This invention relates to the field of
semiconductor processing technology and provides an
environmentally friendly internal
combustion quartz heater for
semiconductor processing, comprising: a base plate, a mixing heating tube fixedly installed on the top of the base plate, a
mixing chamber fixedly installed on one side of the mixing heating tube, the
mixing chamber being internally connected to the mixing heating tube, and an
oxygen pipe provided on one side of the
mixing chamber. In this embodiment of the invention, the temperature after the
hydrogen and
oxygen are mixed and burned can rapidly raise the temperature of the inner and outer walls of the mixing heating tube, which can rapidly raise the temperature of the liquid inside the two mixing heating tubes. Opening the one-way valve allows the liquid inside the two mixing heating tubes to be released through the outlet
pipe. At the same time, when heating inside the mixing heating tube, the
combustion temperature can be controlled by limiting the amount of
oxygen and
hydrogen entering through the oxygen and
hydrogen pipes. A sensor is used to sense the
combustion temperature inside the mixing heating tube, and a display can display the temperature data.