Fresh air control method and system for ultra-clean laboratory

Abstract

The invention relates to the technical field of fresh air control, and discloses a fresh air control method and system for an ultra-clean laboratory. Outdoor fresh air is sent to an upper technical interlayer of a clean room after being treated by a machine room fresh air handling unit, and the machine room fresh air handling unit conducts primary treatment on the outdoor fresh air; air in the clean room returns to the clean room lower technical interlayer through the floor air return lower air return system and then returns to the clean room upper technical interlayer through the air return wall; the return air is cooled through the dry coil pipe, so that the temperature is reduced to a preset value; the return air cooled by the dry coil pipe and fresh air sent by a fresh air handling unit of the machine room are mixed in a technical interlayer on the clean room to form mixed air, air quality data of the mixed air are judged, if it is judged that the air quality standard of the mixed air reaches the standard of the clean room, the mixed air is sent into the clean room through an air supply pipeline, and the clean room is started. Otherwise, the mixed air is filtered again according to the FFU until the air quality standard of the clean room is met.

Description

Technical Field

[0001] The invention belongs to the technical field of fresh air control and relates to a fresh air control method and system for an ultra-clean laboratory. Background Art

[0002] A clean laboratory is a precision space used for specific experiments, research or manufacturing processes that require strict environmental control. It uses a series of technologies and equipment to control air quality, temperature, humidity, and the concentration of microorganisms and particulate matter to ensure the accuracy and repeatability of the experiment. Clean laboratories are widely used in various industries, including scientific research, pharmaceutical manufacturing, semiconductor industry, food safety, etc.

[0003] Most of the existing ultra-clean laboratory fresh air control methods rely on traditional HVAC systems, which have problems such as high energy consumption and low control accuracy. The FFU (fan filter unit) + dry coil system combined with the heat exchange plate control principle and the adjustment of the floor return air ventilation rate can achieve more efficient air purification and temperature and humidity control, but there is currently no optimized fresh air control method for this combined system. Summary of the invention

[0004] In view of the above problems existing in the prior art, the present invention provides a method and system for controlling fresh air in an ultra-clean laboratory, which are used to solve the above technical problems.

[0005] In order to achieve the above purpose and other purposes, the technical solution adopted by the present invention is as follows:

[0006] In a first aspect, the present invention provides a method for controlling fresh air in an ultra-clean laboratory, the method comprising the following steps:

[0007] Step 1: After being processed by the fresh air unit in the machine room, the outdoor fresh air is sent to the upper technical mezzanine of the clean room. The fresh air unit in the machine room performs preliminary processing on the outdoor fresh air to make it meet the fresh air standards required by the clean room;

[0008] Step 2: The air in the clean room returns to the lower technical mezzanine of the clean room through the under-floor return air system, and then returns to the upper technical mezzanine of the clean room through the return air wall; the return air is cooled by the dry coil to reduce its temperature to the preset value;

[0009] Step 3: The return air after the dry coil cooling treatment is mixed with the fresh air sent from the fresh air unit in the machine room in the upper technical interlayer of the clean room to form mixed air; the mixed air is filtered through the FFU to remove particles and pollutants in the air, and the air quality data of the mixed air is obtained;

[0010] Step 4: Judge the air quality data of the mixed air. If it is judged that the air quality standard of the mixed air meets the standard of the clean room, the mixed air will be sent into the clean room through the air supply duct. Otherwise, the mixed air will be filtered again according to the FFU until it meets the air quality standard of the clean room.

[0011] Exemplarily, the air quality data of the mixed wind is divided into air cleanliness, air temperature and air humidity.

[0012] Exemplarily, the air quality data of the mixed wind is obtained, and the specific acquisition process is as follows:

[0013] Use a particle counter to measure the number of particles in the mixed air. Based on the measurement results, compare the cleanliness level with the clean room standard to determine the air cleanliness of the mixed air.

[0014] Mixed air temperature T 混合 The calculation formula is as follows:

[0015]

[0016] T 混合 is the air temperature of the mixed wind, T 回风 is the temperature of the return air in the mixed air, T 新风 is the temperature of fresh air in the mixed wind, m 回风 is the mass flow rate of return air in the mixed air, m 新风 is the mass flow rate of fresh air in the mixed air;

[0017] Air humidity of mixed wind W 混合 The calculation formula is as follows:

[0018]

[0019] Among them, β1 and β2 are the weight factors of the set absolute humidity and relative humidity respectively, and β1+β2=1, W 绝对 is the absolute humidity of the mixed air, W 相对 is the relative humidity of the mixed wind;

[0020]

[0021] W 回风 is the absolute humidity of the return air in the mixed air, W 新风 is the absolute humidity of fresh air in the mixed wind;

[0022]

[0023] W 饱和 (T 混合 ) is the air temperature T corresponding to the mixed wind 混合 Saturated absolute humidity.

[0024] Exemplarily, the air quality data of the mixed wind is judged, and the specific judgment logic is:

[0025] The air cleanliness of the mixed air is compared with the predefined standard air cleanliness threshold of the clean room. If the air cleanliness of the mixed air is greater than the predefined standard air cleanliness threshold of the clean room, it is determined that the air cleanliness of the mixed air meets the air quality standard of the clean room; otherwise, it is determined that the air cleanliness of the mixed air does not meet the air quality standard of the clean room;

[0026] The air temperature of the mixed air is compared with a predefined standard air temperature threshold of the clean room. If the air temperature of the mixed air is greater than the predefined standard air temperature threshold of the clean room, it is determined that the air temperature of the mixed air meets the air quality standard of the clean room; otherwise, it is determined that the air temperature of the mixed air does not meet the air quality standard of the clean room;

[0027] The air humidity of the mixed air is compared with a predefined standard air humidity threshold of the clean room. If the air humidity of the mixed air is greater than the predefined standard air humidity threshold of the clean room, it is determined that the air humidity of the mixed air meets the air quality standard of the clean room; otherwise, it is determined that the air humidity of the mixed air does not meet the air quality standard of the clean room;

[0028] If the air cleanliness, air temperature and air humidity of the mixed air all meet the air quality standards of the clean room, then the air quality standards of the mixed air are judged to have met the standards of the clean room; otherwise, the air quality standards of the mixed air are judged to have not met the standards of the clean room.

[0029] Exemplarily, the mixed air is filtered according to the FFU until it meets the clean room air quality standard. The specific operation logic is:

[0030] Obtaining the initial particle concentration of the mixed air, selecting a filter based on the initial particle concentration, obtaining a filter adapted to the mixed air, and obtaining the filter efficiency α adapted to the mixed air;

[0031] The particle concentration in the air after the mixed air is filtered once is calculated as C2 = C1 × (1-α), where C1 is the particle concentration in the air before the first filtration;

[0032] The particle concentration in the air after the mixed air is filtered once is compared with the predefined standard air allowable particle concentration threshold for the clean room. If the particle concentration in the air after the mixed air is filtered once is less than the predefined standard air allowable particle concentration threshold for the clean room, the mixed air is filtered twice. If the particle concentration in the air after the mixed air is filtered once is greater than or equal to the predefined standard air allowable particle concentration threshold for the clean room, it is determined that the air quality standard of the mixed air meets the standard of the clean room, and the mixed air is sent into the clean room through the air supply duct.

[0033] In a second aspect, the present invention provides a fresh air control system for an ultra-clean laboratory, which is based on the implementation of the first aspect and includes a fresh air preliminary processing module, a dry coil cooling processing module, a suitable parameter analysis module, an air quality assessment module and a device control module, wherein the above modules are connected by wired and / or wireless connection to achieve data transmission between the modules;

[0034] Fresh air preliminary processing module: After being processed by the fresh air unit in the machine room, the outdoor fresh air is sent to the upper technical mezzanine of the clean room. The fresh air unit in the machine room performs preliminary processing on the outdoor fresh air to make it meet the fresh air standards required by the clean room;

[0035] Dry coil cooling treatment module: The air in the clean room returns to the lower technical mezzanine of the clean room through the under-floor return air system, and then returns to the upper technical mezzanine of the clean room through the return air wall; the return air is cooled by the dry coil to reduce its temperature to the preset value.

[0036] Suitable parameter analysis module: The return air after the dry coil cooling treatment is mixed with the fresh air sent from the fresh air unit in the machine room in the upper technical mezzanine of the clean room to form mixed air; the mixed air is filtered through the FFU to remove particles and pollutants in the air and obtain the air quality data of the mixed air;

[0037] The air quality assessment module judges the air quality data of the mixed air. If it is judged that the air quality standard of the mixed air meets the standard of the clean room, the mixed air will be sent into the clean room through the air supply duct. Otherwise, the mixed air will be filtered again according to the FFU until it meets the air quality standard of the clean room.

[0038] The device control module includes a heat exchange plate control subunit and a floor return air ventilation rate control subunit.

[0039] Exemplarily, the specific operation logic of the heat exchange plate control subunit is:

[0040] Use the heat exchanger to exchange heat between fresh air and exhaust air, and calculate the heat exchange efficiency T 排风出 is the exhaust outlet temperature, T 新风进 is the fresh air inlet temperature, T 排风进is the exhaust air inlet temperature;

[0041] By real-time monitoring of the inlet and outlet temperatures of the heat exchanger, the heat exchange efficiency is calculated in real time, and the flow rates of fresh air and exhaust air are adjusted according to the heat exchange efficiency.

[0042] Exemplarily, the specific operation logic of the floor return air ventilation rate control subunit is:

[0043] Control the airflow organization in the laboratory by adjusting the opening of the floor return air vents;

[0044] Set reasonable floor return air ventilation rate Q 回风 is the return air volume, Q 总风量 is the total air volume;

[0045] By real-time monitoring of the return air volume and total air volume in the laboratory, the floor return air ventilation rate R is calculated, and the opening of the floor return air vents is dynamically adjusted according to the actual needs in the laboratory.

[0046] In a third aspect, the present invention provides an electronic device, comprising: a processor and a memory, wherein the memory stores a computer program that can be called by the processor;

[0047] The processor executes a method for controlling fresh air in an ultra-clean laboratory by calling a computer program stored in the memory.

[0048] In a fourth aspect, the present invention provides a computer program product stored on a computer-readable medium, including a computer-readable program, which, when executed on an electronic device, provides a user input interface to implement the ultra-clean laboratory fresh air control method.

[0049] As described above, the present invention provides a method and system for controlling fresh air in ultra-clean laboratories, which at least has the following features:

[0050] Beneficial effects:

[0051] The present invention provides a method and system for controlling fresh air in an ultra-clean laboratory. The outdoor fresh air is processed by the fresh air unit in the machine room and then sent to the upper technical mezzanine of the clean room. The fresh air unit in the machine room performs preliminary processing on the outdoor fresh air, and the air in the clean room returns to the lower technical mezzanine of the clean room through the return air system under the floor return air, and then returns to the upper technical mezzanine of the clean room through the return air wall; the return air is cooled by the dry coil to reduce its temperature to a preset value; the return air after the dry coil cooling treatment is mixed with the fresh air sent from the fresh air unit in the machine room in the upper technical mezzanine of the clean room to form a mixed wind, which is used to cool the mixed air. The air quality data of the mixed wind is used for judgment. If it is judged that the air quality standard of the mixed wind meets the standard of the clean room, the mixed wind will be sent into the clean room through the air supply duct. Otherwise, the mixed wind will be filtered again according to the FFU until it meets the air quality standard of the clean room. It can effectively remove pollutants such as particles and bacteria in the air, thereby ensuring the production environment of the product and avoiding product defects or experimental failures caused by pollution such as dust and bacteria. Through the design of the return air system, the air in the clean room can be recycled, reducing the demand for fresh air and thus reducing energy consumption. At the same time, the use of dry coils can cool the return air more efficiently, which is more energy-saving than traditional air conditioning and refrigeration systems. By real-time monitoring and judgment of the air quality data of the mixed wind, the air treatment strategy can be adjusted in time to ensure that the air quality in the clean room always meets the standard. This intelligent control method improves the accuracy and response speed of air quality management. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0053] Figure 1 It is a schematic diagram of the connection of each step of the method of the present invention.

[0054] Figure 2 It is a schematic diagram of the structure of each module of the system of the present invention.

[0055] Figure 3 The figure is a schematic diagram of the structure of an electronic device. DETAILED DESCRIPTION

[0056] The above contents in combination with the implementation of the present invention are merely examples and explanations of the concept of the present invention. The technical personnel in the relevant technical field may make various modifications or supplements to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the concept of the invention or exceed the scope defined by the claims, they shall all fall within the protection scope of the present invention.

[0057] Example 1

[0058] See also Figure 1 As shown, a method for controlling fresh air in an ultra-clean laboratory comprises the following steps:

[0059] Step 1: After being processed by the fresh air unit in the machine room, the outdoor fresh air is sent to the upper technical mezzanine of the clean room. The fresh air unit in the machine room performs preliminary processing on the outdoor fresh air to make it meet the fresh air standards required by the clean room;

[0060] Step 2: The air in the clean room returns to the lower technical mezzanine of the clean room through the under-floor return air system, and then returns to the upper technical mezzanine of the clean room through the return air wall; the return air is cooled by the dry coil to reduce its temperature to the preset value.

[0061] Step 3: The return air after the dry coil cooling treatment is mixed with the fresh air sent from the fresh air unit in the machine room in the upper technical interlayer of the clean room to form mixed air; the mixed air is filtered through the FFU to remove particles and pollutants in the air, and the air quality data of the mixed air is obtained;

[0062] Step 4: Judge the air quality data of the mixed air. If it is judged that the air quality standard of the mixed air meets the standard of the clean room, the mixed air will be sent into the clean room through the air supply duct. Otherwise, the mixed air will be filtered again according to the FFU until it meets the air quality standard of the clean room.

[0063] Based on the above embodiment, the air quality data of the mixed wind is divided into air cleanliness, air temperature and air humidity.

[0064] Based on the above embodiment, the air quality data of the mixed wind is obtained, and the specific acquisition process is as follows:

[0065] Use a particle counter to measure the number of particles in the mixed air. Based on the measurement results, compare the cleanliness level with the clean room standard (such as IS014644-1) to determine the air cleanliness of the mixed air.

[0066] Mixed air temperature T 混合 The calculation formula is as follows:

[0067]

[0068] T 混合 is the air temperature of the mixed wind, T 回风 is the temperature of the return air in the mixed air, T 新风 is the temperature of fresh air in the mixed wind, m 回风 is the mass flow rate of return air in the mixed air, m 新风 is the mass flow rate of fresh air in the mixed air;

[0069] Air humidity of mixed wind W 混合 The calculation formula is as follows:

[0070]

[0071] Among them, β1 and β2 are the weight factors of the set absolute humidity and relative humidity respectively, and β1+β2=1, W 绝对 is the absolute humidity of the mixed air, W 相对 is the relative humidity of the mixed wind;

[0072]

[0073] W 回风 is the absolute humidity of the return air in the mixed air, W 新风 is the absolute humidity of fresh air in the mixed wind;

[0074]

[0075] W 饱和 (T 混合 ) is the air temperature T corresponding to the mixed wind 混合 Saturated absolute humidity.

[0076] Based on the above embodiment, the air quality data of the mixed wind is judged, and the specific judgment logic is:

[0077] The air cleanliness of the mixed air is compared with the predefined standard air cleanliness threshold of the clean room. If the air cleanliness of the mixed air is greater than the predefined standard air cleanliness threshold of the clean room, it is determined that the air cleanliness of the mixed air meets the air quality standard of the clean room; otherwise, it is determined that the air cleanliness of the mixed air does not meet the air quality standard of the clean room;

[0078] The air temperature of the mixed air is compared with a predefined standard air temperature threshold of the clean room. If the air temperature of the mixed air is greater than the predefined standard air temperature threshold of the clean room, it is determined that the air temperature of the mixed air meets the air quality standard of the clean room; otherwise, it is determined that the air temperature of the mixed air does not meet the air quality standard of the clean room;

[0079] The air humidity of the mixed air is compared with a predefined standard air humidity threshold of the clean room. If the air humidity of the mixed air is greater than the predefined standard air humidity threshold of the clean room, it is determined that the air humidity of the mixed air meets the air quality standard of the clean room; otherwise, it is determined that the air humidity of the mixed air does not meet the air quality standard of the clean room;

[0080] If the air cleanliness, air temperature and air humidity of the mixed air all meet the air quality standards of the clean room, then the air quality standards of the mixed air are judged to have met the standards of the clean room; otherwise, the air quality standards of the mixed air are judged to have not met the standards of the clean room.

[0081] On the basis of the above embodiment, the mixed air is filtered according to the FFU until it meets the clean room air quality standard. The specific operation logic is:

[0082] Obtaining the initial particle concentration of the mixed air, selecting a filter based on the initial particle concentration, obtaining a filter adapted to the mixed air, and obtaining the filter efficiency α adapted to the mixed air;

[0083] The number concentration of particulate matter, in particles / cubic meter;

[0084] FFUs are usually equipped with HEPA (High Efficiency Particulate Air) filters or ULPA (Ultra High Efficiency Particulate Air) filters. HEPA filters usually capture more than 99.97% of particles with a diameter of 0.3 microns and larger, while ULPA filters capture more than 99.999% of particles with a diameter of 0.12 microns and larger.

[0085] The particle concentration in the air after the mixed air is filtered once is calculated as C2 = C1 × (1-α), where C1 is the particle concentration in the air before the first filtration;

[0086] The particle concentration in the air after the mixed air is filtered once is compared with the predefined standard air allowable particle concentration threshold for the clean room. If the particle concentration in the air after the mixed air is filtered once is less than the predefined standard air allowable particle concentration threshold for the clean room, the mixed air is filtered twice. If the particle concentration in the air after the mixed air is filtered once is greater than or equal to the predefined standard air allowable particle concentration threshold for the clean room, it is determined that the air quality standard of the mixed air meets the standard of the clean room, and the mixed air is sent into the clean room through the air supply duct.

[0087] Example 2

[0088] See also Figure 2 As shown, a fresh air control system for an ultra-clean laboratory includes a fresh air preliminary processing module, a dry coil cooling processing module, a suitable parameter analysis module, an air quality assessment module and a device control module, wherein the above modules are connected by wired and / or wireless connection to realize data transmission between the modules;

[0089] The dry coil cooling processing module is respectively connected to the fresh air preliminary processing module and the suitable parameter analysis module, and the air quality assessment module is respectively connected to the suitable parameter analysis module and the device control module.

[0090] Fresh air preliminary processing module: After being processed by the fresh air unit in the machine room, the outdoor fresh air is sent to the upper technical mezzanine of the clean room. The fresh air unit in the machine room performs preliminary processing on the outdoor fresh air to make it meet the fresh air standards required by the clean room;

[0091] Dry coil cooling treatment module: The air in the clean room returns to the lower technical mezzanine of the clean room through the under-floor return air system, and then returns to the upper technical mezzanine of the clean room through the return air wall; the return air is cooled by the dry coil to reduce its temperature to the preset value.

[0092] Suitable parameter analysis module: The return air after the dry coil cooling treatment is mixed with the fresh air sent from the fresh air unit in the machine room in the upper technical mezzanine of the clean room to form mixed air; the mixed air is filtered through the FFU to remove particles and pollutants in the air and obtain the air quality data of the mixed air;

[0093] The air quality assessment module judges the air quality data of the mixed air. If it is judged that the air quality standard of the mixed air meets the standard of the clean room, the mixed air will be sent into the clean room through the air supply duct. Otherwise, the mixed air will be filtered again according to the FFU until it meets the air quality standard of the clean room.

[0094] The device control module includes a heat exchange plate control subunit and a floor return air ventilation rate control subunit.

[0095] Based on the above embodiment, the specific operation logic of the heat exchange plate control subunit is:

[0096] Use the heat exchanger to exchange heat between fresh air and exhaust air, and calculate the heat exchange efficiency T 排风出 is the exhaust outlet temperature, T 新风进 is the fresh air inlet temperature, T 排风进 is the exhaust air inlet temperature;

[0097] By real-time monitoring of the inlet and outlet temperatures of the heat exchanger, the heat exchange efficiency is calculated in real time, and the flow rates of fresh air and exhaust air are adjusted according to the heat exchange efficiency.

[0098] Based on the above embodiment, the specific operation logic of the floor return air ventilation rate control subunit is as follows:

[0099] Control the airflow organization in the laboratory by adjusting the opening of the floor return air vents;

[0100] Set reasonable floor return air ventilation rate Q 回风 is the return air volume, Q 总风量 is the total air volume;

[0101] By real-time monitoring of the return air volume and total air volume in the laboratory, the floor return air ventilation rate R is calculated, and the opening of the floor return air vents is dynamically adjusted according to the actual needs in the laboratory.

[0102] Example 3

[0103] An electronic device according to an exemplary embodiment includes: a processor and a memory, wherein the memory stores a computer program that can be called by the processor;

[0104] The processor executes the above-mentioned ultra-clean laboratory fresh air control method by calling the computer program stored in the memory.

[0105] Figure 3 It is a structural schematic diagram of an electronic device provided in an embodiment of the present application. The electronic device may have relatively large differences due to different configurations or performances, and may include one or more processors (Central Processing Units, CPU) and one or more memories, wherein at least one computer program is stored in the memory, and the at least one computer program is loaded and executed by the processor to implement a super-clean laboratory fresh air control method provided in the above-mentioned various method embodiments.

[0106] The electronic device may also include other components for realizing the functions of the device, for example, the electronic device may also have components such as a wired or wireless network interface and an input / output interface for input and output. The embodiments of the present application will not be described in detail here.

[0107] This embodiment also provides a computer program product stored on a computer-readable medium, including a computer-readable program, which, when executed on an electronic device, provides a user input interface to implement the ultra-clean laboratory fresh air control method.

[0108] It should be understood that in the various embodiments of the present application, the size of the serial numbers of the above-mentioned processes does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0109] It should be understood that determining B based on A does not mean determining B only based on A. B can also be determined based on A and / or other information.

[0110] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

[0111] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for controlling fresh air in an ultra-clean laboratory, characterized in that: include: Step 1: After being processed by the fresh air unit in the machine room, the outdoor fresh air is sent to the upper technical mezzanine of the clean room. The fresh air unit in the machine room performs preliminary processing on the outdoor fresh air to make it meet the fresh air standards required by the clean room; Step 2: The air in the clean room returns to the lower technical mezzanine of the clean room through the under-floor return air system, and then returns to the upper technical mezzanine of the clean room through the return air wall; the return air is cooled by the dry coil to reduce its temperature to the preset value; Step 3: The return air after the dry coil cooling treatment is mixed with the fresh air sent from the fresh air unit in the machine room in the upper technical interlayer of the clean room to form mixed air; the mixed air is filtered through the FFU to remove particles and pollutants in the air, and the air quality data of the mixed air is obtained; Step 4: Judge the air quality data of the mixed air. If it is judged that the air quality standard of the mixed air meets the standard of the clean room, the mixed air will be sent into the clean room through the air supply duct. Otherwise, the mixed air will be filtered again according to the FFU until it meets the air quality standard of the clean room.

2. A method for controlling fresh air in an ultra-clean laboratory according to claim 1, characterized in that: The air quality data of mixed wind is divided into air cleanliness, air temperature and air humidity.

3. A method for controlling fresh air in an ultra-clean laboratory according to claim 2, characterized in that: The air quality data of the mixed wind is obtained. The specific acquisition process is as follows: Use a particle counter to measure the number of particles in the mixed air. Based on the measurement results, compare the cleanliness level with the clean room standard (such as IS014644-1) to determine the air cleanliness of the mixed air. Mixed air temperature T 混合 The calculation formula is as follows: T 混合 is the air temperature of the mixed wind, T 回风 is the temperature of the return air in the mixed air, T 新风 is the temperature of fresh air in the mixed wind, m 回风 is the mass flow rate of return air in the mixed air, m 新风 is the mass flow rate of fresh air in the mixed air; Air humidity of mixed wind W 混合 The calculation formula is as follows: Among them, β1 and β2 are the weight factors of the set absolute humidity and relative humidity respectively, and β1+β2=1, W 绝对 is the absolute humidity of the mixed air, W 相对 is the relative humidity of the mixed wind; W 回风 is the absolute humidity of the return air in the mixed air, W 新风 is the absolute humidity of fresh air in the mixed wind; W 饱和 (T 混合 ) is the air temperature T corresponding to the mixed wind 混合 Saturated absolute humidity.

4. A method for controlling fresh air in an ultra-clean laboratory according to claim 2, characterized in that: The air quality data of the mixed wind is judged, and the specific judgment logic is: The air cleanliness of the mixed air is compared with the predefined standard air cleanliness threshold of the clean room. If the air cleanliness of the mixed air is greater than the predefined standard air cleanliness threshold of the clean room, it is determined that the air cleanliness of the mixed air meets the air quality standard of the clean room; otherwise, it is determined that the air cleanliness of the mixed air does not meet the air quality standard of the clean room; The air temperature of the mixed air is compared with a predefined standard air temperature threshold of the clean room. If the air temperature of the mixed air is greater than the predefined standard air temperature threshold of the clean room, it is determined that the air temperature of the mixed air meets the air quality standard of the clean room; otherwise, it is determined that the air temperature of the mixed air does not meet the air quality standard of the clean room; The air humidity of the mixed air is compared with a predefined standard air humidity threshold of the clean room. If the air humidity of the mixed air is greater than the predefined standard air humidity threshold of the clean room, it is determined that the air humidity of the mixed air meets the air quality standard of the clean room; otherwise, it is determined that the air humidity of the mixed air does not meet the air quality standard of the clean room; If the air cleanliness, air temperature and air humidity of the mixed air all meet the air quality standards of the clean room, then the air quality standards of the mixed air are judged to have met the standards of the clean room; otherwise, the air quality standards of the mixed air are judged to have not met the standards of the clean room.

5. The method for controlling fresh air in an ultra-clean laboratory according to claim 1, characterized in that: According to FFU, the mixed air is filtered until it meets the clean room air quality standards. The specific operation logic is: Obtaining the initial particle concentration of the mixed air, selecting a filter based on the initial particle concentration, obtaining a filter adapted to the mixed air, and obtaining the filter efficiency α adapted to the mixed air; The particle concentration in the air after the mixed air is filtered once is calculated as C2 = C1 × (1-α), where C1 is the particle concentration in the air before the first filtration; The particle concentration in the air after the mixed air is filtered once is compared with the predefined standard air allowable particle concentration threshold for the clean room. If the particle concentration in the air after the mixed air is filtered once is less than the predefined standard air allowable particle concentration threshold for the clean room, the mixed air is filtered twice. If the particle concentration in the air after the mixed air is filtered once is greater than or equal to the predefined standard air allowable particle concentration threshold for the clean room, it is determined that the air quality standard of the mixed air meets the standard of the clean room, and the mixed air is sent into the clean room through the air supply duct.

6. A fresh air control system for an ultra-clean laboratory, characterized by: It is implemented based on a method for controlling fresh air in an ultra-clean laboratory according to any one of claims 1 to 5, comprising a fresh air preliminary processing module, a dry coil cooling processing module, a suitable parameter analysis module, an air quality assessment module and a device control module, wherein the above modules are connected by wired and / or wireless connection to realize data transmission between the modules; Fresh air preliminary processing module: After being processed by the fresh air unit in the machine room, the outdoor fresh air is sent to the upper technical mezzanine of the clean room. The fresh air unit in the machine room performs preliminary processing on the outdoor fresh air to make it meet the fresh air standards required by the clean room; Dry coil cooling treatment module: The air in the clean room returns to the lower technical mezzanine of the clean room through the under-floor return air system, and then returns to the upper technical mezzanine of the clean room through the return air wall; the return air is cooled by the dry coil to reduce its temperature to the preset value. Suitable parameter analysis module: The return air after the dry coil cooling treatment is mixed with the fresh air sent from the fresh air unit in the machine room in the upper technical mezzanine of the clean room to form mixed air; the mixed air is filtered through the FFU to remove particles and pollutants in the air and obtain the air quality data of the mixed air; The air quality assessment module judges the air quality data of the mixed air. If it is judged that the air quality standard of the mixed air meets the standard of the clean room, the mixed air will be sent into the clean room through the air supply duct. Otherwise, the mixed air will be filtered again according to the FFU until it meets the air quality standard of the clean room. The device control module includes a heat exchange plate control subunit and a floor return air ventilation rate control subunit.

7. The ultra-clean laboratory fresh air control system according to claim 6 is characterized in that: The specific operation logic of the heat exchanger control subunit is: Use the heat exchanger to exchange heat between fresh air and exhaust air, and calculate the heat exchange efficiency T 排风出 is the exhaust outlet temperature, T 新风进 is the fresh air inlet temperature, T 排风进 is the exhaust air inlet temperature; By real-time monitoring of the inlet and outlet temperatures of the heat exchanger, the heat exchange efficiency is calculated in real time, and the flow rates of fresh air and exhaust air are adjusted according to the heat exchange efficiency.

8. The ultra-clean laboratory fresh air control system according to claim 6 is characterized in that: The specific operation logic of the floor return air ventilation rate control subunit is: Control the airflow organization in the laboratory by adjusting the opening of the floor return air vents; Set reasonable floor return air ventilation rate Q 回风 is the return air volume, Q 总风量 is the total air volume; By real-time monitoring of the return air volume and total air volume in the laboratory, the floor return air ventilation rate R is calculated, and the opening of the floor return air vents is dynamically adjusted according to the actual needs in the laboratory.

9. An electronic device, characterized in that: include: A processor and a memory, wherein the memory stores a computer program that can be called by the processor; The processor executes the ultra-clean laboratory fresh air control method as described in any one of claims 1 to 5 by calling the computer program stored in the memory.

10. A computer program product stored on a computer readable medium, characterized in that: It includes a computer-readable program, which, when executed on an electronic device, provides a user input interface to implement a method for controlling fresh air in an ultra-clean laboratory as described in any one of claims 1 to 5.

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