Sample carrying device and operation method thereof

Abstract

The present invention discloses a sample carrying device, which includes a single substrate, a penetration structure, and a fixed structure. The penetration structure is formed on one side of the substrate, and a fluid channel is provided in the penetration structure, and the fixed structure is formed on one side of the penetration structure. The sample carrying device is divided into an end portion, an observation portion, and an operation portion. The user can separate the observation portion from the end portion by operating the operation portion. After the observation portion is separated from the end portion, the user can allow the sample to enter the fluid channel through a port of the fluid channel exposed in the observation portion. After the fluid channel of the observation portion carries the sample, the user can seal the port of the fluid channel and set the observation portion in an electron microscope. In this way, the user can use an electron microscope device to observe the liquid sample in the fluid channel set in the observation portion.

Description

Technical Field

[0001] The invention relates to a sample carrying device and an operating method thereof. The sample carrying device is suitable for carrying a sample and allowing a user to observe the sample under an electron microscope. Background Art

[0002] Common electron microscopes, such as atomic force microscope (AFM), transmission electron microscope (TEM), scanning electron microscope (SEM), etc., are mainly used to place the sample on a sample rod, and then put the sample rod into the electron microscope, or directly place the sample on the observation stage inside the electron microscope. Since the sample rod or the observation stage cannot directly carry liquid samples, relevant researchers cannot directly observe liquid samples with an electron microscope. Therefore, it causes trouble for researchers. Summary of the invention

[0003] The present invention discloses a sample carrying device and an operating method thereof, which are mainly used to improve the existing electron microscope equipment and its related observation kit, which cannot allow users to directly observe liquid samples under the electron microscope.

[0004] One embodiment of the present invention discloses a sample carrying device, which is suitable for carrying a sample. The sample carrying device includes: a single substrate, whose two opposite sides are respectively defined as a first side and a second side, and the substrate is formed with a lower observation window penetrating the substrate on the second side; at least one penetrating structure, which is formed on the first side of the substrate, and the penetrating structure has at least one fluid channel; the lower observation window is used to expose part of the penetrating structure to the substrate; the fluid channel is used to accommodate the sample; a fixed structure, which is formed on the side of the penetrating structure opposite to the substrate, and the fixed structure covers a part of the penetrating structure; an upper observation window penetrating the fixed structure is formed on the side of the fixed structure opposite to the substrate, and the upper observation window is used to expose part of the penetrating structure. The penetration structure is exposed from the fixed structure; wherein, the sample carrying device is divided into at least one end, at least one operating part and an observation part, the operating part is located between the end and the observation part, and the operating part can be operated to separate the end and the observation part from each other; the upper observation window and the lower observation window are arranged corresponding to each other, and the upper observation window and the lower observation window are located in the observation part; the fluid channel is arranged across the end, the operating part and the observation part; wherein, when the operating part is operated and the end and the observation part are separated from each other, a port of the fluid channel will be exposed outside the observation part, and the sample can enter the fluid channel through the port; wherein, when the fluid channel in the observation part carries a sample and the port is sealed, the observation part can be sent into the electron microscope equipment.

[0005] Preferably, the penetration structure is defined as a first penetration structure and a second penetration structure, a first surface of the substrate on the first side is concave to form a groove, the second penetration structure is formed on the first surface, and the second penetration structure is also formed on the wall surface of the groove, the first penetration structure is formed on the second penetration structure located on the first surface, and part of the first penetration structure is located above the groove, and part of the first penetration structure and part of the second penetration structure together form a fluid channel; the fixed structure is formed on the side of the first penetration structure opposite to the substrate.

[0006] Preferably, the fixed structure has at least one through hole, which is arranged through the fixed structure. The through hole is used to expose part of the first penetrating structure from the fixed structure, and the through hole is located above the fluid channel. When an operating tool passes through the through hole and pierces the penetrating structure exposed from the through hole, the fluid channel will be connected to the outside, and the sample can enter the fluid channel through the through hole.

[0007] Preferably, the penetration structure is defined as a first penetration structure and a second penetration structure, the first penetration structure is formed on a first surface of the first side of the substrate, the second penetration structure is formed on a side of the first penetration structure opposite to the first surface, and the second penetration structure and part of the first penetration structure together form a fluid channel; the fixed structure is formed on a side of the second penetration structure opposite to the first penetration structure, and the fixed structure is also formed on a side of the part of the first penetration structure opposite to the substrate.

[0008] Preferably, the fixed structure also has at least one through hole, which is arranged through the fixed structure, and is used to expose part of the second penetrating structure from the fixed structure, and the through hole is located above the fluid channel; when an operating tool passes through the through hole and punctures the second penetrating structure exposed from the through hole, the fluid channel will be connected to the outside, and the sample can enter the fluid channel through the through hole.

[0009] Preferably, the fixed structure is separated by a base and a protrusion, the base is formed on one side of the first penetrating structure, the protrusion is extended from the base in a direction away from the substrate, and the width of the protrusion in the width direction of the sample carrying device is smaller than the width of the base in the width direction of the sample carrying device.

[0010] Preferably, the sample carrying device is divided into two end portions, two operating portions and an observation portion, the observation portion is located between the two end portions, and each operating portion is located between the observation portion and the end portions; when the operating portion is operated and the observation portion and the two end portions are separated from each other, the fluid channel will be connected to the outside, and the sample can enter the fluid channel through the exposed port of the fluid channel.

[0011] Preferably, at least one notch is formed in the concave of the substrate corresponding to the operating portion, and at least one notch is formed in the concave of the fixing structure corresponding to the operating portion, and the notch of the substrate and the notch of the fixing structure are arranged correspondingly.

[0012] Preferably, the substrate corresponding to the operating portion has at least one modified region, and the fixed structure corresponding to the operating portion has at least one modified region, and the modified region of the substrate and the modified region of the fixed structure are arranged correspondingly.

[0013] Preferably, the observation part forms a control module, the control module includes a control circuit, a plurality of electrode structures and a plurality of metal contact parts, the plurality of metal contact parts are connected to the plurality of electrode structures, and the plurality of metal contact parts are connected to the control circuit, the plurality of metal contact parts are exposed to the fixed structure, and the plurality of electrode structures are correspondingly located in the fluid channel.

[0014] Preferably, the sample carrying device is separated into two ends, the observation part is located between the two ends, a microfluidic chip is formed at one of the ends, and a fluid channel is formed in the end with the microfluidic chip; the fixed structure is formed on the side of the penetrating structure and the microfluidic chip opposite to the substrate, and the fixed structure has a plurality of through holes, at least one through hole corresponds to the microfluidic chip, and the through hole located in the microfluidic chip is used to expose a portion of the penetrating structure located in the microfluidic chip.

[0015] Preferably, the microfluidic chip includes a mixer, a flow controller, a filter and a switch, and the mixer, flow controller, filter and switch are arranged in a fluid channel located in the microfluidic chip; when the exposed penetrating structure in the through hole of the microfluidic chip is punctured and the fluid channel is connected to the outside, the sample can enter the fluid channel through the through hole of the microfluidic chip, and the sample entering the fluid channel can pass through the mixer, fluid controller, filter and switch to enter the fluid channel located in the observation part.

[0016] Preferably, the penetration structure and the fixing structure are sequentially formed on the first side of the substrate by using a surface process.

[0017] An embodiment of the present invention also discloses an operating method of a sample carrying device, which includes the following steps: a disassembly step: separating the end portion and the observation portion from each other to expose two ports of the fluid channel located in the observation portion; a sampling step: making one of the ports contact the sample to allow the sample to enter the fluid channel through the port; and a sealing step: sealing the two ports to isolate the fluid channel and the sample in the fluid channel from the outside.

[0018] An embodiment of the present invention also discloses an operating method of a sample carrying device, which comprises the following steps: a sampling step: using an operating tool to puncture the penetrating structure exposed in the through hole through the through hole, so that the fluid channel is connected to the outside and the sample enters the fluid channel through the through hole; a disassembly step: separating the end portion and the observation portion from each other, so that the two ports of the fluid channel located in the observation portion are exposed; a sealing step: sealing the two ports, so that the fluid channel and the sample in the fluid channel are isolated from the outside.

[0019] In summary, the sample carrying device of the present invention can greatly improve the yield rate of the sample carrying device by forming a fluid channel design on a single substrate, and the fluid channel can carry liquid samples. The sample carrying device can be directly fixed on a sample rod used by a general electron microscope equipment or an observation stage of the electron microscope equipment. Therefore, the user can carry the liquid sample through the sample carrying device and directly observe the liquid sample under the electron microscope.

[0020] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and are not intended to limit the protection scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional schematic diagram of the first embodiment of the sample holding device of the present invention.

[0022] Figure 2 for Figure 1 Top view of the .

[0023] Figure 3 For along Figure 1 Schematic diagram of the cross section taken along section line III-III.

[0024] Figure 4 For along Figure 1 Schematic diagram of the cross section taken along section line IV-IV.

[0025] Figure 5A , 5B 5C, 5D, 5E, 5F, and 5G are schematic diagrams of the general manufacturing process of the first embodiment of the sample carrying device of the present invention.

[0026] Figure 6 It is a schematic diagram of the manufacturing process of the first embodiment of the sample holding device of the present invention.

[0027] Figure 7 It is a schematic diagram of the operating method of the first embodiment of the sample carrying device of the present invention.

[0028] Figure 8It is a three-dimensional schematic diagram of the sample carrying device of the first embodiment of the present invention after the observation portion and the end portion are separated.

[0029] Fig. 9 It is a schematic diagram of the first embodiment of the sample supporting device of the present invention for sucking samples.

[0030] Fig.10 It is a schematic diagram of the operation flow of the first embodiment of the sample carrying device of the present invention after aspirating the sample.

[0031] Fig.11 It is a three-dimensional schematic diagram of a second embodiment of a sample carrying device of the present invention.

[0032] Fig.12 For along Fig.11 Schematic diagram of the cross section taken along section line XII-XII.

[0033] Fig.13 For along Fig.11 A schematic cross-sectional view taken along section line XIII-XIII.

[0034] Fig.14A , 14B 14C, 14D, 14E, 14F, and 14G are schematic diagrams of the general manufacturing process of the second embodiment of the sample carrying device of the present invention.

[0035] Fig.15 It is a schematic top view of a third embodiment of a sample carrying device of the present invention.

[0036] Fig.16 It is a partial top view schematic diagram of a fourth embodiment of the sample carrying device of the present invention.

[0037] Fig.17 It is a partial top view of a fifth embodiment of the sample carrying device of the present invention. DETAILED DESCRIPTION

[0038] In the following description, if it is indicated to refer to a specific figure or as shown in a specific figure, it is only used to emphasize that most of the related contents described in the subsequent description appear in the specific figure, but it does not limit the subsequent description to only refer to the specific figure.

[0039] Please also read Figures 1 to 4 , Figure 1 is a three-dimensional schematic diagram of a first embodiment of a sample carrying device of the present invention, Figure 2 for Figure 1 A top view of Figure 3 For along Figure 1 Schematic diagram of the cross section taken along the section line Ⅲ-Ⅲ, Figure 4 For along Figure 1Schematic diagram of the cross section taken along section line IV-IV.

[0040] The sample carrying device 100 is suitable for carrying a sample S (such as Fig. 9 The sample holder 100 is used to be arranged on a sample holder of an electron microscope, and the electron microscope can observe the sample S carried by the sample holder 100. The electron microscope is, for example, an atomic force microscope (AFM), a transmission electron microscope (TEM), a scanning electron microscope (SEM), etc., which are not limited here.

[0041] In practical applications, after the sample is loaded, the sample loading device 100 of the present invention is fixed to the copper ring by adhesive and then set at a predetermined position of the sample rod. Since the sample loading device 100 of the present invention can load liquid samples, relevant researchers can use an electron microscope to observe the liquid samples.

[0042] Generally speaking, the sample to be tested is placed on a standard copper grid (Cu Grid), and then fixed on a sample rod through relevant fixing components. Since the standard copper grid cannot carry liquid samples, relevant researchers cannot directly use an electron microscope to observe liquid samples. In other words, the sample carrier 100 of the present invention provides a technical solution for researchers to observe liquid samples under an electron microscope. The components included in the sample carrier 100 of the present invention and their general manufacturing methods will be described in detail below.

[0043] The sample carrier 100 includes: a single substrate 1, at least one penetrating structure 2 and a fixing structure 3. The two opposite sides of the substrate 1 are defined as a first side 1A and a second side 1B, respectively. The sample carrier 100 can be divided into two end portions 11, two operating portions 12 and an observation portion 13. The observation portion 13 is located between the two end portions 11, and each operating portion 12 is located between one of the end portions 11 and the observation portion 13. The operating portion 12 can be operated to separate the end portion 11 and the observation portion 13 from each other. In practical applications, the substrate 1 and the fixing structure 3 can form a plurality of notches 121 in the operating portion 12. The user can use relevant tools to apply external force to the operating portion 12, thereby breaking the sample carrier 100 at the position of the operating portion 12, thereby separating the end portion 11 and the observation portion 13 from each other.

[0044] It should be noted that the position of the substrate 1 and the fixing structure 3 at the operation portion 12 is not limited to the corresponding formation of the notch 121. The substrate 1 and the fixing structure 3 may also form a modified area at the position of the operation portion 12. For example, the area of ​​the operation portion 12 of the substrate 1 is modified by a technique such as stealth dicing, so that the material of the area of ​​the operation portion 12 is embrittled. In this way, when the operation portion 12 is subjected to an external force, the sample carrier 100 will be easily broken at the position of the operation portion 12, and the end portion 11 and the observation portion 13 will be separated from each other. As mentioned above, the function of the operation portion 12 is to allow the user to easily separate the end portion 11 and the observation portion 13 from each other. Therefore, in actual applications, the substrate 1 and the fixing structure 3 may form any structure or construction on the operation portion 12 that is convenient for the user to separate the end portion 11 and the observation portion 13 from each other, and is not limited to the notch or modified area.

[0045] The penetration structure 2 is formed on the first side 1A of the substrate 1. The penetration structure 2 has a fluid channel 2A inside, and the fluid channel 2A is used to accommodate the sample S. The fluid channel 2A is arranged across the end portion 11, the operating portion 12 and the observation portion 13. Figure 3 and Figure 4 As shown, the penetration structure 2 may be defined as a first penetration structure 21 and a second penetration structure 22. The first surface 10 of the first side of the substrate 1 is formed with the first penetration structure 21, the second penetration structure 22 is formed on a side of the first penetration structure 21 opposite to the first surface 10, and the second penetration structure 22 and a portion of the first penetration structure 21 together form a fluid channel 2A.

[0046] In practical applications, the second penetration structure 22 may include a top wall 221 and two side walls 222. Two opposite sides of the top wall 221 extend in one direction to form a side wall 222. The two side walls 222 are arranged facing each other, and the top wall 221 and the two side walls 222 together form a U-shaped structure. Of course, the appearance of the second penetration structure 22 is not limited to this, and it can be changed according to needs.

[0047] A lower observation window 14 penetrating the substrate 1 is formed on the second side 1B of the substrate 1, and the lower observation window 14 is used to expose a portion of the penetration structure 2 to the substrate 1. The fixed structure 3 is formed on the side of the penetration structure 2 opposite to the substrate 1, and the fixed structure 3 covers a portion of the penetration structure 2. An upper observation window 31 penetrating the fixed structure 3 is formed on the side of the fixed structure 3 opposite to the substrate 1, and the upper observation window 31 is used to expose a portion of the penetration structure 2 to the fixed structure 3. The fixed structure 3 is formed on the side of the second penetration structure 22 opposite to the substrate 1, and the fixed structure 3 is also formed on the side of a portion of the first penetration structure 21 opposite to the substrate 1.

[0048] The penetration structure 2 and the fixed structure 3 can be formed on one side of the substrate 1 by using a surface treatment process, such as a semiconductor process, a micro-electromechanical process (MEMS), etc. In practical applications, the penetration structure 2 and the fixed structure 3 are formed on the first side of the substrate 1 by using a surface treatment process, so that the formation position, size, appearance, etc. of the penetration structure 2 and the fixed structure 3 can be accurately controlled.

[0049] The upper observation window 31 and the lower observation window 14 are arranged corresponding to each other, and the electron beam of the electron microscope can enter the fluid channel 2A through the upper observation window 31 and the lower observation window 14, and pass through the sample S in the fluid channel 2A. The appearance and size of the upper observation window 31 and the lower observation window 14 can be changed according to needs and are not limited here, as long as the upper observation window 31 and the lower observation window 14 allow the electron beam of the electron microscope to pass through.

[0050] like Figure 3 As shown, in the cross-sectional schematic diagram of the sample carrier device 100 of this embodiment, the lower observation window 14 is roughly trapezoidal, and the upper observation window 31 is roughly rectangular. However, the present invention is not limited thereto. In practical applications, Figure 3 The angle θ between the side wall of the lower observation window 14 and the first penetration structure 21 can be between 80 degrees and 160 degrees. Figure 3 In the cross-sectional schematic diagram shown, the upper observation window 31 may also be roughly trapezoidal in shape.

[0051] See also FIG. 5A to FIG. 5G , which is a schematic diagram of the manufacturing process of the first embodiment of the sample carrying device of the present invention. In practical applications, the manufacturing process of the penetration structure 2 and the fixing structure 3 can generally include the following steps:

[0052] Step 1: If Figure 5A As shown, a first penetration structure 21 is formed on the first surface 10 of the first side of the substrate 1; for example, a silicon nitride (Si3N4) layer is deposited on the first surface 10 by deposition to form the first penetration structure 21; the thickness of the substrate 1 may be 525 microns, and the thickness of the first penetration structure 21 may be between 25 nanometers and 100 nanometers;

[0053] Step 2: If Figure 5B As shown, a sacrificial layer structure 4 is formed as a rectangular body on the first penetration structure 21; the sacrificial layer structure 4 can be, for example, polycrystalline silicon (Ploy-Si);

[0054] Step 3: If Figure 5CAs shown, a second penetration structure 22 is formed on the sacrificial layer structure 4 and the first penetration structure 21, and the second penetration structure 22 is bonded to the first penetration structure 21; for example, a silicon nitride (Si3N4) layer is deposited on the sacrificial layer structure 4 and the first penetration structure 21 by deposition to form the second penetration structure 22;

[0055] Step 4: If Figure 5D As shown, a fixed structure 3 is formed on the second penetration structure 22 and the first penetration structure 21, so that the fixed structure 3 covers the periphery of the second penetration structure 22; for example, a silicon dioxide (SiO2) layer is deposited on the second penetration structure 22 and the first penetration structure 21 by deposition to form the fixed structure 3;

[0056] Step 5: If Figure 5E As shown, a portion of the fixed structure 3 located on the second penetration structure 22 is removed to form an upper observation window 31, and a portion of the second penetration structure 22 is exposed from the fixed structure 3; for example, a portion of the fixed structure 3 located on the second penetration structure 22 is removed by dry etching; the maximum thickness of the fixed structure 3 can be approximately 5 microns; the length of the upper observation window 31 can be approximately 300 microns, and the width of the upper observation window 31 can be approximately 25 microns;

[0057] Step 6: If Fig. 5F As shown, the sacrificial layer structure 4 between the second penetration structure 22 and the first penetration structure 21 is removed to form the fluid channel 2A between the second penetration structure 22 and the first penetration structure 21; for example, the sacrificial layer structure 4 is removed by dry etching or wet etching; the height of the fluid channel 2A may be between 0.1 micrometers and 0.5 micrometers, and the width of the fluid channel 2A may be approximately 120 micrometers;

[0058] Step 7: If Figure 5G As shown, a portion of the second side of the substrate 1 is removed to form a lower observation window 14 .

[0059] Through the above steps, a penetration structure 2 consisting of a first penetration structure 21 and a second penetration structure 22 is formed on the first surface 10 of the substrate 1, and the space between the first penetration structure 21 and the second penetration structure 22 is correspondingly formed as a part of the fluid channel 2A.

[0060] like Figure 6As shown, the sample-carrying device 100 of the present invention utilizes surface processing technology to form a penetrating structure 2 having a fluid channel 2A on the surface of a single substrate 1, that is, the fluid channel 2A of the sample-carrying device 100 of the present invention is directly formed on one side of the single substrate 1, and the fluid channel 2A is not constituted together with other components. In this way, when manufacturing the penetrating structure 2, relevant personnel only need to master the relevant parameters in the production process to accurately produce the expected fluid channel 2A.

[0061] It is particularly noted that the applicant has discovered after repeated tests that if grooves are formed on the two substrates first, and then the two substrates are fixed to each other using glue, so that the two grooves and the glue together form a fluid channel, due to the very small size of the substrates and the grooves, it is very difficult to correctly align the two grooves and correctly apply the glue to a specific position during the actual production process, which leads to a low yield rate of this method. Therefore, the applicant proposes a sample carrier device 100 that only forms a fluid channel 2A on a single substrate. Since the fluid channel 2A is directly formed on the substrate 1 through the penetrating structure 2, there will be no problems such as positioning and applying glue, and the overall yield rate will be greatly improved compared to the above method.

[0062] Please also read Figures 7 to 10 , Figure 7 is a schematic diagram of an operating method of a first embodiment of a sample carrying device of the present invention, Figure 8 is a three-dimensional schematic diagram of the sample carrying device of the present invention after the observation portion and the end portion are separated, Fig. 9 FIG. 1 is a schematic diagram of the first embodiment of the sample carrying device of the present invention for sucking samples. Fig.10 It is a schematic diagram of the process of installing the copper ring after aspirating the sample according to the first embodiment of the sample carrying device of the present invention.

[0063] The operating method of the first embodiment of the sample carrying device of the present invention may include the following steps:

[0064] A disassembly step: separating the end portion 11 and the observation portion 13 from each other so that a port of the fluid channel 2A is exposed to the observation portion 13;

[0065] A sampling step: contacting the port with the sample S so that the sample S enters the fluid channel 2A through the port;

[0066] A sealing step: sealing the port to isolate the fluid channel 2A and the sample S in the fluid channel 2A from the outside.

[0067] like Figure 7As shown, in the disassembly step, the user can use a nickel or related tools to apply external force to the end portion 11 and the operating portion 12 to separate the observation portion 13 from the two end portions 11. Figure 8 As shown, when the two ends of the observation portion 13 of the sample supporting device 100 do not have the end portions 11 , the two ports 2B of the fluid channel 2A will be exposed outside the observation portion 13 .

[0068] like Fig. 9 As shown, when the port 2B of the fluid channel 2A is exposed, the above-mentioned sampling steps can be performed, that is, the user can contact one end of the fluid channel 2A with the sample S, and then the sample S will flow into the fluid channel 2A by capillary phenomenon.

[0069] As described above, in simple terms, the design of providing the operating portion 12 on the substrate 1 is mainly to allow the user to easily separate the end portion 11 from the observation portion 13, so that both ends of the fluid channel 2A can be exposed. In this way, the user can use any exposed end of the fluid channel 2A to absorb the sample.

[0070] like Fig.10 As shown, when the user places the sample S in the fluid channel 2A in the observation portion 13 (as shown in FIG. Fig.10 ), the above-mentioned sealing step can be performed, that is, the user can apply the sealant 5 to the two ports 2B of the observation portion 13 to seal the fluid channel 2A (such as Fig.10 in the intermediate schema).

[0071] After the sealing step, the user can apply adhesive 6 on both sides of the observation part 13, and fix the copper ring 7 (CuGrid) and the observation part 13 to each other through the adhesive 6 (such as Fig.10 The copper ring referred to here is, for example, a standard copper ring with a diameter of 3 mm. After the user fixes the observation portion 13 carrying the sample S and the copper ring 7 to each other, the user can place the copper ring 7 and the observation portion 13 together at a predetermined observation position of the sample rod. Then, the user can put the sample rod into the electron microscope device, so that the sample S carried by the fluid channel 2A of the observation portion 13 can be observed through the electron microscope device.

[0072] like Figure 3As shown, when the observation part 13 is set in the electron microscope equipment, the electron beam emitted by the electron microscope equipment will pass through the upper observation window 31, through the penetrating structure 2 and enter the fluid channel 2A, and the electron microscope equipment can collect the electron beam reflected by the sample S in the fluid channel 2A through the lower observation window 14, and analyze and image it for observation by the user. It is worth mentioning that the penetrating structure 2 defined in the present invention refers to a structure that can be penetrated by the electron beam, that is, the thickness and material of the penetrating structure 2 can be changed according to actual needs and are not limited here.

[0073] The sample carrier 100 of the present invention only needs to appropriately design the size of the observation portion 13, and the observation portion 13 can be fixed in the standard copper ring used by various electron microscope equipment, that is, the sample carrier 100 of the present invention can be applied to the sample rods of electron microscope equipment of various brands. Since the fluid channel 2A of the sample carrier 100 of the present invention can carry fluid, the user can use the sample carrier 100 of the present invention to carry any liquid sample that can enter the fluid channel 2A, and the user can use the electron microscope equipment to observe the liquid sample.

[0074] like Figure 8 As shown, it is worth mentioning that in practical applications, the fixing structure 3 may include a base 32 and a protrusion 33, the base 32 is formed on the first penetration structure 21, and the protrusion 33 extends from the base 32 in a direction away from the substrate (i.e. Figure 8 The protrusion 33 is formed by extending in the Z-axis direction of the coordinates shown in FIG. 1 , and the width D1 of the protrusion 33 in the width direction of the sample carrier 100 is smaller than the width D2 of the base 32 in the width direction of the sample carrier 100, and a step-like appearance is formed between the protrusion 33 and the base 32. The opening 31A of the upper observation window 31 is formed on the surface of the protrusion 33 opposite to the substrate 1.

[0075] like Figure 8 and Fig.10 As shown, through the design of the base 32 and the protrusion 33, when the user applies the adhesive 6 to both sides of the observation portion 13, the adhesive 6 will be easily stuck at the junction of the base 32 and the protrusion 33, and the adhesive 6 will not easily crawl over the protrusion 33 and enter the upper observation window 31, thereby greatly reducing the probability of the adhesive 6 entering the upper observation window 31.

[0076] Please refer to Figure 1 and Figure 3 In practical applications, the fixed structure 3 may also include two through holes 34. Each through hole 34 is disposed through the fixed structure 3, and is located above the fluid channel 2A. Each through hole 34 is used to expose a portion of the first penetration structure 21 from the fixed structure 3.

[0077] As described above, when the sample carrying device 100 of the present invention is completed, the fluid channel 2A will be a closed channel composed of the first penetration structure 21 and the second penetration structure 22. Through the design of the through hole 34, when the user wants to allow the sample S to enter the fluid channel 2A, in addition to using a tool to separate the end 11 from the observation portion 13, the user can also use an operating tool to pass through the through hole 34 to puncture the penetration structure 2 exposed in the through hole 34, thereby connecting the fluid channel 2A to the outside, and then the user can allow the sample S to enter the fluid channel 2A through the through hole 34.

[0078] That is, another operating method of the sample carrying device 100 of the present invention may include the following steps:

[0079] A sampling step: using an operating tool to pierce the penetrating structure 2 exposed in the through hole 34 through the through hole 34, so that the fluid channel 2A is connected with the outside, and the sample enters the fluid channel 2A through the through hole 34;

[0080] A disassembly step: separating the end portion 11 and the observation portion 13 from each other so that two ends of the fluid channel 2A located in the observation portion 13 are exposed;

[0081] A sealing step: sealing the port to isolate the fluid channel 2A and the sample in the fluid channel 2A from the outside.

[0082] It is worth mentioning that in actual application, the front end of the operating tool may have adhesive, and after the front end of the operating tool pierces the penetrating structure 2, the operating tool can stick the broken penetrating structure 2 together through the adhesive.

[0083] In different embodiments, one side of a single substrate 1 of the sample carrier 100 may also be formed with two or more fluid channels 2A that are independent of each other; that is, a first surface 10 of the first side 1A of the substrate 1 is formed with a first penetration structure 21, and two second penetration structures 22 are respectively formed on the first penetration structure 21, and the two second penetration structures 22 and the first penetration structure 21 form a fluid channel 2A together. Through the design of two fluid channels 2A, the user can carry two different samples S on the same sample carrier 100.

[0084] In the embodiment where the sample-carrying device 100 has two fluid channels 2A, the fixed structure 3 of the sample-carrying device 100 may have two through holes 34 corresponding to each fluid channel 2A, that is, the fixed structure 3 has four through holes 34, two of which expose the second penetration structure 22 forming one of the fluid channels 2A, and the other two through holes 34 expose the second penetration structure 22 forming the other fluid channel 2A. For the sake of explanation, it is assumed that the two through holes 34 corresponding to one of the fluid channels 2A are defined as first through holes, and the fluid channel 2A corresponding to each first through hole 34 is defined as the first fluid channel, and the two through holes 34 corresponding to the other fluid channel 2A are defined as second through holes, and the fluid channel 2A corresponding to each second through hole is defined as the second fluid channel, and two different samples S are defined as the first sample and the second sample, respectively.

[0085] The process for the user to inject the first sample and the second sample into the sample carrying device 100 respectively can be: first use the relevant operating tool to puncture the corresponding second penetration structure 22 through one of the first through holes to connect the first fluid channel to the outside, and then the user can inject the first sample into the first fluid channel through the first through hole; then, the user can use another operating tool to puncture the corresponding second penetration structure through one of the second through holes to connect the second fluid channel to the outside, thereby, the user can inject the second sample into the second fluid channel through the second through hole. After the user injects the first sample and the second sample into the first fluid channel and the second fluid channel respectively, the user can separate the two ends 11 from the observation part 13, and then the user can Fig.10 In the process shown, the observation part 13 is fixedly mounted on the sample rod together with the copper ring.

[0086] Please also read Figure 11 to Figure 1 4. Fig.11 It is a three-dimensional schematic diagram of a second embodiment of the sample holding device of the present invention, Fig.12 Display as Fig.11 A schematic cross-sectional view of the section line XII-XII. Fig.13 Display as Fig.11 A schematic cross-sectional view of the section line XIII-XIII of FIG. FIG. 14A to FIG. 14G 1 is a schematic diagram of the manufacturing process of the second embodiment of the sample carrier device 100 of the present invention. The biggest difference between this embodiment and the previous embodiment is that the fluid channel 2A of the sample carrier device 100 of the previous embodiment is formed on the first surface 10 of the first side 1A of the substrate 1, while the fluid channel 2A of the sample carrier device 100 of this embodiment is buried in the substrate 1.

[0087] like FIG. 14A to FIG. 14GThe manufacturing process of the sample carrying device 100 of this embodiment may generally include the following steps:

[0088] Step 1: If Fig.14A As shown, a groove 15 is formed on the first surface 10 of the first side of the substrate 1; then, a second penetration structure 22 is formed on the first surface 10 of the substrate 1 and on the wall surface of the groove 15; for example, a silicon nitride (Si3N4) layer may be deposited on the first surface 10 and on the wall surface of the groove 15 by deposition to form the second penetration structure 22;

[0089] Step 2: If Fig. 14B As shown, a sacrificial layer structure 4 is formed on the second penetration structure 22 in the groove 15; the sacrificial layer structure 4 may be polycrystalline silicon (Ploy-Si), for example;

[0090] Step 3: If Fig. 14C As shown, a first penetration structure 21 is formed on the sacrificial layer structure 4 and the second penetration structure 22, and the first penetration structure 21 and the second penetration structure 22 are bonded; for example, a silicon nitride (Si3N4) layer is deposited on the sacrificial layer structure 4 and the second penetration structure 22 by deposition to form the first penetration structure 21;

[0091] Step 4: If Fig.14D As shown, a fixed structure 3 is formed on the side of the first penetration structure 21 opposite to the substrate 1; for example, a silicon dioxide (SiO2) layer is deposited on the first penetration structure 21 by deposition to form the fixed structure 3;

[0092] Step 5: If Fig.14E As shown, a portion of the fixed structure 3 is removed to form an upper observation window 31, and a portion of the first penetration structure 21 is exposed from the fixed structure 3; for example, dry etching is used to remove a portion of the fixed structure 3 located on the first penetration structure 21;

[0093] Step 6: If Fig.14F As shown, the sacrificial layer structure 4 between the second penetration structure 22 and the first penetration structure 21 is removed to form the fluid channel 2A between the second penetration structure 22 and the first penetration structure 21; for example, the sacrificial layer structure 4 is removed by dry etching or wet etching;

[0094] Step 7: If Figure 14G As shown, a portion of the second side of the substrate 1 is removed to form a lower observation window 14 .

[0095] Please refer to Fig.11 and Fig.12As shown, similar to the previous embodiment, the fixing structure 3 of the sample carrier 100 of this embodiment also has two through holes 34, and the two through holes 34 are respectively located above the fluid channel 2A, and each through hole 34 is set through the fixing structure 3, and each through hole 34 corresponds to exposing a part of the first penetration structure 21 to the outside of the fixing structure 3. Similar to the previous embodiment, when using the sample carrier 100 of this embodiment, the user can use a relevant operating tool to pierce the first penetration structure 21 through the through hole 34 to connect the fluid channel 2A to the outside, so that the sample S can enter the fluid channel 2A through the through hole 34.

[0096] The sample carrier device 100 of the present embodiment is the same as the aforementioned embodiment. The substrate 1 can also be divided into two end portions 11, an observation portion 13 and two operating portions 12. The two end portions 11 are located at the two ends of the sample carrier device 100, and each operating portion 12 is located between one end portion 11 and the observation portion 13. When using the sample carrier device 100 of the present embodiment, the user can also apply external force to the operating portion 12 to separate the end portion 11 and the observation portion 13 from each other, thereby exposing the port of the fluid channel 2A. When the port of the fluid channel 2A is exposed, the user can directly make the exposed port of the fluid channel 2A directly contact the sample S, so that the sample S directly flows into the fluid channel 2A through capillary phenomenon, and then the user can Fig.10 The operation steps shown are used to fix the sample carrier 100 carrying the sample S and the standard copper ring 7 to each other, so as to complete the pre-operation of being set on the sample rod of the electron microscope equipment.

[0097] It is worth mentioning that in different applications, the side of the fixing structure 3 opposite to the substrate 1 may also be formed with Figure 1 The protrusion 33 shown in the figure can also reduce the space between the observation part 13 and the copper ring 7 (such as Fig.10 The probability of the adhesive 6 (as shown) entering the upper observation window 31.

[0098] See also Fig.15, which is a top view of the third embodiment of the sample carrying device of the present invention. As shown in the figure, the biggest difference between this embodiment and the previous embodiment is that: a control module can also be formed on the penetration structure 2, and the control module can include a control circuit 81, a plurality of metal contacts 82 and a plurality of electrode structures 83. The control circuit 81 is connected to the plurality of metal contacts 82, and each metal contact 82 is exposed to the fixed structure 3 (for example, the fixed structure 3 has a corresponding through hole to expose the metal contact 82), and the plurality of electrode structures 83 are correspondingly located in the fluid channel 2A. For example, the substrate 1 can be a silicon substrate, the penetration structure 2 can be formed on the substrate 1 using a semiconductor process, and the control module can also be formed on the penetration structure 2 using a semiconductor process. In practical applications, the electrode structure 83 may be composed of platinum (Pt), copper (Cu), titanium (Ti), chromium (Cr), tungsten (W) or a combination of these metal materials; alternatively, the electrode structure 83 may also be composed of a semiconductor material such as polysilicon, aluminum nitride (AlN), aluminum dioxide (AlO2), zinc oxide (ZnO), titanium dioxide (TiO2) or a combination of these materials.

[0099] like Figure 5A As shown, in the manufacturing process of the first embodiment of the aforementioned sample carrying device 100, after the first surface 10 of the first side of the substrate 1 is formed with the first penetration structure 21, and before the sacrificial layer structure 4 is formed, the control module can be formed on the side of the substrate 1 opposite to the first penetration structure 21; when the sacrificial layer structure 4 is formed, the sacrificial layer structure 4 is formed on a plurality of electrode structures 83; after the second penetration structure 22 is formed in sequence and the sacrificial layer structure 4 is removed, the plurality of electrode structures 83 will be located correspondingly in the fluid channel 2A, and the plurality of electrode structures 83 will be connected to the control circuit 81 located outside the fluid channel 2A through the metal contact portion 82. In addition, while forming the upper observation window 31, a plurality of through holes for exposing the metal contact portion 82 can be formed simultaneously. It should be noted that the control module is not limited to Figure 5A The steps in the above are formed, and some or all components of the control module can also be formed in Figure 5C Of course, in the process of forming the control module on the second penetration structure 22, part of the second penetration structure 22 can be removed as needed to form a through hole in the second penetration structure 22, and then a conductive structure is filled in the through hole to form the metal contact portion 82.

[0100] As described above, in actual application, the user may first use a relevant operating tool to puncture part of the penetration structure 2 through the through hole 34 of the fixed structure 3, so that the sample S enters the fluid channel 2A through the through hole 34. After the sample S is set in the fluid channel 2A, the user may use a plurality of wires to connect a processing device with a plurality of metal contacts 82, so as to supply power and signals to the control circuit 81 through the metal contacts 82, and the control circuit 81 may cooperate with the plurality of electrode structures 83 according to the signals to perform relevant processing on the sample S in the fluid channel 2A. For example, the two electrode structures 83 may correspond to an anode and a cathode, and after the two electrode structures 83 are energized, the liquid sample S in the fluid channel 2A may generate an electrophoresis phenomenon, so that some substances in the liquid sample S may be separated from each other.

[0101] In different applications, the control circuit 81 and the plurality of electrode structures 83 may also constitute a sensing circuit together, and the relevant processing device may supply power to the control circuit through the wires and the metal contact portion 82, and accordingly receive the relevant sensing signal returned by the control circuit 81. The sensing circuit may be used, for example, to sense the temperature or other physical properties of the sample S in the fluid channel 2A.

[0102] like Fig.15 and Fig.16 As shown, it is a partially enlarged schematic diagram of another embodiment of the sample carrying device 100. In different applications, a plurality of heating components 84 may be provided around the fluid channel 2A, that is, a plurality of heating components 84 may be formed at a position of the first penetrating structure 21 adjacent to the fluid channel 2A. Each heating component 84 is, for example, a resistance wire composed of a metal material such as chromium (Cr) or titanium (Ti). The heating component 84 is connected to a plurality of metal contact portions 82, and the plurality of metal contact portions 82 may be exposed to the fixed structure 3, and relevant personnel may supply electricity to each heating component 84 through the metal contact portions 82, so that the heating component 84 generates heat energy, thereby changing the temperature of the sample S located in the fluid channel 2A.

[0103] As described above, after the sample carrier 100 is loaded with the sample S and before the sample carrier 100 is placed on the sample rod, the user can use the control module or the heating component 84 to pre-process the sample S located in the fluid channel 2A; after the sample S is pre-processed, the user can place the sample carrier 100 on the sample rod and send the sample rod into the electron microscope equipment, and the user can observe the sample S that has been pre-processed under the electron microscope equipment.

[0104] In special applications, components such as a control module and a heating component 84 may be used to form the observation portion 13, and the user may fix the observation portion 13 to the sample rod, and use a plurality of wires to connect the plurality of metal contact portions 82 to relevant power supply components on the sample rod. In this way, relevant personnel may operate the sample rod to perform electrophoretic separation, heating, and other treatments on the sample S in the sample carrier 100 after the sample rod is sent into the electron microscope equipment. That is, the user may operate the sample rod under the electron microscope equipment to perform relevant treatments on the sample S in the sample carrier 100 of the present invention.

[0105] See also Fig.17 , which is a schematic diagram of the third embodiment of the sample carrying device 100 of the present invention. The biggest difference between this embodiment and the aforementioned embodiment is that the sample carrying device 100 may have two end portions 11, two operating portions 12 and an observation portion 13, and one of the end portions 11 may be formed with a microfluidic chip 9. The microfluidic chip 9 may be formed on the first surface of the first side of the substrate 1 by using semiconductor technology, microelectromechanical technology (MEMS), etc. The aforementioned fixed structure 3 is formed on the side of the microfluidic chip 9 opposite to the substrate 1, and the fixed structure 3 formed on the microfluidic chip 9 includes two through holes 34, each of which is arranged to penetrate the fixed structure 3, and each of the through holes 34 is used to expose part of the penetrating structure 2. A portion of the fluid channel 2A of the sample carrying device 100 (such as Fig.17 The portion indicated by the dotted line on the right side of the middle corresponds to the microfluidic chip 9.

[0106] Similar to the aforementioned embodiment, when using the microfluidic chip 9, the user may use relevant operating tools to puncture the penetration structure 2 through the through hole 34 so that the fluid channel 2A located in the microfluidic chip 9 is connected to the outside. At this time, the user may allow the sample S to enter the fluid channel 2A located in the microfluidic chip 9 through the through hole 34.

[0107] The microfluidic chip 9 may include a controller 91, a mixer 92, a flow controller 93, a heater 94, a filter 95, a switch 96 and two metal contacts 97. The mixer 92, the fluid controller 91, the heater 94, the filter 95 and the switch 96 are respectively connected to the controller 91, and the controller 91 is connected to the two metal contacts 97. The two metal contacts 97 are exposed to the microfluidic chip 9, and the two metal contacts 97 are used to connect to an external processing device to obtain power and control signals from the external processing device. After the controller 91 obtains power and control signals through the two metal contacts 97, the controller 91 will correspondingly control the mixer 92, the flow controller 93, the filter 95 and the heater 94 to perform processing operations such as heating, stirring and filtering on the sample S entering the fluid channel 2A through the through hole 34.

[0108] The switch 96 can be controlled by the controller 91 to connect or disconnect the fluid channel 2A located in the microfluidic chip 9 with the fluid channel 2A located in the observation part 13. In actual applications, the user can transmit a signal to the controller 91 through the two metal contacts 97 to disconnect the fluid channel 2A located in the microfluidic chip 9 from the fluid channel 2A located in the observation part 13, until the sample S enters the fluid channel 2A located in the microfluidic chip 9 through the through hole 34 located in the microfluidic chip 9, and the mixer 92, the flow controller 93, the filter 95, and the heater 94 complete the relevant processing of the sample S, and then control the switch 96 to operate, so that the fluid channel 2A located in the microfluidic chip 9 is connected with the fluid channel 2A located in the observation part 13.

[0109] When the switch 96 is controlled to be actuated, and the sample S in the fluid channel 2A of the microfluidic chip 9 flows into the fluid channel 2A of the observation part 13, the controller 91 can control the switch 96 to be closed. At this time, the user can apply external force to the microfluidic chip 9 to separate the microfluidic chip 9 and the observation part 13 from each other, and then the user can place the sample S processed by the microfluidic chip 9 on the sample rod to observe the sample S under the electron microscope.

[0110] Based on the above, Fig.17 The components included in the microfluidic chip 9 shown are only exemplary. In actual applications, the components included in the microfluidic chip 9 are not limited to the controller 91, the mixer 92, the flow controller 93, the filter 95, the heater 94 and the switch 96. They can be changed according to actual needs. As long as it is any microfluidic chip 9 used for related processing of biological samples (such as blood, bacteria, viruses, etc.) or non-biological samples (such as nanopharmaceuticals, nanomaterials, chemical solvents, grinding solutions, etc.), it belongs to the specific implementation scope of the microfluidic chip 9 listed in this embodiment.

[0111] As described above, the sample carrier device 100 of this embodiment, by forming the microfluidic chip 9 at the end 11, allows the user to first allow the sample S to enter the microfluidic chip 9 for relevant pre-processing, and then allow the sample S to enter the fluid channel 2A of the observation part 13. Finally, the user can directly separate the microfluidic chip 9 from the observation part 13 by operating the operation part 12. After the observation part 13 separated from the microfluidic chip 9 is fixed to the copper ring, it can be set on the sample rod and sent into the electron microscope equipment for observation.

[0112] In summary, the sample-carrying device of the present invention is a penetrating structure with a fluid channel formed on one side of a single substrate, and the user can allow the sample to enter the fluid channel by simply operating the sample-carrying device. When the fluid channel of the sample-carrying device carries a sample, the user can fix the sample-carrying device in a commonly used standard copper ring, and then set the sample-carrying device and the standard copper ring together at a predetermined observation position of the sample rod. Finally, after the sample rod is sent into an electron microscope device, the user can observe the sample, especially the liquid sample, set in the fluid channel of the sample-carrying device through the electron microscope device. Therefore, by forming a penetrating structure and a fluid channel design on a single substrate, the production cost of the sample-carrying device can be greatly reduced, and the yield rate of the sample-carrying device can be greatly improved. The sample-carrying device of the present invention allows users to observe liquid samples under an electron microscope device through the design of the fluid channel.

[0113] In different embodiments of the present invention, relevant control circuits, heaters and other components may also be formed on the substrate of the sample supporting device. After injecting the sample into the fluid channel of the sample supporting device, the user may first use the control circuits, heaters and other components of the sample supporting device to pre-treat the sample in the fluid channel. Then, the user may fix the observation part carrying the sample together with the copper ring on the sample rod through simple operations, or directly place the observation part on the observation stage inside the electron microscope. Therefore, in the embodiment of the sample-carrying device of the present invention having components such as a control circuit and a heater, the user can directly energize the sample-carrying device after injecting the sample into the sample-carrying device, and directly use the sample-carrying device to perform relevant processing operations on the sample it carries. After completing these processing operations, the user can directly set the observation part of the sample-carrying device on the sample rod, or directly place the observation part on the observation stage inside the electron microscope; in other words, the user only needs to load the sample into the sample-carrying device of the present invention, and then use the sample-carrying device to perform relevant processing on the sample, and then directly set the observation part of the sample-carrying device on the sample rod, or directly place the observation part on the observation stage inside the electron microscope to observe the sample; in this way, the time for sample preparation can be greatly reduced, and at the same time, the sample preparation process can also be greatly simplified.

[0114] In different embodiments of the present invention, one end of the sample carrier may also be formed with a microfluidic chip, and the fluid channel of the sample carrier is connected to the microfluidic chip, and the user may first place the sample in the fluid channel of the microfluidic chip, and use the microfluidic chip to pre-treat the sample, and then make the sample flow from the fluid channel of the microfluidic chip to the fluid channel of the observation part, and finally, place the observation part carrying the sample on the sample rod. In other words, the user may first allow the sample to enter the microfluidic chip for relevant processing, and then, through simple control, allow the sample to enter the observation part, thereby completing the sample preparation.

[0115] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. Therefore, all equivalent technical changes made using the description and drawings of the present invention are included in the protection scope of the present invention.

Claims

1. A sample carrying device, characterized in that: The sample carrying device is suitable for carrying a sample, and the sample carrying device comprises: A single substrate, whose two opposite sides are respectively defined as a first side and a second side, and the substrate is formed with a lower observation window penetrating the substrate on the second side; at least one penetration structure formed on the first side of the substrate, the penetration structure having at least one fluid channel, the fluid channel being directly formed on the substrate through the penetration structure, and the height of the fluid channel being between 0.1 micrometer and 0.5 micrometer; the lower observation window being used to expose a portion of the penetration structure to the substrate; the fluid channel being used to accommodate the sample; a fixed structure, which is formed on a side of the penetration structure opposite to the substrate, the fixed structure covers a part of the penetration structure; an upper observation window penetrating the fixed structure is formed on the side of the fixed structure opposite to the substrate, the upper observation window is used to expose part of the penetration structure from the fixed structure; wherein the penetration structure is defined as a first penetration structure and a second penetration structure, a first surface of the substrate on the first side is concave to form a groove, the second penetration structure is formed on the first surface, and the second penetration structure is also formed on the wall surface forming the groove, the first penetration structure is formed on the second penetration structure located on the first surface, and part of the first penetration structure is located above the groove, and part of the first penetration structure and part of the second penetration structure together form the fluid channel; the fixed structure is formed on the side of the first penetration structure opposite to the substrate; The sample carrier device is divided into at least one end, at least one operating portion and an observation portion, wherein the operating portion is located between the end and the observation portion, and the operating portion can be operated to separate the end and the observation portion from each other; the upper observation window and the lower observation window are arranged corresponding to each other, and the upper observation window and the lower observation window are located in the observation portion; the fluid channel is arranged across the end, the operating portion and the observation portion; Wherein, when the operating portion is operated and the end portion and the observation portion are separated from each other, a port of the fluid channel will be exposed outside the observation portion, and the sample can enter the fluid channel through the port; Wherein, when the fluid channel in the observation part carries the sample and the port is sealed, the observation part can be sent into an electron microscope device; The manufacturing process of the sample carrying device includes the following steps: Step 1: forming a groove on the first surface of the first side of the substrate; then, forming the second penetration structure on the first surface of the substrate and on the wall surface forming the groove; Step 2: forming a sacrificial layer structure on the second penetration structure in the groove; Step 3: forming the first penetration structure on the sacrificial layer structure and the second penetration structure, and bonding the first penetration structure to the second penetration structure; Step 4: forming the fixing structure on a side of the first penetration structure opposite to the substrate; Step 5: removing part of the fixing structure to form the upper observation window, and thereby exposing part of the first penetration structure from the fixing structure; Step 6: removing the sacrificial layer structure between the second penetration structure and the first penetration structure to form the fluid channel between the second penetration structure and the first penetration structure; Step seven: removing a portion of the second side of the substrate to form the lower observation window.

2. The sample carrying device according to claim 1, characterized in that: The fixed structure has at least one through hole, which is set to penetrate the fixed structure. The through hole is used to expose part of the first penetrating structure from the fixed structure, and the through hole is located above the fluid channel. When an operating tool passes through the through hole and punctures the penetrating structure exposed from the through hole, the fluid channel will be connected to the outside, and the sample can enter the fluid channel through the through hole.

3. A sample carrying device, characterized in that: The sample carrying device is suitable for carrying a sample, and the sample carrying device comprises: A single substrate, whose two opposite sides are respectively defined as a first side and a second side, and the substrate is formed with a lower observation window penetrating the substrate on the second side; at least one penetration structure formed on the first side of the substrate, the penetration structure having at least one fluid channel, the fluid channel being directly formed on the substrate through the penetration structure, and the height of the fluid channel being between 0.1 micrometer and 0.5 micrometer; the lower observation window being used to expose a portion of the penetration structure to the substrate; the fluid channel being used to accommodate the sample; a fixed structure formed on a side of the penetration structure opposite to the substrate, the fixed structure covering a portion of the penetration structure; an upper observation window penetrating the fixed structure is formed on a side of the fixed structure opposite to the substrate, the upper observation window is used to expose a portion of the penetration structure from the fixed structure; The sample carrier device is divided into at least one end, at least one operating portion and an observation portion, wherein the operating portion is located between the end and the observation portion, and the operating portion can be operated to separate the end and the observation portion from each other; the upper observation window and the lower observation window are arranged corresponding to each other, and the upper observation window and the lower observation window are located in the observation portion; the fluid channel is arranged across the end, the operating portion and the observation portion; Wherein, when the operating portion is operated and the end portion and the observation portion are separated from each other, a port of the fluid channel will be exposed outside the observation portion, and the sample can enter the fluid channel through the port; Wherein, when the fluid channel in the observation part carries the sample and the port is sealed, the observation part can be sent into an electron microscope device; The penetration structure is defined as a first penetration structure and a second penetration structure, the first penetration structure is formed on a first surface of the first side of the substrate, the second penetration structure is formed on a side of the first penetration structure opposite to the first surface, and the second penetration structure and a portion of the first penetration structure together form the fluid channel; the fixed structure is formed on a side of the second penetration structure opposite to the first penetration structure, and the fixed structure is also formed on a side of a portion of the first penetration structure opposite to the substrate; The manufacturing process of the sample carrying device includes the following steps: Step 1: forming the first penetration structure on the first surface of the first side of the substrate; Step 2: forming a sacrificial layer structure in a rectangular shape on the first penetration structure; Step 3: forming the second penetration structure on the sacrificial layer structure and the first penetration structure, and bonding the second penetration structure to the first penetration structure; Step 4: forming the fixing structure on the second penetration structure and the first penetration structure, so that the fixing structure covers the periphery of the second penetration structure and a portion of the periphery of the first penetration structure; Step 5: removing a portion of the fixing structure on the second penetration structure to form the upper observation window, and thereby exposing a portion of the second penetration structure to the fixing structure; Step 6: removing the sacrificial layer structure between the second penetration structure and the first penetration structure to form the fluid channel between the second penetration structure and the first penetration structure; Step seven: removing a portion of the second side of the substrate to form the lower observation window.

4. The sample carrying device according to claim 3, characterized in that: The fixed structure also has at least one through hole, which is set through the fixed structure. The through hole is used to expose part of the second penetrating structure from the fixed structure, and the through hole is located above the fluid channel. When an operating tool passes through the through hole and punctures the second penetrating structure exposed from the through hole, the fluid channel will be connected to the outside, and the sample can enter the fluid channel through the through hole.

5. The sample carrying device according to claim 3, characterized in that: The fixed structure is separated into a base and a protrusion, wherein the base is formed on one side of the first penetrating structure, and the protrusion is formed by extending from the base in a direction away from the substrate, and the width of the protrusion in the width direction of the sample carrying device is smaller than the width of the base in the width direction of the sample carrying device.

6. The sample carrying device according to claim 1 or 3, characterized in that: The sample carrying device is divided into two end portions, two operating portions and one observation portion, wherein the observation portion is located between the two end portions, and each operating portion is located between the observation portion and the end portions; when the operating portion is operated and the observation portion and the two end portions are separated from each other, the fluid channel will be connected to the outside, and the sample can enter the fluid channel through the exposed port of the fluid channel.

7. The sample carrying device according to claim 1 or 3, characterized in that: The substrate corresponding to the operating portion is concavely formed with at least one notch, and the fixing structure corresponding to the operating portion is concavely formed with at least one notch. The notch of the substrate and the notch of the fixing structure are arranged correspondingly.

8. The sample carrying device according to claim 1 or 3, characterized in that: The substrate corresponding to the operating portion has at least one modified region, and the fixed structure corresponding to the operating portion has at least one modified region. The modified region of the substrate and the modified region of the fixed structure are arranged correspondingly.

9. The sample carrying device according to claim 1 or 3, characterized in that: The observation part forms a control module, which includes a control circuit, a plurality of electrode structures and a plurality of metal contact parts. The plurality of metal contact parts are connected to the plurality of electrode structures, and the plurality of metal contact parts are connected to the control circuit. The plurality of metal contact parts are exposed from the fixed structure, and the plurality of electrode structures are correspondingly located in the fluid channel.

10. The sample carrying device according to claim 1 or 3, characterized in that: The sample carrying device is separated into two ends, the observation part is located between the two ends, one of the ends is formed with a microfluidic chip, and the fluid channel is formed in the end having the microfluidic chip; the fixed structure is formed on the side of the penetrating structure and the microfluidic chip opposite to the substrate, and the fixed structure has a plurality of through holes, at least one of the through holes corresponds to the microfluidic chip, and the through hole located in the microfluidic chip is used to expose a portion of the penetrating structure located in the microfluidic chip.

11. The sample carrying device according to claim 10, characterized in that: The microfluidic chip includes a mixer, a flow controller, a filter and a switch, and the mixer, the flow controller, the filter and the switch are arranged in the fluid channel of the microfluidic chip; when the penetrating structure exposed in the through hole of the microfluidic chip is punctured and the fluid channel is connected to the outside, the sample can enter the fluid channel through the through hole of the microfluidic chip, and the sample entering the fluid channel can pass through the mixer, the flow controller, the filter and the switch to enter the fluid channel located in the observation part.

12. An operating method of the sample carrying device according to claim 1, characterized in that: The following steps are involved: a disassembly step: separating the end portion from the observation portion so that two ports of the fluid channel located in the observation portion are exposed; a sampling step: contacting one of the ports with the sample so that the sample enters the fluid channel through the port; A sealing step: sealing the two ports to isolate the fluid channel and the sample in the fluid channel from the outside.

13. An operating method of the sample carrying device according to claim 2 or 4, characterized in that: The following steps are involved: a sampling step: using the operating tool to puncture the penetrating structure exposed in the through hole through the through hole, so that the fluid channel is connected to the outside, and the sample enters the fluid channel through the through hole; a disassembly step: separating the end portion from the observation portion so that two ports of the fluid channel located in the observation portion are exposed; A sealing step: sealing the two ports to isolate the fluid channel and the sample in the fluid channel from the outside.

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