An assembly device for controlling the concentricity precision of a cap-type nozzle in a cold hydrogenation reactor

Abstract

The present invention discloses an assembly device for controlling the concentricity precision of a hood-type nozzle in a cold hydrogenation reactor, comprising a base, a support plate, a connecting plate, a pressing plate, and a positioning pin; the base is annular, and the base is sleeved on the outside of the nozzle base; at least three support plates are evenly distributed along the outer wall of the base, a connecting plate in an annular shape is provided on the top of the support plate, and a pressing plate in an annular shape is provided on the connecting plate, and the connecting plate and the pressing plate are fixed by positioning pins. The present invention also discloses a method for assembling a hood-type nozzle in a cold hydrogenation reactor, wherein the nozzle base is placed inside the base, an inner tube of the nozzle is placed through an inner hole of the connecting plate, the upper side of the inner tube of the nozzle is fixed by a pressing plate, and the pressing plate and the connecting plate are fixed by positioning pins to ensure that the nozzle base and the inner tube of the nozzle are at a concentricity of ≤0.2 mm, and the nozzle base and the inner tube of the nozzle are welded to obtain a hood-type nozzle.

Description

Technical Field

[0001] The invention relates to an assembly device for controlling the concentricity precision of a hood type nozzle in a cold hydrogenation reactor and a method for assembling a hood type nozzle in a cold hydrogenation reactor using the assembly device, thereby ensuring that the concentricity of a nozzle base and an inner tube of the nozzle is ≤0.2 mm. Background Art

[0002] At present, the polysilicon industry, as an emerging energy industry, has been widely used. With the continuous maturity of polysilicon technology, the corresponding cold hydrogenation reactor has also been domestically produced. Although the cold hydrogenation reactor has undergone many improvements, the concentricity of the hood nozzle exceeds the standard, the gas ejected from the nozzle is not vertical, and the gas diffused above the distributor is uneven, which cannot fully react with the material, resulting in limited improvement in the conversion rate of silicon tetrachloride. At the same time, if the concentricity of the nozzle on the outermost circle of the cold hydrogenation reactor exceeds the standard, the ejected gas will directly flush the inner wall of the reactor cylinder, greatly reducing the service life of the equipment. Summary of the invention

[0003] The purpose of the present invention is to provide an assembly device for controlling the concentricity precision of a hood type nozzle in a cold hydrogenation reactor, in view of the fact that the concentricity of a hood type nozzle in a cold hydrogenation reactor exceeds the standard, resulting in limited improvement in the conversion rate of silicon tetrachloride and reduced service life of the equipment. The assembly device has a simple structure and a reasonable design, can ensure the concentricity requirements of an inner tube and a base in the hood type nozzle in the cold hydrogenation reactor, and also improves the assembly efficiency.

[0004] The objective of the present invention is achieved through the following technical solutions:

[0005] An assembly device for controlling the concentricity precision of a hood-type nozzle in a cold hydrogenation reactor comprises a base 1, a support plate 2, a connecting plate 3, a pressing plate 4, and a positioning pin 5; the base 1 is annular and sleeved on the outside of a nozzle base; at least three support plates 2 are evenly distributed along the outer wall of the base 1, an annular connecting plate 3 is provided on the top of the support plate 2, an annular pressing plate 4 is provided on the connecting plate 3, the connecting plate 3 and the pressing plate 4 are fixed by the positioning pin 5, and during assembly, an inner tube of the nozzle is placed along the inner wall of the connecting plate 3, and the pressing plate 4 is fixed to the connecting plate 3 by the positioning pin 5.

[0006] The inner diameter of the base 1 is 0.2mm larger than the diameter of the nozzle base, and the smoothness requirement of the inner wall of the base 1 is 1.6μm, which is convenient for inserting the nozzle base and avoiding excessive roughness of the inner wall of the base. Under the precision requirement of concentricity of the nozzle base and the nozzle inner tube ≤0.2mm, the nozzle base is not easy to insert.

[0007] The support plate 2 is arc-shaped, and the thickness of the support plate 2 is 1 / 2 of the diameter difference between the connecting plate 3 and the base 1. The inner wall of the support plate 2 is close to the base 1, and the outer wall of the connecting plate 3 is flush with the outer wall of the support plate 2, so that the connecting plate 3 and the base 1 are installed concentrically.

[0008] The thickness direction of the support plate 2 needs to be processed by a milling machine to ensure that the width of the support plate 2 is consistent.

[0009] The support plate 2 is fixed to the base 1 by spot welding; the connecting plate 3 is fixed to the support plate 2 by spot welding.

[0010] The inner diameter of the connecting plate 3 is larger than the diameter of the nozzle base. Generally, the inner diameter of the connecting plate 3 is larger than the diameter of the nozzle base by 20 mm.

[0011] The inner diameter of the pressing plate 4 is 0.2 mm larger than the diameter of the nozzle inner tube; the outer diameter of the pressing plate 4 is the same as the outer diameter of the connecting plate 3. When assembled, the outer wall of the connecting plate 3 is flush with the outer wall of the pressing plate 4. The smoothness of the inner wall of the pressing plate 4 is required to be 1.6 μm, which is convenient for the nozzle inner tube to be placed. If the surface roughness is too large, the nozzle inner tube is not easy to be placed under the precision requirement of the concentricity of the nozzle base and the nozzle inner tube ≤ 0.2 mm.

[0012] The connecting plate 3 and the pressing plate 4 are respectively provided with positioning holes for installing positioning pins, and the connecting plate 3 and the pressing plate 4 are fixed by the positioning pins 5 .

[0013] Another object of the present invention is to provide a method for assembling a hood-type nozzle in a cold hydrogenation reactor using the assembly device described in the present invention, comprising: placing the assembly device on a platform, placing the nozzle base inside the base, inserting the nozzle inner tube through the inner hole of the connecting plate, fixing the upper side of the nozzle inner tube with a pressing plate, fixing the pressing plate and the connecting plate with a locating pin to ensure that the nozzle base and the nozzle inner tube are in a concentricity of ≤0.2mm, and welding the nozzle base and the nozzle inner tube to obtain the hood-type nozzle.

[0014] Beneficial effects of the present invention:

[0015] The assembly device of the present invention is connected to the base and the connecting plate by a support plate and makes the connecting plate flush with the outside of the support plate, thereby ensuring the concentricity requirement of the connecting plate and the base, and controlling the concentricity requirement of the pressure plate and the connecting plate by a positioning pin, thereby ensuring the concentricity requirement of the pressure plate and the base. During the assembly process of the nozzle base and the nozzle inner tube, the base controls the nozzle base, and the pressure plate controls the nozzle inner tube. The connection plate mainly controls the string movement of the nozzle inner tube during the welding process, and further fixes the nozzle inner tube by a gap of 0.2mm between the inner wall of the pressure plate and the nozzle inner tube to avoid circumferential string movement. During the welding process, the nozzle base and the nozzle inner tube are not easily deformed and the concentricity requirement is also ensured, thereby achieving the concentricity of the nozzle base and the nozzle inner tube ≤0.2mm, improving the product quality, and effectively ensuring that the concentricity of the inner tube and the base in the nozzle meets the accuracy required by customers.

[0016] At the same time, the assembly device of the present invention is particularly suitable for assembling a large number of hood-type nozzles, and can greatly improve the assembly efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of an assembly device for controlling the concentricity accuracy of a hood-type nozzle in a cold hydrogenation reactor of the present invention.

[0018] In the figure, 1-base, 2-support plate, 3-connecting plate, 4-pressing plate, 5-locating pin, 6-nozzle base, 7-nozzle inner tube. DETAILED DESCRIPTION

[0019] The technical solution of the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0020] Example 1

[0021] like Figure 1 As shown, an assembly device for controlling the concentricity precision of a hood-type nozzle in a cold hydrogenation reactor is composed of a base 1, a support plate 2, a connecting plate 3, a pressing plate 4 and a positioning pin 5; the base 1 is annular and is sleeved on the outside of the nozzle base; three arc-shaped support plates 2 are evenly distributed along the outer wall of the base 1, and an annular connecting plate 3 is provided on the top of the support plate 2; the thickness of the support plate 2 is 1 / 2 of the diameter difference between the connecting plate 3 and the base 1, the inner wall of the support plate 2 is close to the base 1, and the outer wall of the connecting plate 3 is flush with the outer wall of the support plate 2; an annular pressing plate 4 is provided on the connecting plate 3, and the outer diameter of the pressing plate 4 is the same as the outer diameter of the connecting plate 3, and the connecting plate 3 and the pressing plate 4 are fixed by the positioning pin 5 and the outer wall of the connecting plate 3 is flush with the outer wall of the pressing plate 4.

[0022] The inner diameter of the base 1 is 0.2 mm larger than the diameter of the nozzle base, and the smoothness of the inner wall of the base 1 is required to be 1.6 μm.

[0023] The support plate 2 needs to be processed by a milling machine in the thickness direction to ensure that the widths of the three support plates are consistent.

[0024] The support plate 2 is fixed to the base 1 by spot welding; the connecting plate 3 is fixed to the support plate 2 by spot welding.

[0025] The inner wall of the connecting plate 3 is 20 mm larger than the outer diameter of the nozzle base.

[0026] The inner diameter of the pressing plate 4 is 0.2 mm larger than the inner tube of the nozzle, and the smoothness of the inner wall of the pressing plate 4 is required to be 1.6 μm.

[0027] The connecting plate 3 and the pressing plate 4 are respectively provided with positioning holes for installing positioning pins.

[0028] The hood-type nozzle in the cold hydrogenation reactor is assembled using the assembly device of the present embodiment. The base 1 of the assembly device is spot welded to the platform, the nozzle base 6 is placed in the base 1, the nozzle inner tube 7 is placed along the inner wall of the connecting plate 3, and the pressing plate 4 is inserted along the upper side of the nozzle inner tube 7. The connecting plate 3 and the pressing plate 4 are fixed with the positioning pin 5. The nozzle base 6 and the nozzle inner tube 7 are at a concentricity of ≤0.2mm. The nozzle base and the nozzle inner tube are welded to obtain a hood-type nozzle. The assembly device of the present embodiment can also effectively avoid welding deformation during the welding process of the nozzle base and the nozzle inner tube. The welding points of the base 1 and the platform are ground off, and the assembly device of the present embodiment is used for the next hood-type nozzle assembly. The assembly device of the present embodiment can greatly improve the assembly efficiency.

Claims

1. An assembly device for controlling the concentricity precision of a hood-type nozzle in a cold hydrogenation reactor, characterized in that: The invention comprises a base (1), a support plate (2), a connecting plate (3), a pressing plate (4), and a positioning pin (5); the base (1) is annular and is sleeved on the outer side of the nozzle base; at least three support plates (2) are evenly distributed along the outer wall of the base (1); an annular connecting plate (3) is provided on the top of the support plate (2); an annular pressing plate (4) is provided on the connecting plate (3); the connecting plate (3) and the pressing plate (4) are fixed by the positioning pin (5); the inner diameter of the pressing plate (4) is 0.2 mm larger than the diameter of the inner tube of the nozzle; the outer diameter of the pressing plate (4) is the same as the outer diameter of the connecting plate (3); the outer wall of the connecting plate (3) is flush with the outer wall of the pressing plate (4).

2. The assembly device for controlling the concentricity precision of the air cap type nozzle in the cold hydrogenation reactor according to claim 1, characterized in that: The inner diameter of the base (1) is 0.2 mm greater than the diameter of the nozzle base.

3. The assembly device for controlling the concentricity precision of the air cap type nozzle in the cold hydrogenation reactor according to claim 1, characterized in that: The smoothness of the inner wall of the base (1) is 1.6 μm.

4. The assembly device for controlling the concentricity precision of the air cap type nozzle in the cold hydrogenation reactor according to claim 1, characterized in that: The support plate (2) is arc-shaped, and the thickness of the support plate 2 is 1 / 2 of the diameter difference between the connecting plate 3 and the base 1. The inner wall of the support plate (2) is in close contact with the base (1), and the outer wall of the connecting plate (3) is flush with the outer wall of the support plate (2).

5. The assembly device for controlling the concentricity precision of the air cap type nozzle in the cold hydrogenation reactor according to claim 1, characterized in that: The widths of the support plates (2) are consistent.

6. The assembly device for controlling the concentricity precision of the air cap type nozzle in the cold hydrogenation reactor according to claim 1, characterized in that: The inner diameter of the connecting plate (3) is greater than the diameter of the nozzle base.

7. The assembly device for controlling the concentricity precision of the air cap type nozzle in the cold hydrogenation reactor according to claim 1, characterized in that: The smoothness of the inner wall of the pressing plate (4) is 1.6 μm.

8. The assembly device for controlling the concentricity precision of the air cap type nozzle in the cold hydrogenation reactor according to claim 1, characterized in that: The connecting plate (3) and the pressing plate (4) are respectively provided with positioning holes for installing positioning pins.

9. A method for assembling a hood-type nozzle in a cold hydrogenation reactor based on the assembly device described in claim 1, characterized in that: Place the nozzle base inside the base, insert the nozzle inner tube through the inner hole of the connecting plate, fix the upper side of the nozzle inner tube with a pressing plate, fix the pressing plate and the connecting plate with a locating pin to ensure that the nozzle base and the nozzle inner tube are in a concentricity of ≤0.2mm, and weld the nozzle base and the nozzle inner tube to obtain a hood-type nozzle.

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