Method for carrying out nearly 4pi solid angle femtosecond laser direct writing processing through triangular prism and application thereof

A technology of femtosecond laser and triangular prism, applied in metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve the problems of elongated laser focus and different light guiding characteristics

CN109732201AActive Publication Date: 2019-05-10JILIN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2019-05-10

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Abstract

The invention discloses a method for carrying out nearly 4pi solid angle femtosecond laser direct writing processing through a triangular prism and application thereof, and belongs to the technical field of laser processing. Three identical laser beams are controlled to perpendicularly irradiate on three side surfaces of the triangular prism, the three femtosecond laser beams are made to convergeorthogonally on the to-be-processed plane inside a sample, a three-photon stimulating focus with better isotropy (a nearly-spherical focus with a nearly 4pi solid angle) is obtained, and therefore theproblem of defocusing during large-setting-depth direct writing processing with a single laser beam is fundamentally solved. In combination with control over a piezoelectric platform and a sample movement platform, the triangular prism and the sample are synchronously moved in the Z-axis direction, continuous adjustment of the processing depth in the sample is realized, and a three-dimensional embedded type structure with the continuously changing processing depth and uniform property is further obtained.
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Description

technical field

[0001] The invention belongs to the technical field of laser processing, and specifically relates to the use of triangular prisms for three-photon excitation to improve the defocus problem of femtosecond laser large embedded depth direct writing processing. By dividing the femtosecond laser into three beams and adjusting the three beam pulses Synchronized with time, the three sub-beams of femtosecond laser pulses are incident on the side of the triangular prism to improve the defocus problem of femtosecond laser internal processing, so as to realize the three-dimensional embedding with continuously variable processing depth based on the principle of multi-photon excitation Direct write processing of formula structure. technical background

[0002] Laser processing is widely used in the field of micro-nano processing due to its three-dimensional processing capability and low processing cost. However, since its working substance is light, after light is injecte...

Examples

Embodiment 1

[0048] Embodiment 1 A three-photon excitation focal spot is formed by using a triangular frustum prism to make three sub-beams of femtosecond laser beams orthogonally.

[0049] The single-beam processing method is replaced by the method of "combining" energy with three-photon excitation, and the energy required to modify the processed material is provided in this way. A triangular prism and a refractive index matching liquid are added on the surface of the sample, so that the laser is normally incident on the three sides of the triangular prism, so that the laser beam is not refracted when it is incident on the triangular prism and inside the sample, and the three sub-beams The femtosecond laser is orthogonally converged to form a near-spherical focus with a solid angle of nearly 4π. Compared with the severe defocus of a single femtosecond laser in direct writing processing with a large buried depth, this method effectively overcomes the single-beam Defocus problem of laser in...

Embodiment 2

[0065] Example 2 uses a three-photon excitation focus with a solid angle of nearly 4π to implement a three-dimensional embedded waveguide quantum device.

[0066] By adjusting the time synchronization of sub-beam femtosecond laser pulses and using space synchronization, the three sub-beam femtosecond laser beams are incident on the three sides of the triangular prism, avoiding internal damage caused by the refraction phenomenon caused by light incident from different media. The problem of defocusing, and the three-photon excitation focus with a solid angle of nearly 4π can be obtained deep inside the material, and its energy distribution has a near-spherical characteristic, which solves the problem of internal defocusing in laser processing.

[0067] Near 4π solid angle femtosecond laser direct writing processing of three-dimensional embedded structures by using triangular prism assisted three-photon excitation:

[0068] (1) Leveling of the sample stage and the triangular pris...