Pipeline foolproof device and semiconductor equipment

Abstract

The present invention provides a pipeline foolproof device and semiconductor equipment, wherein the first foolproof part and the second foolproof part of the foolproof device are respectively arranged on the first pipe and the second pipe of the pipeline which are detachably connected; the structural features of the first foolproof part are arranged in coordination with the structural features of the second foolproof part of the second pipe correspondingly connected to the first pipe, but are not arranged in coordination with the structural features of the second foolproof part of the second pipe not correspondingly connected to the first pipe; the first foolproof part and the second foolproof part with the coordinated structural features can be assembled, while the first foolproof part and the second foolproof part with the non-coordinated structural features cannot be assembled, so that whether the first foolproof part and the second foolproof part can be assembled can be judged to determine whether the first pipe and the second pipe are correspondingly connected. The pipeline foolproof device and semiconductor equipment provided by the present invention have a foolproof function for pipeline connection, avoiding wrong connection of the pipeline, and the foolproof function has strong reliability, a wide range of application, and a long service life.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a fool-proof device for a pipeline and semiconductor equipment. Background Art

[0002] In semiconductor equipment, a large number of pipelines are usually provided (for example, multiple gas pipelines for conveying different process gases, multiple liquid pipelines for conveying cooling liquids to different devices, etc.). Since semiconductor equipment has a compact structure and high space utilization requirements, and in order to facilitate the disassembly and maintenance of these pipelines, these pipelines are usually provided with multiple pipe fittings, each of which is provided with a joint, so that multiple pipe fittings can be connected into one pipeline through the joint. In order to avoid incorrect connection of multiple pipe fittings, the existing method is to fix a paper label with a cable tie on the end of each pipe fitting for connection with another pipe fitting, and the paper label has an identification, and the identification on the paper label is checked to connect the correct multiple pipe fittings into one pipeline.

[0003] However, since the space where the pipeline is located is small, the size of the paper label is usually also small. The staff needs to carefully check the code on the paper label to avoid pipeline connection errors, which makes it difficult to connect the pipeline correctly. After the pipeline is connected, it is not convenient for the staff to check, which is prone to pipeline connection errors and has low reliability. At the same time, the method of fixing the paper label on the pipe with a cable tie is unreliable and the paper label is easy to fall off. In addition, the service life of the paper label is short and the use environment has great limitations. It cannot be used in a high temperature or chemically corrosive environment. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a fool-proof device for pipelines and semiconductor equipment, which have a fool-proof function for the connection of pipelines to avoid incorrect connection of pipelines, and the fool-proof function has strong reliability, a wide range of application, and a long service life.

[0005] In order to achieve the purpose of the present invention, a foolproof device for a pipeline is provided, wherein the pipeline comprises a first pipe fitting and a second pipe fitting which are detachably connected, and the foolproof device comprises a first foolproof part and a second foolproof part, wherein the first foolproof part is arranged on the first pipe fitting, and the second foolproof part is arranged on the second pipe fitting;

[0006] The structural features of the first foolproof part are matched with the structural features of the second foolproof part of the second pipe correspondingly connected to the first pipe, but are not matched with the structural features of the second foolproof part of the second pipe not correspondingly connected to the first pipe;

[0007] The first anti-foolproof part and the second anti-foolproof part whose structural features are matched can be assembled, while the first anti-foolproof part and the second anti-foolproof part whose structural features are not matched cannot be assembled, so that whether the first pipe fitting and the second pipe fitting are correspondingly connected can be judged by whether the first anti-foolproof part and the second anti-foolproof part can be assembled.

[0008] Optionally, the first foolproof member includes a first sleeve, and the second foolproof member includes a second sleeve, the inner diameter of one of the first sleeve and the second sleeve is larger than the outer diameter of the other, the first sleeve is sleeved on the first pipe, a first groove is provided on the inner circumferential wall or the outer circumferential wall of the first sleeve, and the extension direction of the first groove is parallel to the axial direction of the first sleeve;

[0009] The second sleeve is sleeved on the second pipe, and a second groove is provided on the inner circumferential wall or the outer circumferential wall of the second sleeve, and the extension direction of the second groove is parallel to the axial direction of the second sleeve;

[0010] The radial dimension of the first groove is matched with the radial dimension of the second groove of the second sleeve of the second pipe correspondingly connected to the first pipe, and is not matched with the radial dimension of the second groove of the second sleeve of the second pipe not correspondingly connected to the first pipe;

[0011] The first sleeve and the second sleeve can be sleeved by the sleeve of the first groove and the second groove which are arranged with matching radial dimensions, but cannot be sleeved by the first groove and the second groove which are arranged with non-matching radial dimensions.

[0012] Optionally, the inner diameter of the second sleeve is greater than the outer diameter of the first sleeve, and a first limiting protrusion is provided on the outer peripheral wall of the first sleeve, the first limiting protrusion is annular and is provided along the circumference of the first sleeve;

[0013] A second limiting convex portion is arranged on the inner peripheral wall of the second sleeve, the second limiting convex portion is annular and arranged along the circumference of the second sleeve;

[0014] When the second sleeve is sleeved on the outside of the first sleeve, the first limiting protrusion and the second limiting protrusion are mutually engaged and limited in the axial direction of the first sleeve and the second sleeve.

[0015] Optionally, the first pipe fitting includes a first pipe section and a first joint, the second pipe fitting includes a second pipe section and a second joint, one end of the first pipe section is connected to the first joint, one end of the second pipe section is connected to the second joint, the first joint and the second joint are detachably connected, the first sleeve is sleeved on the first pipe section, the first joint, or between the first pipe section and the first joint, and the second sleeve is sleeved on the second pipe section, the second joint, or between the second pipe section and the second joint.

[0016] Optionally, one end of the first pipe segment connected to the first joint has a step surface facing the first joint, and one end of the first sleeve is provided with a first clamping portion, the first clamping portion is annular and has a first through hole, the radial dimension of the first through hole is larger than the radial dimension of the end of the first pipe segment connected to the first joint, and smaller than the radial dimension of the step surface and the maximum radial dimension of the first joint, so that the first clamping portion can be clamped between the step surface and the first joint when the first joint is connected to one end of the first pipe segment.

[0017] Optionally, a second clamping portion is provided at one end of the second sleeve, the second clamping portion is annular and has a second through hole, the radial dimension of the second through hole is larger than the radial dimension of the second pipe section and smaller than the maximum radial dimension of the second joint, so that the second clamping portion can be clamped by the second joint.

[0018] Optionally, the first foolproof part and the second foolproof part, which are arranged in coordination with each other in terms of structural features, have the same color features.

[0019] Optionally, the first foolproof part and the second foolproof part, which are arranged in coordination with each other in terms of structural features, have the same identification features.

[0020] Optionally, the identification feature includes a first mark and a second mark, the first mark includes a code of a module to which the first pipe fitting and the second pipe fitting belong, and the second mark includes a code of the first pipe fitting and the second pipe fitting in the module.

[0021] Optionally, the material of the first foolproof part and the second foolproof part includes engineering plastics having at least one of chemical corrosion resistance, high temperature resistance and oxidation resistance.

[0022] The present invention further provides a semiconductor device, wherein at least one device component of the semiconductor device is connected to a pipeline, and at least one of the pipelines is provided with the fool-proofing device provided by the present invention.

[0023] Optionally, the equipment components include a furnace body, a process chamber, a support plate, a cooling ring, an upper fixing ring, a lower fixing ring and a process door, wherein the process chamber is arranged in the furnace body, the furnace body is used to provide a heat source to heat the process chamber, and the process chamber is used to provide a process environment for the semiconductor process, the support plate is arranged at the bottom of the furnace body and is arranged around the process chamber to support the furnace body, fix the process chamber, and protect the equipment components below the process chamber, the cooling ring is arranged at the bottom of the support plate, the upper fixing ring and the lower fixing ring are respectively located on both sides of the bottom of the process chamber and are connected to the bottom of the process chamber to fix the process chamber, and a sealing gasket is arranged between the upper fixing ring and the lower fixing ring, and the process door is arranged at the bottom of the process chamber to seal the opening at the bottom of the process chamber;

[0024] At least one of the cooling ring, the upper fixing ring, the lower fixing ring and the process door is connected with the pipeline, and the fool-proofing device is arranged on at least one of the pipelines.

[0025] The present invention has the following beneficial effects:

[0026] The pipeline foolproof device provided by the present invention is provided with a first foolproof part on a first pipe fitting, and a second foolproof part on a second pipe fitting, and the structural features of the first foolproof part are matched with the structural features of the second foolproof part of the second pipe fitting correspondingly connected to the first pipe fitting, but are not matched with the structural features of the second foolproof part of the second pipe fitting not correspondingly connected to the first pipe fitting, and the first foolproof part and the second foolproof part whose structural features are matched can be assembled, while the first foolproof part and the second foolproof part whose structural features are not matched cannot be assembled. In this way, after the first pipe fitting and the second pipe fitting are connected, it can be judged whether the first pipe fitting and the second pipe fitting are correspondingly connected by whether the first foolproof part on the first pipe fitting and the second foolproof part on the second pipe fitting can be assembled. If the first foolproof part and the second foolproof part on the connected first pipe fitting and the second pipe fitting can be assembled, it can be judged that the first pipe fitting and the second pipe fitting are correspondingly connected (i.e., the connection is Correct), if the first anti-foolproofing piece and the second anti-foolproofing piece on the connected first pipe fitting and the second pipe fitting cannot be assembled, it can be determined that the first pipe fitting and the second pipe fitting are non-corresponding connections (i.e., connection errors), thereby having an anti-foolproofing function for the connection of the pipeline, avoiding the first pipe fitting and the second pipe fitting from being connected incorrectly, resulting in incorrect connection of the pipeline, and, relative to the existing paper label method, if the first anti-foolproofing piece and the second anti-foolproofing piece cannot be assembled, it can be determined that the first pipe fitting and the second pipe fitting are connected incorrectly, avoiding the occurrence of incorrect pipeline connection due to subjective errors in staff, and facilitating the inspection of the connected pipeline, and relative to paper, the first anti-foolproofing piece and the second anti-foolproofing piece with a certain structure can be more suitable for high temperature, chemical corrosion, and oxidation environments. Therefore, the anti-foolproofing function of the pipeline provided by the embodiment of the present invention has a stronger reliability, a wider range of application, and a longer service life.

[0027] The semiconductor device provided by the present invention can provide a fool-proof function for the connection of the pipelines by arranging the fool-proof device provided by the present invention on at least one of the pipelines connecting the equipment components, and the fool-proof function has strong reliability, a wide range of application, and a long service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A schematic diagram of the structure of the pipeline fool-proof device provided by an embodiment of the present invention when it is not connected;

[0029] Figure 2 A schematic diagram of the structure of the pipeline fool-proof device provided by an embodiment of the present invention when connected;

[0030] Figure 3 A schematic structural diagram of a first foolproofing component of a foolproofing device for a pipeline provided in an embodiment of the present invention;

[0031] Figure 4A schematic structural diagram of a second fool-proofing component of a fool-proofing device for a pipeline provided in an embodiment of the present invention;

[0032] Figure 5 A schematic diagram of the cross-sectional structure of the pipeline fool-proof device provided by an embodiment of the present invention when connected;

[0033] Figure 6 for Figure 5 A schematic diagram of the enlarged structure at A in the middle;

[0034] Figure 7 for Figure 5 A schematic diagram of the enlarged structure at B in the middle;

[0035] Figure 8 for Figure 5 Schematic diagram of the enlarged structure at C in the middle;

[0036] Fig. 9 A schematic diagram of the structure of a pipeline fool-proof device and a semiconductor device provided by an embodiment of the present invention;

[0037] Description of reference numerals:

[0038] 11-first pipe member; 111-first pipe section; 1111-first pipe portion; 1112-second pipe portion;

[0039] 1113-step surface; 112-first joint; 12-second pipe fitting; 121-second pipe section; 122-second joint; 13-first sleeve; 131-first groove; 132-first limiting protrusion; 133-first clamping portion; 1331-first through hole; 14-second sleeve; 141-second groove; 142-second limiting protrusion; 143-second clamping portion; 15-identification feature; 151-first mark; 152-second mark; 2-semiconductor equipment; 21-furnace body; 22-process chamber; 23-support plate; 24-cooling ring; 25-upper fixing ring; 26-lower fixing ring; 27-process door; 28-pipeline. DETAILED DESCRIPTION

[0040] In order to enable those skilled in the art to better understand the technical solution of the present invention, the fool-proof device for pipelines and semiconductor equipment provided by the present invention are described in detail below with reference to the accompanying drawings.

[0041] like Figure 1 and Figure 2As shown, an embodiment of the present invention provides a foolproof device for a pipeline, the pipeline includes a first pipe fitting 11 and a second pipe fitting 12 that are detachably connected, the foolproof device includes a first foolproof part and a second foolproof part, the first foolproof part is arranged on the first pipe fitting 11, and the second foolproof part is arranged on the second pipe fitting 12; the structural features of the first foolproof part are matched with the structural features of the second foolproof part of the second pipe fitting 12 correspondingly connected to the first pipe fitting 11, but are not matched with the structural features of the second foolproof part of the second pipe fitting 12 not correspondingly connected to the first pipe fitting 11; the first foolproof part and the second foolproof part with matched structural features can be assembled, while the first foolproof part and the second foolproof part with unmatched structural features cannot be assembled, so as to judge whether the first pipe fitting 11 and the second pipe fitting 12 are correspondingly connected by whether the first foolproof part and the second foolproof part can be assembled.

[0042] The pipeline foolproof device provided by the embodiment of the present invention is provided with a first foolproof part on the first pipe fitting 11, and a second foolproof part on the second pipe fitting 12, and the structural features of the first foolproof part are matched with the structural features of the second foolproof part of the second pipe fitting 12 correspondingly connected to the first pipe fitting 11, but not matched with the structural features of the second foolproof part of the second pipe fitting 12 not correspondingly connected to the first pipe fitting 11, and the first foolproof part and the second foolproof part whose structural features are matched can be assembled, while the first foolproof part and the second foolproof part whose structural features are not matched cannot be assembled. In this way, after the first pipe fitting 11 and the second pipe fitting 12 are connected, it can be judged whether the first pipe fitting 11 and the second pipe fitting 12 are correspondingly connected by whether the first foolproof part on the first pipe fitting 11 and the second foolproof part on the second pipe fitting 12 can be assembled. If the first foolproof part and the second foolproof part on the connected first pipe fitting 11 and the second pipe fitting 12 can be assembled, it can be judged that the first pipe fitting 11 and the second pipe fitting 12 are correspondingly connected. For corresponding connection (i.e. correct connection), if the first anti-foolproofing parts and the second anti-foolproofing parts on the first pipe fitting 11 and the second pipe fitting 12 cannot be assembled, it can be judged that the first pipe fitting 11 and the second pipe fitting 12 are non-corresponding connections (i.e. wrong connection), thereby having an anti-foolproofing function for the connection of the pipeline, avoiding the first pipe fitting 11 and the second pipe fitting 12 from being incorrectly connected, resulting in incorrect connection of the pipeline, and, compared with the existing paper label method, if the first anti-foolproofing parts and the second anti-foolproofing parts cannot be assembled, it can be judged that the first pipe fitting 11 and the second pipe fitting 12 are incorrectly connected, avoiding the situation where the staff causes incorrect connection of the pipeline due to subjective errors, and it is convenient to check the connected pipeline, and compared with paper, the first anti-foolproofing parts and the second anti-foolproofing parts with a certain structure can be more suitable for high temperature, chemical corrosion, and oxidation environments. Therefore, the anti-foolproofing function of the pipeline provided by the embodiment of the present invention has a stronger reliability, a wider range of application, and a longer service life.

[0043] In practical applications, after the first pipe 11 and the second pipe 12 are connected, the first foolproof part on the first pipe 11 and the second foolproof part on the second pipe 12 can be assembled, because only the first foolproof part and the second foolproof part with matching structural features can be assembled, while the first foolproof structure and the second foolproof structure with non-matching structural features cannot be assembled, and the structural features of the first foolproof part are only matched with the structural features of the second foolproof part of the second pipe 12 correspondingly connected to the first pipe 11, and are not matched with the structural features of the second foolproof part of the second pipe 12 not correspondingly connected to the first pipe 11. Therefore, if the first anti-idiot component and the second anti-idiot component can be assembled, it can be judged that the structural features of the first anti-idiot component and the second anti-idiot component are matched, so that the first pipe fitting 11 provided with the first anti-idiot component and the second pipe fitting 12 provided with the second anti-idiot component are correctly connected. If the first anti-idiot component and the second anti-idiot component cannot be assembled, it can be judged that the structural features of the first anti-idiot component and the second anti-idiot component are not matched, so that the first pipe fitting 11 provided with the first anti-idiot component and the second pipe fitting 12 provided with the second anti-idiot component are incorrectly connected.

[0044] In this way, with the help of the first anti-foolproofing part and the second anti-foolproofing part, the connection of the pipeline can have an anti-foolproofing function, avoiding the first pipe 11 and the second pipe 12 from being connected incorrectly, resulting in incorrect connection of the pipeline, and, compared with the existing paper label method, if the first anti-foolproofing part and the second anti-foolproofing part cannot be assembled, it can be judged that the first pipe 11 and the second pipe 12 are connected incorrectly, avoiding the situation where the staff causes incorrect connection of the pipeline due to subjective errors, and it is convenient to check the connected pipeline, and compared with paper, the first anti-foolproofing part and the second anti-foolproofing part with a certain structure can be more suitable for high temperature, chemical corrosion, and oxidation environments. Therefore, the anti-foolproofing function of the pipeline provided by the embodiment of the present invention has a stronger reliability, a wider range of application, and a longer service life.

[0045] like Figure 1-Figure 4As shown, in a preferred embodiment of the present invention, the first foolproof member may include a first sleeve 13, and the second foolproof member may include a second sleeve 14. The inner diameter of one of the first sleeve 13 and the second sleeve 14 is greater than the outer diameter of the other. The first sleeve 13 is sleeved on the first pipe 11, and a first groove 131 is provided on the inner circumferential wall or the outer circumferential wall of the first sleeve 13, and the extension direction of the first groove 131 is arranged parallel to the axial direction of the first sleeve 13; the second sleeve 14 is sleeved on the second pipe 12, and a second groove 141 is provided on the inner circumferential wall or the outer circumferential wall of the second sleeve 14, and the extension direction of the second groove 141 is arranged parallel to the axial direction of the first sleeve 13. The direction is set parallel to the axial direction of the second sleeve 14; the radial dimension of the first groove 131 is matched with the radial dimension of the second groove 141 of the second sleeve 14 of the second pipe fitting 12 corresponding to the first pipe fitting 11, and is not matched with the radial dimension of the second groove 141 of the second sleeve 14 of the second pipe fitting 12 not corresponding to the first pipe fitting 11; the first sleeve 13 and the second sleeve 14 can be sleeved by the sleeve of the first groove 131 and the second groove 141 with matched radial dimensions, but cannot be sleeved by the first groove 131 and the second groove 141 with non-matched radial dimensions.

[0046] For example, the inner diameter of the second sleeve 14 is larger than the outer diameter of the first sleeve 13, and a first groove 131 is provided on the outer peripheral wall of the first sleeve 13, that is, the first groove 131 is recessed relative to the outer peripheral wall of the first sleeve 13 in a direction close to the axis of the first sleeve 13, and a second groove 141 is provided on the outer peripheral wall of the second sleeve 14, that is, the second groove 141 is recessed relative to the outer peripheral wall of the second sleeve 14 in a direction close to the axis of the second sleeve 14, and the second groove 141 in the first groove 131 and the second groove 141 with matched radial dimensions can be sleeved on the outer side of the first groove 131, so that the second sleeve 14 can be sleeved on the outer side of the first sleeve 13 through the sleeve of the first groove 131 and the second groove 141 with matched radial dimensions, and the first groove 131 and the second groove 141 with non-matched radial dimensions cannot be sleeved on each other, thereby realizing the anti-fool function.

[0047] That is to say, after the first pipe fitting 11 and the second pipe fitting 12 are connected, the first sleeve 13 on the first pipe fitting 11 and the second sleeve 14 on the second pipe fitting 12 can be sleeved. In the process of sleeved the first sleeve 13 and the second sleeve 14, if the second groove 141 can be sleeved on the outside of the first groove 131, and the second sleeve 14 can be sleeved on the outside of the first sleeve 13 through the sleeve of the first groove 131 and the second groove 141, then it can be judged that the connected first pipe fitting 11 and the second pipe fitting 12 are correctly connected. If the second groove 141 cannot be sleeved on the outside of the first groove 131, and the second sleeve 14 cannot be sleeved on the outside of the first sleeve 13, then it can be judged that the first pipe fitting 11 and the second pipe fitting 12 are incorrectly connected.

[0048] Furthermore, by setting the first groove 131 on the outer peripheral wall of the first sleeve 13 and the second groove 141 on the outer peripheral wall of the second sleeve 14, the external space of the first sleeve 13 and the second sleeve 14 occupied by the first groove 131 and the second groove 141 can be reduced, thereby being able to adapt to the design of semiconductor equipment with a smaller space.

[0049] Optionally, the radial dimension of the first groove 131 may include a groove width and a groove depth of the first groove 131 .

[0050] Optionally, the radial dimension of the second groove 141 may include a groove width and a groove depth of the second groove 141 .

[0051] However, the first groove 131 of the anti-mistake device for the pipeline provided in the embodiment of the present invention is not limited to being set on the outer peripheral wall of the first sleeve 13, and the second groove 141 is not limited to being set on the outer peripheral wall of the second sleeve 14. For example, the first groove 131 can also be set on the inner peripheral wall of the first sleeve 13, that is, the first groove 131 is recessed relative to the peripheral wall of the first sleeve 13 in a direction away from the axis of the first sleeve 13, and the second groove 141 can also be set on the inner peripheral wall of the second sleeve 14, that is, the second groove 141 is recessed relative to the peripheral wall of the second sleeve 14 in a direction away from the axis of the second sleeve 14. Furthermore, the fool-proof device for the pipeline provided in the embodiment of the present invention is not limited to the inner diameter of the second sleeve 14 being larger than the outer diameter of the first sleeve 13. For example, the inner diameter of the first sleeve 13 may also be larger than the outer diameter of the second sleeve 14. In this case, the first groove 131 in the first groove 131 and the second groove 141 with matched radial dimensions can be sleeved on the outside of the second groove 141, and the first sleeve 13 can be sleeved on the outside of the second sleeve 14 by sleeves of the first groove 131 and the second groove 141 with matched radial dimensions, while the first groove 131 and the second groove 141 with non-matched radial dimensions cannot be sleeved on each other, and the first sleeve 13 cannot be sleeved on the outside of the second sleeve 14 by the first groove 131 and the second groove 141 with non-matched radial dimensions.

[0052] like Figure 3-Figure 6 As shown, in a preferred embodiment of the present invention, the inner diameter of the second sleeve 14 is larger than the outer diameter of the first sleeve 13, and a first limiting protrusion 132 may be provided on the outer peripheral wall of the first sleeve 13, the first limiting protrusion 132 is annular and arranged along the circumference of the first sleeve 13; a second limiting protrusion 142 may be provided on the inner peripheral wall of the second sleeve 14, the second limiting protrusion 142 is annular and arranged along the circumference of the second sleeve 14; when the first limiting protrusion 132 and the second limiting protrusion 142 are sleeved on the outside of the first sleeve 13, the first sleeve 13 and the second sleeve 14 are mutually clamped and limited in the axial direction.

[0053] In the process of sleeve-mounting the second sleeve 14 on the outside of the first sleeve 13, the first limiting protrusion 132 on the outer peripheral wall of the first sleeve 13 will enter the interior of the second sleeve 14 and gradually approach the second limiting protrusion 142 on the inner peripheral wall of the second sleeve 14. Since the first sleeve 13 and the second sleeve 14 can be made of engineering materials with a certain elasticity, and the first limiting protrusion 132 and the second limiting protrusion 142 can also be made of engineering materials with a certain elasticity, therefore, when the first limiting protrusion 132 approaches to fit with the second limiting protrusion 142, by applying relative forces to the first sleeve 13 and the second sleeve 14, the first limiting protrusion 132 and the second limiting protrusion 142 can be squeezed against each other to generate elasticity. The elastic deformation of the first limiting protrusion 132 and the second limiting protrusion 142 disappears and returns to the state before the elastic deformation, so that the first limiting protrusion 132 and the second limiting protrusion 142 can be mutually engaged and limited in the axial direction of the first sleeve 13 and the second sleeve 14, and in the direction of separation of the first sleeve 13 and the second sleeve 14, thereby engaging and limiting the first sleeve 13 and the second sleeve 14 to prevent the first sleeve 13 and the second sleeve 14 from separating and falling off, so as to have strong reliability and facilitate subsequent inspection.

[0054] However, the fool-proof device for the pipeline provided in the embodiment of the present invention is not limited to the inner diameter of the second sleeve 14 being larger than the outer diameter of the first sleeve 13. For example, the inner diameter of the first sleeve 13 may be larger than the outer diameter of the second sleeve 14. In this case, the first limiting protrusion 132 which is annular and arranged along the circumference of the first sleeve 13 is arranged on the inner circumferential wall of the first sleeve 13, and the second limiting protrusion 142 which is annular and arranged along the circumference of the second sleeve 14 is arranged on the outer circumferential wall of the second sleeve 14.

[0055] like Figure 1 and Figure 5 As shown, in a preferred embodiment of the present invention, the first pipe fitting 11 may include a first pipe segment 111 and a first joint 112, the second pipe fitting 12 may include a second pipe segment 121 and a second joint 122, one end of the first pipe segment 111 is connected to the first joint 112, one end of the second pipe segment 121 is connected to the second joint 122, the first joint 112 and the second joint 122 are detachably connected, the first sleeve 13 may be sleeved on the first pipe segment 111, the first joint 112, or between the first pipe segment 111 and the first joint 112, and the second sleeve 14 may be sleeved on the second pipe segment 121, the second joint 122, or between the second pipe segment 121 and the second joint 122.

[0056] By connecting the first joint 112 with the second joint 122, the first pipe segment 111 and the second pipe segment 121 can be connected, and by disassembling the first joint 112 and the second joint 122, the first pipe segment 111 and the second pipe segment 121 can be disassembled. In other words, the detachable connection between the first pipe fitting 11 and the second pipe fitting 12 can be achieved through the detachable connection between the first joint 112 and the second joint 122.

[0057] Optionally, the first connector 112 may include a first quick connector, and the second connector 122 may include a second quick connector. The first quick connector and the second quick connector may be quickly disassembled manually by a staff member without the aid of tools.

[0058] like Figure 5 and Figure 7 As shown, in a preferred embodiment of the present invention, an end portion of the first pipe segment 111 connected to the first joint 112 may have a step surface 1113 facing the first joint 112, and one end of the first sleeve 13 may be provided with a first clamping portion 133, the first clamping portion 133 is annular, and has a first through hole 1331, the radial dimension of the first through hole 1331 is larger than the radial dimension of the end portion of the first pipe segment 111 connected to the first joint 112, and smaller than the radial dimension of the step surface 1113 and the maximum radial dimension of the first joint 112, so that the first clamping portion 133 can be clamped between the step surface 1113 and the first joint 112 when the first joint 112 is connected to one end of the first pipe segment 111.

[0059] By providing a first clamping portion 133 at one end of the first sleeve 13, and making the radial dimension of the first through hole 1331 of the first clamping portion 133 larger than the radial dimension of the end portion of the first pipe segment 111 connected to the first joint 112, the end portion of the first pipe segment 111 connected to the first joint 112 can pass through the first through hole 1331, so that the first sleeve 13 can be sleeved on the end portion of the first pipe segment 111 connected to the first joint 112. By making the radial dimension of the first through hole 1331 of the first clamping portion 133 smaller than the radial dimension of the step surface 1113, the step surface 1113 cannot pass through the first through hole 1331, so that the step surface 1113 can block the first clamping portion 133 from one side of the first clamping portion 133. By making the radial dimension of the first through hole 1331 of the first clamping portion 133 smaller than the maximum radial dimension of the first joint 112, the maximum radial portion of the first joint 112 cannot pass through the second through hole, so that the maximum radial portion of the first joint 112 can block the first clamping portion 133 from the other side of the first clamping portion 133, so that the step surface 1113 and the maximum radial portion of the first joint 112 can block the first clamping portion 133 from both sides of the first clamping portion 133 respectively, and then when the first joint 112 is connected to one end of the first pipe section 111, the first clamping portion 133 can be clamped between the step surface 1113 and the first joint 112, so as to prevent the first sleeve 13 from falling off the first pipe fitting 11, thereby having stronger reliability.

[0060] like Figure 1 , Figure 5 and Figure 7 As shown, optionally, an end portion of the first pipe segment 111 connected to the first joint 112 includes a first pipe portion 1111 and a second pipe portion 1112, the second pipe portion 1112 is connected to one end of the first pipe portion 1111, the second pipe portion 1112 is connected to the first joint 112, and a radial dimension of the first pipe portion 1111 is greater than a radial dimension of the second pipe portion 1112, so that an end face of the first pipe portion 1111 connected to the second pipe portion 1112, a portion larger than the second pipe portion 1112, can serve as a step surface 1113 of an end portion of the first pipe segment 111 connected to the first joint 112, and the step surface 1113 faces the first joint 112.

[0061] like Figure 5 and Figure 8 As shown, in a preferred embodiment of the present invention, a second clamping portion 143 may be provided at one end of the second sleeve 14. The second clamping portion 143 is annular and has a second through hole. The radial dimension of the second through hole is larger than the radial dimension of the second pipe section 121 and smaller than the maximum radial dimension of the second joint 122, so that the second clamping portion 143 can be clamped by the second joint 122.

[0062] By providing a second clamping portion 143 at one end of the second sleeve 14 and making the radial dimension of the second through hole of the second clamping portion 143 larger than the radial dimension of the second pipe segment 121, the second pipe segment 121 can pass through the second through hole, so that the second sleeve 14 can be sleeved on the second pipe segment 121. By making the radial dimension of the second through hole of the second clamping portion 143 smaller than the radial dimension of the second joint 122, the maximum radial portion of the second joint 122 cannot pass through the second through hole, so that the maximum radial portion of the second joint 122 can block the second clamping portion 143 from one side of the second clamping portion 143, thereby preventing the second sleeve 14 from falling off from one side of the second joint 122. Since the length of the second pipe segment 121 is relatively long, the second sleeve 14 generally does not fall off from one side of the second pipe segment 121, thereby having strong reliability.

[0063] In a preferred embodiment of the present invention, the first foolproof part and the second foolproof part that are arranged in a coordinated manner with structural features may have the same color feature, and the first foolproof part and the second foolproof part that are arranged in a non-coordinated manner with structural features may have different color features.

[0064] In this way, in practical applications, after the first pipe fitting 11 and the second pipe fitting 12 are connected, the color characteristics of the first foolproof piece on the first pipe fitting 11 and the color characteristics of the second foolproof piece on the second pipe fitting 12 can be observed first. If the color characteristics of the first foolproof piece on the first pipe fitting 11 and the color characteristics of the second foolproof piece on the second pipe fitting 12 are the same, the first foolproof piece on the first pipe fitting 11 and the second foolproof piece on the second pipe fitting 12 can be assembled. If the first foolproof piece on the first pipe fitting 11 and the second foolproof piece on the second pipe fitting 12 can be assembled, it can be judged that the first pipe fitting 11 is connected to the second pipe fitting 12. If the color feature of the first anti-foolproofing piece on the first pipe fitting 11 is different from the color feature of the second anti-foolproofing piece on the second pipe fitting 12, it can be determined that the first pipe fitting 11 and the second pipe fitting 12 are incorrectly connected, and there is no need to assemble the first anti-foolproofing piece on the first pipe fitting 11 and the second anti-foolproofing piece on the second pipe fitting 12, it can be determined that the first pipe fitting 11 and the second pipe fitting 12 are incorrectly connected, thereby making it easier to determine whether the pipeline is incorrectly connected, improving the efficiency of determining whether the pipeline is incorrectly connected, and further improving the efficiency of correctly connecting the pipelines.

[0065] Furthermore, after the first pipe fitting 11 and the second pipe fitting 12 are correctly connected, when checking the connection between the first pipe fitting 11 and the second pipe fitting 12, the connection between the first pipe fitting 11 and the second pipe fitting 12 can be checked by observing the color characteristics of the first anti-foolproofing piece and the color characteristics of the second anti-foolproofing piece, making it very convenient to check the connection between the first pipe fitting 11 and the second pipe fitting.

[0066] Optionally, the color feature may include a single color or a combination of multiple colors.

[0067] Optionally, when the first pipe member 11 and the second pipe member 12 are made of engineering plastics, they can be colored by adding color additives.

[0068] like Figure 3 and Figure 4 As shown, in a preferred embodiment of the present invention, the first foolproof part and the second foolproof part with matched structural features can have the same identification feature 15, and the first foolproof part and the second foolproof part with non-matched structural features can have different identification features 15.

[0069] In this way, in practical applications, after the first pipe fitting 11 and the second pipe fitting 12 are connected, the identification feature 15 of the first foolproof part on the first pipe fitting 11 and the identification feature 15 of the second foolproof part on the second pipe fitting 12 can be observed first. If the identification feature 15 of the first foolproof part on the first pipe fitting 11 is the same as the identification feature 15 of the second foolproof part on the second pipe fitting 12, the first foolproof part on the first pipe fitting 11 and the second foolproof part on the second pipe fitting 12 can be assembled. If the first foolproof part on the first pipe fitting 11 and the second foolproof part on the second pipe fitting 12 can be assembled, it can be determined that the first foolproof part on the first pipe fitting 11 and the second foolproof part on the second pipe fitting 12 can be assembled. A pipe fitting 11 and a second pipe fitting 12 are correctly connected. If the identification feature 15 of the first anti-foolproofing piece on the first pipe fitting 11 is different from the identification feature 15 of the second anti-foolproofing piece on the second pipe fitting 12, it can be determined that the first pipe fitting 11 and the second pipe fitting 12 are incorrectly connected. Therefore, there is no need to assemble the first anti-foolproofing piece on the first pipe fitting 11 and the second anti-foolproofing piece on the second pipe fitting 12, and it can be determined that the first pipe fitting 11 and the second pipe fitting 12 are incorrectly connected, which makes it easier to determine whether the pipeline is incorrectly connected, improves the efficiency of determining whether the pipeline is incorrectly connected, and further improves the efficiency of correctly connecting the pipelines.

[0070] Furthermore, after the first pipe fitting 11 and the second pipe fitting 12 are correctly connected, when checking the connection between the first pipe fitting 11 and the second pipe fitting 12, the connection between the first pipe fitting 11 and the second pipe fitting 12 can be checked by observing the identification feature 15 of the first anti-foolproofing piece and the identification feature 15 of the second anti-foolproofing piece, thereby making it very convenient to check the connection between the first pipe fitting 11 and the second pipe fitting 12.

[0071] In practical applications, optionally, when connecting the first pipe fitting 11 and the second pipe fitting 12, the first joint 112 can be connected to one end of the first pipe segment 111 first, and the second joint 122 can be connected to one end of the second pipe segment 121, and then the first joint 112 and the second joint 122 can be connected. After that, the color characteristics of the first anti-foolproofing piece on the first pipe fitting 11 and the color characteristics of the second anti-foolproofing piece on the second pipe fitting 12 can be observed. If the color characteristics of the first anti-foolproofing piece on the first pipe fitting 11 and the color characteristics of the second anti-foolproofing piece on the second pipe fitting 12 are different, the first pipe fitting 11 and the second pipe fitting 12 are incorrectly connected, and the first pipe fitting 11 or the second pipe fitting 12 needs to be replaced. If the color characteristics of the first anti-foolproofing piece on the first pipe fitting 11 and the color characteristics of the second anti-foolproofing piece on the second pipe fitting 12 are the same, the identification characteristics 15 of the first anti-foolproofing piece on the first pipe fitting 11 and the identification characteristics 16 of the second anti-foolproofing piece on the second pipe fitting 12 can be observed. Identification feature 15. If the identification feature 15 of the first fool-proofing piece on the first pipe fitting 11 is different from the identification feature 15 of the second fool-proofing piece on the second pipe fitting 12, the first pipe fitting 11 and the second pipe fitting 12 are incorrectly connected, and the first pipe fitting 11 or the second pipe fitting 12 needs to be replaced. If the identification feature 15 of the first fool-proofing piece on the first pipe fitting 11 and the identification feature 15 of the second fool-proofing piece on the second pipe fitting 12 are the same, the first fool-proofing piece on the first pipe fitting 11 and the second fool-proofing piece on the second pipe fitting 12 can be assembled. If the first fool-proofing piece on the first pipe fitting 11 and the second fool-proofing piece on the second pipe fitting 12 cannot be assembled, the first pipe fitting 11 and the second pipe fitting 12 are incorrectly connected, and the first pipe fitting 11 or the second pipe fitting 12 needs to be replaced. If the first fool-proofing piece on the first pipe fitting 11 and the second fool-proofing piece on the second pipe fitting 12 can be assembled, the first pipe fitting 11 and the second pipe fitting 12 are correctly connected, thereby realizing the fool-proofing function for the connection of the pipeline.

[0072] like Figure 3 and Figure 4 As shown, in a preferred embodiment of the present invention, the identification feature 15 may include a first mark 151 and a second mark 152, the first mark 151 may include the code of the module to which the first tube 11 and the second tube 12 belong in the semiconductor equipment (for example, a physical vapor deposition chamber, a chemical vapor deposition chamber, a vertical furnace and a horizontal furnace, etc.), and the second mark 152 may include the code of the first tube 11 and the second tube 12 in the module.

[0073] like Figure 3 and Figure 4 As shown, the identification feature 15 can be marked in the form of “XX”, the front “X” can be the first mark 151, and the rear “X” can be the second mark 152.

[0074] Optionally, the second mark 152 may include a code of the first connector 112 and the second connector 122 in the module.

[0075] In a preferred embodiment of the present invention, the material of the first foolproof component and the second foolproof component may include engineering plastics having at least one of the properties of chemical corrosion resistance, high temperature resistance and oxidation resistance.

[0076] In this way, the first anti-foolproofing part and the second anti-foolproofing part can have at least one of the properties of chemical corrosion resistance, high temperature resistance and oxidation resistance, thereby enabling the first anti-foolproofing part and the second anti-foolproofing part to have a wider range of application and a longer service life, thereby further enabling the anti-foolproofing function to have a wider range of application and a longer service life.

[0077] Optionally, the engineering plastic includes polytetrafluoroethylene.

[0078] like Fig. 9 As shown, an embodiment of the present invention further provides a semiconductor device 2, at least one device component of the semiconductor device 2 is connected to a pipeline 28, and at least one pipeline 28 is provided with an anti-fool device as provided in an embodiment of the present invention.

[0079] The semiconductor device 2 provided in an embodiment of the present invention has a fool-proofing device provided in an embodiment of the present invention arranged on at least one of the pipes 28 connecting the device components, thereby having a fool-proofing function for the correct connection of the pipes 28, and the fool-proofing function has strong reliability, a wide range of application, and a long service life.

[0080] like Fig. 9 As shown, a semiconductor vertical furnace is used as an example for explanation. The equipment components may include a furnace body 21, a process chamber 22, a support plate 23, a cooling ring 24, an upper fixing ring 25, a lower fixing ring 26 and a process door 27. The process chamber 22 is arranged in the furnace body 21. The furnace body 21 is used to provide a heat source to heat the process chamber 22. The process chamber 22 is used to provide a process environment for the semiconductor process. The material may be quartz. The support plate 23 is arranged at the bottom of the furnace body 21 and is arranged around the process chamber 22 to support the furnace body 21, fix the process chamber 22, and protect the process chamber 2 2, a cooling ring 24 is arranged at the bottom of the supporting plate 23, an upper fixing ring 25 and a lower fixing ring 26 are respectively located at the upper and lower sides of the bottom of the process chamber 22, and are connected to the bottom of the process chamber 22 for fixing the process chamber 22, and a sealing gasket is arranged between the upper fixing ring 25 and the lower fixing ring 26, and a process door 27 is arranged at the bottom of the process chamber 22 for sealing the opening at the bottom of the process chamber 22; at least one of the cooling ring 24, the upper fixing ring 25, the lower fixing ring 26 and the process door 27 is connected with a pipeline 28, and at least one pipeline 28 is provided with an anti-fool device.

[0081] Optionally, the upper fixing ring 25 may be made of metal.

[0082] Optionally, the lower fixing ring 26 may be made of metal.

[0083] Optionally, the material of the process chamber 22 may be quartz.

[0084] Optionally, the pipeline 28 can be a cooling pipeline, and the pipeline 28 is used to pass coolant into the cooling ring 24, so as to reduce the heat radiated from the furnace body 21 to the equipment components below through the cooling of the cooling ring 24. The upper fixing ring 25 and the lower fixing ring 26 fix the process chamber 22 by bolts, and the sealing gasket between the upper fixing ring 25 and the lower fixing ring 26 is used to seal and protect the quartz of the process chamber 22. The pipeline 28 can be a cooling pipeline, and the pipeline 28 is used to pass coolant into the upper fixing ring 25 and the lower fixing ring 26 respectively to cool the sealing gasket, so as to prevent the sealing gasket from melting due to heat and affecting the semiconductor process. The process gate 27 is provided with heat-sensitive devices, and the pipeline 28 can be a cooling pipeline, and the pipeline 28 is used to pass coolant into the process gate 27 to cool the process gate 27.

[0085] The semiconductor vertical furnace has four pipelines 28, and since the semiconductor vertical furnace has a compact structure and high space utilization requirements, and in order to facilitate the disassembly and maintenance of each pipeline 28, each pipeline 28 can be disassembled into two pipe sections, which requires eight joints for connection. If the fool-proofing device provided in the embodiment of the present invention is not used, connection errors are very likely to occur. The fool-proofing device provided in the embodiment of the present invention is used. Since the fool-proofing device of the pipeline provided in the embodiment of the present invention has a fool-proofing function, it can avoid incorrect connection of the pipeline 28, and the fool-proofing function has strong reliability, a wide range of application, and a long service life.

[0086] In summary, the fool-proof device for pipelines and the semiconductor device 2 provided in the embodiments of the present invention have a fool-proof function for pipeline connections, thereby avoiding incorrect connections of pipelines, and the fool-proof function has strong reliability, a wide range of applications, and a long service life.

[0087] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A semiconductor device, characterized in that: The equipment components of the semiconductor equipment are connected with pipelines, and the equipment components include a furnace body, a process chamber, a support plate, a cooling ring, an upper fixing ring, a lower fixing ring and a process door, wherein at least two of the cooling ring, the upper fixing ring, the lower fixing ring and the process door are connected with the pipelines; The pipeline includes a first pipe and a second pipe that are detachably connected. A foolproof device is provided on the pipeline. The foolproof device includes a first foolproof part and a second foolproof part. The first foolproof part is provided on the first pipe, and the second foolproof part is provided on the second pipe. The structural features of the first foolproof part are matched with the structural features of the second foolproof part of the second pipe correspondingly connected to the first pipe, but are not matched with the structural features of the second foolproof part of the second pipe not correspondingly connected to the first pipe; The first foolproof part and the second foolproof part with matching structural features can be assembled and have the same color feature and identification feature, while the first foolproof part and the second foolproof part with non-matching structural features cannot be assembled, so that whether the first foolproof part and the second foolproof part can be assembled can be used to determine whether the first pipe and the second pipe are connected correspondingly; The first foolproof member includes a first sleeve, and the second foolproof member includes a second sleeve. The inner diameter of one of the first sleeve and the second sleeve is larger than the outer diameter of the other sleeve. The first sleeve is sleeved on the first pipe. A first groove is provided on the inner circumferential wall or the outer circumferential wall of the first sleeve, and the extension direction of the first groove is parallel to the axial direction of the first sleeve. The second sleeve is sleeved on the second pipe, and a second groove is provided on the inner circumferential wall or the outer circumferential wall of the second sleeve, and the extension direction of the second groove is parallel to the axial direction of the second sleeve; The radial dimension of the first groove is matched with the radial dimension of the second groove of the second sleeve of the second pipe correspondingly connected to the first pipe, and is not matched with the radial dimension of the second groove of the second sleeve of the second pipe not correspondingly connected to the first pipe; The first sleeve and the second sleeve can be sleeved by the sleeve of the first groove and the second groove which are arranged with matching radial dimensions, but cannot be sleeved by the first groove and the second groove which are arranged with non-matching radial dimensions.

2. The semiconductor device according to claim 1, wherein: The inner diameter of the second sleeve is greater than the outer diameter of the first sleeve. A first limiting protrusion is arranged on the outer peripheral wall of the first sleeve. The first limiting protrusion is annular and arranged along the circumference of the first sleeve. A second limiting convex portion is arranged on the inner peripheral wall of the second sleeve, the second limiting convex portion is annular and arranged along the circumference of the second sleeve; When the second sleeve is sleeved on the outside of the first sleeve, the first limiting protrusion and the second limiting protrusion are mutually engaged and limited in the axial direction of the first sleeve and the second sleeve.

3. The semiconductor device according to claim 1, wherein: The first pipe fitting includes a first pipe section and a first joint, the second pipe fitting includes a second pipe section and a second joint, one end of the first pipe section is connected to the first joint, one end of the second pipe section is connected to the second joint, the first joint and the second joint are detachably connected, the first sleeve is sleeved on the first pipe section, the first joint or between the first pipe section and the first joint, and the second sleeve is sleeved on the second pipe section, the second joint or between the second pipe section and the second joint.

4. The semiconductor device according to claim 3, characterized in that One end of the first pipe section connected to the first joint has a step surface facing the first joint, and one end of the first sleeve is provided with a first clamping portion, the first clamping portion is annular and has a first through hole, the radial dimension of the first through hole is larger than the radial dimension of the end of the first pipe section connected to the first joint, and smaller than the radial dimension of the step surface and the maximum radial dimension of the first joint, so that the first clamping portion can be clamped between the step surface and the first joint when the first joint is connected to one end of the first pipe section.

5. The semiconductor device according to claim 3, wherein: A second clamping portion is provided at one end of the second sleeve. The second clamping portion is annular and has a second through hole. The radial dimension of the second through hole is larger than the radial dimension of the second pipe section and smaller than the maximum radial dimension of the second joint, so that the second clamping portion can be clamped by the second joint.

6. The semiconductor device according to claim 1, wherein: The identification feature includes a first mark and a second mark, the first mark includes a code of a module to which the first pipe and the second pipe belong, and the second mark includes a code of the first pipe and the second pipe in the module.

7. The semiconductor device according to claim 1, wherein: The material of the first foolproof part and the second foolproof part includes engineering plastics having at least one of the properties of chemical corrosion resistance, high temperature resistance and oxidation resistance.

8. The semiconductor device according to any one of claims 1 to 7, characterized in that: The process chamber is arranged in the furnace body, and the furnace body is used to provide a heat source to heat the process chamber. The process chamber is used to provide a process environment. The support plate is arranged at the bottom of the furnace body and is arranged around the process chamber to support the furnace body, fix the process chamber, and protect the equipment components under the process chamber. The cooling ring is arranged at the bottom of the support plate. The upper fixing ring and the lower fixing ring are respectively located at the upper and lower sides of the bottom of the process chamber and are connected to the bottom of the process chamber to fix the process chamber. A sealing gasket is arranged between the upper fixing ring and the lower fixing ring. The process door is arranged at the bottom of the process chamber to seal the opening at the bottom of the process chamber.

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