Epitaxial furnace tail gas waste heat recovery device

Abstract

The utility model relates to the field of tail gas waste heat recovery, and discloses an epitaxial furnace tail gas waste heat recovery device which comprises a waste heat recovery body, a hot outlet end is arranged at the top of the waste heat recovery body, a cold outlet end is arranged on one side of the hot outlet end, and a set of collecting assemblies are arranged on the two sides of the waste heat recovery body. One collecting assembly is fixedly connected with a tail gas collecting end, the other collecting assembly is fixedly connected with a cold gas inlet end, and a cleaning mechanism is arranged in the collecting assembly, so that the extension furnace tail gas waste heat recovery device is provided, particulate matters such as silicon dust and arsenic dust can be attached to the inner wall of a gas inlet pipeline of the waste heat recovery device, and the pipeline is blocked; and the waste heat recovery efficiency is influenced.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas waste heat recovery, and more specifically to a device for recovering tail gas waste heat from an epitaxial furnace. Background Art

[0002] An epitaxial furnace is a device used to make semiconductor crystals. It is used to prepare high-purity single-crystal silicon, gallium arsenide, gallium phosphide and other semiconductor materials. The production of these materials requires the use of silicon ore, gallium, arsenic, phosphorus and other materials. These materials may produce harmful gases during the heating and reaction process of the epitaxial furnace, such as arsine, phosphine, and particulate matter such as silicon dust and arsenic dust. When these substances are discharged through the epitaxial furnace, they will be connected to the air intake pipe of the waste heat recovery device. There are problems such as: particulate matter such as silicon dust and arsenic dust may adhere to the inner wall of the air intake pipe of the waste heat recovery device, causing the pipe to be blocked, affecting the waste heat recovery efficiency.

[0003] In view of this, we propose a waste heat recovery device for the tail gas of an epitaxial furnace. Utility Model Content

[0004] The purpose of the utility model is to provide an epitaxial furnace tail gas waste heat recovery device to address the deficiencies in the prior art. Particulate matter such as silicon dust and arsenic dust may adhere to the inner wall of the air inlet pipe of the waste heat recovery device, causing the pipe to be blocked, thereby affecting the waste heat recovery efficiency.

[0005] The above-mentioned technical purpose of the utility model is achieved through the following technical scheme: a waste heat recovery device for exhaust gas from an epitaxial furnace, comprising: a waste heat recovery body, a hot outlet end is provided on the top of the waste heat recovery body, a cold outlet end is provided on one side of the hot outlet end, a group of collecting components are provided on both sides of the waste heat recovery body, the collecting component is fixedly connected to the exhaust gas collecting end, and the other collecting component is fixedly connected to the cold air inlet end, and a cleaning mechanism is provided inside the collecting component.

[0006] Preferably, the collecting assembly comprises a cylindrical shell, a conical filter plate is provided inside the cylindrical shell, an upper rectangular shell is fixedly connected to the top of the cylindrical shell, one end of the upper rectangular shell is fixedly connected to the waste heat recovery body, and a lower rectangular shell is fixedly connected to the bottom of the cylindrical shell, one end of the lower rectangular shell is fixedly connected to the exhaust gas collection end.

[0007] Preferably, a cleaning mechanism is provided at the central axis of the conical filter plate, the cleaning mechanism includes a collecting rod, a cleaning rod is provided inside the collecting rod, a first fan is provided at one end of the collecting rod, a second fan is provided at one end of the cleaning rod, a cleaning sleeve is provided under the first fan, a cleaning plate is provided on one side of the cleaning sleeve, and the cleaning plate is tightly pressed against the conical filter plate.

[0008] Preferably, an arc-shaped collecting cover is provided inside the conical filter plate, and the arc-shaped collecting cover is rotatably connected to a cleaning mechanism.

[0009] Preferably, a collecting hole is provided at one end of the collecting rod close to the arc-shaped collecting cover, and the other end of the collecting rod is rotatably connected to the lower rectangular shell.

[0010] Preferably, the bottom of the lower rectangular shell is rotatably connected to a collection box, and the collection box is made of transparent explosion-proof glass.

[0011] According to the above scheme,

[0012] Compared with the prior art, the beneficial effects are as follows:

[0013] The utility model is connected to a lower rectangular shell by fixing one end of the exhaust gas collecting end, a collecting box is arranged below the lower rectangular shell, the upper part of the lower rectangular shell is divided into a cylindrical shell, a conical filter plate is arranged inside the cylindrical shell, and the conical filter plate is rotatably connected to a cleaning mechanism, so as to effectively realize the exhaust gas collecting and filtering functions, and at the same time, it is convenient to clean the conical filter plate, so as to maintain the long-term use effect of the conical filter plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the distribution structure of the collection components of the utility model;

[0015] Figure 2 This is a schematic diagram of the exploded structure of the collection component of the utility model;

[0016] Figure 3 This is a schematic diagram of the decomposed structure of the cleaning mechanism of the utility model;

[0017] Figure 4 It is a schematic diagram of the overall structure of the utility model;

[0018] In the figure: 1. waste heat recovery body; 2. hot outlet; 3. cold outlet; 4. collecting component; 5. exhaust gas collecting end; 6. cold air inlet; 7. cleaning mechanism; 401. cylindrical shell; 402. conical filter plate; 403. upper rectangular shell; 404. lower rectangular shell; 405. arc-shaped collecting cover; 406. collecting box; 701. collecting rod; 702. cleaning rod; 703. first fan; 704. second fan; 705. cleaning sleeve; 706. cleaning plate; 707. collecting hole. DETAILED DESCRIPTION

[0019] The utility model is further described in detail below with reference to the accompanying drawings and through specific embodiments. The following embodiments are merely illustrative and not limiting of the protection scope of the utility model.

[0020] Example

[0021] like Figure 1-Figure 4As shown: A waste heat recovery device for tail gas of an epitaxial furnace, comprising: a waste heat recovery body 1 is the core part of the device, responsible for the main work of waste heat recovery. A hot outlet 2 is provided on the top of the body, used to discharge hot air or hot water after waste heat recovery. A cold outlet 3 is provided on one side of the hot outlet 2, used to discharge unused cold air or cold water. This design can effectively recycle waste heat and improve energy utilization efficiency.

[0022] A set of collecting components 4 is provided on both sides of the waste heat recovery body 1. The collecting components 4 are fixedly connected to the tail gas collecting end 5 and the cold air inlet end 6. The tail gas collecting end 5 is responsible for collecting the tail gas containing particulate matter such as silicon dust and arsenic dust discharged from the epitaxial furnace, while the cold air inlet end 6 is used to introduce external cold air or cold water to exchange heat with the tail gas. In this way, particulate matter such as silicon dust and arsenic dust can be separated from the tail gas, reducing the impact on the waste heat recovery device.

[0023] In order to prevent silicon dust, arsenic dust and other particulate matter from adhering to the inside of the collecting assembly 4, causing the pipeline to be blocked and affecting the waste heat recovery efficiency, a cleaning mechanism 7 is provided inside the collecting assembly 4. The cleaning mechanism 7 can use mechanical cleaning, gas purging or liquid flushing to regularly clean the collecting assembly 4 to remove the attached particulate matter, thereby ensuring the smoothness of the pipeline and the high efficiency of waste heat recovery.

[0024] It can be understood that the collection assembly 4 includes a cylindrical shell 401, which has a solid structure and appropriate size to adapt to waste heat recovery systems of different sizes. A conical filter plate 402 is provided inside the cylindrical shell 401. The filter plate adopts a conical design and can effectively capture and filter particulate matter such as silicon dust and arsenic dust in the exhaust gas. The material of the conical filter plate 402 can be a high-efficiency filter material, such as ceramic or metal wire mesh, to ensure the filtering effect and service life.

[0025] The upper rectangular shell 403 is fixedly connected to the cylindrical shell 401, and one end of the upper rectangular shell 403 is fixedly connected to the inside of the waste heat recovery body 1 to ensure that the exhaust gas can smoothly flow into the waste heat recovery body for heat exchange. The design of the upper rectangular shell 403 takes into account the principles of fluid dynamics and heat transfer to minimize fluid resistance and improve heat transfer efficiency.

[0026] The lower rectangular shell 404 is fixedly connected to the bottom of the cylindrical shell 401, and one end of the lower rectangular shell 404 is fixedly connected to the tail gas collecting terminal 5. The tail gas collecting terminal 5 is responsible for collecting the tail gas discharged from the epitaxial furnace and introducing it into the collecting component 4 for filtering. The design of the lower rectangular shell 404 takes into account the flow rate and emission requirements of the tail gas to ensure that the tail gas can smoothly enter the collecting component and be effectively filtered.

[0027] By adopting the collection assembly 4 of the above structure, efficient exhaust gas collection and filtering functions can be achieved. After the exhaust gas is discharged from the epitaxial furnace, it enters the lower rectangular shell 404 through the exhaust gas collection end 5, and then flows upward through the conical filter plate 402 inside the cylindrical shell 401, and particulate matter is effectively captured and filtered down. The filtered exhaust gas continues to flow upward, enters the waste heat recovery body 1 through the upper rectangular shell 403 for heat exchange, and realizes the recovery and utilization of waste heat.

[0028] It can be understood that: a cleaning mechanism 7 is provided at the central axis of the conical filter plate 402, and the cleaning mechanism 7 includes a collecting rod 701, a cleaning rod 702 is provided inside the collecting rod 701, a first fan 703 is provided at one end of the collecting rod 701, a second fan 704 is provided at one end of the cleaning rod 702, a cleaning sleeve 705 is provided below the first fan 703, a cleaning plate 706 is provided on one side of the cleaning sleeve 705, and the cleaning plate 706 is tightly pressed against the conical filter plate 402. Through this design, particulate matter such as silicon dust and arsenic dust attached to the conical filter plate 402 can be effectively removed to maintain the permeability and filtering effect of the filter plate. At the same time, the cleaning mechanism 7 is operated by the fan and the exhaust gas flow, so that it does not need to provide additional energy, can rotate by itself, and improves the cleaning efficiency and convenience.

[0029] It is understood that the conical filter plate 402 is a key part of the collection assembly 4. Its unique conical design enables it to effectively capture and filter particulate matter such as silicon dust and arsenic dust in the exhaust gas. The filter plate can be made of high-efficiency filter material, such as ceramic or metal mesh, to ensure filtering effect and service life.

[0030] An arc-shaped collecting cover 405 is provided inside the conical filter plate 402. The arc-shaped collecting cover 405 is designed in an arc shape to adapt to the conical shape of the filter plate and can better collect the filtered particulate matter. The arc-shaped collecting cover 405 can be made of a wear-resistant and corrosion-resistant material to ensure its long-term stable operation.

[0031] The arc-shaped collecting hood 405 is rotatably connected to the cleaning mechanism 7 to form a linkage cleaning system. The cleaning mechanism 7 includes components such as a motor, a reducer, and a rotating shaft, which are used to drive the arc-shaped collecting hood 405 to rotate. Through the rotational movement, the arc-shaped collecting hood 405 can completely remove the particulate matter attached to the filter plate and collect it into a designated container.

[0032] The driving mode of the cleaning mechanism 7 can be electric or pneumatic, which is selected according to specific process requirements and operating conditions. At the same time, the cleaning mechanism 7 can be equipped with sensors and control systems to achieve automated cleaning operations and improve cleaning efficiency and convenience.

[0033] It is understood that the conical filter plate 402 is a key part of the collection assembly 4. Its unique conical design enables it to effectively capture and filter particulate matter such as silicon dust and arsenic dust in the exhaust gas. The filter plate can be made of high-efficiency filter material, such as ceramic or metal mesh, to ensure filtering effect and service life.

[0034] An arc-shaped collecting cover 405 is provided inside the conical filter plate 402. The arc-shaped collecting cover 405 is designed in an arc shape to adapt to the conical shape of the filter plate and can better collect the filtered particulate matter. The arc-shaped collecting cover 405 can be made of a wear-resistant and corrosion-resistant material to ensure its long-term stable operation.

[0035] The arc-shaped collecting hood 405 is rotatably connected to the cleaning mechanism 7 to form a linkage cleaning system. The cleaning mechanism 7 includes components such as a motor, a reducer, and a rotating shaft, which are used to drive the arc-shaped collecting hood 405 to rotate. Through the rotational movement, the arc-shaped collecting hood 405 can completely remove the particulate matter attached to the filter plate and collect it into a designated container.

[0036] The driving mode of the cleaning mechanism 7 can be electric or pneumatic, which is selected according to specific process requirements and operating conditions. At the same time, the cleaning mechanism 7 can also be equipped with sensors and control systems to achieve automated cleaning operations and improve cleaning efficiency and convenience.

[0037] It is understood that the lower rectangular housing 404 is an important part of the collection assembly, connected to the exhaust gas collection end, and is responsible for introducing the exhaust gas into the collection assembly for filtering and processing. Its structure is strong and can withstand the pressure and temperature changes generated by the exhaust gas.

[0038] A collection box 406 is rotatably connected to the bottom of the lower rectangular housing 404. The collection box 406 is mainly used to collect particulate matter after filtering to ensure that it can be uniformly and safely processed. This rotatable connection method makes the collection box convenient and flexible, and it can be easily removed from the system for cleaning or replacement.

[0039] The collection box 406 is made of transparent explosion-proof glass. This material selection not only ensures the firmness and stability of its structure, but also enhances the visualization of the system. Through the transparent glass, the operator can directly observe the collection of particulate matter, so as to timely judge the filtering effect and cleaning needs. At the same time, the use of explosion-proof glass also ensures its safety when handling exhaust gas that may contain harmful substances.

[0040] The working process of the utility model is as follows: when the high-temperature exhaust gas generated in the furnace enters the collection assembly through the exhaust gas collection end, it first passes through the conical filter plate inside the cylindrical shell, and a cleaning mechanism is provided at the central axis of the conical filter plate. Under the action of the cleaning mechanism, the first fan generates airflow to press the cleaning plate tightly onto the conical filter plate, thereby ensuring that the exhaust gas can pass through the small holes of the filter plate, while filtering out dust, debris, etc.

[0041] After that, the exhaust gas that has passed through the filter plate passes through the arc-shaped collection cover and finally enters the collection box for waste heat recovery. At the same time, the cold air enters the collection component from the cold air inlet end, meets the hot air, and is discharged at the cold outlet end. During the whole process, the role of the cleaning mechanism is to ensure the smooth flow of the conical filter plate, so that the exhaust gas can smoothly enter the arc-shaped collection cover and finally enter the collection box.

[0042] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. An epitaxial furnace tail gas waste heat recovery device, comprising: A waste heat recovery body (1) is characterized in that a hot outlet (2) is provided at the top of the waste heat recovery body (1), a cold outlet (3) is provided on one side of the hot outlet (2), a group of collecting components (4) are provided on both sides of the waste heat recovery body (1), the collecting component (4) is fixedly connected to the exhaust gas collecting end (5), and the other collecting component (4) is fixedly connected to the cold air inlet end (6), and a cleaning mechanism (7) is provided inside the collecting component (4).

2. The device for recovering waste heat from tail gas of an epitaxial furnace according to claim 1, characterized in that: The collection assembly (4) comprises a cylindrical shell (401), a conical filter plate (402) is provided inside the cylindrical shell (401), an upper rectangular shell (403) is fixedly connected to the top of the cylindrical shell (401), one end of the upper rectangular shell (403) is fixedly connected to the waste heat recovery body (1), and a lower rectangular shell (404) is fixedly connected to the bottom of the cylindrical shell (401), and one end of the lower rectangular shell (404) is fixedly connected to the exhaust gas collection end (5).

3. The device for recovering waste heat from tail gas of an epitaxial furnace according to claim 2, characterized in that: A cleaning mechanism (7) is provided at the central axis of the conical filter plate (402), and the cleaning mechanism (7) comprises a collecting rod (701), a cleaning rod (702) is provided inside the collecting rod (701), a first fan (703) is provided at one end of the collecting rod (701), a second fan (704) is provided at one end of the cleaning rod (702), a cleaning sleeve (705) is provided below the first fan (703), a cleaning plate (706) is provided on one side of the cleaning sleeve (705), and the cleaning plate (706) is tightly pressed against the conical filter plate (402).

4. The device for recovering waste heat from tail gas of an epitaxial furnace according to claim 3, characterized in that: An arc-shaped collecting cover (405) is provided inside the conical filter plate (402), and the arc-shaped collecting cover (405) is rotatably connected to the cleaning mechanism (7).

5. The device for recovering waste heat from tail gas of an epitaxial furnace according to claim 4, characterized in that: A collecting hole (707) is provided at one end of the collecting rod (701) close to the arc-shaped collecting cover (405), and the other end of the collecting rod (701) is rotatably connected to the lower rectangular shell (404).

6. The device for recovering waste heat from tail gas of an epitaxial furnace according to claim 5, characterized in that: The bottom of the lower rectangular shell (404) is rotatably connected to a collection box (406), and the collection box (406) is made of transparent explosion-proof glass.

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