A large-scale micro-nano processing and additive manufacturing equipment

Abstract

The present invention discloses a large-scale micro-nano processing and additive manufacturing equipment, including a frame, a molding platform, a photosensitive resin tank and a Z-axis motion module that drives the molding platform to move up and down, the photosensitive resin tank is arranged on the frame, the molding platform is located above the photosensitive resin tank, and also includes a first light source system arranged on the frame below the photosensitive resin tank and an X-Y axis motion module arranged on the frame for carrying the first light source system, the first light source system includes an LED ultraviolet light source, a concave lens, a Fresnel lens, an LCD liquid crystal display screen and a convex lens arranged in sequence from bottom to top toward the bottom film direction, the focal length of the convex lens is f, the distance between the LCD liquid crystal display screen and the convex lens is greater than 2f, and the distance between the bottom film and the convex lens is greater than f and less than 2f. The present invention can perform partition printing and splicing, and can solve the 3D printing of high-precision, large-scale nano-level materials and devices that cannot be achieved by the prior art.

Description

Technical Field

[0001] The present invention belongs to the field of micro-nano high-precision manufacturing technology, and in particular relates to a large-scale micro-nano processing and additive manufacturing device. Background Art

[0002] Additive manufacturing, also known as 3D printing, integrates computer-aided design, material processing and forming technology, and is based on digital model files. It uses software and numerical control systems to stack special metal materials, non-metallic materials and medical biomaterials layer by layer in the form of extrusion, sintering, melting, photocuring, spraying, etc. to produce physical objects. Among them, photocuring 3D printing technology has a simple preparation principle, high printing accuracy, and can ensure good printing efficiency. Photocuring printing technology includes SLA (laser point light source curing), DLP (projector surface light source curing) and LCD (liquid crystal surface light source curing). Among them, the light source used in the existing LCD printing technology is mostly a visible light source, which requires the addition of visible light type photoinitiators to the resin used for photocuring. However, the cost of visible light photoinitiators is high and difficult to preserve. In addition, the resolution and accuracy of existing LCD printing equipment are not high. Most of them are black and white LCD screens or 2K color LCD screens, which tend to print in large sizes and are difficult to achieve micro-nanoscale printing. In addition, when printing smaller devices, the yield rate of printing equipment is low.

[0003] In terms of high-precision subtractive manufacturing (micro-nano processing), in addition to high-precision micron-level CNC engraving machine tools, micro-nano, especially nano-level precision subtractive manufacturing mainly uses high-precision exposure machines. In recent years, some high-tech electronic products such as smart phones, tablets, micro projectors, etc. have appeared more and more in people's field of vision, affecting people's daily life, work and study. People's performance requirements for these products are getting higher and higher, so the performance of circuit boards as core components is also constantly improving. High resolution and miniaturization have become the main development trends of exposure machines. The commonly used exposure machine is now a UV exposure machine, which is mainly composed of a light source (high-pressure spherical mercury lamp), an ellipsoidal reflector, a cold light mirror, a transmission compound eye lens array, a dichroic mirror and a spherical parallel light reflector. After a series of complex adjustments are made through these optical devices, the final light is exposed. The device system is complex, the price is very expensive (tens of millions or hundreds of millions of dollars per unit), the working conditions are harsh (need to work under high vacuum conditions), the process is complex, the cost is high, and the acid and alkali corrosion pollution in the later stage is serious. Summary of the invention

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, one of the purposes of the present invention is to provide a large-scale micro-nano processing and additive manufacturing device with high printing accuracy.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] A large-scale micro-nano processing and additive manufacturing equipment comprises a frame, a molding platform, a photosensitive resin tank and a Z-axis motion module for driving the molding platform to perform lifting motion, wherein the photosensitive resin tank is arranged on the frame, the bottom of the photosensitive resin tank is a light-transmitting bottom film, the molding platform is located above the photosensitive resin tank, and further comprises a first light source system arranged on the frame below the photosensitive resin tank for photocuring the resin and an XY-axis motion module arranged on the frame for carrying the first light source system, wherein the first light source system comprises an LED ultraviolet light source, a concave lens, a Fresnel lens, a high-resolution LCD liquid crystal display screen and a convex lens arranged in sequence from bottom to top in the direction of the bottom film, the focal length of the convex lens is f, the distance between the LCD liquid crystal display screen and the convex lens is greater than 2f, and the distance between the bottom film and the convex lens is greater than f and less than 2f; the Z-axis motion module, the XY-axis motion module, the LCD liquid crystal display screen and the LED ultraviolet light source are respectively electrically connected to a control system.

[0007] A large-scale micro-nano processing and additive manufacturing equipment comprises a frame, a molding platform, a photosensitive resin tank and a Z-axis motion module for driving the molding platform to move up and down, wherein the photosensitive resin tank is arranged on the frame, the top of the photosensitive resin tank is sealed by a light-transmitting top film, the molding platform is located in the photosensitive resin tank, and also comprises a first light source system arranged on the frame above the photosensitive resin tank for photocuring the resin and an XY-axis motion module arranged on the frame for carrying the first light source system, wherein the first light source system comprises an LED ultraviolet light source, a concave lens, a Fresnel lens, a high-resolution LCD liquid crystal display screen and a convex lens arranged in sequence from top to bottom toward the top film, and also comprises a negative pressure suction device for keeping the resin liquid level in the photosensitive resin tank at a set position, the focal length of the convex lens is f, the distance between the LCD liquid crystal display screen and the convex lens is greater than 2f, and the distance between the resin liquid level and the convex lens is greater than f and less than 2f; the Z-axis motion module, the XY-axis motion module, the LCD liquid crystal display screen and the LED ultraviolet light source are respectively electrically connected to a control system.

[0008] Furthermore, the photosensitive resin tank is fixed in an outer tank body with an opening at the top, the bottom of the photosensitive resin tank is connected to the outer tank body, the top of the photosensitive resin tank is sealed by the top film so as to form a negative pressure adsorption chamber between the top film and the resin liquid level in the photosensitive resin tank, and the side wall of the photosensitive resin tank located in the negative pressure adsorption chamber is provided with an exhaust hole connected to a negative pressure suction device to extract the air in the negative pressure adsorption chamber to form a negative pressure. Furthermore, a second light source system is also carried on the XY axis motion module, and the second light source system is a DLP projector with a projection direction toward the deposition surface of the molding platform, and the light source of the DLP projector adopts an ultraviolet LED lamp bead light source, and the modified DLP projector is electrically connected to the control system.

[0009] Furthermore, the first light source system also includes a lens barrel fixedly connected to the LED ultraviolet light source, and the concave lens, Fresnel lens, LCD liquid crystal display screen and convex lens are coaxially integrated in the lens barrel.

[0010] Furthermore, the XY axis motion module is a metal XY sliding cross slide with a precise scale.

[0011] Furthermore, the LED ultraviolet light source adopts 405nm ultraviolet lamp beads and contains a matching heat dissipation system; the concave lens, Fresnel lens and convex lens adopt high-purity quartz lenses.

[0012] Furthermore, the resolution of the LCD display screen is 2K or 4K.

[0013] Furthermore, the Z-axis motion module is composed of a ball screw and a linear guide controlled by a motor.

[0014] Furthermore, the base film is a transparent polytetrafluoroethylene film.

[0015] Furthermore, the molding platform is connected to the Z-axis motion module by using a camera ball head gimbal.

[0016] Furthermore, the operating accuracy of the Z-axis motion module and the XY-axis motion module is at the nanometer level.

[0017] The present invention is improved on the basis of existing LCD printing, using ultraviolet light as the light source, thereby reducing the cost of visible light initiators, and using a component design that combines a 2K or 4K resolution LCD screen with an optical lens to greatly improve the resolution of the printing device. In addition, through the light convergence effect and the XY axis motion module combined with the image cutting software in the computer, regional printing can be performed. After each area in a layer is printed, each partition of the next layer is printed, and finally, 3D printing is completed layer by layer. In this way, high-intensity surface light source photocuring 3D printing under normal temperature and pressure conditions is realized, the printing speed and the success rate of the finished product are improved, and high-precision micro-nano level 3D printing is realized, and the large size of the printed product is achieved.

[0018] The present invention is based on the existing DLP printing, transforming the optical light source of the DLP printing device into an ultraviolet light source, removing the original filter lens group of the projector, and changing the divergent lens assembly in the DLP device into a converging lens group. The transformed device is connected to the XY axis motion module, which greatly improves the resolution of the DLP printing device while reducing the cost. At the same time, the image cutting technology and the horizontal XY axis motion module are used to print large-size single-layer patterns in different areas, and then repeat the layer-by-layer printing to achieve large-size 3D printing.

[0019] The present invention constructs a UV exposure machine device based on an LED UV light source, a high-resolution liquid crystal screen and a lens-adjusted focusing light source system, and a DLP UV focusing modified light source system. The device has low cost and can achieve micro-nano high-precision processing and additive manufacturing at normal temperature and pressure.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. The present invention can realize micro-nano high-precision processing and additive manufacturing. At the same time, through the convergence modification of the light source system and the cooperation of the XY axis motion module, partition printing is realized. After printing each area in a layer, each partition of the next layer can be printed, and 3D printing is completed layer by layer, thereby realizing large-scale processing and additive manufacturing, and at the same time improving the printing speed to a certain extent.

[0022] 2. The micro-nano high-precision processing and additive manufacturing equipment involved in the present invention can operate at room temperature and pressure, avoiding the stringent requirements of the prior art on the operating environment and operating conditions.

[0023] 3. The present invention is based on the independent optimization and modification of LCD and DLP light-curing 3D printing equipment, and adopts a convergent ultraviolet external light source, which not only improves the accuracy of the equipment and the success rate of equipment processing and manufacturing, but also reduces the cost and the pollution caused to the environment by the existing technology.

[0024] 4. The present invention adopts two light source systems, which can be adjusted according to different needs, and both light source systems can complete the functions of a light-curing 3D printer and an exposure machine, achieving the effect of one device with multiple functions. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a front view of Embodiment 1 of the present invention;

[0026] Figure 2 It is an axonometric view of embodiment 1 of the present invention;

[0027] Figure 3 This is a schematic diagram of the operation of the first light source system in Example 1 of the present invention;

[0028] Figure 4 This is a schematic diagram of the operation of the second light source system in Example 1 of the present invention;

[0029] Figure 5 This is a schematic diagram of the imaging principle of the first light source system in Example 1 of the present invention;

[0030] Figure 6 This is a schematic diagram of the imaging principle of the second light source system of Example 1 of the present invention;

[0031] Figure 7 This is a schematic axial side view of a photosensitive resin tank according to Embodiment 2 of the present invention;

[0032] Figure 8 This is the main cross-sectional view of the photosensitive resin tank in Example 2 of the present invention. DETAILED DESCRIPTION

[0033] The present invention will be further described below with reference to examples and specific implementation methods.

[0034] Example 1

[0035] See also Figure 1-Figure 6A large-scale micro-nano processing and additive manufacturing equipment includes a frame 1, a molding platform 3, a photosensitive resin tank 4 and a Z-axis motion module 2 for driving the molding platform 3 to move up and down. The photosensitive resin tank 4 is arranged on the frame 1. The bottom of the photosensitive resin tank 4 is a transparent bottom film. A light-inlet plate 5 is arranged at the bottom of the bottom film. The bottom film is preferably a polytetrafluoroethylene transparent film. The molding platform 3 is located above the corresponding photosensitive resin tank 4, and also includes a first light source system 8 arranged on the frame 1 below the photosensitive resin tank 4 and an XY-axis motion module 9 arranged on the frame 1 for carrying the first light source system 8. The first light source system 8 includes an LED ultraviolet light source 11, a concave lens 13, a Fresnel lens 14, a high-resolution LCD liquid crystal display screen 15 and a convex lens 16 arranged in sequence from bottom to top toward the bottom film; the Z-axis motion module 2, the XY-axis motion module 9, the LCD liquid crystal display screen 15 and the LED ultraviolet light source 11 are respectively electrically connected to the control system, and the control system is connected to the power supply 7 to form a control circuit. The specific structure of the control circuit is the prior art and will not be repeated here.

[0036] Preferably, the first light source system 8 further comprises a lens barrel 12 fixedly connected to the LED ultraviolet light source 11 , and a concave lens 13 , a Fresnel lens 14 , an LCD liquid crystal display screen 15 and a convex lens 16 are coaxially integrated in the lens barrel 12 .

[0037] The XY axis motion module 9 is a metal XY sliding cross slide with a precise scale, which can be adjusted manually or motorized. The LED ultraviolet light source 11 uses 405nm ultraviolet lamp beads and contains a matching heat dissipation system. The resolution of the LCD liquid crystal display 15 is preferably 2K or 4K. The Z axis motion module 2 is composed of a ball screw and a linear guide controlled by a motor. The molding platform 3 and the Z axis motion module 2 are connected by a camera ball head pan / tilt, which can be quickly disassembled and can adjust the level of the molding platform 3 and the bottom of the resin tank 4. When in use, the control system needs to be connected to the computer, and the computer part is not drawn in the schematic diagram.

[0038] In order to improve printing accuracy and realize the equipment's micro-nano high-precision processing and additive manufacturing capabilities, the first light source system uses ultraviolet LED lamps as light sources. Since LED light sources are divergent light sources, they cannot be used directly for 3D printing, so the light needs to be adjusted. The first is to parallelize the light. In order to ensure the light intensity and ultraviolet light transmittance, a concave lens is used here to convert the divergent ultraviolet light into a parallel light source. The concave lens used is made of high-purity quartz glass with an ultraviolet light transmittance of more than 90%. In order to further adjust and enhance the intensity and parallelism of the light projected by the concave lens and reduce spherical aberration, the equipment uses a Fresnel lens to further adjust the light. The lens is also made of high-purity quartz glass. The light transmitted from the Fresnel lens is projected onto the LCD screen. Finally, in order to obtain converged light, the convex lens imaging principle is used to make the final adjustment to the light. When parallel light is projected into a convex lens, the light is refracted twice on both sides of the lens and then concentrated on a point on the axis. This point is called the focus of the convex lens. The distance from the object to the optical center of the convex lens is called the object distance, and the distance from the image of the object formed by the convex lens to the optical center of the convex lens is called the image distance. The focal length of the convex lens and the curvature of the convex lens have the following relationship:

[0039] f=R1×R2 / (n-1)(R2-R1)

[0040] Where: f is the focal length of the convex lens

[0041] R1 is the convex radius of the object side lens

[0042] R2 is the convex radius of the image side lens

[0043] n is the refractive index of the lens

[0044] The relationship between the focal length of a convex lens and the object distance and image distance is as follows:

[0045] 1 / u+1 / v=1 / f

[0046] Where: u is the object distance;

[0047] v is the image distance;

[0048] The above relationship is combined with the lens group design to obtain the corresponding convex lens specifications and dimensions. In order to obtain a converging light path and ensure that the image is a real image, according to the convex lens imaging principle, when the object distance satisfies u>2f, the image distance becomes 2f>v>f, and a reduced real image is generated at this time, thereby achieving the convergence conditions we require. The distance between the LCD screen and the convex lens is adjusted to twice the focal length of the convex lens, and the distance between the bottom of the resin tank and the convex lens is adjusted to between one and two times the focal length of the convex lens, so that a converged and reduced real image can be generated at the bottom of the resin tank. The convex lens is also made of high-purity quartz glass, and the whole constitutes the first set of converging ultraviolet surface light source system.

[0049] This embodiment can realize the first light source system to perform large-scale micro-nano additive manufacturing at the lower liquid level (bottom liquid level) of the resin tank. At the same time, through the convergence modification of the light source system and the XY axis motion module, partition printing is realized. After each area in a layer is printed, each partition of the next layer can be printed, and 3D printing is completed layer by layer, thereby realizing large-scale processing and additive manufacturing, and at the same time improving the printing speed to a certain extent. The control system 6 (driving module) includes a driving module for the LCD lamp and a g-code parser.

[0050] Preferably, the power supply is a 12V switching power supply; the molding platform 3 is made of 7075 aluminum alloy. The Z-axis motion module 2 is composed of a ball screw and a linear guide controlled by a motor. The frame is made of 6061 aluminum alloy and connected with a chassis profile. The operation accuracy of the XY-axis motion module 9 and the Z-axis motion module 2 is nanometer level, and their specific structures are all prior art and will not be repeated here.

[0051] Preferably, the XY axis motion module 9 also carries a second light source system 10, which is a DLP projector with a projection direction toward the deposition surface of the molding platform. The light source of the DLP projector adopts an ultraviolet LED lamp bead light source 17, and the projector lens is a converging lens 19. The DLP projector is electrically connected to the control system 6. The second light source system 10 changes the three primary color light sources in the original DLP projector into ultraviolet LED lamp bead light sources, and changes the projector lens into a converging lens. When the light source emits light, it is processed by the DMD chip 18 and reflected and then passes through the converging lens. The converging lens converts the original parallel light path into a converging light path, thereby achieving a converging effect, and a converging and shrinking real image can be formed on the bottom surface of the resin tank. The principle is shown in FIG. Figure 6 When the UV lamp light source is turned on, the light from the light source will be projected onto the DMD chip 18. There are 800,000 to 1 million micromirrors arranged on the DMD chip, and each micromirror can independently flip 10 degrees in the positive and negative directions, and can flip 65,000 times per second. The total area of ​​the micromirrors is also very small. The light source is reflected by these micromirrors and then projected onto the screen through the converging lens group for imaging. The distance from the light source to the DMD chip is u a , the distance from the chip to the convex lens 20 is u b , the focal length of the convex lens 20 is f 20 , the first imaging distance of the convex lens 20 is v c , the distance between the first image and the convex lens 21 is u d , the focal length of convex lens 21 is f 21 , the second imaging distance of the convex lens 21 is v e According to the schematic diagram, the first imaging source of the lens 20 is a UV LED lamp bead, and the object distance is u a +u b , the image distance is v c, and the object source of the second imaging of lens 21 is the real image formed by the first imaging, and the convex lens 20 and the convex lens 21 constitute a converging lens group 19. The sum of the distance between the LED lamp bead light source and the DMD chip reflection surface and the distance between the DMD chip reflection surface is between twice the focal length of the convex lens 20 and one focal length, that is, f 20 a +u b <2f 20 , according to the imaging law, the first image distance satisfies 2f 20 <v c At this time, the image is a magnified real image, namely the first image. The distance between the convex lens 21 and the first image is twice the focal length of the convex lens 21, namely 2f 21 d , according to the imaging law, the second image distance satisfies f 21 <v e <2f 21 At this time, the image is a reduced real image, namely the second image.

[0052] The working process of the large-scale micro-nano processing and additive manufacturing equipment of this embodiment is as follows:

[0053] When operating at the lower liquid level (bottom liquid level) of the resin tank, preparation work needs to be done before printing. First, connect the power supply 7 to the AC power supply, connect the HDMI cable and USB cable in the control system 6 (drive module) to the computer, turn on the light source system, and activate the LED ultraviolet light source 11 in the first light source system 8. The divergent light of the LED is converted into parallel light by the concave lens 13. After the light passes through the Fresnel lens 14, the light is further adjusted to improve the parallelism and eliminate spherical chromatic aberration. After the light passes through the LCD liquid crystal display screen 15, the liquid crystal display screen presents the real image programmed by the computer when printing. The liquid crystal display screen is located outside the convex lens 16 by two times the focal length. According to the imaging principle, when the object distance satisfies u>2f, the image distance becomes 2f>v>f. At this time, a reduced real image is generated, thereby forming a converged and reduced real image on the bottom surface of the resin tank located between one and two times the focal length of the convex lens. The principle is shown in FIG. Figure 5 In the second light source system 10, after the light source system is turned on, the distance from the light source to the DMD chip is u a , the distance from the chip to the convex lens 20 is u b , the focal length of the convex lens 20 is f 20 , the first imaging distance of the convex lens 20 is v c , the distance between the first image and the convex lens 21 is u d , the focal length of convex lens 21 is f 21 , the second imaging distance of the convex lens 21 is v e According to the principle diagram, the first imaging source of the lens 20 is a UV LED lamp bead, and the object distance is u a +u​​b , the image distance is v c , and the object source of the second imaging of lens 21 is the real image formed by the first imaging, and the convex lens 20 and the convex lens 21 constitute a converging lens group 19. The sum of the distance between the LED lamp bead light source and the DMD chip reflection surface and the distance between the DMD chip reflection surface is between twice the focal length of the convex lens 20 and one focal length, that is, f 20 a +u b <2f 20 , according to the imaging law, the first image distance satisfies 2f 20 <v c At this time, the image is a magnified real image, namely the first image. The distance between the convex lens 21 and the first image is twice the focal length of the convex lens 21, namely 2f 21 d , according to the imaging law, the second image distance satisfies f 21 <v e <2f 21 At this time, the image is a reduced real image, that is, the second image. The principle is shown in Figure 6 . Add photosensitive resin to the resin tank 4, adjust the molding platform 3 so that its lower surface coincides with the resin surface in the resin tank 4, and then reset the molding platform 3 to zero. Use the slicing software on the computer to set the layer thickness, exposure time, Z-axis lifting speed and other parameters, slice the three-dimensional model of the molded object, and partition the molded object using partition programming on the computer. Similarly, when performing ultraviolet exposure treatment, first place the substrate in the resin tank, adjust the molding platform to fix the substrate, and use computer software to design the exposure pattern and related dimensions.

[0054] After the preparation work is completed, printing or exposure processing can be carried out. The whole process is automatically carried out by computer until the processing and manufacturing is completed.

[0055] After printing is finished, since the resin tank 4 and the molding platform 3 are easy to disassemble, they can be disassembled and cleaned.

[0056] Example 2

[0057] See also Figure 7 and Figure 8 ​​, which is different from Example 1, the whole device in this embodiment is inverted on the basis of Example 1, that is, the first light source system 8 is located above the photosensitive resin tank and is supported by the XY axis motion module 9 (the XY axis motion module 9 is also arranged above the resin tank), and the Z axis motion module is located below the photosensitive resin tank. Correspondingly, the photosensitive resin tank 4 needs to be improved. In this embodiment, the top of the photosensitive resin tank 4 is open and sealed by a light-transmitting top film 22. The molding platform 3 is located in the photosensitive resin tank 4. The first light source system 8 performs photocuring on the resin in the photosensitive resin tank 4 from the top, so that the photosensitive resin is photocured and deposited on the deposition surface of the molding platform 3. That is to say, the photocuring molding surface is at the top of the resin tank. This embodiment also includes a negative pressure suction device (not shown in the figure) for maintaining the resin liquid level in the photosensitive resin tank 4 at a set position. The remaining structures of this embodiment are the same as those of Example 1 and will not be repeated here.

[0058] In this embodiment, the resin liquid level in the photosensitive resin tank 4 is always maintained at a set position by a negative pressure suction device. When the light is turned on, the molding platform 3 moves from top to bottom driven by the z-axis motion module while solidifying and pulling. At this time, the negative pressure suction device maintains the resin liquid level in the photosensitive resin tank 4 unchanged. Compared with Example 1, which prints from the lower liquid surface, Example 1 needs to calculate and control the depth of contact between the molding platform and the resin liquid surface each time, waiting for the resin to level, and printing from the lower liquid surface easily causes the molded object to contact the bottom of the resin tank, causing firmware damage, and the distance control is not easy to master. However, this embodiment adopts upper liquid surface printing, and the resin liquid level remains unchanged. Printing from the upper liquid surface does not need to wait for the resin to level, so there is no need to calculate the contact parameters between the molding platform and the resin each time, and continuous operation can be achieved. There is no damage to the molded body, which greatly improves the molding speed and is more suitable for printing precision micro-nanoscale additive manufacturing.

[0059] Specifically, in this embodiment, the photosensitive resin tank 4 is fixedly mounted in the outer tank body 23 with the top opening, the bottom of the photosensitive resin tank 4 is connected to the outer tank body 23, and the photosensitive resin is added from the outer tank body 23 and enters the tank body from the bottom of the photosensitive resin tank 4. The top of the photosensitive resin tank 4 is sealed by the top film 22 so that a negative pressure adsorption chamber 24 is formed between the top film 22 and the resin liquid level in the photosensitive resin tank 4. The side wall of the photosensitive resin tank 4 located in the negative pressure adsorption chamber 24 is provided with an air extraction hole 25 connected to a negative pressure suction device to extract the air in the negative pressure adsorption chamber 24 to form a negative pressure. Of course, the air extraction hole 25 can also be set on the top film, but this setting method is not easy to fix the suction pipe connected to the negative pressure suction device. The negative pressure suction device can use a vacuum pump or other device with a suction function in the prior art.

[0060] In this embodiment, when operating on the upper liquid surface of the photosensitive resin tank 4, the imaging principle of the two light sources is the same as the above principle, which will not be repeated here. The converged and reduced real image is projected on the molding platform 3 in the photosensitive resin tank. The tray of the molding platform 3 is connected with the Z-axis moving module using the molding platform bracket 26 and the camera ball head pan 27. The molding platform bracket 26 is sealed and penetrated from the top film 22 and can move freely up and down relative to the top film 22. When the Z-axis motion module runs downward according to the set program, large-scale micro-nano processing and additive manufacturing can be completed on the upper liquid surface of the resin tank.

[0061] The above embodiments are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. The obvious changes or modifications derived therefrom are still within the scope of protection of the present invention.

Claims

1. A large-scale micro-nano processing and additive manufacturing equipment, comprising a frame, a molding platform, a photosensitive resin tank and a Z-axis motion module for driving the molding platform to move up and down, wherein the photosensitive resin tank is arranged on the frame, and is characterized in that: The top of the photosensitive resin tank is sealed by a light-transmitting top film, the molding platform is located in the photosensitive resin tank, and also includes a first light source system arranged on a frame above the photosensitive resin tank for photocuring the resin and an XY-axis motion module arranged on the frame for carrying the first light source system, the first light source system includes an LED ultraviolet light source, a concave lens, a Fresnel lens, a high-resolution LCD liquid crystal display screen and a convex lens arranged in sequence from top to bottom toward the top film, and also includes a negative pressure suction device for keeping the resin liquid level in the photosensitive resin tank at a set position, the focal length of the convex lens is f, the distance between the LCD liquid crystal display screen and the convex lens is greater than 2f, and the resin The distance between the liquid surface and the convex lens is greater than f and less than 2f; the Z-axis motion module, the XY-axis motion module, the LCD liquid crystal display screen and the LED ultraviolet light source are electrically connected to the control system respectively; the photosensitive resin tank is fixed in an outer tank body with an opening at the top; the photosensitive resin is added from the outer tank body and enters the tank body from the bottom of the photosensitive resin tank; the bottom of the photosensitive resin tank is connected to the outer tank body; the top of the photosensitive resin tank is sealed by the top film so as to form a negative pressure adsorption chamber between the top film and the resin liquid surface in the photosensitive resin tank; the photosensitive resin tank is located on the side wall of the negative pressure adsorption chamber and is provided with an exhaust hole that is connected to a negative pressure suction device to extract air in the negative pressure adsorption chamber to form a negative pressure.

2. The large-scale micro-nano processing and additive manufacturing equipment according to claim 1, characterized in that: The XY axis motion module also carries a second light source system, which is a DLP projector with its projection direction toward the deposition surface of the molding platform. The light source of the DLP projector adopts an ultraviolet LED lamp bead light source, and the DLP projector is electrically connected to the control system.

3. The large-scale micro-nano processing and additive manufacturing equipment according to claim 2, characterized in that: The first light source system also includes a lens barrel fixedly connected to the LED ultraviolet light source, and the concave lens, Fresnel lens, LCD liquid crystal display screen and convex lens are coaxially integrated in the lens barrel.

4. The large-scale micro-nano processing and additive manufacturing equipment according to claim 2, characterized in that: The XY axis motion module is a metal XY sliding cross slide with a precise scale.

5. The large-scale micro-nano processing and additive manufacturing equipment according to claim 2, characterized in that: The LED ultraviolet light source adopts 405nm ultraviolet lamp beads and contains a matching heat dissipation system; the concave lens, Fresnel lens and convex lens adopt high-purity quartz lenses.

6. The large-scale micro-nano processing and additive manufacturing equipment according to claim 2, characterized in that: The resolution of the LCD display screen is 2K or 4K.

7. The large-scale micro-nano processing and additive manufacturing equipment according to claim 2, characterized in that: The Z-axis motion module is composed of a ball screw and a linear guide controlled by a motor, and the molding platform is connected to the Z-axis motion module by using a camera ball head gimbal.

8. The large-scale micro-nano processing and additive manufacturing equipment according to claim 1, characterized in that: The Z-axis motion module and the XY-axis motion module have an operating accuracy of nanometer level.

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