Laser three-dimensional body manufacturing device and method for complex structure

Abstract

The invention discloses a device and a method for manufacturing a laser three-dimensional body with a complex structure, and solves the problems of low processing precision and low processing efficiency of the existing femtosecond laser processing technology. The light beam position presetting unit, the dispersion compensation unit, the acousto-optic modulation unit, the optical relay compensation unit and the microscopic focusing unit are sequentially arranged on a light path where the processing laser is located in the emitting direction of the processing laser. The light beam position presetting unit is used for adjusting the optical axis space position of the processing laser; the dispersion compensation unit is used for performing dispersion compensation on the processing laser after the optical axis spatial position adjustment; the acousto-optic modulation unit is used for dividing the processing laser subjected to dispersion compensation into a plurality of sub-beams through amplitude modulation of electric signals with different and / or the same frequency, and adjusting the spatial position of each sub-beam; the optical relay compensation unit is used for adjusting the optical path of each sub-beam; and the microscopic focusing unit is used for focusing the sub-beams after the optical path adjustment.

Description

Technical Field

[0001] The invention relates to a laser manufacturing device and method, and in particular to a laser three-dimensional body manufacturing device and method for complex structures. Background Art

[0002] Femtosecond laser processing technology can be used for cutting, drilling, etching, hidden cutting, through-glass via (TGV), laser grooving (low-k), etc. of semiconductors, new display devices, silicon carbide, gallium nitride silicon PCB / FPC, ceramics, electric vehicle glass, automotive head-up display glass, LCP / MPI antenna, PET film, etc. Its processing principle is that after the laser is focused into the material, when the pulse energy exceeds a certain threshold, due to the different energy density, the material in the focused area will be subjected to permanent structural modifications such as optical coloring, refractive index change, micro-holes, and micro-cracks. Femtosecond laser processing technology can be applied to the preparation of photonic micro-devices with various functions. For example, femtosecond laser regulation of ion valence changes can be applied to erasable and rewritable optical storage, femtosecond laser-induced medium refractive index changes can be used for the preparation of optical waveguide devices, femtosecond laser-induced micro-holes can be used for the preparation of three-dimensional photonic crystals, and femtosecond laser microstructure manufacturing can be used for microfluidic channel manufacturing. Among them, femtosecond laser direct writing optical waveguide is a device that uses femtosecond laser to irradiate transparent materials, modulate the laser incident power, cause the refractive index of the material in the laser focus area to increase or decrease, and make the light wave produce total reflection at its interface and be confined to propagate in the waveguide, thus forming a three-dimensional waveguide device; photonic crystal uses femtosecond laser to directly induce micropores for array construction, multiple femtosecond laser interference to form a periodic structure, and femtosecond laser induced two-photon polymerization, thereby forming a type of artificial electromagnetic medium material composed of two or more materials with different dielectric constants arranged in a periodic repetition; in terms of microfluidic processing, femtosecond laser direct writing technology is used in combination with acid solution corrosion to accurately and efficiently prepare continuous three-dimensional micro-nano channels inside transparent media, which can accurately manipulate extremely small amounts of liquids, thereby realizing the integration of microscopic chemical and biological analysis systems, which is more efficient and time-saving than traditional photolithography methods.

[0003] Femtosecond laser processing technology includes femtosecond laser direct writing processing and femtosecond laser multi-axis scanning processing:

[0004] Femtosecond laser direct writing relies on multi-axis motion platform processing, focusing the laser on a single point, and realizing the three-dimensional complex structure by relying on the multi-axis motion platform to drive the relative movement of the processed components. This manufacturing system is complex and expensive. Since the multi-axis motion platform is an inertial motion component, its movement speed is limited, and the accumulation of multi-axis motion will lead to an increase in the accumulated motion error, so the processing efficiency and accuracy need to be improved.

[0005] Femtosecond laser multi-axis scanning processing uses two-dimensional, three-dimensional scanning galvanometers, piezoelectric ceramics and other methods to realize the scanning of the light beam in space to realize the processing of three-dimensional structures on the surface and inside of the material. Although the scanning rate is improved compared to the motion platform type, the scanning rate is still limited based on the principle of mechanically controlling the reflector to achieve beam deflection. Summary of the invention

[0006] In order to solve the technical problems of low processing precision and low processing efficiency of the existing femtosecond laser processing technology, the present invention provides a laser three-dimensional body manufacturing device and method for complex structures.

[0007] In order to achieve the above purpose and complete the above invention concept, the present invention adopts the following technical solutions:

[0008] A laser three-dimensional body manufacturing device for complex structures, which is special in that it includes a laser source for emitting processing laser, and a beam position presetting unit, a dispersion compensation unit, an acousto-optic modulation unit, an optical relay compensation unit and a micro-focusing unit which are sequentially arranged on the optical path where the processing laser is located along the emission direction thereof;

[0009] The beam position preset unit is used to adjust the spatial position of the optical axis of the processing laser;

[0010] The dispersion compensation unit is used to perform dispersion compensation on the processing laser after the spatial position of the optical axis is adjusted;

[0011] The acousto-optic modulation unit is used to divide the dispersion-compensated processing laser into N sub-beams by means of amplitude modulation of electrical signals of different and / or same frequencies, and to adjust the spatial position of each sub-beam, where N is a positive integer greater than or equal to 1;

[0012] The optical relay compensation unit is used to adjust the optical path of each sub-beam;

[0013] The microscopic focusing unit is used to focus each sub-beam after the optical path is adjusted.

[0014] Furthermore, the beam position predetermined unit includes a first two-dimensional fast reverse scanning mirror and a second two-dimensional fast reverse scanning mirror, and a first driving component, which are arranged on the optical path where the processing laser is located;

[0015] The first two-dimensional fast-reverse scanning mirror and the second two-dimensional fast-reverse scanning mirror are arranged at the action end of the driving component;

[0016] The first driving component is used to adjust the angle and position of the first two-dimensional fast reverse scanning mirror and the second two-dimensional fast reverse scanning mirror.

[0017] Further, the first driving assembly includes a first stepper motor and a second stepper motor; the first two-dimensional fast reverse scanning mirror is arranged at the working end of the first stepper motor; the second two-dimensional fast reverse scanning mirror is arranged at the working end of the second stepper motor; the first stepper motor is used to adjust the angle and position of the first two-dimensional fast reverse scanning mirror; the second stepper motor is used to adjust the angle and position of the second two-dimensional fast reverse scanning mirror;

[0018] Alternatively, the first driving component includes a first displacement platform, a second displacement platform, a first piezoelectric ceramic arranged on the first displacement platform, and a second piezoelectric ceramic arranged on the second displacement platform; the first two-dimensional fast reverse scanning mirror is arranged at the active end of the first piezoelectric ceramic; the second two-dimensional fast reverse scanning mirror is arranged at the active end of the second piezoelectric ceramic; the first piezoelectric ceramic is used to adjust the angle of the first two-dimensional fast reverse scanning mirror; the first displacement platform is used to adjust the position of the first two-dimensional fast reverse scanning mirror; the second piezoelectric ceramic is used to adjust the angle of the second two-dimensional fast reverse scanning mirror; the second displacement platform is used to adjust the position of the second two-dimensional fast reverse scanning mirror.

[0019] Further, the acousto-optic modulation unit includes an X-direction acousto-optic modulator, a λ / 2 wave plate, and a Y-direction acousto-optic modulator, which are sequentially arranged along the emitting direction of the processing laser, and an X-direction acousto-optic driver connected to the X-direction acousto-optic modulator, a Y-direction acousto-optic driver connected to the Y-direction acousto-optic modulator, and a controller respectively connected to the X-direction acousto-optic driver and the Y-direction acousto-optic driver;

[0020] The controller is used to load different and / or same magnitude first electrical signal amplitude modulation to the X-direction acousto-optic modulator through the X-direction acousto-optic driver, so that the X-direction acousto-optic modulator obtains different and / or same refractive indexes, thereby dividing the processing laser into a plurality of first sub-beams with different and / or same energies and different and / or same spatial positions in the X-direction, and the number of the first sub-beams corresponds to the first electrical signal amplitude modulation; and load different and / or same magnitude second electrical signal amplitude modulation to the Y-direction acousto-optic modulator through the Y-direction acousto-optic driver, so that the Y-direction acousto-optic modulator obtains different and / or same refractive indexes, thereby dividing the corresponding number of first sub-beams into a plurality of second sub-beams with different and / or same energies and different and / or same spatial positions in the Y-direction, and the number of the second sub-beams corresponds to the second electrical signal amplitude modulation; and obtain N sub-beams;

[0021] The λ / 2 wave plate is used to change the first sub-beam from linearly polarized light to circularly polarized light.

[0022] Further, the X-direction acousto-optic modulator includes an X-direction acousto-optic crystal and an X-direction pressure energy transducer;

[0023] The X-direction acousto-optic crystal is arranged on the optical path of the processing laser;

[0024] The input end of the X-direction pressure energy transducer is connected to the output end of the X-direction acousto-optic driver. The X-direction pressure energy transducer is bonded to the X-direction acousto-optic crystal and is used to receive the first electrical signal amplitude modulation of different and / or the same size and convert it into a first mechanical wave field, so that the X-direction acousto-optic crystal vibrates with the first mechanical wave field, and the refractive index of the X-direction acousto-optic crystal changes according to the change law of the first electrical signal amplitude modulation to form a first ultrasonic grating. The first ultrasonic grating modulates the processing laser so that the processing laser is deflected at different angles, thereby dividing it into multiple first sub-beams with different and / or the same energy and different and / or the same spatial positions in the X direction.

[0025] Further, the Y-direction acousto-optic modulator includes a Y-direction acousto-optic crystal and a Y-direction pressure energy transducer;

[0026] The Y-direction acousto-optic crystal is arranged on the optical path where the first sub-beam is located;

[0027] The input end of the Y-direction pressure energy transducer is connected to the output end of the Y-direction acousto-optic driver, and the Y-direction pressure energy transducer is bonded to the Y-direction acousto-optic crystal, and is used to receive the second electrical signal amplitude modulation of different and / or the same size, and convert it into a second mechanical wave field, so that the Y-direction acousto-optic crystal vibrates with the second mechanical wave field, and the refractive index of the Y-direction acousto-optic crystal changes according to the change law of the first electrical signal amplitude modulation, forming a second ultrasonic grating, and the second ultrasonic grating modulates a corresponding number of first sub-beams, so that a corresponding number of first sub-beams are deflected at different angles, thereby dividing them into multiple second sub-beams with different and / or the same energy and different and / or the same spatial positions in the Y direction; then the sum of the number of undivided first sub-beams and the number of divided second sub-beams is N.

[0028] Further, the optical relay compensation unit comprises a first positive power lens and a second driving assembly which are sequentially arranged on the optical path of the sub-beam in the reverse direction of the sub-beam emission, and a negative power lens and a second positive power lens which are arranged at the action end of the second driving assembly;

[0029] The position of the first positive focal power lens is fixed;

[0030] The second driving assembly is used to adjust the distance between the negative optical power lens and the second positive optical power lens.

[0031] Further, the dispersion compensation unit includes a first equilateral prism and a second equilateral prism arranged on the optical path of the processing laser, and a third driving component; the first equilateral prism and the second equilateral prism are arranged at the action end of the third driving component; the third driving component is used to adjust the distance between the first equilateral prism and the second equilateral prism;

[0032] The microscopic focusing unit comprises a reflector and a focusing microscope objective lens which are sequentially arranged on the optical path of the sub-beam along the emission direction of the sub-beam; the reflector is used to reflect the sub-beam to the focusing microscope objective lens; the focusing microscope objective lens is used to focus each sub-beam respectively.

[0033] A laser three-dimensional body manufacturing method for a complex structure, using the above-mentioned laser three-dimensional body manufacturing device for a complex structure, is characterized by comprising the following steps:

[0034] Step 1, analyzing the processing requirements, and determining the number N of sub-beams used for laser processing and the spot shape of each sub-beam according to the processing requirements; the spot shape includes the spot diameter, optical path, energy and spatial distribution position of each sub-beam;

[0035] Step 2, start the laser source, the laser source emits the processing laser, adjust the beam position predetermined unit, so that the focus of the sub-beam after being focused by the microscopic focusing unit corresponds to the processing position; adjust the dispersion compensation unit to generate negative dispersion, and perform pulse width compression on the processing laser; adjust the optical relay compensation unit according to the optical path of each sub-beam; adjust the processing parameters of the acousto-optic modulation unit according to the number N of sub-beams, the spot diameter, the energy, and the spatial distribution position;

[0036] Step 3, the beam position presetting unit receives the processing laser and adjusts the spatial position of its optical axis;

[0037] Step 4: The dispersion compensation unit receives the processing laser after position adjustment and performs dispersion compensation on it;

[0038] Step 5: The acousto-optic modulation unit receives the dispersion-compensated processing laser, divides the dispersion-compensated processing laser into N sub-beams by amplitude modulation of electrical signals of different and / or same frequencies, and adjusts the spatial position of each sub-beam;

[0039] Step 6: The optical relay compensation unit receives N sub-beams and adjusts the optical path of each sub-beam;

[0040] Step 7: The micro-focusing unit receives each sub-beam and focuses it;

[0041] Step 8: Processing is performed using the focused N sub-beams.

[0042] Further, in step 2, the processing parameters of the acousto-optic modulation unit are adjusted according to the number N, energy, and spatial distribution position of the sub-beams, specifically, the controller is adjusted to output a first electrical signal amplitude modulation of different and / or the same size and frequency to the X-direction acousto-optic modulator through the X-direction acousto-optic driver, and the controller is adjusted to output a second electrical signal amplitude modulation of different and / or the same size and frequency to the Y-direction acousto-optic modulator through the Y-direction acousto-optic driver according to the number N, the spot diameter, the energy, and the spatial distribution position;

[0043] Step 3 specifically includes: the beam position predetermined unit receives the processing laser, and adjusts the angle and position of the first two-dimensional fast reverse scanning mirror and the second two-dimensional fast reverse scanning mirror through the first driving component, thereby adjusting the spatial position of the optical axis of the processing laser;

[0044] Step 4 specifically includes: the dispersion compensation unit receives the processing laser after position adjustment, and adjusts the spacing between the first equilateral prism and the second equilateral prism through the third driving component to perform dispersion compensation on the processing laser;

[0045] Step 5 is specifically as follows: the X-direction pressure energy transducer receives a plurality of first electrical signal amplitude modulations of different and / or same magnitudes and frequencies, and converts them into a first mechanical wave field, and the X-direction acousto-optic crystal vibrates along with the first mechanical wave field, so that the refractive index of the X-direction acousto-optic crystal changes according to the variation law of the first electrical signal amplitude modulation, and forms a first ultrasonic grating, and the first ultrasonic grating modulates the processing laser, so that the processing laser deflects at different angles, thereby dividing it into a plurality of first sub-beams with different and / or same energies and different and / or same spatial positions in the X direction, and the first sub-beams correspond to the first electrical signal amplitude modulation;

[0046] The first sub-beam is changed from linearly polarized light to circularly polarized light through the action of a λ / 2 wave plate;

[0047] The Y-direction pressure energy transducer receives a plurality of second electrical signal amplitude modulations of different and / or same magnitudes and frequencies, and converts them into a second mechanical wave field, then the Y-direction acousto-optic crystal vibrates along with the second mechanical wave field, so that the refractive index of the Y-direction acousto-optic crystal changes according to the variation law of the second electrical signal amplitude modulation, forming a second ultrasonic grating, and the second ultrasonic grating modulates a corresponding number of first sub-beams, so that a corresponding number of first sub-beams are divided into a plurality of second sub-beams with different and / or same energies and different and / or same spatial positions in the Y direction, and the number of second sub-beams corresponds to the second electrical signal amplitude modulation; then the sum of the number of undivided first sub-beams and the number of divided second sub-beams is N;

[0048] Step 6 specifically includes: the optical relay compensation unit receives the sub-beams, and adjusts the distance between the negative optical power lens and the second positive optical power lens through the second driving component, thereby changing the optical path of each sub-beam;

[0049] Specifically, step 7 includes: the reflector reflects each sub-beam to the focusing microscope objective lens, and the focusing microscope objective lens focuses each sub-beam respectively.

[0050] Beneficial effects of the present invention:

[0051] 1. The laser three-dimensional body manufacturing device and method for complex structures provided by the present invention can accurately control the processing position of the processing laser through the beam position preset unit and the optical relay compensation unit, thereby improving the processing accuracy; in addition, the device is also provided with an acousto-optic modulation unit, which can control the number and spatial position of sub-beams by loading electrical signal amplitude modulation of different and / or the same frequency, and form synthetic light fields of different shapes (square, trapezoidal, circular, etc.), different spot sizes, and different energy distributions (homogenized, Gaussian) for laser processing by adjusting the spatial positions between each sub-beam. This improves the laser processing efficiency and processing quality.

[0052] 2. The laser three-dimensional body manufacturing device and method for complex structures provided by the present invention can realize the three-dimensional body manufacturing of complex microstructures without relying on a multi-axis motion platform, thereby improving the flexibility and convenience of laser processing; existing three-dimensional morphology laser processing technologies, especially internal material processing, all need to rely on the spatial motion of a multi-axis motion platform; the present invention adjusts the number, energy and spatial position of sub-beams through an acousto-optic modulation unit, thereby avoiding a complex trajectory programming process.

[0053] 3. For complex morphological structures such as elliptical or waisted structures, the existing laser manufacturing devices need to repeatedly move the laser in space for processing, and cannot be formed in one go. Especially for the processing of the internal structure of the material, the same position of the material needs to be irradiated multiple times, resulting in serious laser thermal effects. The femtosecond laser three-dimensional body manufacturing device and method for complex structures provided by the present invention only needs to be processed once, which greatly suppresses the thermal effects (recasting, cracks, recrystallization, etc.) on the surface of the material, reduces the roughness of the surface of the material, and greatly improves the processing efficiency and quality.

[0054] 4. The present invention is provided with an acousto-optic modulation unit capable of adjusting the spatial position of each sub-beam, and only one-dimensional motion platform is required to realize three-dimensional processing, with small cumulative error. Especially for three-dimensional processing inside the laser, the use of multi-axis motion will introduce equivalent glass plates of different thicknesses due to its spatial motion, and then the spatial position error of the focus inside the material will also be a variable, which introduces a variation error between the theoretical position of the focus inside the material and the actual focus position, resulting in an error in the final processed morphology. The laser processing device and method provided by the present invention has a constant focus position for each part of the material, and complex morphology preparation is achieved by changing the focal spot size, with few error sources and high precision. BRIEF DESCRIPTION OF THE DRAWINGS

[0055] Figure 1 It is a structural schematic diagram of an embodiment of a laser three-dimensional body manufacturing device for complex structures according to the present invention;

[0056] Figure 2 is a schematic structural diagram of an acousto-optic modulation unit in an embodiment of the present invention;

[0057] Figure 3 1 is a schematic diagram of a first sub-beam in a Y-direction acousto-optic modulator in an embodiment of the present invention, wherein f is a frequency, and K is greater than or equal to 1 and is a positive integer;

[0058] Figure 4 is a schematic structural diagram of a processed structure and its slices in an embodiment of the present invention;

[0059] Figure 5 This is one of the schematic diagrams of light spots formed by 5 sub-beams in an embodiment of the present invention;

[0060] Figure 6 This is the second schematic diagram of the light spot formed by 5 sub-beams in the embodiment of the present invention.

[0061] Figure Number:

[0062] 1-laser source, 2-beam position presetting unit, 21-first two-dimensional fast reverse scanning mirror, 3-dispersion compensation unit, 31-first equilateral prism, 32-second equilateral prism, 4-acousto-optic modulation unit, 41-X-direction acousto-optic modulator, 411-X-direction acousto-optic crystal, 412-X-direction pressure energy transducer, 42-λ / 2 wave plate, 43-Y-direction acousto-optic modulator, 431-Y-direction acousto-optic crystal, 432-Y-direction pressure energy transducer, 44-X-direction acousto-optic driver, 45-Y-direction acousto-optic driver, 5-optical relay compensation unit, 51-first positive focal length lens, 52-negative optical focal length lens, 53-second positive focal length lens, 6-microscope focusing unit, 61-reflector, 62-focusing microscope objective lens. DETAILED DESCRIPTION

[0063] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings and embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0064] The embodiment of the present invention provides a laser three-dimensional body manufacturing device for complex structures, such as Figure 1As shown, it includes a laser source 1 for emitting a processing laser, and a beam position predetermined unit 2, a dispersion compensation unit 3, an acousto-optic modulation unit 4, an optical relay compensation unit 5 and a microscopic focusing unit 6 which are sequentially arranged on the optical path where the processing laser is located along the emission direction thereof;

[0065] The beam position preset unit 2 is used to adjust the spatial position of the optical axis of the processing laser; specifically, the beam position preset unit 2 includes a first two-dimensional fast reverse scanning mirror 21 and a second two-dimensional fast reverse scanning mirror 22 which are arranged in sequence along the emission direction of the processing laser on the optical path where the processing laser is located, and a first driving component; the first two-dimensional fast reverse scanning mirror 21 and the second two-dimensional fast reverse scanning mirror 22 are arranged at the active end of the driving component; the first driving component is used to adjust the angle and position of the first two-dimensional fast reverse scanning mirror 21 and the second two-dimensional fast reverse scanning mirror 22.

[0066] There are two types of first drive components:

[0067] The first type, the first driving component includes a first stepper motor and a second stepper motor; the first two-dimensional fast reverse scanning mirror 21 is arranged at the action end of the first stepper motor; the second two-dimensional fast reverse scanning mirror 22 is arranged at the action end of the second stepper motor; the first stepper motor is used to adjust the angle and position of the first two-dimensional fast reverse scanning mirror 21; the second stepper motor is used to adjust the angle and position of the second two-dimensional fast reverse scanning mirror 22;

[0068] The second type, the first driving component includes a first displacement platform, a second displacement platform, a first piezoelectric ceramic arranged on the first displacement platform and a second piezoelectric ceramic arranged on the second displacement platform; the first two-dimensional fast reflection scanning mirror 21 is arranged at the active end of the first piezoelectric ceramic; the second two-dimensional fast reflection scanning mirror 22 is arranged at the active end of the second piezoelectric ceramic; the first piezoelectric ceramic is used to adjust the angle of the first two-dimensional fast reflection scanning mirror 21; the first displacement platform is used to adjust the position of the first two-dimensional fast reflection scanning mirror 21; the second piezoelectric ceramic is used to adjust the angle of the second two-dimensional fast reflection scanning mirror 22; the second displacement platform is used to adjust the position of the second two-dimensional fast reflection scanning mirror 22.

[0069] The dispersion compensation unit 3 is used to perform dispersion compensation on the processing laser after position adjustment; specifically, the dispersion compensation unit 3 includes a first equilateral prism 31 and a second equilateral prism 32 arranged on the optical path of the processing laser, and a third driving component; the first equilateral prism 31 and the second equilateral prism 32 are arranged at the action end of the third driving component; the third driving component is composed of two displacement platforms, and the first equilateral prism 31 and the second equilateral prism 32 are respectively arranged on the two displacement platforms, so as to adjust the distance between the first equilateral prism 31 and the second equilateral prism 32 through the two displacement platforms to generate negative dispersion of different values ​​and realize laser pulse width compression.

[0070] like Figure 2As shown, the acousto-optic modulation unit 4 is used to divide the dispersion-compensated processing laser into N sub-beams by amplitude modulation of electrical signals of different and / or same frequencies, and adjust the spatial position of each sub-beam, where N is a positive integer greater than or equal to 1; specifically, the acousto-optic modulation unit 4 includes an X-direction acousto-optic modulator 41, a λ / 2 wave plate 42, a Y-direction acousto-optic modulator 43, and an X-direction acousto-optic driver 44 connected to the X-direction acousto-optic modulator 41, a Y-direction acousto-optic driver 45 connected to the Y-direction acousto-optic modulator 43, and a controller 46 respectively connected to the X-direction acousto-optic driver 44 and the Y-direction acousto-optic driver 45; the X-direction acousto-optic modulator 41 includes an X-direction acousto-optic crystal 411 and an X-direction pressure energy transducer 412; The X-direction acousto-optic crystal 411 is arranged on the optical path of the processing laser; the input end of the X-direction pressure energy transducer 412 is connected to the output end of the X-direction acousto-optic driver 44, and the X-direction pressure energy transducer 412 is bonded to the X-direction acousto-optic crystal 411, and is used to receive the first electrical signal amplitude modulation of different and / or the same size, and convert it into a first mechanical wave field, so that the X-direction acousto-optic crystal 411 vibrates with the first mechanical wave field, and the refractive index of the X-direction acousto-optic crystal 411 changes according to the change law of the first electrical signal amplitude modulation, forming a first ultrasonic grating, and the first ultrasonic grating modulates the processing laser, so that the processing laser is deflected at different angles, thereby dividing it into multiple first sub-beams with different and / or the same energy and different and / or the same spatial positions in the X direction. The Y-direction acousto-optic modulator 43 includes a Y-direction acousto-optic crystal 431 and a Y-direction pressure energy transducer 432; the Y-direction acousto-optic crystal 431 is arranged on the optical path where the first sub-beam is located; the input end of the Y-direction pressure energy transducer 432 is connected to the output end of the Y-direction acousto-optic driver 45, and the Y-direction pressure energy transducer 432 is bonded to the Y-direction acousto-optic crystal 431, and is used to receive the second electrical signal amplitude modulation of different and / or the same size, and convert it into a second mechanical wave field, so that the Y-direction acousto-optic crystal 431 vibrates with the second mechanical wave field, and the refractive index of the Y-direction acousto-optic crystal 431 changes according to the variation law of the first electrical signal amplitude modulation, forming a second ultrasonic grating, and the second ultrasonic grating modulates the corresponding number of first sub-beams, such as Figure 3 As shown, the corresponding number of first sub-beams are deflected at different angles, thereby dividing them into multiple second sub-beams with different and / or same energies and different and / or same spatial positions in the Y direction; the sum of the number of undivided first sub-beams and the number of divided second sub-beams is N. The λ / 2 wave plate 42 is used to change the first sub-beam from linearly polarized light to circularly polarized light.

[0071] The controller 46 is used to load different and / or same magnitude first electrical signal amplitude modulation to the X-direction acousto-optic modulator 41 through the X-direction acousto-optic driver 44, so that the X-direction acousto-optic modulator 41 obtains different and / or same refractive indexes, thereby dividing the processing laser into a plurality of first sub-beams with different and / or same energies and different and / or same spatial positions in the X-direction, and the number of the first sub-beams corresponds to the first electrical signal amplitude modulation; and load different and / or same magnitude second electrical signal amplitude modulation to the Y-direction acousto-optic modulator 43 through the Y-direction acousto-optic driver 45, so that the Y-direction acousto-optic modulator 43 obtains different and / or same refractive indexes, thereby dividing the corresponding number of first sub-beams into a plurality of second sub-beams with different and / or same energies and different and / or same spatial positions in the Y-direction, and the number of the second sub-beams corresponds to the second electrical signal amplitude modulation; and obtain N sub-beams.

[0072] The optical relay compensation unit 5 is used to adjust the optical path of each sub-beam; specifically, the optical relay compensation unit 5 comprises a first positive power lens 51, a second driving assembly, and a negative power lens 52 and a second positive power lens 53, which are sequentially arranged on the optical path of the sub-beam in the reverse direction of the sub-beam emission, and arranged at the action end of the second driving assembly; the first positive power lens 51 is fixed; the second driving assembly is used to adjust the distance between the negative power lens 52 and the second positive power lens 53. The structure of the second driving assembly is similar to that of the first driving assembly.

[0073] The microscopic focusing unit 6 is used to focus each sub-beam after the optical path is adjusted. Specifically, the microscopic focusing unit 6 comprises a reflector 61 and a focusing microscope objective lens 62 which are sequentially arranged on the optical path of the sub-beam along the emission direction of the sub-beam.

[0074] Step 1: Analyze the processing requirements. The structure of the workpiece is as follows: Figure 4 As shown, its size is 6μm-30μm, and it is sliced ​​longitudinally with a positioning accuracy of 1μm to obtain several slices of different or same diameters; a 10x microscope objective lens, numerical aperture NA=0.25, focal length 12mm, incident laser 1064nm, diameter D=1.22λ / NA=6μm, and the number of split beams of acousto-optic modulation N=φn / D=5 are determined;

[0075] According to the processing requirements, the number of sub-beams N = 5 and the spot shape of each sub-beam for laser processing are determined; the spot shape includes the optical path, energy 10μJ and spatial distribution position of each sub-beam. Figure 5 As shown;

[0076] Step 2, start the laser source 1, and the laser source 1 emits a processing laser;

[0077] Adjust the beam position presetting unit 2 so that the sub-beam focused by the micro-focusing unit 6 can accurately focus on the processing station; adjust the distance between the first equilateral prism 31 (size 25.4mm*25.4mm) and the first equilateral prism 32 (size 25.4mm*25.4mm) in the dispersion compensation unit 3 to 10mm to generate a group velocity dispersion of 5000fs 2 , compress the pulse width of the processing laser;

[0078] The focal length of the optical relay compensation unit 5 is adjusted to 50 mm according to the optical path of each sub-beam; the relationship between the focal length f of the optical relay compensation unit 5 and the focal length f1 of the first positive focal lens 51, the focal length f2 of the negative focal lens 52, and the focal length f3 of the second positive focal lens 53 is: f=f1f3 / f2;

[0079] According to the number N of sub-beams, the spot diameter, the energy, and the spatial distribution position, the controller 46 is adjusted to output the first electrical signal amplitude modulation of different and / or the same magnitude and frequency to the X-direction acousto-optic modulator 41 through the X-direction acousto-optic driver 44, and the controller 46 is adjusted to output the second electrical signal amplitude modulation of different and / or the same magnitude and frequency to the Y-direction acousto-optic modulator 43 through the Y-direction acousto-optic driver 45;

[0080] Step 3, the beam position presetting unit 2 receives the processing laser, and adjusts the angle and position of the first two-dimensional fast reverse scanning mirror 21 and the second two-dimensional fast reverse scanning mirror 22 through the first driving component, thereby adjusting the spatial position of the optical axis of the processing laser to obtain a precise processing zero point;

[0081] Step 4: the dispersion compensation unit 3 receives the processing laser after position adjustment, and adjusts the distance between the first equilateral prism 31 and the second equilateral prism 32 through the third driving component to perform dispersion compensation on the processing laser;

[0082] Step 5, the X-direction pressure energy transducer 412 in the acousto-optic modulation unit 4 receives three first electrical signal amplitude modulations (electric power 10W) ​​of different and / or same magnitudes and frequencies, and converts them into a first mechanical wave field, then the X-direction acousto-optic crystal 411 vibrates with the first mechanical wave field, so that the refractive index of the X-direction acousto-optic crystal 411 changes according to the change law of the first electrical signal amplitude modulation, forming a first ultrasonic grating, and the first ultrasonic grating modulates the processing laser, so that the processing laser deflects at different angles, thereby dividing it into three first sub-beams with different and / or same energies and different and / or same spatial positions in the X direction, and the first sub-beams correspond to the first electrical signal amplitude modulation;

[0083] The first sub-beam is changed from linearly polarized light to circularly polarized light by the λ / 2 wave plate 42;

[0084] The Y-direction pressure energy transducer 432 receives two second electrical signal amplitude modulations (electric power 10W) ​​of different and / or same magnitudes and frequencies, and converts them into a second mechanical wave field, then the Y-direction acousto-optic crystal 431 vibrates with the second mechanical wave field, so that the refractive index of the Y-direction acousto-optic crystal 431 changes according to the variation law of the second electrical signal amplitude modulation, forming a second ultrasonic grating, and the second ultrasonic grating modulates a corresponding number of first sub-beams, so that the 2 first sub-beams are respectively divided into 2 second sub-beams with different and / or same energies and different and / or same spatial positions in the Y direction, and the number of the second sub-beams corresponds to the second electrical signal amplitude modulation; the first sub-beam that has not been divided into 1 beam and the second sub-beam that has been divided into 4 beams are obtained, and their spatial position distribution is as shown in FIG. Figure 5 shown.

[0085] The acousto-optic modulation unit 4 can also adjust the spot positions of the five sub-beams according to Figure 5 or Figure 6 The purpose of processing complex morphology structures is achieved by superimposing them in a way that specifically changes the number of sub-beams and the diffraction angle.

[0086] Step 6: The optical relay compensation unit 5 receives the five sub-beams, and adjusts the distance between the negative power lens 52 and the second positive power lens 53 through the second driving component, thereby changing the optical path of each sub-beam;

[0087] Step 7: The reflector 61 reflects each sub-beam to the focusing microscope objective 62, and the focusing microscope objective 62 focuses each sub-beam respectively;

[0088] Step 8, performing processing by focusing the five sub-beams;

[0089] Step 9: After a layer of slice processing is completed, the laser processing device can be moved up or down (step accuracy 1μm) to Figure 4 For the previous or next slice as shown, adjust the first electrical signal amplitude modulation and the second electrical signal amplitude modulation loaded on the acousto-optic modulation unit 4, change the number of sub-beams, the spot diameter and the spatial position according to the slice size, the number of sub-beams can be more or less, and use the method of steps 5 to 9 to process the next slice, and so on, until the processing is completed.

[0090] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A laser three-dimensional body manufacturing device for complex structures, characterized in that: It comprises a laser source (1) for emitting a processing laser, and a beam position presetting unit (2), a dispersion compensation unit (3), an acousto-optic modulation unit (4), an optical relay compensation unit (5) and a microscopic focusing unit (6) which are sequentially arranged on the optical path of the processing laser along the emission direction thereof; The beam position preset unit (2) is used to adjust the spatial position of the optical axis of the processing laser; The dispersion compensation unit (3) is used to perform dispersion compensation on the processing laser after the spatial position of the optical axis is adjusted; The acousto-optic modulation unit (4) is used to divide the dispersion-compensated processing laser into N sub-beams by means of amplitude modulation of electrical signals of different and / or same frequencies, and to adjust the spatial position of each sub-beam, where N is a positive integer greater than or equal to 1; The optical relay compensation unit (5) is used to adjust the optical path of each sub-beam; The microscopic focusing unit (6) is used to focus each sub-beam after the optical path is adjusted.

2. The laser three-dimensional body manufacturing device for complex structures according to claim 1, characterized in that: The beam position presetting unit (2) comprises a first two-dimensional fast-reverse scanning mirror (21) and a second two-dimensional fast-reverse scanning mirror (22) arranged on the optical path of the processing laser, and a first driving component; The first two-dimensional fast-reverse scanning mirror (21) and the second two-dimensional fast-reverse scanning mirror (22) are arranged at the action end of the driving component; The first driving component is used to adjust the angle and position of the first two-dimensional fast-reverse scanning mirror (21) and the second two-dimensional fast-reverse scanning mirror (22).

3. The laser three-dimensional body manufacturing device for complex structures according to claim 2, characterized in that: The first driving component comprises a first stepper motor and a second stepper motor; the first two-dimensional fast reverse scanning mirror (21) is arranged at the action end of the first stepper motor; the second two-dimensional fast reverse scanning mirror (22) is arranged at the action end of the second stepper motor; the first stepper motor is used to adjust the angle and position of the first two-dimensional fast reverse scanning mirror (21); the second stepper motor is used to adjust the angle and position of the second two-dimensional fast reverse scanning mirror (22); Alternatively, the first driving component comprises a first displacement platform, a second displacement platform, a first piezoelectric ceramic arranged on the first displacement platform, and a second piezoelectric ceramic arranged on the second displacement platform; the first two-dimensional fast reverse scanning mirror (21) is arranged at the active end of the first piezoelectric ceramic; the second two-dimensional fast reverse scanning mirror (22) is arranged at the active end of the second piezoelectric ceramic; the first piezoelectric ceramic is used to adjust the angle of the first two-dimensional fast reverse scanning mirror (21); the first displacement platform is used to adjust the position of the first two-dimensional fast reverse scanning mirror (21); the second piezoelectric ceramic is used to adjust the angle of the second two-dimensional fast reverse scanning mirror (22); and the second displacement platform is used to adjust the position of the second two-dimensional fast reverse scanning mirror (22).

4. The laser three-dimensional body manufacturing device for complex structures according to claim 1, 2 or 3, characterized in that: The acousto-optic modulation unit (4) comprises an X-direction acousto-optic modulator (41), a λ / 2 wave plate (42), and a Y-direction acousto-optic modulator (43) which are sequentially arranged along the emitting direction of the machining laser, an X-direction acousto-optic driver (44) connected to the X-direction acousto-optic modulator (41), a Y-direction acousto-optic driver (45) connected to the Y-direction acousto-optic modulator (43), and a controller (46) respectively connected to the X-direction acousto-optic driver (44) and the Y-direction acousto-optic driver (45); The controller (46) is used to load different and / or same magnitude first electrical signal amplitude modulation to the X-direction acousto-optic modulator (41) through the X-direction acousto-optic driver (44), so that the X-direction acousto-optic modulator (41) obtains different and / or same refractive indexes, thereby dividing the processing laser into a plurality of first sub-beams with different and / or same energies and different and / or same spatial positions in the X-direction, and the number of the first sub-beams corresponds to the first electrical signal amplitude modulation; and loading a second electrical signal amplitude modulation of different and / or the same magnitude to the Y-direction acousto-optic modulator (43) through a Y-direction acousto-optic driver (45), so that the Y-direction acousto-optic modulator (43) obtains different and / or the same refractive index, thereby dividing a corresponding number of first sub-beams into a plurality of second sub-beams with different and / or the same energy and different and / or the same spatial positions in the Y-direction, the number of the second sub-beams corresponding to the second electrical signal amplitude modulation; and obtaining N sub-beams; The λ / 2 wave plate (42) is used to change the first sub-beam from linearly polarized light to circularly polarized light.

5. The laser three-dimensional body manufacturing device for complex structures according to claim 4, characterized in that: The X-direction acousto-optic modulator (41) comprises an X-direction acousto-optic crystal (411) and an X-direction pressure energy transducer (412); The X-direction acousto-optic crystal (411) is arranged on the optical path of the processing laser; The input end of the X-direction pressure energy transducer (412) is connected to the output end of the X-direction acousto-optic driver (44). The X-direction pressure energy transducer (412) is bonded to the X-direction acousto-optic crystal (411) and is used to receive first electrical signal amplitude modulations of different and / or the same magnitude and convert them into a first mechanical wave field, so that the X-direction acousto-optic crystal (411) vibrates with the first mechanical wave field, and the refractive index of the X-direction acousto-optic crystal (411) changes according to the variation law of the first electrical signal amplitude modulation, forming a first ultrasonic grating. The first ultrasonic grating modulates the processing laser so that the processing laser deflects at different angles, thereby dividing it into a plurality of first sub-beams with different and / or the same energy and different and / or the same spatial positions in the X direction.

6. The laser three-dimensional body manufacturing device for complex structures according to claim 5, characterized in that: The Y-direction acousto-optic modulator (43) comprises a Y-direction acousto-optic crystal (431) and a Y-direction pressure energy transducer (432); The Y-direction acousto-optic crystal (431) is arranged on the optical path where the first sub-beam is located; The input end of the Y-direction pressure energy transducer (432) is connected to the output end of the Y-direction acousto-optic driver (45). The Y-direction pressure energy transducer (432) is bonded to the Y-direction acousto-optic crystal (431) and is used to receive the second electrical signal amplitude modulation of different and / or the same size and convert it into a second mechanical wave field, so that the Y-direction acousto-optic crystal (431) vibrates with the second mechanical wave field, and the refractive index of the Y-direction acousto-optic crystal (431) changes according to the change law of the first electrical signal amplitude modulation to form a second ultrasonic grating. The second ultrasonic grating modulates a corresponding number of first sub-beams, so that the corresponding number of first sub-beams are deflected at different angles, thereby dividing them into multiple second sub-beams with different and / or the same energy and different and / or the same spatial positions in the Y direction; the sum of the number of undivided first sub-beams and the number of divided second sub-beams is N.

7. The laser three-dimensional body manufacturing device for complex structures according to claim 6, characterized in that: The optical relay compensation unit (5) comprises a first positive focal power lens (51), a second drive assembly, and a negative focal power lens (52) and a second positive focal power lens (53) arranged at the action end of the second drive assembly. The first positive focal power lens (51) is fixed in position; The second driving assembly is used to adjust the distance between the negative optical power lens (52) and the second positive optical power lens (53).

8. The laser three-dimensional body manufacturing device for complex structures according to claim 7, characterized in that: The dispersion compensation unit (3) comprises a first equilateral prism (31) and a second equilateral prism (32) arranged on the optical path of the processing laser, and a third driving component; the first equilateral prism (31) and the second equilateral prism (32) are arranged at the action end of the third driving component; the third driving component is used to adjust the distance between the first equilateral prism (31) and the second equilateral prism (32); The microscopic focusing unit (6) comprises a reflector (61) and a focusing microscope objective lens (62) arranged on the optical path where the sub-beams are located; the reflector (61) is used to reflect the sub-beams to the focusing microscope objective lens (62); and the focusing microscope objective lens (62) is used to focus each sub-beam.

9. A method for manufacturing a three-dimensional laser body with a complex structure, using the device for manufacturing a three-dimensional laser body with a complex structure according to any one of claims 1 to 8, characterized in that: The following steps are involved: Step 1, analyzing the processing requirements, and determining the number N of sub-beams used for laser processing and the spot shape of each sub-beam according to the processing requirements; the spot shape includes the spot diameter, optical path, energy and spatial distribution position of each sub-beam; Step 2, start the laser source (1), the laser source (1) emits the processing laser, adjust the beam position preset unit (2), so that the focus of the sub-beam after being focused by the microscopic focusing unit (6) corresponds to the processing position; adjust the dispersion compensation unit (3) to generate negative dispersion and perform pulse width compression on the processing laser; adjust the optical relay compensation unit (5) according to the optical path of each sub-beam; adjust the processing parameters of the acousto-optic modulation unit (4) according to the number N of sub-beams, the spot diameter, the energy, and the spatial distribution position; Step 3, the beam position presetting unit (2) receives the processing laser and adjusts the spatial position of its optical axis; Step 4, the dispersion compensation unit (3) receives the processing laser after position adjustment and performs dispersion compensation on it; Step 5, the acousto-optic modulation unit (4) receives the dispersion-compensated processing laser, divides the dispersion-compensated processing laser into N sub-beams by amplitude modulation of electrical signals of different and / or same frequencies, and adjusts the spatial position of each sub-beam; Step 6: The optical relay compensation unit (5) receives the N sub-beams and adjusts the optical path of each sub-beam; Step 7, the micro-focusing unit (6) receives each sub-beam and focuses it; Step 8: Processing is performed using the focused N sub-beams.

10. The laser three-dimensional body manufacturing method for complex structures according to claim 9, characterized in that: In step 2, the processing parameters of the acousto-optic modulation unit (4) are adjusted according to the number N, energy, and spatial distribution position of the sub-beams. Specifically, according to the number N, the spot diameter, energy, and spatial distribution position of the sub-beams, the controller (46) is adjusted to output a first electrical signal amplitude modulation of different and / or the same magnitude and frequency to the X-direction acousto-optic modulator (41) through the X-direction acousto-optic driver (44), and the controller (46) is adjusted to output a second electrical signal amplitude modulation of different and / or the same magnitude and frequency to the Y-direction acousto-optic modulator (43) through the Y-direction acousto-optic driver (45); Step 3 specifically includes: the beam position presetting unit (2) receives the processing laser, and adjusts the angle and position of the first two-dimensional fast-reverse scanning mirror (21) and the second two-dimensional fast-reverse scanning mirror (22) through the first driving component, thereby adjusting the spatial position of the optical axis of the processing laser; Step 4 specifically includes: the dispersion compensation unit (3) receives the processing laser after position adjustment, and adjusts the distance between the first equilateral prism (31) and the second equilateral prism (32) through the third driving component to perform dispersion compensation on the processing laser; Step 5 specifically comprises: the X-direction pressure energy transducer (412) receives a plurality of first electrical signal amplitude modulations of different and / or same magnitudes and frequencies, and converts the first electrical signal amplitude modulations into a first mechanical wave field, and the X-direction acousto-optic crystal (411) vibrates along with the first mechanical wave field, so that the refractive index of the X-direction acousto-optic crystal (411) changes according to the change rule of the first electrical signal amplitude modulation, and forms a first ultrasonic grating, and the first ultrasonic grating modulates the processing laser so that the processing laser deflects at different angles, thereby dividing the processing laser into a plurality of first sub-beams with different and / or same energies and different and / or same spatial positions in the X direction, and the first sub-beams correspond to the first electrical signal amplitude modulation; The first sub-beam is changed from linearly polarized light to circularly polarized light by passing through a λ / 2 wave plate (42); The Y-direction pressure energy transducer (432) receives a plurality of second electrical signal amplitude modulations of different and / or same magnitudes and frequencies, and converts them into a second mechanical wave field, and the Y-direction acousto-optic crystal (431) vibrates along with the second mechanical wave field, so that the refractive index of the Y-direction acousto-optic crystal (431) changes according to the variation law of the second electrical signal amplitude modulation, thereby forming a second ultrasonic grating, and the second ultrasonic grating modulates a corresponding number of first sub-beams, so that a corresponding number of first sub-beams are divided into a plurality of second sub-beams with different and / or same energies and different and / or same spatial positions in the Y direction, and the number of second sub-beams corresponds to the second electrical signal amplitude modulation; the sum of the number of undivided first sub-beams and the number of divided second sub-beams is N; Step 6 specifically includes: the optical relay compensation unit (5) receives the sub-beams, and adjusts the distance between the negative optical power lens (52) and the second positive optical power lens (53) through the second driving component, thereby changing the optical path of each sub-beam; Specifically, step 7 includes: the reflector (61) reflects each sub-beam to the focusing microscope objective lens (62), and the focusing microscope objective lens (62) focuses each sub-beam respectively.

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