second tube 94 is located between the inner side wall of the tank bottom of the insulation tank 91 and the outer side wall of the tank bottom of the bubbling tank 1.

[0064] Therefore, a number of partitions 96 and outflow ports 97 form a spiral liquid flow space, and the temperature-adjusting liquid injected into the first tube 93 must pass through the entire spiral flow space before being extracted by the second tube 94. Therefore, the flow speed of the temperature-adjusting liquid can be reduced, and the temperature uniformity of the raw material liquid in the bubbling tank 1 can be improved, thereby improving the insulation effect of the insulation tank 91.

[0065] The implementation principle of the embodiment of the present application is as follows: a heat preservation mechanism 9 is arranged on the outside of the bubbling tank 1, which can insulate the raw material liquid in the bubbling tank 1 outside the bubbling tank 1, so that the raw material liquid can be maintained within a constant temperature range, and then when gas is introduced into the air inlet pipe 4, the bubble generator 5 can generate evenly distributed bubbles in the raw material liquid, thereby fully and evenly stirring the raw material liquid and increasing the carrying effect of the saturated bubbles on the raw material liquid.

[0066] This embodiment also discloses a control method for a constant temperature ultra-clean bubbler, comprising the following steps: S1: Injecting raw material liquid: injecting raw material liquid into the bubbling tank 1 through the liquid inlet pipe 3.

[0067] S2: Injecting temperature-adjusting liquid: injecting temperature-adjusting liquid into the heat-insulating interlayer 92 through the first tube 93, and detecting the temperature of the raw material liquid through the temperature probe 8, so that the temperature of the raw material liquid is maintained within the required temperature range.

[0068] S3: Adding gas: injecting gas into the raw material liquid through the air inlet pipe 4.

[0069] S4: Collecting gas: recollecting the gas through the discharge pipe 6 or delivering the gas carrying the raw material liquid to other equipment for processing and production.

[0070] The implementation principle of the embodiment of the present application is: to perform pre-temperature adjustment treatment on the raw material liquid so that the temperature of the raw material liquid can be stably maintained within the required temperature range, thereby allowing the gas to have a better stirring effect on the raw material liquid, while increasing the amount of raw material liquid carried by the gas, thereby improving the efficiency of the gas in carrying the raw material liquid away.

[0071] Example 2: A constant temperature ultra-clean bubbler, referring to Figure 2 and Figure 4 The difference between this embodiment and the embodiment is that the bubble generator 5 includes a bubble disk 51, the bubble disk 51 is arranged in the horizontal direction, and the bubble disk 51 is located in the bubbling tank 1, a plurality of bubble holes 511 are provided on the lower side of the bubble disk 51, the upper side of the bubble disk 51 is connected to the air inlet pipe 4, a storage air cavity 512 is provided in the bubble disk 51, the storage air cavity 512 is connected to the air inlet pipe 4, and a plurality of bubble holes 511 are all connected to the storage air cavity 512. The gas is discharged through the air inlet pipe 4, and the gas can be discharged into the raw material liquid through the plurality of bubble holes 511 to form bubbles. Since a large number of bubble holes 511 are provided on the bubble disk 51, uniformly distributed bubbles can be generated in the raw material liquid.

[0072] Reference Figure 4 A plurality of extension components 52 are arranged on the outer side of the bubble disk 51 , and the plurality of extension components 52 are evenly spaced along the circumference of the bubble disk 51 .

[0073] Reference Figure 4 and Figure 5 The extension component 52 includes a rotating plate 521 , and the length direction of the rotating plate 521 is arranged along the radial direction of the bubble disk 51 .

[0074] Reference Figure 4 and Figure 6 A rotating shaft 522 is provided on the side of the rotating plate 521 facing the bubble disk 51, and the axial direction of the rotating shaft 522 is provided along the width direction of the rotating plate 521. Rotating seats 523 are provided at both ends of the rotating shaft 522, and the rotating seat 523 is fixedly connected to the bubble disk 51. An intermediate shaft 524 is provided on the side of the rotating seat 523 facing the rotating shaft 522, and the intermediate shaft 524 is coaxially arranged with the rotating shaft 522.

[0075] Reference Figure 5 and Figure 6, an air inlet cavity 5211 is provided in the rotating plate 521, an air inlet hole 5221 is provided at one end of the rotating shaft 522, the air inlet hole 5221 penetrates the rotating shaft 522 along the axial direction of the rotating shaft 522, and the air inlet hole 5221 is communicated with the air inlet cavity 5211. An air outlet hole 5241 is provided at one end of the intermediate shaft 524 facing the rotating shaft 522, an air outlet cavity 5231 is provided in the rotating seat 523, and the air outlet cavity 5231 is communicated with the storage air cavity 512 and the air outlet hole 5241. The air inlet hole 5221 is plug-fitted with the intermediate shaft 524, and the outer wall of the intermediate shaft 524 is rotatably connected with the inner wall of the air inlet hole 5221, at which time, the air inlet cavity 5211, the air inlet hole 5221, the air outlet hole 5241, the air outlet cavity 5231 and the storage air cavity 512 are communicated in sequence.

[0076] Therefore, the rotating plate 521 can rotate, and during the rotation process, the air inlet cavity 5211 in the rotating plate 521 and the air storage cavity 512 in the bubble disk 51 are always in a communicating state.

[0077] Reference Figure 5 and Figure 6 A plurality of auxiliary air holes 5212 are provided on one side of the rotating plate 521 in the thickness direction, and the auxiliary air holes 5212 are all connected to the air inlet cavity 5211. Therefore, the rotating plate 521 can also discharge gas, thereby generating bubbles in the raw material liquid.

[0078] Adding a number of rotating plates 521 to the bubble disk 51 can increase the area that the bubble generator 5 can cover in the raw liquid, thereby increasing the distribution area of ​​the bubbles generated by the gas ejected from the bubble generator 5 in the raw liquid, so that more raw liquid can come into contact with the gas, which can be better stirred and mixed, thereby improving the efficiency of the bubbles in carrying the raw liquid away.

[0079] Reference Figure 4 and Figure 6 A rotation locking assembly 53 is provided between the rotating plate 521 and the rotating seat 523. The rotation locking assembly 53 includes a half ring 531, which is coaxially arranged with the rotating shaft 522. The outer wall of the half ring 531 is fixedly connected to the side of the rotating plate 521 facing the rotating seat 523, the inner wall of the half ring 531 is connected to the outer wall of the rotating seat 523, and the half ring 531 is rotatably connected to the outer wall of the outer wall of the rotating seat 523 along its own circumferential direction. Therefore, the arrangement of the half ring 531 will not interfere with the rotation of the rotating plate 521.

[0080] Reference Figure 6 and Figure 7A clearance groove 532 is provided on the outer wall of the rotating seat 523, and a plurality of first clamping blocks 5311 are provided on the side of the semi-ring 531 facing the rotating seat 523. The plurality of first clamping blocks 5311 are evenly spaced along the circumference of the semi-ring 531. The first clamping block 5311 is fixedly connected to the semi-ring 531. The first clamping block 5311 is plug-fitted with the clearance groove 532, and the first clamping block 5311 is slidably connected to the inner wall of the clearance groove 532 along the circumference of the semi-ring 531.

[0081] Reference Figure 6 and Figure 7 A locking plate 533 is provided in the clearance groove 532, the locking plate 533 is coaxially arranged with the rotating shaft 522, and the locking plate 533 is rotatably connected with the inner wall of the clearance groove 532 along its own circumference, and a plurality of second clamping blocks 5331 are provided on the outer side wall of the locking plate 533 facing the semi-ring 531, and the plurality of second clamping blocks 5331 are sequentially arranged at intervals along the circumference of the locking plate 533, and the second clamping blocks 5331 are slidably connected with the inner wall of the clearance groove 532 along the circumference of the clearance groove 532. A clamping groove 5312 is formed between two adjacent first clamping blocks 5311, and the clamping groove 5312 is arranged one-to-one with the second clamping block 5331, and the second clamping block 5331 is plugged and matched with the corresponding clamping groove 5312.

[0082] Therefore, when the rotating plate 521 drives the half ring 531 to rotate, the first clamping block 5311 can push the second clamping block 5331 , so that the locking plate 533 can rotate synchronously, and at this time, the normal rotation of the rotating plate 521 will not be affected.

[0083] Reference Figure 6 and Figure 7 A locking hole 534 is provided on the side of the rotating seat 523 away from the intermediate shaft 524, an auxiliary hole 535 is provided on the locking plate 533, a threaded hole 536 is provided on the inner wall of the giving way groove 532, the locking hole 534, the auxiliary hole 535 and the threaded hole 536 are coaxially connected, a locking bolt 537 is inserted in the locking hole 534, the nut of the locking bolt 537 is in conflict with the locking plate 533, the locking bolt 537 passes through the auxiliary hole 535, and the locking bolt 537 is connected to the inner wall of the threaded hole 536 by threads.

[0084] When the locking bolt 537 is loosened, the locking disk 533 can rotate, and the rotating plate 521 can adjust its position at this time; when the locking bolt 537 is tightened, the nut of the locking bolt 537 presses against the locking disk 533, increasing the friction between the locking disk 533 and the inner wall of the yield groove 532, so that the locking disk 533 cannot rotate, and the rotation angle of the rotating plate 521 can be locked at this time.

[0085] Reference Figure 6 and Figure 7A sealing block 538 is inserted into the locking hole 534, and the sealing block 538 is plugged into and matched with the locking hole 534, and the sealing block 538 closes the locking hole 534. A sealing ring is provided between the outer wall of the sealing block 538 and the inner wall of the locking hole 534. The sealing block 538 can protect the locking bolt 537.

[0086] The implementation principle of the embodiment of the present application is as follows: a rotating plate 521 is arranged on the bubble generator 5. On the one hand, due to the opening of the auxiliary air hole 5212, the bubble generator 5 can discharge more gas, thereby increasing the exhaust volume of the air inlet pipe 4, and then the discharge pipe 6 can discharge more gas carrying the raw material liquid accordingly; on the other hand, the setting of the rotating plate 521 can increase the coverage area of ​​the bubble generator 5 in the raw material liquid, so that more raw material liquid can come into contact with the bubbles, so that the bubbles can stir the raw material liquid more fully, thereby improving the efficiency of the bubbles in taking the liquid away.

[0087] On the basis of being provided with the heat preservation mechanism 9, more gas can be introduced through the air inlet pipe 4, so that the bubble generator 5 can generate more bubbles, thereby improving the stirring effect on the raw material liquid. While increasing the amount of gas in the bubbling tank 1, it also increases the carrying effect of the saturated bubbles on the raw material liquid, thereby increasing the amount of raw material liquid vapor finally discharged from the discharge port, and increasing the feeding capacity of the bubbling tank 1.

[0088] Therefore, through the cooperation between the heat preservation mechanism 9 and the bubble generator 5, the bubbler can produce a better stirring effect and increase the feeding speed of the raw material liquid vapor.

[0089] Furthermore, since the rotating plate 521 is rotatably connected to the bubble disk 51, when the inner diameter of the bubbling tank 1 is small, the rotating plate 521 can be rotated to be perpendicular to the bubble disk 51, which facilitates the installation of the bubble generator 5 in the bubbling tank 1; and when the inner diameter of the bubbling tank 1 is large, the rotating plate 521 can be rotated to be flush with the bubble disk 51, so that the bubble generator 5 can cover a larger area in the bubbling tank 1, allowing the bubbles to contact more raw liquid, thereby ensuring the stirring effect and increasing the amount of raw liquid carried by the saturated bubbles.

[0090] Furthermore, by rotating the rotating plate 521, the shapes of the rotating plate 521 and the bubble disk 51 can be made to fit the shape of the bottom of the bubbling tank 1 more closely, so that the ejected bubbles can impact all positions of the bottom of the bubbling tank 1 as much as possible, so that the raw material liquid can be fully stirred as evenly as possible, thereby increasing the amount of raw material liquid carried by the saturated bubbles.

[0091] This embodiment further discloses a control method for a constant temperature ultra-clean bubbler. The difference between this embodiment and embodiment 1 is that before step S1, the method further includes: Adjustment of the rotating plate 521: Before installing the bubbling tank 1, adjust the rotating plate 521 to a suitable angle for the bubbling tank 1 according to the inner diameter of the bubbling tank 1 and the shape of the tank bottom, and then fix the rotating plate 521.

[0092] The implementation principle of the embodiment of the present application is: adjust the angle of the rotating plate 521 so that the bubbles emitted by the rotating plate 521 can impact more raw liquid. For stirring, the raw liquid near the bottom and inner wall of the bubbling tank 1 will be impacted by the bubbles emitted by the rotating plate 521, thereby improving the stirring effect of the raw liquid. For feeding, it is possible to increase the amount of gas in the bubbling tank 1 and increase the coverage area of ​​the bubble generator 5, thereby increasing the amount of raw liquid vapor finally discharged from the discharge pipe 6, and increasing the feeding capacity of the bubbling tank 1.

[0093] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A constant temperature ultra-clean bubbler, characterized in that: The invention comprises a bubbling tank (1), wherein the open end of the bubbling tank (1) is connected to a closing cover (2), and the closing cover (2) is provided with a liquid inlet pipe (3), an air inlet pipe (4) and a discharge pipe (6), wherein the liquid inlet pipe (3) and the air inlet pipe (4) both extend into the bubbling tank (1), and the liquid inlet pipe (3), the air inlet pipe (4) and the discharge pipe (6) are all connected to the bubbling tank (1), and one end of the air inlet pipe (4) located in the bubbling tank (1) is connected to a bubble generator (5); A heat preservation mechanism (9) is arranged outside the bubbling tank (1), the heat preservation mechanism (9) comprises a heat preservation tank (91), the heat preservation tank (91) is sleeved outside the bubbling tank (1), the closing cover (2) is arranged at the open end of the heat preservation tank (91), and the closing cover (2) closes the open end of the heat preservation tank (91); A heat-insulating interlayer (92) is formed between the inner wall of the heat-insulating tank (91) and the outer wall of the bubbling tank (1), and a first tube (93) and a second tube (94) are provided on the closing cover (2), and the first tube (93) and the second tube (94) are both connected to the heat-insulating interlayer (92).

2. A constant temperature ultra-clean bubbler according to claim 1, characterized in that: A plurality of spacer rings (95) are arranged between the outer walls of the heat-insulating tank (91) and the bubbling tank (1). The plurality of spacer rings (95) are arranged in sequence and spaced apart along the axial direction of the heat-insulating tank (91), and the spacer rings (95) are sleeved on the outer wall of the bubbling tank (1). The outer wall of the spacer ring (95) is connected to the inner wall of the heat-insulating tank (91), and the inner wall of the spacer ring (95) is connected to the outer wall of the bubbling tank (1). A flow outlet (97) is formed through the spacer ring (95).

3. A constant temperature ultra-clean bubbler according to claim 2, characterized in that: A partition (96) is provided between the heat preservation tank (91) and the bubbling tank (1), the length direction of the partition (96) being arranged along the axial direction of the heat preservation tank (91), the partition (96) being connected to all the partition rings (95) in sequence along its length direction, and both sides of the partition (96) in the width direction being connected to the inner wall of the heat preservation tank (91) and the outer wall of the bubbling tank (1) respectively; The outflow ports (97) on two adjacent partition rings (95) are located on both sides of the partition plate (96) in the thickness direction; One end of the second tube (94) extends to a side of the spacer ring (95) farthest from the closing cover (2) away from the closing cover (2).

4. A constant temperature ultra-clean bubbler according to claim 1, 2 or 3, characterized in that: The bubble generator (5) comprises a bubble disk (51), one axial side of the bubble disk (51) is connected to the air inlet pipe (4), the other side of the bubble disk (51) is provided with a plurality of bubble holes (511), a storage air cavity (512) is provided in the bubble disk (51), and the storage air cavity (512) is connected to the air inlet pipe (4) and the plurality of bubble holes (511); A plurality of rotating plates (521) are arranged on the side wall of the bubble disk (51), and the plurality of rotating plates (521) are arranged at intervals along the circumference of the bubble disk (51). An air inlet cavity (5211) is provided in the rotating plate (521), and the air inlet cavity (5211) is communicated with the storage air cavity (512). A plurality of auxiliary air holes (5212) are provided on the rotating plate (521), and the auxiliary air holes (5212) are communicated with the storage air cavity (512).

5. A constant temperature ultra-clean bubbler according to claim 4, characterized in that: A rotating seat (523) is provided between the rotating plate (521) and the bubble disk (51), the rotating seat (523) is connected to the bubble disk (51), a rotating shaft (522) is provided on a side of the rotating plate (521) facing the bubble disk (51), one end of the rotating shaft (522) is plug-fitted with the rotating seat (523), and the rotating shaft (522) is rotatably connected to the rotating seat (523); An air outlet cavity (5231) is provided in the rotating seat (523), an air outlet hole (5241) is provided on a side of the rotating seat (523) facing the rotating shaft (522), the air outlet hole (5241) is communicated with the air outlet cavity (5231), and the air outlet cavity (5231) is communicated with the storage air cavity (512); An air inlet hole (5221) is provided at one end of the rotating shaft (522) facing the rotating seat (523), the air inlet hole (5221) is communicated with the air inlet cavity (5211), and the air inlet hole (5221) is communicated with the air outlet hole (5241); A rotation locking assembly (53) for fixing the rotation angle of the rotation plate (521) is provided between the rotation seat (523) and the rotation plate (521).

6. A constant temperature ultra-clean bubbler according to claim 5, characterized in that: An intermediate shaft (524) is provided on one side of the rotating seat (523) facing the rotating shaft (522), and the air outlet (5241) is provided on one end of the intermediate shaft (524) facing the rotating shaft (522); The intermediate shaft (524) is plug-fitted with the air inlet hole (5221) along its own axial direction, and the intermediate shaft (524) is rotationally connected to the inner wall of the air inlet hole (5221).

7. A constant temperature ultra-clean bubbler according to claim 5, characterized in that: The rotation locking assembly (53) comprises a locking disk (533), the locking disk (533) is rotationally connected to the rotating seat (523), and the locking disk (533) is connected to the rotating plate (521); An auxiliary hole (535) is formed through the locking plate (533), and a threaded hole (536) is formed on the rotating seat (523). The auxiliary hole (535) is coaxially connected to the threaded hole (536). A locking bolt (537) is inserted into the auxiliary hole (535). The locking bolt (537) is coaxially arranged with the rotating shaft (522). The locking bolt (537) is plug-fitted with the threaded hole (536). The locking bolt (537) is rotatably connected to the inner wall of the auxiliary hole (535). The locking bolt (537) is threadedly connected to the inner wall of the threaded hole (536). The nut of the locking bolt (537) abuts against the locking plate (533) along its own axial direction.

8. A constant temperature ultra-clean bubbler according to claim 7, characterized in that: A clearance groove (532) is provided in the rotating seat (523), the locking plate (533) is inserted into the clearance groove (532), and the locking plate (533) is rotatably connected to the inner wall of the clearance groove (532); A locking hole (534) is provided on a side of the rotating seat (523) away from the rotating shaft (522); the locking hole (534) is coaxially arranged with the auxiliary hole (535), and the locking bolt (537) is inserted into the locking hole (534).

9. A constant temperature ultra-clean bubbler according to claim 8, characterized in that: A sealing block (538) is inserted into the locking hole (534), and the sealing block (538) closes the locking hole (534).

10. A method for controlling a constant temperature ultra-clean bubbler, for controlling the constant temperature ultra-clean bubbler according to claim 1, characterized in that: The following steps are involved: S1: Injecting raw material liquid: injecting raw material liquid into the bubbling tank (1); S2: injecting a temperature-adjusting liquid: injecting a temperature-adjusting liquid into the heat-insulating interlayer (92); S3: Adding gas: injecting gas into the raw material liquid through the air inlet pipe (4); S4: Collecting gas: The gas is discharged through the discharge pipe (6).

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