Magnesium target cleaning device

Abstract

The utility model relates to the technical field of magnesium target material cleaning, in particular to a magnesium target material cleaning device which comprises a water storage tank, supporting columns are installed on the end face of the water storage tank and located at the corners, the upper ends of the four supporting columns are connected through a cleaning tank, and a drainage pipe is installed at the bottom of the cleaning tank through a connecting hole. The lower end of the drainage pipe is connected with a connecting piece through a connector, a filter screen is installed on the inner wall of the connecting piece, the lower end of the connecting piece is connected with a connecting pipe through a connector, and the other end of the connecting pipe is connected with a filter pipe through a connector. By arranging the filter screen and the like, the problems that an existing magnesium target cleaning device lacks a device for filtering cleaning liquid, the cleaning liquid contains dust and impurities, and the circulating cleaning use effect of the cleaning liquid becomes poor are solved, so that the cleaning effect of the magnesium target cleaning device is improved, meanwhile, the repeated utilization rate of the cleaning liquid is increased, the cost is saved, and the practicability is high. And resource waste is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of magnesium target cleaning, in particular to a magnesium target cleaning device. Background Art

[0002] Magnesium targets, mainly composed of magnesium (Mg), are materials prepared to meet specific physical thin film deposition processes. The purity is usually 99.99% or higher. Magnesium is the eighth most abundant element in the earth's crust, with a density of 1.74 g / cm³, and is a light metal. Its melting point is 650°C, and at room temperature, a stable oxide film will form on the surface, which makes magnesium have good corrosion resistance to most industrial environments. It has good electrical conductivity, with an electrical conductivity of about 22.4 MS / m, and magnesium has a strong ability to combine with other elements at room temperature, especially with oxygen, nitrogen and sulfur. This makes magnesium targets have unique application value in thin film preparation, especially in the field where magnesium compound films are required.

[0003] The existing magnesium target cleaning device lacks a device for filtering the cleaning liquid, so that the cleaning liquid contains dust and impurities, and the effect of the cleaning liquid circulation cleaning is poor. Therefore, a magnesium target cleaning device is needed to improve the above problems. Utility Model Content

[0004] The utility model aims to provide a magnesium target cleaning device to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A magnesium target cleaning device comprises a water storage tank, support columns are installed on the end surface of the water storage tank and at the corners, the upper ends of four support columns are connected through a cleaning box, a drain pipe is installed at the bottom of the cleaning box through a connecting hole, the lower end of the drain pipe is connected to a connecting piece through a joint, a filter screen is installed on the inner wall of the connecting piece, the lower end of the connecting piece is connected to a connecting pipe through a joint, the other end of the connecting pipe is connected to a filter tube through a joint, a fixing plate is installed on the inner wall of the filter tube, a water inlet hole is opened on the fixing plate, a PP filter element is arranged on the end surface of the fixing plate, a mounting plate is installed on the left side wall of the water storage tank, a water pump is installed on the end surface of the mounting plate, the front end of the water pump is connected to a first water pipe through a joint, and the rear end of the water pump is connected to a second water pipe through a joint.

[0007] As a preferred solution of the utility model, the end surface of the water storage tank is connected to the lower end of the filter tube through a connecting hole, and the left side wall of the water storage tank is connected to the other end of the first water pipe through a connecting hole.

[0008] As a preferred solution of the utility model, a plurality of water inlet holes are opened and evenly distributed on the fixed plate, and the PP filter element and the inner wall of the filter tube are matched.

[0009] As a preferred solution of the utility model, the left side wall of the cleaning box is connected to the other end of the second water pipe through a connecting hole, and the front of the cleaning box is connected to a box door through a hinge.

[0010] As a preferred solution of the utility model, the connecting pipe is arranged in an S-shaped structure, and the drainage pipe and the filter pipe are arranged parallel to each other.

[0011] As a preferred solution of the utility model, the drainage pipe, the connecting pipe, the filter pipe, the first water pipe and the second water pipe are all made of metal materials.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] In the utility model, a filter screen and the like are arranged in a magnesium target cleaning device, the cleaning liquid in the cleaning box flows to the connecting piece through a drain pipe, the filter screen filters large impurities in the cleaning liquid, the filtered cleaning liquid flows to the PP filter element through the connecting pipe, the PP filter element filters small impurities and dust in the cleaning liquid, the filtered cleaning liquid enters the liquid storage tank, and is pumped into the cleaning box by a water pump for cyclic use, the filtered cleaning liquid has a better cleaning effect on the magnesium target, and the filter screen and the like are arranged to solve the problem that the existing magnesium target cleaning device lacks a device for filtering the cleaning liquid, so that the cleaning liquid contains dust and impurities, and the cleaning effect of the cleaning liquid circulation is poor, thereby improving the cleaning effect of the magnesium target cleaning device, and at the same time, the reuse rate of the cleaning liquid is improved, cost is saved, and resource waste is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0015] Figure 2 It is a partial structural schematic diagram of the utility model;

[0016] Figure 3 It is a schematic diagram of the partial cutaway structure of the utility model.

[0017] In the figure: 1. liquid storage tank; 2. support column; 3. cleaning tank; 4. drain pipe; 5. connector; 6. filter screen; 7. connecting pipe; 8. filter tube; 9. fixing plate; 10. water inlet hole; 11. pp filter element; 12. mounting plate; 13. water pump; 14. first water pipe; 15. second water pipe; 16. tank door. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0019] Example: See Figure 1-3 A magnesium target cleaning device shown in the figure comprises a liquid storage tank 1, a support column 2 is installed on the end surface of the liquid storage tank 1 and at the corner, the upper ends of the four support columns 2 are connected through a cleaning box 3, a drain pipe 4 is installed at the bottom of the cleaning box 3 through a connecting hole, the lower end of the drain pipe 4 is connected to a connecting piece 5 through a joint, a filter screen 6 is installed on the inner wall of the connecting piece 5, the lower end of the connecting piece 5 is connected to a connecting pipe 7 through a joint, the other end of the connecting pipe 7 is connected to a filter tube 8 through a joint, a fixing plate 9 is installed on the inner wall of the filter tube 8, a water inlet hole 10 is opened on the fixing plate 9, a pp filter element 11 is arranged on the end surface of the fixing plate 9, a mounting plate 12 is installed on the left side wall of the liquid storage tank 1, a water pump 13 is installed on the end surface of the mounting plate 12, the front end of the water pump 13 is connected to a first water pipe 14 through a joint, and the rear end of the water pump 13 is connected to a first water pipe 14 through a joint. The joint is connected to a second water pipe 15, the cleaning liquid in the cleaning box 3 flows to the connecting piece 5 through the drain pipe 4, the filter screen 6 filters large impurities in the cleaning liquid, the filtered cleaning liquid flows through the connecting pipe 7 to the PP filter element 11, the PP filter element 11 filters small impurities and dust in the cleaning liquid, the filtered cleaning liquid enters the liquid storage tank 1, and is pumped into the cleaning box 3 by the water pump 13 for recycling. The filtered cleaning liquid has a better cleaning effect on the magnesium target. By setting the filter screen 6, the problem that the existing magnesium target cleaning device lacks a device for filtering the cleaning liquid, so that the cleaning liquid contains dust and impurities, and the cleaning effect of the cleaning liquid circulation is poor is solved, thereby improving the cleaning effect of the magnesium target cleaning device, and at the same time, the reuse rate of the cleaning liquid is improved, saving costs and reducing resource waste.

[0020] In this embodiment, refer to Figure 1-3 As shown, the end face of the liquid storage tank 1 is connected to the lower end of the filter tube 8 through a connecting hole, and the left side wall of the liquid storage tank 1 is connected to the other end of the first water pipe 14 through a connecting hole; a plurality of water inlet holes 10 are opened and evenly distributed on the fixing plate 9, and the pp filter element 11 is matched with the inner wall of the filter tube 8; the left side wall of the cleaning box 3 is connected to the other end of the second water pipe 15 through a connecting hole, and the front of the cleaning box 3 is connected to a box door 16 through a hinge;

[0021] In this embodiment, refer to Figure 1-3As shown, the connecting pipe 7 is arranged in an S-shaped structure, and the drain pipe 4 and the filter pipe 8 are arranged in parallel with each other; the drain pipe 4, the connecting pipe 7, the filter pipe 8, the first water pipe 14 and the second water pipe 15 are all made of metal materials; the connecting pipe 7 is arranged in an S-shaped structure, when the cleaning liquid flows through the connecting pipe 7, due to the S-shaped structure, the flow velocity of the cleaning liquid flowing in can be reduced, and the filtering effect of the filtering device on the cleaning liquid is increased, so that the cleaning effect of the magnesium target cleaning device is good;

[0022] Working principle: When the magnesium target cleaning device is in use, the cleaning device is started, the mounting plate 12 works to extract the cleaning liquid from the liquid storage tank 1 through the first water pipe 14, and then pump it into the cleaning tank 3 through the second water pipe 15. The equipment in the cleaning tank 3 performs surface cleaning operations on the magnesium target. The subsequent cleaning liquid reaches the bottom of the cleaning tank 3 and flows to the drain pipe 4, and then flows through the connecting piece 5. The filter screen 6 in the connecting piece 5 performs the first filtration on the cleaning liquid. The filter screen 6 filters the large impurities in the cleaning liquid. The filtered cleaning liquid flows through the connecting pipe 7. Under the S-shaped setting of the connecting pipe 7, the flow rate of the cleaning liquid is slowed down. The cleaning liquid then flows to the filter tube 8. The pp filter element 11 in the filter tube 8 is used for cleaning. The liquid is filtered twice to filter out small impurities and dust in the cleaning liquid. The filtered cleaning liquid finally enters the liquid storage tank 1 through the water inlet hole 10, is pumped out by the water pump 13 through the first water pipe 14, and is pumped into the cleaning tank 3 through the second water pipe 15 for recycling. The filtered cleaning liquid becomes cleaner and has a better cleaning effect. The problem that the existing magnesium target cleaning device lacks a device for filtering the cleaning liquid, so that the cleaning liquid contains dust and impurities, and the cleaning effect of the cleaning liquid circulation is poor is solved by setting the filter net 6 and the like.

[0023] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A magnesium target cleaning device, comprising a water storage tank (1), characterized in that: A support column (2) is installed on the end surface of the water storage tank (1) and at the corner. The upper ends of the four support columns (2) are connected via a cleaning box (3). A drainage pipe (4) is installed at the bottom of the cleaning box (3) via a connecting hole. The lower end of the drainage pipe (4) is connected to a connecting piece (5) via a joint. A filter screen (6) is installed on the inner wall of the connecting piece (5). The lower end of the connecting piece (5) is connected to a connecting pipe (7) via a joint. The other end of the connecting pipe (7) is connected to a filter screen (6) via a joint. A tube (8), a fixing plate (9) is installed on the inner wall of the filter tube (8), a water inlet hole (10) is opened on the fixing plate (9), a PP filter element (11) is arranged on the end surface of the fixing plate (9), a mounting plate (12) is installed on the left side wall of the water storage tank (1), a water pump (13) is installed on the end surface of the mounting plate (12), the front end of the water pump (13) is connected to a first water pipe (14) through a joint, and the rear end of the water pump (13) is connected to a second water pipe (15) through a joint.

2. A magnesium target cleaning device according to claim 1, characterized in that: The end surface of the water storage tank (1) is connected to the lower end of the filter tube (8) through a connecting hole, and the left side wall of the water storage tank (1) is connected to the other end of the first water pipe (14) through a connecting hole.

3. A magnesium target cleaning device according to claim 1, characterized in that: A plurality of water inlet holes (10) are provided and are evenly distributed on the fixed plate (9), and the PP filter element (11) is adapted to fit the inner wall of the filter tube (8).

4. A magnesium target cleaning device according to claim 1, characterized in that: The left side wall of the cleaning box (3) is connected to the other end of the second water pipe (15) via a connecting hole, and the front side of the cleaning box (3) is connected to a box door (16) via a hinge.

5. The magnesium target cleaning device according to claim 1, characterized in that: The connecting pipe (7) is arranged in an S-shaped structure, and the drainage pipe (4) and the filter pipe (8) are arranged parallel to each other.

6. A magnesium target cleaning device according to claim 1, characterized in that: The drainage pipe (4), the connecting pipe (7), the filter pipe (8), the first water pipe (14) and the second water pipe (15) are all made of metal.

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