A kind of embedded thin film solar cell mask plate

Through the modular design of the mesh thin-film solar cell mask plate, the problem of difficulty in preparing different electrode patterns and substrate sizes at the same time in the prior art is solved, and an efficient process that saves time and costs is achieved.

CN111477724BActive Publication Date: 2025-01-10CHINA HUANENG GRP CO LTD +1
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Patent Information

Application Number
CN202010421623.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-05-18
Publication Date
2025-01-10
Estimated Expiration
2040-05-18

AI Technical Summary

Technical Problem

The prior art is difficult to prepare perovskite solar cell masks of different electrode patterns and different substrate sizes simultaneously during a single evaporation process, resulting in wasted time and material.

Method used

A mesh thin film solar cell mask plate was designed, adopting a modular design, through the mesh structure of the outer frame skeleton, inner frame skeleton and electrode back plate, allowing the combination of different electrode patterns and substrate sizes to reduce the number of evaporation times. and loss.

Benefits of technology

It realizes the preparation of thin-film solar cells with different electrode patterns and substrate sizes during one evaporation process, saving time and cost and improving process efficiency.

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Abstract

The present invention discloses a mosaic thin-film solar cell mask plate, comprising an outer frame frame, a plurality of inner frame frames and a plurality of electrode back plates, wherein the outer frame frame is provided with a plurality of square inner frame frame mosaic areas, wherein one square inner frame frame mosaic area corresponds to one inner frame frame and one electrode back plate, the inner frame frame is embedded in and fixed in the corresponding square inner frame frame mosaic area, the electrode back plate is fixed on the back side of the corresponding inner frame frame, and the mask plate can evaporate thin-film solar cells with different electrode patterns and different substrate sizes in one evaporation process.
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Description

Technical Field

[0001] The invention relates to a mask plate, in particular to a mosaic type thin film solar cell mask plate. Background Art

[0002] Perovskite solar cells are a new type of solar cell that has developed very rapidly. Currently, many universities and research institutes in China have related research topics. Since its discovery in 2009, the photoelectric conversion efficiency of perovskite solar cells has increased from 3.8% to more than 25% today. Its photoelectric conversion efficiency is close to or exceeds that of traditional crystalline silicon, copper indium gallium selenide and cadmium telluride batteries on the market. Compared with traditional crystalline silicon batteries, the advantage of perovskite solar cells is that the process is simple and the cost is greatly reduced. Perovskite solar cells are usually composed of multiple layers of material films with different functions. The film can be prepared by spin coating, vacuum evaporation, magnetron sputtering and other processes.

[0003] Generally speaking, metal electrodes (such as gold, silver, aluminum, etc. used as electrodes) are usually coated by vapor deposition. The vapor deposition method uses a mask plate with a specific pattern to evaporate the required electrode. The mask plate is composed of a specific number of identical squares, each of which accommodates and fixes the substrate; the coating area within the grid is the pattern of the evaporated electrode. Usually, only one mask plate with a specific pattern and a specific substrate size can be selected for one evaporation. However, in experiments, sometimes it is necessary to evaporate solar cells with different electrode patterns or even different substrate sizes. If the evaporation is performed multiple times, it will waste time and electrode materials. Summary of the invention

[0004] The purpose of the present invention is to overcome the disadvantages of the prior art and provide a mosaic thin-film solar cell mask plate, which can evaporate thin-film solar cells with different electrode patterns and different substrate sizes in one evaporation process.

[0005] To achieve the above-mentioned purpose, the embedded thin-film solar cell mask plate described in the present invention includes an outer frame frame, a plurality of inner frame frames and a plurality of electrode back plates, wherein the outer frame frame is provided with a plurality of square inner frame frame embedding areas, wherein a square inner frame frame embedding area corresponds to an inner frame frame and an electrode back plate, the inner frame frame is embedded and fixed in the corresponding square inner frame frame embedding area, and the electrode back plate is fixed on the back side of the corresponding inner frame frame.

[0006] An embedding groove is arranged circumferentially on the embedding area of ​​the square inner frame frame, and the outer peripheral surface of the inner frame frame is embedded in the embedding groove.

[0007] A first 3 / 4 cylindrical groove is provided at a corner of the square inner frame frame engaging area.

[0008] The inner frame frame is divided into several square coating areas.

[0009] A second 3 / 4 cylindrical groove is arranged at one corner of the square coating area.

[0010] A plurality of electrode pattern areas are arranged on the electrode back plate, wherein one electrode pattern area corresponds to a square coating area, and each electrode pattern area is directly opposite to the corresponding square coating area.

[0011] The electrode back plate is welded and fixed on the inner frame frame.

[0012] The inner frame frame is provided with a protrusion which matches with the first 3 / 4 cylindrical groove on the corresponding square inner frame frame engaging area.

[0013] The present invention has the following beneficial effects:

[0014] The embedded thin-film solar cell mask plate described in the present invention adopts a modular design concept during specific operation. The inner frame frame is embedded and fixed in the corresponding square inner frame frame embedding area, and the electrode back plate is fixed on the back of the corresponding inner frame. The mask plate is formed by assembling and combining. At the same time, each electrode back plate and inner frame frame can be designed and installed separately, and the electrode pattern on each electrode back plate can be designed as needed to combine different mask plates, thereby adapting to thin-film solar cells with different substrate sizes, reducing the number of evaporation times and evaporation losses, and saving time and cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic structural diagram of the outer frame skeleton 11 in the present invention;

[0016] Figure 2 It is a schematic structural diagram of the inner frame frame 22 of the present invention;

[0017] Figure 3 It is a schematic structural diagram of the electrode back plate 32 in the present invention;

[0018] Figure 4 It is a structural schematic diagram of the present invention.

[0019] Among them, 11 is the outer frame frame, 12 is the square inner frame frame embedding area, 13 is the embedding groove, 14 is the first 3 / 4 cylindrical groove, 21 is the square coating area, 22 is the inner frame frame, 23 is the second 3 / 4 cylindrical groove, 31 is the electrode pattern area, and 32 is the electrode back plate. DETAILED DESCRIPTION

[0020] The present invention is further described in detail below in conjunction with the accompanying drawings:

[0021] refer to Figures 1 to 4The mosaic thin-film solar cell mask plate described in the present invention includes an outer frame frame 11, a plurality of inner frame frames 22 and a plurality of electrode back plates 32, wherein the outer frame frame 11 is provided with a plurality of square inner frame frame mosaic areas 12, wherein one square inner frame frame mosaic area 12 corresponds to one inner frame frame 22 and one electrode back plate 32, the inner frame frame 22 is embedded and fixed in the corresponding square inner frame frame mosaic area 12, and the electrode back plate 32 is fixed on the back side of the corresponding inner frame frame 22.

[0022] An embedding groove 13 is circumferentially provided on the square inner frame frame embedding area 12, and the outer peripheral surface of the inner frame frame 22 is embedded in the embedding groove 13. A first 3 / 4 cylindrical groove 14 is opened at a corner of the square inner frame frame embedding area 12.

[0023] The inner frame frame 22 is divided into several square coating areas 21, a second 3 / 4 cylindrical groove 23 is set at a corner of the square coating area 21, and a protrusion is set on the inner frame frame 22 to match the first 3 / 4 cylindrical groove 14 on the corresponding square inner frame frame mosaic area 12.

[0024] A plurality of electrode pattern areas 31 are disposed on the electrode back plate 32 , wherein one electrode pattern area 31 corresponds to a square coating area 21 , and each electrode pattern area 31 faces the corresponding square coating area 21 .

[0025] The electrode back plate 32 follows the changes of the inner frame skeleton 22 and different electrode patterns can be designed according to different needs. Different outer frame skeletons 11, inner frame skeletons 22 and electrode back plates 32 can be designed according to different needs, and the required mask plate can be combined according to actual needs.

[0026] The specific production process of the present invention is:

[0027] 1) Make an outer frame frame 11; 2) Make an inner frame frame 22 that matches the outer frame frame 11; 3) Make an electrode back plate 32 according to design requirements, wherein the electrode pattern area 31 on the electrode back plate 32 is made according to the design; 4) Weld the electrode back plate 32 to the back of the inner frame frame 22; 5) Nest each inner frame frame 22 in the square inner frame frame mosaic area 12 in the outer frame frame 11 to obtain a mosaic thin-film solar cell mask plate.

[0028] It should be noted that the present invention adopts discrete components and assembles them to design the mask plate. When it is necessary to simultaneously evaporate thin-film solar cells with different electrode patterns or even different substrate sizes, the corresponding electrode patterns and components carrying the corresponding substrate sizes are selected according to actual needs to combine different mask plates, thereby reducing the number of evaporation times and evaporation losses, thereby saving time and cost.

Claims

1. A mosaic thin-film solar cell mask plate, characterized in that: The invention comprises an outer frame frame (11), a plurality of inner frame frames (22) and a plurality of electrode back plates (32), wherein the outer frame frame (11) is provided with a plurality of square inner frame frame embedding areas (12), wherein one square inner frame frame embedding area (12) corresponds to one inner frame frame (22) and one electrode back plate (32), the inner frame frame (22) is embedded in and fixed in the corresponding square inner frame frame embedding area (12), and the electrode back plate (32) is fixed on the back side of the corresponding inner frame frame (22); The inner frame frame (22) is divided into a plurality of square coating areas (21); A 3 / 4 cylindrical groove is provided at one corner of the square coating area (21); A plurality of electrode pattern areas (31) are arranged on the electrode back plate (32), wherein one electrode pattern area (31) corresponds to a square coating area (21), and each electrode pattern area (31) faces the corresponding square coating area (21); An embedding groove (13) is provided on the embedding area (12) of the square inner frame frame along the circumferential direction, and the outer circumferential surface of the inner frame frame (22) is embedded in the embedding groove (13); A 3 / 4 cylindrical groove is provided at a corner of the square inner frame frame engaging area (12); The electrode back plate (32) is welded and fixed on the inner frame frame (22); The inner frame frame (22) is provided with a protrusion which matches with a 3 / 4 cylindrical groove on a corresponding square inner frame frame engaging area (12).

Citation Information

Patent Citations

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  • Mask plate and manufacturing method thereof

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  • Embedded thin-film solar cell mask plate

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