Film coating device and film coating product

Abstract

The utility model provides a coating device and a coating product, the coating device is suitable for the roller type coating mode, the coating device comprises a coating main roller, a winding auxiliary roller and an evaporation source, a film is guided by the winding auxiliary roller to be tangentially attached to the circular surface of the coating main roller for belt running, the evaporation source is located below the coating main roller, and the evaporation source is located below the coating main roller. And a certain included angle is formed between the connecting line between the center of the evaporation source and the center of the coating main roller and the center line of the coating main roller in the vertical direction. According to the embodiment of the utility model, the film coating angle is changed by changing the position of the evaporation source, the growth mode of the film layer is adjusted, the transverse binding force and compactness of film layer deposition are improved, and the structural defect in the transverse spreading direction of the film layer caused by vertical one-way growth of a film surface crystal cluster is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a coating device and a coating product. Background Art

[0002] In the existing coating device, the evaporation surface of the evaporation source faces the deposition substrate film, and the film passes through the circular cooling main roller, or is pulled by the roller system to float in a plane and quickly passes over the evaporation source, so that the evaporation vapor is deposited on the film surface to form a metal film layer. However, whether it is the deposition coating with the main roller or the plane suspension coating, the evaporation surface and the film surface are in a vertical state.

[0003] Since the speed of steam molecules is very large relative to the linear velocity of the film surface, after the steam molecules collide with the film surface and deposit, they grow vertically at almost 90 degrees on the film surface. Therefore, during the rapid deposition and longitudinal growth process, the force on the internal transverse surface of the film layer is weak, resulting in a poor crystallization state, weak bonding force, and even local defects of poor transverse bonding force in the microstructure of the coating layer, forming micro gaps in some positions, reducing the conductivity of the film layer, and reducing the tensile rebound performance of the finished coating product. Under the action of tension, due to the structural defects in the transverse direction of the film layer caused by the vertical unidirectional growth of the crystal clusters on the film surface, the poor transverse bonding force or the presence of micro gaps, or the expansion of gaps, cause irreversible transverse micro-damage to the film layer. Utility Model Content

[0004] In view of this, the purpose of the embodiments of the utility model is to provide a coating device and a coating product to solve the technical problem of structural defects in the lateral direction of the film layer caused by the vertical unidirectional growth of crystal clusters on the film surface in the prior art.

[0005] To achieve the above-mentioned purpose, in the first aspect, an embodiment of the utility model provides a coating device, which is suitable for a roller-type coating method, and the coating device includes: a coating main roller, a winding sub-roller and a first evaporation source, wherein the first evaporation source is located below the coating main roller, and the film is tangentially bonded to the circular surface of the coating main roller under the guidance of the winding sub-roller, wherein a line between the center of the first evaporation source and the center of the coating main roller has a certain acute angle with the center line of the coating main roller in the vertical direction.

[0006] In some possible implementations, the acute angle is greater than 0 degrees and less than 30 degrees.

[0007] In some possible implementations, the vertical distance between the first evaporation source and the coating main roller is 15 cm to 25 cm.

[0008] In some possible implementations, the diameter of the coating main roller is 40 cm to 50 m.

[0009] In some possible implementations, the coating device further includes: a first vacuum chamber, a first unwinding roller and a first winding roller, wherein the first unwinding roller, the first winding roller, the winding auxiliary roller and the coating main roller are rotatably mounted on the side wall of the first vacuum chamber;

[0010] After the film is unwound by the first unwinding roller, it is tangentially attached to the circular surface of the coating main roller under the guidance of the winding auxiliary roller. The metal particles evaporated from the first evaporation source are deposited on the film surface of the film on the coating main roller at different coating angles, and then it is wound up by the first winding roller.

[0011] In the second aspect, an embodiment of the utility model provides a coating device, which is suitable for a suspended coating method, and the coating device includes: a supporting roller and a second evaporation source, the supporting roller is used to support the film walking, and the second evaporation source is located below the film surface of the film, wherein there is a certain acute angle between the plane where the film surface of the film is located and the plane where the second evaporation source is located.

[0012] In some possible implementations, the acute angle is greater than 0 degrees and less than 30 degrees.

[0013] In some possible implementations, the coating device further includes: a second vacuum chamber, a second unwinding roller and a second winding roller, wherein the second unwinding roller, the second winding roller and the supporting roller are rotatably mounted on a side wall of the second vacuum chamber;

[0014] The installation height of the support roller in the vertical direction is different from that of the second unwinding roller and the second winding roller;

[0015] The second evaporation source is located below the film between the second unwinding roller and the supporting roller, and / or the second evaporation source is located below the film between the supporting roller and the second winding roller; the metal particles in the evaporation source are deposited on the film surface of the film at different incident angles.

[0016] In a third aspect, an embodiment of the utility model provides a coating product, and the coating product is prepared based on the coating device described in the first aspect and the second aspect.

[0017] The beneficial technical effects of the above technical solution are:

[0018] The present invention provides a coating device and a coating product, which is suitable for a roller-type coating method. The coating device includes: a coating main roller, a winding auxiliary roller and an evaporation source. The evaporation source is located below the coating main roller. The film is tangentially bonded to the circular surface of the coating main roller under the guidance of the winding auxiliary roller. The line between the center of the evaporation source and the center of the coating main roller and the center line of the coating main roller in the vertical direction have a certain angle. The present invention changes the coating angle by changing the position of the evaporation source, adjusts the growth mode of the film layer, improves the lateral bonding force and density of the film layer deposition, and avoids the structural defects in the lateral direction of the film layer caused by the vertical unidirectional growth of the crystal cluster on the film surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a partial schematic diagram of a roller coating device according to an embodiment of the utility model;

[0021] Figure 2 It is a decomposition schematic diagram of the incident force and velocity of an incident particle in an embodiment of the utility model;

[0022] Figure 3 It is the crack formed by the longitudinal growth of the membrane surface in the prior art;

[0023] Figure 4 It is a partial schematic diagram of a coating device in the prior art;

[0024] Figure 5 It is a schematic diagram of the overall structure of a coating device according to an embodiment of the utility model;

[0025] Figure 6 It is a partial schematic diagram of a suspended film coating device according to an embodiment of the utility model;

[0026] Figure 7 It is a schematic diagram of an incident thin film of an evaporation particle in an embodiment of the utility model;

[0027] Figure 8 It is a schematic diagram of the overall structure of an electroplating device according to an embodiment of the utility model.

[0028] Description of Figure Numbers:

[0029] 10. First vacuum chamber; 11. Coating main roller; 12. Winding auxiliary roller; 13. First evaporation source; 14. First unwinding roller; 15. First winding roller;

[0030] 20. Second vacuum chamber; 21. Support roller; 22. Second evaporation source; 23. Second unwinding roller; 24. Second winding roller;

[0031] 3. Thin film; A. Crack. DETAILED DESCRIPTION

[0032] The features and exemplary embodiments of various aspects of the utility model will be described in detail below. In the detailed description below, many specific details are proposed in order to provide a comprehensive understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the utility model by illustrating examples of the utility model. In the drawings and the following description, at least part of the known structures and technologies are not shown in order to avoid unnecessary understanding of the utility model; and, for clarity, the size of some structures may be exaggerated. In addition, the features, structures or characteristics described below may be combined in one or more embodiments in any suitable manner.

[0033] Embodiment 1

[0034] Figure 1 Schematic diagram of a roller coating device according to an embodiment of the present invention. Figure 1 As shown, the coating device includes: a coating main roller 11, a winding auxiliary roller 12 and a first evaporation source 13. The film 3 is tangentially attached to the coating main roller 11 under the guidance of the winding auxiliary roller 12. The first evaporation source 13 is located below the coating main roller 11, wherein a certain angle a is formed between the line between the center of the first evaporation source 13 and the center of the coating main roller 11 and the center line of the coating main roller 11 in the vertical direction. Optionally, the angle a in this embodiment is greater than 0 degrees and less than 30 degrees, the vertical distance between the first evaporation source 13 and the coating main roller 11 is 15 cm to 25 cm, and the diameter of the coating main roller 11 is 40 cm to 50 cm.

[0035] Specifically, in the present embodiment, a circular coating main roller 11 is disposed above the first evaporation source 13 having a high temperature. The coating main roller 11 can be a cooling main roller. The film 3 to be evaporated is tangentially attached to the circular surface of the cooling main roller through the winding auxiliary roller 12 and moves therewith. A cooling liquid flows through the roller of the cooling main roller to prevent the high-temperature first evaporation source 13 and the high-temperature steam below from scalding the film 3. The line connecting the center point of the first evaporation source 13 below the coating main roller 11 and the center of the coating main roller 11 has a certain angle a with the line connecting the coating main roller 11 in the vertical direction, that is, the center of the first evaporation source 13 and the center of the coating main roller 11 are not on the same vertical line, thereby forming a certain offset. The offset, the minimum vertical distance between the first evaporation source 13 and the coating main roller 11, and the diameter of the coating main roller 11 will determine the deposition angle of the coating area of ​​the coating main roller 11. The deposition angle can be understood as the angle between the tangent plane at the deposition point and the incident particle.

[0036] Since the section angles at different positions of the coating area of ​​the coating main roller 11 change with the surface arc of the coating main roller 11, as the film surface moves, the coating angle of the same deposition point changes continuously from large to small in the process of entering the coating area and exiting the coating area, thereby achieving different coating deposition angles.

[0037] The embodiment of the utility model changes the relative position of the coating main roller 11 and the first evaporation source 13 below, so that the first evaporation source 13 and the projection area on the surface of the circular coating main roller 11 are not directly opposite to the center of the circle, thereby realizing the deposition direction of the evaporation particles with a variable angle during the deposition process of the roller substrate; when the projection deposition area of ​​the first evaporation source 13 is located in the downstream direction of the center line of the rotation direction of the circular roller, that is, Figure 1 The direction of the winding arrow in the middle is called the forward plating process, and the opposite is reverse plating. Taking the forward plating method as an example, when the film 3 enters the coating area at the beginning, the vapor deposition direction is closer to perpendicular to the substrate surface, and the incident angle is relatively large, such as close to 90°. At this time, the incident particles collide with the film surface at a nearly vertical angle, which can achieve better film surface adhesion. As the film 3 moves on the roller, the incident angle gradually becomes smaller, such as 10°, or even smaller. Figure 2 : is a schematic diagram of the incident force and velocity of an incident particle in an embodiment of the utility model, such as Figure 2 As shown, the angle at which the incident particles enter the film 3 is β. At this time, the velocity and contact impact force of the incident particles can be decomposed into the longitudinal and lateral directions of the film surface, that is, the lateral component of the incident force and velocity of the particles and the longitudinal component of the incident force and velocity. The lateral components of the incident force and velocity of the particles form a collision, extrusion and planar migration on the surrounding adjacent particles. The lateral collision and extrusion realizes the lateral bonding force between the new incident particles and the original deposited particles. The planar migration formed by the longitudinal components of the incident force and velocity of the particles makes the transverse arrangement of the film layer crystals more compact and it is not easy to form a cross-section, so that the microscopic growth process of the film layer can achieve better lateral bonding and macroscopic mechanical / electrical properties.

[0038] In this embodiment, the force direction of the deposition of the crystals of the film surface coating is changed from the unidirectional force perpendicular to the film surface to the oblique incident force, thereby strengthening the lateral bonding degree of the crystals on the film surface, and at the same time changing the vertical growth mode of the coating microscopically, from the single vertical growth to the oblique deposition growth, making it easier to grow in a whole piece on the horizontal surface, avoiding the longitudinal growth of the film layer to form Figure 3 The crack A shown, Figure 3 It is a crack formed by the longitudinal growth of the membrane surface in the prior art.

[0039] The embodiment of the utility model changes the original position of the evaporation source to change the incident angle of the evaporated particles, that is, the original evaporation source is adjusted from being directly below the coating main roller to being fixedly set at an angle below the coating main roller. This can adjust the growth mode of the film layer, improve the lateral bonding force and density of the film layer deposition, and avoid structural defects in the lateral direction of the film layer caused by the vertical unidirectional growth of crystal clusters on the film surface.

[0040] Figure 4 is a partial schematic diagram of a coating device in the prior art, such as Figure 4 As shown, when the size of the first evaporation source 13 below is determined, that is, the radiation heat of the first evaporation source 13 is constant, compared with the existing coating method in which the first evaporation source 13 is directly below the coating main roller 11, in this embodiment, after the first evaporation source 13 forms an offset with the main roller, the deposition area S1>S2, so the heat radiation received per unit area is reduced, reducing the risk of thermal damage to the film surface, which is conducive to improving and stabilizing the morphology quality of the film 3 after coating. It should be noted that the coating device in this embodiment can coat both sides of the film 3 with the same technical means.

[0041] Figure 5 Schematic diagram of the overall structure of a coating device according to an embodiment of the utility model. Figure 5 As shown, in some embodiments, the coating device may also include: a first vacuum chamber 10, a first unwinding roller 14 and a first winding roller 15, the first unwinding roller 14, the first winding roller 15, the coating main roller 11 and the winding auxiliary roller 12 are rotatably installed on the side wall of the first vacuum chamber 10; after the film 3 is unwound by the first unwinding roller 14, it is tangentially bonded to the circular surface of the coating main roller 11 under the guidance of the winding auxiliary roller 12 and moves therewith, and the metal particles in the first evaporation source 13 are deposited on the film surface of the film 3 on the coating main roller 11 at different coating angles, and then it is wound up by the first winding roller 15.

[0042] The working principle of the coating device is as follows:

[0043] The film 3 is unwound by the first unwinding roller 14; the film 3 is guided by the winding auxiliary roller 12 so that the film 3 is tangentially attached to the circular surface of the coating main roller 11; the metal particles are deposited on the film surface of the film 3 at different incident angles by the first evaporation source 13; the coated film 3 is wound by the first winding roller 15. In the coating process of this embodiment, since the tangent angles at different positions of the coating area of ​​the coating main roller change with the surface arc of the coating main roller, as the film surface moves, the coating angle of the same deposition point changes from large to small in the process of entering the coating area to leaving the coating area, thereby achieving different coating deposition angles.

[0044] Specifically, at the beginning of the film 3 entering the coating area, it has a large coating angle. At this time, the incident particles collide and contact with the film surface at a nearly vertical angle, which can achieve better film surface adhesion. As the film 3 moves with the main roller, the coating angle gradually decreases to an acute angle. At this time, the speed and contact impact force of the incident particles can be decomposed into the longitudinal and transverse directions of the film surface, that is, the incident force and the transverse component of the velocity of the particles and the longitudinal component of the incident force and the velocity of the particles. The lateral components of the incident force and velocity of the particles form collision extrusion and plane migration of the surrounding adjacent particles. The lateral collision extrusion realizes the lateral binding force between the new incident particles and the original deposited particles. The plane migration formed by the longitudinal components of the incident force and velocity of the particles makes the film layer crystals more closely arranged in the transverse direction, and it is not easy to form a cross section, so that the microscopic growth process of the film layer can achieve better transverse bonding and macroscopic mechanical / electrical properties. In addition, in the coating process, after gradually changing the coating angle, compared with the vertical plane deposition method, the same evaporation projection surface has an increased projection area on the film 3, that is, the coating deposition area becomes larger, and a thicker single coating thickness can be achieved. In addition, as the deposition surface of the film 3 becomes larger, the radiation angle coefficient is greatly reduced, but the total amount of radiation input from the evaporation heat source below remains unchanged, so the heat received by the film 3 per unit area is reduced. Under the same cooling conditions, the risk of thermal damage to the film 3 is reduced, which is beneficial to improving the appearance quality of the film surface.

[0045] The beneficial effects of the embodiments of the utility model are as follows:

[0046] The embodiment of the utility model improves the lateral bonding force of the crystals on the film surface by changing the coating angle and adjusting the incident angle of the vapor-deposited particles;

[0047] The embodiment of the utility model avoids the poor lateral bonding force caused by vertical unidirectional stacking, which easily forms fracture zones between crystal clusters under the action of tension, thereby improving the tensile resilience performance of the coating;

[0048] The embodiment of the utility model improves the lateral compactness of the film surface, so that under the condition of the same film thickness, it has better conductive performance and smaller square resistance value;

[0049] Under the condition of the same first evaporation source 13, the embodiment of the utility model has a larger actual deposition area, improves deposition efficiency and uniformity, and the microscopic morphology of the film surface is finer and denser;

[0050] In the embodiment of the utility model, since the actual deposition area is larger, the radiation heat acting on the thin film 3 per unit area is reduced, thereby reducing the risk of thermal damage to the film surface.

[0051] Embodiment 2

[0052] Figure 6 FIG. 1 is a partial schematic diagram of a suspended film coating device according to an embodiment of the utility model. Figure 6 As shown, the coating device 2 includes: a supporting roller 21 and a second evaporation source 22, wherein the supporting roller 21 is used to support the film 3 to travel, and the second evaporation source 22 is located below the film surface of the film 3, wherein a certain angle a is formed between the plane where the film surface of the film 3 is located and the plane where the second evaporation source 22 is located. In this embodiment, the number of supporting rollers 21 can be determined according to actual conditions, as long as a certain angle is formed between the film surface of the film 3 and the second evaporation source 22, and optionally, the angle can be greater than 0 degrees and less than 45 degrees.

[0053] Specifically, this embodiment controls the crystal growth direction of the film surface by adjusting and changing the angle between the deposition surface of the coating film and the second evaporation source 22. By setting a certain angle between the film surface of the film 3 and the film surface of the second evaporation source 22 (for example, when the second evaporation source 22 is set horizontally, the film above it is changed from the existing horizontal belt to an inclined belt), that is, from parallel in the prior art to a certain angle, the deposition direction of the evaporation particles can be changed, such as Figure 7 As shown, Figure 7 Schematic diagram of a vapor-deposited particle incident film 3 according to an embodiment of the utility model. Figure 7 The incident angle gradually decreases from nearly 90 degrees to β, and the force direction of the crystal deposition in the film surface coating changes from unidirectional force perpendicular to the film surface to oblique incident force, thereby strengthening the lateral bonding of the crystals on the film surface. At the same time, the vertical growth mode of the coating is changed microscopically, from single longitudinal vertical growth to inclined deposition growth, which makes it easier to grow in pieces on the horizontal surface, avoiding the formation of transverse microgaps between crystal clusters.

[0054] Moreover, after changing the coating angle, compared with the vertical plane deposition method, the projection area of ​​the same evaporation projection surface on the film 3 is increased, that is, the coating deposition area becomes larger, and a thicker single coating thickness can be achieved.

[0055] In addition, as the deposition surface of the film 3 becomes larger, the radiation angle coefficient is greatly reduced, but the total amount of radiation input from the evaporation heat source below remains unchanged, so the heat received by the film 3 per unit area is reduced. Under the same cooling conditions, the risk of thermal damage to the film 3 is reduced, which is beneficial to improving the appearance quality of the film surface. Among them, the angle coefficient is the percentage of radiation energy emitted by one surface that falls on another surface, that is, the coefficient that reflects the geometric shape and position relationship between different objects that radiate each other.

[0056] Figure 8 Schematic diagram of the overall structure of an electroplating device according to an embodiment of the utility model. Figure 8 As shown, the coating device may further include: a second vacuum chamber 20, a second unwinding roller 23 and a second winding roller 24, the second unwinding roller 23, the second winding roller 24 and the support roller 21 are rotatably mounted on the side wall of the second vacuum chamber 20; the mounting height of the support roller 21 in the vertical direction is different from the mounting height of the second unwinding roller 23 and the second winding roller 24 on the second vacuum chamber 20, the second evaporation source 22 is located below the film 3 between the second unwinding roller 23 and the support roller 21, and / or is located below the film 3 between the support roller 21 and the second winding roller 24; that is, the support roller 21 and the second winding roller 24 are connected to each other. The installation positions of the second unwinding roller 23 and the second winding roller 24 are not on the same horizontal plane, so that the film surface of the film passing between the support roller 21 and the second unwinding roller 23 can have a certain angle with the second evaporation source 22 below it in the horizontal direction, or the film surface of the film between the support roller 21 and the second winding roller 24 can have a certain angle with the second evaporation source 22 below it in the horizontal direction to ensure that the film surface of the film 3 has a certain angle with the film surface of the second evaporation source 22, so that the metal particles in the second evaporation source 22 are deposited on the film surface of the film 3 at different coating angles. Of course, in some embodiments, multiple support rollers 21 can also be set to support the film, and the coating assembly in the second vacuum chamber 20 only needs to make the film surface of the film have a certain angle with the second evaporation source 22 below it.

[0057] In this embodiment, the working principle of the coating device is as follows:

[0058] The film 3 is unwound by the second unwinding roller 23; under the support of the supporting roller 21, the film surface of the film 3 forms a certain acute angle with the second evaporation source 22 in the horizontal direction; the metal particles are deposited on the film surface of the film 3 at different incident angles by the second evaporation source 22; and the coated film 3 is rolled up by the second winding roller 24. In the coating device of the embodiment of the utility model, the deposition direction of the evaporated particles evaporated from the second evaporation source 22 can be changed by changing the running direction of the film 3 above the second evaporation source 22 from parallel in the prior art to a certain angle, that is, the incident angle gradually decreases from close to 90 degrees, and the deposition force direction of the crystals of the film surface coating changes from the unidirectional force perpendicular to the film surface to the oblique incident force, thereby strengthening the lateral bonding degree of the crystals on the film surface, and at the same time, the vertical growth mode of the coating is changed microscopically, from a single longitudinal vertical growth to an inclined deposition growth, so that it is easier to grow in pieces on the horizontal surface, and the formation of transverse micro gaps between crystal clusters is avoided. Moreover, after changing the coating angle, compared with the vertical plane deposition method, the projection area of ​​the same evaporation projection surface on the film 3 is increased, that is, the coating deposition area becomes larger, and a thicker single coating thickness can be achieved. In addition, since the deposition surface of the film 3 becomes larger, the radiation angle coefficient is greatly reduced, but the total amount of radiation input from the evaporation heat source below remains unchanged, so the heat received by the unit area of ​​the film 3 is reduced. Under the same cooling conditions, the risk of thermal damage to the film 3 is reduced, which is conducive to improving the appearance quality of the film surface.

[0059] The beneficial effects of the embodiments of the utility model are as follows:

[0060] The embodiment of the utility model improves the lateral bonding force of the crystals on the film surface by changing the coating angle and adjusting the incident angle of the vapor-deposited particles;

[0061] The embodiment of the utility model avoids the poor lateral bonding force caused by vertical unidirectional stacking, which easily forms fracture zones between crystal clusters under the action of tension, thereby improving the tensile resilience performance of the coating;

[0062] The embodiment of the utility model improves the lateral compactness of the film surface, so that under the condition of the same film thickness, it has better conductive performance and smaller square resistance value;

[0063] Under the condition of the same second evaporation source 22, the embodiment of the utility model has a larger actual deposition area, improves the deposition efficiency and uniformity, and the microscopic morphology of the film surface is finer and denser;

[0064] In the embodiment of the utility model, since the actual deposition area is larger, the radiation heat acting on the thin film 3 per unit area is reduced, thereby reducing the risk of thermal damage to the film surface.

[0065] Embodiment 3

[0066] The embodiment of the utility model further provides a film-coated product, which is prepared by using the film-coating devices of the first embodiment and the second embodiment.

[0067] The coating product of the embodiment of the utility model improves the lateral bonding force of the crystals on the film surface by changing the coating angle and adjusting the incident angle of the evaporated particles, thereby avoiding poor lateral bonding force caused by vertical unidirectional stacking, and easily forming fracture zones between crystal clusters under the action of tension, thereby improving the tensile rebound performance of the coating; at the same time, the lateral density of the film surface is improved, so that under the condition of the same film thickness, it has better conductivity and smaller block resistance value; in addition, under the condition of the same evaporation source, it has a larger actual deposition area, improves deposition efficiency and uniformity, and makes the microscopic morphology of the film surface finer; at the same time, due to the larger actual deposition area, the radiation heat acting on the unit area of ​​the film 3 is reduced, reducing the risk of thermal damage to the film surface.

[0068] In the description of the embodiments of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "upper, lower, inner and outer" are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present utility model. In addition, the terms "first, second or third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0069] In the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "install, connect, connect" should be understood in a broad sense, for example: it can be a fixed connection, a detachable connection or an integral connection; it can also be a mechanical connection, an electrical connection or a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0070] Although the present invention has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A coating device, characterized in that: The coating device is suitable for a roller-type coating method, and includes: a coating main roller, a winding sub-roller and a first evaporation source, wherein the first evaporation source is located below the coating main roller, and the film is tangentially bonded to the circular surface of the coating main roller under the guidance of the winding sub-roller, wherein a line between the center of the first evaporation source and the center of the coating main roller has a certain acute angle with the center line of the coating main roller in the vertical direction.

2. A coating device according to claim 1, characterized in that: The acute angle is greater than 0 degree and less than 30 degrees.

3. A coating device according to claim 1, characterized in that: The vertical distance between the first evaporation source and the coating main roller is 15 cm to 25 cm.

4. A coating device according to claim 1, characterized in that: The diameter of the coating main roller is 40 cm to 50 cm.

5. The coating device according to claim 1, characterized in that: The coating device further comprises: a first vacuum chamber, a first unwinding roller and a first winding roller, wherein the first unwinding roller, the first winding roller, the winding auxiliary roller and the coating main roller are rotatably mounted on the side wall of the first vacuum chamber; After the film is unwound by the first unwinding roller, it is tangentially bonded to the circular surface of the coating main roller under the guidance of the winding auxiliary roller. The metal particles evaporated from the first evaporation source are deposited on the film surface of the film at different incident angles and then wound up by the first winding roller.

6. A coating device, characterized in that: The coating device is suitable for a suspended coating method, and the coating device includes: a supporting roller and a second evaporation source, the supporting roller is used to support the film walking, and the second evaporation source is located below the film surface of the film, wherein there is a certain acute angle between the plane where the film surface of the film is located and the plane where the second evaporation source is located.

7. A coating device according to claim 6, characterized in that: The acute angle is greater than 0 degree and less than 30 degrees.

8. A coating device according to claim 6, characterized in that: The coating device further comprises: a second vacuum chamber, a second unwinding roller and a second winding roller, wherein the second unwinding roller, the second winding roller and the support roller are rotatably mounted on the side wall of the second vacuum chamber; The installation height of the support roller in the vertical direction is different from that of the second unwinding roller and the second winding roller; The second evaporation source is located below the film between the second unwinding roller and the supporting roller, and / or the second evaporation source is located below the film between the supporting roller and the second winding roller; the metal particles evaporated from the second evaporation source are deposited on the film surface of the film at different incident angles.

9. A coated product, characterized in that: The coated product is prepared based on the coating device described in any one of claims 1-5 or claims 6-8.

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