A curved pipe filtering coating machine

Abstract

The present invention relates to the technical field of coating equipment, and in particular to a curved tube filtering coating machine, which includes a control cabinet, a vacuum pump, a vacuum container, a plurality of target material ionization mechanisms and a plurality of ion generating mechanisms; the vacuum container is provided with a vacuum inner cavity; the target material ionization mechanism includes a mounting seat, an arc striking mechanism, a driving mechanism, a target material chuck mechanism, a cooling mechanism and a vacuum tube mechanism, and the vacuum tube mechanism includes an arc tube assembly and a plurality of straight tube assemblies; the arc tube assembly and the straight tube assembly both include an inner tube, an outer tube, a first connecting block, a second connecting block and a plurality of locking members. The target material ionization mechanism of the coating machine of the present application cools the ionized target material and the vacuum tube mechanism clamped by the target material chuck mechanism respectively through two cooling methods, which greatly improves the cooling effect of the target material ionization mechanism. At the same time, the target material chuck mechanism is provided with a section of arc tube assembly, and the arc tube assembly has a certain curvature, which increases the filtering effect of the coating machine of the present application.

Description

Technical Field

[0001] The invention relates to the technical field of coating equipment, in particular to a curved pipe filtering type coating machine. Background Art

[0002] As a technology for producing specific film layers, vacuum coating technology has a wide range of applications in real production and life. There are three forms of vacuum coating technology, namely evaporation coating, sputtering coating and ion plating. Among them, sputtering coating can be considered one of the most outstanding achievements in coating technology. With its advantages of high sputtering rate, low substrate temperature rise, good film-substrate bonding, stable device performance, and convenient operation and control, it has become the preferred solution for continuous coating occasions in the coating industry application field, especially architectural coated glass, transparent conductive film glass, flexible substrate winding plating, etc., which have particularly stringent requirements on large-area uniformity.

[0003] The target ionization mechanism of the coating machine will generate a lot of heat during operation. The existing target ionization mechanism has poor cooling effect. The heat generated by the target ionization mechanism will affect the entire sputtering process, thus causing coating failure. In addition, the heat generated by the target ionization mechanism will affect the internal components of the target ionization mechanism, causing the target ionization mechanism to fail to work properly, and even damage the target ionization mechanism, increasing production costs. At the same time, the vacuum tube mechanism of the target ionization mechanism is a straight tube, which has a poor filtering effect on certain ionized heteroatoms or ions. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a curved tube filtering coating machine, in which the target material ionization mechanism of the coating machine cools the ionized target material clamped by the target material chuck mechanism and the vacuum tube mechanism respectively through two cooling methods, which greatly improves the cooling effect of the target material ionization mechanism, protects the internal parts of the target material ionization mechanism, ensures that the target material ionization mechanism can work normally and stably, reduces the failure rate and maintenance rate of the target material ionization mechanism, and thus reduces the production cost. At the same time, the target material chuck mechanism is provided with a section of arc tube assembly, and the arc tube assembly has a certain curvature, which can better block certain ionized heteroatoms or ions from falling onto the inner tube of the arc tube assembly, thereby increasing the filtering effect of the coating machine of the present application.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] A curved tube filter coating machine, comprising a control cabinet and a vacuum pump, and also comprising a vacuum container, a plurality of target material ionization mechanisms and a plurality of ion generating mechanisms; the vacuum container is provided with a vacuum inner cavity, a plurality of the ion generating mechanisms are respectively installed in the vacuum inner cavity and used to generate ions into the vacuum inner cavity; a plurality of the target material ionization mechanisms are respectively connected to the vacuum container; the vacuum pump is connected to the vacuum container and used to evacuate the vacuum container; the vacuum pump, the plurality of target material ionization mechanisms and the plurality of ion generating mechanisms are all electrically connected to the control cabinet;

[0007] The target ionization mechanism comprises a mounting seat, an arc striking mechanism, a driving mechanism, a target chuck mechanism, a cooling mechanism and a vacuum tube mechanism; the vacuum tube mechanism comprises an arc tube assembly and a plurality of straight tube assemblies, and at least one group of straight tube assemblies are respectively connected to both ends of the arc tube assembly; the arc tube assembly and the straight tube assembly each comprise an inner tube, an outer tube, a first connecting block, a second connecting block and a plurality of locking members;

[0008] The vacuum tube mechanism is connected to the vacuum container, and the inner tube is connected to the vacuum inner cavity; the two ends of the inner tube are respectively connected to the first connection block and the second connection block, and the two ends of the outer tube are respectively connected to the first connection block and the second connection block, the outer tube is sleeved on the outside of the inner tube, and a first cooling liquid cavity is provided between the outer tube and the inner tube;

[0009] The outer tube is provided with a first water inlet and a first water outlet, and the first water inlet and the first water outlet are both connected to the first cooling liquid chamber; the first connecting block is connected to the mounting seat or the second connecting block of the adjacent arc tube assembly or the second connecting block of the adjacent straight tube assembly, and the second connecting block is connected to the first connecting block of the adjacent arc tube assembly or the first connecting block of the adjacent straight tube assembly, and a plurality of locking members are used to lock the first connecting block to the mounting seat, and a plurality of locking screws are also used to lock the second connecting block to the first connecting block of the adjacent arc tube assembly or the first connecting block of the adjacent straight tube assembly; an electromagnetic induction coil is sleeved on the outer side of the outer tube;

[0010] The target material chuck mechanism is arranged on the mounting seat and located inside the inner tube, and the target material chuck mechanism is used to clamp the target material to be ionized; the cooling mechanism is arranged on the mounting seat and used to cool the target material to be ionized clamped by the target material chuck mechanism; the arc striking mechanism is rotatably connected to the mounting seat and located inside the inner tube, the driving mechanism is arranged on the mounting seat and used to drive the arc striking mechanism to rotate, and the arc striking mechanism is used to generate an arc spot on the target material to be ionized clamped by the target material chuck mechanism.

[0011] Furthermore, the cooling mechanism includes a water pipe sleeve, a water inlet pipe, a water outlet pipe, a water outlet pipe locking assembly and a heat exchange seat, the heat exchange seat is arranged on one side of the mounting seat and located inside the inner tube, the water pipe sleeve and the water outlet pipe locking assembly are arranged on the other side of the mounting seat; the water pipe sleeve is provided with a second water inlet and a second water outlet, the heat exchange seat is provided with a first accommodating cavity, a second accommodating cavity and a through hole, the through hole connects the first accommodating cavity and the second accommodating cavity, the heat exchange seat is connected to the target material chuck mechanism, the first accommodating cavity is located at one end of the heat exchange seat close to the target material chuck mechanism; The water outlet pipe sleeve is arranged on the outside of the water inlet pipe, and a flow gap is arranged between the water inlet pipe and the water outlet pipe; the mounting seat is provided with a first mounting hole, the first mounting hole passes through the mounting seat, one end of the water inlet pipe is connected to the water pipe sleeve, the other end of the water inlet pipe passes through the first mounting hole and is connected to the heat exchange seat, and the water inlet pipe is connected to the second water inlet and the first accommodating chamber; one end of the water outlet pipe is connected to the water pipe sleeve, the other end of the water outlet pipe passes through the first mounting hole and is connected to the heat exchange seat, and the water outlet pipe is connected to the second water outlet and the second accommodating chamber; the water outlet pipe locking assembly is used to lock the water outlet pipe to the mounting seat.

[0012] Furthermore, the water pipe sleeve is provided with a third accommodating chamber and a fourth accommodating chamber, and the fourth accommodating chamber connects the third accommodating chamber and the outside; the second water inlet is connected with the third accommodating chamber, and the second water outlet is connected with the fourth accommodating chamber; the inner wall of the third accommodating chamber is provided with a first internal thread, and the outer wall of the water inlet pipe is provided with a first external thread for threaded connection with the first internal thread; the inner wall of the fourth accommodating chamber is provided with a second internal thread, and the outer wall of the water outlet pipe is provided with a second external thread for threaded connection with the second internal thread.

[0013] Furthermore, a plurality of material blocking plates are arranged at intervals inside the inner tube of the arc tube assembly and / or the straight tube assembly.

[0014] Furthermore, the target material chuck mechanism includes a chuck base and a chuck seat, the chuck base is connected to the mounting seat, the chuck seat is connected to one end of the chuck base away from the mounting seat, and the chuck seat is used to clamp the target material to be ionized; the chuck base is provided with a cooling mechanism accommodating cavity, and the heat exchange seat is located in the cooling mechanism accommodating cavity and abuts against the bottom of the chuck seat.

[0015] Furthermore, the ion generating mechanism includes an assembly base, a positive electrode carrier, a negative electrode carrier, an air cavity base and a cooling component. The assembly base is installed in the vacuum cavity, the negative electrode carrier is installed on the top of the assembly base, the cooling component is installed on the bottom of the negative electrode carrier and is used to cool the negative electrode carrier, and the air cavity base is arranged between the positive electrode carrier and the negative electrode carrier; the air cavity base is provided with an ion generating chamber and a plurality of ion emission through holes, and the plurality of ion emission through holes are respectively connected to the ion generating chamber.

[0016] Furthermore, the cooling assembly includes a cooling support, a third water inlet and a third water outlet; the cooling support is installed at the bottom of the negative electrode carrier, the cooling support and the negative electrode carrier are surrounded by a second cooling liquid chamber, the third water inlet and the third water outlet are respectively arranged at both ends of the cooling support, and the third water inlet and the third water outlet are respectively connected to the second cooling liquid chamber; the positive electrode carrier is installed with an electrode terminal, and the electrode terminal is used to connect to the positive electrode of an external power supply; the negative electrode carrier is used to connect to the negative electrode of an external power supply.

[0017] Furthermore, the ion generating mechanism also includes a cooling enclosure, a second mounting hole is provided in the middle of the cooling enclosure, and the air cavity base is installed on the cooling enclosure via the second mounting hole; a liquid injection rod is provided at the bottom of the cooling enclosure, and the liquid injection rod is provided with a first liquid inlet channel and a first liquid outlet channel, and a cooling ring groove is provided at the top of the cooling enclosure, and the first liquid inlet channel and the first liquid outlet channel are both connected to the cooling ring groove, and the cooling ring groove is used to cool the air cavity base; an insulating component for protecting the liquid injection rod is provided on the outer side of the liquid injection rod.

[0018] Furthermore, the ion generating mechanism also includes multiple magnetic components, the air cavity base is provided with multiple limiting holes, the multiple limiting holes are arranged in a ring array to form a limiting hole ring; the multiple ion emission through holes are arranged in a linear array, the multiple ion emission through holes are all located inside the limiting hole ring, and the multiple magnetic components are assembled one-to-one with the multiple limiting holes.

[0019] Furthermore, the vacuum container also includes a container body, a baffle, a heating rod and a gas supply pipe; the baffle is rotatably installed on the container body, and the baffle is used to open or close the vacuum cavity of the container body; the baffle is provided with an installation slot, and the ion generating mechanism is installed in the installation slot, the number of heating rods is multiple, and the multiple heating rods are arranged in a circular array in the vacuum cavity, and the gas supply pipe is arranged in the vacuum cavity and is used to supply gas to the ion generating mechanism.

[0020] The beneficial effects of the present invention are as follows: in actual work, one or more groups of straight tube assemblies are first installed at both ends of the arc tube assembly according to production needs, thereby connecting to a vacuum tube mechanism, and then the vacuum tube mechanism is connected to the mounting seat, thereby connecting to a target material ionization mechanism. Then, several target material ionization mechanisms are respectively connected to the vacuum container, and then the target material to be ionized is loaded into the target material chuck mechanism, and the target material chuck mechanism clamps the target material to be ionized. Then, several ion generating mechanisms and substrates (workpieces) are respectively installed in the vacuum cavity. After the installation of several target material ionization mechanisms and several ion generating mechanisms is completed, the vacuum pump performs vacuum treatment on the inside of the vacuum container and the inner tube, and then fills the inside of the inner tube with inert gas. The target material chuck mechanism is connected to the cathode, and the arc striking mechanism is electrically connected to the arc striking circuit. The arc striking circuit is a conventional circuit. The current output by the arc striking mechanism hits the target material to be ionized clamped by the target material chuck mechanism so that an arc spot is generated on the surface of the target material to be ionized. After the electromagnetic induction coil is energized, a magnetic field will be generated near the vacuum tube mechanism. After the target material to be ionized, which is clamped by the target chuck mechanism, is ionized to produce charged target atoms, the charged target atoms are sputtered along a specific path to the surface of the substrate (workpiece) in the vacuum cavity under the action of the magnetic field force and deposited to form a coating. At the same time, under the screening effect of the arc tube assembly and the magnetic field, some ionized heteroatoms or ions will be thrown onto the inner tube of the arc tube assembly and / or the inner tube of the straight tube assembly, and because the arc tube assembly has a certain curvature, it can better block some ionized heteroatoms or ions from falling onto the inner tube of the arc tube assembly, thereby increasing the filtering effect of the coating machine of the present application. At the same time, the target material ionization mechanism will generate a lot of heat during operation. In order to reduce the temperature of the target material ionization mechanism, on the one hand, the cooling mechanism will introduce coolant to cool the ionized target material clamped by the target material chuck mechanism; on the other hand, the external water pump transports the coolant from the external water tank to the cooling liquid cavity through the first water inlet, and the coolant in the cooling liquid cavity cools the vacuum tube mechanism. At the same time, the coolant in the cooling liquid cavity is discharged to the external water tank through the first water outlet, thereby realizing the recycling of the coolant. The control cabinet can control the vacuum pump, several target material ionization mechanisms and several ion generating mechanisms to work automatically.

[0021] The target material ionization mechanism of the present application cools the ionized target material clamped by the target material chuck mechanism and the vacuum tube mechanism respectively through two cooling methods, which greatly improves the cooling effect of the target material ionization mechanism, protects the internal components of the target material ionization mechanism, ensures that the target material ionization mechanism can work normally and stably, reduces the failure rate and maintenance rate of the target material ionization mechanism, and thus reduces the production cost. At the same time, the target material chuck mechanism is provided with a section of arc tube assembly, which has a certain curvature and can better block certain ionized heteroatoms or ions from falling onto the inner tube of the arc tube assembly, thereby increasing the filtering effect of the coating machine of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of the present invention.

[0023] Figure 2 It is a schematic structural diagram of the target material ionization mechanism of the present invention.

[0024] Figure 3 It is a schematic structural diagram of the arc striking mechanism, target material chuck mechanism and cooling mechanism of the present invention.

[0025] Figure 4 It is a schematic structural diagram of the water pipe sleeve of the present invention.

[0026] Figure 5 It is a schematic diagram of the three-dimensional structure of the ion generating mechanism of the present invention.

[0027] Figure 6 A cross-sectional view of the ion generating mechanism of the present invention Figure 1 .

[0028] Figure 7 A cross-sectional view of the ion generating mechanism of the present invention Figure 2 .

[0029] Figure 8 It is a schematic structural diagram of the air cavity base, ion emission through hole, limiting hole and limiting hole ring of the present invention.

[0030] Fig. 9 It is a schematic diagram of the three-dimensional structure of the cooling enclosure of the present invention.

[0031] Fig.10 It is a schematic diagram of the three-dimensional structure of the vacuum container of the present invention.

[0032] Description of reference numerals:

[0033] Vacuum container 1; vacuum inner cavity 11; container body 12; baffle 13; heating rod 14; gas supply pipe 15; mounting slot 16; target ionization mechanism 2; mounting seat 21; arc striking mechanism 22; arc striking head 221; arc striking head connecting rod 222; driving mechanism 23; target chuck mechanism 24; chuck base 241; insulating sleeve 2411; chuck seat 242; chuck seat sealing ring 2421; cooling mechanism 25; water pipe sleeve 251; The second water inlet 2511; the second water outlet 2512; the third accommodating chamber 2513; the fourth accommodating chamber 2514; the water pipe sleeve sealing ring 2515; the sealing pressure holding sleeve 2516; the sealing ring locking sleeve 2517; the water inlet pipe 252; the water outlet pipe 253; the limiting nut 2531; the water outlet pipe locking assembly 254; the water outlet pipe threaded seat 2541; the heat exchange seat 255; the first accommodating chamber 2551; the second accommodating chamber 2552; the through hole 25 53; vacuum tube mechanism 26; inner tube 261; outer tube 262; first connecting block 263; second connecting block 264; locking screw 265; first cooling liquid chamber 266; electromagnetic induction coil 267; arc tube assembly 27; baffle plate 271; straight tube assembly 28; ion generating mechanism 3; assembly base 31; positive electrode carrier 32; negative electrode carrier 33; air cavity base 34; cooling assembly 35; ion generating chamber 36; ion emission through hole 37; cooling support 38; third water inlet 39; third water outlet 310; second cooling liquid chamber 311; cooling support sealing ring 312; inflation nozzle 313; electrode terminal 314; cooling enclosure 315; second mounting hole 316; injection rod 317; first liquid inlet channel 318; first liquid outlet channel 319; cooling ring groove 320; insulating component 321; limiting hole 323; limiting hole ring 324; control cabinet 4; vacuum pump 5. DETAILED DESCRIPTION

[0034] In order to facilitate the understanding of those skilled in the art, the present invention is further described below in conjunction with embodiments and drawings. The contents mentioned in the implementation modes are not intended to limit the present invention.

[0035] like Figure 1 , Figure 2 , Figure 3 , Figure 5 and Fig.10 As shown, the present invention provides a curved tube filter coating machine, which includes a control cabinet 4 and a vacuum pump 5, and also includes a vacuum container 1, a plurality of target material ionization mechanisms 2 and a plurality of ion generating mechanisms 3;

[0036] The vacuum container 1 is provided with a vacuum inner cavity 11, and a plurality of the ion generating mechanisms 3 are respectively installed in the vacuum inner cavity 11 and used to generate ions into the vacuum inner cavity 11; a plurality of the target material ionization mechanisms 2 are respectively connected to the vacuum container 1; the vacuum pump 5 is connected to the vacuum container 1 and used to evacuate the vacuum container 1; the vacuum pump 5, the plurality of target material ionization mechanisms 2 and the plurality of ion generating mechanisms 3 are all electrically connected to the control cabinet 4;

[0037] The target ionization mechanism 2 includes a mounting seat 21, an arc striking mechanism 22, a driving mechanism 23, a target chuck mechanism 24, a cooling mechanism 25 and a vacuum tube mechanism 26; the vacuum tube mechanism 26 includes an arc tube assembly 27 and a plurality of straight tube assemblies 28, and at least one group of straight tube assemblies 28 are connected to both ends of the arc tube assembly 27; the arc tube assembly 27 and the straight tube assembly 28 each include an inner tube 261, an outer tube 262, a first connecting block 263, a second connecting block 264 and a plurality of locking members 265;

[0038] The vacuum tube mechanism 26 is connected to the vacuum container 1, and the inner tube 261 is connected to the vacuum inner cavity 11; the two ends of the inner tube 261 are respectively connected to the first connection block 263 and the second connection block 264, and the two ends of the outer tube 262 are respectively connected to the first connection block 263 and the second connection block 264, and the outer tube 262 is sleeved on the outer side of the inner tube 261, and a first cooling liquid cavity 266 is provided between the outer tube 262 and the inner tube 261;

[0039] The outer tube 262 is provided with a first water inlet (not marked in the figure) and a first water outlet (not marked in the figure), and the first water inlet and the first water outlet are both connected to the first cooling liquid chamber 266; the first connecting block 263 is connected to the mounting seat 21 or the second connecting block 264 of the adjacent arc tube assembly 27 or the second connecting block 264 of the adjacent straight tube assembly 28, and the second connecting block 264 is connected to the first connecting block 263 of the adjacent arc tube assembly 27 or the first connecting block 263 of the adjacent straight tube assembly 28, and a plurality of locking members 265 are used to lock the first connecting block 263 to the mounting seat 21, and a plurality of locking screws 265 are also used to lock the second connecting block 264 to the first connecting block 263 of the adjacent arc tube assembly 27 or the first connecting block 263 of the adjacent straight tube assembly 28; an electromagnetic induction coil 267 is sleeved on the outer side of the outer tube 262; preferably, the locking member 265 is a locking screw.

[0040] The target material chuck mechanism 24 is arranged on the mounting seat 21 and is located inside the inner tube 261. The target material chuck mechanism 24 is used to clamp the target material to be ionized; the cooling mechanism 25 is arranged on the mounting seat 21 and is used to cool the target material to be ionized clamped by the target material chuck mechanism 24; the arc striking mechanism 22 is rotatably connected to the mounting seat 21 and is located inside the inner tube 261. The driving mechanism 23 is arranged on the mounting seat 21 and is used to drive the arc striking mechanism 22 to rotate. The arc striking mechanism 22 is used to make the target material to be ionized clamped by the target material chuck mechanism 24 produce an arc spot.

[0041] Sputtering principle: first, let the inert gas (usually Ar gas) produce glow discharge to generate charged ions, and then use positive ions (usually Ar+) to bombard the cathode (target material made of deposition material) in the vacuum chamber; the charged ions are accelerated by the electric field and hit the surface of the target material, causing the target atoms to be bombarded and fly out, and at the same time generate secondary electrons, which then collide with gas atoms to form more charged ions; the target atoms carry enough kinetic energy to sputter to the surface of the substrate (workpiece) for deposition to form a coating. After the target atoms pass through the plasma zone and are bombarded and collided by high-energy electrons, some of the target atoms will be ionized. The ionized target atoms are not necessarily in the state of single ions, but are usually in the form of clusters.

[0042] In actual work, one or more groups of straight tube assemblies 28 are first connected to both ends of the arc tube assembly 27 according to production needs, thereby connecting to form a vacuum tube mechanism 26. When two groups of straight tube assemblies 28 are connected to one end of the arc tube assembly 27, the first connecting block 263 of one group of straight tube assemblies 28 is connected to the second connecting block 264 of the adjacent straight tube assembly 28, thereby connecting the two adjacent groups of straight tube assemblies 28. Then the vacuum tube mechanism 26 is connected to the mounting seat 21, thereby connecting to form a target material ionization mechanism 2. Then, several target material ionization mechanisms 2 are respectively connected to the vacuum container 1, and then the target material to be ionized is loaded into the target material chuck mechanism 24, and the target material chuck mechanism 24 clamps the target material to be ionized. Then, several ion generating mechanisms 3 and substrates (workpieces) are respectively installed in the vacuum cavity 11. After the installation of several target material ionization mechanisms 2 and several ion generation mechanisms 3 is completed, the vacuum pump 5 evacuates the inside of the vacuum container 1 and the inner tube 261, and then fills the inner tube 261 with inert gas. The target material chuck mechanism 24 is connected to the cathode, and the arc-starting mechanism 22 is electrically connected to the arc-starting circuit. The arc-starting circuit is a conventional circuit. The current output by the arc-starting mechanism 22 hits the target material to be ionized clamped by the target material chuck mechanism 24 to generate arc spots on the surface of the target material to be ionized. After the electromagnetic induction coil 267 is energized, a magnetic field will be generated near the vacuum tube mechanism 26. After the target material to be ionized clamped by the target material chuck mechanism 24 is ionized to produce charged target atoms, the charged target atoms are sputtered along a specific path to the surface of the substrate (workpiece) in the vacuum cavity 11 under the action of the magnetic field force and deposited to form a coating. At the same time, under the screening effect of the arc tube assembly 27 and the magnetic field, some ionized heteroatoms or ions will be thrown onto the inner tube 261 of the arc tube assembly 27 or / and the inner tube 261 of the straight tube assembly 28, and because the arc tube assembly 27 has a certain curvature, some ionized heteroatoms or ions can be better blocked and dropped onto the inner tube 261 of the arc tube assembly 27, thereby increasing the filtering effect of the coating machine of the present application. At the same time, the target material ionization mechanism 2 will generate a large amount of heat during operation. In order to reduce the temperature of the target material ionization mechanism 2, on the one hand, the cooling mechanism 25 will pass the cooling liquid to cool the ionized target material clamped by the target material chuck mechanism 24; on the other hand, the external water pump will transport the cooling liquid of the external water tank to the cooling liquid chamber 266 through the first water inlet, and the cooling liquid in the cooling liquid chamber 266 will cool the vacuum tube mechanism 26. At the same time, the cooling liquid in the cooling liquid chamber 266 is discharged to the external water tank through the first water outlet, thereby realizing the recycling of the cooling liquid. The control cabinet 4 can control the vacuum pump 5, a plurality of target material ionization mechanisms 2 and a plurality of ion generating mechanisms 3 to work automatically.

[0043] The target material ionization mechanism 2 of the present application cools the ionized target material clamped by the target material chuck mechanism 24 and the vacuum tube mechanism 26 respectively through two cooling methods, which greatly improves the cooling effect of the target material ionization mechanism 2, protects the components inside the target material ionization mechanism 2, ensures that the target material ionization mechanism 2 can work normally and stably, reduces the failure rate and maintenance rate of the target material ionization mechanism 2, and thus reduces the production cost. At the same time, since the arc tube assembly 27 has a certain curvature, it can better block certain ionized heteroatoms or ions from falling onto the inner tube 261 of the arc tube assembly 27, thereby increasing the filtering effect of the coating machine of the present application.

[0044] Specifically, the arc-striking mechanism 22 includes an arc-striking head 221 and an arc-striking head connecting rod 222, one end of the arc-striking head connecting rod 222 is rotatably connected to the mounting seat 21, and the other end of the arc-striking head connecting rod 222 is connected to the arc-striking head 221; the driving mechanism 23 is used to drive the arc-striking head connecting rod 222 to rotate. In actual work, the driving mechanism 23 drives the arc-striking head connecting rod 222 to rotate, and the rotating arc-striking head connecting rod 222 drives the arc-striking head 221 to rotate. When the arc-striking head 221 rotates to the surface of the target material to be ionized clamped by the target material clamping mechanism 24, the arc-striking head 221 will output current to hit the target material to be ionized clamped by the target material clamping mechanism 24 so that an arc spot is generated on the surface of the target material to be ionized. When the arc-striking head 221 is not working, the driving mechanism 23 drives the arc-striking head connecting rod 222 to rotate to drive the arc-striking head 221 to rotate to the working position. The arc-striking mechanism 22 has a simple structure and high controllability.

[0045] like Figure 3As shown, in this embodiment, the cooling mechanism 25 includes a water pipe sleeve 251, a water inlet pipe 252, a water outlet pipe 253, a water outlet pipe locking assembly 254 and a heat exchange seat 255. The heat exchange seat 255 is arranged on one side of the mounting seat 21 and is located inside the inner tube 261. The water pipe sleeve 251 and the water outlet pipe locking assembly 254 are arranged on the other side of the mounting seat 21; the water pipe sleeve 251 is provided with a second water inlet 2511 and a second water outlet 2512, and the heat exchange seat 255 is provided with a first accommodating cavity 2551, a second accommodating cavity 2552 and a through hole 2553. The through hole 2553 connects the first accommodating cavity 2551 and the second accommodating cavity 2552. The heat exchange seat 255 is connected to the target chuck mechanism 24. The first accommodating cavity 2551 is located at one end of the heat exchange seat 255 close to the target chuck mechanism 24 ; The water outlet pipe 253 is sleeved on the outside of the water inlet pipe 252, and a flow gap (not marked in the figure) is set between the water inlet pipe 252 and the water outlet pipe 253; the mounting seat 21 is provided with a first mounting hole (not marked in the figure), the first mounting hole passes through the mounting seat 21, one end of the water inlet pipe 252 is connected to the water pipe sleeve 251, the other end of the water inlet pipe 252 passes through the first mounting hole and is connected to the heat exchange seat 255, and the water inlet pipe 252 is connected to the second water inlet 2511 and the first accommodating chamber 2551; one end of the water outlet pipe 253 is connected to the water pipe sleeve 251, the other end of the water outlet pipe 253 passes through the first mounting hole and is connected to the heat exchange seat 255, and the water outlet pipe 253 is connected to the second water outlet 2512 and the second accommodating chamber 2552; the water outlet pipe locking assembly 254 is used to lock the water outlet pipe 253 to the mounting seat 21.

[0046] In actual operation, the external water pump delivers the cooling liquid of the external water tank to the first accommodating chamber 2551 through the second water inlet 2511 and the water inlet pipe 252. The cooling liquid in the first accommodating chamber 2551 absorbs the heat of the target material chuck mechanism 24 through the heat exchange seat 255, thereby reducing the temperature of the target material chuck mechanism 24, ensuring that the target material chuck mechanism 24 can work normally and stably, extending the service life of the target material chuck mechanism 24, reducing the failure rate and maintenance rate of the target material chuck mechanism 24, and thus reducing the production cost. At the same time, the cooling liquid in the first accommodating chamber 2551 flows into the second accommodating chamber 2552 through the through hole 2553, and the cooling liquid in the second accommodating chamber 2552 is discharged to the external water tank through the outlet pipe 253 and the second outlet 2512. The heat exchange seat 255 of the present application is provided with a first accommodating chamber 2551 and a second accommodating chamber 2552, which can ensure to the greatest extent that the temperature of the coolant delivered to the first accommodating chamber 2551 is the lowest, thereby improving the cooling effect of the target chuck mechanism 24. If the heat exchange seat 255 is provided with only one accommodating chamber, the coolant newly flowing into the accommodating chamber will be mixed with the original coolant in the accommodating chamber. Since the original coolant in the accommodating chamber has absorbed the heat of the target chuck mechanism 24, after the two are mixed, the temperature of the coolant in the accommodating chamber will be high, reducing the cooling effect of the coolant in the accommodating chamber. The structural design of the cooling mechanism 25 of the present application is reasonable, and the cooling mechanism 25 has a good cooling effect on the target chuck mechanism 24.

[0047] Specifically, the water outlet pipe locking assembly 254 includes a water outlet pipe threaded seat 2541, which is connected to the mounting seat 21, and is provided with a water outlet pipe threaded hole (not shown in the figure), which penetrates the water outlet pipe threaded seat 2541, and the inner wall of the water outlet pipe threaded hole is provided with a fourth internal thread (not shown in the figure); the outer wall of the water outlet pipe 253 is provided with a fourth external thread (not shown in the figure) for threaded connection with the fourth internal thread. In actual work, the water outlet pipe 253 is connected to the water outlet pipe threaded seat 2541 via the fourth external thread and the fourth internal thread, which is convenient for the installation and removal of the water outlet pipe 253. At the same time, the water pipe locking assembly 254 can firmly install the cooling mechanism 25 on the mounting seat 21, ensuring that the cooling mechanism 25 can work stably.

[0048] like Figure 3 and Figure 4As shown, in this embodiment, the water pipe sleeve 251 is provided with a third accommodating chamber 2513 and a fourth accommodating chamber 2514, and the fourth accommodating chamber 2514 connects the third accommodating chamber 2513 and the outside; the second water inlet 2511 is connected with the third accommodating chamber 2513, and the second water outlet 2512 is connected with the fourth accommodating chamber 2514; the inner wall of the third accommodating chamber 2513 is provided with a first internal thread (not shown in the figure), and the outer wall of the water inlet pipe 252 is provided with a first external thread (not shown in the figure) for threaded connection with the first internal thread; the inner wall of the fourth accommodating chamber 2514 is provided with a second internal thread (not shown in the figure), and the outer wall of the water outlet pipe 253 is provided with a second external thread (not shown in the figure) for threaded connection with the second internal thread.

[0049] In actual work, after the water inlet pipe 252 is inserted into the interior of the water outlet pipe 253, one end of the water inlet pipe 252 is connected to the water pipe sleeve 251 via the threaded cooperation of the first external thread and the first internal thread, and the second water inlet 2511 is communicated with the water inlet pipe 252 via the third accommodating chamber 2513; one end of the water outlet pipe 253 is connected to the water pipe sleeve 251 via the threaded cooperation of the second external thread and the second internal thread, and the second water outlet 2512 is communicated with the water outlet pipe 253 via the fourth accommodating chamber 2514. The water pipe sleeve 251, water inlet pipe 252 and water outlet pipe 253 of the present application are easy to install and disassemble. At the same time, the second water inlet 2511 and the second water outlet 2512 can be detachably connected to the water pipe sleeve 251. When a problem occurs to a component of the water pipe sleeve 251, the second water inlet 2511, the second water outlet 2512, the water inlet pipe 252 or the water outlet pipe 253, only the corresponding component needs to be replaced, which makes maintenance convenient and the maintenance cost is low.

[0050] Specifically, the water pipe sleeve 251 is provided with a water pipe sleeve sealing ring 2515, a sealing pressure holding sleeve 2516 and a sealing ring locking sleeve 2517; the water pipe sleeve sealing ring 2515 and the sealing pressure holding sleeve 2516 are respectively sleeved on the outer wall of the water outlet pipe 253, and the sealing pressure holding sleeve 2516 is used to press the water pipe sleeve sealing ring 2515 on the water pipe sleeve 251; the inner wall of the sealing ring locking sleeve 2517 is provided with a third internal thread (not shown in the figure), and the outer wall of the water pipe sleeve 251 is provided with a third external thread (not shown in the figure) for threaded connection with the third internal thread; the sealing ring locking sleeve 2517 is clamped with the sealing pressure holding sleeve 2516 and is used to lock the sealing pressure holding sleeve 2516 to the water pipe sleeve 251. In actual work, the water pipe sleeve sealing ring 2515 and the sealing pressure holding sleeve 2516 are respectively sleeved on the outer wall of the water outlet pipe 253, and then the water outlet pipe 253 is connected to the water pipe sleeve 251. After the water outlet pipe 253 and the water pipe sleeve 251 are connected, the sealing ring locking sleeve 2517 is connected to the water pipe sleeve 251 through the threaded cooperation of the third internal thread and the third external thread, and then the sealing pressure holding sleeve 2516 and the water pipe sleeve sealing ring 2515 are locked to the water pipe sleeve 251. The water pipe sleeve sealing ring 2515 is used to seal the gap between the water outlet pipe 253 and the water pipe sleeve 251 to prevent water leakage between the water outlet pipe 253 and the water pipe sleeve 251.

[0051] like Figure 2 As shown, in this embodiment, a plurality of baffles 271 are provided at intervals inside the inner tube 261 of the arc tube assembly 27 or / and the straight tube assembly 28. In actual operation, the plurality of baffles 271 of the inner tube 261 of the arc tube assembly 27 or / and the straight tube assembly 28 can effectively block certain ionized heteroatoms or ions from falling onto the inner tube 261 of the arc tube assembly 27 or / and the straight tube assembly 28, thereby increasing the filtering effect of the coating machine of the present application.

[0052] like Figure 2 and Figure 3 As shown, in this embodiment, the target chuck mechanism 24 includes a chuck base 241 and a chuck seat 242, the chuck base 241 is connected to the mounting seat 21, the chuck seat 242 is connected to one end of the chuck base 241 away from the mounting seat 21, and the chuck seat 242 is used to clamp the target to be ionized; the chuck base 241 is provided with a cooling mechanism accommodating cavity (not shown in the figure), and the heat exchange seat 255 is located in the cooling mechanism accommodating cavity and abuts against the bottom of the chuck seat 242. The target chuck mechanism 24 has a compact structure, and the chuck seat 242 can effectively clamp the target to be ionized. Preferably, the chuck base 241 is made of insulating material, which can effectively prevent the current output by the arc striking mechanism 22 from being transmitted to the mounting seat 21 and causing leakage, thereby ensuring the safety of production.

[0053] Specifically, a chuck seat sealing ring 2421 is provided between the heat exchange seat 255 and the chuck seat 242, and the chuck seat sealing ring 2421 is used to seal the gap between the heat exchange seat 255 and the chuck seat 242, and has good sealing performance. In actual work, the chuck seat sealing ring 2421 can prevent water leakage between the heat exchange seat 255 and the chuck seat 242.

[0054] Specifically, the chuck base 241 is provided with an insulating sleeve 2411, and the insulating sleeve 2411 is sleeved on the outer side of the chuck seat 242. In actual operation, the insulating sleeve 2411 can protect the chuck seat 242 and the cooling mechanism 25 disposed inside the chuck seat 242, and can effectively prevent the current output by the arc striking mechanism 22 from damaging the chuck seat 242 and the cooling mechanism 25 disposed inside the chuck seat 242.

[0055] Specifically, the outer wall of the water outlet pipe 253 is connected to a limiting nut 2531, and the limiting nut 2531 is located in the cooling mechanism accommodating chamber, and the limiting nut 2531 is used to resist the chuck base 241. In actual work, the limiting nut 2531 can limit the position of the water outlet pipe 253 in the cooling mechanism accommodating chamber, which is convenient for the installation and positioning of the water outlet pipe 253. Preferably, the limiting nut 2531 is a copper nut. The copper nut has good ductility. Since a large amount of heat is generated during the operation of the target material ionization mechanism 2, the water outlet pipe 253 may expand and contract due to heat. The copper nut can change well with the changes of the water outlet pipe 253 to prevent the water outlet pipe 253 or the limiting nut 2531 from being damaged.

[0056] like Figures 5 to 7 As shown, in this embodiment, the ion generating mechanism 3 includes an assembly base 31, a positive electrode carrier 32, a negative electrode carrier 33, an air cavity base 34 and a cooling component 35. The assembly base 31 is installed in the vacuum cavity 11, and the negative electrode carrier 33 is installed on the top of the assembly base 31. The cooling component 35 is installed on the bottom of the negative electrode carrier 33 and is used to cool the negative electrode carrier 33. After the positive electrode carrier 32 and the negative electrode carrier 33 are energized, an electric field will be generated between the positive electrode carrier 32 and the negative electrode carrier 33. The air cavity base 34 is arranged between the positive electrode carrier 32 and the negative electrode carrier 33; the air cavity base 34 is provided with an ion generating chamber 36 and a plurality of ion emission through holes 37, and the plurality of ion emission through holes 37 are respectively connected to the ion generating chamber 36.

[0057] In actual operation, the ion generating chamber 36 is filled with gas. Under the action of the electric field between the positive electrode carrier 32 and the negative electrode carrier 33, the gas in the ion generating chamber 36 is broken down, and the physical phenomenon of gas discharge, i.e., the glow discharge phenomenon, is presented. The plasma formed by the gas discharge is an ionized gas, which is a collection of ions, electrons, and high-energy atoms. Positive ions and electrons always appear in pairs, with a total number that is roughly equal, and are quasi-neutral as a whole. It is an ionized state composed of charged particles, called the fourth state of matter - plasma state. In the sputtering coating process, the gas and target metal atoms are ionized by high-energy electrons into plasma composed of conductive particles such as electrons, gas ions, and metal ions. The plasma moves from the ion emission through hole 37 to the vacuum inner cavity 11 as the bombardment particle in the sputtering coating process. In the process of gas discharge, the negative electrode carrier 33 is in a super high temperature state, and the flowing coolant is introduced from the cooling assembly 35 to effectively and quickly cool the negative electrode carrier 33 and the gas cavity base 34.

[0058] like Figure 6 and Figure 7As shown, in this embodiment, the cooling assembly 35 includes a cooling bracket 38, a third water inlet 39 and a third water outlet 310; the cooling bracket 38 is installed at the bottom of the negative electrode carrier 33, the cooling bracket 38 and the negative electrode carrier 33 are surrounded to form a second cooling liquid chamber 311, the third water inlet 39 and the third water outlet 310 are respectively arranged at both ends of the cooling bracket 38, and the third water inlet 39 and the third water outlet 310 are respectively connected to the second cooling liquid chamber 311; the positive electrode carrier 32 is installed with an electrode terminal 314, and the electrode terminal 314 is used to connect to the positive electrode of the external power supply; the negative electrode carrier 33 is used to connect to the negative electrode of the external power supply; specifically, a cooling bracket sealing ring 312 is installed between the cooling bracket 38 and the negative electrode carrier 33, and the cooling bracket sealing ring 312 is used to seal the gap between the cooling bracket 38 and the negative electrode carrier 33. When power is turned on, an electric field is generated between the positive electrode carrier 32 and the negative electrode carrier 33. Specifically, the coolant is introduced into the second coolant chamber 311 from the third water inlet 39, and directly contacts the negative electrode carrier 33. The coolant in the second coolant chamber 311 flows out from the third water outlet 310. The coolant is in a real-time flow state, so that the negative electrode carrier 33 can be effectively and quickly cooled, and the service life is extended. After the coolant is introduced into the second coolant chamber 311, the cooling support seal ring 312 is used to prevent the coolant from overflowing the second coolant chamber 311, and further prevent the coolant from being wasted and contaminating other parts. The electrode terminal 314 is connected to the positive pole of the external power supply, and the negative electrode carrier 33 is connected to the negative pole of the external power supply. After the positive electrode carrier 32 and the negative electrode carrier 33 are energized, an electric field is provided for the ion generating chamber 36. The negative electrode carrier 33 is equipped with an air filling nozzle 313, which is connected to the ion generating chamber 36, and the air filling nozzle 313 is connected to the external air filling device to supply sufficient gas to the ion generating chamber 36. Ensure that the work can be carried out stably.

[0059] like Figure 7 and Fig. 9As shown, in this embodiment, the ion generating mechanism 3 also includes a cooling enclosure 315, a second mounting hole 316 is provided in the middle of the cooling enclosure 315, and the air cavity base 34 is installed on the cooling enclosure 315 via the second mounting hole 316; a liquid injection rod 317 is provided at the bottom of the cooling enclosure 315, and the liquid injection rod 317 is provided with a first liquid inlet channel 318 and a first liquid outlet channel 319, and a cooling ring groove 320 is provided at the top of the cooling enclosure 315, and the first liquid inlet channel 318 and the first liquid outlet channel 319 are both connected to the cooling ring groove 320. In actual operation, the coolant flows through the first liquid inlet channel 318, the cooling ring groove 320 and the first liquid outlet channel 319 in sequence, and the cooling ring groove 320 is used to cool the air cavity base 34; the outer side of the liquid injection rod 317 is provided with an insulating component 321 for protecting the liquid injection rod 317. Specifically, the shape of the second mounting hole 316 matches the shape of the air cavity base 34, and the air cavity base 34 is located in the middle of the cooling enclosure 315. The plane where the cooling annular groove 320 is located is perpendicular to the axial center line of the injection rod 317. The cooling assembly 35 cools the negative electrode carrier 33. Since the air cavity base 34 is located on the negative electrode carrier 33, the cooling assembly 35 can cool the bottom of the air cavity base 34, and the cooling annular groove 320 is used to cool the edge of the air cavity base 34. The cooling assembly 35 and the cooling annular groove 320 cool multiple locations of the air cavity base 34 at the same time, which can enhance the cooling effect and ensure that the process of plasma formed by gas discharge in the ion generating chamber 36 proceeds smoothly. Since the injection rod 317 is arranged between the negative electrode carrier 33 and the positive electrode carrier 32, it is easy to be broken down and burned. The insulating component 321 can make the injection rod 317 in an insulated state, effectively protect the injection rod 317, and extend the service life.

[0060] like Figure 7 and Figure 8 As shown, in this embodiment, the ion generating mechanism 3 also includes a plurality of magnetic components (not shown in the figure), the air cavity base 34 is provided with a plurality of limiting holes 323, and the plurality of limiting holes 323 are arranged in a ring array to form a limiting hole ring 324; a plurality of ion emission through holes 37 are arranged in a linear array, and the plurality of ion emission through holes 37 are all located inside the limiting hole ring 324, and a plurality of magnetic components are assembled one by one with the plurality of limiting holes 323. Specifically, the magnetic component is used to control the speed at which ions are emitted from the ion emission through hole 37. By controlling the positional relationship between the magnetic component and the ion emission through hole 37, the movement direction and trajectory of the ions are changed, so that the ions are used as bombardment particles in the sputtering coating process, and the effect of bombarding the target material is good, thereby improving the utilization rate of the target material.

[0061] like Fig.10As shown, in this embodiment, the vacuum container 1 further includes a container body 12, a baffle 13, a heating rod 14 and a gas supply pipe 15; the baffle 13 is rotatably mounted on the container body 12, and the baffle 13 is used to open or close the vacuum cavity 11 of the container body 12; the baffle 13 is provided with a mounting slot 16, and the ion generating mechanism 3 is installed in the mounting slot 16, and the number of the heating rods 14 is multiple, and the multiple heating rods 14 are arranged in a circular array in the vacuum cavity 11, and the multiple heating rods 14 are used to provide heat to the vacuum cavity 11, so that the heat distribution of the vacuum cavity 11 is uniform, and the gas supply pipe 15 is arranged in the vacuum cavity 11 and is used to supply gas to the ion generating mechanism 3. The baffle 13 can facilitate the operator to take and place the workpiece. The heating rod 14 is used to control the temperature of the vacuum cavity 11 to meet the coating requirements of various different workpieces.

[0062] All technical features in this embodiment can be freely combined according to actual needs.

[0063] The above embodiments are preferred implementation schemes of the present invention. In addition, the present invention may also be implemented in other ways. Any obvious replacement without departing from the concept of the present technical solution is within the protection scope of the present invention.

Claims

1. A curved pipe filter coating machine, comprising a control cabinet and a vacuum pump, characterized in that: It also includes a vacuum container, a plurality of target material ionization mechanisms and a plurality of ion generating mechanisms; the vacuum container is provided with a vacuum inner cavity, and the plurality of ion generating mechanisms are respectively installed in the vacuum inner cavity and used to generate ions into the vacuum inner cavity; the plurality of target material ionization mechanisms are respectively connected to the vacuum container; the vacuum pump is connected to the vacuum container and used to evacuate the vacuum container; the vacuum pump, the plurality of target material ionization mechanisms and the plurality of ion generating mechanisms are all electrically connected to the control cabinet; the target material ionization mechanism includes a mounting seat, an arc striking mechanism, a driving mechanism, a target material chuck mechanism, a cooling mechanism and a vacuum tube mechanism; the vacuum tube mechanism includes an arc tube assembly and a plurality of straight tube assemblies, and the two ends of the arc tube assembly are respectively connected with At least one group of straight tube components; the arc tube component and the straight tube component both include an inner tube, an outer tube, a first connecting block, a second connecting block and a plurality of locking pieces; the vacuum tube mechanism is connected to a vacuum container, and the inner tube is connected to a vacuum inner cavity; the two ends of the inner tube are respectively connected to the first connecting block and the second connecting block, and the two ends of the outer tube are respectively connected to the first connecting block and the second connecting block, the outer tube is sleeved on the outside of the inner tube, and a first cooling liquid cavity is provided between the outer tube and the inner tube; the outer tube is provided with a first water inlet and a first water outlet, and the first water inlet and the first water outlet are both connected to the first cooling liquid cavity; the first connecting block is connected to a mounting seat or a second connecting block of an adjacent arc tube component or a second connecting block of an adjacent straight tube component, and the first The second connecting block is connected to the first connecting block of the adjacent arc tube assembly or the first connecting block of the adjacent straight tube assembly, and a plurality of locking members are used to lock the first connecting block to the mounting seat, and a plurality of locking screws are also used to lock the second connecting block to the first connecting block of the adjacent arc tube assembly or the first connecting block of the adjacent straight tube assembly; an electromagnetic induction coil is sleeved on the outer side of the outer tube; the target material chuck mechanism is arranged on the mounting seat and located inside the inner tube, and the target material chuck mechanism is used to clamp the target material to be ionized; the cooling mechanism is arranged on the mounting seat and used to cool the target material to be ionized clamped by the target material chuck mechanism; the arc striking mechanism is rotatably connected to the mounting seat and located inside the inner tube, and the driving mechanism is arranged on the mounting seat and used to drive the arc striking mechanism to rotate, and the arc striking machine The structure is used to make the target material to be ionized clamped by the target material chuck mechanism produce an arc spot; the cooling mechanism includes a water pipe sleeve, a water inlet pipe, a water outlet pipe, a water outlet pipe locking assembly and a heat exchange seat, the heat exchange seat is arranged on one side of the mounting seat and located inside the inner tube, and the water pipe sleeve and the water outlet pipe locking assembly are arranged on the other side of the mounting seat; the water pipe sleeve is provided with a second water inlet and a second water outlet, the heat exchange seat is provided with a first accommodating cavity, a second accommodating cavity and a through hole, the through hole connects the first accommodating cavity and the second accommodating cavity, the heat exchange seat is connected to the target material chuck mechanism, and the first accommodating cavity is located at one end of the heat exchange seat close to the target material chuck mechanism; the water outlet pipe sleeve is arranged on the outside of the water inlet pipe, and a flow gap is provided between the water inlet pipe and the water outlet pipe;The mounting seat is provided with a first mounting hole, which passes through the mounting seat, one end of the water inlet pipe is connected to the water pipe sleeve, the other end of the water inlet pipe passes through the first mounting hole and is connected to the heat exchange seat, and the water inlet pipe communicates with the second water inlet and the first accommodating chamber; one end of the water outlet pipe is connected to the water pipe sleeve, the other end of the water outlet pipe passes through the first mounting hole and is connected to the heat exchange seat, and the water outlet pipe communicates with the second water outlet and the second accommodating chamber; the water outlet pipe locking assembly is used to lock the water outlet pipe to the mounting seat; the water pipe sleeve is provided with a third accommodating chamber and a fourth accommodating chamber, and the fourth accommodating chamber communicates with the third accommodating chamber and the outside; the second water inlet is communicated with the third accommodating chamber, and the second water outlet is communicated with the fourth accommodating chamber; the inner wall of the third accommodating chamber is provided with a first internal thread, and the outer wall of the water inlet pipe is provided with a first external thread for threaded connection with the first internal thread; the inner wall of the fourth accommodating chamber is provided with a second internal thread, and the outer wall of the water outlet pipe is provided with a second external thread for threaded connection with the second internal thread. ; 2. The curved pipe filter coating machine according to claim 1, characterized in that: A plurality of material blocking plates are arranged at intervals inside the inner tube of the arc tube assembly and / or the straight tube assembly.

3. The curved pipe filter coating machine according to claim 1, characterized in that: The target material chuck mechanism includes a chuck base and a chuck seat, the chuck base is connected to the mounting seat, the chuck seat is connected to one end of the chuck base away from the mounting seat, and the chuck seat is used to clamp the target material to be ionized; the chuck base is provided with a cooling mechanism accommodating cavity, the heat exchange seat is located in the cooling mechanism accommodating cavity and abuts against the bottom of the chuck seat.

4. The curved pipe filter coating machine according to claim 1, characterized in that: The ion generating mechanism comprises an assembly substrate, a positive electrode carrier, a negative electrode carrier, an air cavity substrate and a cooling component. The assembly substrate is installed in a vacuum cavity, the negative electrode carrier is installed on the top of the assembly substrate, the cooling component is installed on the bottom of the negative electrode carrier and is used to cool the negative electrode carrier, and the air cavity substrate is arranged between the positive electrode carrier and the negative electrode carrier; the air cavity substrate is provided with an ion generating cavity and a plurality of ion emission through holes, and the plurality of ion emission through holes are respectively connected to the ion generating cavity.

5. The curved pipe filter coating machine according to claim 4, characterized in that: The cooling assembly includes a cooling support, a third water inlet and a third water outlet; the cooling support is installed at the bottom of the negative electrode carrier, the cooling support and the negative electrode carrier are surrounded to form a second cooling liquid cavity, the third water inlet and the third water outlet are respectively arranged at both ends of the cooling support, and the third water inlet and the third water outlet are respectively connected to the second cooling liquid cavity; the positive electrode carrier is installed with an electrode terminal, and the electrode terminal is used to connect to the positive electrode of an external power supply; the negative electrode carrier is used to connect to the negative electrode of an external power supply.

6. The curved pipe filter coating machine according to claim 4, characterized in that: The ion generating mechanism also includes a cooling enclosure, a second mounting hole is provided in the middle of the cooling enclosure, and the air cavity base is installed on the cooling enclosure via the second mounting hole; a liquid injection rod is provided at the bottom of the cooling enclosure, and the liquid injection rod is provided with a first liquid inlet channel and a first liquid outlet channel, and a cooling ring groove is provided at the top of the cooling enclosure, and the first liquid inlet channel and the first liquid outlet channel are both connected to the cooling ring groove, and the cooling ring groove is used to cool the air cavity base; an insulating component for protecting the liquid injection rod is provided on the outer side of the liquid injection rod.

7. The curved pipe filter coating machine according to claim 4, characterized in that: The ion generating mechanism also includes a plurality of magnetic components. The air cavity base is provided with a plurality of limiting holes, which are arranged in a ring array to form a limiting hole ring. The plurality of ion emission through holes are arranged in a linear array, and the plurality of ion emission through holes are all located inside the limiting hole ring. The plurality of magnetic components are assembled one-to-one with the plurality of limiting holes.

8. The curved pipe filter coating machine according to claim 1, characterized in that: The vacuum container also includes a container body, a baffle, a heating rod and a gas supply pipe; the baffle is rotatably installed on the container body, and the baffle is used to open or close the vacuum cavity of the container body; the baffle is provided with an installation slot, and the ion generating mechanism is installed in the installation slot. There are multiple heating rods, and the multiple heating rods are arranged in a circular array in the vacuum cavity. The gas supply pipe is arranged in the vacuum cavity and is used to supply gas to the ion generating mechanism.

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