Micro vibration gyroscope sensitive unit and gyroscope

Abstract

The present invention provides a micro-vibration gyroscope sensitive unit and a gyroscope, which relate to the technical field of gyroscopes, can meet the size requirements of micro-vibration gyroscopes, the diameter of the sensitive unit base is less than 30 mm, the outer diameter of the shell is less than 25 mm, and has the characteristics of high positioning accuracy and excellent vibration robustness; the gyroscope sensitive unit includes a shell, a sensitive unit base and a resonator, the shell is fixedly connected to the sensitive unit base, and the resonator is arranged inside the shell; the resonator is in the shape of a high-foot wine glass, including a wine glass part with a sealed cup mouth and a support rod, one end of the support rod is fixedly connected to the bottom end of the wine glass part, and the other end is fixedly connected to the sensitive unit base; a plurality of piezoelectric ceramics are evenly attached to the vertical outer wall of the wine glass part of the resonator; the piezoelectric ceramics are connected to the terminal through a wire, and the terminal is embedded in the sensitive unit base in a through-type manner; the gyroscope includes the sensitive unit. The technical solution provided by the present invention is applicable to the process of designing and manufacturing gyroscopes.

Description

[Technical field]

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a micro vibration gyroscope sensitive unit and a gyroscope. [Background technology]

[0002] The angle of rotation or angular rate can be measured based on at least three physical phenomena, namely, conservation of angular momentum, the Sagnac effect, and the Coriolis force. In its most common form, a gyroscope is a device that uses one of these phenomena to measure or maintain orientation and angular velocity. The measurement of the gyroscope's angle of rotation or angular rate can be integrated over time to determine the change in the gyroscope's angular orientation. For example, gyroscopes can be used in applications such as inertial navigation systems (INS), inertial measurement units (IMUs), platform stabilization, ground vehicle attitude control systems (ACS), drilling survey instruments, aircraft, ships, spacecraft, and / or other applications.

[0003] A Coriolis vibrating gyroscope (CVG) is a type of mechanical structure (resonator) gyroscope that couples one vibration mode to another (or multiple) modes under the action of an external Coriolis force. When only two resonant modes are involved, namely the primary and secondary vibration modes, the CVG becomes a single-axis angular rate (or angle) sensor.

[0004] CVGs represent an important inertial technology because they are amenable to miniaturization and suitable for mass production, especially when the resonator used to form the vibrating gyroscope is a micro-electro-mechanical system (MEMS) made from etched silicon or quartz wafers, in a similar manner to integrated circuits (ICs).

[0005] Vibratory gyroscopes have many advantages over gyroscopes that use conservation of angular momentum (i.e., rate gyroscopes, rate integrating gyroscopes, floating gyroscopes, dynamically tuned gyroscopes (DTGs)) and gyroscopes that use the Sagnac effect (i.e., fiber optic gyroscopes, ring laser gyroscopes). Because vibratory gyroscopes are easier to produce, easier to assemble at a lower cost, smaller in size, and more stable to the operating environment (including vibration, shock, and temperature), they can provide higher reliability and longer service life.

[0006] The CVG can be designed for open loop, force rebalance (i.e. closed loop), and / or full angle modes. Both the force rebalance mode and the open loop mode directly measure the rotational speed of the sensing shaft. The full angle mode provides a measurement of the net rotation angle after initialization.

[0007] A variety of resonator shapes can be used to make vibratory gyroscopes. These resonators can be macro-scale systems or micro-scale systems (MEMS), but only axisymmetric macro-scale resonators have navigation-grade performance (i.e., drift error less than 0.01° / hr).

[0008] In this axisymmetric Coriolis gyroscope, the resonator is preferably a hemispherical shell, and the main mode (i.e., the first-order mode) causes an elliptical deformation of the shell edge on a plane XY perpendicular to the shell symmetry axis (denoted as Z), with four nodes 90° apart from each other. The secondary mode (i.e., the second-order mode) deformation is also elliptical and can be derived from the first-order mode deformation by a rotation of 45°. The wave number of these two modes is equal to 2. Assuming that the resonator is completely axisymmetric, the resonant frequency of the two modes is the same. When the main mode is energized, any rotation Ω about the Z axis will generate a Coriolis force that is able to transfer energy from the main mode to the secondary mode. In a closed-loop configuration, the force required to balance the secondary mode will be proportional to Ω. In the full-angle mode configuration, the secondary mode is free to receive the energy transferred from the main mode to the secondary mode. If the control system achieves to maintain the total vibration energy at a set value, the combination of the main mode and the secondary mode will produce a new elliptical mode with the nodes rotated relative to the resonator axis XY by an angle proportional to the input rotation angle.

[0009] The hemispherical shell Coriolis gyroscope is usually made of metallized silicon dioxide (Northrop Grumman, Safran), and the electrode system formed between the resonator and the electrode carrier (also made of metallized silicon dioxide) is used to generate, under high vacuum, electrostatic force and capacitive detection signals for controlling the resonator and measuring angular rate. Due to the relative complexity, bulkiness and difficulty in production of this system, its price remains high, and for less demanding applications that only require tactical-grade performance (1° / hr to 10° / hr) and smaller size, an alternative design using a metal cylinder and piezoelectric transducer to drive and measure vibrations has been proposed.

[0010] The earliest use of a cylindrical structure was the START gyroscope in the 1980s, which used a metal cylinder with piezoelectric ceramics attached to the cylinder wall, near the edge of the top of the cylinder. A valve stem to hold the cylinder in place was placed on the outside, in the center of its flat bottom. In 2005, an alternative design that was smaller and easier to assemble was proposed. This time, the support rod was placed inside the cylinder, and all the piezoelectric ceramic structures were bonded to the outside of the flat bottom of the resonator, rather than to the outer curved surface of the cylinder wall. Once the resonator is attached to a mounting support base and encapsulated under a moderate vacuum, this structure forms what is called a CVG sensitive unit, or SE. Although the cylindrical resonator is relatively small for this particular case, with an outer diameter of about 25 mm, the final SE dimensions are about 25 mm in height and 39 mm in diameter of the mounting support base. The total mass is just under 80 grams.

[0011] Unfortunately, these dimensions and masses are still too large, which prevents the use of these macroscopically sized high-precision axisymmetric cylindrical Coriolis gyros in many inertial measurement unit and platform stabilization applications.

[0012] Therefore, it is necessary to study a micro-vibration gyroscope sensitive unit and a gyroscope to address the deficiencies of the prior art, so as to solve or alleviate one or more of the above problems. [Summary of the invention]

[0013] In view of this, the present invention provides a micro-vibration gyroscope sensitive unit and a gyroscope, which can meet the size requirements of the micro-vibration gyroscope and have the characteristics of high positioning accuracy and excellent vibration robustness.

[0014] On the one hand, the present invention provides a micro-vibration gyroscope sensitive unit, comprising a housing, a sensitive unit base and a resonator, wherein the housing is fixedly connected to the sensitive unit base, and the resonator is arranged inside the housing, and is characterized in that:

[0015] The resonator is in the shape of a high-foot wine glass, including a wine glass part and a support rod outside the wine glass, one end of the support rod is fixedly connected to the bottom end of the wine glass part, and the other end is fixedly connected to the base of the sensitive unit; a plurality of piezoelectric ceramics are evenly attached to the vertical outer wall of the wine glass part of the resonator; the piezoelectric ceramics are connected to the terminal through a wire, and the terminal is embedded in the base of the sensitive unit in a through-type manner.

[0016] According to the above aspects and any possible implementation, there is further provided an implementation, wherein the inner diameter of the wine glass portion is uniformly thick at the top and bottom, and the piezoelectric ceramics are evenly arranged on the vertical outer wall of the wine glass portion near one end of the support rod.

[0017] According to the aspects described above and any possible implementation method, an implementation method is further provided, wherein the wall thickness of the resonator is 0.3-1 mm, the average radius is 7-9 mm, and the resonant frequency is 6000-8000 Hz; the preferred scheme is: the wall thickness of the resonator is 0.5 mm, the average radius is 7 mm, and the resonant frequency is 6300 Hz.

[0018] According to the above aspects and any possible implementation, there is further provided an implementation, wherein a groove is provided on the outer periphery of the sensitive unit base, and an external vibration damper is provided in the groove.

[0019] According to the above aspects and any possible implementation, there is further provided an implementation, wherein the diameter of the sensitive unit base is less than 30 mm, and the outer diameter of the housing is less than 25 mm.

[0020] According to the above aspects and any possible implementation manner, there is further provided an implementation manner, wherein parallel surfaces of the top and bottom of the piezoelectric ceramic have metal layers.

[0021] According to the above aspects and any possible implementation, there is further provided an implementation, wherein the sensitive unit base is a circular metal base.

[0022] According to the above aspects and any possible implementation manner, there is further provided an implementation manner, wherein the outer surface of the support rod is provided with a metal coating.

[0023] According to the aspects described above and any possible implementation method, an implementation method is further provided, wherein a mounting blind hole is provided on the base of the sensitive unit; a fixing point is provided between the outer end of the support rod and the mounting blind hole, and the fixing point is a bonding point or a welding point.

[0024] According to the above aspects and any possible implementation, there is further provided an implementation, wherein the number of the piezoelectric ceramics is 8 and they are evenly divided into main module piezoelectric ceramics and sub module piezoelectric ceramics.

[0025] According to the above aspects and any possible implementations, there is further provided an implementation, wherein the external vibration absorber has an I-shaped double-conical cross-section.

[0026] On the other hand, the present invention provides a miniature vibration gyroscope, characterized in that the gyroscope comprises a control circuit and any of the above-mentioned sensitive units, and the control circuit is connected to the sensitive unit through the terminal.

[0027] Compared with the prior art, the present invention can achieve the following technical effects: under the premise of meeting the stiffness requirements, the wall thickness of the resonator is 0.3-1 mm, the average radius is 7-9 mm, and the resonant frequency is 6000-8000 Hz, which meets the size requirements of the miniature vibration gyroscope and has the characteristics of high positioning accuracy and excellent vibration robustness.

[0028] Of course, any product implementing the present invention does not necessarily need to achieve all of the above-mentioned technical effects at the same time.

Brief Description of the Drawings

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 A Coriolis gyroscope sensitive unit provided by an embodiment of the present invention;

[0031] Figure 2 (a) and Figure 2 (b) is a cross-sectional view of the installation of two piezoelectric ceramics for Coriolis gyroscope sensitive units provided by the present invention;

[0032] Figure 3A resonator metallization region for facilitating the welding assembly process of the resonator to its mounting base, and a piezoelectric ceramic for the resonator in a Coriolis gyroscope sensitive unit, provided by an embodiment of the present invention;

[0033] Figure 4 (a) and (b) are respectively a top view and a bottom view of a sensitive unit provided by an embodiment of the present invention, and disclose the actual achievable outer diameter of the sensitive unit of the Coriolis gyroscope according to an embodiment of the present invention;

[0034] Figure 5 The figure is a physical appearance diagram of a Coriolis gyroscope sensitive unit provided by one embodiment of the present invention.

[0035] Among them, in the figure:

[0036] 1. Resonator; 2. Piezoelectric ceramics; 3. Sensitive unit base; 4. Terminals; 5. Connecting wires; 6. User installation structure; 7. Shock absorber; 8. Front circuit board; 9. Housing; 10. Connector; 11. Temperature sensor. [Specific implementation method]

[0037] In order to better understand the technical solution of the present invention, the embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0038] It should be clear that the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] The terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments, and are not intended to limit the present invention. The singular forms "a", "said" and "the" used in the embodiments of the present invention and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings.

[0040] The present invention is directed to a miniature Coriolis gyroscope design with high measurement accuracy that substantially obviates one or more disadvantages of the prior art.

[0041] The object of the present invention is to eliminate or alleviate the disadvantages associated with known vibrating gyroscopes and to propose a cylindrical design so that the base diameter of the CVG sensitive unit (i.e., SE) is <30 mm and the outer diameter of the housing 9 is <25 mm; preferably, the base diameter of the sensitive unit is ≤20 mm and the outer diameter of the SE housing is ≤16 mm.

[0042] A Coriolis gyroscope sensitive unit, comprising:

[0043] The resonator 1 is in the shape of a high-foot wine glass, including a wine glass portion and a support rod, the mouth and bottom of the wine glass portion are of equal thickness, that is, the wine glass portion is cylindrical except for the bottom; the mouth of the wine glass portion is closed by a bottom plate, the outer surface of the bottom end of the wine glass portion is connected to one end of the support rod, and the other end of the support rod is fixedly connected to the circular metal base; the high-foot wine glass shape can be without a base or with a base; the wine glass portion is a hollow structure, and the support rod is a solid structure;

[0044] A plurality of piezoelectric ceramics 2 are attached to the vertical outer wall of the wine glass portion and are evenly arranged in a circular shape, at equal intervals and at equal angles;

[0045] A sensitive unit base 3, having a blind mounting hole in the center for mounting the resonator (specifically, the outer end of the support rod) on the base, having a plurality of glass-wrapped metal seals, with conductive through pins (i.e., terminals 4) matching the number of piezoelectric ceramics, and a groove for mounting a vibration damper on the outer diameter of the sensitive unit base;

[0046] An external vibration damper installed on the groove of the sensitive unit base. When the sensitive unit base is clamped and fixed on the user mounting plate by the user, the vibration damper is located between the two to play a vibration reduction role;

[0047] A connecting wire 5, used to connect the terminal 4 with the corresponding piezoelectric ceramic 2;

[0048] The circuit board welded on the pins (ie, arranged on the outer surface of the base of the sensing unit and connected to the terminal) is used to connect the CVG sensing unit to its electronic control device.

[0049] The number of the piezoelectric ceramics 2 is 2 or a multiple of 2, preferably 8, and they are divided into two groups of piezoelectric ceramics with the same number. The two groups of piezoelectric ceramics are used to realize the driving and measurement of the main mode and the secondary mode respectively.

[0050] The resonator support rod and the mounting surface for mounting piezoelectric ceramics are selectively metallized (ie, provided with a metal film), but the cup mouth end surface of the resonator wine glass and the side wall of the non-piezoelectric ceramic mounting area are not provided with a metal film.

[0051] The resonator mounting surface used for accurate positioning and assembly of the piezoelectric ceramic is cut to have a mounting plane for mounting the piezoelectric ceramic, and the mounting plane can be a plane or the bottom surface of the groove.

[0052] The binding posts 4 are evenly distributed, and each binding post 4 and the corresponding piezoelectric ceramic 2 are located in the same parallel plane.

[0053] The resonator is made of a high-Q-factor nickel alloy; the piezoelectric ceramic is made of a medium-to-high-quality-factor PZT ceramic material, and electrodes (i.e., conductive metal layers) are deposited on the parallel surfaces of its top and bottom.

[0054] The outer circular vibration absorber 7 has an I-shaped double cone cross section. The SE base (i.e. the sensitive unit base) is provided with a plurality of mounting grooves on its outer diameter, and the cross section of the grooves is also an I-shaped double cone, which matches the cross section of the vibration absorber 7.

[0055] A temperature sensor 11 is disposed on the sensitive unit base 3; the temperature sensor 11 can be installed in a groove in the sensitive unit base.

[0056] Embodiment 1:

[0057] A preferred embodiment of the present invention includes a cylindrical cavity having a flat bottom, and a cavity similar to a wine glass is provided on the outside of the flat bottom. The wine glass cavity and the cylindrical cavity together constitute a wine glass portion (i.e., a wine glass shape with equal inner diameters at the top and bottom). A solid support rod is provided on the outside of the bottom end of the wine glass portion, and the support rod is located outside the wine glass-shaped structure. A plurality of piezoelectric ceramics are attached to the vertical cylindrical wall at the bottom of the wine glass portion. The number of piezoelectric ceramics is a multiple of 2, preferably 8, and is divided into 2 groups, and the number of piezoelectric ceramics in each group is the same. One group is responsible for driving and measuring the main mode, and the other group is responsible for driving and measuring the secondary mode. The resonator 1 is mounted on a circular sensitive unit base 3, and a groove is provided on its outer diameter for accommodating the installation of a vibration absorber 7 (damper). The cross section of the vibration absorber 7 (damper) is an I-type, which is clamped in the CVG sensitive unit (SE), allowing the entire structure to be clamped (fixed) to the user's mounting structure 6.

[0058] Figure 1 The preferred embodiment of the present invention is described. The Coriolis gyro sensing unit includes a wine glass-shaped cavity with a flat bottom (i.e., a wine glass portion), and a support rod is arranged outside the cavity, and the support rod is placed at the center of its bottom. Such an arrangement leaves a large free space inside the resonator to facilitate processing operations, especially the processing of its inner diameter. Since the outer dimensions of the resonator are to be reduced and miniaturized, if a support rod is arranged inside the resonator, it will be impossible to perform inner diameter processing.

[0059] The frequency f of the first and second resonant modes (wave number equal to 2) of the goblet-shaped resonator 1 is proportional to the cylinder wall thickness, denoted by e, and inversely proportional to the square of the cylinder radius (denoted by R). Therefore, if you want to make a miniature Coriolis gyroscope, you need to reduce R. Adjusting the value of the wall thickness e can adjust the resonant frequency to the desired value. The wall thickness of the resonator is 0.3 to 1 mm, the average radius is 7 to 9 mm, and the resonant frequency is 6000 to 8000 Hz. For example, considering the nickel alloy steel material, the resonant frequency of the resonator with a wall thickness of 0.5 mm and an average radius of 7 mm is about 6300 Hz, which is close to the current state of the art, but this time the form factor is much smaller and the wall thickness is still sufficient to provide stiffness during processing.

[0060] A plurality of piezoelectric ceramics 2 are attached to the outer wall of the resonator 1 in a circumferential and equiangular manner, near the bottom of the wine glass portion (i.e., on the vertical outer wall of the wine glass portion near one end of the support rod). This structure is particularly advantageous for avoiding a decrease in the quality factor of the resonator and improving performance. These piezoelectric ceramics 2 are used to drive and measure the first and second order resonant modes of the resonator 1. To this end, the top and bottom parallel surfaces of these piezoelectric ceramics 2 are metallized to make these surfaces conductive and allow electrical connection, for example, using wire bonding (i.e., connecting wires 5).

[0061] The number of piezoelectric ceramics 2 is a multiple of 2 and is divided into two groups, each with the same number of piezoelectric ceramics. One group is responsible for the main mode, and the other group is responsible for the secondary mode. The piezoelectric ceramics are evenly distributed at 45°, that is, when the number of piezoelectric ceramics is 8, the angle between any two adjacent piezoelectric ceramics and the center of the circle is 45°.

[0062] The preferred arrangement is based on eight piezoelectric ceramics, the piezoelectric ceramics 2 being made of a PZT ceramic material with a medium to high quality factor to maintain the quality factor of the resonator.

[0063] In order to facilitate assembly and improve the positioning accuracy of the piezoelectric ceramic 2, several planar mounting surfaces are prepared on the outer surface of the resonator for mounting the piezoelectric ceramic to ensure the flat mounting of the piezoelectric ceramic and reduce mechanical stress, as follows Figure 2 (a) As shown. Of course, these flat mounting surfaces will be machined in a single clamping and positioning operation without moving the workpiece from the machining center to maintain positioning and coaxiality accuracy. In addition, Figure 2 As shown in (b), in order to improve the positioning accuracy, it is also possible to consider using grooves instead of the flat mounting surface of the piezoelectric ceramic.

[0064] In terms of assembly process, both the assembly of the piezoelectric ceramic 2 to the resonator and the assembly of the resonator support rod to the SE base 3 can use bonding or welding processes. In the case of welding, it is recommended to apply an appropriate surface coating to increase the wettability of the assembly surface. For example, the surface coating can be a thin layer of NiAu of 1 to 2 microns. Since the mounting surfaces of the resonator support rod and the piezoelectric ceramic are located on the same side, a simple electroplating process can be used to cover only the surface of interest while keeping the edges of the resonator unaffected by the coating, which will have an adverse effect on the damping coefficients of the primary and secondary modes.

[0065] The sensing unit base 3 is made of a metal whose CTE (Coefficient of Thermal Expansion) matches that of the resonator, and is preferably in the shape of a circular disk.

[0066] A plurality of metal terminals 4 are provided through the sensitive unit base 3. An insulating glass seal is provided between the terminals 4 and the sensitive unit base 3. The number of the terminals 4 is the same as the number of the piezoelectric ceramics 2 attached to the resonator.

[0067] The terminals 4 are evenly distributed and aligned in position with the piezoelectric ceramics 2 to reduce the length of the wire bonds 5 electrically connecting them to each piezoelectric ceramic and to allow the use of an automatic wire bonding machine like that in the IC industry.

[0068] The sensitive unit base 3 includes several grooves arranged in an annular shape on its outer diameter for mounting an external vibration damper 7 with an I-shaped cross section. The external vibration damper is made of silicon-based or non-conductive damping material, which provides a cut-off frequency far below the first and second order modal frequencies and higher than the measurement bandwidth obtained by the SE when connected to its control loop electronic devices.

[0069] The cross-section of the annular groove of the sensitive unit base 3 and the external I-shaped shock absorber 7 is preferably double-conical to enhance the robustness against shock and vibration along the Z axis.

[0070] In a preferred arrangement, the cut-off frequency of the vibration absorber 7 is between 600 Hz and 1 kHz.

[0071] The I-shaped vibration damper 7 is clamped and fixed to the user mounting structure 6. When clamped, the sensing unit base 3 is fixed to the user mounting structure 6 by the I-shaped vibration damper 7 and the position and alignment of the sensing axis of the vibration damper 7 are maintained under any operating mechanical and thermal conditions. Compared with the most advanced cylindrical Coriolis gyroscopes, this system has significant cost reduction and small size advantages because the SE base bi-conical groove can be easily machined into the circular SE base, and the SE base is not radially extended to include a triangular flange with mounting through holes.

[0072] Figure 4 A top view of the SE design is shown ( Figure 4 (a)), where the resonator is encapsulated under vacuum using a circular housing 9 which can be welded or soldered to a circular metal base, and a bottom view showing its adjacent plate connected to the SE base (e.g. equipped with 8 terminals).

[0073] The front circuit board 8 connects the pin signals appropriately (e.g., in pairs), converts the high impedance sensing piezoelectric signal into a low impedance signal transmitted to the external control electronic device via the connector 10, and also receives the control signal from the control electronic device via the connector. The connector is also used to transmit other signals, such as the electrical measurement ground signal, and the signal from the temperature sensor 11 connected to the SE base or the cavity of the SE base. The temperature sensor is used for temperature monitoring and temperature calibration of the bias, scale factor and offset error of the Coriolis gyroscope formed by the combination of the SE and its control electronics.

[0074] Assuming an average outer diameter of a resonator cylinder of 14mm and a wall thickness of 0.5mm, we can expect the SE base to have an outer diameter of 20mm and the housing to have an outer diameter of 16mm. Under these assumptions, the expected resonant frequency for the first and second modes would be 6300Hz, and the SE (sensitive element) could be mounted in a tubular structure with an outer diameter of 27mm.

[0075] The above is a detailed introduction to a micro vibration gyroscope sensitive unit and a gyroscope provided in the embodiment of the present application. The description of the above embodiment is only used to help understand the method and core idea of ​​the present application; at the same time, for those skilled in the art, according to the idea of ​​the present application, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

[0076] For example, certain words are used in the specification and claims to refer to specific components. Those skilled in the art should understand that hardware manufacturers may use different nouns to refer to the same component. This specification and claims do not use differences in names as a way to distinguish components, but use differences in the functions of components as the criteria for distinction. As mentioned throughout the specification and claims, "including" and "comprising" are open-ended terms, so they should be interpreted as "including / including but not limited to". "Approximately" means that within an acceptable error range, those skilled in the art can solve the technical problem within a certain error range and basically achieve the technical effect. The subsequent description of the specification is a preferred embodiment of the present application, but the description is for the purpose of illustrating the general principles of the present application, and is not used to limit the scope of the present application. The scope of protection of the present application shall be determined by the definition of the attached claims.

[0077] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a product or system including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such a product or system. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the product or system including the elements.

[0078] It should be understood that the term "and / or" used in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0079] The above description shows and describes several preferred embodiments of the present application, but as mentioned above, it should be understood that the present application is not limited to the form disclosed herein, and should not be regarded as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be modified within the scope of the application concept described herein through the above teachings or the technology or knowledge of the relevant field. The changes and modifications made by those skilled in the art do not deviate from the spirit and scope of the present application, and should be within the scope of protection of the claims attached to the present application.

Claims

1. A micro vibrating gyroscope sensitive unit, comprising a housing, a sensitive unit base and a resonator, wherein the housing is fixedly connected to the sensitive unit base, and the resonator is arranged inside the housing, characterized in that: The resonator is in the shape of a high-foot wine glass, including a wine glass portion and an external support rod, one end of the support rod is fixedly connected to the bottom end of the wine glass portion, and the other end is fixedly connected to the base of the sensitive unit; a plurality of piezoelectric ceramics are evenly attached to the vertical outer wall of the wine glass portion of the resonator; the piezoelectric ceramics are connected to the terminal through a wire, and the terminal is embedded in the base of the sensitive unit in a through-type manner; The inner diameter of the wine glass portion is uniform at the top and bottom, and the piezoelectric ceramics are evenly arranged on the vertical outer wall of the wine glass portion near one end of the support rod; The wall thickness of the resonator is 0.3-1 mm, the average radius is 7-9 mm, and the resonant frequency is 6000-8000 Hz; The outer periphery of the sensitive unit base is provided with a plurality of grooves, and an external vibration damper is provided in the groove; the external vibration damper has an I-shaped double-conical cross section; Wherein, the diameter of the sensitive unit base is less than 30 mm, and the outer diameter of the shell is less than 25 mm.

2. The micro-vibration gyroscope sensitive unit according to claim 1, characterized in that: The top and bottom parallel surfaces of the piezoelectric ceramic have metal layers.

3. The micro-vibration gyroscope sensitive unit according to claim 1, characterized in that: The sensitive unit base is a circular metal base; the outer surface of the support rod is provided with a metal coating.

4. The micro-vibration gyroscope sensitive unit according to claim 1, characterized in that: The base of the sensitive unit is provided with a mounting blind hole; a fixing point is provided between the outer end of the support rod and the mounting blind hole, and the fixing point is a bonding point or a welding point.

5. A micro vibrating gyroscope, characterized in that: The gyroscope comprises a control circuit and a sensitive unit as claimed in any one of claims 1 to 4, wherein the control circuit is connected to the sensitive unit via the terminal.

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