Magnetic plate and method for making the same

Abstract

The present invention discloses a magnetic plate, comprising: a magnet plate, which includes a left area, a middle area and a right area in sequence along the width direction of the magnet plate, and the width of the left area and the right area are both 1 / 6 to 1 / 8 of the width of the middle area; multiple groups of magnetic steel components, each group of magnetic steel components is composed of multiple magnetic steels arranged along the length direction of the magnet plate, the length directions of the multiple magnetic steels are consistent with the length direction of the magnet plate, the widths of the multiple magnetic steels in each group of magnetic steel components are equal, and the multiple groups of magnetic steel components are arranged along the width direction of the magnet plate, the widths of the magnetic steel components in the middle area are equal, and the widths of at least some of the magnetic steel components in the left area and the right area are smaller than the widths of the magnetic steel components in the middle area. The present invention also discloses a method for making a magnetic plate. The magnetic force in the edge area of ​​the magnetic plate can be reduced, and the uniformity of the magnetic force of the magnetic plate can be improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a magnetic plate and a manufacturing method thereof. Background Art

[0002] OLED, also known as organic light-emitting diode, is a current-type organic light-emitting device that emits light through the injection and recombination of charge carriers. As OLED rapidly gained popularity, it became apparent that the design of the magnetic plate in vacuum deposition machines, a key component of OLED panel manufacturing, particularly high-end vacuum deposition machines, is crucial. The uniformity of the magnetic plate's magnetic force directly impacts the quality of OLED screens.

[0003] A number of magnets are arranged on the existing magnetic plate, but the magnets are of the same size, which will result in poor uniformity of the magnetic force of the magnetic plate, and ultimately affect the quality of the processed products. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a magnetic plate and a manufacturing method thereof, which can improve the uniformity of the magnetic force of the magnetic plate.

[0005] According to an embodiment of the first aspect of the present invention, a magnetic plate includes: a magnet plate, which includes a left area, a middle area and a right area in sequence along the width direction of the magnet plate, and the width of the left area and the right area each accounts for 1 / 6 to 1 / 8 of the width of the middle area; multiple groups of magnetic steel assemblies, each group of the magnetic steel assemblies is composed of multiple magnetic steels arranged along the length direction of the magnet plate, the length directions of the multiple magnetic steels are consistent with the length direction of the magnet plate, the widths of the multiple magnetic steels in each group of the magnetic steel assemblies are equal, the multiple groups of the magnetic steel assemblies are arranged along the width direction of the magnet plate, the widths of the respective magnetic steel assemblies located in the middle area are equal, and the widths of at least some of the magnetic steel assemblies located in the left area and the right area are smaller than the widths of the magnetic steel assemblies in the middle area.

[0006] At least the following beneficial effects are achieved: the magnet plate includes a left region, a middle region, and a right region in sequence along its width direction. The left region and the right region of the magnet plate are the edge regions of the magnet plate, and are also the edge regions of the magnet plate. Since the edge regions of the magnet plate cannot reflect the magnetic lines of force, the magnetic force at the positions of the left and right regions will be higher than the magnetic force at the positions of the middle region. Therefore, by adjusting the width of at least part of the magnetic steel components located in the left and right regions of the magnet plate so that the width of at least part of the magnetic steel components located in the left and right regions is smaller than the width of the magnetic steel components in the middle region, the reflection arc of the magnetic lines of force at the edge regions of the magnet plate can be reduced, thereby reducing the magnetic force at the edge regions of the magnet plate and improving the uniformity of the magnetic force of the magnet plate. In addition, the width of the single-side edge region on the magnet plate where the magnetic force is higher than that of the middle region is 1 / 6 to 1 / 8 of the middle region. Therefore, arranging magnetic steel components with smaller widths in the left and right regions within the above width can effectively reduce the magnetic force at the edge regions of the magnet plate.

[0007] According to some embodiments of the present invention, the center distance between two adjacent groups of magnetic steel components is 11 mm.

[0008] According to some embodiments of the present invention, the width of the magnetic steel assembly located in the middle area is 9 mm, and the width of the magnetic steel assembly located in the left area and the right area closest to the outer side of the magnet plate is 6.21 mm.

[0009] According to some embodiments of the present invention, the same magnetic poles of the multiple magnets in each group of the magnetic steel assemblies are oriented in the same direction, all facing toward or away from the magnet plate at the same time, and the magnetic poles of the magnets in two adjacent groups of the magnetic steel assemblies are oriented in opposite directions.

[0010] According to some embodiments of the present invention, the magnetic steel is composed of at least Dy, Fe, and PrNd.

[0011] According to some embodiments of the present invention, the Dy accounts for 2%, the Fe accounts for 64.58%, and the PrNd accounts for 29.5%.

[0012] According to some embodiments of the present invention, the plurality of groups of magnetic steel components are symmetrically arranged relative to the center line of the magnet plate, and the widths of two mutually symmetrical groups of magnetic steel components are equal.

[0013] According to some embodiments of the present invention, the magnet plate is provided with a mounting groove extending along the length direction of the magnet plate, a plurality of the mounting grooves are arranged along the width direction of the magnet plate, and a plurality of groups of the magnetic steel components are correspondingly arranged in the plurality of the mounting grooves.

[0014] According to an embodiment of the second aspect of the present invention, a method for manufacturing a magnetic plate includes the following steps: Step 1, sintering a magnetic steel raw material composed of at least Dy, Fe, and a mixture of Pr and Nd into a magnetic steel; Step 2, nickel-plating the magnetic steel; Step 3, preparing a magnet plate of corresponding size; Step 4, arranging the magnetic steel on the magnet plate to form a magnetic plate; Step 5, performing magnetic uniformity testing on the magnetic plate.

[0015] The invention has at least the following beneficial effects: first, the raw magnetic steel is sintered into magnetic steel, which is then nickel-plated. The magnetic steel is then arranged on a magnet plate and the plate is tested for magnetic uniformity. The sintered magnetic steel has a high degree of densification, which facilitates subsequent magnetization. Nickel plating prevents corrosion and improves wear resistance.

[0016] According to some embodiments of the present invention, step 1 further includes the following step: magnetizing the manufactured magnetic steel along the thickness direction of the magnetic steel.

[0017] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments with reference to the accompanying drawings, in which:

[0019] Figure 1 Schematic diagram of the structure of an embodiment of the present invention;

[0020] Figure 2 for Figure 1 A partial enlarged schematic diagram of point A in the middle;

[0021] Figure 3 Schematic diagram of the local structure of the magnet plate in an embodiment of the present invention;

[0022] Figure 4 Schematic diagram of the side structure of the magnet plate in an embodiment of the present invention;

[0023] Figure 5 Schematic diagram of the magnetic steel structure in an embodiment of the present invention.

[0024] Reference numerals: magnet plate 100 , left area 110 , middle area 120 , right area 130 , mounting groove 140 , magnetic steel 200 . DETAILED DESCRIPTION

[0025] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0026] In the description of the present invention, a plurality means two or more.

[0027] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, and adsorbing should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0028] Reference Figures 1 to 5 The present invention discloses a magnetic plate, including a magnet plate 100 and a plurality of magnetic steel components.

[0029] The magnet plate 100 includes a left region 110, a middle region 120, and a right region 130 along the width direction of the magnet plate 100. The widths of the left region 110 and the right region 130 are 1 / 6 to 1 / 8 of the width of the middle region 120. Each group of magnetic steel assemblies is composed of a plurality of magnetic steels 200 arranged along the length direction of the magnet plate 100. The length directions of the plurality of magnetic steels 200 are consistent with the length direction of the magnet plate 100. The plurality of magnetic steel assemblies in each group of magnetic steel assemblies 200 have the same width. The plurality of groups of magnetic steel assemblies are arranged along the width direction of the magnet plate 100. The widths of the magnetic steel assemblies located in the middle region 120 are the same. The widths of at least some of the magnetic steel assemblies located in the left region 110 and the right region 130 are smaller than the widths of the magnetic steel assemblies in the middle region 120.

[0030] It is understood that the magnet plate 100 includes a left region 110, a middle region 120, and a right region 130 along its width. The left region 110 and the right region 130 of the magnet plate 100 are the edge regions of the magnet plate 100 and are also the edge regions of the magnet plate. Because the edge regions of the magnet plate cannot reflect magnetic lines of force, the magnetic force at the left and right regions 110 and 130 is higher than the magnetic force at the middle region 120. Therefore, by adjusting the width of at least some of the magnetic steel assemblies located in the left and right regions 110 and 130 of the magnet plate 100 so that the width of at least some of the magnetic steel assemblies located in the left and right regions 110 and 130 is smaller than the width of the magnetic steel assemblies in the middle region 120, the reflection arc of the magnetic line of force at the edge regions of the magnet plate can be reduced, thereby reducing the magnetic force at the edge regions of the magnet plate and improving the uniformity of the magnetic force of the magnet plate. In addition, the width of the single-side edge area on the magnetic plate where the magnetic force is higher than that in the middle area 120 is 1 / 6 to 1 / 8 of the middle area 120. Therefore, arranging magnetic steel components with smaller widths in the left area 110 and the right area 130 within the above width can effectively reduce the magnetic force in the edge area of ​​the magnetic plate.

[0031] In some embodiments of the present invention, the center distance between two adjacent groups of magnetic steel assemblies is 11 mm. Ensuring that the center distance between each adjacent magnetic steel assembly is equal can facilitate adjustment of the width of the magnetic steel 200 to adjust the uniformity of the magnetic force of the magnetic plate. When the center distance between adjacent magnetic steel assemblies is 11 mm, and the width of the magnetic steel assembly located in the middle area 120 is 9 mm, and the width of the magnetic steel assembly located closest to the outside of the magnet plate 100 in the left area 110 and the right area 130 is 6.21 mm, the uniformity of the magnetic force of the magnetic plate can be reduced from 10% in the prior art to 3%. It can be understood that the uniformity of the magnetic force of the magnetic plate refers to the fluctuation value of the magnetic force of the magnetic plate. The greater the uniformity of the magnetic force of the magnetic plate, the worse the uniformity of the magnetic force of the magnetic plate, and the more uneven the magnetic force on the magnetic plate; the smaller the uniformity of the magnetic force of the magnetic plate, the better the uniformity of the magnetic force of the magnetic plate, and the more uniform the magnetic force on the magnetic plate.

[0032] In addition, the width of the magnetic steel assemblies located in the left region 110 and the right region 130 can be 9 mm to 6.21 mm. The width of the magnetic steel assemblies in the left region 110 and the right region 130 can gradually decrease from the inside to the outside along the width direction of the magnet plate 100, or can be adjusted between 9 mm and 6.21 mm according to actual conditions. For example, if mounting holes are provided in the left region 110 and the right region 130 of the magnet plate 100, the width of the magnetic steel assemblies adjacent to the mounting holes can be appropriately increased.

[0033] In some embodiments of the present invention, the magnetic poles of the multiple magnets 200 within each magnetic assembly are aligned uniformly, all simultaneously attached to or away from the magnet plate 100. Adjacent magnetic assembly groups have opposite magnetic poles. The north and south poles of the magnets within the same magnetic assembly are aligned, while those within adjacent magnetic assembly groups have opposite north and south poles, which helps improve the uniformity of the magnetic force across the magnetic plate.

[0034] In some embodiments of the present invention, the magnetic steel 200 is composed of at least Dy, Fe, and PrNd, with Dy accounting for 2%, Fe accounting for 64.58%, and PrNd accounting for 29.5%. When manufacturing the magnetic plate, it is necessary to ensure that the performance of each magnetic steel 200 is consistent. This facilitates accurate adjustment of the magnetic uniformity of the magnetic plate. The magnetic steel 200 obtained by the above composition ratio has excellent magnetic properties and is suitable for use in magnetic plates with high magnetic performance requirements.

[0035] Reference Figure 1 In some embodiments of the present invention, multiple groups of magnetic steel components are symmetrically arranged relative to the center line of the magnet plate 100, and the widths of the two symmetrical groups of magnetic steel components are equal, which can ensure the uniformity of the magnetic force of the magnet plate in the width direction of the magnet plate 100 and facilitate the installation of each group of magnetic steel components.

[0036] Reference Figure 4 In some embodiments of the present invention, the magnet plate 100 is provided with mounting slots 140 extending along the length of the magnet plate 100. Multiple mounting slots 140 are arranged along the width of the magnet plate 100, and multiple sets of magnetic steel assemblies are correspondingly disposed within the plurality of mounting slots 140. The mounting slots 140 facilitate the assembly of the magnetic steel 200. Multiple magnetic steel assemblies are sequentially inserted into the mounting slots 140 to form a magnetic steel assembly.

[0037] The present invention also discloses a method for manufacturing a magnetic plate, comprising the following steps:

[0038] Step 1: Sintering a magnetic steel raw material composed of at least Dy, Fe, and PrNd to form a magnetic steel 200;

[0039] Step 2: nickel-plating the magnetic steel 200;

[0040] Step 3: Prepare a magnet plate 100 of corresponding size;

[0041] Step 4: Arrange the magnetic steel 200 on the magnet plate 100 to form a magnetic plate;

[0042] Step 5: Perform magnetic uniformity test on the magnetic plate.

[0043] It is understood that the magnetic steel raw material is first sintered to form the magnetic steel 200, which is then nickel-plated. The magnetic steel 200 is then arranged on the magnet plate 100 and the magnetic uniformity of the magnet plate is tested. The sintered magnetic steel 200 has a high degree of densification, which facilitates subsequent magnetization of the magnetic steel 200. Nickel plating of the magnetic steel 200 prevents corrosion and improves wear resistance.

[0044] In some embodiments of the present invention, step 1 further includes the following steps: magnetizing the manufactured magnetic steel 200 along the thickness direction of the magnetic steel 200 so that the upper and lower surfaces of the magnetic steel 200 along the thickness direction are S poles and N poles respectively, and the magnetic steel 200 will be better adsorbed on the magnet plate 100.

[0045] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the scope of the present invention.

Claims

1. A magnetic plate, characterized in that include: A magnet plate (100), comprising, in sequence along a width direction of the magnet plate (100), a left region (110), a middle region (120), and a right region (130), wherein the widths of the left region (110) and the right region (130) are each 1 / 6 to 1 / 8 of the width of the middle region (120); A plurality of groups of magnetic steel components, each group of the magnetic steel components is composed of a plurality of magnetic steels (200) arranged along the length direction of the magnet plate (100), the length direction of the plurality of magnetic steels (200) is consistent with the length direction of the magnet plate (100), the widths of the plurality of magnetic steels (200) in each group of the magnetic steel components are equal, the magnetic poles of the plurality of magnetic steels (200) in each group of the magnetic steel components are arranged in a consistent manner, and are simultaneously attached to the magnet plate (100) or away from the magnet plate (100), and the magnetic poles of two adjacent groups of the magnetic steel components are arranged in opposite directions, the plurality of groups of the magnetic steel components are arranged along the width direction of the magnet plate (100), the widths of the respective magnetic steel components located in the middle region (120) are equal, and the widths of at least some of the magnetic steel components located in the left region (110) and the right region (130) are smaller than the widths of the magnetic steel components in the middle region (120).

2. The magnetic plate according to claim 1, characterized in that The center distance between two adjacent groups of magnetic steel components is 11 mm.

3. The magnetic plate according to claim 2, characterized in that The width of the magnetic steel component located in the middle area (120) is 9 mm, and the width of the magnetic steel component located in the left area (110) and the right area (130) closest to the outside of the magnet plate (100) is 6.21 mm.

4. The magnetic plate according to claim 1, characterized in that The magnetic steel (200) is composed of at least Dy, Fe and PrNd.

5. The magnetic plate according to claim 4, characterized in that The Dy accounts for 2%, the Fe accounts for 64.58%, and the PrNd accounts for 29.5%.

6. The magnetic plate according to any one of claims 1 to 5, characterized in that: The plurality of groups of magnetic steel components are symmetrically arranged relative to the center line of the magnet plate (100), and the widths of two mutually symmetrical groups of magnetic steel components are equal.

7. The magnetic plate according to any one of claims 1 to 5, characterized in that: The magnet plate (100) is provided with a mounting groove (140) extending along the length direction of the magnet plate (100), a plurality of the mounting grooves (140) are arranged along the width direction of the magnet plate (100), and a plurality of groups of the magnetic steel components are correspondingly arranged in the plurality of the mounting grooves (140).

8. The method for manufacturing a magnetic plate according to any one of claims 1 to 7, characterized in that: The following steps are involved: Step 1, sintering a magnetic steel raw material composed of at least Dy, Fe and a mixture of Pr and Nd into a magnetic steel (200); Step 2, nickel plating the magnetic steel (200); Step 3: Prepare a magnet plate (100) of corresponding size; Step 4, arranging the magnetic steel (200) on the magnet plate (100) to form a magnetic plate; Step 5: Perform magnetic uniformity test on the magnetic plate.

9. The method for manufacturing a magnetic plate according to claim 8, characterized in that: The step 1 also includes the following step: magnetizing the manufactured magnetic steel (200) along the thickness direction of the magnetic steel (200).

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