Vacuum magnetic suspension transmission mechanism and vacuum coating equipment

Abstract

The utility model discloses a vacuum magnetic suspension transmission mechanism and vacuum coating equipment, and the vacuum magnetic suspension transmission mechanism comprises an upper magnetic conductor which is provided with a first magnetic part and a second magnetic part which are arranged in parallel with the advancing direction of a workpiece and have opposite polarities; the workpiece frame is arranged below the upper magnetic conductor, the workpiece frame is provided with a top side and a bottom side which are back to back, the top side is provided with a third magnetic part and a fourth magnetic part which are arranged in parallel and opposite in polarity, and the first magnetic part and the third magnetic part are arranged in an aligned mode and attract each other; the second magnetic part and the fourth magnetic part are aligned and attract each other, and the second magnetic part and the third magnetic part are arranged in a staggered manner and repel each other; and the driving assembly is used for driving the workpiece frame to move along the upper magnetic conductance. Compared with the prior art, the operation stability of the workpiece frame can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating equipment, and in particular to a vacuum magnetic suspension transmission mechanism and vacuum coating equipment. Background Art

[0002] Vacuum coating equipment usually includes a workpiece rack, an upper magnetic guide and a transfer wheel, wherein the workpiece rack is used to carry and transfer the workpiece, the transfer wheel is used to carry and transfer the workpiece rack, and the upper magnetic guide is located above the workpiece rack to assist the movement of the workpiece rack.

[0003] For example, patent CN204325488U discloses a vacuum magnetron sputtering coating magnetic levitation transmission device, including an upper magnetic guide, a car body (workpiece rack) and a transmission wheel. A guide rod that slides with the transmission wheel is provided at the bottom of the car body. The strong magnetic S pole fixed on the top of the vacuum chamber attracts the strong magnetic N pole at the upper end of the car. Although it can ensure that the car will not have a large swing and vibration during operation to a certain extent, and can achieve a faster operating speed and a relatively stable operation effect, there is still a certain friction between the guide rod of the car body and the transmission wheel during operation, which is easy to generate dust and contaminate the product; in addition, the car body is generally large, and the car body is prone to tilting left and right during travel, affecting stable operation. Utility Model Content

[0004] In view of the problems in the prior art, the present application provides a vacuum magnetic levitation transmission mechanism and a vacuum coating device to achieve smooth transportation of a workpiece rack while reducing mutual collisions between components.

[0005] The vacuum magnetic suspension transmission mechanism provided in this application includes:

[0006] The upper magnetic guide is provided with a first magnetic member and a second magnetic member arranged in parallel with the direction of travel of the workpiece and having opposite polarities;

[0007] A workpiece rack is arranged below the upper magnetic guide, the workpiece rack has a top side and a bottom side facing each other, the top side is provided with a third magnetic member and a fourth magnetic member arranged in parallel and having opposite polarities, the first magnetic member is arranged in alignment with the third magnetic member and attracts each other, and is arranged in a staggered manner with the fourth magnetic member and repels each other, the second magnetic member is arranged in alignment with the fourth magnetic member and attracts each other, and is arranged in a staggered manner with the third magnetic member and repels each other;

[0008] A driving assembly is used to drive the workpiece rack to move along the upper magnetic guide.

[0009] Several optional methods are also provided below, but they are not intended to be additional limitations on the above-mentioned overall solution, but are merely further supplements or preferences. Under the premise that there are no technical or logical contradictions, each optional method can be combined with the above-mentioned overall solution separately, and multiple optional methods can also be combined.

[0010] Optionally, a first spacer is disposed between the first magnetic member and the second magnetic member, and a second spacer is disposed between the third magnetic member and the fourth magnetic member.

[0011] Optionally, the upper magnetic guide has a guide groove that is gap-matched with the top side of the workpiece holder, and the first magnetic member and the second magnetic member are arranged at the top of the guide groove.

[0012] Optionally, each magnetic member is a bipolar magnet.

[0013] Optionally, each magnetic member has a top and a bottom with opposite polarities along the height direction; the top and the bottom are arranged in alignment.

[0014] Optionally, a base is provided on the bottom side of the workpiece rack, and the base has a magnetic plate extending along the moving direction of the workpiece rack. The driving assembly includes a support bracket slidably matched with the base and a plurality of electromagnetic drivers fixed to the support bracket and acting on the magnetic plate.

[0015] Optionally, a row of horizontally arranged rollers is provided on the support frame, and a limiting groove cooperating with the rollers is provided on the base.

[0016] Optionally, the wheel surface of the roller is a concave surface, and positioning ribs cooperating with the wheel surface of the roller are provided on both upper and lower sides of the limiting groove.

[0017] Optionally, a first magnetic guide and a second magnetic guide with opposite polarities and arranged up and down are provided between the support bracket and the base.

[0018] The present application also provides a vacuum coating device, comprising any of the vacuum magnetic levitation transmission mechanisms.

[0019] Compared with the prior art, the present application sets a group of magnetic parts that attract and repel each other between the upper magnetic guide and the top of the workpiece rack, which can not only keep the workpiece rack in a suspended state, but also prevent the workpiece rack from tipping over, which is beneficial to improving the operating stability of the workpiece rack. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the structure of a vacuum magnetic suspension transmission mechanism in one embodiment of the present application;

[0021] Figure 2 It is a partial cross-sectional view of the upper magnetic guide and the workpiece holder;

[0022] Figure 3a A layout diagram of the upper magnetic guide and the magnetic components in the workpiece holder in one embodiment;

[0023] Figure 3b is a layout diagram of the upper magnetic guide and the magnetic components in the workpiece holder in another embodiment;

[0024] Figure 4 It is a simulation experiment parameter diagram of the prior art;

[0025] Figure 5 This is a simulation experiment parameter diagram for this application;

[0026] Figure 6 It is a partial structural diagram of the bottom side of the vacuum magnetic suspension transmission mechanism;

[0027] Figure 7 It is a partial cross-sectional view of the bottom side of the vacuum magnetic suspension transmission mechanism;

[0028] Figure 8a is a layout diagram of each magnetic component in the first flux guide and the second flux guide in one embodiment;

[0029] Figure 8b FIG. 4 is a layout diagram of the magnetic components in the first flux guide and the second flux guide in another embodiment.

[0030] The reference numerals in the figures are described as follows:

[0031] 100, upper magnetic guide; 110, first magnetic member; 120, second magnetic member; 130, first spacer; 131, first chamber; 132, second chamber; 133, first partition; 140, guide groove;

[0032] 200, workpiece rack; 210, third magnetic member; 220, fourth magnetic member; 230, second spacer; 231, third chamber; 232, fourth chamber; 233, second partition; 240, base; 241, magnetic plate; 242, limit groove; 243, positioning rib;

[0033] 300, driving assembly; 310, supporting bracket; 320, electromagnetic driver; 321, fixing seat; 322, coil;

[0034] 400, roller; 410, wheel surface;

[0035] 500, first magnetic guide; 510, fifth magnetic member; 520, sixth magnetic member;

[0036] 600, second magnetic guide; 610, seventh magnetic member; 620, eighth magnetic member. DETAILED DESCRIPTION

[0037] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0038] It should be noted that when a component is referred to as being "connected" to another component, it may be directly connected to the other component or there may be a central component. When a component is referred to as being "disposed on" another component, it may be directly disposed on the other component or there may be a central component at the same time.

[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0040] See also Figure 1 ~3, an embodiment of the present application provides a vacuum magnetic levitation transmission mechanism, including an upper magnetic guide 100, a workpiece rack 200 and a driving assembly 300; wherein the upper magnetic guide 100 is provided with a first magnetic member 110 and a second magnetic member 120, the first magnetic member 110 and the second magnetic member 120 are arranged in parallel with the direction of travel of the workpiece and have opposite polarities; the workpiece rack 200 is arranged below the upper magnetic guide 100, the workpiece rack 200 has a top side and a bottom side facing each other, and the top side is provided with a third magnetic member 210 and a fourth magnetic member 220, the third magnetic member 210 and the fourth magnetic member 220 are arranged in parallel and have opposite polarities; wherein the first magnetic member 110 and the third magnetic member 210 are arranged in alignment and attract each other, and the first magnetic member 110 and the fourth magnetic member 220 are arranged in a staggered manner and repel each other; the second magnetic member 120 and the fourth magnetic member 220 are arranged in alignment and attract each other, and the second magnetic member 120 and the third magnetic member 210 are arranged in a staggered manner and repel each other. The driving assembly 300 is used to drive the workpiece holder 200 to move along the upper magnetic guide 100 .

[0041] In this embodiment, due to the mutual attraction between the first magnetic component 110 and the third magnetic component 210 and the mutual attraction between the second magnetic component 120 and the fourth magnetic component 220, there is a mutual gravitational force between the upper magnetic guide 100 and the top of the workpiece rack 200, and the suspension of the workpiece rack 200 can be achieved; due to the mutual repulsion between the first magnetic component 110 and the fourth magnetic component 220 and the mutual repulsion between the second magnetic component 120 and the third magnetic component 210, a correcting force can be provided in a direction perpendicular to the travel path of the workpiece rack 200 to prevent the workpiece rack 200 from tipping left or right, thereby improving the operating stability of the workpiece rack 200 and avoiding mutual collision of components.

[0042] See also Figure 2 In the embodiment shown in 3, a first spacer 130 is provided between the first magnetic member 110 and the second magnetic member 120 to avoid mutual attraction, and a second spacer 230 is provided between the third magnetic member 210 and the fourth magnetic member 220 to avoid mutual attraction. The first spacer 130 has a first chamber 131 and a second chamber 132 arranged in parallel inside, which are used to accommodate the first magnetic member 110 and the second magnetic member, respectively, and the first chamber 131 and the second chamber 132 are separated by a first partition 133 provided in the first spacer 130; the second spacer has a third chamber 231 and a fourth chamber 232 arranged in parallel inside, which are used to accommodate the third magnetic member 210 and the fourth magnetic member 220, respectively, and the third chamber 231 and the fourth chamber 232 are separated by a second partition 233.

[0043] Each magnetic member may be formed by splicing a plurality of magnets and arranged along the extension direction of the upper magnetic guide. The first partition 133 and the second partition 233 are both made of non-magnetic conductive materials. In addition, the first partition 130 further includes a top plate, a bottom plate and a side plate to seal the first chamber and the second chamber, wherein the bottom plate may be made of a magnetic conductive material to form a magnetic yoke, thereby enhancing the attraction of each magnetic member between the upper magnetic guide and the workpiece frame and the left and right correcting force.

[0044] The upper magnetic guide can be arranged in sections along the running direction of the workpiece frame, for example, in two sections. Correspondingly, the first magnetic member 110 and the second magnetic member 120 are also arranged in sections along the extending direction of the upper magnetic guide, for example, in two sections.

[0045] In order to make the workpiece rack 200 move along the upper magnetic guide 100 , the upper magnetic guide 100 has a guide groove 140 , which is gap-matched with the top side of the workpiece rack 200 , wherein the first magnetic member 110 and the second magnetic member 120 are arranged at the top of the guide groove 140 to act on the workpiece rack 200 .

[0046] See also Figure 3a , 3b Each magnetic member is a bipolar magnet, having a top and a bottom with opposite polarities (N pole and S pole), and the top and the bottom are aligned. Figure 3aIn the embodiment shown, the top of the first magnetic member 110 is an S pole and the bottom is an N pole; the top of the second magnetic member 120 is an N pole and the end is an S pole; the top of the third magnetic member 210 is an S pole and the bottom is an N pole; the top of the fourth magnetic member 220 is an S pole and the bottom is an N pole. Figure 3b In the embodiment shown, the top of the first magnetic member 110 is an S pole and the bottom is an N pole; the top of the second magnetic member 120 is an N pole and the end is an S pole; the top of the third magnetic member 210 is an N pole and the bottom is an S pole; the top of the fourth magnetic member 220 is an S pole and the bottom is an N pole. In the simulated correction experiment, each magnetic member uses a samarium cobalt magnet SmCo28.

[0047] Ansys Maxwell is used to analyze the correction effect of each technical solution. Figure 4 , taking the prior art solution as the control group, a group of magnetic parts with opposite polarities are arranged between the upper magnetic guide 100 and the workpiece rack 200 in the control group, with the size of 20mm wide and 20mm high, the model interface comparison length direction is 1m (that is, the cross-sectional length of each magnetic part is 1m), and the distance between the two magnetic parts in the height direction is 15mm. When the upper magnetic guide 100 and the workpiece rack 200 are relatively offset along the X-axis, the offset distance is 1mm, and the value of the correction force of the upper magnetic guide 100 on the workpiece rack 200 along the X-axis is 72.541N.

[0048] See also Figure 5 In the present application, the size of each magnetic component is 10mm wide and 20mm high, the model interface comparison length direction is 1m, the horizontal spacing between the first magnetic component 110 and the second magnetic component 120 is 10mm, the horizontal spacing between the third magnetic component 210 and the fourth magnetic component 220 is 10mm, the height spacing between the first magnetic component 110 and the third magnetic component is 15mm, and the height spacing between the second magnetic component 120 and the fourth magnetic component 220 is 15mm. When the upper magnetic guide 100 and the workpiece rack 200 are relatively offset along the X-axis, the offset distance is 1mm, and the value of the correcting force of the upper magnetic guide 100 on the workpiece rack 200 along the X-axis is 93.066N; in addition, compared with a single magnetic part, the double magnetic parts on one side of the upper magnetic guide or on one side of the workpiece rack are separated and arranged, and the magnetic field strength generated is relatively weakened, and the impact on the upper and lower substrate processes of the workpiece rack 200 is relatively small. When the distance between the upper magnetic guide 100 and the workpiece rack 200 is 80mm, the impact is basically zero, and the magnetic field generated between the single magnetic parts is strong. When the distance between the upper magnetic guide 100 and the workpiece rack 200 is 125mm, the impact on the upper and lower substrate processes of the workpiece rack 200 is basically zero, which has a great impact on the process.

[0049] See also Figure 6 , 7In the illustrated embodiment, a base 240 is provided on the bottom side of the workpiece rack 200, and the base 240 has a magnetic plate 241 extending along the moving direction of the workpiece rack 200. The driving assembly 300 includes a support bracket 310 and an electromagnetic driver 320, wherein the support bracket 310 is slidably matched with the base 240, and the electromagnetic driver 320 is provided with a plurality of and fixed to the support bracket 310, and can act on the magnetic plate 241, thereby driving the workpiece rack 200 to move. Specifically, the electromagnetic driver 320 includes a fixed seat 321, and a mounting groove is provided inside the fixed seat 321, and a coil 322 of the electromagnetic driver 320 is placed in the mounting groove.

[0050] A row of horizontally arranged rollers 400 are provided on the support bracket 310, and a limiting groove 242 is provided on the base 240 to cooperate with the rollers 400, which plays a role of limiting cooperation. Further, the wheel surface 410 of the roller 400 is a concave surface, and positioning ribs 243 are provided on both the upper and lower sides of the limiting groove 242, and the positioning ribs 243 cooperate with the wheel surface 410 of the roller 400. Among them, the roller 400 is arranged on the top side of the support bracket 310, and the electromagnetic driver 320 is fixed to the bottom side of the support.

[0051] During operation, the driving assembly 300 does not contact the magnetic plate 241, the first magnetic guide 500 and the second magnetic guide 600 do not contact, the upper magnetic guide 100 does not contact the top of the workpiece rack 200, and the roller 400 does not contact or contacts the limit seat. This not only realizes non-contact and smooth transmission of the workpiece rack 200, reduces the risk of collision between the workpiece rack 200 and other components, but also effectively reduces the contact between moving parts, thereby reducing the risk of dust generation, which is beneficial to improving the coating effect.

[0052] See also Figure 6 , 7 In the illustrated embodiment, a first magnetic guide 500 and a second magnetic guide 600 are provided between the support frame 310 and the base 240 . The first magnetic guide and the second magnetic guide 600 have opposite polarities and are arranged up and down. The interaction between the first magnetic guide and the second magnetic guide 600 realizes the guiding movement of the bottom of the workpiece rack 200 .

[0053] Furthermore, the first magnetic guide 500 is provided with a fifth magnetic member 510 and a sixth magnetic member 520 which are arranged in parallel with the direction of travel of the workpiece rack 200 and have opposite polarities, and the second magnetic guide 600 is provided with a seventh magnetic member 610 and an eighth magnetic member 620 which are arranged in parallel and have opposite polarities; wherein the fifth magnetic member 510 and the seventh magnetic member 610 are arranged in alignment and attract each other, and the fifth magnetic member 510 and the eighth magnetic member 620 are arranged in a staggered manner and repel each other; the sixth magnetic member 520 and the eighth magnetic member 620 are arranged in alignment and attract each other, and the sixth magnetic member 520 and the seventh magnetic member 610 are arranged in a staggered manner and repel each other. Through the interaction between the first magnetic guide 500 and the second magnetic guide 600, not only the guiding movement of the bottom of the workpiece rack 200 can be achieved, but also the deviation correction of the movement of the bottom of the workpiece rack can be achieved, which is conducive to further improving the stability of the operation of the workpiece rack.

[0054] See also Figure 8a , 8b The fifth magnetic member 510, the sixth magnetic member 520, the seventh magnetic member 610 and the eighth magnetic member 620 are bipolar magnets, each of which has a top and a bottom with opposite polarities along the height direction, and the top and the bottom are aligned. Figure 8a In the example, the fifth magnetic member 510 has an S pole at the bottom and an N pole at the top, the sixth magnetic member 520 has an N pole at the bottom and an S pole at the top, and correspondingly, the seventh magnetic member 610 has an N pole at the top and an S pole at the bottom, and the eighth magnetic member 620 has an S pole at the top and an N pole at the bottom. Figure 8b In the figure, the fifth magnetic member 510 has an N pole at the bottom and an S pole at the top, the sixth magnetic member 520 has an S pole at the bottom and an N pole at the top, and correspondingly, the seventh magnetic member 610 has an S pole at the top and an N pole at the bottom, and the eighth magnetic member 620 has an N pole at the top and an S pole at the bottom.

[0055] An embodiment of the present application provides a vacuum coating device, comprising the above vacuum magnetic suspension transmission mechanism. Specifically, the upper magnetic guide 100 is located on the top side of the vacuum coating device, and the driving assembly 300 is installed on the bottom side of the vacuum coating device.

[0056] In the vacuum magnetic levitation transmission mechanism provided in the present application, the movement of the workpiece rack 200 can be driven by the driving component 300 and the magnetic plate 241, and the gravitational force between the upper magnetic guide 100 and the workpiece rack 200 can offset the workpiece rack 200, the driving gravitational force, and the bottom guide gravitational force to achieve the suspension of the workpiece rack 200; the magnetic parts arranged between the upper magnetic guide 100 and the workpiece rack 200 can also play a top guiding and correcting role, and the first magnetic guide and the second magnetic guide 600 can realize bottom guiding movement and bottom movement correction.

[0057] The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification. When the technical features in different embodiments are embodied in the same figure, it can be regarded that the figure also discloses the combination examples of the various embodiments involved.

[0058] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the present application. It should be noted that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A vacuum magnetic suspension transmission mechanism, characterized in that: include: The upper magnetic guide is provided with a first magnetic member and a second magnetic member arranged in parallel with the direction of travel of the workpiece and having opposite polarities; A workpiece rack is arranged below the upper magnetic guide, the workpiece rack has a top side and a bottom side facing each other, the top side is provided with a third magnetic member and a fourth magnetic member arranged in parallel and having opposite polarities, the first magnetic member is arranged in alignment with the third magnetic member and attracts each other, and is arranged in a staggered manner with the fourth magnetic member and repels each other, the second magnetic member is arranged in alignment with the fourth magnetic member and attracts each other, and is arranged in a staggered manner with the third magnetic member and repels each other; A driving assembly is used to drive the workpiece rack to move along the upper magnetic guide.

2. The vacuum magnetic suspension transmission mechanism according to claim 1, characterized in that: A first spacer is disposed between the first magnetic member and the second magnetic member, and a second spacer is disposed between the third magnetic member and the fourth magnetic member.

3. The vacuum magnetic suspension transmission mechanism according to claim 1, characterized in that: The upper magnetic guide has a guide groove which is gap-matched with the top side of the workpiece holder, and the first magnetic component and the second magnetic component are arranged at the groove top of the guide groove.

4. The vacuum magnetic suspension transmission mechanism according to claim 1, characterized in that: Each magnetic member is a bipolar magnet.

5. The vacuum magnetic suspension transmission mechanism according to claim 4, characterized in that: Each magnetic member has a top and a bottom with opposite polarities along the height direction; The top portion and the bottom portion are aligned.

6. The vacuum magnetic suspension transmission mechanism according to claim 1, characterized in that: A base is arranged on the bottom side of the workpiece rack, and the base has a magnetic plate extending along the moving direction of the workpiece rack. The driving assembly comprises a support frame slidably matched with the base and a plurality of electromagnetic drivers fixed on the support frame and acting on the magnetic plate.

7. The vacuum magnetic suspension transmission mechanism according to claim 6, characterized in that: The support frame is provided with a row of horizontally arranged rollers, and the base is provided with limiting grooves matched with the rollers.

8. The vacuum magnetic suspension transmission mechanism according to claim 7, characterized in that: The wheel surface of the roller is a concave surface, and positioning ribs matching the wheel surface of the roller are arranged on both upper and lower sides of the limiting groove.

9. The vacuum magnetic suspension transmission mechanism according to claim 6, characterized in that: A first magnetic guide and a second magnetic guide having opposite polarities and arranged vertically are provided between the support bracket and the base.

10. Vacuum coating equipment, characterized in that: It comprises the vacuum magnetic suspension transmission mechanism as described in any one of claims 1 to 9.

Images