Motor heat dissipation structure and linear motor of die bonding equipment

Abstract

The present invention discloses a motor heat dissipation structure of a die-bonding device, comprising an air inlet channel and an air outlet channel arranged relatively to each other in the upper and lower parts, wherein the air inlet channel is used to introduce the low-temperature airflow outside the linear motor into the interior of the linear motor, and comprises a first air inlet, a high-pressure cavity and a first air outlet connected in sequence; the air outlet channel is used to guide the high-temperature airflow inside the linear motor out to the exterior of the linear motor, and comprises a second air inlet, a flow guide cavity and a second air outlet connected in sequence; wherein the first air outlet and the second air inlet face the same direction. The motor heat dissipation structure is used to dissipate heat from the linear motor. The present invention also provides a linear motor, comprising the above-mentioned motor heat dissipation structure.

Description

Technical Field

[0001] The invention relates to wafer bonding equipment, and in particular to a motor heat dissipation structure and a linear motor of the wafer bonding equipment. Background Art

[0002] When bonding wafers, it is necessary to drive the bonding head to rise and fall and translate to move it to the appropriate height and position to pick up and carry the wafers. Currently, bonding equipment generally uses three linear motors to drive the bonding head to move at high speed in the horizontal, longitudinal and vertical directions. During the high-speed movement, a lot of heat is generated inside the linear motor, causing the temperature of the linear motor to rise, which affects the working performance. Summary of the invention

[0003] In order to solve the above-mentioned deficiencies in the prior art, the present invention provides a motor heat dissipation structure for dissipating heat from a linear motor.

[0004] The present invention also provides a linear motor, comprising the above-mentioned motor heat dissipation structure.

[0005] The technical problem to be solved by the present invention is achieved through the following technical solutions:

[0006] A motor heat dissipation structure of a die bonding device is used to dissipate heat for a linear motor, comprising an air inlet channel and an air outlet channel arranged opposite to each other up and down, wherein

[0007] The air inlet channel is used to introduce the low-temperature airflow outside the linear motor into the interior of the linear motor, and includes a first air inlet, a high-pressure cavity and a first air outlet which are connected in sequence;

[0008] The air outlet channel is used to guide the high-temperature airflow inside the linear motor to the outside of the linear motor, and includes a second air inlet, a flow guide cavity and a second air outlet that are connected in sequence;

[0009] Wherein, the first air outlet and the second air inlet face the same direction.

[0010] Furthermore, the high-pressure chamber includes an air inlet connecting chamber, a high-pressure connecting chamber and an air outlet connecting chamber, the first air inlet is connected to the air inlet connecting chamber, the first air outlet is connected to the air outlet connecting chamber, and the high-pressure connecting chamber is connected between the air inlet connecting chamber and the air outlet connecting chamber; the air inlet connecting chamber and the air outlet connecting chamber are both oriented left and right, and their positions are staggered along the up and down directions and the left and right directions.

[0011] Furthermore, the caliber of the high-pressure communicating chamber is larger than the calibers of the air inlet communicating chamber and the air outlet communicating chamber.

[0012] Furthermore, a plurality of buffer grooves are provided in the high-pressure connecting cavity.

[0013] Furthermore, the cross section of the high-pressure connecting chamber is a right-angled trapezoid, and a stepped structure is formed on the trapezoidal slope through the buffer groove, so that the diameter of the high-pressure connecting chamber gradually increases and then gradually decreases along the airflow direction.

[0014] Furthermore, a surface of the flow-guiding cavity facing the air inlet passage is a flow-guiding slope, and the flow-guiding slope is inclined toward the direction of the first air outlet.

[0015] Furthermore, the second air inlet is larger than the second air outlet, so that the diameter of the flow guiding cavity gradually decreases from an end communicating with the second air inlet to an end communicating with the second air outlet.

[0016] A linear motor of a crystal bonding device comprises a first fixed plate, a second fixed plate, a stator and a mover, wherein the first fixed plate and the second fixed plate are arranged opposite to each other, the stator and the mover are arranged between the first fixed plate and the second fixed plate, and the stator is used to drive the mover to move in a straight line; it is characterized in that, there are two of the above-mentioned motor heat dissipation structures, the two motor heat dissipation structures are arranged between the first fixed plate and the second fixed plate, and the stator is located between the two motor heat dissipation structures; the first air inlet and the first air outlet of the two motor heat dissipation structures are both facing the mover, the first air inlet of one motor heat dissipation structure is facing the upper surface of the mover, and the second air outlet is facing the lower surface of the mover, and the first air inlet of the other motor heat dissipation structure is facing the lower surface of the mover, and the second air outlet is facing the upper surface of the mover.

[0017] Furthermore, it also includes a first guide member and a second guide member, which are arranged between the first fixed plate and the second fixed plate, and the mover is located between the first guide member and the second guide member; a guide groove extending along the moving direction of the mover is provided on a side of the first guide member facing the mover, and a guide hole extending along the moving direction of the mover is provided on the second guide member, one end of the mover extends into the guide groove of the first guide member, and the other end passes through the guide hole of the second guide member and extends out of the first fixed plate and the second fixed plate.

[0018] Furthermore, the stator is provided with an electromagnetic coil, and the mover is provided with a magnet, or the stator is provided with a magnet, and the mover is provided with an electromagnetic coil.

[0019] The present invention has the following beneficial effects: when the motor heat dissipation structure dissipates heat for the linear motor, the air inlet channel is responsible for introducing the low-temperature airflow outside the linear motor into the linear motor to absorb the heat generated by the linear motor during operation, and the low-temperature airflow introduced into the linear motor is converted into high-temperature airflow after absorbing the heat, and the air outlet channel is responsible for exporting the high-temperature airflow outside the linear motor to the outside of the linear motor to reduce the internal temperature of the linear motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the structure of the motor heat dissipation structure provided by the present invention;

[0021] Figure 2 A cross-sectional schematic diagram of the motor heat dissipation structure provided by the present invention;

[0022] Figure 3 A schematic diagram of the structure of the linear motor provided by the present invention;

[0023] Figure 4 This is a schematic diagram of heat dissipation of the linear motor provided by the present invention. DETAILED DESCRIPTION

[0024] The present invention is described in detail below in conjunction with the accompanying drawings and embodiments, examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0025] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0026] In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second", and "third" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0027] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix", "set" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] Embodiment 1

[0029] like Figure 1 and 2 As shown, a motor heat dissipation structure 5 of a die bonding device is used to dissipate heat for a linear motor, and includes an air inlet channel 51 and an air outlet channel 52 arranged opposite to each other up and down, wherein

[0030] The air inlet channel 51 is used to introduce the low-temperature airflow outside the linear motor into the inside of the linear motor, and includes a first air inlet 511, a high-pressure cavity 512 and a first air outlet 513 which are connected in sequence;

[0031] The air outlet channel 52 is used to guide the high-temperature airflow inside the linear motor to the outside of the linear motor, and includes a second air inlet 521, a flow guide cavity 522 and a second air outlet 523 that are connected in sequence;

[0032] The first air outlet 513 and the second air inlet 521 face the same direction.

[0033] The motor heat dissipation structure 5 is provided with an air inlet channel 51 and an air outlet channel 52. When the linear motor is cooled, the air inlet channel 51 is responsible for introducing the low-temperature airflow outside the linear motor into the linear motor to absorb the heat generated by the linear motor during operation. The low-temperature airflow introduced into the linear motor is converted into high-temperature airflow after absorbing the heat, and the air outlet channel 52 is responsible for exporting the high-temperature airflow inside the linear motor to the outside of the linear motor to reduce the internal temperature of the linear motor.

[0034] The low-temperature airflow and high-temperature airflow in this patent are relative concepts and have no specific numerical requirements, as long as the temperature of the low-temperature airflow is greater than the temperature of the high-temperature airflow.

[0035] The high-pressure chamber 512 includes an air inlet connecting chamber 5121, a high-pressure connecting chamber 5122 and an air outlet connecting chamber 5123. The first air inlet 511 is connected to the air inlet connecting chamber 5121, the first air outlet 513 is connected to the air outlet connecting chamber 5123, and the high-pressure connecting chamber 5122 is connected between the air inlet connecting chamber 5121 and the air outlet connecting chamber 5123; the air inlet connecting chamber 5121 and the air outlet connecting chamber 5123 are both in left-right directions, and the high-pressure connecting chamber 5122 is in up-down and left-right directions.

[0036] Since the air inlet connecting chamber 5121 and the air outlet connecting chamber 5123 are both oriented to the left and right, and are staggered in the up-down direction and the left-right direction, the high-pressure connecting chamber 5122 forms a corner at the connection with the air inlet connecting chamber 5121 and the air outlet connecting chamber 5123, respectively, and the low-temperature airflow flows in the left-right direction in the air inlet connecting chamber 5121 and the air outlet connecting chamber 5123, and flows in the up-down direction and the left-right direction in the high-pressure connecting chamber 5122, that is, the low-temperature airflow flows at least in the high-pressure connecting chamber 5122 and the air inlet connecting chamber 5123. There is a bend at the connection of the through cavity 5121 and the connection between the high-pressure connecting cavity 5122 and the air outlet connecting cavity 5123. The bend obstructs the low-temperature airflow and reduces the flow rate. According to Bernoulli's theorem, the sum of the static pressure and the dynamic pressure of the low-temperature airflow remains unchanged, and the reduction in flow rate will cause the dynamic pressure of the low-temperature airflow to decrease, while the static pressure of the low-temperature airflow increases. The low-temperature airflow accumulates energy inside the high-pressure connecting cavity 5122, and the internal high pressure increases the flow rate of the low-temperature airflow when it is ejected from the first air outlet 513, further improving the heat dissipation effect.

[0037] In this embodiment, the two connecting corners are both 90°, that is, the high-pressure connecting chamber 5122 is perpendicular to the air inlet connecting chamber 5121 and the air outlet connecting chamber 5123 .

[0038] In this embodiment, there are two high-pressure connecting chambers 5122, one high-pressure connecting chamber 5122 is connected between the left end of the air inlet connecting chamber 5121 and the left end of the air outlet connecting chamber 5123, and the other high-pressure connecting chamber 5122 is connected between the right end of the air inlet connecting chamber 5121 and the right end of the air outlet connecting chamber 5123.

[0039] The caliber of the high-pressure connecting chamber 5122 is larger than the calibers of the air inlet connecting chamber 5121 and the air outlet connecting chamber 5123. When the low-temperature airflow enters the large-caliber high-pressure connecting chamber 5122 from the smaller-caliber air inlet connecting chamber 5121, the flow rate will decrease, and the static pressure of the low-temperature airflow will further increase to accumulate energy. When the airflow enters the small-caliber air outlet connecting chamber 5123 from the larger-caliber high-pressure connecting chamber 5122, the static pressure of the low-temperature airflow is converted into the dynamic pressure of the low-temperature airflow, thereby increasing the flow rate of the low-temperature airflow when it is ejected from the first air outlet 513.

[0040] Preferably, a plurality of buffer grooves 5124 are provided in the high-pressure connecting cavity 5122 to increase the complexity of the cavity and further achieve the purpose of buffering the low-temperature airflow and increasing the static pressure.

[0041] In this embodiment, the cross-section of the high-pressure connecting chamber 5122 is roughly a right-angled trapezoid, and a stepped structure 5125 is formed on its trapezoidal inclined surface 5221 through the buffer groove 5124, so that the diameter of the high-pressure connecting chamber 5122 gradually increases and then gradually decreases along the airflow direction.

[0042] There are two first air inlets 511 , which are arranged opposite to each other on the left and right sides and are respectively connected to the left and right ends of the air inlet communicating cavity 5121 .

[0043] There is at least one first air outlet 513 , and each first air outlet 513 is arranged or arranged left and right; the side surface of the air outlet communication cavity 5123 is connected to each first air outlet 513 .

[0044] Specifically, the number of the first air outlet 513 may be only one, which is a long strip air outlet, and the long strip air outlet runs along the left and right. Alternatively, there may be multiple first air outlets 513, which are short strip air outlets, and each short strip air outlet runs and is arranged along the left and right. Alternatively, there may be multiple first air outlets 513, which are non-directional circular air outlets or square air outlets, and each circular air outlet or square air outlet is arranged along the left and right.

[0045] A side of the flow guiding cavity 522 facing the air inlet channel 51 is a flow guiding slope 5221 , and the flow guiding slope 5221 is inclined toward the direction of the first air outlet 513 .

[0046] The second air inlet 521 is larger than the second air outlet 523 , so that the diameter of the flow guiding cavity 522 gradually decreases from an end communicating with the second air inlet 521 to an end communicating with the second air outlet 523 .

[0047] In this embodiment, the air outlet channel 52 is a groove, which is formed by the concave surface of one side of the motor heat dissipation structure 5, and the side facing away from the air inlet channel 51 is an open structure. At the same time, the motor heat dissipation structure 5 is provided with protruding surfaces 5223 on the left and right ends of the air outlet channel 52 respectively.

[0048] The air outlet channel 52 extends in the left-right direction to increase the channel width.

[0049] Embodiment 2

[0050] like Figure 3 and 4 As shown, a linear motor of a crystal bonding device includes a first fixed plate 1, a second fixed plate 2, a stator 3 and a mover 4, wherein the first fixed plate 1 and the second fixed plate 2 are arranged opposite to each other, the stator 3 and the mover 4 are arranged between the first fixed plate 1 and the second fixed plate 2, and the stator 3 is used to drive the mover 4 to move in a straight line; and two motor heat dissipation structures 5 described in Example 1, the two motor heat dissipation structures 5 are arranged between the first fixed plate 1 and the second fixed plate 2, and the stator 3 is located between the two motor heat dissipation structures 5; the first air inlet 511 and the first air outlet 513 of the two motor heat dissipation structures 5 are both facing the mover 4, wherein the first air inlet 511 of one motor heat dissipation structure 5 is facing the upper surface of the mover 4, and the second air outlet 523 is facing the lower surface of the mover 4, and the first air inlet 511 of the other motor heat dissipation structure 5 is facing the lower surface of the mover 4, and the second air outlet 523 is facing the upper surface of the mover 4.

[0051] The linear motor is configured with a motor heat dissipation structure 5 outside each of the two ends of the mover 4. During heat dissipation, the first air inlets 511 of the two motor heat dissipation structures 5 are connected to a compressed air source to obtain low-temperature airflows respectively. Two low-temperature airflows are respectively introduced from the first air outlets 513 of the two motor heat dissipation structures 5 to the upper and lower surfaces of the mover 4 to take away the heat generated by the mover 4 and then converted into two high-temperature airflows. The heat enters the second air inlet 521 of the other motor heat dissipation structure 5 and is finally discharged from the second air outlet 523 of the other motor heat dissipation structure 5, thereby avoiding mutual interference between the two heat dissipation airflows inside the motor.

[0052] The first fixing plate 1 is arranged on the protruding surface 5223 of one of the motor heat dissipation structures 5 to enclose the open side of the air outlet channel 52 of the motor heat dissipation structure 5 to form a complete air outlet channel 52, and the second fixing plate 2 is arranged on the protruding surface 5223 of the other motor heat dissipation structure 5 to enclose the open side of the air outlet channel 52 of the motor heat dissipation structure 5 to form a complete air outlet channel 52.

[0053] A heat dissipation channel is formed between the first fixed plate 1 and the mover 4, another heat dissipation channel is formed between the second fixed plate 2 and the mover 4, and the first air outlet 513 of one motor heat dissipation structure 5 and the second air inlet 521 of another motor heat dissipation structure 5 correspond to a heat dissipation channel, so as to be respectively responsible for the low-temperature airflow introduction and high-temperature airflow discharge of the heat dissipation channel.

[0054] The linear motor also includes a first guide member 6 and a second guide member 7, which are arranged between the first fixed plate 1 and the second fixed plate 2, and the mover 4 is located between the first guide member 6 and the second guide member 7; the first guide member 6 is provided with a guide groove 61 extending along the moving direction of the mover 4 on one surface facing the mover 4, and the second guide member 7 is provided with a guide hole 71 extending along the moving direction of the mover 4, one end of the mover 4 extends into the guide groove 61 of the first guide member 6, and the other end passes through the guide hole 71 of the second guide member 7 and extends out of the first fixed plate 1 and the second fixed plate 2.

[0055] In this embodiment, the stator 3 is provided with an electromagnetic coil, and the mover 4 is provided with a magnet, or vice versa, the stator 3 is provided with a magnet, and the mover 4 is provided with an electromagnetic coil, so as to achieve linear movement based on electromagnetic drive.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the embodiments of the present invention rather than to limit them. Although the embodiments of the present invention have been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the embodiments of the present invention can still be modified or replaced by equivalents, and these modifications or equivalent replacements cannot cause the modified technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A motor heat dissipation structure of a die bonding device, characterized in that: It is used to dissipate heat for the linear motor, including an air inlet channel and an air outlet channel arranged opposite to each other up and down, wherein The air inlet channel is used to introduce the low-temperature airflow outside the linear motor into the interior of the linear motor, and includes a first air inlet, a high-pressure cavity and a first air outlet which are connected in sequence; The air outlet channel is used to guide the high-temperature airflow inside the linear motor to the outside of the linear motor, and includes a second air inlet, a flow guide cavity and a second air outlet that are connected in sequence; Wherein, the first air outlet and the second air inlet face the same direction; The high-pressure cavity body comprises an air inlet connecting cavity, a high-pressure connecting cavity and an air outlet connecting cavity, the first air inlet is connected to the air inlet connecting cavity, the first air outlet is connected to the air outlet connecting cavity, and the high-pressure connecting cavity is connected between the air inlet connecting cavity and the air outlet connecting cavity; the air inlet connecting cavity and the air outlet connecting cavity are both oriented left and right, and their positions are staggered along the up-down direction and the left-right direction; A side of the guide cavity facing the air inlet channel is a guide slope, and the guide slope is inclined toward the direction of the first air outlet; the second air inlet is larger than the second air outlet, so that the diameter of the guide cavity gradually decreases from the end connected to the second air inlet to the end connected to the second air outlet.

2. The motor heat dissipation structure according to claim 1, characterized in that: The caliber of the high-pressure communication chamber is larger than the calibers of the air inlet communication chamber and the air outlet communication chamber.

3. The motor heat dissipation structure according to claim 1, characterized in that: A plurality of buffer grooves are provided in the high-pressure communication chamber.

4. The motor heat dissipation structure according to claim 3, characterized in that: The cross section of the high-pressure communication chamber is a right-angle trapezoid, and a stepped structure is formed on the trapezoidal slope through the buffer groove, so that the diameter of the high-pressure communication chamber gradually increases and then gradually decreases along the airflow direction.

5. A linear motor for a die-bonding device, comprising a first fixed plate, a second fixed plate, a stator and a mover, wherein the first fixed plate and the second fixed plate are arranged opposite to each other, the stator and the mover are arranged between the first fixed plate and the second fixed plate, and the stator is used to drive the mover to move in a straight line; characterized in that: and two motor heat dissipation structures as described in any one of claims 1 to 4, wherein the two motor heat dissipation structures are arranged between the first fixing plate and the second fixing plate, and the stator is located between the two motor heat dissipation structures; The first air inlet and the first air outlet of the two motor heat dissipation structures are both facing the mover, wherein the first air inlet of one motor heat dissipation structure faces the upper surface of the mover, and the second air outlet faces the lower surface of the mover, and the first air inlet of the other motor heat dissipation structure faces the lower surface of the mover, and the second air outlet faces the upper surface of the mover.

6. The linear motor of the die bonding equipment according to claim 5, characterized in that: It also includes a first guide member and a second guide member, which are arranged between the first fixed plate and the second fixed plate, and the mover is located between the first guide member and the second guide member; a guide groove extending along the moving direction of the mover is provided on a side of the first guide member facing the mover, and a guide hole extending along the moving direction of the mover is provided on the second guide member, one end of the mover extends into the guide groove of the first guide member, and the other end passes through the guide hole of the second guide member and extends out of the first fixed plate and the second fixed plate.

7. The linear motor of the die bonding equipment according to claim 6, characterized in that: The stator is provided with an electromagnetic coil, and the mover is provided with a magnet, or the stator is provided with a magnet, and the mover is provided with an electromagnetic coil.

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