Heater unit

Abstract

The heater unit includes a heater, a first plate including a groove portion in which the heater is disposed, a second plate covering the groove portion and overlapping the first plate, and a block disposed between the heater and the second plate and in contact with the heater and the second plate. The groove portion includes a first region having a first depth and a second region having a second depth greater than the first depth, and the block is provided in the second region.

Description

Technical Field

[0001] One embodiment of the present invention relates to a heater unit having a heater. Background Art

[0002] Semiconductor devices installed in electronic devices are mainly manufactured by photolithography processes and include semiconductor films and insulating films with prescribed patterns. These films are formed by film forming devices such as sputtering devices or chemical vapor deposition (CVD) devices, and processed into prescribed patterns by etching devices. Since the characteristics of semiconductor devices depend on the characteristics of the films, the manufacturing conditions of the films are very important. One of the parameters of the manufacturing conditions of the films is temperature, and temperature control in the film forming device or the etching device is very important. For example, Patent Documents 1 and 2 disclose heater units for heating substrates.

[0003] (Prior art literature)

[0004] (Patent Document)

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2004-165085

[0006] Patent Document 2: Japanese Patent Application Laid-Open No. 2004-247210 Summary of the invention

[0007] (Problems to be solved by the invention)

[0008] In recent years, the shapes of heaters and plates constituting heater units have become diverse, and depending on the configuration of the heater, a gap may be formed between the plate and the heater. When a gap is formed, the heat generated by the heater is not conducted to the plate, but tends to accumulate in the gap. As a result, the temperature of the heater increases, causing the heater to fail, such as disconnection.

[0009] In view of the above problems, one object of one embodiment of the present invention is to provide a heater unit that suppresses disconnection of a heater.

[0010] (Measures taken to solve the problem)

[0011] A heater unit involved in one embodiment of the present invention includes a heater, a first plate including a groove portion in which the heater is configured, a second plate covering the groove portion and overlapping the first plate, and a block configured between the heater and the second plate and in contact with the heater and the second plate, the groove portion including a first area having a first depth and a second area having a second depth greater than the first depth, and the block is configured in the second area.

[0012] The block may press the heater.

[0013] The block may be bent along the curved shape of the groove portion.

[0014] The heater may include a metal sheath, and the metal sheath may be in contact with the block and a bottom surface of the groove portion.

[0015] The metal sheath may include a planar portion in contact with the block.

[0016] The heater may include a joining portion joining the non-heating wire and the heating wire, and the joining portion may overlap the block.

[0017] The heater may include a joining portion joining the non-heating wire and the heating wire, and a position of the joining portion may substantially coincide with a position of an end portion of the block.

[0018] The block may include a convex portion that fits into a concave portion provided on the second plate.

[0019] The block may include a recessed portion that fits with the raised portion provided on the second plate.

[0020] The material of the block may be the same as that of the second plate.

[0021] The block may be part of a component of the second plate.

[0022] The second plate may be provided with a plurality of fine holes.

[0023] (Effects of the Invention)

[0024] According to the heater unit involved in one embodiment of the present invention, since heat accumulation is not formed between the heater and the plate, disconnection of the heater is suppressed. In addition, since heat conduction from the heater to the plate is improved, a heater unit with excellent temperature uniformity and temperature controllability is provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic perspective view of a heater unit according to one embodiment of the present invention.

[0026] Figure 2 This is a schematic exploded perspective view of a heater unit according to an embodiment of the present invention.

[0027] Figure 3 This is a schematic cross-sectional view of a heater unit according to one embodiment of the present invention.

[0028] Figure 4A This is a schematic cross-sectional view showing a heater included in a heater unit according to an embodiment of the present invention.

[0029] Figure 4B This is a schematic cross-sectional view showing a heater included in a heater unit according to an embodiment of the present invention.

[0030] Figure 5AThis is a schematic cross-sectional view showing a heater included in a heater unit according to an embodiment of the present invention.

[0031] Figure 5B This is a schematic cross-sectional view showing a heater included in a heater unit according to an embodiment of the present invention.

[0032] Figure 6 This is a schematic partially enlarged cross-sectional view of a heater unit according to one embodiment of the present invention.

[0033] Figure 7 This is a schematic partially enlarged cross-sectional view of a heater unit according to one embodiment of the present invention.

[0034] Figure 8 This is a schematic partially enlarged cross-sectional view of a heater unit according to one embodiment of the present invention.

[0035] Fig. 9 This is a schematic partially enlarged cross-sectional view of a heater unit according to one embodiment of the present invention.

[0036] Fig.10 This is a schematic partially enlarged cross-sectional view of a heater unit according to one embodiment of the present invention.

[0037] Fig.11 This is a schematic partially enlarged cross-sectional view of a heater unit according to one embodiment of the present invention.

[0038] Fig.12 This is a schematic partially enlarged cross-sectional view of a heater unit according to one embodiment of the present invention.

[0039] Fig.13 The results of heat conduction analysis of the examples are shown in FIG.

[0040] Fig.14 The results of heat conduction analysis of the comparative example are shown in FIG. DETAILED DESCRIPTION

[0041] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, the present invention can be implemented in various forms within the scope not departing from the gist thereof, and should not be construed as being limited to the description contents of the embodiments illustrated below.

[0042] In order to explain more clearly, the drawings may schematically show the width, thickness, shape, etc. of each part compared to the actual form, but this is only an example and does not limit the interpretation of the present invention. In addition, in the specification and drawings, the same reference numerals are given to elements having the same functions as those explained with reference to the drawings already shown, and repeated explanations may be omitted.

[0043] In the specification and drawings, when the same or similar structures are generally indicated, the same reference numerals are used, and when each of the multiple structures is distinguished, uppercase letters or lowercase letters are further added to indicate. When multiple parts of a structure are distinguished, the same reference numerals are used, and a hyphen and a natural number are further used.

[0044] <First Embodiment>

[0045] Reference Figure 1 to Figure 6 , the structure of the heater unit 10 according to one embodiment of the present invention will be described.

[0046] [1. Overview of the Structure of Heater Unit 10]

[0047] Figure 1 It is a schematic perspective view of a heater unit 10 according to one embodiment of the present invention. Figure 2 This is a schematic exploded perspective view of a heater unit 10 according to an embodiment of the present invention.

[0048] like Figure 1 and Figure 2 As shown, the heater unit 10 includes a heater 100, a first plate 200, a second plate 300 and a block 400. A groove 210 is provided at the periphery of the first plate 200. In a top view, the groove 210 has a C-shape along the periphery of the first plate 200. That is, the groove 210 has two ends and extends from one end to the other end in a curved shape. The second plate 300 includes two through holes 310 and a plurality of fine holes 320. The two through holes 310 are provided at a portion of the periphery of the second plate 300. A plurality of fine holes 320 are provided at the central portion of the second plate 300. The second plate 300 overlaps with the first plate 200 in a manner covering the groove 210. Specifically, the first plate 200 and the second plate 300 are joined to each other's peripheries in a manner that the ends of the groove 210 of the first plate 200 and the through holes 310 of the second plate 300 are connected, and the joined first plate 200 and the second plate 300 constitute the housing of the heater unit 10.

[0049] The heater 100 includes two terminal portions 110. The heater 100 is disposed in the groove portion 210 of the first plate 200, and the terminal portion 110 is taken out to the outside through the through hole 310 of the second plate 300. The portion of the heater 100 disposed in the groove portion 210 has a curved shape that is the same as the shape of the groove portion 210. In the heater unit 10, current is supplied from the terminal portion 110, whereby the heater 100 can generate heat and heat the second plate 300.

[0050] Although not shown in detail, a gas supply port is provided in the first plate 200. The gas supplied from the gas supply port is heated by the heater 100 and ejected from the fine holes 320 of the second plate 300. That is, the heater unit 10 can be used as a shower head with adjustable temperature. A gas flow path for controlling the flow of gas may be provided inside the first plate 200, and a heater other than the heater 100 for heating the gas in the first plate 200 may also be provided.

[0051] Furthermore, the heater unit 10 is not limited to being used as a temperature-adjustable shower head. The heater unit 10 may also be used as a temperature-adjustable substrate stage.

[0052] [2. Structure of Heater 100 and Block 400]

[0053] Figure 3 It is a schematic cross-sectional view of a heater unit 10 according to one embodiment of the present invention.

[0054] like Figure 3 As shown, the groove portion 210 includes a first region 211 having a first depth d1 and a second region 212 having a second depth d2. Figure 3 In the embodiment, the first region 211 and the second region 212 are connected discontinuously with a step difference, but the first region 211 and the second region 212 may be connected in a manner that the first depth d1 and the second depth d2 continuously change. The second region 212 includes the end of the groove portion 210. Therefore, the second region 212 is connected to the through hole 310. In addition, the width of the groove portion 210 is substantially equal to the width of the heater 100.

[0055] The first depth d1 is substantially equal to the diameter of the heater 100. In the first region 211, the heater 100 is pressed by the second plate 300 and contacts the surface of the second plate and the bottom surface of the groove 210. In other words, in the first region 211, the heater 100 is embedded in the groove 210 with almost no gap around it.

[0056] The second depth d2 is greater than the first depth d1. From the first region 211 to the second region 212, the heater 100 is bent to contact the bottom surface of the groove 210 in the second region 212. In addition, the heater 100 is bent at the end of the groove 210 to be inserted into the through hole 310 of the second plate 300. In this way, in the second region 212, since the heater 100 is bent, there is a gap around it. However, in the heater unit 10, the block 400 is embedded to reduce the gap. The block 400 is arranged between the heater 100 and the second plate 300 and is embedded in the groove 210. The block 400 is in contact with the second plate 300 and can transfer pressure from the second plate to the heater 100. Therefore, in the second region 212, the heater 100 is pressed by the block 400 and contacts the bottom surface of the block 400 and the groove 210. In addition, the block 400 can be bent along the curved shape of the groove 210.

[0057] The material of the block 400 is preferably the same as that of the first plate 200 and the second plate 300. For example, a metal including aluminum, titanium, stainless steel, etc. or an alloy thereof can be used as the block 400. In addition, the block preferably includes a metal with good thermal conductivity. Such a metal can be selected from metals having a thermal conductivity of 10 W / mK or more and 430 W / K or less.

[0058] The block 400 can press and fix the heater 100 arranged in the second area 212 of the groove portion 210. In addition, the block 400 can transfer the heat emitted by the heater 100 to the second plate 300. In the first area 211, the heater 100 is in contact with the second plate 300, so the heater 100 can directly heat the second plate 300. On the other hand, in the second area 212, the heater 100 is not in contact with the second plate 300. However, in the second area 212, the block 400 is in contact with the surfaces of the heater 100 and the second plate 300. Therefore, in the second area 212, the heater 100 can heat the second plate 300 via the block 400.

[0059] Reference Figure 4A and Figure 4B , the details of the structure of the heater 100 will be described. Figure 4A and 4B 1 is a schematic cross-sectional view showing a heater 100 included in a heater unit 10 according to an embodiment of the present invention. More specifically, Figure 4A 4B is a cross-sectional view taken along a plane perpendicular to the extending direction of the heater 100. 4B is a cross-sectional view taken along a plane parallel to the extending direction of the heater 100. In addition, although the heater 100 disposed in the groove portion 210 is curved, for convenience, Figure 4B A linear heater 100 is shown.

[0060] The heater 100 includes a non-heating wire 111, a heating wire 112, an insulator 120, a metal sheath 130, and a sealing material 140. The non-heating wire 111 and the heating wire 112 are joined at a joint 103, and the joined non-heating wire 111 and the heating wire 112 are inserted into the metal sheath 130. In addition, the insulator 120 is filled in the metal sheath 130. The non-heating wire 111 and the heating wire 112 inserted into the metal sheath 130 are electrically insulated from the metal sheath 130 by the insulator 120. The non-heating wire 111 extends outward from one end of the metal sheath 130, and the end of the metal sheath 130 is sealed by the sealing material 140. The non-heating wire 111 located outside the metal sheath 130 constitutes the terminal portion 110. Here, the portion of the heater 100 where the non-heating wire 111 is located is defined as the non-heating portion 101, and the portion where the heating wire 112 is located is defined as the heating portion 102. The heater 100 mainly generates heat in the heating portion 102. The joint portion 103 is located between the non-heating portion 101 and the heating portion 102.

[0061] The cross-sectional shape of the metal sheath 130 is a so-called D-shape in which both ends of a straight line are connected by a curve. That is, the metal sheath 130 is a cylindrical body having a flat portion and a curved portion. The flat portion of the metal sheath 130 disposed in the groove portion 210 of the first plate 200 is in contact with the second plate 300. In the case where the metal sheath 130 includes a flat portion, since the contact area between the flat portion and the second plate 300 increases, heat can be efficiently transferred from the heater 100 to the second plate 300. However, the cross-sectional shape of the metal sheath 130 is not limited to the above-mentioned shape, and can be circular, elliptical, polygonal, etc.

[0062] also, Figure 4B Only one end of the metal sheath 130 is shown, but the other end of the metal sheath 130 also has a similar structure.

[0063] The non-heating wire 111 is connected to the heating wire 112 at the joint 103 and serves as a lead wire for supplying current to the heating wire 112. The material of the non-heating wire 111 is, for example, a metal such as aluminum (Al), copper (Cu) or nickel (Ni). The non-heating wire 111 has a higher thermal conductivity than the heating wire 112.

[0064] The heating wire 112 generates heat by supplying electric current. The heating wire 112 is made of a metal such as nickel, chromium, iron or aluminum, or an alloy thereof.

[0065] The insulator 120 is provided to prevent the non-heating wire 111 and the heating wire 112 from contacting with the metal sheath 130 and short-circuiting. The material of the insulator 120 is, for example, magnesium oxide, aluminum oxide, silicon oxide, zirconium oxide, tantalum oxide, boron nitride, aluminum nitride, silicon nitride, zirconium nitride, titanium nitride, tantalum nitride, molybdenum nitride, or niobium nitride. The thermal conductivity of the insulator 120 is preferably above 10 W / mK and below 300 W / mK. In addition, the insulator 120 is formed by aggregating fine particles obtained by sintering and crushing the powder of the above-mentioned material. That is, the insulator 120 is formed by filling the metal sheath 130 with the powder or fine particles of the above-mentioned material.

[0066] The metal sheath 130 is provided to protect the heating wire 112 from the influence of the corrosive atmosphere or the oxidizing atmosphere. The material of the metal sheath 130 is, for example, a metal such as aluminum, titanium, nickel, iron, chromium, niobium, or molybdenum, or an alloy thereof. The thermal conductivity of the metal sheath 130 is preferably above 10 W / mK and below 430 W / mK.

[0067] The sealing material 140 is provided to prevent the insulation performance of the insulator 120 from being deteriorated due to the intrusion of moisture. The sealing material 140 is, for example, epoxy resin or acrylic resin.

[0068] Specifically, the non-heating wire 111 , the heating wire 112 , the insulator 120 , the metal sheath 130 , and the sealing material 140 are nickel wire, nickel-chromium wire, magnesium oxide, aluminum tube, and epoxy resin, respectively, but are not limited thereto.

[0069] Figure 4A and Figure 4B The heater 100 shown is a so-called double-ended sheath heater. The sheath heater has a small outer diameter of the sheath and is flexible. Therefore, the heater 100 can be bent. In addition, since the heating wire 112 is protected by the insulator 120, it has excellent impact resistance and corrosion resistance.

[0070] In addition, the structure of the heater applied to the heater unit 10 is not limited to the heater 100. Figure 5A and Figure 5B , a structure of a heater 100A different from that of the heater 100 will be described. In addition, hereinafter, when the structure of the heater 100A is the same as that of the heater 100, the description of the structure of the heater 100A may be omitted.

[0071] Figure 5A and Figure 5B 1 is a schematic cross-sectional view showing a heater 100A included in a heater unit 10 according to an embodiment of the present invention. Specifically, Figure 5A is a cross-sectional view taken along a plane perpendicular to the extending direction of the heater 100A, Figure 5Bis a cross-sectional view taken along a plane parallel to the extending direction of the heater 100A. In addition, the heater 100A includes a bent portion, but in Figure 5B In FIG. 1 , for convenience, a linear heater 100A is shown.

[0072] The heater 100A includes a first non-heating wire 111A-1, a second non-heating wire 111A-2, a heating wire 112A, an insulator 120A, a metal sheath 130A, and a sealing material 140A. At the first joint 103A-1, one end of the heating wire 112A is joined to one end of the first non-heating wire 111A-1, and at the second joint 103A-2, the other end of the heating wire 112A is joined to one end of the second non-heating wire 111A-2. In addition, the metal sheath 130A is filled with an insulator 120A. The other end of the first non-heating wire 111A-1 and the other end of the second non-heating wire 111A-2 extend to a position further outside than one end of the metal sheath 130, and one end of the metal sheath 130A is sealed by a sealing material 140. In addition, the other end of the metal sheath 130A is closed. Here, the portion where the first non-heating wire 111A-1 and the second non-heating wire 111A-2 of the heater 100A are located is defined as the non-heating portion 101A, and the portion where the heating wire 112A of the heater 100A is located is defined as the heating portion 102A, and the heater 100A mainly generates heat in the heating portion 102A. The first joint portion 103A-1 and the second joint portion 103A-2 are located between the non-heating portion 101 and the heating portion 102.

[0073] Figure 5A and Figure 5B The heater 100A shown is a so-called single-ended sheath heater. In the heater 100A, since the terminals of the lead wires composed of the first non-heating wire 111A- 1 and the second non-heating wire 111A- 2 are gathered, a plurality of heaters 100A can be arranged in the heater unit 10 .

[0074] Reference Figure 4A to Figure 5B The double-ended sheath heater and the single-ended sheath heater have been described, but from the viewpoint of temperature uniformity and temperature controllability of the heater unit 10, it is preferred that the portion of the groove 210 disposed in the first plate 200 does not include the non-heating portion 101 as much as possible. Figure 6 , the positional relationship between the joint portion 103 joining the non-heating wire 111 and the heating wire 112 and the block 400 will be described.

[0075] Figure 6 This is a schematic partially enlarged cross-sectional view of a heater unit 10 according to an embodiment of the present invention.

[0076] like Figure 6As shown, the joint 103 of the heater 100 is located in the second area 212 and overlaps with the block 400. However, the joint 103 is not located in the central part of the block 400, but is located in the peripheral part of the block 400. In other words, in the second area 212, the heater 100 is configured so that the heating wire 112 overlaps the block 400 more than the non-heating wire 111. When the joint 103 becomes high temperature, the joint 103 is easy to break. However, in the heater unit 10, the heater 100 is in contact with the block 400, and the heat generated by the heater 100 is conducted to the second plate 300 via the block 400. Therefore, heat is not easy to accumulate in the joint 103 overlapping with the block 400, and will not become high temperature. In addition, in the heating of the heater 100 or the terminal connection process for the terminal part 110, there is a situation where the heater 100 expands and contracts, but in the heater unit 10, the block 400 fixes the heater 100, and the position of the joint 103 is stable. Therefore, in the heater unit 10 , since the block 400 is provided in contact with the heater 100 , a malfunction due to disconnection of the joint portion 103 is suppressed.

[0077] In addition, in the top view, the position of the joint 103 can be substantially consistent with the position of the end of the block 400. In this case, since the overlap between the heating wire 112 and the block 400 increases, the heat conduction from the heater 100 to the block 400 increases, greatly suppressing the formation of heat accumulation.

[0078] As described above, the heater unit 10 according to one embodiment of the present invention includes the block 400 in contact with the heater 100 and the second plate 300. The heat from the heater 100 is conducted to the second plate 300 via the block 400. Therefore, it is not easy to form heat accumulation between the heater 100 and the second plate 300, and the disconnection of the heater 100 is suppressed. In addition, even in the vicinity of the terminal portion 110, the heat conduction from the heater 100 to the second plate 300 is improved, so the heater unit 10 has excellent temperature uniformity and temperature controllability.

[0079] In addition, each structure of the heater unit 10 can be appropriately deformed. For example, the shape of the first plate 200 and the second plate 300 in the top view is not limited to a circle, but can also be a polygon. In addition, the shape of the groove 210 is not limited to a C-shape, but can also be a ring without an end. Even in this case, by configuring the block 400 in contact with the heater 100 and the second plate 300, the same effect as the above content is achieved.

[0080] <Variation 1 of the First Embodiment>

[0081] Reference Figure 7, a heater unit 10A will be described as a modified example of the heater unit 10. When the structure of the heater unit 10A is the same as that of the heater unit 10, the description of the structure of the heater unit 10A may be omitted.

[0082] Figure 7 This is a schematic partial enlarged cross-sectional view of a heater unit 10A according to one embodiment of the present invention.

[0083] like Figure 7 As shown, the heater unit 10A includes a heater 100, a first plate 200, a second plate 300, and a block 400A. In the second region 212 of the groove 210 of the first plate 200, the block 400A is disposed between the heater 100 and the second plate 300 and is embedded in the groove 210. Thus, in the second region 212, the heater 100 is pressed by the block 400A and contacts the bottom surface of the block 400A and the groove 210.

[0084] The block 400A includes an inclined surface 401A along the curve of the heater 100. That is, the block 400A includes an inclined surface 401A connecting the bottom surface 402A and the upper surface 403A. The inclined surface 401A is preferably in contact with the heater 100. However, as long as at least a portion of the inclined surface 401A is in contact with the heater 100, the inclined surface 401A does not need to be in contact with the heater 100 as a whole. The inclined surface 401A may be a flat surface or a curved surface.

[0085] In the heater unit 10A, since the block 400A includes a curved shape along the heater 100, the gap between the heater 100 and the second plate 300 is reduced. Therefore, it is difficult for heat to accumulate between the heater 100 and the second plate 300. In addition, since heat conduction from the heater 100 to the second plate 300 is improved by the block 400A, the heater unit 10A has excellent temperature uniformity and temperature controllability.

[0086] <Variation 2 of the First Embodiment>

[0087] Reference Figure 8 Next, a heater unit 10B will be described as a modified example of the heater unit 10. When the structure of the heater unit 10B is the same as that of the heater unit 10, the description of the structure of the heater unit 10B may be omitted.

[0088] Figure 8 This is a schematic partially enlarged cross-sectional view of a heater unit 10B according to an embodiment of the present invention.

[0089] like Figure 8As shown, the heater unit 10B includes a heater 100, a first plate 200, a second plate 300, and a block 400. The groove portion 210 provided at the outer periphery of the first plate 200 includes a first region 211, a second region 212, and a third region 213A between the first region 211 and the second region 212. The third region 213A includes a bottom surface of the groove portion 210 inclined along the curvature of the heater 100. That is, in order to reduce the step difference between the bottom surface of the groove portion 210 in the first region 211 and the bottom surface of the groove portion 210 in the second region 212, the bottom surface of the groove portion 210 is provided in the third region 213A. In the third region 213A, the heater 100 is preferably in contact with the bottom surface of the groove portion 210. However, as long as at least a portion of the bottom surface of the groove portion 210 is in contact with the heater 100, the bottom surface of the groove portion does not need to be in contact with the heater 100 as a whole.

[0090] In the heater unit 10B, since the bottom surface of the groove portion 210 includes a curved shape along the heater 100, the gap between the heater 100 and the first plate 200 is reduced. Therefore, heat accumulation is difficult to form between the heater 100 and the first plate 200. Since heat conduction from the heater 100 to the first plate 200 is improved, the heater unit 10B has excellent temperature uniformity and temperature controllability.

[0091] <Variation 3 of the First Embodiment>

[0092] Reference Fig. 9 , a heater unit 10C will be described as a modified example of the heater unit 10. When the structure of the heater unit 10C is the same as that of the heater unit 10, the heater unit 10A, or the heater unit 10B, the description of the structure of the heater unit 10B may be omitted.

[0093] Fig. 9 This is a schematic partial enlarged cross-sectional view of a heater unit 10C according to one embodiment of the present invention.

[0094] like Fig. 9As shown, the heater unit 10C includes a heater 100, a first plate 200, a second plate 300, and a block 400A. In the second region 212 of the groove 210 of the first plate 200, the block 400A is arranged between the heater 100 and the second plate 300, and is embedded in the groove 210. Thus, in the second region 212, the heater 100 is pressed by the block 400A and contacts the bottom surface of the block 400A and the groove 210. In addition, the groove 210 arranged at the periphery of the first plate 200 includes a first region 211, a second region 212, and a third region 213A between the first region 211 and the second region 212. The heater 100 contacts the bottom surface of the groove 210 in the first region 211, the second region 212, and the third region 213A.

[0095] In the heater unit 10C, since the block 400A includes a curved shape along the heater 100, the gap between the heater 100 and the second plate 300 is reduced. In addition, since the bottom surface of the groove portion 210 includes a curved shape along the heater 100, the gap between the heater 100 and the first plate 200 is reduced. Therefore, it is difficult to form heat accumulation between the heater 100 and the first plate 200 and between the heater 100 and the second plate 300. In addition, in the heater unit 10C, not only the heat conduction from the heater to the first plate is improved, but also the heat conduction from the heater 100 to the second plate 300 is improved via the block 400A. Therefore, the heater unit 10C has excellent temperature uniformity and temperature controllability.

[0096] As mentioned above, the heater units 10A to 10C have been described as modified examples of the heater unit 10 , but the modified examples of the heater unit 10 are not limited thereto.

[0097] <Second Embodiment>

[0098] Reference Fig.10 , a structure of a heater unit 10D different from the heater unit 10 will be described. In addition, hereinafter, when the structure of the heater unit 10D is the same as the structure of the heater unit 10, there is a case where the description of the structure of the heater unit 10D is omitted.

[0099] Fig.10 This is a schematic partial enlarged cross-sectional view of a heater unit 10D according to one embodiment of the present invention.

[0100] like Fig.10As shown, the heater unit 10D includes a heater 100, a first plate 200, a second plate 300D, and a block 400D. In the second region 212 of the groove 210 of the first plate 200, the block 400D is disposed between the heater 100 and the second plate 300D and is fitted into the groove 210. Thus, in the second region 212, the heater 100 is pressed by the block 400D and contacts the bottom surface of the block 400D and the groove 210.

[0101] The second plate 300 includes a convex portion 330D protruding from the surface. In addition, the block 400D includes a concave portion 410D recessed from the surface. The convex portion 330D of the second plate 300D and the concave portion 410D of the block 400D can be fitted. That is, the block 400D is arranged in the second area 212 in such a manner that the concave portion 410D fits into the convex portion 330D. Therefore, in the heater unit 10D, the block 400D in the second area 212 can be easily positioned.

[0102] As described above, the heater unit 10D involved in one embodiment of the present invention includes a block 400D in contact with the heater 100 and the second plate 300D. Therefore, the heater unit 10D also has excellent temperature uniformity and temperature controllability. In addition, the second plate 300D and the block 400D respectively include a convex portion 330D and a concave portion 410D, and the block 400D can be configured at a specified position by fitting the convex portion 330D and the concave portion 410D. Therefore, in the heater unit 10D, it is easy to position the block 400D in the second region 212, and the manufacturing process of the heater unit 10D can be simplified.

[0103] <Modification of Second Embodiment>

[0104] Reference Fig.11 , a heater unit 10E as a modified example of the heater unit 10D is described. In addition, the modified example of the heater unit 10D is not limited to the heater unit 10E described below. In addition, when the structure of the heater unit 10E is the same as the structure of the heater unit 10D, there is a case where the description of the structure of the heater unit 10E is omitted.

[0105] Fig.11 This is a schematic partial enlarged cross-sectional view of a heater unit 10E according to one embodiment of the present invention.

[0106] like Fig.11As shown, the heater unit 10E includes a heater 100, a first plate 200, a second plate 300E, and a block 400E. In the second region 212 of the groove 210 of the first plate 200, the block 400E is disposed between the heater 100 and the second plate 300E and embedded in the groove 210. Thus, in the second region 212, the heater 100 is pressed by the block 400E and contacts the bottom surface of the block 400E and the groove 210.

[0107] The second plate 300 includes a recessed portion 340C recessed from the surface. In addition, the block 400E includes a convex portion 420E protruding from the surface. The recessed portion 340C of the second plate 300E and the convex portion 420E of the block 400E can be fitted. That is, the block 400E is arranged in the second area 212 in such a manner that the convex portion 420E is fitted into the recessed portion 340C. Therefore, in the heater unit 10E, the block 400E in the second area 212 can be easily positioned.

[0108] As described above, the heater unit 10E involved in one embodiment of the present invention includes a block 400E in contact with the heater 100 and the second plate 300E. Therefore, the heater unit 10E also has excellent temperature uniformity and temperature controllability. In addition, the second plate 300E and the block 400E respectively include a recess 340C and a protrusion 420E, and the block 400E can be configured at a specified position by fitting the recess 340C and the protrusion 420E. Therefore, in the heater unit 10E, it is easy to position the block 400E in the second area 212, and the manufacturing process of the heater unit 10E can be simplified.

[0109] <Third Embodiment>

[0110] Reference Fig.12 , the structure of the heater unit 10F which is different from the heater units 10 to 10E will be described. In addition, hereinafter, when the structure of the heater unit 10F is the same as the structure of the heater unit 10 to 10E, the description of the structure of the heater unit 10F may be omitted.

[0111] Fig.12 This is a schematic partial enlarged cross-sectional view of a heater unit 10D according to one embodiment of the present invention.

[0112] like Fig.12As shown, the heater unit 10F includes a heater 100, a first plate 200, and a second plate 300F. The second plate 300F is provided with a pressing portion 350F overlapping with the second region 212 of the first plate 200 and having a portion of the surface raised (or a convex pressing portion 350F protruding from the surface). That is, the pressing portion 350F is a part of the component of the second plate 300F. In the second region 212, the heater 100 is pressed by the pressing portion 350F and contacts the pressing portion 350F and the bottom surface of the groove portion 210.

[0113] The second plate 300F provided with the pressing portion 350F can be said to be a structure in which the second plate 300 and the block body 400 are integrated.

[0114] As described above, the heater unit 10F according to one embodiment of the present invention includes the second plate 300F provided with the pressing portion 350F in contact with the heater 100. The heat from the heater 100 is conducted from the pressing portion 350F to the second plate 300F. Therefore, heat accumulation does not form between the heater 100 and the second plate 300F, and disconnection of the heater 100 is suppressed. In addition, even in the vicinity of the terminal portion 110, the heat conduction from the heater 100 to the second plate 300 is improved, so the heater unit 10 has excellent temperature uniformity and temperature controllability.

[0115] Example

[0116] Heat conduction analysis was performed on the heater unit 10 (Example) according to the first embodiment and a heater unit (Comparative Example) not including the block 400. The heat conduction analysis was performed using SolidWorks (manufactured by Dassault Systèmes).

[0117] Fig.13 The results of the heat conduction analysis of the embodiment are shown. Fig.14 The results of thermal conductivity analysis of the comparative example are shown. Fig.13 and Fig.14 , it is shown that as the color changes from blue to red (from a short-wavelength color to a long-wavelength color), the temperature becomes higher.

[0118] like Fig.13 As shown in FIG. 4 , when the block 400 is placed in contact with the heat source (the red area in the figure), the area above the block 400 is displayed in yellow, and it can be seen that the temperature of the area above the block 400 becomes higher. This is considered to be because the heat from the heat source is conducted to the board via the block 400. That is, in the embodiment, it can be seen that the thermal conductivity to the board is improved.

[0119] On the other hand, Fig.14As shown, if the block 400 is not provided, the heat from the heat source is not conducted, and the area above the heat source is blue, indicating that the temperature of this area does not rise. This is considered to be because the gap around the heat source forms heat accumulation. That is, in the comparative example, it can be seen that the thermal conductivity of the plate is reduced.

[0120] As can be seen from the results of the above embodiments and comparative examples, by including the block 400 in the heater unit 10, heat can be conducted to the second plate 300 through the block 400 even near the through hole 310 of the second plate 300 where the terminal portion 110 is taken out. Therefore, the heater unit 10 has excellent temperature uniformity and temperature controllability.

[0121] As for each embodiment described as above as an embodiment of the present invention, as long as they are not contradictory, they can be appropriately combined and implemented. In addition, those skilled in the art can add, delete, or design changes to appropriately constitute elements according to each embodiment, as long as they have the gist of the present invention, they are included in the scope of the present invention.

[0122] Furthermore, even if there are other effects different from the effects obtained by the above-mentioned embodiments, effects that are obvious from the description of this specification or effects that can be easily predicted by those skilled in the art can be understood as effects obtained by the present invention.

[0123] (Explanation of Reference Numerals)

[0124] 10, 10D, 10E: heater unit; 100, 100A: heater;

[0125] 101, 101A: non-heat-generating part; 102, 102A: heat-generating part; 103, 103A: joint part;

[0126] 110: terminal portion; 111, 111A: non-heating wire; 112, 112A: heating wire;

[0127] 120, 120A: insulator; 130, 130A: metal sheath; 140, 140A: sealing material;

[0128] 200: first plate; 210: groove portion; 211: first region; 212: second region;

[0129] 300, 300D, 300E: second plate; 310: through hole; 320: fine hole; 330D: convex portion;

[0130] 340C: concave portion; 350F: pressing portion; 400, 400A, 400D, 400E: blocks;

[0131] 410D: concave portion; 420E: convex portion.

Claims

1. A heater unit, wherein: include: Heater; a first plate including a slot portion in which the heater is disposed; a second plate covering the groove portion and overlapping the first plate; as well as a block disposed between the heater and the second plate and in contact with the heater and the second plate, The groove portion comprises: a first region having a first depth; as well as a second region having a second depth greater than the first depth, The block is disposed in the second area.

2. The heater unit according to claim 1, wherein: The block presses the heater.

3. The heater unit according to claim 1, wherein The block is bent along the curved shape of the groove portion.

4. The heater unit according to claim 1, wherein The heater comprises a metal sheath, The metal sheath is in contact with the block and the bottom surface of the groove portion.

5. The heater unit according to claim 4, wherein The metal sheath includes a planar portion in contact with the block.

6. The heater unit according to claim 1, wherein The heater includes a joint portion for joining the non-heating wire and the heating wire, The joining portion overlaps with the block.

7. The heater unit according to claim 1, wherein The heater includes a joint portion for joining the non-heating wire and the heating wire, In the top view, the position of the joint is substantially consistent with the position of the end of the block.

8. The heater unit according to claim 1, wherein The block includes a convex portion that fits into a concave portion provided on the second plate.

9. The heater unit according to claim 1, wherein: The block includes a recessed portion that fits with a protruding portion provided on the second plate.

10. The heater unit according to claim 1, wherein The material of the block is the same as that of the second plate.

11. The heater unit according to claim 1, wherein The block is part of a component of the second plate.

12. The heater unit according to claim 1, wherein The second plate is provided with a plurality of fine holes.

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