Rapidly detachable tool for beam line of ion implanter

Abstract

The invention discloses a tool capable of being quickly disassembled for beam lines of an ion implanter, and relates to the field of ion implanters, the tool comprises a mounting pipe and a mounting tool, an energy reduction sheet is sleeved in the mounting tool, a mounting pressing piece is fixedly mounted in the mounting tool, and a clamp assembly is arranged between the mounting pipe and the mounting tool. The cooling assembly is arranged on the mounting tool and used for cooling the working environment of the energy reduction piece, and the limiting assembly is arranged on the front face of the mounting tool and used for locking and limiting the clamp assembly and the cooling assembly. By means of the cooperative use mode of the installation pipe, the installation tool, the energy reduction piece, the clamp assembly and the limiting assembly, under the action of the locking assembly, the first limiting plate and the second limiting plate can be in a stable state to lock the clamp assembly, the clamp assembly can be directly disassembled by unlocking the locking state of the locking assembly, and the disassembly efficiency is improved. And therefore, the mounting tool and the energy-reducing sheet can be quickly disassembled and replaced.

Description

Technical Field

[0001] The invention relates to the field of ion implanters, and in particular to a quickly detachable tooling for a beam line of an ion implanter. Background Art

[0002] The working principle of the ion implanter is to use the ion beam generated by the ion source, accelerate the ions to the required energy through the acceleration and focusing system, and then guide the ion beam into the target tissue.

[0003] Energy degrading sheets are also called energy step-down devices or energy regulators. They are used in ion implanters to adjust the energy of the beam to the designed energy level. In some application scenarios, such as tumor treatment in medical applications or material science research, lower beam energy may be required. In this case, energy degrading sheets are needed to achieve fine control of the energy.

[0004] The fixing method of the energy reduction sheet needs to ensure its stability and safety under the impact of high-energy beams. Generally, bolts are used to fix the fixture to the fixed bracket of the beam line, ensuring that the energy reduction sheet will not loosen or shift under the impact of high-energy beams. The energy reduction sheet is generally fixed to a certain section of the beam transport line, so it is in a high-dose irradiation environment, and the energy reduction sheet is a consumable and needs to be replaced frequently. In order to ensure the health of the staff and shorten the irradiation time, this requires that the fixing method of the energy reduction sheet has the characteristics of rapid disassembly and assembly. The above-mentioned bolt fixing method requires a lot of time to remove the energy reduction sheet fixture from the fixed bracket of the beam line, which is very detrimental to the health of the staff, and thus has certain defects. Summary of the invention

[0005] The object of the present invention is to provide a quickly detachable tooling for a beam line of an ion implanter, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above object, the present invention provides the following technical solution: a quickly detachable tool for an ion implanter beam line, comprising a mounting tube and a mounting tool, wherein an energy reduction sheet is sleeved inside the mounting tool, and a mounting pressure piece for fixing the energy reduction sheet is fixedly installed inside the mounting tool;

[0007] Also includes:

[0008] A fixture assembly, wherein the fixture assembly is disposed between the mounting tube and the mounting tool;

[0009] A cooling component, which is arranged on the installation tool and is used to cool the working environment of the energy reduction sheet;

[0010] A limit assembly is arranged on the front side of the installation tool, and is used to lock and limit the clamp assembly and the cooling assembly.

[0011] Preferably, the clamp assembly comprises:

[0012] A clamping ring, the mounting tube and the mounting fixture have opposite sides thereof fixedly connected to the clamping ring;

[0013] A fixing member and a hinged member, wherein the fixing member is rotatably connected via the hinged member, and an inner wall of the fixing member is provided with an arc groove matching the clamping ring;

[0014] A convex block is fixedly connected to the front side of the fixing member, and the convex block is linked with the limiting assembly.

[0015] Preferably, the cooling component comprises:

[0016] A flow chamber, the flow chamber is provided on the installation tool, and the flow chamber is used to flow a coolant for cooling the installation tool;

[0017] A sealing plate, the sealing plate being arranged on the front side of the installation tool;

[0018] A butt joint, the butt joint is installed on a side of the sealing plate facing the installation tool, and the outer wall of the butt joint is squeezed and sleeved with the inner cavity of the flow chamber;

[0019] A connecting pipe, one end of which is connected to the butt joint;

[0020] A rubber block and a butt joint plate, wherein the rubber block is fixedly connected between the butt joint plate and the sealing plate, and the butt joint plate is linked with the limiting assembly.

[0021] Preferably, the limiting component comprises:

[0022] A first limiting plate and a second limiting plate, wherein the first limiting plate and the second limiting plate are respectively clamped on opposite sides of adjacent protrusions;

[0023] A locking assembly is provided on the first limiting plate and the second limiting plate, and is used to lock the distance between the first limiting plate and the second limiting plate, and the locking assembly is linked with the docking plate.

[0024] Preferably, the locking assembly comprises:

[0025] A first mounting block, wherein the first mounting block is fixedly connected to a side of the first limiting plate facing the second limiting plate;

[0026] A second mounting block, wherein the second mounting block is fixedly connected to a side of the second limiting plate facing the first limiting plate, and the second mounting block is located at a side of the first mounting block;

[0027] A locking block is clamped between the first mounting block and the second mounting block.

[0028] Preferably, the locking assembly further comprises:

[0029] A driving block, the driving block is slidably disposed inside the first mounting block, and the driving block is used to squeeze the locking block to move toward the second mounting block;

[0030] An adjusting screw, wherein the outer wall of the adjusting screw is threadedly connected to the first mounting block, one end of the adjusting screw is rotatably connected to the driving block, and the other end of the adjusting screw is fixedly connected to a handle;

[0031] An extrusion head, the extrusion head is fixedly connected to the back of the driving block, and one end of the extrusion head is pressed and fitted with the docking plate;

[0032] A reset component is arranged between the locking block and the first mounting block.

[0033] Preferably, a connecting hole is provided on the side of the first mounting block, one side of the outer wall of the locking block is slidably connected to the connecting hole, a locking hole is provided on one side of the second mounting block, a first inclined slope is provided on one side of the bottom of the locking block, and the locking block squeezes the second mounting block through the first inclined slope.

[0034] Preferably, a mounting groove matching the driving block is provided on the back side of the first mounting block, the inner cavity of the mounting groove is linked to the inner cavity of the connecting hole, a second inclined slope is provided on the side of the driving block, a guide groove is provided on the side of the locking block facing the driving block, and the second inclined slope on the side of the driving block is squeezed and fit with the inner wall of the guide groove.

[0035] Preferably, the reset component comprises:

[0036] A first fixing block, wherein the first fixing block is fixedly connected to the outside of the locking block;

[0037] A slide groove, wherein the slide groove is provided at the top and the bottom of the inner wall of the connecting hole, and the first fixing block is slidably sleeved inside the slide groove;

[0038] A second fixing block, the second fixing block being fixedly connected to an end of the inner cavity of the chute;

[0039] A guide rod, the end of which is fixedly connected to the second fixing block, and the outer wall of the guide rod is slidably interlaced with the first fixing block;

[0040] A return spring is slidably sleeved on the outside of the guide rod, and the return spring is located between the first fixing block and the second fixing block.

[0041] Preferably, a positioning block is fixedly connected to one side opposite to the first limiting plate and the second limiting plate, a positioning hole is provided on the top of the protrusion, an outer wall of the positioning block is slidably connected to the inner cavity of the positioning hole, and a positioning rod is fixedly connected to the side of the first limiting plate facing the second limiting plate, and the bottom of the outside of the positioning rod is slidably connected to the second limiting plate.

[0042] Technical effects and advantages of the present invention:

[0043] (1) The present invention utilizes the coordinated use of the installation tube, the installation tool, the energy reduction sheet, the fixture assembly and the limit assembly. The limit assembly includes a first limit plate, a second limit plate and a locking assembly. Under the action of the locking assembly, the first limit plate and the second limit plate can be in a stable state to lock the fixture assembly. When the locking state of the locking assembly is released, the fixture assembly can be directly disassembled, thereby quickly disassembling and replacing the installation tool and the energy reduction sheet.

[0044] (2) The present invention utilizes the coordinated use of a cooling component, a first limit plate, a second limit plate and a locking component. The locking component uses an adjusting screw to push the driving block to move so that the locking block engages with the second mounting block, thereby locking the distance between the first limit plate and the second limit plate, thereby making the first limit plate and the second limit plate in a stable state to lock the fixture component. In addition, the adjusting screw pushes the driving block to move and can also disassemble the cooling component on the installation tooling, thereby further improving the efficiency of disassembly and replacement of the installation tooling and the energy reduction sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0046] Figure 2 It is a schematic diagram of the overall structure of the installation tool of the present invention.

[0047] Figure 3 It is a schematic diagram of the overall structure of the fixing member of the present invention.

[0048] Figure 4 This is a schematic diagram of the internal structure of the front side of the installation tool of the present invention.

[0049] Figure 5 This is a schematic diagram of the internal structure of the installation tool side of the present invention.

[0050] Figure 6 It is a schematic diagram of the internal structure of part of the front side of the present invention.

[0051] Figure 7 This is a schematic diagram of the internal structure of the first mounting block of the present invention from the front.

[0052] Figure 8It is a schematic diagram of the internal structure of the locking block and the second installation block of the present invention when they are connected.

[0053] Fig. 9 It is a schematic diagram of the internal structure of the locking block and the second mounting block separated from each other in the top view of the present invention.

[0054] In the figure: 1, installation pipe; 2, installation tool; 3, energy reduction sheet; 4, installation pressure piece; 5, clamp assembly; 51, clamping ring; 52, fixing piece; 53, hinged piece; 54, arc groove; 55, bump; 6, cooling assembly; 61, flow chamber; 62, sealing plate; 63, docking joint; 64, connecting pipe; 65, rubber block; 66, docking plate; 7, limit assembly; 71, first limit plate; 72, second limit plate; 73, locking assembly; 731. First mounting block; 732. Second mounting block; 733. Locking block; 734. Driving block; 735. Extrusion head; 736. Adjusting screw; 737. Handle; 738. Connecting hole; 739. Locking hole; 7310. Mounting groove; 7311. First fixing block; 7312. Return spring; 7313. Second fixing block; 7314. Guide rod; 7315. Guide groove; 74. Positioning block; 75. Positioning hole; 76. Positioning rod. DETAILED DESCRIPTION

[0055] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0056] The present invention provides Figure 1-9The quick-detachable tooling for the beam line of an ion implanter shown in the figure comprises a mounting tube 1 and a mounting tooling 2. The mounting tube 1 is used to transport an ion beam. An energy reduction sheet 3 is sleeved inside the mounting tooling 2. A mounting pressure piece 4 for fixing the energy reduction sheet 3 is fixed inside the mounting tooling 2. The mounting pressure piece 4 is fixed to the mounting tooling 2 by bolts, thereby ensuring the stability of the energy reduction sheet 3 when installed inside the mounting tooling 2. The figure also comprises a clamp assembly 5, a cooling assembly 6 and a limiting assembly 7. The clamp assembly 5 is arranged between the mounting tube 1 and the mounting tooling 2. Under the action of the clamp assembly 5, the stability of the mounting tooling 2 installed between the two mounting tubes 1 can be ensured. The cooling assembly 6 is arranged on the mounting tooling 2. 2, the cooling component 6 is used to cool the working environment of the energy reduction sheet 3, the limit component 7 is arranged on the front side of the installation tool 2, and the limit component 7 is used to lock and limit the clamp component 5 and the cooling component 6, that is, under the action of the limit component 7, the stability of the installation of the clamp component 5 on the installation tool 2 can be ensured, and the cooling component 6 installed on the installation tool 2 can also be locked. By releasing the limit component 7, the installation tool 2 can be quickly separated from the cooling component 6 and the clamp component 5, so that the installation tool 2 and the energy reduction sheet 3 can be quickly disassembled and installed. This replacement process is easy to operate and has a low error rate. The installation can be completed in a short time, which greatly shortens the time the staff is exposed to radiation.

[0057] Specifically, the clamp assembly 5 includes a snap ring 51, a fixing member 52, a hinge 53 and a protrusion 55. The opposite sides of the mounting tube 1 and the mounting tool 2 are fixedly connected to the snap ring 51. The two corresponding fixing members 52 are rotatably connected via the hinge 53. The inner wall of the fixing member 52 is provided with an arc groove 54 matching the snap ring 51. The protrusion 55 is fixedly connected to the front side of the fixing member 52. The protrusion 55 is linked with the limiting assembly 7, so that the protrusions 55 on the front sides of the two fixing members 52 are locked by the limiting assembly 7, so that the two fixing members 52 can lock the snap rings 51 on the mounting tube 1 and the mounting tool 2, thereby ensuring the stability of the relative installation of the mounting tube 1 and the mounting tool 2. The locking of the two protrusions 55 by the limiting assembly 7 can open the two fixing members 52, thereby facilitating the disassembly and installation of the mounting tool 2.

[0058] Further, the cooling assembly 6 includes a flow chamber 61, a sealing plate 62, a butt joint 63, a connecting pipe 64, a rubber block 65 and a butt joint plate 66. The flow chamber 61 is opened on the installation tool 2. The flow chamber 61 is used to flow the cooling liquid for cooling the installation tool 2. The sealing plate 62 is arranged on the front of the installation tool 2. The butt joint 63 is installed on the side of the sealing plate 62 facing the installation tool 2. The outer wall of the butt joint 63 is squeezed and sleeved with the inner cavity of the flow chamber 61, and the outer wall of the butt joint 63 is sleeved with a sealing sleeve. , which can improve the sealing between the butt joint 63 and the flow chamber 61. One end of the connecting pipe 64 is connected to the butt joint 63. The rubber block 65 is fixedly connected between the butt plate 66 and the sealing plate 62. The two connecting pipes 64 are respectively connected to the external water circulation conveying system. The two connecting pipes 64 are respectively water inlet and water outlet pipes, so that the coolant flowing inside the flow chamber 61 cools down the installation tooling 2 and the energy reduction sheet 3, thereby improving the service life of the energy reduction sheet 3. The butt plate 66 is linked with the limit assembly 7.

[0059] The first and second limit plates 71 and 72 are respectively connected to the opposite sides of the adjacent protrusions 55. The locking assembly 73 is arranged on the first and second limit plates 71 and 72. The locking assembly 73 is used to lock the distance between the first and second limit plates 71 and 72. The locking assembly 73 is linked with the docking plate 66. Under the action of the locking assembly 73, the first and second limit plates 71 and 72 can press the two protrusions 55 together, thereby ensuring that the two fixed The component 52 ensures the stability of locking the two clamping rings 51. The first limiting plate 71 and the second limiting plate 72 are fixedly connected to the opposite side with a positioning block 74. A positioning hole 75 is provided on the top of the protrusion 55. The outer wall of the positioning block 74 is slidably sleeved with the inner cavity of the positioning hole 75. The first limiting plate 71 is fixedly connected to the side facing the second limiting plate 72 with a positioning rod 76. The bottom of the outer part of the positioning rod 76 is slidably sleeved with the second limiting plate 72. The positioning block 74 and the positioning rod 76 can improve the stability of the first limiting plate 71 and the second limiting plate 72 being clamped on the opposite side of the two protrusions 55.

[0060] The locking block 733 is preferably a first mounting block 731, a second mounting block 732, and a locking block 733. The first mounting block 731 is fixedly connected to a side of the first limiting plate 71 facing the second limiting plate 72, the second mounting block 732 is fixedly connected to a side of the second limiting plate 72 facing the first limiting plate 71, the second mounting block 732 is located on the side of the first mounting block 731, and the locking block 733 is clamped between the first mounting block 731 and the second mounting block 732. The locking block 733 can be pressed by squeezing the first mounting block 731. The second mounting block 732 reduces the distance between the second limiting plate 72 and the first limiting plate 71, so that the first limiting plate 71 and the second limiting plate 72 squeeze and clamp the two protrusions 55. The locking assembly 73 also includes a driving block 734, an adjusting screw 736, an extrusion head 735 and a reset assembly. The driving block 734 is slidably arranged inside the first mounting block 731. The driving block 734 is used to squeeze the locking block 733 toward the second mounting block 732. The outer wall of the adjusting screw 736 is aligned with the first mounting block 73 1 is threadedly connected, one end of the adjusting screw 736 is rotatably connected to the driving block 734, and the other end of the adjusting screw 736 is fixedly connected to a handle 737. The handle 737 is used to drive the adjusting screw 736 to rotate, so that the adjusting screw 736 drives the driving block 734 to move toward the installation tool 2 to squeeze the two locking blocks 733, and the extrusion head 735 is fixedly connected to the back of the driving block 734. One end of the extrusion head 735 is pressed and fit with the docking plate 66, and the adjusting screw 736 drives the driving block 734 toward the installation tool 2 to squeeze the two locking blocks 733. When the tool 2 moves, the extrusion head 735 can also extrude the docking plate 66, thereby squeezing and locking the sealing plate 62, thereby ensuring the stability of the sealing plate 62 driving the docking head 63 to dock with the flow chamber 61. The reset component is arranged between the locking block 733 and the first mounting block 731. When the adjusting screw 736 drives the driving block 734 to move away from the installation tool 2, the reset component can drive the locking block 733 to move toward the inside of the first mounting block 731, so that the locking block 733 is separated from the second mounting block 732.

[0061] In particular, a connecting hole 738 is provided on the side of the first mounting block 731, one side of the outer wall of the locking block 733 is slidably connected with the connecting hole 738, a locking hole 739 is provided on one side of the second mounting block 732, and a first inclined slope is provided on one side of the bottom of the locking block 733, and the locking block 733 squeezes the second mounting block 732 through the first inclined slope. Figure 7As shown, when the locking block 733 moves toward the second mounting block 732, the locking block 733 will squeeze the second mounting block 732 to move toward the first limiting plate 71, thereby causing the second limiting plate 72 to move toward the first limiting plate 71, thereby reducing the distance between the first limiting plate 71 and the second limiting plate 72. The back side of the first mounting block 731 is provided with a mounting groove 7310 that matches the driving block 734. The inner cavity of the mounting groove 7310 and the inner cavity of the connecting hole 738 are linked to each other. A second inclined slope is provided on the side of the driving block 734. A guide groove 7315 is provided on the side of the locking block 733 facing the driving block 734. The second inclined slope on the side of the driving block 734 is squeezed and fitted with the inner wall of the guide groove 7315, as shown in FIG. Figure 8 and Fig. 9 As shown, when the driving block 734 moves toward the installation tool 2 , the side of the driving block 734 will squeeze the two locking blocks 733 to move away from each other, so that the locking block 733 squeezes and restricts the second installation block 732 .

[0062] The first locking cam 7312 is provided with a plurality of locking cams 734, 736 and 737. The plurality of locking cams 734 are provided with a plurality of locking cams 734, 736 and 737. The plurality of locking cams 734 are provided with a plurality of locking cams 734, 736 and 737. The plurality of locking cams 734 are provided with a plurality of locking cams 734, 736 and 737. Fig. 9 As shown, the locking block 733 moves toward the inside of the first mounting block 731, and the locking block 733 is separated from the second mounting block 732. The elastic force of the reset spring 7312 acting on the locking block 733 is sufficient to push the locking block 733 to separate from the second mounting block 732. At this time, the first limiting plate 71 and the second limiting plate 72 can move away from each other, releasing the lock on the protrusion 55, thereby opening the fixing part 52, and at the same time, the extrusion head 735 on the back of the driving block 734 is separated from the sealing plate 62, thereby completing the disassembly of the installation tooling 2 and the energy reduction sheet 3.

[0063] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A quickly detachable fixture for an ion implanter beam line, comprising a mounting tube (1) and a mounting fixture (2), wherein an energy reduction sheet (3) is sleeved inside the mounting fixture (2), and a mounting pressing piece (4) for fixing the energy reduction sheet (3) is fixedly installed inside the mounting fixture (2); It is characterized in that Also includes: A clamp assembly (5), wherein the clamp assembly (5) is arranged between the mounting tube (1) and the mounting tool (2); A cooling component (6), the cooling component (6) being arranged on the installation tool (2), and the cooling component (6) being used to cool the working environment of the energy reduction sheet (3); A limit assembly (7), wherein the limit assembly (7) is arranged on the front side of the installation tool (2), and the limit assembly (7) is used to lock and limit the clamp assembly (5) and the cooling assembly (6).

2. The quick-detachable tooling for an ion implanter beam line according to claim 1, characterized in that: The clamp assembly (5) comprises: A clamping ring (51), the opposite sides of the installation tube (1) and the installation tool (2) are both fixedly connected to the clamping ring (51); A fixing member (52) and a hinge member (53), wherein the fixing member (52) is rotatably connected via the hinge member (53), and an inner wall of the fixing member (52) is provided with an arc groove (54) matching the clamping ring (51); A convex block (55) is fixedly connected to the front side of the fixing member (52), and the convex block (55) is linked with the limiting assembly (7).

3. The quick-detachable tooling for an ion implanter beam line according to claim 2, characterized in that: The cooling component (6) comprises: A flow chamber (61), the flow chamber (61) being disposed on the installation tool (2), the flow chamber (61) being used for flowing a cooling liquid for cooling the installation tool (2); A sealing plate (62), wherein the sealing plate (62) is arranged on the front side of the installation tool (2); A butt joint (63), the butt joint (63) being mounted on a side of the sealing plate (62) facing the mounting fixture (2), the outer wall of the butt joint (63) being squeezed and sleeved with the inner cavity of the flow chamber (61); A connecting pipe (64), one end of which is connected to the docking joint (63); A rubber block (65) and a docking plate (66), wherein the rubber block (65) is fixedly connected between the docking plate (66) and the sealing plate (62), and the docking plate (66) is linked to the limiting assembly (7).

4. The quick-detachable tooling for the beam line of an ion implanter according to claim 3, characterized in that: The limiting component (7) comprises: A first limiting plate (71) and a second limiting plate (72), wherein the first limiting plate (71) and the second limiting plate (72) are respectively clamped on opposite sides of adjacent protrusions (55); A locking assembly (73), wherein the locking assembly (73) is arranged on the first limiting plate (71) and the second limiting plate (72), and the locking assembly (73) is used to lock the distance between the first limiting plate (71) and the second limiting plate (72), and the locking assembly (73) forms a linkage with the docking plate (66).

5. The quick-detachable tooling for the beam line of an ion implanter according to claim 4, characterized in that: The locking assembly (73) comprises: A first mounting block (731), the first mounting block (731) being fixedly connected to a side of the first limiting plate (71) facing the second limiting plate (72); A second mounting block (732), the second mounting block (732) being fixedly connected to a side of the second limiting plate (72) facing the first limiting plate (71), and the second mounting block (732) being located on a side of the first mounting block (731); A locking block (733), wherein the locking block (733) is clamped between the first mounting block (731) and the second mounting block (732).

6. The quick-detachable tooling for the beam line of an ion implanter according to claim 5, characterized in that: The locking assembly (73) further comprises: A driving block (734), wherein the driving block (734) is slidably disposed inside the first mounting block (731), and the driving block (734) is used to squeeze the locking block (733) to move toward the second mounting block (732); an adjusting screw (736), wherein the outer wall of the adjusting screw (736) is threadedly connected to the first mounting block (731), one end of the adjusting screw (736) is rotatably connected to the driving block (734), and the other end of the adjusting screw (736) is fixedly connected to a handle (737); An extrusion head (735), wherein the extrusion head (735) is fixedly connected to the back side of the driving block (734), and one end of the extrusion head (735) is extruded and fitted with the docking plate (66); A reset component is arranged between the locking block (733) and the first mounting block (731).

7. The quick-detachable tooling for the beam line of an ion implanter according to claim 6, characterized in that: A connecting hole (738) is provided on the side of the first mounting block (731), one side of the outer wall of the locking block (733) is slidably connected to the connecting hole (738), a locking hole (739) is provided on one side of the second mounting block (732), and a first inclined slope is provided on one side of the bottom of the locking block (733), and the locking block (733) squeezes the second mounting block (732) through the first inclined slope.

8. The quick-detachable tooling for the beam line of an ion implanter according to claim 7, characterized in that: The back of the first mounting block (731) is provided with a mounting groove (7310) matching the driving block (734); the inner cavity of the mounting groove (7310) and the inner cavity of the connecting hole (738) are linked to each other; a second inclined slope is provided on the side of the driving block (734); a guide groove (7315) is provided on the side of the locking block (733) facing the driving block (734); the second inclined slope on the side of the driving block (734) is pressed and fitted with the inner wall of the guide groove (7315).

9. The quick-detachable tooling for the beam line of an ion implanter according to claim 8, characterized in that: The reset component comprises: A first fixing block (7311), wherein the first fixing block (7311) is fixedly connected to the outside of the locking block (733); A slide groove, wherein the slide groove is provided at the top and the bottom of the inner wall of the connecting hole (738), and the first fixing block (7311) is slidably sleeved inside the slide groove; A second fixing block (7313), the second fixing block (7313) being fixedly connected to an end of the inner cavity of the slide groove; A guide rod (7314), the end of which is fixedly connected to the second fixed block (7313), and the outer wall of the guide rod (7314) is slidably inserted and sleeved with the first fixed block (7311); A return spring (7312), wherein the return spring (7312) is slidably sleeved on the outside of the guide rod (7314), and the return spring (7312) is located between the first fixed block (7311) and the second fixed block (7313).

10. The quick-detachable tooling for the beam line of an ion implanter according to claim 5, characterized in that: A positioning block (74) is fixedly connected to one side opposite to the first limiting plate (71) and the second limiting plate (72); a positioning hole (75) is provided at the top of the protrusion (55); an outer wall of the positioning block (74) is slidably sleeved with an inner cavity of the positioning hole (75); a positioning rod (76) is fixedly connected to one side of the first limiting plate (71) facing the second limiting plate (72); and the outer bottom of the positioning rod (76) is slidably sleeved with the second limiting plate (72).

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