High temperature heating furnace quartz tube sealing device

Abstract

The present invention provides a quartz tube sealing device for a high-temperature heating furnace; it includes a quartz tube body, a cooling coil, a first sealing ring and a sealing flange group; the edge of the end opening of the quartz tube body has an outer flange toward the middle of the quartz tube body, and the cooling coil is fixedly sleeved in the gap between the outer wall of the quartz tube body and the outer flange; the sealing flange group is fixed to the outer flange of the quartz furnace through the first sealing ring, and a water inlet channel and a water outlet channel are opened inside the sealing flange group, the water inlet channel connects the external cold water source and the inlet of the cooling coil, and the water outlet channel connects the outlet of the cooling coil and the outside. This sealing device makes the first sealing ring relatively far away from the quartz tube body, and realizes the delivery and reflux of cooling water through the cooling coil. The cooling coil cools the side wall of the quartz tube body, reduces the influence of the excessive temperature of the quartz tube body on the service life of the first sealing ring, reduces the replacement frequency of the first sealing ring, and also improves the production efficiency at the same time.

Description

Technical Field

[0001] The invention relates to a sealing device for a furnace mouth, in particular to a sealing device for a quartz tube of a high-temperature heating furnace. Background Art

[0002] The high temperature heating furnace can realize pre-vacuuming, and various protective gases, oxidizing gases and reducing gases can be introduced. The maximum temperature in the high temperature heating furnace can reach 1200℃, which has high requirements for the sealing structure. The existing high temperature heating furnace uses conventional flanges and cover plates for sealing at the end, but the conventional flange sealing effect is not good, and because the temperature at the opening of the high temperature heating furnace is high, the sealing ring is often damaged by high temperature baking, and needs to be frequently damaged and repaired. The replacement frequency of the sealing ring is about 1 / month. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a high-temperature heating furnace quartz tube sealing device with reasonable structure and increased service life.

[0004] In order to solve the above technical problems, the present invention provides a quartz tube sealing device for a high-temperature heating furnace;

[0005] It includes a quartz tube body, a cooling coil, a first sealing ring and a sealing flange assembly;

[0006] The edge of the opening at the end of the quartz tube body has an outer flange toward the middle of the quartz tube body, and there is a gap between the outer flange and the outer side wall of the quartz tube body. The cooling coil is fixedly sleeved in the gap between the outer side wall of the quartz tube body and the outer flange;

[0007] The sealing flange group is fixed to the outer flange of the quartz furnace through a first sealing ring. A water inlet channel and a water outlet channel are opened inside the sealing flange group. The water inlet channel connects the external cold water source with the inlet of the cooling coil, and the water outlet channel connects the outlet of the cooling coil with the outside.

[0008] In order to more clearly understand the technical content of the present invention, the high-temperature heating furnace quartz tube sealing device is referred to as the sealing device below.

[0009] As a preferred embodiment of the sealing device, the sealing flange group includes an inner flange and an outer flange, the inner flange and the outer flange are sleeved on the outer side of the outer flange of the quartz furnace along the axial direction of the outer flange of the quartz furnace, and the inner flange and the outer flange are fixed by bolts;

[0010] The inner flange is connected to a first water inlet and a first water outlet, and the outer flange is connected to a second water inlet and a second water outlet. The first water inlet and the second water inlet form a water inlet channel, and the first water outlet and the second water outlet form a water outlet channel.

[0011] A sealing notch is provided on the inner side of the inner flange near the outer flange, and a sealing notch is also provided on the inner side of the outer flange near the inner flange. The sealing notch of the inner flange and the sealing notch of the outer flange form a sealing groove for accommodating a first sealing ring.

[0012] As a preferred embodiment of the sealing device, the end of the outer flange extends out of the open side of the end of the quartz tube body, and an exhaust passage communicating with the interior of the quartz furnace is opened in the outer flange.

[0013] As a preferred embodiment of the sealing device, a second sealing ring is also provided between the end surface of the inner flange and the end surface of the outer flange.

[0014] As a preferred embodiment of the sealing device, a plurality of support blocks are fixedly connected to the side wall of the quartz tube body, the plurality of support blocks are evenly distributed along the axial direction of the quartz tube body, and the support blocks are fixedly connected to the inner flange.

[0015] As a preferred embodiment of the sealing device, a positioning groove is formed on the inner wall of the outer flange, and a carbon fiber strip in contact with the outer flange of the quartz tube body is installed in the positioning groove.

[0016] After adopting such a structure, the sealing device is fixed as a whole on the outer flange of the quartz tube body through the sealing flange group, so that the fixed position of the first sealing ring is relatively far away from the position of the quartz tube body. In addition, the cooling water is transported and refluxed to the cooling coil through the water inlet channel and the water outlet channel of the sealing flange group. The cooling coil cools the side wall of the quartz tube body, reduces the impact of excessive temperature of the quartz tube body on the service life of the first sealing ring, reduces the replacement frequency of the first sealing ring, and also improves production efficiency at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a cross-sectional view of a schematic structural diagram of an embodiment of the sealing device.

[0018] Figure 2 yes Figure 1 Enlarged view of part A. DETAILED DESCRIPTION

[0019] like Figures 1 to 2 Shown

[0020] The sealing device comprises a quartz tube body 1, a cooling coil 2, a first sealing ring 4 and a sealing flange group.

[0021] The edge of the end opening of the quartz tube body 1 of the high-temperature heating furnace has an outer flange 11 toward the middle of the quartz tube body 1 , and there is a gap between the outer flange 11 and the outer side wall of the quartz tube body 1 .

[0022] The cooling coil 2 is spiral-shaped and is sleeved in a gap between the outer wall of the quartz tube body 1 and the outer flange 11 . The cooling coil 2 fits the side wall of the quartz tube body 1 .

[0023] The sealing flange group includes an inner flange 31 and an outer flange 32. The inner flange 31 and the outer flange 32 are mounted on the outer side of the outer flange 11 of the quartz furnace along the axial direction of the outer flange 11 of the quartz furnace. The inner flange 31 and the outer flange 32 are fixed by bolts. A second sealing ring 36 is also provided between the end face of the inner flange 31 and the end face of the outer flange 32.

[0024] The inner flange 31 is connected to a first water inlet hole and a first water outlet hole, and the outer flange 32 is connected to a second water inlet hole and a second water outlet hole. The first water inlet hole and the second water inlet hole constitute a water inlet channel 34, and the first water outlet hole and the second water outlet hole constitute a water outlet channel 33. The water inlet channel 34 is connected to an external cold water source and the inlet of the cooling coil 2 through a pipeline, and the water outlet channel 33 is connected to the outlet of the cooling coil 2 and the external water tank through a pipeline.

[0025] A sealing notch is provided on the inner side of the inner flange 31 near the outer flange 32 , and a sealing notch is also provided on the inner side of the outer flange 32 near the inner flange 31 . The sealing notch of the inner flange 31 and the sealing notch of the outer flange 32 form a sealing groove 35 for accommodating the first sealing ring 4 .

[0026] Four support blocks 12 are fixed to the side wall of the quartz tube body 1 . The four support blocks 12 are evenly distributed along the axial direction of the quartz tube body 1 . Each support block 12 is fixed to the inner flange 31 by bolts.

[0027] The end of the outer flange 32 extends out of the open end of the quartz tube body 1 , and an exhaust passage 32 a communicating with the interior of the quartz furnace is formed in the outer flange 32 .

[0028] A positioning groove is formed on the inner wall of the outer flange 32 , and a carbon fiber strip 32 b is installed in the positioning groove to contact the end of the outer flange 11 of the quartz tube body 1 .

[0029] The first sealing ring 4 is placed in the sealing groove 35 of the sealing flange assembly, and the sealing flange assembly is fixed to the outer flange 11 of the quartz furnace through the first sealing ring 4 .

[0030] The sealing device can subsequently cooperate with a sealing cover plate (not shown in the figure) to complete the sealing of the quartz tube body 1.

[0031] When in use, the sealing flange group is fixed on the outer flange 11 of the quartz tube body 1, so that the fixed position of the first sealing ring 4 is relatively far away from the position of the quartz tube body 1; in addition, the cooling water is transported and refluxed to the cooling coil 2 through the water inlet channel 34 and the water outlet channel 33 of the sealing flange group, and the cooling coil 2 cools the side wall of the quartz tube body 1, thereby reducing the impact of excessive temperature of the quartz tube body 1 on the service life of the first sealing ring 4, reducing the replacement frequency of the first sealing ring 4, and also improving production efficiency.

[0032] The above is only one embodiment of the present invention. It should be pointed out that a person skilled in the art may make several modifications and improvements without departing from the principle of the present invention, and these should also be regarded as falling within the scope of protection of the present invention.

Claims

1. A high temperature heating furnace quartz tube sealing device, characterized by: It includes a quartz tube body, a cooling coil, a first sealing ring and a sealing flange assembly; The edge of the opening at the end of the quartz tube body has an outer flange toward the middle of the quartz tube body, and there is a gap between the outer flange and the outer side wall of the quartz tube body. The cooling coil is fixedly sleeved in the gap between the outer side wall of the quartz tube body and the outer flange; The sealing flange group is fixed to the outer flange of the quartz furnace through a first sealing ring, and a water inlet channel and a water outlet channel are opened inside the sealing flange group. The water inlet channel connects the external cold water source with the inlet of the cooling coil, and the water outlet channel connects the outlet of the cooling coil with the outside; The sealing flange assembly comprises an inner flange and an outer flange, the inner flange and the outer flange are sleeved on the outer side of the outer flange of the quartz furnace along the axial direction of the outer flange of the quartz furnace, and the inner flange and the outer flange are fixed by bolts; The inner flange is connected to a first water inlet and a first water outlet, and the outer flange is connected to a second water inlet and a second water outlet. The first water inlet and the second water inlet form a water inlet channel, and the first water outlet and the second water outlet form a water outlet channel. A sealing notch is provided on the inner side of the inner flange near the outer flange, and a sealing notch is also provided on the inner side of the outer flange near the inner flange. The sealing notch of the inner flange and the sealing notch of the outer flange form a sealing groove for accommodating a first sealing ring. The end of the outer flange extends out of one side of the opening of the end of the quartz tube body, and an exhaust passage communicating with the interior of the quartz furnace is opened in the outer flange; A second sealing ring is also provided between the end face of the inner flange and the end face of the outer flange; A plurality of support blocks are fixedly connected to the side wall of the quartz tube body. The plurality of support blocks are evenly distributed along the axial direction of the quartz tube body. The support blocks are fixedly connected to the inner flange.

2. The high temperature heating furnace quartz tube sealing device according to claim 1 is characterized in that: A positioning groove is provided on the inner wall of the outer flange, and a carbon fiber strip in contact with the outer flange of the quartz tube body is installed in the positioning groove.

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