Rotation control structure for wafer handling robot

Abstract

The present invention discloses a rotation control structure for a wafer handling robot, comprising a supporting structure, a driving structure, a transmission structure and a rotating structure; the supporting structure comprises a bottom plate, a base and a panel, the base is a hollow cavity structure with top and bottom openings, and a partition is provided on the inner wall to separate the base into a top base and a bottom base, and the panel and the bottom plate are respectively mounted on the base; the driving structure runs through the rotating structure and is mounted on the base; the transmission structure is mounted on the base, comprising a first transmission structure, a second transmission structure and a connecting shaft; the connecting shaft is rotatably connected to the base; the first transmission structure is located in the bottom base, and is respectively fixed to the bottom end of the connecting shaft and the driving structure; the second transmission structure is located in the top base, and is respectively fixed to the top end of the connecting shaft and the rotating structure. By arranging the transmission mechanism at the top and bottom layers of the base and fixing it to the connecting shaft, the device of the present invention has a compact structure, occupies a small space, and has good control accuracy and motion stability.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing, and in particular to a rotation control structure for a wafer handling robot. Background Art

[0002] The rotating structure in the wafer handling robot is mainly used to control the robot to complete the horizontal rotation angle control. The stability and accuracy of its motion control are affected by the weight and structure of the upper load. With the widespread application of large-size wafers and the use of multi-functional grippers, the overall structure of the wafer handling robot has become more complex, with larger volume and heavier weight, which has put forward higher design requirements for the load capacity, control accuracy and motion stability of the rotating axis. At the same time, the rotating structure should also meet the requirements for installation and use in a high-level ultra-clean environment. At present, domestic technical research in this area started late, similar products cannot meet the requirements of actual use, and there is no relatively mature design method. This is also one of the main reasons restricting the development level of domestic wafer handling robots.

[0003] Therefore, the industry urgently needs a design method for large-load, high-precision rotating structures that can be installed and used in high-level ultra-clean environments. Summary of the invention

[0004] The purpose of the present invention is to propose a rotation control structure that can be used in a high-level ultra-clean environment in view of the urgent needs of the development of the semiconductor industry. The structure adopts a reducer design based on a synchronous belt and a step pulley to achieve the adjustment of the speed ratio and the transmission of torque. It has the advantages of stable startup and fast acceleration and deceleration response under large load conditions, which is conducive to improving the stability and load capacity of the structure movement; it adopts its own cable winding structure to complete the fixing and installation of cables and pipelines, which greatly reduces the wear of cables and pipelines during movement and prolongs the service life. At the same time, it also avoids pipeline blockage and cable pulling caused by winding, greatly reduces the accident rate, and improves the reliability of long-term continuous operation; a special air duct design is adopted inside, and the airflow direction inside the structure is guided by a fan to ensure that the particles inside the structure can be led out to the lower layer of the structure through a special path, and will not affect the working part of the load platform, so that the overall structure of the robot can meet the requirements of installation and use in a high-level ultra-clean environment.

[0005] The invention discloses a rotation control structure for a wafer handling robot, comprising a supporting structure, a driving structure, a transmission structure and a rotation structure;

[0006] The support structure includes a bottom plate, a base and a panel. The base is a hollow cavity structure with top and bottom openings, and a partition is provided on the inner wall to separate the base into a top base and a bottom base. The panel and bottom plate are respectively installed on the base to protect the internal structure of the base.

[0007] The driving structure passes through the rotating structure and is installed on the base;

[0008] The transmission structure is installed on the base, and includes a first transmission structure, a second transmission structure and a connecting shaft; the connecting shaft is rotatably connected to the base; the first transmission structure is located in the bottom base, and is respectively fixed to the bottom end of the connecting shaft and the driving structure; the second transmission structure is located in the top base, and is respectively fixed to the top end of the connecting shaft and the rotating structure.

[0009] Furthermore, the rotating structure includes:

[0010] A main fixed shaft, the bottom of which is mounted on the top base;

[0011] A main bearing, wherein the main bearing is fixedly connected to the main fixed shaft;

[0012] An adapter flange, the adapter flange being fixedly connected to the main bearing; and

[0013] The external flange is fixed to the top of the adapter flange.

[0014] Furthermore, the first transmission structure includes:

[0015] A first driving wheel support frame is installed in the bottom base;

[0016] A first driving wheel is fixedly connected to the main shaft of the driving structure and is rotatably connected to the first driving wheel support frame;

[0017] A first driven wheel, fixedly connected to the bottom end of the connecting shaft; and

[0018] The first synchronous belt is connected to the first driving wheel and the first driven wheel with a belt transmission.

[0019] Furthermore, the second transmission structure includes:

[0020] The second driven wheel is fixedly connected to the top end of the connecting shaft;

[0021] A third driven wheel is fixed to the bottom of the adapter flange; and

[0022] The second synchronous belt is connected with the second driven wheel and the third driven wheel by belt transmission.

[0023] Furthermore, a locking structure is included, and the locking structure abuts against the transmission structure, including:

[0024] A first locking structure abuts against the first synchronous belt; and

[0025] The second locking structure abuts against the second synchronous belt.

[0026] Furthermore, the first locking structure includes:

[0027] The first locking wheel adjustment frames, which are two in number, are relatively arranged on both sides of the first synchronous belt and installed in the bottom base;

[0028] Two first locking wheels are located on the inner sides of the first locking wheel adjustment frame, mounted on the top base, and abut against both sides of the first synchronous belt; and

[0029] The first screw is arranged on the first locking wheel adjustment frame, and the end thereof abuts against the first locking wheel. By adjusting the length of the first screw, the first locking wheel abuts against the first synchronous belt and slides relatively.

[0030] Furthermore, the second locking structure includes:

[0031] The second locking wheel adjustment frames, which are 2 in number, are relatively arranged on both sides of the second synchronous belt and are installed on the top base;

[0032] Two second locking wheels are located on the inner side of the second locking wheel adjustment frame, mounted on the top base, and abut against both sides of the second synchronous belt; and

[0033] The second screw is arranged on the second locking wheel adjustment frame, and the end thereof abuts against the second locking wheel. By adjusting the length of the second screw, the second locking wheel abuts against the second synchronous belt and slides relatively.

[0034] Furthermore, an isolation structure is also included, including:

[0035] An isolation column, wherein the isolation column is fixedly connected to the top of the main fixed shaft;

[0036] A separation plate fixedly connected to the top of the separation column; and

[0037] The cable fixing structure is fixedly connected to the isolation plate and the adapter flange respectively.

[0038] Furthermore, it also includes a fan, which is installed on the bottom base.

[0039] Furthermore, a limiting structure is also included, including:

[0040] A limit pin is fixed to the bottom edge of the adapter flange;

[0041] A limiting bracket, fixed to the top base; and

[0042] The limit block is rotatably connected to the limit bracket and is engaged with the limit pin.

[0043] Beneficial effects:

[0044] 1. By using a locking wheel and its matching locking wheel adjustment bracket, the position of the locking wheel relative to the synchronous belt can be adjusted to achieve the purpose of adjusting the tension of the synchronous belt. At the same time, the contact area between the synchronous belt and the step belt pulley can be increased to improve the stability of motion transmission;

[0045] 2. Use a dedicated cable fixing structure to effectively manage and fix all cables and pipelines, reduce the wear of cables and pipelines, extend their service life, and reduce the probability of operating failures caused by loose cable joints, cable breakage, and pipeline blockage due to entanglement. At the same time, the moving parts are effectively isolated and protected to avoid being affected by cables and pipelines, thereby improving the stability and reliability of long-term uninterrupted operation;

[0046] 3. The design of the limit pin installed on the adapter flange and the limit block installed on the base can limit the bidirectional rotation of the rotating structure. Once the rotation angle exceeds the limit position, the limit pin will move the limit block into the limit state, and the whole structure cannot continue to rotate in the same direction. It can only be released from the limit state by rotating in the opposite direction, so as to ensure that the rotating structure will not exceed the set 0. angle;

[0047] 4. By adopting the fan design, the airflow direction inside the shell structure is controlled from top to bottom, and flows to the external mounting structure through the connection holes on the base, ensuring that the dust particles inside the structure will not escape to the external space, meeting the use requirements in ultra-clean environment;

[0048] 5. The driving structure passes through the rotating structure and is directly fixed to the base. This design structure is more compact, greatly improves space utilization, and compresses the volume of the entire rotating control structure to the greatest extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 This is one of the structural schematic diagrams of the rotation control structure of the present invention;

[0050] Figure 2 This is the second structural schematic diagram of the rotation control structure of the present invention;

[0051] Figure 3 This is the third structural schematic diagram of the rotation control structure of the present invention;

[0052] Figure 4 This is the fourth structural schematic diagram of the rotation control structure of the present invention;

[0053] Figure 5 Schematic diagram of each structure of the rotation control structure of the present invention;

[0054] Figure 6 It is a structural schematic diagram of the base in the rotation control structure of the present invention.

[0055] Legend: 1. Support structure; 11. Bottom plate; 12. Base; 121. Partition; 122. Top base; 123. Bottom base; 124. Base mounting hole; 125. Base connection hole; 13. Panel; 2. Driving structure; 3. Transmission structure; 31. First transmission structure; 311. First driving wheel support frame; 312. First driving wheel; 313. First driven wheel; 314. First synchronous belt; 32. Second transmission structure; 321. Second driven wheel; 322. Third driven wheel; 323. Second synchronous belt; 33. Connecting shaft; 4. Rotation structure; 41. main fixed shaft; 42. main bearing; 43. adapter flange; 44. external flange; 5. locking structure; 51. first locking structure; 511. first locking wheel adjustment frame; 512. first locking wheel; 513. first screw; 52. second locking structure; 521. second locking wheel adjustment frame; 522. second locking wheel; 523. second screw; 6. isolation structure; 61. isolation column; 62. isolation plate; 63. cable fixing structure; 7. fan; 8. limiting structure; 81. limiting pin; 82. limiting bracket; 83. limiting block. Specific embodiments

[0056] The embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0057] The following describes the embodiments of the present disclosure through specific examples, and those skilled in the art can easily understand other advantages and effects of the present disclosure from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all of the embodiments. The present disclosure can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present disclosure. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present disclosure.

[0058] In the description of the present invention, it is necessary to understand that the terms "middle", "length", "up", "down", "front", "back", "vertical", "horizontal", "inside", "outside", "front", "back" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0059] In the present invention, unless otherwise clearly specified and limited, the first feature "on" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. "Multiple" means at least two, such as two, three, etc., unless otherwise clearly and specifically limited.

[0060] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, they can be fixedly connected, detachably connected, or integrated, mechanically connected, electrically connected, or able to communicate with each other, directly connected, or indirectly connected through an intermediate medium, and can be internally connected between two elements or an interactive relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0061] like Figure 1-6 As shown, a rotation control structure for a wafer handling robot includes a support structure 1, a drive structure 2, a transmission structure 3 and a rotation structure 4.

[0062] The support structure 1 includes a bottom plate 11, a base 12 and a panel 13. The base 12 is a hollow cavity structure with top and bottom openings, and the base 12 is divided into a top base 122 and a bottom base 123 by a partition 121 arranged on the inner wall. The panel 13 and the bottom plate 11 are respectively installed on the base 12 to seal and protect the internal structure of the base 12.

[0063] The base 12 protects and fixes all internal structures, and is fixedly connected to the external structure through the base mounting hole 124 on its flange surface; a base connecting hole 125 is opened on the side wall of the base 12, and various cables and pipelines enter the base 12 through the base connecting hole 125. At the same time, the airflow inside the base 12 flows to the outside of the structure through the base connecting hole 125.

[0064] The driving structure 2 passes through the rotating structure 4 and is mounted on the base 12. The transmission structure 3 is mounted on the base 12 and includes a first transmission structure 31, a second transmission structure 32 and a connecting shaft 33. The connecting shaft 33 is rotatably connected to the base 12. The first transmission structure 31 is located in the bottom base 123 and is fixedly connected to the bottom end of the connecting shaft 33 and the driving structure 2 respectively; the second transmission structure 32 is located in the top base 122 and is fixedly connected to the top end of the connecting shaft 33 and the rotating structure 4 respectively.

[0065] By designing a reducer based on the transmission structure 3, the rotating structure 4 is driven to rotate to achieve speed ratio adjustment and torque transmission. It has the advantages of stable starting and fast acceleration and deceleration response under large load conditions, which is beneficial to improving the stability of structural movement and load capacity.

[0066] The rotating structure 4 includes a main fixed shaft 41, a main bearing 42, an adapter flange 43 and an external flange 44. The bottom of the main fixed shaft 41 is installed on the top base 122, which provides stable support for the entire rotating structure. The inner ring of the main bearing 42 is fixedly connected to the outer ring of the main fixed shaft 41. The inner ring of the adapter flange 43 is fixedly connected to the outer ring of the main bearing 42. The external flange 44 is fixedly connected to the top of the adapter flange 43. The top of the external flange 44 is connected to the external load, and the external load is driven by the adapter flange 4 to complete the rotational motion. The rotating structure 4 realizes the rotational motion under the drive of the transmission structure 3.

[0067] The first transmission structure 31 includes a first driving wheel support frame 321, a first driving wheel 312, a first driven wheel 313 and a first synchronous belt 314. The first driving wheel support frame 321 is installed in the bottom base 123. The driving structure 2 is a motor in this application. The first driving wheel 312 is fixedly connected to the motor main shaft and is rotatably connected to the first driving wheel support frame 321. The first driven wheel 313 is fixedly connected to the bottom end of the connecting shaft 33. The first synchronous belt 314 is connected to the first driving wheel 312 and the first driven wheel 313 with a belt transmission.

[0068] The second transmission structure 32 includes a second driven wheel 321, a third driven wheel 322 and a second synchronous belt 323. The second driven wheel 321 is fixed to the top of the first driven wheel 313. The third driven wheel 322 is fixed to the bottom of the adapter flange 43. The second synchronous belt 323 is connected to the second driven wheel 321 and the third driven wheel 322 by belt transmission.

[0069] Under the driving action of the driving structure 2, the first transmission structure 31 is driven to move through the belt transmission, and the second transmission structure 32 is driven to rotate. The second transmission structure 32 drives the rotating structure 4 to rotate, making the entire transmission structure more compact and reasonable, and the transmission is stable.

[0070] The present application also includes a locking structure 5, which is abutted against the transmission structure 3 and includes a first locking structure 51 and a second locking structure 52. The first locking structure 51 and the second locking structure 52 are respectively abutted against the first synchronous belt 314 and the second synchronous belt 323. By using the locking structure 5 to act on the synchronous belt, the purpose of adjusting the tension of the synchronous belt can be achieved, and at the same time, the contact area between the synchronous belt and the step pulley can be increased, thereby improving the stability of motion transmission.

[0071] The first locking structure 51 includes a first locking wheel adjustment frame 511, a first locking wheel 512 and a first screw 513. There are two first locking wheel adjustment frames 511, which are relatively arranged on both sides of the first synchronous belt 314 and installed in the bottom base 123. There are two first locking wheels 512, which are located on the relatively inner sides of the first locking wheel adjustment frame 511, installed on the top base 122, and abut against both sides of the first synchronous belt 314. The first screw 513 is arranged on the first locking wheel adjustment frame 511, and the end abuts against the first locking wheel 512. By adjusting the length of the first screw 513, the first locking wheel 512 abuts against the first synchronous belt 314 and slides relatively.

[0072] The second locking structure 52 includes a second locking wheel adjustment frame 521, a second locking wheel 522, and a second screw 523. The second locking wheel adjustment frames 521, which are two in number, are relatively arranged on both sides of the second synchronous belt 323 and are installed on the top base 122. The second locking wheels 522, which are two in number, are located on the relatively inner sides of the second locking wheel adjustment frame 521, are installed on the top base 122, and abut against both sides of the second synchronous belt 323. The second screw 523 is arranged on the second locking wheel adjustment frame 521, and the end thereof abuts against the second locking wheel 522. By adjusting the length of the second screw 523, the second locking wheel 522 abuts against the second synchronous belt 323 and slides relatively.

[0073] The present application also includes an isolation structure 6, including an isolation column 61, an isolation plate 62 and a cable fixing structure 63. The isolation column 61 is fixedly connected to the top of the main fixed shaft 41, isolating the isolation plate 27 from the lower moving structure by a certain height. The isolation plate 62 is fixedly connected to the top of the isolation column 61, separating the space where the upper cables and pipelines are located from the lower moving structure space, preventing the cables and pipelines from falling off the moving structure and thus affecting normal operation. The cable fixing structure 63 is fixedly connected to the isolation plate 62 and the adapter flange 43, respectively. The cable fixing structure 63 is used to manage and fix cables and pipelines, ensuring that the cables and pipelines will not get entangled and cause accidents when rotating with the overall structure, and reducing the wear of the cables and pipelines and extending their service life.

[0074] The present application also includes a fan 7, which is installed on the air duct opening at the upper part of the base to blow air toward the lower layer of the base to ensure that the air flow inside the structure flows toward the lower part of the base.

[0075] The present application also includes a limiting structure 8, including a limiting pin 81, a limiting bracket 82 and a limiting block 83. The limiting pin 81 is installed at the bottom edge of the adapter flange 43. The limiting bracket 82 is fixed to the top base 122. The limiting block 83 is rotatably connected to the limiting bracket 82 and is engaged with the limiting pin 81. When the adapter flange rotates in both directions through a certain angle, the limiting pin drives the limiting block 83 to enter a limited state, which can only be released by rotating in the opposite direction, thereby achieving the limiting function.

[0076] During actual operation, the motor drives the first driving wheel to rotate under the control of an external intelligent drive control signal, and the first driving wheel drives the first driven wheel to rotate synchronously through the first synchronous belt; the first driven wheel is fixedly connected to the second driven wheel through a connecting shaft, and driven by the first synchronous belt, drives the second driven wheel to rotate synchronously; the second driven wheel is connected to the third driven wheel through a second synchronous belt transmission, and drives the third driven wheel to rotate synchronously under the drive of the second driven wheel; the third driven wheel is fixedly connected to the adapter flange, the upper part of the adapter flange is fixedly connected to the external flange, the inner side is fixedly connected to the outer ring of the main bearing, and the inner ring of the main bearing is fixedly connected to the main fixed shaft, and driven by the third driven wheel, the adapter flange and the external flange can be driven to rotate synchronously around the main fixed shaft.

[0077] Beneficial effects: By adopting a locking wheel and its matching locking wheel adjustment bracket, the position of the locking wheel relative to the synchronous belt can be adjusted to achieve the purpose of adjusting the tension of the synchronous belt, and at the same time, the contact area between the synchronous belt and the step pulley can be increased to improve the stability of motion transmission; a special cable fixing structure is adopted to effectively manage and fix all cables and pipelines, reduce the wear of cables and pipelines, extend the service life, and reduce the probability of operating failures caused by loose cable joints, cable breakage, and pipeline blockage caused by winding. At the same time, the moving parts are effectively isolated and protected to avoid the influence of cables and pipelines on the moving parts, thereby improving the stability and reliability of long-term uninterrupted work; through the design of the limit pin installed on the adapter flange and the limit block installed on the base, the bidirectional rotation of the rotating structure can be limited. Once the rotation angle exceeds the limit position, the limit pin will move the limit block to enter the limit state, and the overall structure cannot continue to rotate in the same direction, and can only be released from the limit state by rotating in the opposite direction, thereby ensuring that the rotating structure does not exceed the rotation angle. The driving structure passes through the rotating structure and is directly fixed to the base. Such a design structure is more compact, greatly improves space utilization, and compresses the volume of the entire rotating control structure to the greatest extent.

[0078] The above is only for explaining the implementation mode of the present invention and is not intended to limit the present invention. For those skilled in the art, any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the present invention without creative work should be included in the protection scope of the present invention.

Claims

1. A rotation control structure for a wafer handling robot, characterized in that: It comprises a supporting structure (1), a driving structure (2), a transmission structure (3), a rotating structure (4), a locking structure (5) and a limiting structure (8); The support structure (1) comprises a bottom plate (11), a base (12) and a panel (13); the base (12) is a hollow cavity structure with top and bottom openings, and a partition (121) is provided on the inner wall to separate the base (12) into a top base (122) and a bottom base (123); the panel (13) and the bottom plate (11) are respectively mounted on the base (12) to protect the internal structure of the base (12); The driving structure (2) passes through the rotating structure (4) and is mounted on a base (12); The transmission structure (3) is mounted on the base (12), and comprises a first transmission structure (31), a second transmission structure (32) and a connecting shaft (33); the connecting shaft (33) is rotatably connected to the base (12); the first transmission structure (31) is located in the bottom base (123), and is respectively fixedly connected to the bottom end of the connecting shaft (33) and the driving structure (2); the second transmission structure (32) is located in the top base (122), and is respectively fixedly connected to the top end of the connecting shaft (33) and the rotating structure (4); The base (12) protects and fixes all internal structures, and is fixedly connected to the external structure via the base mounting hole (124) on its flange surface; A base connection hole (125) is provided on the side wall of the base (12), and various cables and pipelines enter the base (12) through the base connection hole (125), and at the same time, the air flow inside the base (12) flows to the outside of the structure through the base connection hole (125); The rotating structure (4) comprises: A main fixed shaft (41), wherein the bottom of the main fixed shaft (41) is mounted on a top base (122); A main bearing (42), wherein the main bearing (42) is fixedly connected to the main fixed shaft (41); An adapter flange (43), wherein the adapter flange (43) is fixedly connected to the main bearing (42); and an external flange (44) fixedly connected to the top of the adapter flange (43); The locking structure (5) abuts against the transmission structure (3), and comprises: A first locking structure (51) abuts against the first synchronous belt (314); A second locking structure (52) abuts against the second synchronous belt (323); The transmission structure (3) is equipped with a reducer and drives the rotating structure (4) to rotate; The limiting structure (8) comprises: A limit pin (81) is fixed to the bottom edge of the adapter flange (43); A limiting bracket (82) fixedly connected to the top base (122); and The limiting block (83) is rotatably connected to the limiting bracket (82) and is engaged with the limiting pin (81).

2. The rotation control structure for a wafer handling robot according to claim 1, characterized in that: The first transmission structure (31) comprises: A first driving wheel support frame (311) is installed in the bottom base (123); A first driving wheel (312) is fixedly connected to the main shaft of the driving structure (2) and is rotatably connected to the first driving wheel support frame (311); A first driven wheel (313) is fixedly connected to the bottom end of the connecting shaft (33); and The first synchronous belt (314) is connected to the first driving wheel (312) and the first driven wheel (313) in a belt transmission manner.

3. The rotation control structure for a wafer handling robot according to claim 1, characterized in that: The second transmission structure (32) comprises: A second driven wheel (321) is fixedly connected to the top end of the connecting shaft (33); A third driven wheel (322) is fixedly connected to the bottom of the adapter flange (43); and The second synchronous belt (323) is connected to the second driven wheel (321) and the third driven wheel (322) by belt transmission.

4. The rotation control structure for a wafer handling robot according to claim 1, characterized in that: The first locking structure (51) comprises: Two first locking wheel adjustment frames (511) are arranged on both sides of the first synchronous belt (314) and are installed in the bottom base (123); Two first locking wheels (512) are located on the inner side of the first locking wheel adjustment frame (511), mounted on the bottom base (123), and abut against both sides of the first synchronous belt (314); and The first screw (513) is arranged on the first locking wheel adjustment frame (511), and the end thereof abuts against the first locking wheel (512). By adjusting the length of the first screw (513), the first locking wheel (512) abuts against the first synchronous belt (314) and slides relatively thereto.

5. The rotation control structure for a wafer handling robot according to claim 1, characterized in that: The second locking structure (52) comprises: Second locking wheel adjustment frames (521), two in number, arranged on both sides of the second synchronous belt (323) and mounted on the top base (122); The second locking wheels (522), two in number, are located on the inner side of the second locking wheel adjustment frame (521), are mounted on the top base (122), and are in contact with both sides of the second synchronous belt (323); and The second screw (523) is arranged on the second locking wheel adjustment frame (521), and its end abuts against the second locking wheel (522). By adjusting the length of the second screw (523), the second locking wheel (522) abuts against the second synchronous belt (323) and slides relatively thereto.

6. The rotation control structure for a wafer handling robot according to claim 1, characterized in that: Also included is an isolation structure (6), comprising: An isolation column (61), wherein the isolation column (61) is fixedly connected to the top of the main fixed shaft (41); An isolation plate (62) is fixedly connected to the top of the isolation column (61); and a cable fixing structure (63) is fixedly connected to the isolation plate (62) and the adapter flange (43) respectively.

7. The rotation control structure for a wafer handling robot according to claim 1, characterized in that: It also includes a fan (7), wherein the fan (7) is installed on the bottom base (123).

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